JPH01108925U - - Google Patents
Info
- Publication number
- JPH01108925U JPH01108925U JP401988U JP401988U JPH01108925U JP H01108925 U JPH01108925 U JP H01108925U JP 401988 U JP401988 U JP 401988U JP 401988 U JP401988 U JP 401988U JP H01108925 U JPH01108925 U JP H01108925U
- Authority
- JP
- Japan
- Prior art keywords
- ultraviolet light
- reaction chamber
- gas
- fixing table
- exhaust port
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 claims description 5
- 239000012495 reaction gas Substances 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 2
- 239000007789 gas Substances 0.000 claims 2
- 230000002093 peripheral effect Effects 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP401988U JPH0621234Y2 (ja) | 1988-01-14 | 1988-01-14 | 半導体製造装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP401988U JPH0621234Y2 (ja) | 1988-01-14 | 1988-01-14 | 半導体製造装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01108925U true JPH01108925U (de) | 1989-07-24 |
| JPH0621234Y2 JPH0621234Y2 (ja) | 1994-06-01 |
Family
ID=31206160
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP401988U Expired - Lifetime JPH0621234Y2 (ja) | 1988-01-14 | 1988-01-14 | 半導体製造装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0621234Y2 (de) |
-
1988
- 1988-01-14 JP JP401988U patent/JPH0621234Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0621234Y2 (ja) | 1994-06-01 |
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