JPH01107341A - Recording and reproducing device for electric wire - Google Patents

Recording and reproducing device for electric wire

Info

Publication number
JPH01107341A
JPH01107341A JP26400787A JP26400787A JPH01107341A JP H01107341 A JPH01107341 A JP H01107341A JP 26400787 A JP26400787 A JP 26400787A JP 26400787 A JP26400787 A JP 26400787A JP H01107341 A JPH01107341 A JP H01107341A
Authority
JP
Japan
Prior art keywords
electron beam
recording
beam source
center
track
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP26400787A
Other languages
Japanese (ja)
Inventor
Tomio Yaguchi
富雄 矢口
Hitoshi Ikeda
池田 整
Toshiyuki Aida
会田 敏之
Makoto Suzuki
良 鈴木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP26400787A priority Critical patent/JPH01107341A/en
Publication of JPH01107341A publication Critical patent/JPH01107341A/en
Pending legal-status Critical Current

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  • Optical Recording Or Reproduction (AREA)

Abstract

PURPOSE:To improve an access speed by detecting deviation between the position of an electronic beam source and the center of a track from the jogging of the electronic beam source due to a fine adjusting mechanism and a distance change between the electronic beam source and a recording medium, and returning the electronic beam source onto the center of the track. CONSTITUTION:A signal which is obtained by adding DC component to the output of an oscillator 11 drives a piezo-electric element 7 by using a control circuit 12, a cathode tip 5 is vibrated in a V-groove in the radial direction of the disk 1, a detection circuit 13 fetches the change of a driving voltage in piezo-electric element 6, required for making an electric field radiation current at that time constant. The size of dislocation can be known from the output voltage of the oscillator 11, and the direction of dislocation can be known from correspondence between the differential waveform and the driving waveform of the piezo-electric element 6. A detection circuit 13 detects the deviation between the position of the center of the groove and the center of the vibration of the cathode tip 5 and it is inputted to a control circuit 12 as a tracking single. Thus, the electronic beam source can accurately be positioned at high speed.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、電子線を利用した情報の記録再生装置に係わ
り、特に高密度記録に好適な電子線記録再生装置に関す
る。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an information recording/reproducing apparatus using an electron beam, and particularly to an electron beam recording/reproducing apparatus suitable for high-density recording.

〔従来の技術〕[Conventional technology]

電子線記録再生装置の一つとして、記録媒体を回転する
ディスクとした記録再生方式は、記録媒体の交換ができ
、また原理的に大容量の記録が可能であるので近年注目
を集めている。この方式は、磁気ディスクや光ディスク
と同様な方式である。
As one type of electron beam recording/reproducing apparatus, a recording/reproducing method using a rotating disk as a recording medium has been attracting attention in recent years because the recording medium can be exchanged and, in principle, large-capacity recording is possible. This method is similar to magnetic disks and optical disks.

しかし、電子線を用いる場合にはその高い収束性を有効
に活用するために記録再生の際の位置決めの方法、つま
りトラッキングの方式がより重要になる。トラッキング
方式としては、この記録トラックからの散乱電子を利用
する方式が特開昭60−29953に提案されている。
However, when using an electron beam, the positioning method during recording and reproduction, that is, the tracking method, becomes more important in order to effectively utilize its high convergence. As a tracking method, a method using scattered electrons from the recording track has been proposed in Japanese Patent Laid-Open No. 60-29953.

この方式は、電子ビームが記録用ディスクに照射される
位置の近傍にトラックを挟んで少なくとも2個の二次電
子線などの検出手段を設け、この手段の出力を比較し、
トラッキングする方式である。
In this method, at least two detection means such as secondary electron beams are installed with a track in between near the position where the electron beam is irradiated onto the recording disk, and the outputs of these means are compared.
This is a tracking method.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

上記従来技術は、二次電子などの検出のために専用の検
出器を設置しなければならないという点については配慮
されておらず、可動の電子線源をディスクの半径方向に
移動させるようにした記録再生方式に用いるときは、可
動部分である記録再生ヘッドが重くなり、アクセス速度
が遅くなるという問題点があった。
The above conventional technology does not consider the need to install a dedicated detector to detect secondary electrons, etc., and instead moves a movable electron beam source in the radial direction of the disk. When used in a recording/reproducing system, there is a problem in that the recording/reproducing head, which is a movable part, becomes heavy and the access speed becomes slow.

本発明の目的は、正確にトラッキングを行うことができ
、かつアクセス速度が遅くならない電子線記録再生装置
を提供することにある。
SUMMARY OF THE INVENTION An object of the present invention is to provide an electron beam recording and reproducing apparatus that can perform accurate tracking and that does not slow down access speed.

〔問題点を解決するための手段〕[Means for solving problems]

上記目的は、電子ビームを記録する凸状又は溝状のトラ
ックが刻まれた記録媒体と、該記録媒体に電子線を照射
する電子線源とを有する電子線記録再生装置において、
上記トラックに実質的に記録面内で直角方向に上記電子
線源を微動させる微動機構と、上記電子線源と上記記録
媒体との距離を検出する検出手段とを有し、上記微動機
構による上記電子線源の微動と、該微動により生じる上
記電子線源と上記記録媒体との距離変化から、上記電子
線源の位置と上記トラックの中心とのずれを検出し、上
記電子線源をトラックの中心上に引き戻すための手段を
有することを特徴とする電子線記録再生装置によって達
成される。
The above object is to provide an electron beam recording and reproducing apparatus having a recording medium having convex or groove-shaped tracks for recording an electron beam, and an electron beam source for irradiating the recording medium with an electron beam.
a fine movement mechanism for finely moving the electron beam source in a direction perpendicular to the track substantially within a recording surface; and a detection means for detecting a distance between the electron beam source and the recording medium; The shift between the position of the electron beam source and the center of the track is detected from the slight movement of the electron beam source and the distance change between the electron beam source and the recording medium caused by the slight movement, and the electron beam source is moved to the center of the track. This is achieved by an electron beam recording/reproducing device characterized in that it has means for pulling back onto the center.

上記の微動機構はどのようなものであってもよい。例え
ば、電子線源の横に圧電素子を付け、この圧電素子駆動
電圧を変化させることにより、電子線源を微動させる方
法でよい。微動の方向は、記録媒体がディスクであり、
トラックが同心円状又は渦巻き状の形状であるときは、
その半径方向である。微動は、トラックの幅以下である
ことが電子銃の位置と溝の中心上の位置とのずれが容易
に判定できるので好ましい。トラックは溝であっても凸
部であってもよいが、記録によりトラックの形状が変化
する場合1例えばトラックに穴が形成される場合は、ト
ラックが溝である方が好ましい。電子線記録では種々の
記録方法があり、記録部材の形状を変化させる場合のほ
か、その材質を部分的に変化させる場合もあり、このよ
うな場合にはトラックは溝であっても凸部であってもよ
い。
The fine movement mechanism described above may be of any type. For example, a method may be used in which a piezoelectric element is attached next to the electron beam source and the electron beam source is slightly moved by changing the driving voltage of the piezoelectric element. The direction of the microtremor is determined by the fact that the recording medium is a disk and
When the track has a concentric or spiral shape,
Its radial direction. It is preferable that the fine movement be less than or equal to the width of the track because the deviation between the position of the electron gun and the position on the center of the groove can be easily determined. The track may be a groove or a convex portion, but if the shape of the track changes due to recording, for example, if a hole is formed in the track, it is preferable that the track be a groove. There are various recording methods in electron beam recording, and in addition to changing the shape of the recording member, there are also cases where the material is partially changed. In such cases, the track may be a groove or a convex part. There may be.

電子線源と記録媒体との距離は、どのような方法で測定
してもよい。例えば、電子銃から弱い電界放射電流を流
し、この電流から上記距離を知ることができる。
The distance between the electron beam source and the recording medium may be measured by any method. For example, a weak field emission current is passed from an electron gun, and the distance can be determined from this current.

〔作用〕[Effect]

電子線を用いた記録再生装置において、専用の検出器を
用いることなく、記録媒体上の所望の位置に電子線源を
高速かつ正確に位置づけることができる。これにより、
微細な記録ピットでも確実な記録再生ができるようにな
る。
In a recording/reproducing apparatus using an electron beam, an electron beam source can be positioned at a desired position on a recording medium quickly and accurately without using a dedicated detector. This results in
Reliable recording and playback is possible even with minute recording pits.

〔実施例〕〔Example〕

以下、本発明の一実施例を第1図により説明する。 An embodiment of the present invention will be described below with reference to FIG.

第1図においてディスク1は幅0.3p深さ0.1−の
V型のトラック溝2を加工しである直径6インチのへの
円板である。このディスク上には、厚さ0.1−のニト
ロセルロース膜3と20n mのAu膜4からなる記録
膜が形成されている。このディスクに対向している陰極
ティップ5は、O,1mmのW線を電界研摩して作成し
たものであり、圧電素子6によりディスク面と垂直方向
に、圧電素子7によりディスクの半径方向にそれぞれ最
大5pの範囲で動かすことが可能である。圧電素子7は
トラッキング動作のための微動用であり、トラック選択
のための粗動機構としてはこれらの記録再生ヘッド全体
を駆動する機構を別に持っている。
In FIG. 1, a disk 1 has a diameter of 6 inches and has a V-shaped track groove 2 having a width of 0.3 mm and a depth of 0.1 mm. A recording film consisting of a nitrocellulose film 3 with a thickness of 0.1 nm and an Au film 4 with a thickness of 20 nm is formed on this disk. The cathode tip 5 facing this disk is made by electric field polishing a W wire of 0.1 mm, and is made by piezoelectric element 6 in the direction perpendicular to the disk surface and piezoelectric element 7 in the radial direction of the disk. It is possible to move within a maximum range of 5p. The piezoelectric element 7 is used for fine movement for tracking operation, and a separate mechanism for driving the entire recording/reproducing head is provided as a coarse movement mechanism for track selection.

陰極ティップとディスクの距離を0.5溝程度に近づけ
ると、印加電圧が低電圧であっても陰極ティップ先端に
は高電界が発生し距離に応じた電界放射電流が得られる
。電界放射電流は、抵抗8を流れて抵抗の両端に電位差
を生じる。この電位差を検出し、増幅器9により増幅し
た後、サーボ回路10で設定電圧と比較する。この結果
に従って圧電素子6を駆動して、電界放射電流が一定と
なるように陰極ティップとディスクの距離を調節する。
When the distance between the cathode tip and the disk is brought closer to about 0.5 groove, a high electric field is generated at the tip of the cathode tip even if the applied voltage is low, and a field emission current corresponding to the distance can be obtained. The field emission current flows through the resistor 8 and creates a potential difference across the resistor. After this potential difference is detected and amplified by the amplifier 9, the servo circuit 10 compares it with a set voltage. According to this result, the piezoelectric element 6 is driven to adjust the distance between the cathode tip and the disk so that the field emission current is constant.

さらに、発振器11の出力に直流成分を加えた信号によ
り制御回路12を用いて圧電素子7を駆動し、陰極ティ
ップをV溝内でディスクの半径方向に幅0.1/7II
lで記録ピットの周期よりも長い周期で振動させた。こ
の時の電界放射電流を一定にするために必要な圧電素子
6の駆動電圧の変化は発振器11の出力に同期している
ので、これを検出回路13により取り出している。溝中
心上に陰極ティップが来た場合に圧電素子6の駆動電圧
は極大となる。
Furthermore, the control circuit 12 is used to drive the piezoelectric element 7 using a signal obtained by adding a DC component to the output of the oscillator 11, and the cathode tip is moved in the V-groove to a width of 0.1/7II in the radial direction of the disk.
vibrated at a period longer than the period of the recording pit. Since the change in the drive voltage of the piezoelectric element 6 necessary to keep the field emission current constant at this time is synchronized with the output of the oscillator 11, this change is extracted by the detection circuit 13. When the cathode tip is located above the center of the groove, the driving voltage of the piezoelectric element 6 becomes maximum.

また、発振器11の出力電圧からずれの大きさが分かり
、この微分波形と圧電素子6の駆動波形の対応からずれ
の方向が分かる。これらより、この溝中心の位置と陰極
ティップの振動の中心とのずれを検出回路13により検
出してトラッキング信号として制御回路に入力している
。これにより、陰極ティップとV#のずれを常に±50
n m以内にすることができた。
Further, the magnitude of the deviation can be determined from the output voltage of the oscillator 11, and the direction of the deviation can be determined from the correspondence between this differential waveform and the driving waveform of the piezoelectric element 6. From these, the deviation between the position of the groove center and the center of vibration of the cathode tip is detected by the detection circuit 13 and inputted as a tracking signal to the control circuit. This ensures that the deviation between the cathode tip and V# is always ±50.
It was possible to make it within nm.

これらの動作における圧電素子6および7の駆動電圧の
変化を第2図に示す。第2図(a)(b)は、陰極ティ
ップがトラック溝の中心上にある(トラッキングがかか
っている)場合、第2図(c)(d)は両者がずれてい
る(トラッキングがはずれている)場合である。このト
ラッキング動作をするために記録再生にかかわらず常に
陰極に電圧を印加して1nAの電界放射電流を流してい
るが、この電流では記録膜が損傷を受けることはなかっ
た。
FIG. 2 shows changes in the drive voltages of the piezoelectric elements 6 and 7 during these operations. Figures 2 (a) and (b) show that the cathode tip is on the center of the track groove (tracking is applied), while Figures 2 (c) and (d) show that both are misaligned (tracking is off). This is the case. In order to perform this tracking operation, a voltage is always applied to the cathode and a field emission current of 1 nA is caused to flow regardless of recording or reproduction, but this current did not damage the recording film.

読み出し時に、ニトロセルロース膜が消失した記録ピッ
トがあると、膜の厚さだけ陰極ティップとディスクの距
離が増えたことになり電界放射電流が減少する。この電
流変化は陰極ティップとディスクの間の距離変化やトラ
ッキング信号の変化に比較して高い周波数成分を持つた
め、バイパスフィルタにより分離することができ、電界
放射電流の変化としてピットの有無を検出することがで
きた。書き込みとしては、陰極印加電圧としてさらに幅
1μ秒のパルス電圧を重畳して印加し、およそ100n
Aの電流を流したところ、ニトロセルロースが消失して
記録媒体に直径0.2岬のピットを形成することができ
た。
During readout, if there are recording pits where the nitrocellulose film has disappeared, the distance between the cathode tip and the disk increases by the thickness of the film, and the field emission current decreases. Since this current change has a higher frequency component than the distance change between the cathode tip and the disk or the change in the tracking signal, it can be separated using a bypass filter, and the presence or absence of pits can be detected as a change in the field emission current. I was able to do that. For writing, a pulse voltage with a width of 1 μsec is further superimposed and applied as the cathode applied voltage, and a pulse voltage of about 100 nm is applied.
When a current of A was applied, the nitrocellulose disappeared and pits with a diameter of 0.2 cape were formed on the recording medium.

〔発明の効果〕〔Effect of the invention〕

本発明により、アクセス速度を犠牲にすることなく、記
録媒体上の所望の位置における直径0.2−のピットを
正確に記録再生することができるようになった。
According to the present invention, it has become possible to accurately record and reproduce pits with a diameter of 0.2 - at a desired position on a recording medium without sacrificing access speed.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の一実施例の電子線記録再生装置の概略
図、第2図はトラッキング動作に関する圧電素子駆動電
圧変化を示す図である。 1・・・ディスク     2・・・トラック溝3・・
・ニトロセルロース膜 4・・・Au膜       5・・・陰極ティップ6
・・・距離調整用圧電素子 7・・・トラッキング用圧電素子 8・・・抵抗       9・・・増幅器10・・・
サーボ回路    11・・・発振器12・・・トラッ
キング制御回路 13・・・検出回路 代理人弁理士  中 村 純之助 第2図 に)(C) 吟!!!1              時開(b) 
    (d)
FIG. 1 is a schematic diagram of an electron beam recording/reproducing apparatus according to an embodiment of the present invention, and FIG. 2 is a diagram showing changes in piezoelectric element driving voltage related to tracking operation. 1...Disc 2...Track groove 3...
・Nitrocellulose membrane 4...Au membrane 5...Cathode tip 6
... Distance adjustment piezoelectric element 7 ... Tracking piezoelectric element 8 ... Resistor 9 ... Amplifier 10 ...
Servo circuit 11... Oscillator 12... Tracking control circuit 13... Detection circuit Patent attorney Junnosuke Nakamura (See Figure 2) (C) Gin! ! ! 1 hour open (b)
(d)

Claims (1)

【特許請求の範囲】 1、電子ビームを記録する凸状又は溝状のトラックが刻
まれた記録媒体と、該記録媒体に電子線を照射する電子
線源とを有する電子線記録再生装置において、上記トラ
ックに実質的に記録面内で直角方向に上記電子線源を微
動させる微動機構と、上記電子線源と上記記録媒体との
距離を検出する検出手段とを有し、上記微動機構による
上記電子線源の微動と、該微動により生じる上記電子線
源と上記記録媒体との距離変化から、上記電子線源の位
置と上記トラックの中心とのずれを検出し、上記電子線
源をトラックの中心上に引き戻すための手段を有するこ
とを特徴とする電子線記録再生装置。 2、上記記録媒体は、ディスクであり、上記トラックは
同心円状又は渦巻き状に形成されていることを特徴とす
る特許請求の範囲第1項記載の電子線記録再生装置。 3、上記微動機構は、上記電子線源の横に付けられた圧
電素子である特許請求の範囲第1項記載の電子線記録再
生装置。 4、上記検出手段は読出し電流用のエミッション電流を
用いて距離変化を検出する手段である特許請求の範囲第
1項記載の電子線記録再生装置。
[Scope of Claims] 1. An electron beam recording and reproducing apparatus having a recording medium having convex or groove-shaped tracks for recording an electron beam, and an electron beam source for irradiating the recording medium with an electron beam, a fine movement mechanism for finely moving the electron beam source in a direction perpendicular to the track substantially within a recording surface; and a detection means for detecting a distance between the electron beam source and the recording medium; The shift between the position of the electron beam source and the center of the track is detected from the slight movement of the electron beam source and the distance change between the electron beam source and the recording medium caused by the slight movement, and the electron beam source is moved to the center of the track. An electron beam recording/reproducing device characterized by having means for pulling back onto the center. 2. The electron beam recording and reproducing apparatus according to claim 1, wherein the recording medium is a disk, and the tracks are formed concentrically or spirally. 3. The electron beam recording and reproducing apparatus according to claim 1, wherein the fine movement mechanism is a piezoelectric element attached to the side of the electron beam source. 4. The electron beam recording and reproducing apparatus according to claim 1, wherein the detecting means is means for detecting a change in distance using an emission current for a read current.
JP26400787A 1987-10-21 1987-10-21 Recording and reproducing device for electric wire Pending JPH01107341A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26400787A JPH01107341A (en) 1987-10-21 1987-10-21 Recording and reproducing device for electric wire

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26400787A JPH01107341A (en) 1987-10-21 1987-10-21 Recording and reproducing device for electric wire

Publications (1)

Publication Number Publication Date
JPH01107341A true JPH01107341A (en) 1989-04-25

Family

ID=17397252

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26400787A Pending JPH01107341A (en) 1987-10-21 1987-10-21 Recording and reproducing device for electric wire

Country Status (1)

Country Link
JP (1) JPH01107341A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5199021A (en) * 1990-04-18 1993-03-30 Canon Kabushiki Kaisha Method of access to recording medium, and apparatus and method for processing information
US5255259A (en) * 1990-04-18 1993-10-19 Canon Kabushiki Kaisha Method of access to recording medium, and apparatus and method for processing information
US5282191A (en) * 1991-06-11 1994-01-25 Canon Kabushiki Kaisha Information reproducing method and information reproducing apparatus which uses the method
US5446720A (en) * 1990-03-09 1995-08-29 Canon Kabushiki Kaisha Information recording method and apparatus recording two or more changes in topographical and electrical states
US5526334A (en) * 1992-12-24 1996-06-11 Canon Kabushiki Kaisha Information processing apparatus with multiple probes and method therefor
US5581364A (en) * 1991-03-06 1996-12-03 Canon Kabushiki Kaisha Method for recording and/or reproducing image signals and an apparatus therefor utilizing two dimensional scanning of a recording medium by a probe
US6195313B1 (en) 1997-08-29 2001-02-27 Canon Kabushiki Kaisha Tracking mechanism and method using probes for information recording/reproducing apparatus

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5446720A (en) * 1990-03-09 1995-08-29 Canon Kabushiki Kaisha Information recording method and apparatus recording two or more changes in topographical and electrical states
US5199021A (en) * 1990-04-18 1993-03-30 Canon Kabushiki Kaisha Method of access to recording medium, and apparatus and method for processing information
US5255259A (en) * 1990-04-18 1993-10-19 Canon Kabushiki Kaisha Method of access to recording medium, and apparatus and method for processing information
US5581364A (en) * 1991-03-06 1996-12-03 Canon Kabushiki Kaisha Method for recording and/or reproducing image signals and an apparatus therefor utilizing two dimensional scanning of a recording medium by a probe
US5282191A (en) * 1991-06-11 1994-01-25 Canon Kabushiki Kaisha Information reproducing method and information reproducing apparatus which uses the method
US5526334A (en) * 1992-12-24 1996-06-11 Canon Kabushiki Kaisha Information processing apparatus with multiple probes and method therefor
US6195313B1 (en) 1997-08-29 2001-02-27 Canon Kabushiki Kaisha Tracking mechanism and method using probes for information recording/reproducing apparatus

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