JPH01106565U - - Google Patents

Info

Publication number
JPH01106565U
JPH01106565U JP49288U JP49288U JPH01106565U JP H01106565 U JPH01106565 U JP H01106565U JP 49288 U JP49288 U JP 49288U JP 49288 U JP49288 U JP 49288U JP H01106565 U JPH01106565 U JP H01106565U
Authority
JP
Japan
Prior art keywords
plate
substrate
ejected
gas
plasma cvd
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP49288U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP49288U priority Critical patent/JPH01106565U/ja
Publication of JPH01106565U publication Critical patent/JPH01106565U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP49288U 1988-01-06 1988-01-06 Pending JPH01106565U (US08063081-20111122-C00044.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP49288U JPH01106565U (US08063081-20111122-C00044.png) 1988-01-06 1988-01-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP49288U JPH01106565U (US08063081-20111122-C00044.png) 1988-01-06 1988-01-06

Publications (1)

Publication Number Publication Date
JPH01106565U true JPH01106565U (US08063081-20111122-C00044.png) 1989-07-18

Family

ID=31199567

Family Applications (1)

Application Number Title Priority Date Filing Date
JP49288U Pending JPH01106565U (US08063081-20111122-C00044.png) 1988-01-06 1988-01-06

Country Status (1)

Country Link
JP (1) JPH01106565U (US08063081-20111122-C00044.png)

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