JPH01106563U - - Google Patents
Info
- Publication number
- JPH01106563U JPH01106563U JP20127487U JP20127487U JPH01106563U JP H01106563 U JPH01106563 U JP H01106563U JP 20127487 U JP20127487 U JP 20127487U JP 20127487 U JP20127487 U JP 20127487U JP H01106563 U JPH01106563 U JP H01106563U
- Authority
- JP
- Japan
- Prior art keywords
- holding member
- separation
- driving means
- thermal cvd
- driving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20127487U JPH0616921Y2 (ja) | 1987-12-29 | 1987-12-29 | 熱ｃｖｄ装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20127487U JPH0616921Y2 (ja) | 1987-12-29 | 1987-12-29 | 熱ｃｖｄ装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01106563U true JPH01106563U (enExample) | 1989-07-18 |
| JPH0616921Y2 JPH0616921Y2 (ja) | 1994-05-02 |
Family
ID=31491644
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20127487U Expired - Lifetime JPH0616921Y2 (ja) | 1987-12-29 | 1987-12-29 | 熱ｃｖｄ装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0616921Y2 (enExample) |
-
1987
- 1987-12-29 JP JP20127487U patent/JPH0616921Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0616921Y2 (ja) | 1994-05-02 |