JPH01104733U - - Google Patents

Info

Publication number

JPH01104733U

JPH01104733U JP41288U JP41288U JPH01104733U JP H01104733 U JPH01104733 U JP H01104733U JP 41288 U JP41288 U JP 41288U JP 41288 U JP41288 U JP 41288U JP H01104733 U JPH01104733 U JP H01104733U

Authority

JP

Japan

Prior art keywords

protective film

integrated circuit

expose

heat dissipation

utility

Prior art date

1988-01-05

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 230000001681 protective effect Effects 0.000 claims description 3
• 230000017525 heat dissipation Effects 0.000 claims 1
• 239000002184 metal Substances 0.000 claims 1
• 239000000758 substrate Substances 0.000 description 3
• 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
• 229920005591 polysilicon Polymers 0.000 description 2