JPH01104725U - - Google Patents
Info
- Publication number
- JPH01104725U JPH01104725U JP20022687U JP20022687U JPH01104725U JP H01104725 U JPH01104725 U JP H01104725U JP 20022687 U JP20022687 U JP 20022687U JP 20022687 U JP20022687 U JP 20022687U JP H01104725 U JPH01104725 U JP H01104725U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- plate
- counter according
- detection
- wafer counter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 claims description 7
- 230000001105 regulatory effect Effects 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 3
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20022687U JPH0617298Y2 (ja) | 1987-12-29 | 1987-12-29 | ウエハカウンタ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20022687U JPH0617298Y2 (ja) | 1987-12-29 | 1987-12-29 | ウエハカウンタ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01104725U true JPH01104725U (sl) | 1989-07-14 |
| JPH0617298Y2 JPH0617298Y2 (ja) | 1994-05-02 |
Family
ID=31490645
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20022687U Expired - Lifetime JPH0617298Y2 (ja) | 1987-12-29 | 1987-12-29 | ウエハカウンタ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0617298Y2 (sl) |
-
1987
- 1987-12-29 JP JP20022687U patent/JPH0617298Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0617298Y2 (ja) | 1994-05-02 |
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