JPH01104724U - - Google Patents
Info
- Publication number
- JPH01104724U JPH01104724U JP20119187U JP20119187U JPH01104724U JP H01104724 U JPH01104724 U JP H01104724U JP 20119187 U JP20119187 U JP 20119187U JP 20119187 U JP20119187 U JP 20119187U JP H01104724 U JPH01104724 U JP H01104724U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- positioning lever
- taken out
- storage case
- sputtering apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004544 sputter deposition Methods 0.000 claims description 6
- 230000037431 insertion Effects 0.000 claims description 2
- 238000003780 insertion Methods 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 11
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20119187U JPH0536273Y2 (en)) | 1987-12-28 | 1987-12-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20119187U JPH0536273Y2 (en)) | 1987-12-28 | 1987-12-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01104724U true JPH01104724U (en)) | 1989-07-14 |
| JPH0536273Y2 JPH0536273Y2 (en)) | 1993-09-14 |
Family
ID=31491563
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20119187U Expired - Lifetime JPH0536273Y2 (en)) | 1987-12-28 | 1987-12-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0536273Y2 (en)) |
-
1987
- 1987-12-28 JP JP20119187U patent/JPH0536273Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0536273Y2 (en)) | 1993-09-14 |