JPH01104724U - - Google Patents

Info

Publication number
JPH01104724U
JPH01104724U JP20119187U JP20119187U JPH01104724U JP H01104724 U JPH01104724 U JP H01104724U JP 20119187 U JP20119187 U JP 20119187U JP 20119187 U JP20119187 U JP 20119187U JP H01104724 U JPH01104724 U JP H01104724U
Authority
JP
Japan
Prior art keywords
wafer
positioning lever
taken out
storage case
sputtering apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP20119187U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0536273Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP20119187U priority Critical patent/JPH0536273Y2/ja
Publication of JPH01104724U publication Critical patent/JPH01104724U/ja
Application granted granted Critical
Publication of JPH0536273Y2 publication Critical patent/JPH0536273Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP20119187U 1987-12-28 1987-12-28 Expired - Lifetime JPH0536273Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20119187U JPH0536273Y2 (enrdf_load_stackoverflow) 1987-12-28 1987-12-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20119187U JPH0536273Y2 (enrdf_load_stackoverflow) 1987-12-28 1987-12-28

Publications (2)

Publication Number Publication Date
JPH01104724U true JPH01104724U (enrdf_load_stackoverflow) 1989-07-14
JPH0536273Y2 JPH0536273Y2 (enrdf_load_stackoverflow) 1993-09-14

Family

ID=31491563

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20119187U Expired - Lifetime JPH0536273Y2 (enrdf_load_stackoverflow) 1987-12-28 1987-12-28

Country Status (1)

Country Link
JP (1) JPH0536273Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0536273Y2 (enrdf_load_stackoverflow) 1993-09-14

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