JPH01104636U - - Google Patents

Info

Publication number
JPH01104636U
JPH01104636U JP20143287U JP20143287U JPH01104636U JP H01104636 U JPH01104636 U JP H01104636U JP 20143287 U JP20143287 U JP 20143287U JP 20143287 U JP20143287 U JP 20143287U JP H01104636 U JPH01104636 U JP H01104636U
Authority
JP
Japan
Prior art keywords
base
elastic body
substrate
presses
holding device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP20143287U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP20143287U priority Critical patent/JPH01104636U/ja
Publication of JPH01104636U publication Critical patent/JPH01104636U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP20143287U 1987-12-29 1987-12-29 Pending JPH01104636U (US07534539-20090519-C00280.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20143287U JPH01104636U (US07534539-20090519-C00280.png) 1987-12-29 1987-12-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20143287U JPH01104636U (US07534539-20090519-C00280.png) 1987-12-29 1987-12-29

Publications (1)

Publication Number Publication Date
JPH01104636U true JPH01104636U (US07534539-20090519-C00280.png) 1989-07-14

Family

ID=31491791

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20143287U Pending JPH01104636U (US07534539-20090519-C00280.png) 1987-12-29 1987-12-29

Country Status (1)

Country Link
JP (1) JPH01104636U (US07534539-20090519-C00280.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10177964A (ja) * 1996-12-18 1998-06-30 Shin Etsu Chem Co Ltd イオン注入機用プラテン

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10177964A (ja) * 1996-12-18 1998-06-30 Shin Etsu Chem Co Ltd イオン注入機用プラテン

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