JPH01104507U - - Google Patents

Info

Publication number

JPH01104507U

JPH01104507U JP20039487U JP20039487U JPH01104507U JP H01104507 U JPH01104507 U JP H01104507U JP 20039487 U JP20039487 U JP 20039487U JP 20039487 U JP20039487 U JP 20039487U JP H01104507 U JPH01104507 U JP H01104507U

Authority

JP

Japan

Prior art keywords

light

optical system

measured

light projection

light source

Prior art date

1987-12-29

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 230000003287 optical effect Effects 0.000 claims description 3
• 238000001514 detection method Methods 0.000 claims 1
• 239000004065 semiconductor Substances 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 2
• 238000006073 displacement reaction Methods 0.000 description 2
• 238000005259 measurement Methods 0.000 description 1

Cited By (1)