JPH01103913U - - Google Patents
Info
- Publication number
- JPH01103913U JPH01103913U JP19798087U JP19798087U JPH01103913U JP H01103913 U JPH01103913 U JP H01103913U JP 19798087 U JP19798087 U JP 19798087U JP 19798087 U JP19798087 U JP 19798087U JP H01103913 U JPH01103913 U JP H01103913U
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric vibrator
- recess
- substrate
- hermetically sealed
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 4
- 239000010409 thin film Substances 0.000 claims description 3
- 238000007789 sealing Methods 0.000 description 1
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19798087U JPH01103913U (da) | 1987-12-26 | 1987-12-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19798087U JPH01103913U (da) | 1987-12-26 | 1987-12-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01103913U true JPH01103913U (da) | 1989-07-13 |
Family
ID=31488508
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19798087U Pending JPH01103913U (da) | 1987-12-26 | 1987-12-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01103913U (da) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012257158A (ja) * | 2011-06-10 | 2012-12-27 | Nippon Dempa Kogyo Co Ltd | 圧電デバイスの製造方法及び圧電デバイス |
-
1987
- 1987-12-26 JP JP19798087U patent/JPH01103913U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012257158A (ja) * | 2011-06-10 | 2012-12-27 | Nippon Dempa Kogyo Co Ltd | 圧電デバイスの製造方法及び圧電デバイス |