JPH01103156U - - Google Patents

Info

Publication number
JPH01103156U
JPH01103156U JP19797887U JP19797887U JPH01103156U JP H01103156 U JPH01103156 U JP H01103156U JP 19797887 U JP19797887 U JP 19797887U JP 19797887 U JP19797887 U JP 19797887U JP H01103156 U JPH01103156 U JP H01103156U
Authority
JP
Japan
Prior art keywords
oven
workpiece
heater
sublimates
thermocouples
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19797887U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19797887U priority Critical patent/JPH01103156U/ja
Publication of JPH01103156U publication Critical patent/JPH01103156U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP19797887U 1987-12-26 1987-12-26 Pending JPH01103156U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19797887U JPH01103156U (enrdf_load_stackoverflow) 1987-12-26 1987-12-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19797887U JPH01103156U (enrdf_load_stackoverflow) 1987-12-26 1987-12-26

Publications (1)

Publication Number Publication Date
JPH01103156U true JPH01103156U (enrdf_load_stackoverflow) 1989-07-12

Family

ID=31488506

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19797887U Pending JPH01103156U (enrdf_load_stackoverflow) 1987-12-26 1987-12-26

Country Status (1)

Country Link
JP (1) JPH01103156U (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5254897A (en) * 1975-10-29 1977-05-04 Hitachi Ltd Plasma ion source for solid materials

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5254897A (en) * 1975-10-29 1977-05-04 Hitachi Ltd Plasma ion source for solid materials

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