JPH01102927U - - Google Patents
Info
- Publication number
- JPH01102927U JPH01102927U JP19581987U JP19581987U JPH01102927U JP H01102927 U JPH01102927 U JP H01102927U JP 19581987 U JP19581987 U JP 19581987U JP 19581987 U JP19581987 U JP 19581987U JP H01102927 U JPH01102927 U JP H01102927U
- Authority
- JP
- Japan
- Prior art keywords
- detection device
- coordinate detection
- substrate
- measured
- cover
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 2
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19581987U JPH01102927U (ro) | 1987-12-25 | 1987-12-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19581987U JPH01102927U (ro) | 1987-12-25 | 1987-12-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01102927U true JPH01102927U (ro) | 1989-07-12 |
Family
ID=31486475
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19581987U Pending JPH01102927U (ro) | 1987-12-25 | 1987-12-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01102927U (ro) |
-
1987
- 1987-12-25 JP JP19581987U patent/JPH01102927U/ja active Pending