JPH01100093U - - Google Patents

Info

Publication number
JPH01100093U
JPH01100093U JP19493387U JP19493387U JPH01100093U JP H01100093 U JPH01100093 U JP H01100093U JP 19493387 U JP19493387 U JP 19493387U JP 19493387 U JP19493387 U JP 19493387U JP H01100093 U JPH01100093 U JP H01100093U
Authority
JP
Japan
Prior art keywords
reaction tube
pillar
clamp
lid
flange
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19493387U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19493387U priority Critical patent/JPH01100093U/ja
Publication of JPH01100093U publication Critical patent/JPH01100093U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP19493387U 1987-12-24 1987-12-24 Pending JPH01100093U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19493387U JPH01100093U (enrdf_load_stackoverflow) 1987-12-24 1987-12-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19493387U JPH01100093U (enrdf_load_stackoverflow) 1987-12-24 1987-12-24

Publications (1)

Publication Number Publication Date
JPH01100093U true JPH01100093U (enrdf_load_stackoverflow) 1989-07-05

Family

ID=31485636

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19493387U Pending JPH01100093U (enrdf_load_stackoverflow) 1987-12-24 1987-12-24

Country Status (1)

Country Link
JP (1) JPH01100093U (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04163917A (ja) * 1990-10-29 1992-06-09 Fujitsu Ltd 半導体の製造装置
JP2008251927A (ja) * 2007-03-30 2008-10-16 Koyo Thermo System Kk 熱処理容器

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04163917A (ja) * 1990-10-29 1992-06-09 Fujitsu Ltd 半導体の製造装置
JP2008251927A (ja) * 2007-03-30 2008-10-16 Koyo Thermo System Kk 熱処理容器

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