JP7816144B2 - Optical waveform measuring device and measuring method - Google Patents
Optical waveform measuring device and measuring methodInfo
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- JP7816144B2 JP7816144B2 JP2022528505A JP2022528505A JP7816144B2 JP 7816144 B2 JP7816144 B2 JP 7816144B2 JP 2022528505 A JP2022528505 A JP 2022528505A JP 2022528505 A JP2022528505 A JP 2022528505A JP 7816144 B2 JP7816144 B2 JP 7816144B2
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
- G01J1/44—Electric circuits
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J11/00—Measuring the characteristics of individual optical pulses or of optical pulse trains
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0227—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using notch filters
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R23/00—Arrangements for measuring frequencies; Arrangements for analysing frequency spectra
- G01R23/16—Spectrum analysis; Fourier analysis
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
- G01J1/44—Electric circuits
- G01J2001/4413—Type
- G01J2001/4426—Type with intensity to frequency or voltage to frequency conversion [IFC or VFC]
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/42—Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry
- G01J3/433—Modulation spectrometry; Derivative spectrometry
- G01J2003/4332—Modulation spectrometry; Derivative spectrometry frequency-modulated
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- Analytical Chemistry (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Description
この発明は、ディスプレイ等の計測対象物の光波形を計測する光波形計測装置及び計測方法に関する。 This invention relates to an optical waveform measuring device and method for measuring the optical waveform of a measurement object such as a display.
一般に、パーソナルコンピュータ等のティスプレイは垂直同期信号（Vsync）の周期で画像を更新するため、垂直同期信号の周期の画面の輝度変動を有している。また、ディスプレイが液晶表示装置（LCD）である場合は、奇数フレームと偶数フレームで極性を入れ替える反転駆動を採用しているため、画面の輝度変動周期はさらに２倍の低周波となる。 Generally, displays on personal computers and other devices update images at the frequency of the vertical synchronization signal (Vsync), resulting in screen brightness fluctuations at the same frequency as the vertical synchronization signal. Furthermore, if the display is a liquid crystal display (LCD), it uses inversion driving, which switches polarity between odd and even frames, so the screen brightness fluctuation frequency is twice as low.
このようなディスプレイの基本性能を計測する光計測器として、例えば、ディスプレイカラーアナライザー(一例としてコニカミノルタ株式会社製のＣＡ－４１０)が知られている。このようなディスプレイカラーアナライザーは、内部に光センサを備え、色や輝度だけでなく、光波形やフリッカを計測することができる。 A well-known example of an optical measuring instrument for measuring the basic performance of such displays is a display color analyzer (one example is the CA-410 manufactured by Konica Minolta, Inc.). Such display color analyzers are equipped with an internal optical sensor and can measure not only color and brightness, but also light waveforms and flicker.
光量の取得には、大きくは２種類の方式、つまり瞬時値を取得する逐次取得方式と、決められた時間の積分値を取得する積分取得方式がある。逐次取得方式は高速性に優れる一方、積分方式は低輝度計測性能に優れる、といった特徴を有する。 There are two main methods for acquiring light intensity: the sequential acquisition method, which acquires instantaneous values, and the integral acquisition method, which acquires the integrated value over a set period of time. The sequential acquisition method excels in speed, while the integral method excels in low-luminance measurement performance.
また、取得波形の特徴を顕在化する手段として、周波数フィルタ処理がある。フィルタ処理は、取得波形に対して、波形を構成する周波数成分毎に所望の重み付けをしている。例えば、ローパスフィルタ（LPF）の場合は、信号周波数に対して高域周波数を減衰させる。これにより、高周波ノイズを低減させることができ、滑らかな信号波形を再現できる。他の例として、フィルタにTCSF（temporal contrast sensitivity function）を用いた場合は、人間の視覚特性に対応した波形を再現できる。 Frequency filtering is another method for revealing the characteristics of acquired waveforms. Filtering assigns a desired weight to each frequency component that makes up the acquired waveform. For example, a low-pass filter (LPF) attenuates high frequencies relative to the signal frequency. This reduces high-frequency noise and reproduces a smooth signal waveform. As another example, using a TCSF (temporal contrast sensitivity function) as a filter can reproduce a waveform that corresponds to the characteristics of human vision.
従来の光波形計測装置では、システムに予め用意された測定期間の波形を取得する、もしくはユーザーが測定点数を入力しその点数に相当する時間の波形を取得している。 Conventional optical waveform measurement devices acquire waveforms over a measurement period that is pre-set in the system, or the user inputs the number of measurement points and acquires waveforms over a period of time corresponding to those points.
取得した波形に対して離散フーリエ変換（DFT）処理を行い、取得波形を周波数スペクトルに変換する。得られた周波数スペクトルに対して、任意の周波数特性を持つフィルタを反映させる。具体的には、周波数毎に乗算することで重み付けを行う。重み付けされた周波数スペクトルを逆フーリエ変換（IDFT）することで、フィルタ処理された波形を取得する。 A discrete Fourier transform (DFT) is performed on the acquired waveform to convert it into a frequency spectrum. A filter with desired frequency characteristics is applied to the obtained frequency spectrum. Specifically, weighting is performed by multiplying each frequency. A filtered waveform is obtained by performing an inverse Fourier transform (IDFT) on the weighted frequency spectrum.
また、離散フーリエ変換、逆フーリエ変換の演算処理を低減させるアルゴリズムとして、高速フーリエ変換が知られている。高速フーリエ変換は、データ数が２のべき乗個のみしか扱えない（データ数＝２ｄ個）、という制約がある。波形取得時の測定点数は、離散フーリエ変換、逆フーリエ変換の演算負荷を低減させるために、測定点数を２のべき乗個にする事が多い。 Fast Fourier transform is also known as an algorithm that reduces the computational processing required for discrete Fourier transforms and inverse Fourier transforms. Fast Fourier transforms are limited in that they can only handle data items that are a power of two (number of data items = 2d). The number of measurement points when acquiring a waveform is often set to a power of two to reduce the computational load of discrete Fourier transforms and inverse Fourier transforms.
なお、特許文献１には、アレイ検出器を備える光計測装置(分光器)において、高速スキャンすることにより測定時間値を決定し、時間的に不連続な照明光源の同期を可能とする技術が開示されている。 Patent document 1 discloses a technology that determines measurement time values by high-speed scanning in an optical measurement device (spectroscope) equipped with an array detector, enabling synchronization of temporally discontinuous illumination light sources.
ここで、測定時間が発光波形の周期（例えばVsync期間）に整合しない場合（整数倍でない場合）は、取得した波形の先端部と後端部の光量値が不一致となる。そのため、周波数スペクトルには測定時間に関連する周波数成分が多数発生してしまう。測定時間に関連する周波数成分とは１／測定時間×ｎ、つまり、測定時間を１周期とする周波数とその高調波である。 If the measurement time does not match the period of the light emission waveform (for example, the Vsync period) (if it is not an integer multiple), the light intensity values at the leading and trailing ends of the acquired waveform will not match. As a result, the frequency spectrum will contain many frequency components related to the measurement time. The frequency components related to the measurement time are 1/measurement time x n, in other words, the frequency with the measurement time as one period and its harmonics.
この周波数スペクトルに対して、フィルタ処理を施すと、フィルタ処理後の波形（重み付け後に逆フーリエ変換）は、波形の先端部と後端部が大きく歪むという問題が発生する。 If filtering is applied to this frequency spectrum, the waveform after filtering (weighting followed by an inverse Fourier transform) will have significant distortion at the leading and trailing ends of the waveform.
この対策として、フィルタ処理後波形の先端および後端を削除する方法が知られているが、この方法では、データの欠落が生じることから、トリガ計測などの場合に必要な時間域の情報を取得できない可能性があり、利便性が良くない。 As a countermeasure to this problem, a method is known in which the leading and trailing ends of the waveform are removed after filtering, but this method results in missing data, which means that it may not be possible to obtain the time domain information required for trigger measurements, etc., and is therefore not very convenient.
別の対策として、データ端部を同一値にする窓関数を用いる方法が開示されている。 この方式では、取得波形に窓関数を乗算し、それを離散フーリエ変換する。その後、重み付けと逆フーリエ変換した波形に対して、窓関数を除算し、フィルタ処理後波形を作成する。 Another solution is to use a window function that makes the data ends have the same value. In this method, the acquired waveform is multiplied by the window function and then subjected to a discrete Fourier transform. The weighted and inverse Fourier transformed waveform is then divided by the window function to create a filtered waveform.
しかしながら、本方法においても、窓関数を除算した際に計測時誤差が拡張されるために、波形が大きく歪むという問題が発生する。 However, even with this method, the measurement error is expanded when dividing the window function, resulting in a problem in which the waveform becomes significantly distorted.
なお、特許文献１には光波形計測についての記述や、光波形計測に関する上記課題についての記述はなく、従って特許文献１を参照しても、上記課題を解決することはできない。 In addition, Patent Document 1 does not describe optical waveform measurement or the above-mentioned issues related to optical waveform measurement, so even if Patent Document 1 is referred to, it is not possible to solve the above-mentioned issues.
この発明は、このような技術的背景に鑑みてなされたものであって、フィルタ処理後の波形の歪みを低減できる光波形計測装置及び計測方法の提供を目的とする。 This invention was made in consideration of this technical background and aims to provide an optical waveform measurement device and measurement method that can reduce waveform distortion after filter processing.
上記目的は以下の手段によって達成される。
（１）計測対象物の光量変動周波数の候補を検出する検出手段と、前記検出手段で検出された光量変動周波数の候補に基づいて光量変動周波数を決定する周波数決定手段と、前記周波数決定手段により決定された光量変動周波数に基づいて、光波形計測の測定条件を決定する測定条件決定手段と、前記測定条件決定手段により決定された測定条件で計測対象物の光波形を取得する取得手段と、前記取得手段により取得した光波形をフィルタ処理するフィルタ処理手段と、を備え、前記測定条件決定手段は、測定時間が前記周波数決定手段により決定された光量変動周波数の周期の整数倍となるサンプリング周波数と測定点数を決定し、周期整合度合いの誤差は、前記光量変動周波数の周期の１／１０以下である、光波形計測装置。
（２）前記検出手段は、光波形計測前の予備測定により光量変動の波形データを取得し、前記波形データをフーリエ変換処理することにより周波数スペクトルデータを取得し、前記周波数スペクトルデータにおいて、強度が隣接周波数よりも大きい特異点となる周波数を基に光量変動周波数の候補を検出する前項１に記載の光波形計測装置。
（３）前記周波数決定手段は、光量変動周波数の候補の中から最小の周波数の候補を光量変動周波数として決定する前項１または前項２に記載の光波形計測装置。
（４）前記検出手段により検出された光量変動周波数の候補の中からいずれかの候補をユーザーが選択可能な選択手段を備え、前記周波数決定手段は、前記選択手段によりユーザーが選択した候補を光量変動周波数として決定する前項１または前項２に記載の光波形計測装置。
（５）前記検出手段は、光波形計測前の予備測定により光量変動の波形データを取得し、前記波形データに対する自己相関法により光量変動周波数の候補を検出する前項１に記載の光波形計測装置。
（６）前記取得手段により取得される光波形の波数は、前記光量変動周波数によって変化する前項１乃至前項５のいずれかに記載の光波形計測装置。
（７）ユーザーが光量変動周波数を入力可能な入力手段を備え、
前記周波数決定手段は、検出手段により検出された光量変動周波数の候補のうち、前記入力手段により入力された光量変動周波数に最も近い候補を光量変動周波数として決定する前項１または２に記載の光波形計測装置。
（８）前記検出手段は、前記周波数スペクトルデータにおいて強度が隣接周波数よりも大きい特異点となる周波数と隣接する周波数の強度を用いた補完により、光量変動周波数の候補を検出する前項２に記載の光波形計測装置。
（９）前記測定点数が２のべき乗個のｍ倍（ｍは整数）であり、測定点数がフィルタ処理前後で異なる前項１乃至前項８のいずれかに記載の光波形計測装置。
（１０）前記フィルタ処理手段によるフィルタ処理前の光波形をｍ個単位で平均化したのちフィルタ処理する前項９に記載の光波形計測装置。
（１１）前記フィルタ処理は、人間の視覚特性に対応したTCSF（temporal contrast sensitivity function）フィルタによる処理であり、
前記フィルタ処理手段は、取得した光波形をフーリエ変換し、得られた周波数スペクトルに対してTCSFフィルタにて周波数毎に重みづけし、重み付けされた周波数スペクトルを逆フーリエ変換する前項１に記載の光波形計測装置。
（１２）計測対象物の光量変動周波数の候補を検出手段が検出する検出ステップと、前記検出ステップで検出された光量変動周波数の候補に基づいて光量変動周波数を周波数決定手段が決定する周波数決定ステップと、前記周波数決定ステップにより決定された光量変動周波数に基づいて、測定条件決定手段が光波形計測の測定条件を決定する測定条件決定ステップと、前記測定条件決定ステップにより決定された測定条件で計測対象物の光波形を取得する取得ステップと、前記取得ステップにより取得した光波形をフィルタ処理するフィルタ処理ステップと、を備え、前記測定条件決定ステップでは、測定時間が前記周波数決定ステップにより決定された光量変動周波数の周期の整数倍となるサンプリング周波数と測定点数を決定し、周期整合度合いの誤差は、前記光量変動周波数の周期の１／１０以下である、光波形計測方法。
（１３）前記検出ステップでは、光波形計測前の予備測定により光量変動の波形データを取得し、前記波形データをフーリエ変換処理することにより周波数スペクトルデータを取得し、前記周波数スペクトルデータにおいて、強度が隣接周波数よりも大きい特異点となる周波数を基に光量変動周波数の候補を検出する前項１２に記載の光波形計測方法。
（１４）前記周波数決定ステップでは、光量変動周波数の候補の中から最小の周波数の候補を光量変動周波数として決定する前項１２または前項１３に記載の光波形計測方法。
（１５）前記周波数決定ステップでは、前記検出ステップにより検出された光量変動周波数の候補の中から、ユーザーが選択手段により選択した候補を光量変動周波数として決定する前項１２または前項１３に記載の光波形計測方法。
（１６）前記検出ステップでは、光波形計測前の予備測定により光量変動の波形データを取得し、前記波形データに対する自己相関法により光量変動周波数の候補を検出する前項１２に記載の光波形計測方法。
（１７）前記取得ステップにより取得される光波形の波数は、前記光量変動周波数によって変化する前項１２乃至前項１６のいずれかに記載の光波形計測方法。
（１８）前記周波数決定ステップでは、検出ステップにより検出された光量変動周波数の候補のうち、ユーザーが入力手段により入力した光量変動周波数に最も近い候補を光量変動周波数として決定する前項１２または１３に記載の光波形計測方法。
（１９）前記検出ステップでは、前記周波数スペクトルデータにおいて強度が隣接周波数よりも大きい特異点となる周波数と隣接する周波数の強度を用いた補完により、光量変動周波数の候補を検出する前項１３に記載の光波形計測方法。
（２０）前記測定点数が２のべき乗個のｍ倍（ｍは整数）であり、測定点数がフィルタ処理前後で異なる前項１２乃至前項１９のいずれかに記載の光波形計測方法。
（２１）前記フィルタ処理ステップによるフィルタ処理前の光波形をｍ個単位で平均化したのちフィルタ処理する前項２０に記載の光波形計測方法。
（２２）前記フィルタ処理は、人間の視覚特性に対応したTCSF（temporal contrast sensitivity function）フィルタによる処理であり、
前記フィルタ処理ステップでは、取得した光波形をフーリエ変換し、得られた周波数スペクトルに対してTCSFフィルタにて周波数毎に重みづけし、重み付けされた周波数スペクトルを逆フーリエ変換する前項１２に記載の光波形計測方法。
The above object can be achieved by the following means:
(1) An optical waveform measuring device comprising: a detection means for detecting candidates for the light intensity fluctuation frequency of a measurement object; a frequency determination means for determining the light intensity fluctuation frequency based on the candidate light intensity fluctuation frequency detected by the detection means; a measurement condition determination means for determining measurement conditions for optical waveform measurement based on the light intensity fluctuation frequency determined by the frequency determination means; an acquisition means for acquiring the optical waveform of the measurement object under the measurement conditions determined by the measurement condition determination means; and a filtering means for filtering the optical waveform acquired by the acquisition means, wherein the measurement condition determination means determines a sampling frequency and the number of measurement points such that the measurement time is an integer multiple of the period of the light intensity fluctuation frequency determined by the frequency determination means, and the error in the degree of period matching is 1/10 or less of the period of the light intensity fluctuation frequency.
(2) An optical waveform measuring device as described in the preceding paragraph 1, wherein the detection means acquires waveform data of light intensity fluctuations by preliminary measurement before measuring the optical waveform, acquires frequency spectrum data by Fourier transforming the waveform data, and detects candidates for light intensity fluctuation frequencies based on frequencies that are singular points in the frequency spectrum data and have greater intensity than adjacent frequencies.
(3) The optical waveform measuring device according to the preceding paragraph 1 or 2, wherein the frequency determining means determines the smallest frequency candidate from among the candidates for the light intensity fluctuation frequency as the light intensity fluctuation frequency.
(4) An optical waveform measuring device as described in paragraph 1 or 2 above, which is provided with a selection means that allows a user to select one of the candidates for the light intensity fluctuation frequency detected by the detection means, and the frequency determination means determines the candidate selected by the user by the selection means as the light intensity fluctuation frequency.
(5) The optical waveform measuring device according to the preceding paragraph 1, wherein the detecting means obtains waveform data of fluctuations in light intensity by preliminary measurement before measuring the optical waveform, and detects candidates for the light intensity fluctuation frequency by an autocorrelation method for the waveform data.
(6) The optical waveform measuring device according to any one of the preceding paragraphs 1 to 5, wherein the wave number of the optical waveform acquired by the acquisition means changes depending on the light intensity fluctuation frequency.
(7 ) An input means is provided that allows a user to input a light intensity fluctuation frequency,
3. The optical waveform measuring device according to claim 1 or 2, wherein the frequency determining means determines, as the light intensity fluctuation frequency, the candidate closest to the light intensity fluctuation frequency input by the input means from among the candidates for the light intensity fluctuation frequency detected by the detection means.
(8 ) An optical waveform measuring device according to the preceding paragraph 2, wherein the detection means detects candidates for light intensity fluctuation frequencies by interpolating using the intensities of frequencies adjacent to a frequency that is a singular point in the frequency spectrum data and whose intensity is greater than that of adjacent frequencies.
(9 ) The optical waveform measuring device according to any one of the preceding paragraphs 1 to 8 , wherein the number of measurement points is m times a power of 2 (m is an integer), and the number of measurement points is different before and after filtering.
(10) The optical waveform measuring device according to the preceding paragraph 9, wherein the optical waveform before filtering by the filtering means is averaged in units of m pieces and then filtered.
(11) The filter processing is processing using a TCSF (temporal contrast sensitivity function) filter corresponding to human visual characteristics,
2. The optical waveform measuring device according to claim 1, wherein the filter processing means performs a Fourier transform on the acquired optical waveform, weights the obtained frequency spectrum for each frequency using a TCSF filter, and performs an inverse Fourier transform on the weighted frequency spectrum.
( 12 ) An optical waveform measurement method comprising: a detection step in which a detection means detects candidates for the light intensity fluctuation frequency of the measurement object; a frequency determination step in which a frequency determination means determines the light intensity fluctuation frequency based on the candidate light intensity fluctuation frequency detected in the detection step; a measurement condition determination step in which a measurement condition determination means determines measurement conditions for optical waveform measurement based on the light intensity fluctuation frequency determined in the frequency determination step; an acquisition step in which an optical waveform of the measurement object is acquired under the measurement conditions determined in the measurement condition determination step; and a filtering step in which the optical waveform acquired in the acquisition step is filtered, wherein in the measurement condition determination step, a sampling frequency and the number of measurement points are determined such that the measurement time is an integer multiple of the period of the light intensity fluctuation frequency determined in the frequency determination step, and the error in the degree of period matching is 1/10 or less of the period of the light intensity fluctuation frequency.
( 13 ) The optical waveform measurement method described in the preceding paragraph 12, wherein in the detection step, waveform data of the light intensity fluctuation is obtained by a preliminary measurement before measuring the optical waveform, frequency spectrum data is obtained by Fourier transform processing of the waveform data, and candidates for the light intensity fluctuation frequency are detected based on frequencies that are singular points in the frequency spectrum data whose intensity is greater than that of adjacent frequencies.
( 14 ) The optical waveform measuring method according to the preceding paragraph 12 or 13 , wherein in the frequency determination step, the smallest frequency candidate from among the candidates for the light intensity fluctuation frequency is determined as the light intensity fluctuation frequency.
( 15 ) An optical waveform measurement method as described in the preceding paragraph 12 or 13 , wherein in the frequency determination step, a candidate selected by a user using a selection means is determined as the light intensity fluctuation frequency from among the candidates of light intensity fluctuation frequencies detected in the detection step.
( 16 ) The optical waveform measurement method described in the preceding paragraph 12 , wherein in the detection step, waveform data of the light intensity fluctuation is obtained by a preliminary measurement before measuring the optical waveform, and candidates for the light intensity fluctuation frequency are detected by an autocorrelation method for the waveform data.
( 17 ) The optical waveform measuring method according to any one of the preceding paragraphs 12 to 16 , wherein the wave number of the optical waveform acquired by the acquisition step varies depending on the light intensity fluctuation frequency.
( 18) An optical waveform measurement method according to the preceding paragraph 12 or 13, wherein in the frequency determination step, the candidate of the light intensity fluctuation frequency detected in the detection step that is closest to the light intensity fluctuation frequency input by the user via the input means is determined as the light intensity fluctuation frequency.
( 19) An optical waveform measurement method according to the preceding paragraph 13, in which the detection step detects candidates for light intensity fluctuation frequencies by interpolating using the intensities of frequencies that are singular points in the frequency spectrum data, where the intensities are greater than those of adjacent frequencies, and the adjacent frequencies.
( 20) The optical waveform measuring method according to any one of the preceding paragraphs 12 to 19 , wherein the number of measurement points is m times a power of 2 (m is an integer), and the number of measurement points is different before and after filtering.
( 21 ) The optical waveform measuring method according to the preceding paragraph 20 , wherein the optical waveforms before filtering in the filtering step are averaged in units of m pieces and then filtered.
(22) The filter processing is processing using a TCSF (temporal contrast sensitivity function) filter corresponding to human visual characteristics,
13. The optical waveform measurement method according to claim 12, wherein the filter processing step performs a Fourier transform on the acquired optical waveform, weights the obtained frequency spectrum for each frequency using a TCSF filter, and performs an inverse Fourier transform on the weighted frequency spectrum.
前項（１）及び（１２）に記載の発明によれば、計測対象物の光量変動周波数の候補を検出するとともに、検出した候補に基づいて光量変動周波数を決定し、決定された光量変動周波数に基づいて、測定時間が前記決定された光量変動周波数の周期の整数倍となるサンプリング周波数と測定点数を決定するから、任意の周波数フィルタ処理を施しても、歪みの無い波形取得が可能となるとともに、計測対象の周波数が既知で無い場合でも、誤差を最小化できる。
According to the inventions described in the preceding paragraphs (1) and ( 12 ), candidates for the light intensity fluctuation frequency of the object to be measured are detected, and the light intensity fluctuation frequency is determined based on the detected candidates. Based on the determined light intensity fluctuation frequency, a sampling frequency and the number of measurement points are determined so that the measurement time is an integer multiple of the period of the determined light intensity fluctuation frequency. Therefore, even if any frequency filter processing is performed, it is possible to obtain a waveform without distortion, and even if the frequency of the object to be measured is not known, errors can be minimized.
また、ＩＥＣ規格（Project No. 62341-6-3, 5.2.1 Flicker https://webstore.iec.ch/publication/31171）に基づくフリッカ指標を正確にかつ容易に導出できる。つまり、ＩＥＣ規格では、TCSFでフィルタ処理した波形に対して、（最大値－最小値）／平均値を計算した値をフリッカ値としているが、本フリッカ値を導出するためには、正確なフィルタ後波形が必要となる。また、平均値の導出には光量変動周期が必要となることから、本発明を用いれば容易に導出できる。 Flicker indices based on the IEC standard (Project No. 62341-6-3, 5.2.1 Flicker https://webstore.iec.ch/publication/31171) can be accurately and easily derived. In other words, the IEC standard defines the flicker value as the value calculated by dividing the average value by the maximum value - minimum value for a waveform filtered by TCSF. To derive this flicker value, an accurate filtered waveform is required. Furthermore, because the light intensity fluctuation period is required to derive the average value, this can be easily derived using this invention.
前項（２）及び（１３）に記載の発明によれば、光波形計測前の予備測定により光量変動の波形データを取得し、波形データをフーリエ変換処理することにより周波数スペクトルデータを取得し、周波数スペクトルデータにおいて、強度が隣接周波数よりも大きい特異点となる周波数を基に光量変動周波数の候補を検出するから、計測対象物の実際の光量変動周波数に対応する候補を検出でき、ひいては精度の高い光量変動周波数を決定することができる。
According to the inventions described in the preceding paragraphs (2) and ( 13 ), waveform data of light intensity fluctuations is obtained by preliminary measurement before measuring the light waveform, and frequency spectrum data is obtained by Fourier transform processing of the waveform data. In the frequency spectrum data, candidate light intensity fluctuation frequencies are detected based on frequencies that are singular points with intensity greater than adjacent frequencies. This makes it possible to detect candidates that correspond to the actual light intensity fluctuation frequencies of the object to be measured, and ultimately to determine light intensity fluctuation frequencies with high accuracy.
前項（３）及び（１４）に記載の発明によれば、光量変動周波数の候補の中から最小の周波数の候補を光量変動周波数として決定するから、光量変動周波数を容易に抽出できる。
According to the inventions described in the preceding paragraphs (3) and ( 14 ), the smallest frequency candidate among the candidates for the light intensity fluctuation frequency is determined as the light intensity fluctuation frequency, so that the light intensity fluctuation frequency can be easily extracted.
前項（４）及び（１５）に記載の発明によれば、検出した光量変動周波数の候補の中からユーザーが選択した候補を光量変動周波数として決定するから、ユーザーが着目している周波数の光波形を高精度で計測することができる。
According to the inventions described in the preceding paragraphs (4) and ( 15 ), the candidate selected by the user from among the detected candidates for light intensity fluctuation frequency is determined as the light intensity fluctuation frequency, so that the optical waveform of the frequency that the user is focusing on can be measured with high accuracy.
前項（７）及び（１８）に記載の発明によれば、検出した光量変動周波数の候補のうち、ユーザーが入力した光量変動周波数に最も近い候補を光量変動周波数として決定するから、ユーザーが着目している周波数付近の光波形を高精度で計測することができる。
According to the inventions described in the preceding paragraphs (7) and ( 18 ), the candidate among the detected light intensity fluctuation frequency candidates that is closest to the light intensity fluctuation frequency input by the user is determined as the light intensity fluctuation frequency, so that the light waveform near the frequency that the user is focusing on can be measured with high accuracy.
前項（８）及び（１９）に記載の発明によれば、周波数スペクトルデータにおいて強度が隣接周波数よりも大きい特異点となる周波数と隣接する周波数の強度を用いて補完することにより、光量変動周波数の候補を検出するから、精度の高い光量変動周波数を決定することができる。
According to the inventions described in the preceding paragraphs (8) and ( 19 ), candidate light intensity fluctuation frequencies are detected by interpolating the frequencies that are singular points in the frequency spectrum data, where the intensities are greater than those of adjacent frequencies, and the intensities of the adjacent frequencies, so that it is possible to determine light intensity fluctuation frequencies with high accuracy.
前項（５）及び（１６）に記載の発明によれば、光波形計測前の予備測定により光量変動の波形データを取得し、この波形データに対する自己相関法により光量変動周波数の候補を検出するから、予備測定時間を短縮することができる。
According to the inventions described in the preceding paragraphs (5) and ( 16 ), waveform data of light intensity fluctuations is obtained by preliminary measurement before measuring the light waveform, and candidate light intensity fluctuation frequencies are detected by the autocorrelation method for this waveform data, thereby shortening the preliminary measurement time.
前項（６）及び（１７）に記載の発明によれば、取得される光波形の波数は、前記光量変動周波数によって変化するから、波形歪みの縮小化、周期整合誤差の低減を図ることができる。
According to the inventions described in the preceding paragraphs (6) and ( 17 ), the wave number of the acquired optical waveform changes depending on the light intensity fluctuation frequency, so that waveform distortion and period matching error can be reduced.
前項（９）及び（２０）に記載の発明によれば、測定点数が２のべき乗個のｍ倍（ｍは整数）であり、測定点数がフィルタ処理前後で異なるから、波数の増大を回避することができる。
According to the inventions described in the preceding paragraphs (9) and ( 20 ), the number of measurement points is m times a power of 2 (m is an integer), and the number of measurement points is different before and after filtering, so an increase in the wave number can be avoided.
前項（１０）及び（２１）に記載の発明によれば、フィルタ処理前の光波形をｍ個単位で平均化したのちフィルタ処理するから、フィルタ処理後の波形のノイズを低減できる。
According to the inventions described in the preceding paragraphs (10) and ( 21 ), the optical waveform before filtering is averaged in m units and then filtered, so that noise in the waveform after filtering can be reduced.
以下、この発明の実施形態を図面に基づいて説明する。 An embodiment of the present invention will be described below with reference to the drawings.
図１は、この発明の一実施形態に係る光波形計測装置１の機能構成を示すブロック図である。 Figure 1 is a block diagram showing the functional configuration of an optical waveform measuring device 1 according to one embodiment of the present invention.
図１に示すように、光波形計測装置１は、受光部１１と、データ処理部１２と、候補検出部１３と、周波数決定部１４と、測定条件決定部１５と、光波形取得部１６と、フィルタ処理部１７と、表示部１８等を備えている。 As shown in Figure 1, the optical waveform measuring device 1 includes a light receiving unit 11, a data processing unit 12, a candidate detection unit 13, a frequency determination unit 14, a measurement condition determination unit 15, an optical waveform acquisition unit 16, a filter processing unit 17, a display unit 18, etc.
受光部１１はディスプレイ等の計測対象物１００からの光を受光するものであり受光センサを備えている。データ処理部１２は受光部１１での受光データに増幅等の所定の処理を施す。候補検出部１３は、データ処理部１２で処理された受光データに基づいて、光量変動周波数の候補を検出するものであり、周波数決定部１４は、検出された候補の中から光量変動周波数を決定する。 The light receiving unit 11 receives light from the measurement object 100, such as a display, and is equipped with a light receiving sensor. The data processing unit 12 performs predetermined processing, such as amplification, on the light reception data from the light receiving unit 11. The candidate detection unit 13 detects candidates for the light intensity fluctuation frequency based on the light reception data processed by the data processing unit 12, and the frequency determination unit 14 determines the light intensity fluctuation frequency from among the detected candidates.
測定条件決定部１５は、周波数決定部１４で決定された光量変動周波数を基に、サンプリング周波数と測定点数を決定する。この実施形態では、測定時間が決定された光量変動周波数の周期の整数倍となるサンプリング周波数と測定点数を決定する。 The measurement condition determination unit 15 determines the sampling frequency and the number of measurement points based on the light intensity fluctuation frequency determined by the frequency determination unit 14. In this embodiment, the measurement condition determination unit 15 determines a sampling frequency and the number of measurement points such that the measurement time is an integer multiple of the period of the determined light intensity fluctuation frequency.
光波形取得１６は、測定条件決定部１５で決定されたサンプリング周波数と測定点数で光波形を取得し、フィルタ処理部１７は取得した光波形をフィルタ処理し、表示部１８はフィルタ処理後の計測結果等を表示する。 The optical waveform acquisition unit 16 acquires the optical waveform at the sampling frequency and number of measurement points determined by the measurement condition determination unit 15, the filter processing unit 17 filters the acquired optical waveform, and the display unit 18 displays the measurement results after filtering.
次に、光波形計測装置１の動作を説明する。 Next, the operation of the optical waveform measuring device 1 will be explained.
ユーザーが光波形計測装置１を計測位置にセットして、表示部１８に表示された計測開始ボタンの押下等により計測開始を指示すると、受光部１１はディスプレイ等の計測対象物１００からの測定光を受光する。受光された光はデータ処理部１２で増幅等の所定のデータ処理を施された後、候補検出部１３に入力される。 When the user sets the optical waveform measuring device 1 at the measurement position and instructs the start of measurement by pressing the measurement start button displayed on the display unit 18, the light receiving unit 11 receives measurement light from the measurement object 100, such as a display. The received light undergoes predetermined data processing, such as amplification, in the data processing unit 12, and is then input to the candidate detection unit 13.
候補検出部１３は、計測対象物１００の光量変動周波数の候補(以下、候補周波数ともいう)を検出し、検出された候補周波数の中から、周波数決定部１４が光量変動周波数を決定する。 The candidate detection unit 13 detects candidates for the light intensity fluctuation frequency of the measurement object 100 (hereinafter also referred to as candidate frequencies), and the frequency determination unit 14 determines the light intensity fluctuation frequency from among the detected candidate frequencies.
候補周波数の検出及び光量変動周波数の決定処理の一例を図２のフローチャートに示す。この実施形態では、候補周波数の検出方法の一例として、予備測定により取得した光量変動の波形データに基づいて、候補周波数を検出する方法を用いている。閾値以上の周波数を候補周波数としても良い。An example of the process for detecting candidate frequencies and determining light intensity fluctuation frequencies is shown in the flowchart of Figure 2. In this embodiment, as an example of a method for detecting candidate frequencies, a method is used in which candidate frequencies are detected based on waveform data of light intensity fluctuations acquired by preliminary measurement. Frequencies above a threshold value may also be set as candidate frequencies.
図２のフローチャートにおいて、ステップＳ０１で処理を開始すると、計測対象物１００からの光を予備測定(プレ測定)により受光し、光量変動の波形データを取得する(ステップＳ０２)。次に、候補周波数を抽出（検出）する(ステップＳ０３)。具体的には、まず取得した波形データをスペクトル解析する(ステップＳ３１)。予備測定時間を短縮するため、予備測定におけるスペクトル解析では周波数分解能は粗く設定しても良い。 In the flowchart of Figure 2, when processing begins in step S01, light from the measurement object 100 is received by preliminary measurement (pre-measurement) and waveform data of the fluctuations in light intensity is obtained (step S02). Next, candidate frequencies are extracted (detected) (step S03). Specifically, the obtained waveform data is first subjected to spectral analysis (step S31). To shorten the preliminary measurement time, the frequency resolution may be set to a coarse value in the spectral analysis in the preliminary measurement.
図３にスペクトル解析結果であるスペクトルデータの一例を示す。図３の例では周波数分解能を２Ｈｚに設定した場合を例示している。また、図２の例では、スペクトルデータの１４Ｈｚと１６Ｈｚ、３０Ｈｚと３２Ｈｚ、４６Ｈｚと４８Ｈｚ、６０Ｈｚと６２Ｈｚが、強度が隣接周波数よりも大きい周波数つまり特異点となっており、これらの特異点の近傍に強度がピークとなる実際の候補周波数が存在していると考えられる。 Figure 3 shows an example of spectral data resulting from spectral analysis. The example in Figure 3 illustrates a case where the frequency resolution is set to 2 Hz. In addition, in the example in Figure 2, 14 Hz and 16 Hz, 30 Hz and 32 Hz, 46 Hz and 48 Hz, and 60 Hz and 62 Hz in the spectral data are frequencies where the intensity is greater than adjacent frequencies, i.e., singular points, and it is believed that actual candidate frequencies where the intensity peaks exist near these singular points.
図２のフローチャートに戻り、図３のスペクトルデータに示されるような特異点を抽出した後(ステップＳ３２)、特異点となる周波数と隣接する周波数の強度を用いた補完処理により、周波数を詳細化する(ステップＳ３３)。補完による周波数の詳細化については限定されないが、例えば重心検知などによって行えば良い。Returning to the flowchart of Figure 2, after extracting singular points as shown in the spectrum data of Figure 3 (step S32), the frequencies are refined by interpolation processing using the intensities of the singular point frequency and adjacent frequencies (step S33). There are no limitations on how the frequencies are refined by interpolation, but it can be done, for example, by center of gravity detection.
周波数の詳細化により実際に強度がピークとなる周波数を求め、求めた周波数を候補周波数としリスト化する。候補周波数には基本波とその高調波が含まれる。 By refining the frequency, the frequencies at which the intensity actually peaks are found, and these frequencies are listed as candidate frequencies. Candidate frequencies include the fundamental wave and its harmonics.
次に、リスト化した光量変動周波数の候補の中から、光量変動周波数を決定する(ステップＳ０４)。具体的な決定方法の一例として、候補の中の最小周波数を光量変動周波数として決定し(ステップＳ４１)、候補周波数の検出及び光量変動周波数の決定処理を終了する(ステップＳ０５)。Next, the light intensity fluctuation frequency is determined from the listed candidate light intensity fluctuation frequencies (step S04). As an example of a specific determination method, the smallest frequency among the candidates is determined as the light intensity fluctuation frequency (step S41), and the process of detecting the candidate frequency and determining the light intensity fluctuation frequency is terminated (step S05).
このように、この実施形態では、光波形計測前のプレ測定（予備測定）により光量変動の波形データを取得し、波形データをフーリエ変換処理することにより周波数スペクトルデータを取得し、周波数スペクトルデータにおいて、強度が隣接周波数よりも大きい特異点となる周波数を基に光量変動周波数の候補を検出するから、計測対象物の実際の光量変動周波数に対応する候補を検出でき、ひいては精度の高い光量変動周波数を決定することができる。また、光量変動周波数の候補の中から最小の周波数の候補を光量変動周波数として決定した場合は、光量変動周波数を容易に抽出できる。 In this way, in this embodiment, waveform data of light intensity fluctuations is obtained through a pre-measurement (preliminary measurement) before measuring the light waveform, and frequency spectrum data is obtained by Fourier transforming the waveform data. Candidate light intensity fluctuation frequencies are detected based on the frequencies in the frequency spectrum data that form singular points where the intensity is greater than that of adjacent frequencies. This makes it possible to detect candidates that correspond to the actual light intensity fluctuation frequency of the object being measured, and ultimately to determine a highly accurate light intensity fluctuation frequency. Furthermore, if the smallest frequency candidate from among the candidate light intensity fluctuation frequencies is determined as the light intensity fluctuation frequency, the light intensity fluctuation frequency can be easily extracted.
こうして決定した光量変動周波数を基に、測定条件決定部１５はサンプリング周波数と測定点数を決定する。 Based on the light intensity fluctuation frequency determined in this way, the measurement condition determination unit 15 determines the sampling frequency and number of measurement points.
満たすべき測定条件の関係式を下記［式１］に示す。
［式１］
測定時間Ｔ＝測定点数ｃ／サンプリング周波数ｆｓ≒波数ｎ／光量変動周波数ｆｖ
（ただしｎ、ｃは自然数）
測定条件は、上記［式１］で示す関係を極力満たすように、波数ｎ、測定点数ｃ、サンプリング周波数ｆｓを決定する。つまり、測定時間Ｔが光量変動周波数ｆｖの周期の整数倍（ｎ／ｆｖ）となるサンプリング周波数ｆｓと測定点数ｃを決定する。
The relationship of the measurement conditions to be satisfied is shown in the following [Equation 1].
[Formula 1]
Measurement time T = number of measurement points c / sampling frequency fs ≒ wave number n / light intensity fluctuation frequency fv
(where n and c are natural numbers)
The measurement conditions are determined by determining the wave number n, the number of measurement points c, and the sampling frequency fs so as to satisfy the relationship shown in the above [Equation 1] as much as possible. In other words, the sampling frequency fs and the number of measurement points c are determined so that the measurement time T is an integer multiple (n/fv) of the period of the light intensity fluctuation frequency fv.
周期整合度合いの誤差（＝ｃ／ｆｓ－ｎ／ｆｖ）は、フィルタ後波形の再現性（歪み量）から、光量変動周期の１／１０以下とすることが好ましく、ノイズ量が小さい滑らかな波形への適応を考慮すると１／３０以下とすることがより好ましい。各パラメータの決定は、システム内にルックアップテーブルを持たせることで実現できる。 The error in the degree of period matching (= c/fs - n/fv) is preferably less than 1/10 of the light intensity fluctuation period, taking into account the reproducibility (amount of distortion) of the filtered waveform, and even more preferably less than 1/30, considering application to smooth waveforms with little noise. Each parameter can be determined by incorporating a lookup table within the system.
光量の取得に関して瞬時値を取得する逐次取得方式における測定条件決定の例を以下に示す。逐次方式のサンプリング周波数ｆｓは、システムにより選択できる周波数が決まっている。そのｆｓに対して、図４の左部に示すように、前記［式１］を満たすｎとｃを選択することになる。逐次方式は高速サンプリングが実現できることから、一般的にｆｓ>>ｆｖとなるため、測定点数ｃが大きくなる傾向にある。 An example of determining measurement conditions for the sequential acquisition method, which acquires instantaneous values for light intensity, is shown below. The sampling frequency fs for the sequential method is determined by the system. For that fs, n and c that satisfy Equation 1 above are selected, as shown on the left side of Figure 4. Because the sequential method can achieve high-speed sampling, fs >> fv generally holds, so the number of measurement points c tends to be large.
演算に高速フーリエ変換を用いる場合には、測定点数ｃは、ｃ=ｍ×２d（ｍ、ｄ：自然数）とし、図４の右部に示すように、その測定点数ｃに対して前記［式１］を満たす波数ｎ、ｍ、ｄを選択する。従来条件であるｍ＝１だけでなくｍ≧２を条件に追加する事により、選択できる波数ｎの自由度を高めている。従来条件であるｍ＝１のみだと、ｆｓ≧ｆｖであるために前記［式１］を満たす波数ｎや測定点数ｃは大変大きな値となってしまう。その結果、測定時間の長秒化と演算負荷の増大化が発生し、高速フーリエ変換のメリットを得られなくなる。 When using fast Fourier transform for calculation, the number of measurement points c is set to c = m × 2d (m, d: natural numbers), and wavenumbers n, m, and d that satisfy the above [Equation 1] are selected for that number of measurement points c, as shown on the right side of Figure 4. By adding m ≥ 2 to the condition in addition to the conventional condition m = 1, the degree of freedom in the wavenumber n that can be selected is increased. If the conventional condition m = 1 were used alone, fs ≥ fv would mean that the wavenumber n and number of measurement points c that satisfy the above [Equation 1] would be very large values. As a result, the measurement time would increase and the calculation load would increase, making it impossible to obtain the benefits of fast Fourier transform.
なおｍ≠１において、高速フーリエ変換が成立する理由は、「フィルタ処理機能」で後述する。ｍ値はフィルタ後波形に対する実効サンプリング周波数の低減率を意味するので、小さい方が好ましい（「フィルタ処理機能」で後述）。例えば、システム上限周波数が２７００Ｈｚの場合において、
光量変動周波数ｆｖ：３０Ｈｚ→波数ｎ：１６、測定点数ｃ：１４３３６（ｍ＝７，ｄ＝１１）、サンプリング周波数ｆｓ：２７００Ｈｚ
光量変動周波数ｆｖ：２４Ｈｚ→波数ｎ：１１、測定点数ｃ：１２２８８（ｍ＝３，ｄ＝１２）、サンプリング周波数ｆｓ：２７０００Ｈｚ
となる。
The reason why the fast Fourier transform is possible when m≠1 will be described later in the section "Filter Processing Function." The m value indicates the reduction rate of the effective sampling frequency for the filtered waveform, so a smaller value is preferable (described later in the section "Filter Processing Function"). For example, when the system upper limit frequency is 2700 Hz,
Light intensity fluctuation frequency fv: 30 Hz → wave number n: 16, number of measurement points c: 14336 (m = 7, d = 11), sampling frequency fs: 2700 Hz
Light intensity fluctuation frequency fv: 24 Hz → wave number n: 11, number of measurement points c: 12288 (m = 3, d = 12), sampling frequency fs: 27000 Hz
This becomes:
光量の取得に関して決められた時間の積分値を取得する積分方式における測定条件決定の例を以下に示す。積分方式のサンプリング周波数ｆｓは、高速化が困難であるが、周波数設定に関しては一般的に自由度が高く、任意に設定できる。それゆえに測定条件は、図５の左部に示すように、目安とする波数ｎに対して、前記［式１］を満たすｃとｆｓを選択することになる。An example of determining measurement conditions for the integral method, which acquires the integrated value of light intensity over a set period of time, is shown below. While it is difficult to increase the sampling frequency fs in the integral method, there is generally a high degree of freedom in frequency setting and it can be set arbitrarily. Therefore, the measurement conditions are determined by selecting c and fs that satisfy Equation 1 above for the target wavenumber n, as shown on the left side of Figure 5.
演算に高速フーリエ変換を用いる場合には、測定点数ｃは、ｃ＝ｍ×２d（ｍ、ｄ：自然数）とし、図５の右部に示すように、そのｃに対して前記［式１］を満たすｎ、ｍ、ｄを選択する。ここで、ｍ値は、以下の理由により、ｍ＝１とすることが好ましい。
・積分方式の場合、ｆｓに自由度があることから、ｍ＝１においても測定時間の長秒化が生じ難い
・ｍ≧２の場合、フィルタ後波形の実効サンプリング周波数が取得波形に比べ低下する（「フィルタ処理機能」で後述）
波数ｎは、システム上限付近の高ｆｓを維持するために、光量変動周波数に依存して変化させる。波数ｎを光量変動周波数によって変化させること、波形歪みの縮小化、周期整合誤差の低減を図ることができる。
When using fast Fourier transform for calculation, the number of measurement points c is set to c = m × 2 d (m, d: natural numbers), and n, m, and d are selected to satisfy the above-mentioned [Equation 1] for that c, as shown on the right side of Fig. 5. Here, it is preferable to set the m value to m = 1 for the following reasons.
・In the case of the integral method, since there is a degree of freedom in fs, it is difficult for the measurement time to become long even when m = 1. ・When m ≥ 2, the effective sampling frequency of the filtered waveform is lower than that of the acquired waveform (described later in "Filter Processing Function").
The wave number n is varied depending on the light intensity fluctuation frequency in order to maintain a high fs near the upper limit of the system. Varying the wave number n depending on the light intensity fluctuation frequency can reduce waveform distortion and period matching errors.
測定条件の一例を以下に示す。例えば、システム上限周波数が２７００Ｈｚの場合において、
光量変動周波数ｆｖ：３０Ｈｚ→波数ｎ：１２、測定点数ｃ：１０２４（ｍ＝１，ｄ＝１０）、サンプリング周波数ｆｓ：２５６０Ｈｚ
光量変動周波数ｆｖ：２４Ｈｚ→波数ｎ：１８、測定点数ｃ：２０４８(ｍ＝１，ｄ＝１１)、サンプリング周波数ｆｓ：２７３１．６６７Ｈｚ
こうして決定した測定条件で、光波形を取得する。光波形の測定は従来と同様に行われるため、詳細な説明は省略する。
An example of the measurement conditions is shown below. For example, when the upper limit frequency of the system is 2700 Hz,
Light intensity fluctuation frequency fv: 30 Hz → wave number n: 12, number of measurement points c: 1024 (m = 1, d = 10), sampling frequency fs: 2560 Hz
Light intensity fluctuation frequency fv: 24 Hz → wave number n: 18, number of measurement points c: 2048 (m = 1, d = 11), sampling frequency fs: 2731.667 Hz
The optical waveform is acquired under the measurement conditions thus determined. Measurement of the optical waveform is performed in the same manner as in the conventional method, and therefore a detailed description thereof will be omitted.
光波形の取得後、取得した光波形に対してフィルタ処理部１７でフィルタ処理を実施する。通常の離散フーリエ変換（DFT）または逆フーリエ変換（IDFT）で処理する場合、および高速フーリエ変換でｍ＝１の場合は、フィルタ処理は従来と同様である。 After the optical waveform is acquired, it is filtered by the filter processing unit 17. When processing using a conventional discrete Fourier transform (DFT) or inverse Fourier transform (IDFT), or when m = 1 in a fast Fourier transform, the filtering process is the same as conventional methods.
高速フーリエ変換かつｍ≧２の場合のフィルタ処理について以下に記載する。即ち、高速フーリエ変換処理の前に取得した波形に前処理が必要となる。前処理は、測定データ（ｃ個の配列）に対して、先頭データからｍ個毎に平均化し、もしくは間引きを行い、データ数を１／ｍ個に圧縮する。この圧縮されたデータ数２d個に対して、高速フーリエ変換（DFT）処理、重み付け、高速逆フーリエ変換（IDFT）処理を行い、フィルタ後波形を生成する。 The filtering process when fast Fourier transform and m≧2 is described below. That is, preprocessing is required for the waveform acquired before fast Fourier transform processing. In preprocessing, the measurement data (array of c data items) is averaged or thinned out every m data items from the first data item, compressing the number of data items to 1/m. This compressed data item ( 2d data items) is then subjected to fast Fourier transform (DFT), weighting, and inverse fast Fourier transform (IDFT) processing to generate a filtered waveform.
上述したデータ数の圧縮は、フィルタ後波形の実効サンプリング周波数ｆｓを取得波形に対して１／ｍにすることと等価である。ゆえにｍ値は、フィルタ後波形の再現性に影響を及ぼさない程度に小さくする必要があるが、逐次型の場合はｆｓ≧ｆｖであるので、このｍ値の波形再現への影響は低い。このようにデータ数を１／ｍ個に圧縮することで、測定点数がフィルタ処理前後で異なることになり、波数の増大を回避することができる。また、フィルタ処理前の波形をｍ個単位で平均化したのちフィルタ処理するから、フィルタ処理後の波形のノイズを低減できる。 The compression of the number of data points described above is equivalent to reducing the effective sampling frequency fs of the filtered waveform to 1/m of the acquired waveform. Therefore, the m value needs to be small enough so as not to affect the reproducibility of the filtered waveform, but in the case of sequential types, fs≧fv, so the m value has little impact on waveform reproduction. By compressing the number of data points to 1/m in this way, the number of measurement points differs before and after filtering, preventing an increase in the number of waves. Furthermore, because the waveform before filtering is averaged in m-units before filtering, noise in the filtered waveform can be reduced.
フィルタ処理後の波形を図６に示す。同図（Ａ）は従来の波形であり、（Ｂ）は本実施形態における波形である。本実施形態では、光量変動周波数に整合するように測定条件を設定しているので、従来例に対し、特に波形の先端部と後端部において歪みが抑えられた波形となっている。The waveform after filtering is shown in Figure 6. (A) in the figure is the conventional waveform, and (B) is the waveform in this embodiment. In this embodiment, the measurement conditions are set to match the light intensity fluctuation frequency, resulting in a waveform with reduced distortion, particularly at the leading and trailing ends, compared to the conventional example.
このようにこの実施形態では、計測対象物１００の光量変動周波数の候補を検出するとともに、検出した候補に基づいて光量変動周波数を決定し、決定された光量変動周波数に基づいて、測定時間が前記決定された光量変動周波数の周期の整数倍となるサンプリング周波数と測定点数を決定するから、任意の周波数フィルタ処理を施しても、歪みの無い波形取得が可能となるとともに、計測対象の周波数が既知で無い場合でも、誤差を最小化できる。また、ＩＥＣ規格に基づくフリッカ指標を正確にかつ容易に導出できる。つまり、ＩＥＣ規格では、TCSFでフィルタ処理した波形に対して、（最大値－最小値）／平均値を計算した値をフリッカ値としているが、本フリッカ値を導出するためには、正確なフィルタ後波形が必要となる。また、平均値の導出には光量変動周期が必要となることから、本発明を用いれば容易に導出できる。 In this embodiment, candidate light intensity fluctuation frequencies for the measurement object 100 are detected, the light intensity fluctuation frequency is determined based on the detected candidates, and the sampling frequency and number of measurement points are determined based on the determined light intensity fluctuation frequency, so that the measurement time is an integer multiple of the period of the determined light intensity fluctuation frequency. This enables distortion-free waveform acquisition even when performing arbitrary frequency filtering, and minimizes errors even when the frequency of the measurement object is unknown. Furthermore, the flicker index based on the IEC standard can be accurately and easily derived. In other words, the IEC standard defines the flicker value as the value calculated by dividing the maximum value - minimum value by the average value for a waveform filtered by TCSF. However, deriving this flicker value requires an accurate filtered waveform. Furthermore, because the light intensity fluctuation period is required to derive the average value, this can be easily derived using the present invention.
上述した実施形態では、複数の候補周波数の中から、最小の周波数の候補を光量変動周波数として決定する例を示したが、光量変動周波数の決定方法はこれに限定されることはない。特に、ディスプレイの設計者等のユーザーが確認のために光波形計測を行うような場合には、ユーザーは光量変動周波数を認識していると思われる。 In the above-described embodiment, an example was shown in which the smallest candidate frequency from among multiple candidate frequencies was determined as the light intensity fluctuation frequency, but the method of determining the light intensity fluctuation frequency is not limited to this. In particular, when a user such as a display designer measures the light waveform for confirmation, the user is likely to be aware of the light intensity fluctuation frequency.
このため図７に示すように、「周波数を選択して下さい」等のメッセージとともに検出した候補周波数のリストを表示部１８に表示し、ユーザーに所望の候補を選択させても良い。図７の例では、４個の候補周波数が表示され、チェックが付されている１５．３６Ｈｚの候補周波数が選択されたことを示している。いずれかの候補周波数が選択されると、選択された候補周波数が光量変動周波数として決定される。 For this reason, as shown in Figure 7, a list of detected candidate frequencies may be displayed on the display unit 18 along with a message such as "Please select a frequency," allowing the user to select the desired candidate. In the example of Figure 7, four candidate frequencies are displayed, and the checked candidate frequency of 15.36 Hz is selected. When one of the candidate frequencies is selected, the selected candidate frequency is determined as the light intensity fluctuation frequency.
このように、ユーザーに候補を選択させるとともに、ユーザーが選択した候補周波数を光量変動周波数として決定することにより、ユーザーが着目している周波数の光波形を高精度で計測することができる。 In this way, by having the user select a candidate and determining the candidate frequency selected by the user as the light intensity fluctuation frequency, the optical waveform of the frequency the user is focusing on can be measured with high accuracy.
なお、予備測定におけるスペクトル解析の結果得られた図３のスペクトルデータに示される特異点を候補周波数として表示し、ユーザーに選択させても良い。この場合は、選択された特異点に最も近い光量変動周波数が、周波数分解能の決定の基礎となる光量変動周波数として決定される。しかし、表示される候補リストは、補完による詳細化後の候補周波数のリストである方が、正確な候補周波数を表示できる点で望ましい。 The singular points shown in the spectral data in Figure 3 obtained as a result of the spectral analysis in the preliminary measurement may be displayed as candidate frequencies for the user to select. In this case, the light intensity fluctuation frequency closest to the selected singular point is determined as the light intensity fluctuation frequency that serves as the basis for determining the frequency resolution. However, it is preferable that the displayed candidate list is a list of candidate frequencies that have been refined by interpolation, as this allows for more accurate candidate frequencies to be displayed.
また、候補周波数のリスト表示ではなく、図８に示すように、「周波数を選択して下さい」等のメッセージとともに入力欄１８ａを表示し、光量変動周波数の設計値を直接ユーザーに入力させる構成であっても良い。この場合は、候補周波数の中から、入力された周波数に最も近い候補周波数が光量変動周波数として決定される。このように、ユーザーに光量変動周波数を入力させるとともに、入力した光量変動周波数に最も近い候補周波数を光量変動周波数として決定する場合も、ユーザーが着目している周波数付近の光波形を高精度で計測することができる効果がある。 In addition, instead of displaying a list of candidate frequencies, as shown in Figure 8, an input field 18a may be displayed along with a message such as "Please select a frequency," and the user may directly input the design value of the light intensity fluctuation frequency. In this case, the candidate frequency closest to the input frequency is determined as the light intensity fluctuation frequency from among the candidate frequencies. In this way, even when the user is required to input a light intensity fluctuation frequency and the candidate frequency closest to the input light intensity fluctuation frequency is determined as the light intensity fluctuation frequency, it is possible to achieve the effect of measuring the optical waveform near the frequency the user is focusing on with high accuracy.
また、上記の実施形態では、光波形計測前の予備測定により光量変動の波形データを取得し、取得した波形データをフーリエ変換処理することにより周波数スペクトルデータを取得し、周波数スペクトルデータにおいて、強度が隣接周波数よりも大きい特異点となる周波数を基に候補周波数を検出する例を説明したが、候補周波数の検出は他の方法であっても良い。 In addition, in the above embodiment, an example was described in which waveform data of light intensity fluctuations was obtained by preliminary measurement before measuring the optical waveform, the obtained waveform data was subjected to Fourier transform processing to obtain frequency spectrum data, and candidate frequencies were detected based on frequencies that form singular points in the frequency spectrum data whose intensity is greater than that of adjacent frequencies, but other methods may also be used to detect candidate frequencies.
例えば、光波形計測前の予備測定により光量変動の波形データを取得し、取得した波形データを解析することにより、変動周期(周波数)を直接求めても良い。その一例として、波形データに対する自己相関法を挙げることができる。この自己相関法は、光量変動の波形データとこの波形データから時間をずらしたデータとの相関係数を計算することにより、データの周期性を抽出し、候補周波数を検出する方法である。他の方法として、画像解析手法による波形データの特徴点を用いた周期抽出法などを用いても良い。For example, waveform data of light intensity fluctuations can be obtained by preliminary measurement before measuring the light waveform, and the fluctuation period (frequency) can be directly determined by analyzing the obtained waveform data. One example is the autocorrelation method for waveform data. This autocorrelation method calculates the correlation coefficient between the waveform data of light intensity fluctuations and data shifted in time from this waveform data to extract the periodicity of the data and detect candidate frequencies. Other methods include period extraction using feature points of waveform data using image analysis techniques.
波形データの解析による光量変動周波数の検出は、予備測定時間が短くなる効果があるが、演算負荷は大きくなる。 Detecting the light intensity fluctuation frequency by analyzing waveform data has the effect of shortening the preliminary measurement time, but it increases the computational load.
以上、本発明の一実施形態を説明したが、本発明は上記実施形態に限定されることはない。例えば、候補検出部１３は、光量変動の波形データをフーリエ変換処理することにより周波数スペクトルデータを取得する従来の光波形計測装置の機能を利用して構成されても良いし、候補検出用の専用回路を別途設けることにより構成されても良い。 Although one embodiment of the present invention has been described above, the present invention is not limited to the above embodiment. For example, the candidate detection unit 13 may be configured using the functions of a conventional optical waveform measurement device that acquires frequency spectrum data by Fourier transforming waveform data of light intensity fluctuations, or may be configured by providing a separate dedicated circuit for candidate detection.
また、図９に示すように、光波形計測装置をパーソナルコンピュータ２００により構成しても良い。この場合、パーソナルコンピュータ２００は、従来の光波形計測装置３００から計測対象物１００の受光データを取得することにより、候補周波数の検出、光量変動周波数の決定、測定条件の決定等を行えば良い。 Also, as shown in Figure 9, the optical waveform measuring device may be configured using a personal computer 200. In this case, the personal computer 200 acquires light reception data of the measurement object 100 from a conventional optical waveform measuring device 300, and performs the following operations: detecting candidate frequencies, determining light intensity fluctuation frequencies, determining measurement conditions, etc.
また、光波形計測ステップは、周波数検出ステップ、周波数決定ステップ、測定条件決定ステップと連続して行う必要はない。例えば、周波数検出ステップ、周波数決定ステップ、測定条件決定ステップを先に行って測定条件のデータを取得しておき、その後、取得した測定条件を用いて光計測のみを実施しても良い。 Furthermore, the optical waveform measurement step does not have to be performed consecutively with the frequency detection step, frequency determination step, and measurement condition determination step. For example, the frequency detection step, frequency determination step, and measurement condition determination step may be performed first to obtain measurement condition data, and then only optical measurement may be performed using the obtained measurement conditions.
また、決定された測定条件は、光波形計測装置または光波形計測装置に接続された外部の記録装置（例えばパーソナルコンピュータ等）に記録保存されるようにしても良い。測定条件が記録保存されることで、再度光波形計測が必要となったときに、光量変動周波数の候補の検出、光量変動周波数の決定、測定条件の決定の各処理を省略でき、光波形計測に要する時間を短縮できる。 The determined measurement conditions may also be recorded and saved in the optical waveform measurement device or an external recording device (such as a personal computer) connected to the optical waveform measurement device. By recording and saving the measurement conditions, when optical waveform measurement is required again, the processes of detecting candidate light intensity fluctuation frequencies, determining the light intensity fluctuation frequencies, and determining the measurement conditions can be omitted, thereby shortening the time required for optical waveform measurement.
本願は、２０２０年６月１日付で出願された日本国特許出願の特願２０２０－０９５５１７号の優先権主張を伴うものであり、その開示内容は、そのまま本願の一部を構成するものである。 This application claims priority from Japanese Patent Application No. 2020-095517, filed on June 1, 2020, the disclosure of which is incorporated herein by reference in its entirety.
本発明は、ディスプレイ等の計測対象物の光波形を計測する際に利用可能である。 The present invention can be used to measure the optical waveform of an object to be measured, such as a display.
１ 光波形計測装置
１１ 受光部
１３ 候補検出部
１４ 周波数決定部
１５ 測定条件決定部
１６ フィルタ処理部
１７ 光波形取得部
１８ 表示部
１００ 計測対象物
２００ パーソナルコンピュータ
REFERENCE SIGNS LIST 1 Optical waveform measurement device 11 Light receiving unit 13 Candidate detection unit 14 Frequency determination unit 15 Measurement condition determination unit 16 Filter processing unit 17 Optical waveform acquisition unit 18 Display unit 100 Measurement object 200 Personal computer
Claims (22)
前記検出手段で検出された光量変動周波数の候補に基づいて光量変動周波数を決定する周波数決定手段と、
前記周波数決定手段により決定された光量変動周波数に基づいて、光波形計測の測定条件を決定する測定条件決定手段と、
前記測定条件決定手段により決定された測定条件で計測対象物の光波形を取得する取得手段と、
前記取得手段により取得した光波形をフィルタ処理するフィルタ処理手段と、
を備え、
前記測定条件決定手段は、測定時間が前記周波数決定手段により決定された光量変動周波数の周期の整数倍となるサンプリング周波数と測定点数を決定し、
周期整合度合いの誤差は、前記光量変動周波数の周期の１／１０以下である、光波形計測装置。 a detection means for detecting candidates for the light intensity fluctuation frequency of the measurement object;
a frequency determining means for determining a light intensity fluctuation frequency based on the candidate light intensity fluctuation frequencies detected by the detecting means;
a measurement condition determination means for determining a measurement condition for measuring an optical waveform based on the light intensity fluctuation frequency determined by the frequency determination means;
an acquisition means for acquiring an optical waveform of a measurement object under the measurement conditions determined by the measurement condition determination means;
a filtering means for filtering the optical waveform acquired by the acquisition means;
Equipped with
the measurement condition determining means determines a sampling frequency and a number of measurement points such that the measurement time is an integer multiple of the period of the light intensity fluctuation frequency determined by the frequency determining means;
An optical waveform measuring device, wherein the error in the degree of period matching is 1/10 or less of the period of the light intensity fluctuation frequency.
光波形計測前の予備測定により光量変動の波形データを取得し、
前記波形データをフーリエ変換処理することにより周波数スペクトルデータを取得し、
前記周波数スペクトルデータにおいて、強度が隣接周波数よりも大きい特異点となる周波数を基に光量変動周波数の候補を検出する請求項１に記載の光波形計測装置。 The detection means
Obtain waveform data of light intensity fluctuations through preliminary measurement before measuring the light waveform.
obtaining frequency spectrum data by Fourier transforming the waveform data;
2. The optical waveform measuring device according to claim 1, wherein candidates for light intensity fluctuation frequencies are detected based on frequencies that are singular points in the frequency spectrum data and have higher intensities than adjacent frequencies.
前記周波数決定手段は、前記選択手段によりユーザーが選択した候補を光量変動周波数として決定する請求項１または請求項２に記載の光波形計測装置。 a selection means for allowing a user to select one of the candidates for the light intensity fluctuation frequency detected by the detection means;
3. The optical waveform measuring device according to claim 1, wherein the frequency determining means determines the candidate selected by the user using the selecting means as the light intensity fluctuation frequency.
前記周波数決定手段は、検出手段により検出された光量変動周波数の候補のうち、前記入力手段により入力された光量変動周波数に最も近い候補を光量変動周波数として決定する請求項１または２に記載の光波形計測装置。 An input means is provided that allows a user to input a light intensity fluctuation frequency,
3. The optical waveform measuring device according to claim 1, wherein the frequency determining means determines, from among the candidates for the light intensity fluctuation frequency detected by the detecting means, the candidate closest to the light intensity fluctuation frequency input by the input means as the light intensity fluctuation frequency.
前記フィルタ処理手段は、取得した光波形をフーリエ変換し、得られた周波数スペクトルに対してTCSFフィルタにて周波数毎に重みづけし、重み付けされた周波数スペクトルを逆フーリエ変換する請求項１に記載の光波形計測装置。2. The optical waveform measuring device according to claim 1, wherein the filter processing means performs a Fourier transform on the acquired optical waveform, weights the obtained frequency spectrum for each frequency using a TCSF filter, and performs an inverse Fourier transform on the weighted frequency spectrum.
前記検出ステップで検出された光量変動周波数の候補に基づいて光量変動周波数を周波数決定手段が決定する周波数決定ステップと、
前記周波数決定ステップにより決定された光量変動周波数に基づいて、測定条件決定手段が光波形計測の測定条件を決定する測定条件決定ステップと、
前記測定条件決定ステップにより決定された測定条件で計測対象物の光波形を取得する取得ステップと、
前記取得ステップにより取得した光波形をフィルタ処理するフィルタ処理ステップと、
を備え、
前記測定条件決定ステップでは、測定時間が前記周波数決定ステップにより決定された光量変動周波数の周期の整数倍となるサンプリング周波数と測定点数を決定し、
周期整合度合いの誤差は、前記光量変動周波数の周期の１／１０以下である、光波形計測方法。 a detecting step in which a detecting means detects candidates for the light intensity fluctuation frequency of the measurement object;
a frequency determination step in which a frequency determination means determines a light intensity fluctuation frequency based on the candidate light intensity fluctuation frequencies detected in the detection step;
a measurement condition determination step in which a measurement condition determination means determines a measurement condition for measuring an optical waveform based on the light intensity fluctuation frequency determined in the frequency determination step;
an acquiring step of acquiring an optical waveform of the measurement object under the measurement conditions determined in the measurement condition determining step;
a filtering step of filtering the optical waveform acquired by the acquiring step;
Equipped with
In the measurement condition determination step, a sampling frequency and a number of measurement points are determined such that the measurement time is an integer multiple of the period of the light intensity fluctuation frequency determined in the frequency determination step;
An optical waveform measurement method, wherein an error in the degree of period matching is 1/10 or less of the period of the light intensity fluctuation frequency.
光波形計測前の予備測定により光量変動の波形データを取得し、
前記波形データをフーリエ変換処理することにより周波数スペクトルデータを取得し、
前記周波数スペクトルデータにおいて、強度が隣接周波数よりも大きい特異点となる周波数を基に光量変動周波数の候補を検出する請求項１２に記載の光波形計測方法。 In the detecting step,
Obtain waveform data of light intensity fluctuations through preliminary measurement before measuring the light waveform.
obtaining frequency spectrum data by Fourier transforming the waveform data;
13. The optical waveform measuring method according to claim 12 , wherein a candidate for a light intensity fluctuation frequency is detected based on a frequency that is a singular point in the frequency spectrum data and has a higher intensity than adjacent frequencies.
前記フィルタ処理ステップでは、取得した光波形をフーリエ変換し、得られた周波数スペクトルに対してTCSFフィルタにて周波数毎に重みづけし、重み付けされた周波数スペクトルを逆フーリエ変換する請求項１２に記載の光波形計測方法。13. The optical waveform measuring method according to claim 12, wherein the filtering step performs a Fourier transform on the acquired optical waveform, weights the obtained frequency spectrum for each frequency using a TCSF filter, and performs an inverse Fourier transform on the weighted frequency spectrum.
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