JP7707239B2 - ロボット及び基板搬送装置 - Google Patents

ロボット及び基板搬送装置 Download PDF

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Publication number
JP7707239B2
JP7707239B2 JP2023111681A JP2023111681A JP7707239B2 JP 7707239 B2 JP7707239 B2 JP 7707239B2 JP 2023111681 A JP2023111681 A JP 2023111681A JP 2023111681 A JP2023111681 A JP 2023111681A JP 7707239 B2 JP7707239 B2 JP 7707239B2
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JP
Japan
Prior art keywords
flange
link
hand
base
axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2023111681A
Other languages
English (en)
Japanese (ja)
Other versions
JP2025008999A (ja
Inventor
則久 岩▲崎▼
剛 山口
一紀 日野
忠隆 野口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yaskawa Electric Corp
Original Assignee
Yaskawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yaskawa Electric Corp filed Critical Yaskawa Electric Corp
Priority to JP2023111681A priority Critical patent/JP7707239B2/ja
Priority to CN202410885998.1A priority patent/CN119275166A/zh
Priority to US18/762,675 priority patent/US20250010461A1/en
Priority to KR1020240088490A priority patent/KR102920427B1/ko
Publication of JP2025008999A publication Critical patent/JP2025008999A/ja
Priority to JP2025112595A priority patent/JP2025129313A/ja
Application granted granted Critical
Publication of JP7707239B2 publication Critical patent/JP7707239B2/ja
Priority to KR1020260015023A priority patent/KR20260033493A/ko
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/02—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • B25J9/043—Cylindrical coordinate type comprising an articulated arm double selective compliance articulated robot arms [SCARA]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/76—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches
    • H10P72/7604—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a susceptor, stage or support
    • H10P72/7624—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the mechanical construction of the susceptor, stage or support
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00—Manipulators not otherwise provided for
    • B25J11/0095—Manipulators transporting wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J13/00—Controls for manipulators
    • B25J13/08—Controls for manipulators by means of sensing devices, e.g. viewing or touching devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J17/00—Joints
    • B25J17/02—Wrist joints
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J18/00—Arms
    • B25J18/02—Arms extensible
    • B25J18/04—Arms extensible rotatable
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/007—Means or methods for designing or fabricating manipulators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/0009—Constructional details, e.g. manipulator supports, bases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/02—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/10—Program-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/106—Program-controlled manipulators characterised by positioning means for manipulator elements with articulated links
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3202—Mechanical details, e.g. rollers or belts

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Human Computer Interaction (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2023111681A 2023-07-06 2023-07-06 ロボット及び基板搬送装置 Active JP7707239B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2023111681A JP7707239B2 (ja) 2023-07-06 2023-07-06 ロボット及び基板搬送装置
CN202410885998.1A CN119275166A (zh) 2023-07-06 2024-07-03 机器人以及基板输送装置
US18/762,675 US20250010461A1 (en) 2023-07-06 2024-07-03 Robot and electronic substrate transfer device
KR1020240088490A KR102920427B1 (ko) 2023-07-06 2024-07-04 로봇 및 기판 반송 장치
JP2025112595A JP2025129313A (ja) 2023-07-06 2025-07-02 ロボット及び基板搬送装置
KR1020260015023A KR20260033493A (ko) 2023-07-06 2026-01-26 로봇 및 기판 반송 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2023111681A JP7707239B2 (ja) 2023-07-06 2023-07-06 ロボット及び基板搬送装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2025112595A Division JP2025129313A (ja) 2023-07-06 2025-07-02 ロボット及び基板搬送装置

Publications (2)

Publication Number Publication Date
JP2025008999A JP2025008999A (ja) 2025-01-20
JP7707239B2 true JP7707239B2 (ja) 2025-07-14

Family

ID=94104730

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2023111681A Active JP7707239B2 (ja) 2023-07-06 2023-07-06 ロボット及び基板搬送装置
JP2025112595A Pending JP2025129313A (ja) 2023-07-06 2025-07-02 ロボット及び基板搬送装置

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2025112595A Pending JP2025129313A (ja) 2023-07-06 2025-07-02 ロボット及び基板搬送装置

Country Status (4)

Country Link
US (1) US20250010461A1 (https=)
JP (2) JP7707239B2 (https=)
KR (2) KR102920427B1 (https=)
CN (1) CN119275166A (https=)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020188218A (ja) 2019-05-17 2020-11-19 東京エレクトロン株式会社 真空搬送装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020188218A (ja) 2019-05-17 2020-11-19 東京エレクトロン株式会社 真空搬送装置

Also Published As

Publication number Publication date
KR20250008004A (ko) 2025-01-14
US20250010461A1 (en) 2025-01-09
KR20260033493A (ko) 2026-03-10
JP2025129313A (ja) 2025-09-04
JP2025008999A (ja) 2025-01-20
KR102920427B1 (ko) 2026-01-29
CN119275166A (zh) 2025-01-07

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