JP7465475B1 - Surface potential measuring device - Google Patents

Surface potential measuring device Download PDF

Info

Publication number
JP7465475B1
JP7465475B1 JP2023133231A JP2023133231A JP7465475B1 JP 7465475 B1 JP7465475 B1 JP 7465475B1 JP 2023133231 A JP2023133231 A JP 2023133231A JP 2023133231 A JP2023133231 A JP 2023133231A JP 7465475 B1 JP7465475 B1 JP 7465475B1
Authority
JP
Japan
Prior art keywords
electrode
surface potential
ion irradiation
electric field
noise reduction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2023133231A
Other languages
Japanese (ja)
Inventor
智史 最上
俊之 杉本
虎太郎 平
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yamagata University NUC
Kasuga Denki Inc
Original Assignee
Yamagata University NUC
Kasuga Denki Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yamagata University NUC, Kasuga Denki Inc filed Critical Yamagata University NUC
Priority to JP2023133231A priority Critical patent/JP7465475B1/en
Application granted granted Critical
Publication of JP7465475B1 publication Critical patent/JP7465475B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Measurement Of Current Or Voltage (AREA)

Abstract

【課題】 測定対象の近傍に電気ノイズを発生するノイズ発生源があった場合にも、測定対象の表面電位を正確に測定できる表面電位測定装置を提供すること。【解決手段】 電気ノイズを発生するノイズ発生源３の近傍に設けられた測定対象面２ａの表面電位を検出する表面電位測定装置であって、測定対象面２ａと正対して当該測定対象面の表面電位を検出する検出電極６と、ノイズ発生源３から検出電極６に入力される電気力線と逆極性の電気力線を上記検出電極に入力させるノイズ低減電極５とを備えている。【選択図】 図１[Problem] To provide a surface potential measuring device that can accurately measure the surface potential of a measurement object even if there is a noise source that generates electrical noise near the measurement object. [Solution] This surface potential measuring device detects the surface potential of a measurement object surface 2a that is provided near a noise source 3 that generates electrical noise, and is equipped with a detection electrode 6 that faces the measurement object surface 2a and detects the surface potential of the measurement object surface, and a noise reduction electrode 5 that inputs electric field lines of polarity opposite to the electric field lines input from the noise source 3 to the detection electrode 6 to the detection electrode. [Selected Figure] Figure 1

Description

特許法第３０条第２項適用 放電・プラズマ・パルスパワー研究会 論文Ｎｏ：ＥＰＰ２３０４５、電気学会電子図書館（ｈｔｔｐｓ：／／ｗｗｗ．ｂｏｏｋｐａｒｋ．ｎｅ．ｊｐ／ｃｍ／ｉｅｅｊ／ｓｅａｒｃｈ．ａｓｐ） 令和５年６月５日発行 ［刊行物等］ 電気学会 放電・プラズマ・パルスパワー研究会 令和５年６月１０日開催Article 30, paragraph 2 of the Patent Act applies. Discharge, Plasma, and Pulse Power Study Group Paper No.: EPP23045, Institute of Electrical Engineers of Japan Electronic Library (https://www.bookpark.ne.jp/cm/ieej/search.asp) Published on June 5, 2023 [Publications, etc.] Institute of Electrical Engineers of Japan Discharge, Plasma, and Pulse Power Study Group Held on June 10, 2023

特許法第３０条第２項適用 ２０２２年度 情報・エレクトロニクス学科卒業研究発表会 令和５年２月１０日開催Application of Article 30, Paragraph 2 of the Patent Act 2022 Department of Information and Electronics Graduation Research Presentation to be held on February 10, 2023

この発明は、帯電物体の表面電位を測定する表面電位測定装置に関する。 This invention relates to a surface potential measuring device that measures the surface potential of a charged object.

測定対象の表面電位を非接触で測定する装置として、測定対象と検出電極との間の電界を振動子でチョッピングして交流電圧に変換し、その電圧から被測定物の表面電位を検出する表面電位測定装置が知られている。具体的には、上記検出電極の近傍に、周期的に開閉するチョッパを設け、このチョッパの開閉によって検出電極に入る電界の強度を周期的に変化させ、検出電極からアースへ流れる変位電流を表面電位の信号として検出している（特許文献１，２参照）。 A known device for non-contact measurement of the surface potential of an object is a surface potential measuring device that chops the electric field between the object and a detection electrode with a vibrator, converts it into an AC voltage, and detects the surface potential of the object from that voltage. Specifically, a chopper that periodically opens and closes is provided near the detection electrode, and the strength of the electric field entering the detection electrode is periodically changed by opening and closing this chopper, and the displacement current flowing from the detection electrode to earth is detected as a surface potential signal (see Patent Documents 1 and 2).

特開２００９－１９２４１４号公報JP 2009-192414 A 特開２０１７－０１５５７５号公報JP 2017-015575 A 特開２０１７－１６７０１１号公報JP 2017-167011 A

上記のような表面電位測定装置で、検出電極の近傍に、電気ノイズを発生するノイズ発生源があった場合、検出電極は、ノイズ発生源による電界、すなわちノイズ発生源から発生する電気力線を、測定対象による電気力線と同時に検出してしまう。
そして、ノイズ発生源が発生する電界が大きければ、測定対象の表面電位による信号が、ノイズ発生源からのノイズに埋もれてしまって正確に検出できないことがある。
また、測定対象の表面電位が相対的に小さい場合に、検出電極の検出感度を上げることが考えられるが、その場合には検出電極による電気ノイズの検出が大きくなり過ぎて、表面電位測定装置での測定限界を振り切ってしまい測定そのものができないこともある。 In a surface potential measuring device such as that described above, if there is a noise source that generates electrical noise near the detection electrode, the detection electrode will detect the electric field due to the noise source, i.e., the electric field lines generated from the noise source, simultaneously with the electric field lines due to the object to be measured.
If the electric field generated by the noise source is strong, the signal due to the surface potential of the measurement object may be buried in the noise from the noise source and may not be detected accurately.
Furthermore, when the surface potential of the object to be measured is relatively small, it is possible to increase the detection sensitivity of the detection electrodes. However, in that case, the electrical noise detected by the detection electrodes may become too large, exceeding the measurement limit of the surface potential measuring device and making it impossible to perform the measurement at all.

この発明の目的は、測定対象の近傍に電気ノイズを発生するノイズ発生源があった場合にも、測定対象の表面電位を正確に測定できる表面電位測定装置を提供することである。 The object of this invention is to provide a surface potential measuring device that can accurately measure the surface potential of an object to be measured, even if there is a noise source that generates electrical noise near the object to be measured.

第１の発明は、測定対象面の表面電位を検出する表面電位測定装置であって、上記測定対象面にイオンを照射するイオン照射電極と、上記測定対象面であって、上記イオン照射電極によるイオンが照射される部分であるイオン照射部と正対して、イオン照射中における上記イオン照射部の表面電位を検出する検出電極と、上記イオン照射電極から上記検出電極に入力される電気力線とは逆極性の電気力線を上記検出電極に入力させるノイズ低減電極とを備えている。 A first invention is a surface potential measuring device for detecting a surface potential of a measurement target surface, and includes an ion irradiation electrode for irradiating ions onto the measurement target surface, a detection electrode facing an ion irradiation section of the measurement target surface which is the portion of the measurement target surface that is irradiated with ions by the ion irradiation electrode , for detecting the surface potential of the ion irradiation section during ion irradiation , and a noise reduction electrode for inputting electric field lines of opposite polarity to the electric field lines input from the ion irradiation electrode to the detection electrode.

第２の発明は、上記ノイズ低減電極が、電源に接続された電極本体を備え、上記電極本体は、上記検出電極側の表面が曲面である。 In a second aspect of the present invention, the noise reduction electrode includes an electrode body connected to a power source, and the electrode body has a curved surface on the detection electrode side.

第１の発明は、ノイズ低減電極から検出電極に入る電気力線が、イオン照射電極から検出電極へ入る電気力線をキャンセルすることで、検出電極で検出されるイオン照射電極からの電気ノイズを低減することができる。したがって、イオン照射電極からの電気ノイズがある場合でも、測定対象面の表面電位を、電気ノイズと区別して正確に測定できる。 In the first invention, the electric field lines entering the detection electrode from the noise reduction electrode cancel the electric field lines entering the detection electrode from the ion irradiation electrode , thereby reducing the electric noise from the ion irradiation electrode detected by the detection electrode. Therefore, even if there is electric noise from the ion irradiation electrode, the surface potential of the measurement target surface can be accurately measured by distinguishing it from the electric noise.

第２の発明によれば、ノイズ低減電極の電極本体の表面から放電が起こりにくく、ノイズ低減電極からの電気力線を安定して検出電極に入力させることができる。そのため、電気ノイズを継続的に低減できる。 According to the second aspect of the present invention, discharge is unlikely to occur from the surface of the electrode body of the noise reduction electrode, and electric field lines from the noise reduction electrode can be stably input to the detection electrode, thereby making it possible to continuously reduce electrical noise.

実施形態の測定装置のブロック図である。FIG. 1 is a block diagram of a measurement device according to an embodiment. 電極部分の拡大図である。FIG. ノイズ低減電極を作動させなかったときの測定値のグラフである。13 is a graph of measurements when the noise reduction electrodes are not activated. ノイズ低減電極を作動させたときの測定値のグラフである。13 is a graph of measurements when the noise reduction electrodes are activated.

［実施形態］
以下に、この発明の実施形態を説明する。
この実施形態は、発明の表面電位測定装置を、塗膜の硬化度（乾燥度）を推測するために、塗膜の硬化度に依存する体積抵抗を検出する装置に適用したものである。
なお塗膜の体積抵抗を測定する原理は、例えば特許文献３などに記載されている。 [Embodiment]
An embodiment of the present invention will be described below.
In this embodiment, the surface potential measuring device of the present invention is applied to a device for detecting volume resistance that depends on the degree of hardening of a coating film in order to estimate the degree of hardening (dryness) of the coating film.
The principle of measuring the volume resistivity of a coating film is described in, for example, Patent Document 3.

この実施形態では、接地された導電体のベース１上に形成された塗膜２が測定対象面である。この塗膜２の表面にイオン照射電極３からイオンを照射しながら、イオン照射部２ａの表面電位を測定する。
図１に示す、実施形態の表面電位測定装置は、塗膜２に対向した電位検出部４と、電位検出部４に隣接したノイズ低減電極５とを備えている。 In this embodiment, the surface to be measured is a coating film 2 formed on a grounded conductive base 1. While ions are irradiated onto the surface of this coating film 2 from an ion irradiation electrode 3, the surface potential of an ion irradiation portion 2a is measured.
The surface potential measuring device according to the embodiment shown in FIG. 1 includes a potential detection unit 4 facing a coating film 2 and a noise reduction electrode 5 adjacent to the potential detection unit 4 .

上記電位検出部４は、上記した従来の表面電位測定装置と同様の構成で、塗膜２のイオン照射部２ａに正対し、イオン照射部２ａの表面電位に応じて電荷が誘導される検出電極６を備えている。また、図示していないが、塗膜２と検出電極６との間の電界をチョッピングして交流電圧に変換する振動子や、検出電流を処理するデータ処理部を備え、検出電極６からアースへ流れる変位電流を表面電位の信号として検出するものである。 The potential detection unit 4 has a configuration similar to that of the conventional surface potential measurement device described above, and is provided with a detection electrode 6 that faces the ion irradiation portion 2a of the coating film 2 and in which a charge is induced according to the surface potential of the ion irradiation portion 2a. Although not shown, the potential detection unit 4 also includes an oscillator that chops the electric field between the coating film 2 and the detection electrode 6 and converts it into an AC voltage, and a data processing unit that processes the detection current, and detects the displacement current flowing from the detection electrode 6 to earth as a surface potential signal.

一方、上記ノイズ低減電極５は、金属製の電極本体からなり、電源７に接続されている。この電源７は、上記イオン照射電極３とは逆極性の電圧を、ノイズ低減電極５に印加する電源である。 On the other hand, the noise reduction electrode 5 is made of a metal electrode body and is connected to a power source 7. This power source 7 applies a voltage of the opposite polarity to the ion irradiation electrode 3 to the noise reduction electrode 5.

そして、上記ノイズ低減電極５は、上記電位検出部４を境にイオン照射電極３とほぼ反対側に配置され、電位検出部４側に位置する先端部５ａと、電源７に接続された支持部５ｂとからなる。上記先端部５ａは、表面形状が曲面であり、全表面に尖端部や角が存在しない形状にされている。例えば、先端部５ａは、球体や、両端面を曲面とした円柱などである。この先端部５ａの形状が、電極本体における検出電極６側の表面形状である。そして、先端部５ａの表面に丸棒の支持部５ｂの先端が固定され、支持部５ｂの基端が電源７に接続されている。
このようなノイズ低減電極５に所定の電圧を印加することによって、先端部５ａの表面からは電気力線Ｅ´が発生する（図２参照）。 The noise reduction electrode 5 is disposed on the substantially opposite side of the potential detection unit 4 from the ion irradiation electrode 3, and is composed of a tip portion 5a located on the potential detection unit 4 side, and a support portion 5b connected to a power source 7. The tip portion 5a has a curved surface shape, and is shaped so that there are no sharp edges or corners on the entire surface. For example, the tip portion 5a may be a sphere or a cylinder with curved both end faces. The shape of the tip portion 5a is the surface shape of the electrode body on the detection electrode 6 side. The tip of a round rod support portion 5b is fixed to the surface of the tip portion 5a, and the base end of the support portion 5b is connected to the power source 7.
By applying a predetermined voltage to the noise reduction electrode 5, electric field lines E' are generated from the surface of the tip portion 5a (see FIG. 2).

なお、上記イオン照射電極３は、針状の放電電極で、その周囲には図１に示すように、接地された筒電極８が設けられ、イオン照射電極３の先端が、筒電極８から突出しないようにされている。
筒電極８は、イオン照射電極３で生成された電荷の広がりを抑えて、イオン照射電極３から検出電極６へ直接入る電気力線を少なくするようにしている。 The ion irradiation electrode 3 is a needle-shaped discharge electrode, and is surrounded by a grounded cylindrical electrode 8 as shown in FIG. 1 so that the tip of the ion irradiation electrode 3 does not protrude from the cylindrical electrode 8.
The cylindrical electrode 8 suppresses the spread of the electric charge generated by the ion irradiation electrode 3 and reduces the electric field lines that directly enter the detection electrode 6 from the ion irradiation electrode 3 .

［作用・効果等］
上記の表面電位測定装置で、塗膜２のイオン照射部２ａの表面電位を測定する際には、イオン照射電極３にマイナスの電圧を印加し、放電を発生させて負電荷を塗膜２の表面のイオン照射部２ａに照射する。この時、イオン照射部２ａと検出電極６とが正対するように設定する。
電位検出部４は、イオン照射部２ａの表面電位に応じて検出電極６に誘導される電荷を検出することで、イオン照射部２ａの表面電位を検出する。 [Actions and Effects]
When the surface potential of the ion irradiation portion 2a of the coating film 2 is measured by the above-mentioned surface potential measuring device, a negative voltage is applied to the ion irradiation electrode 3 to generate a discharge and irradiate a negative charge onto the ion irradiation portion 2a on the surface of the coating film 2. At this time, the ion irradiation portion 2a and the detection electrode 6 are set so as to directly face each other.
The potential detection unit 4 detects the surface potential of the ion irradiation unit 2a by detecting charges induced in the detection electrode 6 in accordance with the surface potential of the ion irradiation unit 2a.

なお、この塗膜２は塗料が生乾きの状態で、その体積抵抗は十分に低いものである。そのため、塗膜２のイオン照射部２ａにおける表面電位の値は小さいはずである。
しかし、実際には、図２に示すように、検出電極６は、実細線で示したイオン照射部２ａからの電気力線だけでなく、イオン照射電極３から直接発生したり、イオン照射電極３から塗膜２のイオン照射部２ａに到達しない負電荷から発生したりする、破線で示した負の電気力線Ｅが入ってしまう。そのため、電位検出部４は、イオン照射部２ａの表面電位によるものと、イオン照射電極３又は負電荷から発生する電気力線Ｅによるものとを一緒に検出することになる。この破線の電気力線Ｅが電気ノイズである。 In addition, the volume resistivity of the coating film 2 is sufficiently low when the paint is in a semi-dried state, so the value of the surface potential at the ion-irradiated portion 2a of the coating film 2 should be small.
2, in reality, the detection electrode 6 is not only subjected to electric field lines from the ion irradiation portion 2a, shown by thin solid lines, but also to negative electric field lines E, shown by dashed lines, which are generated directly from the ion irradiation electrode 3 and from negative charges that do not reach the ion irradiation portion 2a of the coating film 2 from the ion irradiation electrode 3. Therefore, the potential detection unit 4 detects both the electric field lines due to the surface potential of the ion irradiation portion 2a and the electric field lines E generated from the ion irradiation electrode 3 or the negative charges. These dashed electric field lines E are electrical noise.

そのため、表面電位測定装置は、測定対象面であるイオン照射部２ａの表面電位を正確に測定できない。特に、表面電位測定装置は、表面電位の小さな値を検出しようとして電位検出部４の検出感度を上げれば、上記電気ノイズによって測定値が振り切れてしまう。 As a result, the surface potential measuring device cannot accurately measure the surface potential of the ion irradiation section 2a, which is the surface to be measured. In particular, if the surface potential measuring device increases the detection sensitivity of the potential detection section 4 in an attempt to detect small values of the surface potential, the measured value will go off the scale due to the electrical noise.

そこで、上記ノイズ低減電極５にプラスの電圧を印加して、この正のノイズ低減電極５から発生する正の電気力線Ｅ´を検出電極６に入力させる。このノイズ低減電極５からの正の電気力線Ｅ´によって、イオン照射電極３又は負電荷から発生する電気力線Ｅをキャンセルし、イオン照射電極３から発生した負の電気ノイズをキャンセルすることができる。
したがって、表面電位測定装置は、イオン照射中であっても、イオン照射部２ａの表面電位を測定することができる。 Therefore, a positive voltage is applied to the noise reduction electrode 5, and the positive electric field lines E' generated from this positive noise reduction electrode 5 are input to the detection electrode 6. The positive electric field lines E' from this noise reduction electrode 5 cancel the electric field lines E generated from the ion irradiation electrode 3 or the negative charge, and the negative electric noise generated from the ion irradiation electrode 3 can be canceled.
Therefore, the surface potential measuring device can measure the surface potential of the ion irradiation portion 2a even during ion irradiation.

なお、上記電気ノイズのキャンセルには、電気ノイズを完全にキャンセルするということではなく、測定値を区別できる程度に低減できるものも含むものとする。
また、負の電極から検出電極６に向かう電気力線を負の電気力線Ｅ、正の電極から検出電極に向かう電気力線を正の電気力線Ｅ´ということにする。 It should be noted that the cancellation of electrical noise does not mean that the electrical noise is completely cancelled, but rather includes that the electrical noise is reduced to a level that allows the measured values to be distinguished.
Moreover, the electric field lines from the negative electrode toward the detection electrode 6 are referred to as negative electric field lines E, and the electric field lines from the positive electrode toward the detection electrode are referred to as positive electric field lines E'.

［確認実験］
上記ノイズ低減電極５の効果を確認する実験について説明する。
実験装置は、図３に示す通りで、イオン照射電極３には負の電圧（－２．１ｋＶ）を印加し、ノイズ低減電極５には正の電圧（＋２．１ｋＶ）を印加する。
なお、上記電位検出部４は、上記ノイズ低減電極５に電圧を印加した状態で、予め表面電位がわかっている校正用サンプルを測定し、出力値を校正している。このように校正された電位検出部４によって、以下の実験を行なっている。 [Confirmation experiment]
An experiment for confirming the effect of the noise reduction electrode 5 will be described.
The experimental apparatus is as shown in FIG. 3, in which a negative voltage (−2.1 kV) is applied to the ion irradiation electrode 3 and a positive voltage (+2.1 kV) is applied to the noise reduction electrode 5 .
The potential detection unit 4 calibrates the output value by measuring a calibration sample whose surface potential is known in advance while a voltage is applied to the noise reduction electrode 5. The following experiment is carried out using the potential detection unit 4 calibrated in this manner.

確認実験では、処理対象面である低抵抗の塗膜２として、ジンクリッチペイントを亜鉛メッキ板に塗布したサンプル３種（Ａ，Ｂ，Ｃ）を使用し、ノイズ低減電極５の作動の有無でイオン照射部２ａの表面電位を測定した。
上記サンプルＡ，Ｂ，Ｃは、亜鉛粒子の密度によって体積抵抗が異なるように調整されたサンプルである。したがって、各サンプルＡ，Ｂ，Ｃは異なる表面電位になるはずである。 In the confirmation experiment, three types of samples (A, B, C) in which zinc-rich paint was applied to a zinc-plated plate were used as the low-resistance coating film 2, which was the surface to be treated, and the surface potential of the ion irradiation portion 2a was measured with and without the noise reduction electrode 5 operating.
The above samples A, B, and C are samples adjusted to have different volume resistivities depending on the density of zinc particles, and therefore each of samples A, B, and C should have a different surface potential.

具体的には、上記電位検出部４による測定を開始してから１０秒後にイオン照射電極３に電圧を印加する。その後２０秒間イオン照射部２ａをコロナ帯電させ、２０秒後に電圧印加をやめてから、３０秒間帯電電位の測定を続ける。
なお、ノイズ低減電極５は、塗膜２の表面からの高さｈ、検出電極６の中央からの距離ｄを、それぞれｈ＝２〔ｍｍ〕、ｄ＝７〔ｍｍ〕としている。これらの値は、ノイズ低減電極５から検出電極６へ入力する正の電気力線Ｅ´がノイズの電気力線Ｅとほぼ等量となって、ノイズを有効に低減できる位置として実験的に求めたものである。 Specifically, 10 seconds after the start of measurement by the potential detection unit 4, a voltage is applied to the ion irradiation electrode 3. Then, the ion irradiation unit 2a is corona-charged for 20 seconds, and the voltage application is stopped after 20 seconds, after which the measurement of the charging potential is continued for 30 seconds.
The noise reduction electrode 5 has a height h from the surface of the coating film 2 and a distance d from the center of the detection electrode 6 of h = 2 mm and d = 7 mm, respectively. These values were experimentally determined as positions where the positive electric field lines E' input from the noise reduction electrode 5 to the detection electrode 6 are substantially equal to the electric field lines E of the noise, thereby enabling effective noise reduction.

そして、ノイズ低減電極５と検出電極６との距離が小さく設定されることによって、ノイズ低減電極５への印加電圧が低くてもノイズを低減できることを確認している。
また、ノイズ低減電極５の先端部５ａを、検出電極６の測定可能領域内に突出しないように設定することによって、測定対象面からの電気力線の検出を上記先端部５ａが妨害しないようにしている。 It has been confirmed that by setting the distance between the noise reduction electrode 5 and the detection electrode 6 small , noise can be reduced even if the voltage applied to the noise reduction electrode 5 is low.
Furthermore, by setting the tip 5a of the noise reduction electrode 5 so that it does not protrude into the measurable area of the detection electrode 6, the tip 5a is prevented from interfering with the detection of the electric field lines from the surface to be measured.

［実験結果］
上記確認実験で、ノイズ低減電極５を作動させなかった場合、表面電位の測定結果は図３に示すようになり、電位検出部４の検出限界（Ｏ．Ｒ．）を超えてしまう。したがって、コロナ帯電中の塗膜２の表面電位は全く読み取れなかった。
この場合、コロナ帯電を停止した後の表面電位のわずかな変化から、塗膜２の体積抵抗を推測しなければならない。しかし、図３からは、サンプルＡ，Ｂ，Ｃによる差を検出することはできなかった。 [Experimental result]
In the above confirmation experiment, when the noise reduction electrode 5 was not operated, the measurement result of the surface potential was as shown in Figure 3, which exceeded the detection limit (O.R.) of the potential detector 4. Therefore, the surface potential of the coating film 2 during corona charging could not be read at all.
In this case, the volume resistivity of the coating film 2 must be estimated from the slight change in the surface potential after the corona charging was stopped. However, no difference between samples A, B, and C could be detected from FIG.

一方、イオン照射電極３と同時にノイズ低減電極５を動作させた場合の測定結果は、図４に示すようになった。すなわち、コロナ帯電中の表面電位の測定値が、電位検出部４の検出可能範囲となり、体積抵抗の異なる塗膜（サンプルＡ，Ｂ，Ｃ）の表面電位をそれぞれ測定することができた。
以上のように、ノイズ低減電極５から検出電極６に入力する電気力線Ｅ´を生成させることによって、イオン照射電極３からの電気ノイズの電気力線Ｅをキャンセルし、測定対象面の電位を検出しやすくすることができる。
なお、図４では、イオン照射電極３及びノイズ低減電極５への印加電圧を切った直後に測定電位にスパイクが表れているが、これは検出電極６に誘導された電荷の放電によるものであり、本測定には影響しない。 On the other hand, the measurement results when the noise reduction electrode 5 was operated simultaneously with the ion irradiation electrode 3 were as shown in Fig. 4. That is, the measured value of the surface potential during corona charging was within the range detectable by the potential detection unit 4, and the surface potentials of the coating films (samples A, B, and C) with different volume resistivities could be measured.
As described above, by generating electric field lines E' input from the noise reduction electrode 5 to the detection electrode 6, the electric field lines E of the electrical noise from the ion irradiation electrode 3 can be canceled, making it easier to detect the potential of the surface to be measured.
In addition, in FIG. 4, a spike appears in the measured potential immediately after the voltage applied to the ion irradiation electrode 3 and the noise reduction electrode 5 is turned off. However, this is due to the discharge of the charge induced in the detection electrode 6 and does not affect the measurement.

上記実施形態では、測定対象面にイオンを照射するためのイオン照射電極３がノイズ発生源になっているが、ノイズ発生源はこれに限らない。電極や、電源線、信号線など、周囲に電界を形成する物であれば、全て電気ノイズを発生するノイズ発生源となる可能性がある。どのようなノイズ発生源であっても、上記のようなノイズ低減電極５によって、ノイズ発生源から検出電極６に向かう電気力線と逆極性の電気力線を検出電極６に入力するようにすれば、電気ノイズを低減させることができる。 In the above embodiment, the ion irradiation electrode 3 for irradiating ions onto the surface to be measured is the noise source, but the noise source is not limited to this. Anything that forms an electric field around it, such as an electrode, a power line, or a signal line, can potentially become a noise source that generates electrical noise. Regardless of the noise source, electrical noise can be reduced by inputting an electric field of the opposite polarity to the electric field line from the noise source toward the detection electrode 6 to the detection electrode 6 using the noise reduction electrode 5 as described above.

この場合、ノイズ発生源から検出電極６で検出される電気力線と、ノイズ低減電極５から検出電極６で検出される電気力線とが等量であれば、電気ノイズを完全にキャンセルできることになる。ただし、これらの電気力線が等量でなくても、電気ノイズを十分に低減できれば、測定は可能になる。 In this case, if the electric field lines detected by the detection electrode 6 from the noise source and the electric field lines detected by the detection electrode 6 from the noise reduction electrode 5 are equal, the electrical noise can be completely canceled. However, even if these electric field lines are not equal, measurement is possible as long as the electrical noise can be sufficiently reduced.

また、ノイズ低減電極５の先端の表面を、曲面にして、表面からの放電を防止することで、ノイズ低減の効果を高めている。もし、ノイズ低減電極５の表面に尖端部があると、そこが放電ポイントとなって放電が発生してしまうが、放電が発生すれば、検出電極６に入る電気力線Ｅ´が不安定になってしまう。 In addition, the surface of the tip of the noise reduction electrode 5 is curved to prevent discharge from the surface, thereby enhancing the noise reduction effect. If there is a sharp tip on the surface of the noise reduction electrode 5, this will become a discharge point and cause discharge. If discharge occurs, the electric field lines E' entering the detection electrode 6 will become unstable.

なお、ノイズ低減電極５の先端部５ａの位置は、先端部５ａからの電気力線Ｅ´が、測定対象面に影響を与えないように設定することが好ましい。
ノイズ低減電極５が測定対象面に近すぎれば、測定対象面からの電気力線が検出電極６ではなく、ノイズ低減電極５に向かってしまう。しかし、上記のように、ノイズ低減電極５を、測定対象面より検出電極６の近くに設置することによって、ノイズ低減電極５から発生する正の電気力線Ｅ´が検出電極６に入りやすくなるとともに、測定対象面への影響を小さくできる。
また、上記ノイズ低減電極５からの正の電気力線Ｅ´が、測定対象面の表面電位に影響を与え、測定値に影響を与える可能性があっても、ノイズ低減電極を作動させた状態で電位検出部４の校正を行なうことで、測定値への影響を低減させることができる。 The position of the tip 5a of the noise reduction electrode 5 is preferably set so that the electric field lines E' from the tip 5a do not affect the surface to be measured.
If the noise reduction electrode 5 is too close to the surface to be measured, the electric field lines from the surface to be measured will be directed toward the noise reduction electrode 5, not toward the detection electrode 6. However, as described above, by placing the noise reduction electrode 5 closer to the detection electrode 6 than to the surface to be measured, the positive electric field lines E' generated from the noise reduction electrode 5 can more easily enter the detection electrode 6, and the effect on the surface to be measured can be reduced.
Furthermore, even if the positive electric field lines E' from the noise reduction electrode 5 may affect the surface potential of the surface being measured and thus the measured value, the effect on the measured value can be reduced by calibrating the potential detection unit 4 with the noise reduction electrode activated.

イオンが照射されている部分の表面電位を、電気ノイズの影響を排除して測定することができる。 The surface potential of the portion irradiated with ions can be measured without being affected by electrical noise.

２ （測定対象）塗膜
２ａ （測定対象面）イオン照射部
３ （ノイズ発生源）イオン照射電極
４ 電位検出部
５ ノイズ低減電極
５ａ （電極本体の検出電極側）先端部
５ｂ （電極本体）支持部
６ 検出電極 2 (measurement object) coating film 2a (measurement object surface) ion irradiation section 3 (noise generation source) ion irradiation electrode 4 potential detection section 5 noise reduction electrode 5a (detection electrode side of electrode body) tip section 5b (electrode body) support section 6 detection electrode

Claims (2)

測定対象面の表面電位を検出する表面電位測定装置であって、
上記測定対象面にイオンを照射するイオン照射電極と、
上記測定対象面であって、上記イオン照射電極によるイオンが照射される部分であるイオン照射部と正対して、イオン照射中における上記イオン照射部の表面電位を検出する検出電極と、
上記イオン照射電極から上記検出電極に入力される電気力線とは逆極性の電気力線を上記検出電極に入力させるノイズ低減電極と
を備えた表面電位測定装置。 A surface potential measuring device for detecting a surface potential of a measurement target surface, comprising:
an ion irradiation electrode that irradiates ions onto the measurement target surface;
a detection electrode that faces an ion irradiation portion, which is a portion of the measurement target surface that is irradiated with ions by the ion irradiation electrode , and detects a surface potential of the ion irradiation portion during ion irradiation ;
a noise reduction electrode for inputting to the detection electrode electric lines of force having a polarity opposite to that of electric lines of force input from the ion irradiation electrode to the detection electrode. 上記ノイズ低減電極は、
電源に接続された電極本体を備え、
上記電極本体は、上記検出電極側の表面が曲面である
請求項１に記載の表面電位測定装置。 The noise reduction electrode is
An electrode body connected to a power source,
The surface potential measuring device according to claim 1 , wherein the surface of the electrode body facing the detection electrode is curved .
JP2023133231A 2023-08-18 2023-08-18 Surface potential measuring device Active JP7465475B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2023133231A JP7465475B1 (en) 2023-08-18 2023-08-18 Surface potential measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2023133231A JP7465475B1 (en) 2023-08-18 2023-08-18 Surface potential measuring device

Publications (1)

Publication Number Publication Date
JP7465475B1 true JP7465475B1 (en) 2024-04-11

Family

ID=90606784

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023133231A Active JP7465475B1 (en) 2023-08-18 2023-08-18 Surface potential measuring device

Country Status (1)

Country Link
JP (1) JP7465475B1 (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017167011A (en) 2016-03-17 2017-09-21 国立大学法人山形大学 Physical properties measuring method

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017167011A (en) 2016-03-17 2017-09-21 国立大学法人山形大学 Physical properties measuring method

Similar Documents

Publication Publication Date Title
Yin et al. Studies of the factors influencing the imaging performance of the capacitive imaging technique
Llovera et al. Measurements of electrostatic potentials and electric fields in some industrial applications: Basic principles
JP7465475B1 (en) Surface potential measuring device
Auer et al. The charge and velocity detector of the cosmic dust analyzer on Cassini
Zhang et al. Precision measurement of coating thickness on ferromagnetic tube using pulsed eddy current technique
Ye et al. A decay time approach for linear measurement of electrical conductivity
JP5510629B2 (en) Charge transfer rate measuring device and method, surface resistance measuring device and method, and program for them
US6717413B1 (en) Contact potential difference ionization detector
KR102483516B1 (en) Radon detector using pulsified alpha particle
Kasitsyn et al. Control of electron beam wielding parameters based on the gap scanning system data during the welding process
Spolaore et al. Automatic Langmuir probe measurement in a magnetron sputtering system
Abdollahi-Mamoudan et al. Multi-electrode coplanar capacitive probe with various arrangements for non-destructive testing of materials
Tytko et al. Eddy current testing of conductive discs using the pot-core sensor
Shull et al. Characterization of capacitive array for NDE applications
Sotirov et al. Design and development of an electrostatic voltmeter based on surface potential sensor
Yin et al. Further investigations into capacitive imaging for NDE
Jiang et al. Calculation and analysis of an analytical model for magnetic field monitoring based on TREE in eddy current testing
Mwelango et al. Investigations into the negative sensitivity phenomenon in the detection of hidden defects using coplanar capacitive sensors
RU2193184C2 (en) Method of determination of dielectric permittivity and thickness of dielectric coats on metal
Gibson et al. A simple method for determining shallow charge distributions in dielectrics via pulsed electroacoustic measurements
Zhang et al. A spherical capacitive probe for measuring the thickness of coatings on metals
Fotis et al. Measurement of the magnetic field radiating by electrostatic discharges using commercial ESD generators
Ye et al. An alternating current electric flux leakage testing methodology and experimental research for metallic materials
Reznikov et al. Comparison of vibrating and fixed Kelvin Probe for non-destructive evaluation
JP7320782B2 (en) Coating film property measuring method and measuring device

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20230901

A871 Explanation of circumstances concerning accelerated examination

Free format text: JAPANESE INTERMEDIATE CODE: A871

Effective date: 20230901

A80 Written request to apply exceptions to lack of novelty of invention

Free format text: JAPANESE INTERMEDIATE CODE: A80

Effective date: 20230829

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20231114

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20231225

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20240227

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20240319

R150 Certificate of patent or registration of utility model

Ref document number: 7465475

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150