JP7455671B2 - Image dimension measuring device - Google Patents

Description

TECHNICAL FIELD The present invention relates to an image dimension measuring device equipped with a rotation mechanism for rotating an object to be measured.

BACKGROUND OF THE INVENTION Conventionally, dimension measuring apparatuses have been known that obtain dimensions of each part of a measurement target object based on an image of the measurement target object held rotatably. For example, Patent Document 1 discloses that a machining tool fixed to the main shaft of a machining center is imaged from the side with a camera, a contour image is extracted by performing image processing on the image taken by the camera, and a contour image is extracted from the contour image. An apparatus for calculating the dimensions of a machining tool is disclosed.

Japanese Patent Application Publication No. 2006-284531

By the way, the dimension measuring device of Patent Document 1 targets, for example, a cylindrical member to be measured, and measures a D-cut surface in which a flat surface is formed on a part of the outer peripheral surface or a hole formed in the member. , it is possible to measure the outer diameter, roundness, etc. of the member.

However, since the dimension measuring device of Patent Document 1 is for use in a machining center, it is applicable only to cylindrical members, and does not take into account the dimension measurement of members such as rectangular parallelepipeds. In other words, if the object to be measured is a rectangular parallelepiped, a different surface will appear every 90 degrees of rotation angle, but among these surfaces, for example, two different surfaces each have parts that can serve as measurement elements. There is. In such a case, when you want to measure the distance in the X direction or the distance in the Y direction between a measurement element on one surface and a measurement element on another surface, you can use an image taken only from one direction with a camera. However, the dimension measuring device of Patent Document 1 cannot cope with this problem.

The present disclosure has been made in view of this point, and its purpose is to make it possible to measure dimensions between measurement elements when there are parts that can be measurement elements on two different surfaces. It is to make it.

In order to achieve the above object, the first disclosure may be based on an image dimension measuring device that measures the dimensions of an object to be measured. The image dimension measuring device has a rotation mechanism that rotates the measurement target object around a predetermined axis, an optical axis that intersects the rotation axis of the rotation mechanism, an imaging unit for generating a measurement target image, and a measurement unit. an operation section for instructing to rotate the object in a predetermined angle unit; a control unit for receiving instructions from the operation section and controlling the rotation mechanism to rotate the measurement object in a predetermined angle unit; a first measurement element set on a first measurement object image taken by the unit; and a second measurement taken at a rotation angle different from the rotation angle at which the first measurement object image was taken. and a control unit that detects a second measurement element set on the object image and measures a dimension between the first measurement element and the second measurement element.

According to this configuration, the object to be measured can be rotated in a predetermined angular unit, and when this predetermined angular unit is, for example, 90 degrees, for example, in the case of a rectangular parallelepiped box, the four It becomes possible to image each of the side surfaces using the imaging section. Furthermore, the predetermined angular unit can be set to 30 degrees or 45 degrees, and in these cases, if the object is a rectangular parallelepiped, the four sides of the rectangular parallelepiped must be directly facing the imaging unit to capture the image. becomes possible. When one side surface of the measurement object is captured in the first measurement object image, the first measurement element can be set on the first measurement object image. Further, when another side surface of the measurement object is captured in the second measurement object image, the second measurement element can be set on the second measurement object image. Therefore, it is possible to set the first measurement element and the second measurement element that exist on two different planes. After setting each measurement element, the control unit can measure the dimension between the first measurement element and the second measurement element existing on the two different surfaces. The measured dimensions can be displayed on, for example, a display unit.

When the rotation angle when capturing the first measurement object image is 0 degrees, the rotation angle when capturing the second measurement object image may be 90 degrees or 180 degrees. or 270 degrees. Further, the first measurement element and the second measurement element may have the same attribute, such as holes, or may have different attributes, such as a hole and a straight line. Furthermore, "rotating in 90 degree increments" includes not only rotating by 90 degrees and stopping, but also continuously rotating 180 degrees and stopping, and continuously rotating 270 degrees and stopping.

In a second disclosure, the control unit detects a flat part of the measurement target based on the measurement target image captured by the imaging unit, and detects a rotation angle when the flat part directly faces the imaging unit. can be obtained, and the rotation mechanism can be controlled so as to achieve the obtained rotation angle of facing each other.

According to this configuration, the flat portion of the object to be measured can be automatically brought to face the imaging section, so that the setting operation by the user can be simplified. Furthermore, since the object to be measured can be imaged while directly facing the imaging section, measurement accuracy can be improved. Measuring elements may be present in the planar portion.

In a third disclosure, the control unit can rotate the measurement object in units of 90 degrees with the facing rotation angle being 0 degrees.

That is, since the state in which the plane portion of the object to be measured is directly facing the imaging unit is defined as 0 degrees, and the object to be measured can be rotated in 90 degree increments from there, the user can operate the device in an intuitive and easy-to-understand manner.

In a fourth disclosure, when the second measurement object image is an image of the measurement object rotated by 180 degrees from the rotation angle at which the first measurement object image was acquired, , the dimensions between the first measurement element and the second measurement element can be measured by mutually converting the first measurement object image and the second measurement object image based on predetermined information.

In a fifth disclosure, a first XY coordinate system and a second XY coordinate system are set for each of the first measurement object image and the second measurement object image, and the first measurement object image The first XY coordinate system set in the image, the second XY coordinate system set in the second measurement object image, and the predetermined information include the first measurement object image and the second measurement object image. A dimension between the first measurement element and the second measurement element can be measured by mutually converting the object images.

According to this configuration, for example, if the first measurement object image is the front side of the measurement object and the second measurement object image is the back side of the measurement object, the first measurement object image set on the front side By mutually converting the XY coordinate system and the second XY coordinate system set on the back side, it is possible to accurately measure the dimensions between the first measurement element on the front side and the second measurement element on the back side. become.

In a sixth disclosure, the outline of the measurement target in the first measurement target image and the outline of the measurement target in the second measurement target image are used as the predetermined information, and the outline of the measurement target in the first measurement target image is used as the predetermined information. A dimension between the first measurement element and the second measurement element can be measured by mutually converting the image and the second measurement object image.

The seventh disclosure includes a display unit that can display the first measurement element and the second measurement element in one image, so that the user can easily see, for example, the positional relationship between the measurement element on the front side and the measurement element on the back side. can be grasped.

In an eighth disclosure, the operation unit receives a user's selection operation as to whether the measurement target is a box object or a shape other than the box object, and the control unit causes the operation unit to select the measurement target object by the operation unit. If the selection operation indicating that the object is a box object is accepted, the rotation mechanism is controlled to rotate the object to be measured in 90 degree increments, while the operation unit controls the operation unit to select whether the object to be measured has a shape other than a box object. If the selection operation is accepted, the rotation mechanism can be controlled to rotate the measurement object at an arbitrary angle.

In other words, when the object to be measured is a box object, the effect of rotating it in 90 degree increments is noticeable, but if the object to be measured is a shaft object, the effect of rotating it in 90 degree increments may not be expected. be. In this configuration, when the user selects that the object to be measured is a box object, the object to be measured is rotated in 90 degree increments, while when the object is other than a box object, for example, a shaft object, the object to be measured is can be rotated at any angle, making it easier to perform measurement tasks according to the object to be measured. In addition, even if it is a shaft object, it may be rotated in units of 90 degrees.

The operation of selecting the type of measurement target object may be, for example, an operation of selecting from two candidates, a box object and other candidates, or an operation of selecting one of a box object and a shaft object, It may also be an operation of selecting from three or more candidates.

In a ninth disclosure, the rotation mechanism is configured to be able to attach or detach any chuck mechanism from among a plurality of chuck mechanisms including a box chuck mechanism for gripping a box object and a shaft chuck mechanism for gripping a shaft object; The plurality of chuck mechanisms have a common attachment/detachment portion to the rotation mechanism.

According to this configuration, it is possible to replace at least the chuck mechanism for box objects and the chuck mechanism for shaft objects with a rotating mechanism, and in this case, since the attachment/detachment part for the rotation mechanism is shared, workability during replacement is good. become. After replacing the chuck mechanism, the user can control the rotation mechanism according to the chuck mechanism by selecting the type of object to be measured using the operation unit. In other words, it becomes possible to easily change from a shafted item to a boxed item in terms of both hardware and software.

A tenth disclosure includes a display section that can simultaneously display the first measurement object image and the second measurement object image.

According to this configuration, measurement objects imaged at different rotation angles can be displayed on the same screen, so measurement results can be quickly confirmed.

In an eleventh disclosure, the imaging unit captures a plurality of linked images including different regions of the measurement target, and the control unit connects the plurality of linked images captured by the imaging unit. The device includes a display unit that generates a display image and displays the display image generated by the control unit.

According to this configuration, a wide range of the object to be measured can be imaged into one display image and displayed on the display section, making it easier for the user to confirm the measurement results.

A twelfth disclosure is that the first measurement object image and the second measurement object image are displayed aligned in the horizontal direction, or the first measurement object image and the second measurement object image are displayed aligned in the horizontal direction. It includes a display unit that displays object images aligned in the vertical direction.

According to this configuration, since the first measurement object image and the second measurement object image are displayed like a design drawing, it becomes easier to understand the three-dimensional shape and the correspondence relationship between each drawing becomes easier. Recognizable.

In a thirteenth disclosure, the operation unit receives an operation for selecting one of the first measurement target image and the second measurement target image by the user, and the control unit receives the selected measurement target image. The rotation mechanism can be controlled so that the rotation angle is the same as the rotation angle of the object to be measured when the object image is captured.

According to this configuration, for example, when the user performs a selection operation on the first measurement object image with the first measurement object image and the second measurement object image displayed, the rotation angle of the measurement object is the same as the rotation angle of the measurement object when the first measurement object image is captured. Thereby, the rotation angle of the object to be measured can be easily adjusted to the rotation angle that the user wants to confirm.

In the fourteenth disclosure, the imaging unit captures a preview image of the measurement target in a state where the rotation angle of the measurement target is the same as the rotation angle of the measurement target when the selected measurement target image is captured. and simultaneously display the first measurement object image, the second measurement object image, and the preview image, and display the preview image as the first measurement object image and the second measurement object image. It is equipped with a display section that can display an enlarged image of the object.

According to this configuration, the preview image can be displayed in an enlarged manner, so that the user can easily check the measurement results on the preview image.

According to the present disclosure, the first and second measurement elements respectively set on the first and second measurement object images captured by rotating the measurement object in a predetermined angle unit are detected, and the first and second measurement elements are detected. Dimensions between the element and the second measurement element can be measured. Thereby, when portions that can serve as measurement elements exist on two different surfaces, the dimensions between the measurement elements can be measured.

FIG. 1 is a front view of the image dimension measuring device according to the present embodiment. It is a perspective view of the above-mentioned image size measuring device. It is a block diagram of the above-mentioned image size measuring device. FIG. 3 is a perspective view showing the positional relationship between a rotating body and a lock mechanism. FIG. 3 is a perspective view showing a state in which the chuck mechanism is attached to a rotating body. FIG. 3 is an exploded perspective view of the chuck mechanism and the rotating body as seen from the left side. It is a perspective view showing another form of a chuck mechanism. FIG. 3 is a diagram of a measurement target consisting of a shaft object viewed from the side where a D-cut surface is formed. It is a diagram showing a state in which the measurement target consisting of a shaft is rotated until the D-cut surface is located at the bottom of the diagram. FIG. 2 is a plan view of a measurement object made of a box. FIG. 2 is a side view of a measurement object made of a box. 3 is a flowchart illustrating an example of a procedure in measurement setting mode. 5 is a flowchart showing details of a procedure in measurement setting mode. It is a figure showing an example of a user interface screen for settings. FIG. 7 is a diagram illustrating an example in which characteristic shape selection windows are displayed in a superimposed manner. It is a diagram showing the distance between the axis and the D-cut surface when rotated until the D-cut surface is located at the bottom of the figure. 13B is a diagram showing the distance between the axis and the D-cut surface when the D-cut surface is brought closer to the imaging unit than the position shown in FIG. 13A. It is a graph showing the relationship between the rotation angle of the measurement target and the distance between the D-cut surface and the axis. It is a schematic diagram when a pin has a characteristic shape. It is a graph showing the relationship between the rotation angle of the object to be measured and the distance between the tip of the pin and the axis. It is a figure which shows an example of the user interface screen for parameter setting. It is a figure which shows the example of a combination of a preset shape, measurement content, and maximum/minimum. FIG. 6 is a diagram illustrating an example of displaying a window for executing an auto-angle function during editing. FIG. 6 is a diagram illustrating a case where an auto-angle function is executed on a box-like measurement object. FIG. 12 is a diagram corresponding to FIG. 11 in a state where the characteristic shape directly faces the imaging unit. FIG. 7 is a diagram illustrating an example of a user interface image that displays a measurement target image in a state where the dialog is closed at an angle of 0 degrees. FIG. 6 is a diagram illustrating an example of a user interface image that displays a measurement object image in which elements used to detect the direction of the measurement object are rotated by 90 degrees. FIG. 3 is a diagram showing an example of a developed image of a measurement target. FIG. 21A is a diagram corresponding to FIG. 21A when dimensions are displayed. FIG. 7 is a diagram showing an example of setting contents when the rotation angle is 0 degrees. It is a figure which shows the example of the setting content when a rotation angle is 90 degrees. It is a figure which shows the example of the setting content of a measurement element when a rotation angle is 0 degrees. It is a figure which shows the example of the setting content of a measurement element when a rotation angle is 90 degrees. FIG. 13 is a diagram showing an example of a user interface screen for registering a pattern image. FIG. 7 is a diagram illustrating an example of a user interface image that displays an image of a box-shaped object to be measured in a state where the angle at which the dialog is closed is 0 degrees. FIG. 6 is a diagram illustrating an example of a user interface image that displays a measurement object image in which the elements used to detect the direction of the box measurement object are rotated by 180 degrees. 3 is a flowchart illustrating an example of a procedure in continuous measurement mode. It is a figure which shows the measurement target object image which displayed the positioning guide. FIG. 3 is a diagram showing a state in which a measurement target is aligned with a positioning guide. FIG. 3 is a diagram showing an example of a user interface image for displaying measurement results. FIG. 6 is an explanatory diagram of a measurement angle in a setting that does not include a mechanical reference element. FIG. 6 is an explanatory diagram of a measurement angle in a setting including a mechanical reference element. It is a figure which shows an example of the user interface image displayed on a display part when a measurement target object is a box object.

Hereinafter, embodiments of the present invention will be described in detail based on the drawings. Note that the following description of preferred embodiments is essentially just an example, and is not intended to limit the present invention, its applications, or its uses.

FIG. 1 is a front view of an image dimension measuring device 1 according to an embodiment of the present invention, and FIG. 2 is a perspective view of the image dimension measuring device 1 according to an embodiment of the present invention. Further, FIG. 3 is a block diagram schematically showing the configuration of the image dimension measuring device 1 according to the embodiment of the present invention. The image dimension measurement device 1 measures the dimensions of a measurement target W (shown in FIGS. 1 and 2) such as various workpieces, and as shown in FIG. It includes a storage section 4 and a rotation unit 5. The control unit 3 may be separate from the device main body 2 and communicably connected to the device main body 2 through a communication line or the like, or may be incorporated and integrated inside the device main body 2. Similarly, the storage unit 4 may be separate from the device main body 2, or may be integrated into the device main body 2. In this example, the control unit 3 and the storage section 4 are separate bodies, but they may be integrated.

In the description of this embodiment, when the image dimension measuring device 1 is viewed from the user, the side located in front is referred to as the front side, the side located in the back is referred to as the rear side, and the side located on the left is referred to as the front side. is called the left side, and the side located on the right is called the right side. The front side can be called the near side, and the back side can also be called the back side. This is only defined for convenience of explanation.

(Configuration of device main body 2 and control unit 3)
As shown in FIGS. 1 and 2, the device main body 2 includes a base portion 10 and an arm portion 11 extending upward from the back side of the base portion 10. As shown in FIGS. A stage 12 is provided on the top of the base portion 10 on which the object W to be measured is placed. The stage 12 extends substantially horizontally. A transmitting section 12a is provided near the center of the stage 12 to transmit light. The stage 12 can be driven by a stage drive section 12c shown in FIG.

As shown in FIG. 3, the device main body 2 is provided with a lighting section 13. The illumination section 13 includes an epi-illumination section 13a built into the arm section 11 and a transmitted illumination section 13b built into the base section 10. The epi-illumination unit 13a is an illumination device that illuminates the measurement target W mounted (stationary) on the stage 12 or the measurement target W rotatable by the rotation unit 5 from above, and uses light from the imaging unit 15, which will be described later. It can be formed in the shape of a ring surrounding axis A (shown in Figure 1). The transmitted illumination section 13b is an illumination device that illuminates the measurement object W placed on the transmission section 12a of the stage 12 or the measurement object W rotatable by the rotation unit 5 from below. In FIGS. 1 and 2, only the measurement object W that can be rotated by the rotation unit 5 is shown.

An operating section 14 is provided on the front side of the base section 10. The operation unit 14 includes various buttons, switches, dials, etc. that are operated by the user. The operating section 14 is connected to the control unit 3, and the control unit 3 detects the operating state of the operating section 14 and controls each section according to the operating state of the operating section 14. The operation unit 14 may be configured with a touch panel or the like capable of detecting a user's touch operation, and in this case, the operation unit 14 can be incorporated into a display unit 16, which will be described later. Furthermore, the operation section 14 may be configured with a keyboard, a mouse, etc. that can be connected to the control unit 3.

The epi-illumination section 13a and the transmitted illumination section 13b are connected to and controlled by the control unit 3. For example, when the control unit 3 detects that an operation to start measurement of the measurement target object W has been performed using the operation section 14, the epi-illumination section 13a or the transmitted illumination section 13b can be turned on to irradiate light.

The arm section 11 is provided with an imaging section 15 (shown in FIG. 3). The imaging unit 15 is a part for capturing an image of the measurement object W placed on the stage 12 or the measurement object W rotatable by the rotation unit 5, and generating a measurement object image. An example of the imaging unit 15 is a camera having an imaging element such as a CCD (Charge Coupled Device) or a CMOS (Complementary Metal Oxide Semiconductor). As shown in FIG. 1, the optical axis A of the imaging section 15 is set vertically downward, and although not shown, an optical system including a light receiving lens and an imaging lens is installed coaxially with the optical axis A of the imaging section 15. It is being The imaging section 15 may be an imaging unit that includes an optical system, or may not include an optical system. Light emitted from the epi-illumination section 13a and reflected by the measurement target W, light emitted from the transmissive illumination section 13b and transmitted through the transmissive section 12a of the stage 12, etc. enter the imaging section 15. . As the focus adjustment method using the optical system, a conventionally used method can be applied.

The imaging unit 15 generates an image based on the amount of received light. The imaging section 15 is connected to the control unit 3, and the images generated by the imaging section 15 are transmitted to the control unit 3 as image data. Further, the control unit 3 can control the imaging section 15. For example, when the control unit 3 detects that an operation to start measurement of the object W to be measured has been performed using the operation section 14, the epi-illumination section 13a or the transmitted illumination section 13b is turned on to emit light, and the imaging section 15 is activated. Execute imaging processing. As a result, a measurement object image is generated by the imaging section 15, and the generated measurement object image is transmitted to the control unit 3.

The control unit 3 incorporates the measurement object image transmitted from the imaging section 15 into a user interface screen and displays it on the display section 16. That is, the display section 16 is provided on the upper part of the arm section 11 so as to face the front. The display section 16 is configured with, for example, a liquid crystal display or an organic EL display, and is connected to the control unit 3. The control unit 3 controls the display section 16 to display various user interface screens on the display section 16 .

A storage section 4 is connected to the control unit 3. The storage unit 4 is composed of, for example, an SSD (Solid State Drive) or a hard disk. The control unit 3 is connected to each piece of hardware as described above, controls the operation of each piece of hardware, and executes software functions according to a computer program stored in the storage unit 4. Although not shown, the control unit 3 is provided with a RAM or the like, in which a load module is expanded when a computer program is executed, and stores temporary data generated when the computer program is executed.

The control unit 3 is provided with an edge extraction section 30 and a measurement section 31. The edge extraction section 30 is a section that extracts edges (outlines) of the measurement object W by performing image processing on the measurement object image transmitted from the imaging section 15. Since the method of extracting edges of the measurement object is well known, detailed explanation will be omitted. The edge extraction unit 30 outputs an edge image indicating the edge of the measurement target object.

The edge image output from the edge extraction section 30 is input to the measurement section 31. The measurement unit 31 measures the dimensions of each part of the measurement object W using the edge image. The size measurement site can be specified in advance by the user. For example, when the user operates the operation unit 14 to specify two arbitrary points on the measurement target image while viewing the measurement target image displayed on the display unit 16, the The measurement site of the measurement object W can be specified. The measurement unit 31 can obtain the dimensions of a predetermined region by calculating the distance between edges, edge length, etc. corresponding to the measurement region specified by the user. The acquired dimensions can be displayed on the display unit 16. At this time, the value indicating the dimension and the dimension line can be displayed superimposed on the measurement object image.

(Configuration for rotating the measurement target W)
In this embodiment, the measurement target object W can be measured not only by placing it on the stage 12 but also by rotating the measurement target W. Specifically, the image dimension measuring device 1 includes a rotation unit (rotation mechanism) 5 that generates and outputs rotational force, and a chuck that grips the measurement target W, as a configuration for rotating the measurement target W and an accompanying configuration. A mechanism 6 is provided. Although the details will be described later, the chuck mechanism 6 is configured to be detachable from the rotation unit 5, and when the chuck mechanism 6 is attached to the rotation unit 5, the rotational force output from the rotation unit 5 is applied to the chuck. The signal is transmitted to the object W to be measured via the mechanism 6 and rotates the object W to be measured. The rotation unit 5 can keep the measurement object W rotated by a predetermined angle and then stopped.

(Configuration of rotating unit 5)
As shown in FIG. 1, the rotation unit 5 allows the measurement target W to be rotated around a predetermined rotation axis B in a state where it is placed above the transparent part 12a of the stage 12, and is stopped at an arbitrary rotation position to rotate the measurement target W. This is a stage for maintaining posture. In this embodiment, the rotation unit 5 is separate from the stage 12 and configured to be detachable from the stage 12, but the rotation unit 5 and the stage 12 may be configured as one unit. . In the case of a removable rotation unit 5, the rotation unit 5 can be attached to the stage 12 only when the rotation unit 5 is needed, and can be removed from the stage 12 when it is not needed.

The rotation unit 5 includes a motor 50 (shown in FIG. 3), a housing 51 containing the motor 50, and a rotating body 52 rotated by the motor 50. The motor 50 is fixed to a housing 51. The housing 51 is attached to the left end of the stage 12. Note that the housing 51 may be attached to the right end of the stage 12, and in this case, the stage 12 shown in FIG. 1 etc. may be made bilaterally symmetrical.

With the housing 51 attached to the stage 12, the output shaft of the motor 50 is arranged to extend horizontally toward the right. A rotating body 52 is fixed to this output shaft, and therefore, the rotating body 52 is rotated around a rotating axis B that extends horizontally in the left-right direction. Since the optical axis A of the imaging section 15 is in the vertical direction, the rotation axis B intersects with the optical axis A of the imaging section 15. In this embodiment, the rotation axis B is orthogonal to the optical axis A of the imaging unit 15, but it does not have to be orthogonal.

As shown in FIGS. 1 and 2, a chuck mechanism 6 is attached to the rotating body 52. In this embodiment, the rotating body 52 is directly connected to the output shaft of the motor 50, but the invention is not limited to this. For example, a reduction gear mechanism (not shown) may be provided between the motor 50 and the rotating body 52. good. In this case, the rotating body 52 is connected to the output shaft of the reduction gear mechanism.

As shown in FIG. 4, the rotating body 52 has an annular peripheral wall portion 52b that protrudes from the connecting portion 52a in the direction of the rotation axis B (to the right) and extends in the circumferential direction of the rotation axis B. The connecting portion 52a and the peripheral wall portion 52b are integrated. The axis of the peripheral wall portion 52b is located on the rotation axis B. A thread is formed on the outer peripheral surface of the peripheral wall portion 52b.

A plurality of slits 52c are formed in the peripheral wall portion 52b at intervals in the circumferential direction and extend from the tip (right end) in the protruding direction of the peripheral wall portion 52b toward the base end (left side). The left end of the slit 52c is located at an intermediate portion in the left-right direction of the peripheral wall portion 52b. By forming a plurality of slits 52c, when a fastening force is applied from the outside in the radial direction to the inside in the peripheral wall 52b, the width of each slit 52c becomes narrower, thereby reducing the diameter of the peripheral wall 52b. becomes possible. The deformation of the peripheral wall portion 52b at this time is deformation in an elastic deformation region, and it returns to its original shape by removing the fastening force. The slits 52c can be formed at equal intervals in the circumferential direction of the peripheral wall portion 52b.

As shown in FIGS. 1 and 2, the rotation unit 5 includes a manual adjustment knob 55, an encoder 56 (shown in FIG. 3) that detects the amount of rotation of the manual adjustment knob 55, and a processing circuit 57 (shown in FIG. 3). It is equipped with The manual adjustment knob 55 is supported by the housing 51 so as to be rotatable around an axis parallel to the rotation axis B. The manual adjustment knob 55 is located on the front side and left side of the housing 51, and protrudes from the housing 51 toward the left side. Thereby, the user can rotate the manual adjustment knob 55 with his left hand while sitting in front of the image dimension measuring device 1. Note that the position of the manual adjustment knob 55 is not particularly limited, and may be on the back side of the housing 51 or on the left side.

The encoder 56 is built into the housing 51, and can be configured with a conventionally known rotary encoder or the like. For example, when the user rotates the manual adjustment knob 55, the amount of rotation can be detected by the encoder 56, and the result detected by the encoder 56 is sent from the encoder 56 to the processing circuit 57 as a signal regarding the amount of rotation. Output.

The processing circuit 57 is a part that controls the motor 50, and may be built into the control unit 3 or the device main body 2. The processing circuit 57 receives a signal regarding the amount of rotation output from the encoder 56, converts it into the amount of rotation of the motor 50, and rotates the motor 50 by the converted amount of rotation. The amount of rotation of the manual adjustment knob 55 and the amount of rotation of the output shaft 50a of the motor 50 do not need to match, but only need to correspond to each other. For example, when the user rotates the manual adjustment knob 55 by 10 degrees, the encoder 56 detects that the manual adjustment knob 55 has rotated by 10 degrees, and outputs a detection signal to the processing circuit 57 according to the amount of rotation. When the processing circuit 57 acquires information that the manual adjustment knob 55 has rotated 10 degrees, the processing circuit 57 converts the amount of rotation of the manual adjustment knob 55 at a predetermined ratio and outputs a control signal to the motor 50. The control signal may be a signal that causes the output shaft 50a of the motor 50 to rotate by less than 10 degrees.

The control of the motor 50 by the processing circuit 57 is executed almost in real time, so when the manual adjustment knob 55 starts rotating, the motor 50 also rotates almost synchronously, and when the manual adjustment knob 55 stops, the motor 50 also rotates almost synchronously. Motor 50 also stops. This allows the user to rotate the measurement object W by an arbitrary angle.

In this example, since the rotating body 52 is directly driven by the motor 5, the processing circuit 57 only needs to control the motor 50 so that the output shaft 50a of the motor 50 rotates by the amount of rotation of the manual adjustment knob 55. . When a reduction gear mechanism is provided between the output shaft 50a of the motor 50 and the rotating body 52, the processing circuit 57 takes the reduction gear ratio into consideration and reduces the amount of rotation of the motor 50 by more than the amount of rotation of the manual adjustment knob 55. What is necessary is to rotate the output shaft 50a.

The rotation unit 5 is provided with a connection line 5a that is connected to the control unit 3 or the device main body 2. Electric power is supplied to the motor 50 via the connection line 5a. Further, communication between the rotation unit 5 and the control unit 3 or communication between the rotation unit 5 and the apparatus main body 2 is performed via the connection line 5a.

(Configuration of chuck mechanism 6)
As shown in FIGS. 5 and 6, the chuck mechanism 6 includes a chuck main body 60 that is attached to and detached from the rotating body 52, and first to third chuck claws 61 that are arranged to grip the measurement object W from three directions. 63, an adjusting member 64 for changing the positions of the first to third chuck claws 61 to 63, and a fastening member 80 for fastening and fixing the chuck body 60 to the rotating body 52. The chuck main body 60 is fastened and fixed to the rotating body 52 and is rotated by the motor 50 together with the rotating body 52 around the rotation axis B. Further, the chuck body 60 includes a holding member 65 that holds the first to third chuck claws 61 to 63, and a fastened member 69 that constitutes a fastened portion.

The holding member 65 has a guide plate part 65a that guides the first to third chuck claws 61 to 63 in the radial direction, and a boss part 65b to which the fastened member 69 is fixed, and these parts are integrated. ing. The boss portion 65b protrudes toward the left side from the left side surface of the member to be fastened 69. The axis of the boss portion 65b and the axis of the guide plate portion 65a are located on the rotation axis B (shown in FIG. 1). The guide plate portion 65a is provided with a first groove portion 65c, a second groove portion 65d, and a third groove portion 65e. These first to third groove portions 65c, 65d, and 65e extend radially in the radial direction and are spaced apart from each other in the circumferential direction. The ends of the first to third groove portions 65c, 65d, and 65e are open on the outer peripheral surface of the guide plate portion 65a.

The first to third chuck jaws 61 to 63 have first to third sliders 66 to 68, respectively. The first to third sliders 66 to 68 are inserted into the first to third grooves 65c, 65d, and 65e of the guide plate portion 65a, respectively, and extend in the longitudinal direction within the first to third grooves 65c, 65d, and 65e. It is a sliding member. The first to third chuck claws 61 to 63 are fixed to the right side surfaces of the first to third sliders 66 to 68, and protrude to the right from the guide plate portion 65a.

First to third convex portions 66a, 67a, and 68a are provided on the left side surfaces of the first to third sliders 66 to 68, respectively, so as to protrude toward the left side. The first to third convex portions 66a, 67a, and 68a protrude to the left side from the left side surface of the guide plate portion 65a.

The adjustment member 64 is manually rotated by the user around the rotation axis B with respect to the chuck body 60, so that the first to third chuck claws 61 to 63 are aligned along the first to third grooves 65c, 65d, and 65e. This is a member for moving in the radial direction. That is, the adjustment member 64 is formed into a disk shape as a whole, and its axis is disposed on the rotation axis B. A boss insertion hole 64a into which a boss portion 65b is inserted is formed in the center of the adjustment member 64. With the boss portion 65b inserted into the boss insertion hole 64a, the adjustment member 64 is rotatably supported around the rotation axis B with respect to the boss portion 65b. Although not shown, a spiral strip is formed on the right side surface of the adjustment member 64 so as to protrude toward the right side. The spiral strip extends in a spiral shape centered on the rotation axis B.

When the boss portion 65b is inserted into the boss insertion hole 64a of the adjustment member 64, the spiral strip engages with the first to third convex portions 66a, 67a, and 68a of the first to third sliders 66 to 68. ing. When the adjustment member 64 is rotated around the rotation axis B in this state, a force in the radial direction acts on the first to third sliders 66 to 68 due to the spiral strip, and as a result, the first to third sliders 66 to 68 68 slides in the longitudinal direction within the first to third grooves 65c, 65d, and 65e. In other words, the first to third chuck claws 61 to 63 can be moved in the radial direction. Note that a spiral groove may be provided instead of the spiral strip, and any mechanism that can convert rotational motion around the rotation axis B into linear motion in the radial direction may be used.

By changing the rotation direction of the adjustment member 64, the moving direction of the first to third chuck claws 61 to 63 can be changed. When the object to be measured W is to be gripped by the first to third chuck jaws 61 to 63, the adjustment member 64 may be rotated so that the first to third chuck jaws 61 to 63 move in a direction closer to each other. As a result, the object W to be measured can be gripped by the first to third chuck claws 61 to 63. On the other hand, when removing the measurement object W gripped by the first to third chuck jaws 61 to 63, the adjustment member 64 is rotated in the opposite direction to move the first to third chuck jaws 61 to 63 away from each other. Just move it.

The member to be fastened 69 is a disc-shaped member, and can be attached to the boss portion 65b of the holding member 65 using, for example, a retaining ring 81 or the like. In a state where the fastened member 69 is attached to the boss portion 65b, both are integrated and relative rotation is prevented. The axis of the fastened member 69 is located on the rotation axis B. The outer diameter of the fastened member 69 is set so that it can be inserted into the peripheral wall portion 52b of the rotating body 52 of the rotating unit 5.

As shown in FIG. 6, the fastening member 80 is a so-called nut, and in this embodiment is formed of an annular member. The axis of the fastening member 80 is located on the rotation axis B, and a center hole 80a into which the boss portion 65b can be inserted is formed in the center of the fastening member 80. A circular recess 80b is formed on the left side of the fastening member 80. A thread groove 80c is formed on the inner circumferential surface of the recess 80b, and is threaded into the thread of the peripheral wall portion 52b of the rotating body 53.

When the fastening member 80 is rotated and the thread groove 80c is screwed into the thread of the peripheral wall portion 52b of the rotating body 52, the peripheral wall portion 52b enters into the recess 80b. When the fastening member 80 is tightened, a fastening force is applied from the outside in the radial direction to the inside in the circumferential wall portion 52b due to the action of the screw, and the circumferential wall portion 52b is elastically deformed in the diametrical direction by this fastening force. At this time, since the member to be fastened 69 is inserted into the peripheral wall portion 52b of the rotating body 53, the inner peripheral surface of the peripheral wall portion 52b is brought into strong contact with the outer peripheral surface of the member to be fastened 69 due to tightening of the fastening member 80. The frictional force acting between the two becomes extremely large. As a result, the fastened member 69 is fastened to the rotating body 52 in a non-rotatable state, and the chuck mechanism 6 is attached to the rotating body 52. When removing the chuck mechanism 6, the fastening member 80 may be rotated in the loosening direction, thereby restoring the shape of the peripheral wall portion 52b.

(Another form of chuck mechanism)
The structure of the chuck mechanism can be changed according to the shape and size of the object W to be measured. A chuck mechanism 700 shown in FIG. 7 has first and second chuck claws 601 and 602. That is, the guide plate portion 65a of the holding member 65 is formed with first and second groove portions 65f and 65g that extend in the radial direction. The first and second groove portions 65f and 65g are both formed to be located on the same straight line passing through the rotation axis B and orthogonal to the rotation axis B. The first slider 606 of the first chuck jaw 601 is inserted into the first groove 65f, and the second slider 607 of the second chuck jaw 602 is inserted into the second groove 65g. The first and second sliders 606 and 607 have a convex portion (not shown) that engages with a spiral thread (not shown) of the adjusting member 64, and by rotating the adjusting member 64, It can be moved.

By separating the first and second chuck claws 601 and 602 from each other, it is possible to grip the box-shaped object W to be measured. Furthermore, the object W to be measured can also be gripped by bringing the first and second chuck claws 601 and 602 of the chuck mechanism 700 close to each other.

(Common parts of the chuck mechanism)
The chuck mechanism 6 shown in FIG. 5 is a chuck mechanism for an axial object that grips an axial object, and the chuck mechanism 700 shown in FIG. 7 is a chuck mechanism for a box object that grips a box object. The structure of the chuck mechanism is not limited to the structure shown in the figure, and may be a chuck mechanism of another structure. In this embodiment, an arbitrary chuck mechanism is configured to be detachable from among a plurality of chuck mechanisms including the chuck mechanism for an axial object 6 and the chuck mechanism for a box object 700. The plurality of chuck mechanisms 6, 700 have a common attachment/detachment part (the fastened member 69 and the fastening member 80) to the rotation unit 5, which improves the workability when replacing the chuck mechanisms 6, 700. In other words, the work of changing the measurement target W from an axial object to a box object is facilitated in terms of hardware.

As shown in FIG. 6, the rotating body 52 is a member on the casing 50 side, while the chuck mechanism 6 can be divided into a chuck common part and a chuck changing part. The chuck common part is a part common to the chuck mechanism 6 shown in FIG. 5 and the chuck mechanism 700 shown in FIG. 7. The chuck common part includes a part fastened to the rotating body 52, and the fact that the part fastened to the rotating body 52 is common means that all of the chuck mechanisms 6 and 700 must be changed on the rotating unit 5 side. This means that it can be easily attached and detached, improving convenience.

On the other hand, the chuck changing section is a different part between the chuck mechanism 6 shown in FIG. 5 and the chuck mechanism 700 shown in FIG. 7. The chuck mechanism 6 and the chuck mechanism 700 have different numbers of chuck claws and also different numbers of grooves in the guide plate portion 65a.

(Structure of object to be measured)
Here, the structure of the measurement target W of the shaft will be explained based on FIGS. 8A and 8B, but this does not limit the structure of the measurement target W. Although the measurement object W shown in FIGS. 1 and 2 is different from the measurement object W shown in FIGS. 8A and 8B, the measurement object W in both cases is a shaft object. A shaft is a member that has a cylindrical or cylindrical part, and specifically includes a rotating shaft, a support shaft, a bar, a cylindrical part, a processing tool, etc., and it may be solid or hollow. It's okay.

The left side of the object W to be measured is the part that is gripped by the chuck mechanism 6. When gripped by the chuck mechanism 6, the rotation axis B of the rotation unit 5 and the axis of the measurement target W substantially coincide with each other. The measurement object W has a large diameter portion W1 that is the thickest, an intermediate portion W2 that is thinner than the large diameter portion W1, and a small diameter portion W3 that is thinner than the intermediate portion W2. A flat surface W4 as a characteristic shape is provided in a part of the outer peripheral surface of the large diameter portion W1. The flat surface W4 is also called a D-cut surface because the cross section becomes D-shaped due to the formation of the flat surface W4. A groove W4a that is long in the axial direction of the object W to be measured is formed in the center of the flat surface W4. First to third pins W5 to W7 as characteristic shapes are provided on a part of the outer circumferential surface of the intermediate portion W2 at intervals from each other in the circumferential direction. A first hole W8, a second hole W9, and a groove W10 as characteristic shapes are provided in a part of the small diameter portion W3. Although the first hole W8 and the second hole W9 are through holes, they do not have to be through holes. The groove W10 is formed in the end surface of the object W to be measured.

The portions W4 to W10 that are the characteristic shapes of the measurement target W are provided at intervals from each other in the axial direction or at intervals from each other in the circumferential direction, but the position and number of the characteristic shapes are There is no particular limitation, and the number of characteristic shapes may be one. Further, since the characteristic shape may serve as a reference during measurement, it can also be referred to as a reference shape.

Alternatively, as shown in FIGS. 9A and 9B, the measuring object W20 may be a box. The measurement object W20 has a box portion W21 having a shape close to a rectangular parallelepiped. The characteristic shapes include a hole W22, a groove W23, a pin W24, and the like.

(Measurement setting mode)
The image dimension measuring device 1 is capable of executing a measurement setting mode for performing various settings before operation. After the user starts up the image dimension measuring device 1, the measurement setting mode is started by operating the measurement setting mode execution button.

(Measurement settings for shaft objects)
In the following description, a case will be described in which the measurement target object W is a shaft object. The procedure in the measurement setting mode will be explained based on the flowchart shown in FIG. 10A. In step SA1 after the start, a characteristic shape is designated and a pattern image is set. Before performing step SA1, the object to be measured W is gripped by the chuck mechanism 6. When executing the auto-angle function, which will be described later, there are two ways to perform auto-angle using a feature shape and auto-angle using a pattern image.In step SA1, specify the feature shape to be used when auto-angle using a feature shape and auto-angle using a pattern image. Set the pattern image to be used at the time. Both the auto-angle based on the characteristic shape and the auto-angle based on the pattern image may be performed, or only one of them may be performed. If only the auto-angle based on the characteristic shape is to be performed, then only the characteristic shape needs to be specified, and if only the auto-angle based on the pattern image is to be performed, only the pattern image needs to be set. When only a pattern image is set, the pattern image can be searched as a characteristic image, that is, a characteristic shape.

To explain the specific process in step SA1, at the beginning, the UI generation section 32 of the control unit (control section) 3 generates a setting user interface screen 100 as shown in FIG. 11, and displays it on the display section 16. let The setting user interface screen 100 includes an image display area 100a for displaying the measurement object image captured by the imaging section 15, a rotation unit selection area 100b, and a shape selection section 100c for selecting the shape of the measurement object W. , an angle setting section 100d for setting the rotation angle of the measurement target object W, and an imaging button 100e are provided. In the rotation unit selection area 100b, it is possible to select whether or not to use the rotation unit 5, and by operating the operation section 14, the user can switch between using and not using the rotation unit 5. be able to. In this example, a case will be described in which the rotation unit 5 is used.

The shape selection section 100c is a section where the user selects whether the measurement target object W is a box object or a shape other than a box object. In this example, "box object" and "shank object" are prepared as options in the shape selection section 100c, but the invention is not limited to these, and other shapes may be prepared as options. Alternatively, the options may be "boxed items" and "other than boxed items." The user can operate the operation unit 14 to select one option, and the operation unit 14 allows the user to select whether the object W to be measured is a box object or a shape other than a box object. Can accept selection operations.

When the user selects "box item", the UI generation unit 32 generates a user interface screen for the box item and displays it on the display unit 16. On the other hand, when the user selects "shape item", the UI generation unit 32 generates a user interface screen for the box item, and displays it on the display unit 16. A user interface screen is generated and displayed on the display unit 16. For example, when a box object is selected, the user interface screen can be configured such that the selection of feature shapes changes, or only a specific feature shape can be selected.

Further, the angle setting section 100d is a section where the user manually sets the rotation angle of the rotation unit 5. Further, the image capture button 100e is a button for causing the image capture unit 15 to image the measurement target object W within the field of view of the image capture unit 15. When the user operates the imaging button 100e using the operation unit 14, the imaging unit 15 starts imaging the visual field range.

In step SA1, when a shaft object is selected in the shape selection section 100c shown in FIG. 11, the UI generation section 32 generates a characteristic shape selection window 101 as shown in FIG. let In step SA1, the characteristic shape of the measurement target object W in FIG. 12 is further selected.

In this example, a case will be described in which a D-cut surface W4, which is a characteristic shape, is selected as a measurement element of the measurement object W, and the dimensions of the D-cut surface W4 are measured. In order to measure the dimensions of the D-cut surface W4, it is necessary to directly face the D-cut surface W4 to the imaging section 16. Directly facing means that a line perpendicular to the D-cut surface W4 is parallel to the optical axis of the imaging section 15. Further, when the characteristic shape is pins W5 to W7, it is necessary to directly face the pins W5 to W7 to the imaging unit 16. In this case, facing directly means that the axes of the pins W5 to W7 are the optical axis of the imaging unit 15. It is to be parallel to. Further, when the characteristic shapes are holes W8 and W9, the openings of the holes W8 and W9 need to be directly opposed to the imaging section 16. In this case, "directly facing" means that the center lines of the holes W8 and W9 are parallel to the optical axis of the Furthermore, when the characteristic shape is a groove W10, the end portion or opening of the groove W10 needs to face the imaging unit 16 directly. In the case of a groove extending in the axial direction of the shaft object, such as a keyway, the opening of the keyway is made to directly face the imaging section 16.

However, when the measurement target W is gripped by the chuck mechanism 6, as shown in FIG. 11, the D-cut surface W4 does not directly face the imaging section 15, and is often deviated from the directly facing position. . The image dimension measuring device 1 according to the present example is an automatic camera that can automatically align the feature shape to face the image capture unit 15 based on a predetermined search algorithm even if the feature shape does not directly face the image capture unit 15. Equipped with an angle function (automatic facing function).

The step of setting the search algorithm is step SA2 shown in FIG. 10A. When the auto-angle function is executed, a search algorithm corresponding to the feature shape is executed from among a plurality of search algorithms depending on the type of feature shape. A plurality of search algorithms depending on the type of feature shape can be stored in advance in the algorithm storage section 41 of the storage section 4.

First, I will explain the auto angle function. The auto-angle function is executed by the auto-angle execution unit 33 included in the control unit 3 shown in FIG. The auto-angle execution unit 33 determines whether the characteristic shape is determined by the imaging unit 15 based on the plurality of measurement target object images captured by the imaging unit 15 and the rotation angle of the measurement target W when each measurement target image is captured. This is a part that calculates a rotation angle that faces directly, and controls the rotation unit 5 so that the rotation angle of the rotation unit 5 becomes the calculated rotation angle. In other words, the auto-angle function is a function that searches for a rotation angle of the measurement object W that allows the characteristic shape to face the imaging unit 15.

That is, when executing the auto angle function, the type of characteristic shape is selected first. The characteristic shape selection window 101 is provided with a number of icons 101a each showing a characteristic shape in schematic form. Each icon 101a also expresses the characteristic shape in text.

The user operates the operation unit 14 to click on the icon 101a indicating the feature shape to be measured from among the plurality of icons 101a in the feature shape selection window 101. This operation is a selection operation of the type of characteristic shape, and can be accepted by the operation unit 14. Thereby, it is possible to receive input of information regarding the measurement standard on the measurement object image (first measurement object image) shown in FIG. 12 . Further, the operation of selecting the type of feature shape is also an operation of setting the search algorithm internally.

When the execution button 101b in the characteristic shape selection window 101 is operated, the auto-angle function is executed, and first, the imaging unit 15 images the object W to be measured multiple times while being rotated by the rotation unit 5. Thereby, the imaging unit 15 can generate a plurality of measurement object images by capturing images of the measurement object W having different rotation angles. After each measurement object image is generated, it is stored in the image storage section 40 of the storage section 4 shown in FIG. 3, and at this time, the rotation angle of the measurement object W when each measurement object image was captured is associated with remembered.

An algorithm for arranging the D-cut surface W4 to face the imaging unit 15 will be described based on FIGS. 13A to 13C. FIG. 13A shows a measurement object image captured with the measurement object W illuminated by the transmitted illumination section 13b. In this image, the D-cut surface W4 is located at the bottom of the figure, that is, the D-cut surface W4 and the optical axis of the imaging unit 15 are parallel to each other. At this time, the distance between the axis of the measurement object W and the D-cut surface W4 on the measurement object image is defined as C1. FIG. 13B is an image of the measurement object W taken with the D-cut surface W4 rotated closer to the imaging unit 15 than in FIG. 13A, and the axis of the measurement object W at this time. The distance between the core and the D-cut surface W4 on the image of the object to be measured is defined as C2. Distance C1 becomes shorter than distance C2.

The relationship between the distance between the axis of the measurement object W and the D-cut plane W4 on the measurement object image and the rotation angle of the measurement object W is as shown in FIG. 13C. The point in the graph where the distance is the shortest is the state shown in FIG. 13A, and the distance is the longest when the D-cut surface D4 is directly facing the imaging section 15. By searching for the rotation angle at which the distance is the shortest and rotating it by 90 degrees, the D-cut surface D4 can be made to directly face the imaging section 15. The rotation direction at this time can be determined from the graph. The distances C1 and C2 are evaluation values indicating whether the characteristic shape is directly facing the imaging unit 15 or not.

Further, an algorithm for arranging the pin W5 to face the imaging unit 15 will be described based on FIGS. 14A and 14B. FIG. 14A shows the measurement target W viewed from the axial direction, and only the pin W5 is shown for convenience. The distance L is the distance from the axis of the object W to be measured to the tip of the pin W5. FIG. 14B is a graph showing the relationship between the distance L and the rotation angle of the measurement target object W. FIG. As shown in this graph, when the measurement target W is rotated, there are two parts where the distance L has a peak, and the position between these two peaks is the tip of the pin W5, so based on this, The pin W5 can be directly opposed to the imaging section 15. The distance L is an evaluation value indicating whether the feature shape is directly facing the imaging unit 15.

In step SA3 shown in FIG. 10A, a reference angle is determined in the process of making the characteristic shape face the imaging unit 15. Thereafter, in step SA4, the characteristic shape is made to face the imaging section 15.

When executing the auto angle function, it is also possible to set various parameters. FIG. 15 shows a parameter setting user interface screen 102 displayed on the display unit 16 before executing the auto-angle function. This parameter setting user interface screen 102 is generated by the UI generation unit 32. The parameter setting user interface screen 102 includes an image display area 102a for displaying the measurement object image captured by the imaging unit 15, an output pattern selection unit 102b, a search range setting unit 102c, and a search pitch setting unit 102d. is provided.

In the image display area 102a, an area to be searched can be specified. A frame line 201 like the frame line 200 shown in FIG. 12 can be drawn on the image display area 102a shown in FIG. 15. You can also set what measurement value you want to maximize or minimize within a specified area. For example, types such as line-to-line measurement and circle-to-circle measurement can be set.

As shown in FIG. 16, this type can be stored in advance in the storage unit 4 as a combination of a preset shape, measurement details, and maximum/minimum. This saves the user the trouble of setting.

The output pattern selection section 102b shown in FIG. 15 is provided with maximum and minimum options, and one can be selected using the operation section 14. Selecting Maximum searches for the maximum of the measured values, while selecting Minimum searches for the minimum of the measured values. The search range setting unit 102c allows setting of the angular range in which the search is executed. For example, an angle from a reference angle can be set, and an angular range can be set, for example, plus or minus 90 degrees around the set angle. The search pitch setting unit 102d can set the search pitch within the angle range set as described above. For example, if it is set to 5 degrees, the search is executed at a pitch of 5 degrees.

The evaluation value may be the above-mentioned dimension measurement value, but may also be, for example, the degree of matching with a template image registered in advance. The template image may be an image obtained by capturing the measurement object W whose characteristic shape is at a rotation angle that directly faces the imaging unit 15. After registering the template image, the measurement object W is imaged by the imaging unit 15 while being rotated, thereby continuously generating a plurality of measurement object images having different rotation angles. For each of these measurement object images, the template image is searched by pattern search, and the rotation angle with the largest correlation value of the degree of matching is specified. The specified rotation angle is the rotation angle at which the characteristic shape directly faces the imaging unit 15.

When searching by the pattern search described above, it is also possible to simultaneously execute a position search in the X and Y directions for each measurement object image and then obtain a correlation value. Thereby, even in a state where the position on the measurement target image is unknown, such as immediately after the measurement target object W is mounted on the chuck mechanism 6, the position search and correlation value acquisition can be completed at the same time.

Further, as shown in FIG. 17, a window 103 for executing the auto-angle function can be displayed on the display unit 16 while editing the measurement contents. The window 103 can be displayed by operating the operation unit 14, for example. When “AA Execution” in the window 103 is selected by operating the operation unit 14, a selection window 103a is displayed on the display unit 16. Types of feature shapes are displayed in the selection window 103a, and the user can select a desired feature shape from among these. The auto-angle execution unit 33 executes an algorithm corresponding to the selected feature shape, and calculates the rotation angle at which the feature shape faces the imaging unit 15.

In this example, even in the case of a box-like measurement target W20 as shown in FIG. 18, the algorithm is configured to be able to execute an algorithm that causes the characteristic shape to face the imaging unit 15. First, the imaging section 15 images the measurement object W20 to generate a measurement object image (shown in FIG. 18), and displays it on the display section 16. The user specifies, for example, a frame line 203, on the measurement target object image, an area that the user wants to directly face the imaging unit 15. This can be specified using the operation unit 14. The area that is desired to be directly facing the imaging unit 15 is a flat portion.

The auto-angle execution unit 33 executes height measurement at a plurality of arbitrary points within the area surrounded by the frame line 203. For height measurement, a conventional displacement measurement method can be used, and a contact type displacement sensor or an optical displacement sensor can be used. As an example of the optical displacement sensor, an autofocus method can be used. Based on the measured height and XY coordinates, the inclination of the surface of the area surrounded by the frame line 203 is determined, and the rotation angle at which the surface faces the imaging unit 15 is calculated. Furthermore, it is also possible to measure the height within the field of view from the optical focus information and obtain the inclination of the surface of the area surrounded by the frame line 203 from the area map of the measured height.

The control unit 3 calculates the rotation angle at which the feature directly faces the imaging unit 15, and then controls the rotation unit 5 so that the rotation angle is the calculated rotation angle. As a result, as shown in FIG. 19, the D-cut surface W4 is brought into a state directly facing the imaging section 15, and the orientation of the measurement object W and the setting of the reference angle are completed.

When the operation unit 14 performs an operation to close the dialog, the control unit 3 creates an element used to detect the direction of the measurement object W, and also sets the rotation angle of the measurement object W at the specified angle at the time the dialog is closed. (0 degrees), the reference angle is automatically set with reference to the shape detection element. FIG. 20A is a user interface image 104 that displays an image of the object to be measured when the dialog is closed at an angle of 0 degrees, and the element used to detect the direction of the object to be measured W is the D-cut plane W4. Further, FIG. 20B is a user interface image 104 that displays a measurement object image in which the element (D-cut surface W4 in this example) used to detect the direction of the measurement object W is rotated by 90 degrees. The angular relationships shown in FIGS. 20A and 20B are stored in the storage unit 4 as relative rotation angle information.

In step SA5, measurement elements are set. When setting the measurement elements, the rotation of the rotation unit 5 is stopped, and the epi-illumination section 13a illuminates the measurement object W to capture an epi-illumination image, and the transmitted-illumination section 13b illuminates the measurement object W. and the captured transparent image are combined into one image, incorporated into the user interface image 104 shown in FIG. 22, and displayed as a background image. For example, the width of the groove W4a formed on the D-cut surface W4 can be set as the measurement element, or the diameter of the first hole W8 and the width of the groove W10 can also be set as the measurement element. Setting of measurement elements is performed by the user operating the operation unit 14.

The user interface image 104 includes a numerical display area 104a in which the rotation angle of the rotation unit 5 from a designated angle is numerically displayed, a rotation operation area 104b as a control section for operating the rotation unit 5, and a rotation angle of the rotation unit 5. An angle display area 104c in which the angle is displayed in bar format is provided. In FIG. 20A, since the rotation angle of the measurement target W is the specified angle, approximately 0 degrees is displayed in the numerical display area 104a and the angle display area 104c. On the other hand, in FIG. 20B, since the rotation is 90 degrees from the state shown in FIG. 20A, approximately 90 degrees is displayed in the numerical display area 104a and the angle display area 104c. An angle indication line 104d indicating the current angle is provided in the angle display area 104c. Further, the angle display area 104c is provided with a reference angle indicating section 104e that indicates the rotation angle stored in the storage section 4 as setting information. The angle indication line 104d can also be moved by the operation unit 104. When the angle indication line 104d is moved, the control unit 3 detects the position of the angle indication line 104d after the movement. The control unit 3 can control the rotation unit 5 to rotate the measurement target W so that the rotation angle corresponds to the position of the angle instruction line 104d.

The rotation operation area 104b is provided with operation buttons. When an operation button is operated using the operation section 14, the control unit 3 detects it. The control unit 3 can rotate the rotation unit 5 according to the operated button, and can also specify the direction in which the rotation unit 5 is rotated. The operation buttons also include a button for rotating the measurement object W by a predetermined angle unit. Here, the predetermined angular unit will be explained. The object W to be measured may be a rectangular parallelepiped in which a different surface exists at every 90 degrees or a hexagonal prism where a different surface exists at every 60 degrees. When measuring such a measurement target W, the measurement can be quickly performed by rotating the measurement target W every 90 degrees or 60 degrees according to the orientation of the surface and taking images.

In this embodiment, specifications are made so that the rotation unit can be controlled in predetermined angular units, such as every 60 degrees or 90 degrees, in accordance with the shape of the object W to be measured. Although 60 degrees and 90 degrees are illustrated as the predetermined angular units, the predetermined angular units are not limited thereto. The predetermined angular unit may be any size as long as it is larger than the minimum angle at which the rotation unit 5 can rotate the measurement object W, that is, the minimum angular unit.

In this embodiment, the predetermined angle unit is 90 degrees, so one operation of the operation button rotates the measurement object W by 90 degrees, and two operations rotates the measurement object W by 180 degrees. I can do it. By operating an operation button using the operation unit 14, an instruction can be given to rotate the measurement target object W in units of 90 degrees. The predetermined angular unit may be an angle obtained by dividing 90 degrees into a plurality of parts, such as 30 degrees or 45 degrees. Whether the predetermined angular unit is 30 degrees or 45 degrees, images of the measurement target W can be generated every 90 degrees.

In addition to operating the rotation operation area 104b, the rotation unit 5 can be operated by using the manual adjustment knob 55 described above, and can also be operated by specifying a position on the developed image. An example of a developed image is shown in FIGS. 21A and 21B. The expanded image is created by capturing images of the measurement target W multiple times while rotating, cutting out the center of the original image to create a connected image, and connecting the multiple connected images to develop the measurement target W. This is an image showing the shape. By displaying this developed image on the display unit 16, when the user clicks a desired position on the developed image with, for example, a mouse that is the operation unit 14, the stage 12 displays the clicked position in the center of the screen. and controls the rotation unit 5. As shown in FIG. 21B, measurement values can also be displayed on the developed image.

Furthermore, the measurement object image that accepts the input of information regarding the measurement standard is the first measurement object image shown in FIG. 12, whereas the image for setting measurement elements is the image shown in FIG. 22, that is, the first measurement object image. This is a second measurement object image captured at a rotation angle different from that of the object image.

FIG. 23 is an image of the object to be measured when the rotation angle is 90 degrees, and is an image obtained by combining a reflected image and a transmitted image, similar to the image of the object to be measured shown in FIG. 22. FIG. 23 shows an example in which the diameter of the second hole W9 is set as the measurement element.

The measurement target object W may be rotated by operating an operation button in the rotation operation area 104b or by using an auto-angle function. When using the auto-angle function, a window 103 shown in FIG. 17 may be displayed on the display unit 16 to enable selection of a characteristic shape.

FIGS. 24A and 24B are diagrams illustrating a case in which a dimension between two measurement elements is measured. In this example, a third hole W11 is provided between the first hole W8 and the second hole W9 in the object W to be measured, and the axes of the first hole W8 and the second hole W9 are aligned with the third hole W11. The axis of the hole W11 is perpendicular to the axis of the hole W11.

FIG. 24A shows an example of the settings of the first measurement element (first hole W8) when the rotation angle is 0 degrees, and this first hole W8 is set on the first measurement object image. . FIG. 24B shows an example of the setting contents of the second measurement element (third hole W11) when the rotation angle is 90 degrees, and this third hole W11 is an image of the measurement object for which the first measurement element is set. The rotation angle is set on the second measurement object image different from the rotation angle. By setting the first hole W8 and the third hole W11 as measurement elements, it is possible to measure the dimensions between the axis of the first hole W8 and the axis of the third hole W11. Note that the difference in the rotation angle of the measurement object image used when setting the first measurement element and the second measurement element is not limited to 90 degrees, but may be different from the rotation angle at which each measurement element directly faces the imaging unit 15. Good to have. Further, when setting the measurement element, the measurement element may be set at an arbitrary rotation angle. Among the three settings described in step SA6 in FIG. 10A, the measurement element setting at an angle of 0 degrees and the measurement setting between measurement elements at different rotation angles are not essential.

When step SA5 of the flowchart shown in FIG. 10A is completed as described above, the process proceeds to step SA6, and position correction pattern image registration is performed. When registering a pattern image, a user interface screen 105 for pattern image registration shown in FIG. 25 is displayed on the display unit 16. The user interface screen 105 is provided with an image display area 105a in which a transmitted image captured by illuminating the object W to be measured by the transmitted illumination unit 13b is displayed.

In the image display area 105a, a search range frame 206 indicating a range for performing a pattern search and a registration range frame 207 indicating a range to be registered as a pattern image are displayed superimposed on the transparent image. The positions and sizes of the search range frame 206 and the registration range frame 207 can be arbitrarily set by the user by operating the operation unit 104. By operating the operation unit 104, it is possible to enclose any part of the measurement object W with the registration range frame 207, thereby allowing any part of the measurement object W to be registered as a pattern image, and also to You can also register location information.

The user interface screen 105 is provided with a selection section 105b for selecting an imaging angle. The selection unit 105b performs a pattern search using an image captured at the starting angle, performs a pattern search using an image captured while rotating the measurement target W once, or performs a pattern search using an image captured while rotating the measurement target W within a specified range. You can choose to perform a pattern search using .

When step SA6 of the flowchart shown in FIG. 10A is completed as described above, the process proceeds to step SA7, and the measurement settings are stored in the storage unit 4. In step SA7, the measurement element and relative rotation angle are stored. In other words, it is stored how many times the set rotation angle of the measurement element is rotated relative to the reference angle. Furthermore, in step SA7, the position correction pattern image set in step SA6 is also stored.

(Detailed flow of normalization)
The processing at the time of setting is not limited to the procedure shown in FIG. 10A, but may be, for example, the procedure shown in the flowchart shown in FIG. 10B. In step SA11 of the flowchart shown in FIG. 10B, a characteristic shape is specified. The designation of this feature shape can be similar to the designation of the feature shape in step SA1 in FIG. 10A. Instead of the characteristic shape, only the pattern image of the measurement object W may be set. In this case, in the next step SA12, only the angle range to be searched is searched. Either designation of a characteristic shape or setting of a pattern image may be used.

In step SA12, evaluation items, that is, search algorithms are set. As explained in step SA2 of FIG. 10A, the evaluation items may be set automatically when the type of feature shape is selected, or they may be set independently from the selection operation of the type of feature shape. You may also do so.

In step SA12, it is possible to set a region where a characteristic shape, for example, the D-cut surface W4 exists. For example, the user specifies the area where the D-cut plane W4 exists on the measurement target object image displayed on the display unit 16. A characteristic shape other than the D-cut surface W4 may be used, and a region where the characteristic shape exists may be specified. Specifically, as shown in FIG. 12, a frame line 200 is drawn to surround a region where a characteristic shape, for example, a D-cut surface W4 exists. An example of an operation for drawing the frame line 200 is a diagonal dragging operation using a mouse or the like, but the method is not limited to this. The designation of the area where the characteristic shape exists is accepted by the operation unit 14. When the designation of the region where the characteristic shape exists is accepted, the position and size of the region are acquired. For example, one measurement object W may include a plurality of characteristic shapes, and among them, it may be desired to measure the dimensions of only the D-cut surface W4. In this case, only the D-cut surface W4 needs to be directly opposed to the imaging unit 15, so if the user specifies the area where the characteristic shape exists as described above, the direct confrontation with other characteristic shapes is taken into account. Only the D-cut surface W4 can be directly opposed to the imaging section 15 without being affected. A plurality of regions in which characteristic shapes exist may be specified.

In step SA12, it is also possible to specify an angular range in which to search for a characteristic shape. For example, the rotation angle range is specified based on the rotation angle of the currently displayed measurement target object W. This designation operation is accepted by the operation unit 14. For example, a single object W to be measured may have characteristic shapes such as pins W5 to W7 spaced apart from each other in the circumferential direction, and among them, it may be desired to measure the dimensions of only pin W5. In this case, only the pin W5 needs to be directly opposed to the imaging unit 15, so when the user specifies the angular range in which the pin W5 exists, the pin W5 is can be directly opposed to the imaging section 15.

When the search settings are completed, the process proceeds to step SA13 and the search settings are stored in the storage unit 4. Thereafter, the process proceeds to steps SA14 and SA15. That is, in this example, a search method focusing on the fact that the measurement target object W is rotated by the rotation unit 5 can also be applied. For example, in the case where the imaging unit 15 is a rolling shutter that sequentially scans images line by line from one side of the sensor to the other, when the image of the measurement target W is captured while rotating, a phenomenon occurs in which the measurement target image is distorted. Searching for the rotation angle at which the characteristic shape faces the imaging unit 15 based on such a distorted measurement object image may result in a decrease in accuracy. On the other hand, there is an advantage that the search time for the rotation angle at which the characteristic shape faces the imaging unit 15 can be shortened by using the measurement object image captured while rotating the measurement object W.

This image dimension measuring device 1 is configured to be able to execute search processing that can improve search accuracy while shortening search time. That is, the imaging unit 15 captures a plurality of rotating images obtained by capturing a plurality of images of the rotating measurement target W, and a plurality of images obtained by capturing a plurality of images of the measurement target W that has stopped rotating. The image is generated as a measurement object image. In step SA14, the auto-angle execution unit 33 first performs a rough search for a rotation angle at which the characteristic shape faces the imaging unit 15, based on the plurality of rotation images. Through this rough search, it is possible to specify a rotation angle range in which there is a relatively high possibility that there is a rotation angle at which the characteristic shape faces the imaging unit 15. Thereafter, in step SA15, a precise search is performed based on a plurality of stop images in the rotation angle range specified by the rough search in step SA14, and a rotation angle at which the characteristic shape faces the imaging unit 15 is calculated. The rotation angle range and pitch for executing the coarse search can also be made changeable. Further, since there is vibration when the object W to be measured is rotated, it is also possible to apply an algorithm that detects and removes the amount of vibration. Note that the rough search in step SA14 may be omitted.

Thereafter, in step SA16, a reference angle is determined in the process of making the characteristic shape face the imaging unit 15, similarly to step SA3 shown in FIG. 10A. The reference angle may be the angle at which the characteristic shape directly faces the imaging unit 15, or may be the angle at which the characteristic appears in the evaluation value of the evaluation item set in step SA12.

In step SA17, the angle at which the characteristic shape faces the imaging unit 15 is calculated. Next, in step SA18, the feature shape is made to face in the same way as step SA4 shown in FIG. 10A. Note that after step SA18, the processes of steps SA5 to SA7 in FIG. 10A can be executed.

(Measurement settings for box items)
When configuring measurement settings for a boxed object, in step SA1 of the flowchart shown in FIG. 10A, "boxed object" is selected on the setting user interface screen 100 shown in FIG. 11. Thereafter, "minimum width" is selected in the feature shape selection window 101 shown in FIG. 12. Also, as with the case of axed objects, specify the area in which the search is to be performed. The auto-angle execution unit 33 searches for a rotation angle at which the width as an evaluation value is minimum, and calculates a rotation angle at which the feature shape faces the imaging unit 15.

The control unit 3 controls the rotation unit 5 to rotate the measurement object W20 in units of 90 degrees when the box object is selected by the operation unit 14. In the case of a box object, for example, it often has a rectangular parallelepiped shape, and by rotating the measurement object W20 in 90 degree increments, it becomes possible to image each of the four sides of the rectangular parallelepiped with the imaging unit 15. . If the rotation angle when capturing a certain measurement object image is 0 degrees, the rotation angle when capturing the next measurement object image may be 90 degrees or 180 degrees. However, it may be 270 degrees. Rotating in units of 90 degrees also includes rotating by 90 degrees and stopping, continuously rotating 180 degrees and stopping, and continuously rotating 270 degrees and stopping.

FIG. 26A is a user interface image 104 that displays a measurement target image with the dialog closed at a 0 degree angle. Further, FIG. 26B is a user interface image 104 that displays a measurement object image in which the elements used to detect the direction of the measurement object W are rotated by 180 degrees. As described above, step SA1 of the flowchart shown in FIG. 10A can be executed.

In step SA2, basically, as in the case of a shaft object, with the background image that is the image of the object to be measured displayed, the measurement element when the rotation angle is 0 degrees (the measurement element on the surface) and the rotation angle The measurement element when is 180 degrees (the measurement element on the back side) can be set separately. By setting the measurement element when the rotation angle is 0 degrees as the first measurement element and the measurement element when the rotation angle is 180 degrees as the second measurement element, the dimension between the first measurement element and the second measurement element can be calculated. can be measured.

When the background image shown in FIG. 26A is the first measurement object image (surface image), the background image shown in FIG. 26B is the measurement object rotated 180 degrees from the rotation angle at which the first measurement object image was acquired. This becomes a second measurement object image (back side image) obtained by capturing an image of the object. A first XY coordinate system (front side coordinate system) and a second XY coordinate system (back side coordinate system) can be set for each of the background image shown in FIG. 26A and the background image shown in FIG. 26B. The dimension between the first measurement element and the second measurement element can be measured by mutually converting the first XY coordinate system and the second XY coordinate system. Specifically, a matrix for mutually converting the first XY coordinate system and the second XY coordinate system may be found. For example, while the back side image is being displayed, by converting the front side measurement elements using the above matrix, the front side measurement elements can also be displayed without deviation from the back side image, and can also be specified. While displaying the front surface image, similar conversion may be performed on the measurement elements on the back surface. Thereby, dimensions can be measured between measurement elements whose rotation angles differ by 180 degrees without deviation.

Further, the first measurement object image and the second measurement object image are determined based on the outline of the measurement object W in the first measurement object image and the outline of the measurement object W in the second measurement object image. It is also possible to mutually convert object images to measure the dimensions between the measurement elements on the front surface and the measurement elements on the back surface.

The shape of the measurement element on the front surface and the shape of the measurement element on the back surface can be simultaneously displayed on the display section 16. In this case, the measurement elements on the front surface and the measurement elements on the back surface can be displayed in different display formats. Examples of different display formats include changing the color of the measurement element on the front surface and the measurement element on the back surface, or changing the line type.

(Continuous measurement mode)
The image dimension measuring device 1 is capable of executing a continuous measurement mode after the measurement setting mode. When the user operates the continuous measurement mode execution button, the continuous measurement mode is started. The continuous measurement mode is a mode in which a plurality of measurement objects W are sequentially measured, and can also be called an operation mode of the image dimension measuring device 1.

(Continuous measurement of shaft objects)
In the following description, a case will be described in which the measurement target object W is a shaft object. The procedure in continuous measurement mode will be explained based on the flowchart shown in FIG. 27. In step SB1 after the start, measurement settings are made. Specifically, when a plurality of settings are performed in the measurement setting mode and a plurality of setting contents are stored in the storage unit 4, a setting file for continuous measurement is selected from among the settings and executed.

Further, the object to be measured W is mounted on the chuck mechanism 6. At the stage when the measurement object W is attached to the chuck mechanism 6, the relationship between the mechanical angle (the rotation angle defined by the image size measuring device 1) and the rotation angle of the measurement object W is indefinite. Further, there may be an error in mounting the measurement target W to the chuck mechanism 6 between the measurement setting and the continuous measurement.

When step SB1 is finished, the process advances to step SB2. In step SB2, the position and orientation of the measurement target object W are confirmed. At this time, as shown by the broken line in FIG. 28A, the positioning guide 208 may be displayed superimposed on the measurement target image. As the positioning guide 208, it is possible to use, for example, a translucent pattern image, an outline of the image, or the like. Furthermore, if there is an epi-illuminated image taken at the same angle as the pattern image at the time of measurement setting, a composite image of the pattern image and the epi-illuminated image can be made translucent and displayed in a superimposed manner. The frame line indicated by the reference numeral 209 in the figure is the area of the pattern image.

The user can adjust the rotation angle of the measurement target W so that the positioning guide 208 and the measurement target W match. The rotation angle of the measurement object W can be adjusted by rotating the manual adjustment knob 55. FIG. 28B shows a state in which adjustment of the rotation angle of the measurement target object W has been completed. Note that if the setting to rotate the measurement target W once is selected when registering the pattern image, there is no need to adjust the direction of the measurement target W.

When step SB2 is completed, the process proceeds to step SB3, where the current measurement object W is automatically measured in the measurement settings based on the conditions set in the continuous measurement and each piece of information held in the measurement settings. First, a pattern search is executed in step SB4. Specifically, the pattern search execution unit 34 shown in FIG. 3 uses the measurement object image captured by the imaging unit 15 to execute a pattern search for searching for pattern images registered in advance. For example, the pattern search execution unit 34 executes a pattern search using a plurality of measurement object images obtained by capturing images of the measurement object at different rotation angles by the imaging unit 15, and selects a pattern search with the highest degree of matching with the registered pattern image. Determine the rotation angle. At this time, it is possible to detect the rotation angle that most closely matches the pattern image within the set angle range. Since the object W to be measured is rotated, it can be called a rotation pattern search.

When the rotation pattern search is completed, the process advances to step SB5. In step SB5, the amount of deviation from the pattern image is detected in the measurement object image at the rotation angle specified in step SB4. Thereafter, based on the detected amount of deviation and position information, the position of the measurement element is corrected by the same amount as the detected amount of deviation. This is position correction processing.

When the position correction process is completed, the process advances to step SB6. In step SB6, an auto angle function is executed. For example, the direction of the object W to be measured is detected by the auto-angle function using the characteristic shape specified in the reference angle setting of the measurement settings. Measurements can be made within the mechanical angle range around the angle obtained by the following formula.

Pattern search detection angle during continuous measurement + Auto angle angle during measurement settings - Pattern image imaging angle during measurement settings When the auto angle function finishes detecting the direction of the measurement target W in step SB6, the process proceeds to step SB7, where the reference angle and calculate the measurement angle. For example, the mechanical angle of the reference angle during continuous measurement is calculated based on the characteristic shape and the offset amount of the reference angle at the time of measurement setting. In other words, the reference rotation angle is specified, and the measurement angle for measuring the measurement element is calculated based on the rotation angle (offset amount) relative to the reference rotation angle stored in the storage unit 4. .

After calculating the measurement angle, the process advances to step SB8. In step SB8, the control unit 3 controls the rotation unit 5 so as to obtain the measurement angle calculated in step SB7. Thereby, the rotation angle of the measurement target object W becomes the measurement angle.

When the rotation unit control is completed, the process proceeds to step SB9, and the measurement element is measured. In step SB9, first, when the rotation unit 5 reaches the measurement angle, the imaging section 15 images the measurement object W to generate a measurement object image. This allows the measurement element to be measured.

After the measurement object image is generated, the edge extraction unit 30 shown in FIG. 3 extracts edges of the characteristic shape of the measurement object W by performing image processing on the measurement object image. The edge information output from the edge extraction section 30 is input to the measurement section 31, and the measurement section 31 executes a measurement process for measuring the dimensions of the measurement element based on the measurement object image.

When the measurement process is finished, the process advances to step SB10 to execute display process. In the display process, the UI generation section 32 generates a user interface image 110 for displaying measurement results as shown in FIG. 29, and the control unit 3 causes the display section 16 to display the user interface image 110. The user interface image 110 is provided with a first image display area 110a, a second image display area 110b, a third image display area 110c, and a result display area 110d. The first image display area 110a displays an image of the measurement object when the rotation angle is 0 degrees, and the second image display area 110b displays an image of the measurement object when the rotation angle is 90 degrees. I can do it. That is, images of the measurement object having different rotation angles can be displayed in the first image display area 110a and the second image display area 110b.

In the third image display area 110c, one or more measurement elements, dimension lines, measurement values, etc. of each measurement element are displayed superimposed on the measurement object image. The third image display area 110c is set larger than the first image display area 110a and the second image display area 110b.

The name, measured value, and determination of each measurement element are displayed in the result display area 110d. The determination indicates whether or not the measured value is outside a preset value range, and can be displayed as OK, NG, etc., for example. The displayed judgments can include judgment results for each measurement element and a comprehensive judgment result that combines them.

(Measurement at mechanical angle)
Each time the measurement object W is attached to and removed from the chuck mechanism 6, the relative rotation angle between the measurement object W and the chuck mechanism 6 differs. In contrast, measurement errors can be eliminated by following the steps below.

That is, the process in this step is effective when it is desired to measure a location that can only be measured when the chuck mechanism 6 is at a specific angle. For example, if you want to measure the entire length of the measurement target W, it is necessary to image the end face of the measurement target W on the chuck mechanism 6 side, but in the first place, the end face of the measurement target W on the chuck mechanism 6 side is Since it is grabbed by 6, it cannot be imaged. However, since the chuck mechanism 6 has three chuck claws 61 to 63 provided at intervals as shown in FIG. The end face on the chuck mechanism 6 side may be visible, and when the imaging unit 15 executes imaging at this rotation angle, the end face of the measurement target W on the chuck mechanism 6 side can be imaged and acquired as an image.

In order to realize this, means is provided for specifying the angle to be measured by specifying the mechanical angle when measuring the object W to be measured in the measurement settings. Thereby, regardless of the relative rotation angle between the measurement object W and the chuck mechanism 6, measurement can be performed at the same mechanical angle. Specifically, when specifying a rotation angle during measurement settings, a mechanical angle can be selected as a reference, and this mechanical angle can be specified. This operation can be realized by the user operating the operation unit 14.

FIG. 30 is an explanatory diagram of a measurement angle in a setting that does not include a mechanical reference element. Even if the relative rotation angle between the measurement object W and the chuck mechanism 6 differs between measurement setting and continuous measurement, only the difference between the reference angle and the mechanical angle changes, and the relative angle between each element does not change.

On the other hand, FIG. 31 is an explanatory diagram of a measurement angle in a setting including a mechanical reference element. This shows a case where element 4 is specified as a mechanical angle of 0 degrees. As in the case shown in FIG. 30, even if the relative rotation angle between the measurement target W and the chuck mechanism 6 differs between measurement settings and continuous measurement, the difference between the reference angle and the mechanical angle will change, and the difference between each element will change. The relative angle of will not change, but elements specified as mechanical angles can be measured at the same mechanical angle regardless of the reference angle.

(Continuous measurement of boxed items)
The processing flow in the continuous measurement mode for boxed objects is basically the same as the continuous measurement mode for shafted objects. Below, the parts that are different from the shaft will be explained in detail.

Also in the continuous measurement mode for boxed goods, measurement settings are made in step SB1 of the flowchart shown in FIG. 27, and at this time, a setting file for continuous measurement is selected. At the stage when the box object to be measured W20 is attached to the box object chuck mechanism 700, the mechanical angle and the angle of the object to be measured W20 are uncertain. Since there are two chuck claws, the first and second chuck claws 601 and 602, the mounting angle often varies in units of 90 degrees. Further, the mounting position and inclination of the measurement target object W20 may be different between the time of measurement setting and the time of continuous measurement.

After that, in step SB2, the user rotates the manual adjustment knob 55 to check whether the object to be measured W20 is attached at the same position and angle in two or more directions. Adjust the mounting position. At this time, a positioning guide as shown in FIG. 28A can be displayed superimposed on the measurement object image.

Next, the process proceeds to step SB5 via steps SB3 and SB4. In step SB5, positioning is performed by reflecting the pattern search results. At this time, the measurement element located at a rotation angle different from the rotation angle (θ) when the pattern image was captured corrects the amount of deviation according to Δθ. The correction amount is ΔX in the X direction, Δy*cos (Δθ) in the Y direction, and Δy*sin (Δθ) in the Z direction. Steps SB6 to SB10 are the same as in the case of the shaft.

During continuous measurement, it is possible not only to measure dimensions between two measurement elements whose rotation angles differ by 180 degrees, but also to measure dimensions between two measurement elements whose rotation angles differ by 90 degrees.

(Display format)
In the user interface image 110 shown in FIG. 29, the measurement object image displayed in the first image display area 110a and the measurement object image displayed in the second image display area 110b are aligned vertically and vertically. They are displayed side by side. When aligning the left and right positions, for example, assuming a horizontal virtual line extending vertically on the screen, the left end of the measurement object image displayed in the first image display area 110a and the image displayed in the second image display area 110b are aligned. The left end of the measurement target object image may be located on the horizontal virtual line.

Although not shown, the measurement object image displayed in the first image display area 110a and the measurement object image displayed in the second image display area 110b are displayed side by side with their vertical positions aligned. Good too. When aligning the top and bottom positions, for example, assuming a vertical virtual line extending horizontally on the screen, the upper end of the measurement object image displayed in the first image display area 110a and the image displayed in the second image display area 110b are aligned. The upper end of the measurement target object image may be located on the vertical imaginary line.

As mentioned above, in the case of boxes, they are rotated in 90 degree increments, but the design drawings that are the basis of processing are similarly sized and tolerances are described in 90 degree increments as seen from multiple directions. Therefore, by displaying the image in the first image display area 110a and the image in the second image display area 110b with the vertical and horizontal positions aligned, both images can be displayed like a design drawing. This makes it easier to understand the three-dimensional shape, the correspondence between the drawings, and the comparison with the dimension instructions and tolerances indicated in the drawings.

The user can select one of the measurement object image displayed in the first image display area 110a and the measurement object image displayed in the second image display area 110b. The selection of images by the user is accepted by the operation unit 14 . The control unit 3 controls the rotation unit 5 so that the rotation angle is the same as the rotation angle of the measurement object W20 when the received measurement object image was captured. In other words, when one of the plurality of measurement object images is selected, the rotation angle of the measurement object W20 can be automatically set to the rotation angle at the time of imaging, and this function can be called a navigation function. .

The imaging unit 15 images and previews the measurement object W20 in a state where the rotation angle of the measurement object W20 is the same as the rotation angle of the measurement object W20 when the selected measurement object image is captured. Generate an image.

The preview image generated by the imaging unit 15 is displayed in the third image display area 110c of the user interface image 110. Each image is displayed simultaneously in the first image display area 110a, the second image display area 110b, and the third image display area 110c. Since the third image display area 110c is the largest, the preview image is displayed in a larger size than the other images. This makes it easier to read the dimension lines and measurement values on the preview image.

The user interface image 110 may display three or more measurement object images having mutually different rotation angles. For example, three images of the measurement object with rotation angles of 90 degrees, 180 degrees, and 270 degrees can be displayed. In this case as well, the measurement target image selected by the user can be displayed in an enlarged manner as a preview image.

FIG. 32 is a diagram illustrating an example of the user interface image 104 displayed on the display unit 16 in the case of a box-shaped measurement target W20. In this example, multiple images are displayed on the right side of the user interface image 104, and specifically, two or more images of the measurement target with different rotation angles can be displayed, for example, the images can be rotated in units of 90 degrees. You can display two or three images. The user can select which image to display. This results in a display format that corresponds to the design drawing that is the basis of processing.

On the other hand, a preview image is displayed on the left side of the user interface image 104 in FIG. 32. The preview image is an enlarged image of the image selected by the user from among the measurement object images on the right side. In this example, an image of the measurement object taken at 90 degrees is enlarged and displayed as a preview image. The measurement results can be displayed on the preview image.

(Operations and effects of embodiments)
As described above, according to this embodiment, the user can input the feature shape as information regarding the measurement standard on the measurement target image when setting the measurement, and the feature shape can be input at a rotation angle different from this. For example, measurement elements such as line segments, circles, and arcs can be set on the image of the measured object. The storage unit 4 stores the relative rotation angle when the measurement object image in which the measurement element is set is taken with respect to the reference rotation angle when the measurement object image in which the characteristic shape is input is taken. be able to.

During continuous measurement, the imaging unit 15 generates a plurality of images of the measurement object W by capturing images of the measurement object W at different rotation angles. The control unit 3 can specify the reference rotation angle based on the characteristic shape accepted by the operation unit 14 from among the plurality of measurement object images. The rotation angle relative to the reference rotation angle can be read from the storage unit 4. When the control unit 3 calculates the measurement angle for measuring the measurement element based on the relative rotation angle, the control unit 3 controls the rotation unit 5 so as to obtain the calculated measurement angle. As a result, the rotation angle of the rotation unit 5 automatically becomes the measurement angle, so that the measurement element is placed at a position where it can be imaged by the imaging section 15. Therefore, there is no need for the user to adjust the rotation angle of the measurement target object W with respect to the imaging unit 15.

Moreover, since the box-like measurement object W20 can be rotated in units of 90 degrees, it becomes possible to image each of the four side surfaces of the rectangular parallelepiped with the imaging unit 15. When one side of the measurement object W20 is captured in the measurement object image with a rotation angle of 0 degrees, the first measurement element can be set on the measurement object image. Further, when the other side of the measurement object W20 is captured in the measurement object image with a rotation angle of 90 degrees or 180 degrees, the second measurement element can be set on the measurement object image. The control unit 3 is capable of measuring dimensions between a first measuring element and a second measuring element present on two different planes.

Furthermore, by specifying the characteristic shape of the measurement target object W, the rotation angle at which the characteristic shape faces the imaging unit 15 can be calculated based on the characteristic shape and the change in shape on the measurement target object image. As a result, the characteristic shape of the measurement target object W can be directly faced to the imaging unit 15, so that individuality is eliminated and there is no variation in adjustment, and adjustment can be made in a short time.

The embodiments described above are merely illustrative in all respects and should not be interpreted in a limiting manner. Furthermore, all modifications and changes that come within the scope of equivalents of the claims are intended to be within the scope of the present invention.

As described above, the image dimension measuring apparatus according to the present invention can be applied to an apparatus equipped with a rotation mechanism that rotates an object to be measured.

1 Image dimension measuring device 3 Control unit (control section)
4 Storage unit 5 Rotation unit (rotation mechanism)
6 Chuck mechanism (for shaft objects)
14 Operating section 15 Imaging section 16 Display section 33 Auto angle execution section 34 Pattern search execution section 69 Fastened member (attachment/detachment section)
80 Fastening member (removable part)
700 Chuck mechanism (for box goods)
W Object to be measured (shaft object)
W20 Measurement object (box)

Claims (14)

In an image dimension measuring device that measures the dimensions of an object to be measured,
a transmitted illumination section;
a horizontally extending stage on which the measurement target is placed, the stage having a transmitting part that transmits the light from the transmitted illumination part;
an imaging unit provided so that light from the transmitted illumination unit passes through the transparent unit of the stage and enters the stage, and is configured to generate an image of the measurement object;
a rotation mechanism that is attached to the stage, holds the measurement target between the transmission section of the stage and the imaging section, and rotates the object around a predetermined horizontally extending axis ;
an operation unit for instructing to rotate the measurement target in a predetermined angle unit;
controlling the rotation mechanism so as to receive an instruction from the operation unit and rotate the measurement target held by the rotation mechanism in a predetermined angle unit, and measuring the object held by the rotation mechanism at a first rotation angle; A first measurement element set on a first measurement object image generated by imaging the object by the imaging unit is detected , and the first rotation angle is expressed in the predetermined angle unit. detecting a second measurement element set on a second measurement object image generated by photographing the measurement object held by the rotation mechanism at a different second rotation angle with the imaging unit; , a control section that measures a dimension between the first measurement element and the second measurement element. The image dimension measuring device according to claim 1,
The control unit detects a flat part of the measurement target based on the measurement target image captured by the imaging unit, and acquires a rotation angle when the flat part directly faces the imaging unit. An image dimension measuring device that controls the rotation mechanism so that the rotation angle is such that the rotation angle is directly opposite to each other. The image dimension measuring device according to claim 2,
The control unit is an image dimension measuring device that rotates the measurement object in units of 90 degrees with the facing rotation angle being 0 degrees. The image dimension measuring device according to any one of claims 1 to 3,
When the second measurement object image is an image of the measurement object rotated by 180 degrees from the rotation angle at which the first measurement object image was acquired, An image dimension measuring device that measures a dimension between the first measurement element and the second measurement element by mutually converting an object image and the second measurement object image based on predetermined information. The image size measuring device according to claim 4,
A first XY coordinate system and a second XY coordinate system are set for each of the first measurement object image and the second measurement object image, and the first measurement object image set in the first measurement object image is mutual conversion of the first measurement object image and the second measurement object image using the XY coordinate system of the second measurement object image and the second XY coordinate system set in the second measurement object image and the predetermined information. An image dimension measuring device that measures a dimension between the first measuring element and the second measuring element. The image size measuring device according to claim 4,
The contour of the measurement object in the first measurement object image and the contour of the measurement object in the second measurement object image are used as the predetermined information, and the first measurement object image and the second measurement object image are An image dimension measuring device that measures a dimension between the first measurement element and the second measurement element by mutually converting images of the measurement object. The image dimension measuring device according to any one of claims 4 to 6,
An image dimension measuring device comprising a display unit capable of displaying the first measurement element and the second measurement element in one image. The image dimension measuring device according to any one of claims 1 to 7,
The operation unit accepts a selection operation by a user as to whether the object to be measured is a box object or a shape other than a box object,
The control unit controls the rotation mechanism to rotate the measurement target in a predetermined angle unit when the operation unit accepts a selection operation indicating that the measurement target is a box object; An image dimension measuring device that controls the rotation mechanism to rotate the measurement object at an arbitrary angle when the operation unit accepts a selection operation indicating that the measurement object has a shape other than a box object. The image dimension measuring device according to claim 8,
The rotating mechanism is configured to be able to attach or detach any chuck mechanism from among a plurality of chuck mechanisms, including a chuck mechanism for a box object that grips a box object and a chuck mechanism for a shaft object that grips a shaft object,
In the image dimension measuring device, the plurality of chuck mechanisms share a common attachment/detachment portion to the rotation mechanism. The image dimension measuring device according to any one of claims 1 to 9,
An image dimension measuring device comprising a display section capable of simultaneously displaying the first measurement object image and the second measurement object image. The image dimension measuring device according to any one of claims 1 to 10,
The imaging unit captures a plurality of connected images including different regions of the measurement target,
The control unit generates a display image by linking the plurality of linked images captured by the imaging unit,
An image dimension measuring device including a display section that displays the display image generated by the control section. The image dimension measuring device according to any one of claims 1 to 11,
The first measurement object image and the second measurement object image are displayed aligned in the horizontal direction, or the first measurement object image and the second measurement object image are displayed in the vertical direction. An image dimension measuring device equipped with a display unit that displays images in aligned positions. The image dimension measuring device according to any one of claims 1 to 12,
The operation unit accepts a user's operation to select one of the first measurement object image and the second measurement object image,
The control unit is an image dimension measuring device that controls the rotation mechanism so that the rotation angle is the same as the rotation angle of the measurement object when the selected measurement object image is captured. The image dimension measuring device according to claim 13,
The imaging unit generates a preview image of the measurement object in a state where the rotation angle of the measurement object is the same as the rotation angle of the measurement object when the selected measurement object image is captured;
The first measurement object image, the second measurement object image, and the preview image are displayed simultaneously, and the preview image is displayed from the first measurement object image and the second measurement object image. An image size measuring device equipped with a display section that can display an image in an enlarged state.

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