JP7434856B2 - Shape measuring device and shape measuring method - Google Patents

Description

The present invention relates to a shape measuring device and a shape measuring method.

For example, a three-dimensional scanner is known as a device that measures the three-dimensional shape of an object. Patent Document 1 proposes a three-dimensional scanner using laser light.

JP2012-58226A

An object of the present invention is to provide a technique that can calculate the outline of an object and accurately measure the shape of the object.

According to one aspect of the invention,
a support part that supports an object;
an imaging unit that images a part of the outline of the object;
a rotation unit that rotates the support unit about a rotation axis in a direction that intersects the imaging direction of the imaging unit;
a moving unit that moves the relative position of the imaging unit and the support unit along the outline of the object;
A shape measuring device is provided that includes a processing section that combines images captured by the imaging section and calculates a contour of the object.

According to another aspect of the invention:
a step of imaging a part of the outline of the object;
rotating the object;
moving an imaging area along the contour of the object;
A shape measuring method is provided, which includes the steps of combining captured images of the object and calculating a contour of the object.

According to the present invention, the contour of an object can be calculated and the shape of the object can be accurately measured.

FIG. 1 is a schematic configuration diagram showing a shape measuring device 10 according to a first embodiment of the present invention. FIG. 2 is a flowchart showing an example of the shape measuring method according to the first embodiment of the present invention. FIG. 3 is a diagram schematically showing an example of an image obtained in the imaging step S102 according to the first embodiment of the present invention. FIG. 4 is a diagram schematically showing an example of the imaging region Z3 before performing the moving step S106 and the imaging region Z4 after performing the moving step S106 according to the first embodiment of the present invention. FIG. 5 is a diagram schematically showing an example of an image synthesized by the processing unit 15 in the image processing step S107 according to the first embodiment of the present invention. FIGS. 6A to 6C are diagrams schematically showing an example of a procedure for calculating the contour of an object 20 according to Modification 1 of the first embodiment of the present invention.

<Knowledge obtained by the inventor>
First, the findings obtained by the inventor will be explained.

As a device for measuring the three-dimensional shape of an object, for example, a three-dimensional scanner using a laser beam is known. However, for shiny objects such as single crystal ingots, most of the laser light is reflected, making it difficult to accurately measure the shape.

When growing a single crystal ingot of lithium tantalate or the like, the shape of the grown crystal reflects the results of the growth conditions and can be an important source of information for determining the next growth conditions. Therefore, a technology that can accurately measure the shape of shiny objects has been desired.

The inventor of the present application has conducted extensive research into the above-mentioned phenomenon. As a result, they discovered that the shape of an object can be accurately measured by capturing an image of the object's outline and calculating the object's outline from the captured image. The present invention can accurately measure the shape of even a shiny object such as a single crystal ingot.

[Details of embodiments of the present invention]
Next, one embodiment of the present invention will be described below with reference to the drawings. Note that the present invention is not limited to these examples, but is indicated by the scope of the claims, and is intended to include all changes within the meaning and scope equivalent to the scope of the claims.

<First embodiment of the present invention>
(1) Configuration of shape measuring device 10 First, the configuration of shape measuring device 10 of this embodiment will be described.

FIG. 1 is a schematic configuration diagram showing a shape measuring device 10 of this embodiment. As shown in FIG. 1, the shape measuring device 10 of this embodiment includes, for example, a supporting section 11, an imaging section 12, a rotating section 13, a moving section 14, a processing section 15, and a light source 16. ing. The shape measuring device 10 is configured to measure the shape of an object 20, for example.

The object 20 is, for example, a single crystal ingot of lithium tantalate. The object 20 is, for example, cylindrical and has a diameter of 4 inches or more and 8 inches or less. The surface of the object 20 has few irregularities and is glossy.

The support part 11 is configured to, for example, contact the bottom surface of the object 20 and support the object 20. It is preferable that the support section 11 is configured so as not to prevent the imaging section 12 from capturing an image of the outline of the object 20 . Specifically, for example, it is preferable to configure the support part 11 so that the contact area between the support part 11 and the object 20 is as small as possible. Thereby, it becomes easy to distinguish between the outline of the support part 11 and the outline of the object 20, and it becomes possible to accurately measure the shape of the object 20.

The imaging unit 12 is configured to image a part of the outline of the object 20. When the light emitted by the light source 16 enters the imaging unit 12, an image showing the outline of the object 20 is obtained, for example, by an image sensor included in the imaging unit 12. Here, if the entire contour of the object 20 is imaged at once, the influence of light scattered by the outer peripheral surface of the object 20 becomes large, so the contour of the object 20 becomes unclear. Therefore, it becomes difficult to accurately measure the shape of the object 20. In contrast, the imaging unit 12 of the present embodiment is configured to image the outline of the object 20 in a plurality of times, one part at a time. In this case, the optical axis of the imaging unit 12 can be aligned with the position of the outer peripheral surface of the object 20. In other words, since the outer peripheral surface forming the outline of the object 20 is located close to the optical axis of the imaging unit 12, the outline of the object 20 can be clearly imaged. As a result, it becomes possible to accurately measure the shape of the object 20.

Further, it is preferable that the imaging section 12 includes a removing section that removes scattered light. In this specification, "scattered light" means light other than light parallel to the imaging direction, such as diffracted light, refracted light, and reflected light. When the object 20 has gloss, it becomes difficult to clearly image the outline of the object 20 due to the influence of scattered light such as light scattered on the outer peripheral surface of the object 20. On the other hand, since the imaging unit 12 includes the removal unit, the influence of scattered light can be suppressed and the outline of the object 20 can be clearly imaged. Note that in this specification, the imaging direction is the direction in which the imaging unit 12 images the object 20, and can be translated as the optical axis direction of the imaging unit 12.

Specifically, it is preferable that the imaging unit 12 has a lens as a removal unit that allows only light parallel to the imaging direction (including light that is extremely close to parallel) to be irradiated by the light source 16 to pass through. Examples of such lenses include a double-sided telecentric lens and an object-side telecentric lens. When the imaging unit 12 has such a lens, even when the object 20 has gloss, it is possible to clearly image the outline of the object 20. Furthermore, when the imaging unit 12 has at least one of a double-sided telecentric lens or an object-side telecentric lens, even if the distance between the imaging unit 12 and the object 20 changes, the size of the image of the object 20 obtained by the image sensor changes. There's nothing to do. Therefore, it becomes possible to accurately measure the shape of the object 20.

The rotating unit 13 is provided, for example, at the bottom of the supporting unit 11 and is configured to rotate the supporting unit 11 with a rotation axis A in a direction intersecting (or orthogonal to) the imaging direction. Preferably, the rotation axis A passes through the center of the object 20. When the rotating unit 13 rotates the support unit 11, the imaging unit 12 can image the object 20 viewed from multiple angles. Thereby, the shape of the object 20 viewed from multiple angles can be measured. In addition, when growing a single crystal ingot of lithium tantalate or the like, the growth of a specific crystal orientation may be influenced by the growth conditions, but even in such cases, the shape of the object 20 viewed from multiple angles can be measured. and the growth conditions can be evaluated. Therefore, the shape measuring device 10 of this embodiment can be suitably used, for example, to measure the shape of a single crystal ingot of lithium tantalate or the like.

The moving unit 14 is configured to move the relative positions of the imaging unit 12 and the support unit 11 along the outline of the object 20. In this embodiment, the moving section 14 is configured to move the imaging section 12. Note that the moving section 14 may be configured to move the support section 11. As described above, the imaging unit 12 images a part of the outline of the object 20. However, by moving the imaging unit 12 along the contour of the object 20, for example, the entire contour of the object 20 can be imaged in multiple times. Further, even if the shapes and sizes of the objects 20 are different, the entire outline of the objects 20 can be imaged and the shapes of the objects 20 can be accurately measured.

The processing unit 15 is configured to combine the images captured by the imaging unit 12 and calculate the outline of the object 20. The processing unit 15 is configured to be able to transmit and receive data with, for example, the imaging unit 12, the rotating unit 13, the moving unit 14, and the light source 16. As the processing unit 15, for example, a computer that executes a predetermined program as necessary can be used. By the processing unit 15 calculating the contour of the object 20, the shape of the object 20 can be accurately measured.

The light source 16 is provided, for example, at a position facing the imaging unit 12 with the object 20 in between, and is configured to emit light parallel to the imaging direction. The light emitted by the light source 16 enters the imaging unit 12 through the object 20. As the light source 16, for example, a narrow directivity angle type LED can be used. Further, the light source 16 may include a collimator lens that converts the light emitted by the light source 16 into parallel light. By emitting light parallel to the imaging direction from the light source 16, the imaging unit 12 can clearly image the outline of the object 20.

The shape measuring device 10 of this embodiment has the above-described configuration and can calculate the contour of the object 20 and accurately measure the shape of the object 20. In particular, even if the object 20 has gloss, its shape can be accurately measured.

(2) Shape measuring method using shape measuring device 10 Next, a shape measuring method using shape measuring device 10 of this embodiment will be explained.

FIG. 2 is a flowchart showing an example of the shape measuring method of this embodiment. The shape measurement method of this embodiment includes, for example, an initial setting step S101, an imaging step S102, a rotation step S103, an imaging angle determination step S104, a contour determination step S105, a movement step S106, and an image processing step S107. , has.

(Initial setting step S101)
First, in the initial setting step S101, the object 20 is supported using the support section 11. At this time, it is preferable that the support section 11 supports the object 20 so as not to prevent the imaging section 12 from capturing an image of the outline of the object 20 . Next, for example, the imaging unit 12 is moved and the imaging area is moved to the initial position. The initial position of the imaging area is set so that a part of the outline of the object 20 exists within the imaging area. Preferably, the initial position of the imaging area is set such that a part of the outline of the lower part of the object 20 (that is, the side of the surface where the support part 11 is in contact with the object 20) exists within the imaging area. Thereby, the outline of the object 20 can be easily found using the position of the support section 11 as a reference.

(Imaging process S102)
In the imaging step S102, for example, the light source 16 is used to irradiate the object 20 with light parallel to the imaging direction, and the imaging unit 12 is used to image a part of the outline of the object 20. The image captured by the imaging unit 12 is transmitted to the processing unit 15, for example.

FIG. 3 is a diagram schematically showing an example of an image obtained in the imaging step S102. As shown in FIG. 3, in the imaging region, an area where the object 20 does not exist becomes an area Z1 with high light intensity because the light emitted from the light source 16 enters the imaging unit 12 without being blocked by the object 20. . On the other hand, in the imaging area, the area where the object 20 is present becomes an area Z2 where the light emitted from the light source 16 is blocked by the object 20, and the light intensity is low. That is, the boundary between the region Z1 and the region Z2 indicates the outline of the object 20. Note that among the light emitted from the light source 16, scattered light such as light scattered on the outer peripheral surface of the object 20 is removed by, for example, a lens included in the imaging unit 12. Thereby, even if the object 20 has gloss, the outline of the object 20 can be clearly imaged.

(Rotation process S103)
In the rotation step S103, for example, the rotating unit 13 is used to rotate the object 20 together with the support unit 11 by a predetermined angle φ, and the imaging angle θ is increased by the angle φ. In this specification, the imaging angle θ indicates the angle at which the object 20 is imaged, and its initial value is 0°. Further, the imaging angle θ can be rephrased as the angle at which the object 20 is rotated from the position of the object 20 in the initial setting step S101, for example. The object 20 is rotated with the rotation axis A in a direction intersecting (or orthogonal to) the imaging direction. The angle φ can be set arbitrarily within a range of, for example, more than 0° and less than or equal to 360°.

(Imaging angle judgment step S104)
In the imaging angle determination step S104, it is determined whether imaging of the object 20 has been completed for one rotation. Specifically, for example, it is determined whether the imaging angle θ is 360° or more. If the imaging angle θ is 360° or more, it is determined that imaging of the object 20 has been completed for one rotation, and the next step is a contour determination step S105. Note that before performing the contour determination step S105, the imaging angle θ is reset to 0°. Further, when the imaging angle θ exceeds 360°, the object 20 is returned to the initial position (that is, the position where the imaging angle θ is 0°) using the rotating unit 13, for example. On the other hand, when the imaging angle θ is less than 360°, the next step is to perform the imaging step S102 again in order to image the outline of the object 20 at the imaging angle θ.

That is, in this embodiment, the imaging step S102, the rotation step S103, and the imaging angle determination step S104 are repeatedly performed until the imaging of the object 20 is completed for one rotation (until the imaging angle θ becomes 360° or more). . Thereby, the outline of the object 20 viewed from multiple angles can be imaged. Note that, for example, if the angle φ is set to 60° in the rotation step S103, the imaging step S102 will be repeated six times until the imaging angle θ becomes 360° or more. It is possible to image the outline of

(Contour judgment step S105)
In the imaging angle determination step S104, if the imaging angle θ is 360° or more, a contour determination step S105 is performed. In the contour determination step S105, for example, it is determined whether the entire contour of the object 20 has been imaged. Specifically, when the images captured by the imaging unit 12 are combined, it is determined whether the entire outline of the object 20 is shown. The entire outline of the object 20 is shown when, for example, the outline of the object 20 is closed in the combined image. If the entire outline of the object 20 has been imaged, the next step is an image processing step S107. On the other hand, if there remains a portion of the contour of the object 20 that has not been imaged, the next step is a movement step S106 in order to image the contour of the portion that has not been imaged yet.

(Moving step S106)
If it is determined in the contour determination step S105 that there remains a portion of the contour of the object 20 that has not been imaged, a movement step S106 is performed. In the moving step S106, for example, the moving unit 14 is used to move the imaging area by a predetermined distance along the outline of the object 20.

In the moving step S106, the direction in which the imaging region is moved is determined, for example, from an image in which a part of the outline of the object 20 is captured when the imaging angle θ is 0°. Using FIG. 3 as an example, the direction in which the outline of the object 20 (the boundary between area Z1 and area Z2) extends at the end of the imaging area (the direction of the arrow in FIG. 3) is the candidate direction for moving the imaging area. . In other words, there are candidates in at least two directions. It is preferable to determine in which direction the imaging area should be moved among the plurality of candidates by referring to the moving direction of the imaging area in the previous moving step S106. Specifically, it is preferable to move the imaging area in a direction close to the moving direction of the imaging area in the previous moving step S106. Thereby, it is possible to prevent the imaging area from moving to an area that has already been imaged, and to efficiently image the outline of the object 20. Note that in the first movement step S106, the imaging area may be moved in a direction close to a preset direction, or may be randomly determined.

FIG. 4 is a diagram schematically showing an example of the imaging region Z3 before performing the moving step S106 and the imaging region Z4 after performing the moving step S106. As shown in FIG. 4, in the moving step S106, it is preferable to move the imaging area so that the imaging area Z3 and the imaging area Z4 have a common area. Thereby, the captured images can be easily combined in the image processing step S107, which will be described later. Note that the size of the common area can be set in advance.

After performing the moving step S106, the imaging step S102 is performed again. That is, the imaging step S102, the rotation step S103, the imaging angle determining step S104, the outline determining step S105, and the moving step S106 are repeatedly performed until the entire outline of the object 20 is imaged. Thereby, even if the shapes and sizes of the objects 20 are different, the entire outline of the objects 20 can be imaged and the shapes of the objects 20 can be accurately measured.

(Image processing step S107)
If it is determined in the contour determination step S105 that the entire contour of the object 20 has been imaged, an image processing step S107 is performed. In the image processing step S107, for example, the processing unit 15 is used to synthesize captured images of the object 20 and calculate the outline of the object 20. The processing unit 15 calculates, for example, feature quantities such as the maximum width, minimum width, and height of the object 20 from the calculated contour information of the object 20. Thereby, the shape of the object 20 can be measured accurately.

FIG. 5 is a diagram schematically showing an example of an image synthesized by the processing unit 15 in the image processing step S107. In the image processing step S107, images are synthesized for each imaging angle θ, so that a plurality of images showing the outline of the object 20 as shown in FIG. 5 are obtained. In the rotation step S103, when the angle φ at which the rotating unit 13 rotates the object 20 together with the supporting unit 11 is set to, for example, 60°, six types of images showing the outline of the object 20 as shown in FIG. 5 are obtained. . In this manner, in this embodiment, the shape of the object 20 viewed from multiple angles can be measured.

Furthermore, as shown in FIG. 5, in this embodiment, since the imaging area is moved along the outline of the object 20, a non-imaging area Z5 may exist inside the combined image. In this case, for example, by assuming that the object 20 exists within the non-imaging region Z5, the shape of the object 20 can be accurately measured. Furthermore, the shape of the object 20 can be measured in a shorter time than when imaging the entire area where the object 20 exists.

(3) Effects of this embodiment According to this embodiment, one or more of the following effects can be achieved.

(a) The imaging unit 12 of this embodiment is configured to image a part of the outline of the object 20. That is, the imaging unit 12 of the present embodiment is configured to image the outline of the object 20 in a plurality of times, one part at a time. In this case, the optical axis of the imaging unit 12 can be aligned with the position of the outer peripheral surface of the object 20. In other words, since the outer peripheral surface forming the outline of the object 20 is located close to the optical axis of the imaging unit 12, the outline of the object 20 can be clearly imaged. As a result, it becomes possible to accurately measure the shape of the object 20.

(b) The rotation unit 13 of this embodiment is configured to rotate the support unit 11, for example, with a rotation axis A in a direction intersecting (or orthogonal to) the imaging direction. When the rotating unit 13 rotates the support unit 11, the imaging unit 12 can image the object 20 viewed from multiple angles. Thereby, the shape of the object 20 viewed from multiple angles can be measured. Therefore, the shape measuring device 10 of this embodiment can be suitably used, for example, to measure the shape of a single crystal ingot of lithium tantalate or the like.

(c) The moving unit 14 of this embodiment is configured to move the relative positions of the imaging unit 12 and the support unit 11 along the outline of the object 20. For example, by moving the imaging unit 12 along the contour of the object 20, it is possible to image the entire contour of the object 20 in a plurality of times. Further, even if the shapes and sizes of the objects 20 are different, the entire outline of the objects 20 can be imaged and the shapes of the objects 20 can be accurately measured.

(d) The imaging unit 12 of this embodiment preferably includes a removing unit that removes scattered light. Since the imaging unit 12 includes the removal unit, the influence of scattered light can be suppressed and the outline of the object 20 can be clearly imaged.

(e) It is preferable that the imaging unit 12 of this embodiment has a lens as a removing unit that allows only light parallel to the imaging direction (including light that is extremely close to parallel) to be irradiated by the light source 16 to pass through. When the imaging unit 12 has such a lens, even when the object 20 has gloss, it is possible to clearly image the outline of the object 20. Furthermore, when the imaging unit 12 has at least one of a double-sided telecentric lens or an object-side telecentric lens, even if the distance between the imaging unit 12 and the object 20 changes, the size of the image of the object 20 obtained by the image sensor changes. There's nothing to do. Therefore, it becomes possible to accurately measure the shape of the object 20.

(f) The light source 16 of this embodiment is configured to emit light parallel to the imaging direction, for example. By emitting light parallel to the imaging direction from the light source 16, the imaging unit 12 can clearly image the outline of the object 20.

(4) Modifications of First Embodiment The above-described embodiment can be modified as required as shown in the following modifications. Hereinafter, only elements that are different from the above-described embodiments will be described, and elements that are substantially the same as those described in the above-mentioned embodiments will be given the same reference numerals and their explanations will be omitted.

(4-1) Modification example 1 of the first embodiment
In the first embodiment, the imaging unit 12 is moved by the moving unit 14, and the entire contour of the object 20 is imaged in a plurality of times. In contrast, the imaging unit 12 of this modification is configured to image the outline of one of the two parts of the object 20 separated by the rotation axis A when the object 20 is viewed from the imaging direction. It is composed of In the contour determination step S105 of this modification, it is determined whether the entire contour of one of the two parts of the object 20 separated by the rotation axis A is imaged. Furthermore, the processing unit 15 of this modification is configured to calculate the entire outline of the object 20 from the image captured by the imaging unit 12.

FIGS. 6(a) to 6(c) are diagrams schematically showing an example of a procedure for calculating the contour of the object 20 in this modification. First, as shown in FIG. 6(a), the processing unit 15 of this modification example synthesizes the images captured by the imaging unit 12 when the imaging angle θ is 0°, and synthesizes one half of the outline of the object 20. (left half). Next, as shown in FIG. 6(b), the processing unit 15 of this modification combines the images captured by the imaging unit 12 when the imaging angle θ is 180°, and combines the images captured by the imaging unit 12 to form one side of the outline of the object 20. Calculate half (left half). Then, the processing unit 15 of this modification, for example, horizontally inverts the image showing the outline of the object 20 shown in FIG. 6(b) and combines it with the image showing the outline of the object 20 shown in FIG. 6(a). As described above, the entire outline of the object 20 as shown in FIG. 6(c) can be calculated, for example. The processing unit 15 calculates feature quantities such as the maximum width, minimum width, and height of the object 20 from the calculated overall contour information of the object 20, for example. Thereby, the shape of the object 20 can be measured accurately.

In the rotation step S103 of this modification, the angle φ at which the rotating unit 13 rotates the object 20 together with the supporting unit 11 is set to an angle that is a divisor of 180°, such as 30°, 60°, or 90°. It is preferable to do so. As a result, for example, the image when the imaging angle θ is θ ₁ and the image when the imaging angle θ is θ ₁ +180° are combined as a pair, and the image synthesis as described above is performed to obtain the entire outline of the object 20. It can be calculated. For example, when the angle φ is set to 60°, it is possible to pair images with imaging angles θ of 0° and 180°, 60° and 240°, and 120° and 300°, and perform image synthesis as described above. can. Thereby, the shape of the object 20 viewed from multiple angles can be measured.

As described above, also in this modification, the shape of the object 20 viewed from multiple angles can be measured. Furthermore, in this modification, since the object 20 is divided into two parts and only the outline of one of them is imaged, the shape of the object 20 can be accurately measured in a shorter time than in the first embodiment. be able to. Furthermore, in this modification, the movement stroke by the moving unit 14 can be approximately half that of the first embodiment. Therefore, the shape measuring device 10 of this modification can be easily downsized.

<Other embodiments of the present invention>
Although the embodiments of the present invention have been specifically described above, the present invention is not limited to the above-described embodiments, and can be modified in various ways without departing from the gist thereof.

For example, in the above-described embodiment, a case has been described in which the shape of a glossy single crystal ingot is measured, but the object 20 is not limited to a single crystal ingot. The present invention can also be used, for example, when measuring the shape of a crucible used when manufacturing a single crystal ingot.

Further, for example, in the above-described embodiment, a case has been described in which the support part 11 supports the object 20 by contacting the bottom surface of the object 20, but the manner in which the support part 11 supports the object 20 can be changed in various ways. be. For example, the support section 11 may support the object 20 by contacting the side surface of the object 20. In this case, the shape of the object 20 viewed from a different angle than in the first embodiment described above can be measured.

<Preferred embodiments of the present invention>
Preferred embodiments of the present invention will be described below.

(Additional note 1)
According to one aspect of the invention,
a support part that supports an object;
an imaging unit that images a part of the outline of the object;
a rotation unit that rotates the support unit about a rotation axis in a direction that intersects the imaging direction of the imaging unit;
a moving unit that moves the relative position of the imaging unit and the support unit along the outline of the object;
A shape measuring device is provided that includes a processing section that combines images captured by the imaging section and calculates a contour of the object.

(Additional note 2)
The shape measuring device according to Supplementary Note 1,
The imaging section includes a removing section that removes scattered light.

(Additional note 3)
The shape measuring device according to appendix 1 or appendix 2,
further comprising a light source that irradiates the object with light parallel to the imaging direction,
The imaging unit includes a lens that allows only light emitted from the light source that is parallel to the imaging direction to pass through.
Preferably, the imaging section has at least one of a double-sided telecentric lens or an object-side telecentric lens.

(Additional note 4)
The shape measuring device according to any one of Supplementary Notes 1 to 3,
The imaging unit images the outline of one of two parts of the object divided by the rotation axis when the object is viewed from the imaging direction,
The processing unit calculates the entire outline of the object from the image captured by the imaging unit.

(Appendix 5)
The shape measuring device according to any one of Supplementary Notes 1 to 4,
The object is a single crystal ingot.

(Appendix 6)
According to another aspect of the invention:
a step of imaging a part of the outline of the object;
rotating the object;
moving an imaging area along the contour of the object;
A shape measuring method is provided, which includes the steps of combining captured images of the object and calculating a contour of the object.

10 Shape measuring device 11 Supporting section 12 Imaging section 13 Rotating section 14 Moving section 15 Processing section 16 Light source 20 Object Z1 Area Z2 Area Z3 Imaging area Z4 Imaging area Z5 Non-imaging area S101 Initial setting process S102 Imaging process S103 Rotating process S104 Imaging angle Judgment step S105 Contour judgment step S106 Movement step S107 Image processing step

Claims (7)

a support part that supports an object;
an imaging unit that images a part of the outline of the object;
a rotation unit that rotates the support unit about a rotation axis in a direction that intersects the imaging direction of the imaging unit;
a moving unit that moves the relative position of the imaging unit and the support unit along the outline of the object;
a processing unit that combines images captured by the imaging unit and calculates a contour of the object,
The imaging unit images the outline of one of two parts of the object divided by the rotation axis when the object is viewed from the imaging direction,
The processing unit performs image synthesis using a pair of an image obtained when the imaging angle is θ ₁ and an image obtained by horizontally inverting the image obtained when the imaging angle is θ ₁ +180°, and calculates the overall outline of the object. , shape measuring device. The shape measuring device according to claim 1, wherein the imaging section includes a removing section that removes scattered light. further comprising a light source that irradiates the object with light parallel to the imaging direction,
3. The shape measuring device according to claim 1, wherein the imaging section includes a lens that allows only light parallel to the imaging direction irradiated by the light source to pass through. The shape measuring device according to any one of claims 1 to 3, wherein the processing section measures the shape of the object viewed from a plurality of angles. 5. If a non-imaging area exists inside the combined image, it is assumed that the object exists in the non-imaging area, and the shape of the object is measured. Shape measuring device. The shape measuring device according to any one of claims 1 to 5, wherein the object is a single crystal ingot. a step of imaging a part of the outline of the object;
a step of rotating the object with a direction intersecting the imaging direction as a rotation axis;
moving an imaging area along the contour of the object;
composing images of the object and calculating a contour of the object;
In the imaging step, when the object is viewed from the imaging direction, the outline of one of two parts of the object divided by the rotation axis is imaged;
In the step of calculating the outline of the object, images are synthesized by pairing an image when the imaging angle is θ ₁ and an image obtained by horizontally inverting the image when the imaging angle is θ ₁ +180°, and calculate the entire outline of the object. A shape measurement method that calculates the contour of.

Images