JP7419202B2 - sensor - Google Patents

Description

Embodiments of the invention relate to sensors.

For example, there are sensors that utilize a MEMS structure. It is desired that the detection capability of sensors be improved.

Japanese Patent Application Publication No. 2016-197060

Embodiments of the present invention provide sensors capable of improved detection capabilities.

According to an embodiment of the invention, a sensor includes a base, a first support, and a first structure. The first support part is fixed to the base body. The first structure includes a movable part and a plurality of first beam parts supported by the first support part. The movable part includes a first region and a second region. The direction from the first region to the second region is along the first direction. The plurality of first beam portions extend in a second direction intersecting the first direction. The plurality of first beam parts are connected to the first region. A distance between the second region and the base body along a third direction intersecting a plane including the first direction and the second direction is variable. The number of the plurality of first beam parts is three or more.

FIG. 1 is a schematic perspective view illustrating a sensor according to a first embodiment. FIG. 2 is a graph diagram illustrating the characteristics of the sensor according to the first embodiment. FIGS. 3(a) to 3(c) are schematic diagrams illustrating a sensor according to the second embodiment. FIG. 4 is a schematic cross-sectional view illustrating a sensor according to the second embodiment. FIG. 5 is a graph diagram illustrating the characteristics of the sensor. FIGS. 6(a) to 6(c) are schematic diagrams illustrating an electronic device according to a third embodiment. FIGS. 7(a) to 7(h) are schematic diagrams illustrating applications of the electronic device.

DESCRIPTION OF THE PREFERRED EMBODIMENTS Each embodiment of the present invention will be described below with reference to the drawings.
The drawings are schematic or conceptual, and the relationship between the thickness and width of each part, the size ratio between parts, etc. are not necessarily the same as the reality. Even when the same part is shown, the dimensions and ratios may be shown differently depending on the drawing.
In the specification of this application and each figure, the same elements as those described above with respect to the existing figures are given the same reference numerals, and detailed explanations are omitted as appropriate.

(First embodiment)
FIG. 1 is a schematic perspective view illustrating a sensor according to a first embodiment.
As shown in FIG. 1, the sensor 110 according to the embodiment includes a base 50, a first support portion 51f, and a first structure 11. The first support portion 51f is fixed to the base body 50.

The first structure 11 includes a movable part 20 and a plurality of first beam parts 31. The movable part 20 includes a first region 21 and a second region 22. The movable part 20 may further include a third region 23. The direction from the first region 21 to the second region 22 is along the first direction. The first region 21 is between the second region 22 and the third region 23 in the first direction (X-axis direction).

The first direction is the X-axis direction. One direction perpendicular to the X-axis direction is defined as the Y-axis direction. The direction perpendicular to the X-axis direction and the Y-axis direction is defined as the Z-axis direction.

The plurality of first beam parts 31 are connected to the first support part 51f. The plurality of first beam parts 31 are supported by the first support part 51f. In the embodiment, the number of the plurality of first beam parts 31 is three or more. In this example, the number of the plurality of first beam parts 31 is three. The plurality of first beam sections 31 include a beam section 31a, a beam section 31b, a beam section 31c, and the like. In this example, the plurality of first beam parts 31 are lined up along the first direction (X-axis direction). The plurality of first beam portions 31 extend in a second direction (for example, the Y-axis direction) that intersects the first direction. The plurality of first beam parts 31 are connected to the first region 21. For example, the plurality of first beam parts 31 can be elastically deformed.

Substrate 50, for example, extends substantially parallel to the XY plane. The movable portion 20 (first to third regions 21 to 23) is separated from the base body 50 in the Z-axis direction. A gap g1 is provided between the movable part 20 and the base body 50.

For example, the movable portion 20 has a plate shape (film shape) that extends along the XY plane. The movable portion 20 (first to third regions 21 to 23) is deformable. The position of the second region 22 in the third direction (for example, the Z-axis direction) intersecting the plane including the first direction and the second direction is variable. The distance d1 along the third direction between the second region 22 and the base 50 is variable. The distance between the third region 23 and the base 50 along the third direction is variable.

For example, when acceleration such as an external force is applied to the sensor 110, a portion of the first structure 11 deforms. For example, the position of the movable portion 20 (second region 22, third region 23, etc.) relative to the base body 50 changes. For example, the distance d1 between the second region 22 and the base 50 changes due to acceleration. For example, in one example, an external force applied to the sensor 110 can be detected by detecting a value (for example, capacitance) corresponding to a change in the position of the movable part 20. For example, the acceleration may be detected by detecting a change in the resonant frequency of the movable part 20 that occurs in response to the acceleration. The sensor 110 is, for example, a MEMS (Micro Electro Mechanical Systems) element.

In such a sensor 110, the plurality of first beam portions 31 are, for example, torsion type springs. The plurality of first beam parts 31 change the vibration frequency characteristics of the movable part 20, and the resonance frequency of the sensor changes. The inventors of the present invention have discovered that the resonant frequency of the sensor can be increased when the number of the plurality of first beam parts 31 is three or more. Thereby, acceleration can be detected even in a high frequency band, for example. The detection ability of the sensor can be improved.

As shown in FIG. 1, in this example, the sensor 110 further includes a second support portion 51g. The second support portion 51g is fixed to the base 50. The first structure 11 further includes a plurality of second beam parts 32. The plurality of second beam parts 32 are connected to the second support part 51g. The plurality of second beam parts 32 are supported by the second support part 51g. In this example, the plurality of second beam parts 32 are lined up along the first direction (X-axis direction). The plurality of second beam portions 32 extend in a second direction (for example, the Y-axis direction) that intersects the first direction. The plurality of second beam portions 32 are connected to the first region 21 . For example, the plurality of second beam parts 32 can be elastically deformed.

At least a portion of the first region 21 is located between the first support portion 51f and the second support portion 51g in the second direction. The plurality of first beam parts 31 are located between the first support part 51f and the first region 21 in the second direction. The plurality of second beam parts 32 are located between the second support part 51g and the first region 21 in the second direction.

For example, the number of the plurality of second beam parts 32 is the same as the number of the plurality of first beam parts 31. In this example, the number of the plurality of second beam parts 32 is three. The plurality of second beam sections 32 include a beam section 32a, a beam section 32b, and a beam section 32c. The direction from one of the plurality of first beam parts 31 (for example, beam part 31a) to one of the plurality of second beam parts 32 (for example, beam part 32a) is substantially parallel to the Y-axis direction.

For example, the beam portion 31a and the beam portion 32a are a pair of springs. The beam portion 31b and the beam portion 32b are a pair of springs. The beam portion 31c and the beam portion 32c are a pair of springs. In embodiments, three or more pairs of beams (torsion type springs) are provided. Thereby, the resonant frequency of the sensor can be increased.

For example, the first structure 11 may have a structure symmetrical with respect to the ZX plane. For example, the plurality of first beam parts 31 and the plurality of second beam parts 32 have the same shape. For example, the plurality of first beam portions 31 are arranged at equal intervals. For example, the plurality of second beam portions 32 are arranged at equal intervals.

For example, the length of the beam portion 31a (length in the Y-axis direction) is substantially the same as the length of the beam portion 32a. The length L1a of one of the plurality of first beam parts 31 along the second direction is substantially the same as the length L2a of one of the plurality of second beam parts 32 along the second direction. For example, the length L1a is 0.8 times or more and 1.2 times or less than the length L2a.

For example, the length of the beam portion 31a is substantially the same as the length of the beam portion 31b. The length L1a of one of the plurality of first beam parts 31 along the second direction is substantially the same as the length L1b of another one of the plurality of first beam parts along the second direction. For example, the length L1a is greater than or equal to 0.8 times and less than or equal to 1.2 times the length L1b.

For example, the thickness (length in the Z-axis direction) of the beam portion 31a is substantially the same as the thickness of the beam portion 32a. The length T1a of one of the plurality of first beam parts 31 along the third direction is substantially the same as the length T2a of one of the plurality of second beam parts 32 along the third direction. For example, the length T1a is 0.8 times or more and 1.2 times or less than the length T2a.

For example, the thickness of the beam portion 31a is substantially the same as the thickness of the beam portion 31b. The length T1a of one of the plurality of first beam parts 31 along the third direction is substantially the same as the length T1b of another one of the plurality of first beam parts 31 along the third direction. For example, the length T1a is 0.8 times or more and 1.2 times or less than the length T1b.

For example, the width of the beam portion 31a (length in the X-axis direction) is substantially the same as the width of the beam portion 32a. The length W1a of one of the plurality of first beam parts 31 along the first direction is substantially the same as the length W2a of one of the plurality of second beam parts 32 along the first direction. For example, the length W1a is greater than or equal to 0.8 times and less than or equal to 1.2 times the length W2a.

For example, the width of the beam portion 31a is substantially the same as the width of the beam portion 31b. The length W1a of one of the plurality of first beam parts 31 along the first direction is substantially the same as the length W1b of another one of the plurality of first beam parts 31 along the first direction. For example, the length W1a is greater than or equal to 0.8 times and less than or equal to 1.2 times the length W1b.

For example, the shape of the first beam portion 31 is elongated in the Y-axis direction. For example, length L1a is longer than length W1a and longer than length T1a. The interval between the plurality of first beam parts 31 may be shorter than the width (length W1a) of the plurality of first beam parts 31.

For example, the length L22 of the second region 22 along the first direction is longer than the length L21 of the first region 21 along the first direction. For example, the length L22 is longer than the length L23 of the third region 23 along the first direction.

The shapes of the plurality of first beam parts 31, the shapes of the plurality of second beam parts 32, and the shape of the movable part 20 described above, for example, make it easier for the movable part 20 to vibrate more appropriately.

Below, evaluation results of experimental samples in which the number of the plurality of first beam parts 31 and the width of the plurality of first beam parts 31 were changed will be shown. In the experimental sample, the width W1 of one of the plurality of first beam parts 31 and the number of the plurality of first beam parts 31 are changed.

FIG. 2 is a graph diagram illustrating the characteristics of the sensor according to the first embodiment.
The horizontal axis in FIG. 2 is the width W1 of one of the plurality of first beam parts 31. The vertical axis is the resonance frequency f1. The width W1 corresponds to the length W1a shown in FIG. In characteristic C4, the number of the plurality of first beam portions 31 is four. In characteristic C5, the number of the plurality of first beam portions 31 is five. In characteristic C6, the number of the plurality of first beam portions 31 is six.

As shown in FIG. 2, by increasing the number of the plurality of first beam parts 31, the resonant frequency of the sensor can be increased. According to studies by the inventors of the present application, it has been found that when the number of the plurality of first beam portions 31 is three or more, the resonant frequency becomes significantly higher.

For example, when the width W1 is 6 μm and the number of the plurality of first beam portions 31 is 1, the resonance frequency f1 is about 4.8 kHz. In contrast, when the number of the plurality of first beam portions 31 is three or more, the resonance frequency can be increased. For example, the resonant frequency is higher when there are three or more beam portions with narrow width W1 than when there is one beam portion with wide width W1.

(Second embodiment)
3(a) to 3(c) and FIG. 4 are schematic diagrams illustrating a sensor according to the second embodiment.
FIG. 3(a) is a plan view seen from arrow AA in FIGS. 3(b) and 3(c). FIG. 3(b) is a sectional view taken along line A1-A2 in FIG. 3(a). FIG. 3(c) is a sectional view taken along the line B1-B2 in FIG. 3(a). FIG. 4 is a sectional view taken along the line C1-C2 in FIG. 3(a).

As shown in FIG. 3A, the sensor 120 also includes a base 50, a first support portion 51f, a second support portion 51g, and a first structure 11. The first structure 11 includes a movable part 20, a plurality of first beam parts 31, and a plurality of second beam parts 32. In this example, the number of the plurality of first beam parts 31 is four, and the number of the plurality of second beam parts 32 is four.

The first support section 51f and the second support section 51g are fixed to the base body 50. For example, the first support part 51f and the second support part 51g are fixed to the base 50 via an insulating part (for example, the insulating part 53 shown in FIG. 3(b), etc.). The movable part 20 includes first to third regions 21 to 23. The movable part 20 is, for example, electrically conductive. The movable part 20 corresponds to, for example, a first conductive part.

As shown in FIGS. 3A and 4, the first structure 11 further includes a plurality of first electrodes 11e. The plurality of first electrodes 11e are held in the second region 22 of the movable part 20. For example, the plurality of first electrodes 11e are connected to the second region 22. The plurality of first electrodes 11e may be continuous with the second region 22. As shown in FIG. 4, a gap g2 is provided between the plurality of first electrodes 11e and the base 50. The positions of the plurality of first electrodes 11e in the third direction (Z-axis direction) with respect to the base body 50 are variable. For example, the distance de1 (see FIG. 4) along the third direction between the plurality of first electrodes 11e and the base 50 is variable. As shown in FIG. 3A, the direction from one of the plurality of first electrodes 11e to another one of the plurality of first electrodes 11e is along the second direction (Y-axis direction).

In this example, sensor 120 includes second structure 12 and third structure 13. As shown in FIGS. 3(a) to 3(c), the second structure 12 includes a second conductive portion 12c and a plurality of second electrodes 12e. As shown in FIG. 3(b), the second conductive portion 12c is fixed to the base body 50. For example, an insulating section 52 is provided between the base 50 and the second conductive section 12c. The second conductive part 12c is fixed to the insulating part 52. The plurality of second electrodes 12e are held by the second conductive portion 12c. For example, the plurality of second electrodes 12e are connected to the second conductive portion 12c.

As shown in FIG. 3A, one of the plurality of second electrodes 12e is between one of the plurality of first electrodes 11e and another one of the plurality of first electrodes 11e. For example, one of the plurality of first electrodes 11e is between one of the plurality of second electrodes 12e and another one of the plurality of second electrodes 12e. The plurality of first electrodes 11e and the plurality of second electrodes 12e are arranged alternately along the Y-axis direction. For example, the plurality of first electrodes 11e and the plurality of second electrodes 12e form a comb-teeth electrode.

Capacitance is formed by the plurality of first electrodes 11e and the plurality of second electrodes 12e. The capacitance of the capacitance depends on the area where the plurality of first electrodes 11e and the plurality of second electrodes 12e face each other.

When acceleration such as an external force is applied to the sensor 120, the distance de1 between the plurality of first electrodes 11e and the base 50 changes. On the other hand, the distance de2 (see FIG. 3(b)) between the plurality of second electrodes 12e and the base 50 is substantially fixed. Therefore, the capacitance when an external force such as acceleration is applied to the sensor 120 changes from the capacitance when no external force such as acceleration is applied to the sensor 120.

The capacitance between the plurality of first electrodes 11e and the plurality of second electrodes 12e changes according to a change in the distance de1 between the plurality of first electrodes 11e and the base 50. For example, the sensor 120 detects acceleration along the Z-axis direction.

As shown in FIGS. 3(a) to 3(c), the third structure 13 includes a third conductive portion 13c and a plurality of third electrodes 13e. As shown in FIG. 3(b), the third conductive portion 13c is fixed to the base body 50. For example, an insulating section 53 is provided between the base 50 and the third conductive section 13c. The third conductive part 13c is fixed to the insulating part 53. The plurality of third electrodes 13e are held by the third conductive portion 13c. For example, the plurality of third electrodes 13e are connected to the third conductive portion 13c.

As shown in FIGS. 3A and 4, the first structure 11 further includes a plurality of fourth electrodes 14e. The plurality of fourth electrodes 14e are held in the third region 23 of the movable part 20. For example, the plurality of fourth electrodes 14e are connected to the third region 23. As shown in FIG. 4, a gap g3 is provided between the plurality of fourth electrodes 14e and the base 50. The positions of the plurality of fourth electrodes 14e in the third direction (Z-axis direction) with respect to the base body 50 are variable. For example, the distance de4 (see FIG. 4) along the third direction (Z-axis direction) between the plurality of fourth electrodes 14e and the base 50 is variable. As shown in FIG. 4A, the direction from one of the plurality of fourth electrodes 14e to another one of the plurality of fourth electrodes 14e is along the second direction (Y-axis direction).

As shown in FIG. 3A, one of the plurality of third electrodes 13e is located between one of the plurality of fourth electrodes 14e and another one of the plurality of fourth electrodes 14e. For example, one of the plurality of fourth electrodes 14e is between one of the plurality of third electrodes 13e and another one of the plurality of third electrodes 13e. The plurality of third electrodes 13e and the plurality of fourth electrodes 14e are arranged alternately along the Y-axis direction. For example, the plurality of third electrodes 13e and the plurality of fourth electrodes 14e form a comb-teeth electrode. Capacitance is formed by the plurality of third electrodes 13e and the plurality of fourth electrodes 14e. The capacitance of the capacitance depends on the area where the plurality of third electrodes 13e and the plurality of fourth electrodes 14e face each other.

When acceleration such as an external force is applied to the sensor 120, the distance de4 between the plurality of fourth electrodes 14e and the base 50 changes. On the other hand, the distance de3 (see FIG. 3(b)) between the plurality of third electrodes 13e and the base 50 is substantially fixed. Therefore, the capacitance when an external force such as acceleration is applied to the sensor 120 changes from the capacitance when no external force such as acceleration is applied to the sensor 120. The capacitance between the plurality of third electrodes 13e and the plurality of fourth electrodes 14e changes according to a change in the distance de4.

For example, when the distance de1 becomes longer, the distance de4 becomes shorter. For example, when the distance de1 becomes shorter, the distance de4 becomes longer. As already mentioned, the length L22 (see FIG. 1) of the second region 22 is longer than the length L23 (see FIG. 1) of the third region. By making the second region 22 and the third region 3 asymmetrical, the movable portion 20 is efficiently displaced when an external force is applied. This allows for a large change in capacitance. It becomes easier to obtain high sensitivity.

As shown in FIGS. 3A and 4, the sensor 110 may include a first electrode pad 11E, a second electrode pad 12E, and a third electrode pad 13E. The first electrode pad 11E is, for example, electrically connected to the movable part 20 (for example, the first conductive part). In this example, the first electrode pad 11E is electrically connected to the plurality of first electrodes 11e and the plurality of fourth electrodes 14e via the first and second beam parts 31 and 32 and the first region 21. The second electrode pad 12E is electrically connected to the plurality of second electrodes 12e via, for example, the second conductive portion 12c. The third electrode pad 13E is electrically connected to the plurality of third electrodes 13e via, for example, the third conductive portion 13c. External forces and the like can be detected by detecting the electrical characteristics between these electrode pads.

In the embodiments described above, for example, the base 50 includes silicon. The first structure 11 (the movable part 20, the plurality of first electrodes 11e and the plurality of fourth electrodes 14e), the second structure 12 (the second conductive part 12c and the plurality of second electrodes 12e), the third structure 13 (the third conductive part 13c and the plurality of third electrodes 13e), the first support part 51f, the second support part 51g, the plurality of first beam parts 31, the plurality of second beam parts 32, etc. Contains one element. The first element includes, for example, at least one selected from the group consisting of germanium, phosphorus, arsenic, antimony, boron, gallium, and indium. The first element is, for example, an impurity.

上記の式（１）において、ｋ_ｔは、ばね定数である。ｌ_ｔは、ばねの長さである。Ｗは、ばねの幅である。Ｈは、ばねの厚さである。Ｇ_ｔは剛性率である。実施形態において、Ｈ＞Ｗである。Ｎは、ばねの数（対の数）である。実施形態においてＮは、３以上である。αは、相互作用に関する係数である。 For example, when a plurality of torsion-type springs (beam portions) having the same shape are arranged, the spring constant is considered to be expressed by the following equation (1).

In the above equation (1), k _t is a spring constant. _lt is the length of the spring. W is the width of the spring. H is the thickness of the spring. G _t is the stiffness modulus. In embodiments, H>W. N is the number of springs (number of pairs). In embodiments, N is 3 or more. α is a coefficient related to interaction.

For example, the first term in equation (1) is a term due to an increase in the number of springs. The second term is a term corresponding to the interaction between the springs. It is estimated that by using a plurality of springs, a term due to interaction occurs in addition to a term due to the increase in the number of springs. For example, it is estimated that by setting the number of the plurality of first beam parts 31 (springs) to three or more, a relatively large interaction will occur among the plurality of first beam parts 31. This makes it easier to increase the resonant frequency of the sensor and improve the detection ability of the sensor. According to studies by the inventors of the present application, it is estimated that the interaction α term occurs significantly, for example, when N is 3 or more.

FIG. 5 is a graph diagram illustrating the characteristics of the sensor.
The horizontal axis in FIG. 5 is the number N1 of the plurality of first beam parts 31. The vertical axis indicates the magnitude of interaction (coefficient α) occurring between the plurality of first beam portions 31.

As shown in FIG. 5, when the number N1 of the plurality of first beam portions 31 is set to 3 or more, the coefficient α increases. In the embodiment, the number N1 of the plurality of first beam parts 31 is, for example, 3 or more and 10 or less. For example, in the range where the number N1 is 4 or more and 6 or less, the coefficient α becomes maximum.

(Third embodiment)
The third embodiment relates to an electronic device.
FIGS. 6(a) to 6(c) are schematic diagrams illustrating an electronic device according to a third embodiment.
As shown in FIG. 6A, an electronic device 310 according to the third embodiment includes the sensor according to the first embodiment or the second embodiment and a circuit control section 170. In the example of FIG. 6, sensor 110 (or sensor 120) is used as the sensor. The circuit control unit 170 can control the circuit 180 based on the signal S1 obtained from the sensor. The circuit 180 is, for example, a control circuit for the drive device 185. According to the embodiment, the circuit 180 for controlling the drive device 185 and the like can be controlled with high precision based on the highly accurate detection results.

Failure of the drive device 185 can be predicted using the sensor according to the first embodiment or the second embodiment. For example, vibration of the drive device 185 is detected by the sensor 110 (or sensor 120). By performing frequency analysis of the detected vibrations, it is possible to predict failures in the drive device 185. For example, as shown in FIG. 6(b), vibration of the drive device 185 is detected. FIG. 6(b) is a schematic graph diagram showing the relationship between the amplitude A1 of the vibration of the drive device 185 and the time Tm1. FIG. 6(c) is a schematic graph diagram illustrating frequency analysis. FIG. 6(c) shows the frequency spectrum of the detected vibration (the relationship between the frequency f2 (Hz) and the magnitude A2 of the frequency component). For example, a failure of the drive device 185 can be predicted from the frequency spectrum.

FIGS. 7(a) to 7(h) are schematic diagrams illustrating applications of the electronic device.
As shown in FIG. 7(a), the electronic device 310 may be at least part of a robot. As shown in FIG. 7B, the electronic device 310 may be at least a part of a machine robot installed in a manufacturing factory or the like. As shown in FIG. 7(c), the electronic device 310 may be at least a part of an automatic guided vehicle in a factory or the like. As shown in FIG. 7(d), the electronic device 310 may be at least a part of a drone (unmanned aerial vehicle). As shown in FIG. 7(e), electronic device 310 may be at least part of an airplane. As shown in FIG. 7(f), the electronic device 310 may be at least part of a ship. As shown in FIG. 7(g), the electronic device 310 may be at least part of a submarine. As shown in FIG. 7(h), the electronic device 310 may be at least a part of an automobile. The electronic device 310 according to the third embodiment may include, for example, at least one of a robot and a moving object.

Embodiments may include the following configurations (eg, technical proposals).
(Configuration 1)
A base body;
a first support portion fixed to the base;
A first structure, the first structure includes a movable part and a plurality of first beam parts supported by the first support part, and the movable part has a first region and a second region. the direction from the first region to the second region is along a first direction, the plurality of first beam portions extend in a second direction intersecting the first direction, and the plurality of first beam portions extend in a second direction intersecting the first direction; The first beam portion is connected to the first region, and a distance between the second region and the base body along a third direction intersecting a plane including the first direction and the second direction is variable. , the first structure;
Equipped with
The sensor, wherein the number of the plurality of first beam parts is three or more.

(Configuration 2)
further comprising a second support fixed to the base,
The first structure further includes a plurality of second beam parts supported by the second support part and extending in the second direction,
In the second direction, at least a part of the first region is between the first support part and the second support part,
In the second direction, there are the plurality of first beam parts between the first support part and the first region,
In the second direction, there are the plurality of second beam parts between the second support part and the first region,
The sensor according to configuration 1, wherein the number of the plurality of second beam portions is the same as the number of the plurality of first beam portions.

(Configuration 3)
Configuration 2, wherein the length of one of the plurality of first beam portions along the second direction is substantially the same as the length of one of the plurality of second beam portions along the second direction. sensor.

(Configuration 4)
Configuration 1, wherein the length of one of the plurality of first beam portions along the second direction is substantially the same as the length of another one of the plurality of first beam portions along the second direction. Or the sensor described in 2.

(Configuration 5)
Configuration 1 or 2. The sensor according to 2.

(Configuration 6)
The length of one of the plurality of first beam portions along the third direction is substantially the same as the length of another one of the plurality of first beam portions along the third direction. 2. The sensor described in 2.

(Configuration 7)
Configuration 2, wherein the length of one of the plurality of first beam parts along the first direction is substantially the same as the length of one of the plurality of second beam parts along the first direction. sensor.

(Configuration 8)
The length of one of the plurality of first beam portions along the first direction is substantially the same as the length of another one of the plurality of first beam portions along the first direction. 2. The sensor according to 1 or 2.

(Configuration 9)
According to configuration 1 or 2, the length of one of the plurality of first beam portions along the second direction is longer than the length of one of the plurality of first beam portions along the first direction. sensor.

(Configuration 10)
According to configuration 1 or 2, the length of one of the plurality of first beam portions along the second direction is longer than the length of one of the plurality of first beam portions along the third direction. sensor.

(Configuration 11)
The sensor according to any one of configurations 1 to 10, wherein the length of the second region along the first direction is longer than the length of the first region along the first direction.

(Configuration 12)
The movable part includes a third region,
The first region is between the second region and the third region in the first direction,
The sensor according to any one of configurations 1 to 10, wherein the length of the second region along the first direction is longer than the length of the third region along the first direction.

(Configuration 13)
The first structure includes a plurality of first electrodes held in the second region,
The sensor according to any one of configurations 1 to 12, wherein a distance along the third direction between the plurality of first electrodes and the base body is variable.

(Configuration 14)
further comprising a second structure including a plurality of second electrodes,
14. The sensor of arrangement 13, wherein one of the plurality of second electrodes is between the one of the plurality of first electrodes and the other one of the plurality of first electrodes.

(Configuration 15)
15. The sensor of configuration 14, wherein a distance between the plurality of second electrodes and the substrate is substantially fixed.

(Configuration 16)
In configuration 14 or 15, the capacitance between the plurality of first electrodes and the plurality of second electrodes changes according to a change in the distance between the plurality of first electrodes and the substrate. Sensors listed.

(Configuration 17)
The first structure includes a plurality of fourth electrodes held in the third region,
The sensor according to claim 12, wherein a distance along the third direction between the plurality of fourth electrodes and the base body is variable.

(Configuration 18)
further comprising a third structure including a plurality of third electrodes,
18. The sensor of configuration 17, wherein one of the plurality of third electrodes is between the one of the plurality of fourth electrodes and the other one of the plurality of fourth electrodes.

(Configuration 19)
19. The sensor according to any one of configurations 1 to 18, wherein the number of the plurality of first beam parts is 10 or less.

(Configuration 20)
the substrate includes silicon;
The first structure includes silicon and a first element,
20. The sensor according to any one of configurations 1 to 19, wherein the first element includes at least one selected from the group consisting of germanium, phosphorus, arsenic, antimony, boron, gallium, and indium.

For example, a sensor with a wide band and high detection ability can be provided.

According to the embodiment, a sensor capable of improving detection ability can be provided.

In this specification, "electrically connected" includes not only direct contact but also connection via other conductive members.

In this specification, "perpendicular" and "parallel" are not only strictly perpendicular and strictly parallel, but also include variations in the manufacturing process, for example, and may be substantially perpendicular and substantially parallel. .

The embodiments of the present invention have been described above with reference to specific examples. However, the present invention is not limited to these specific examples. For example, a person skilled in the art can implement the present invention in the same manner and obtain similar effects by appropriately selecting the specific configuration of each element such as the base and the first structure included in the sensor from a known range. As long as it is possible, it is included within the scope of the present invention.

Combinations of any two or more elements of each specific example to the extent technically possible are also included within the scope of the present invention as long as they encompass the gist of the present invention.

In addition, all other sensors that can be implemented by appropriately changing the design based on the sensor described above as an embodiment of the present invention by those skilled in the art also belong to the scope of the present invention as long as they include the gist of the present invention.

In addition, it is understood that various changes and modifications can be made by those skilled in the art within the scope of the idea of the present invention, and these changes and modifications also fall within the scope of the present invention. .

Although several embodiments of the invention have been described, these embodiments are presented by way of example and are not intended to limit the scope of the invention. These novel embodiments can be implemented in various other forms, and various omissions, substitutions, and changes can be made without departing from the gist of the invention. These embodiments and their modifications are included within the scope and gist of the invention, as well as within the scope of the invention described in the claims and its equivalents.

DESCRIPTION OF SYMBOLS 11... 1st structure body, 11E... 1st electrode pad, 11e... 1st electrode, 12... 2nd structure body, 12E... 2nd electrode pad, 12c... 2nd conductive part, 12e... 2nd electrode, 13... th 3 structure, 13E... Third electrode pad, 13c... Third conductive part, 13e... Third electrode, 14e... Fourth electrode, 20... Movable part, 21... First region, 22... Second region, 23... Third 3 regions, 31...first beam part, 31a, 31b, 31c...beam part, 32...second beam part, 32a, 32b, 32c...beam part, 50...base body, 51...substrate part, 51f...first support part , 51g...Second support part, 52, 53...Insulating part, α...Coefficient, 110, 120...Sensor, 170...Circuit control unit, 180...Circuit, 185...Drive device, 310...Electronic device, A1...Amplitude, A2 ...Size, AA...Arrow, C4, C5, C6...Characteristics, L1a, L1b, L21, L22, L23, L2a...Length, N1...Number, S1...Signal, T1a, T1b, T2a...Length, Tm1... Time, W1...Width, W1a, W1b, W2a...Length, d1, de1, de2, de3, de4...Distance, f1...Resonance frequency, f2...Frequency, g1, g2, g3...Gap

Claims (9)

A base body;
a first support portion fixed to the base;
A first structure, the first structure includes a movable part and three or more first beam parts supported by the first support part, and the movable part includes a first area and a first beam part. 2 regions, the direction from the first region to the second region is along the first direction, the three or more first beam portions extend in a second direction intersecting the first direction, and the three or more first beam portions extend in a second direction intersecting the first direction; The above first beam portion is connected to the first region, and the distance between the second region and the base body along a third direction intersecting a plane including the first direction and the second direction is the first structure being variable;
a second support fixed to the base;
Equipped with
The three or more first beam portions are adjacent to each other in the first direction,
Each of the three or more first beam portions includes a side surface extending in the second direction and parallel to the third direction,
In the three or more first beam portions, lengths of the side surfaces along the third direction are the same,
The first structure further includes three or more second beam parts supported by the second support part and extending in the second direction,
In the second direction, at least a part of the first region is between the first support part and the second support part,
In the second direction, there are the three or more first beam parts between the first support part and the first region,
In the second direction, there are the three or more second beam portions between the second support portion and the first region,
The number of the three or more second beam portions is the same as the number of the three or more first beam portions ,
The length of each of the three or more first beam portions along the first direction is constant in the second direction,
The sensor , wherein the length of each of the three or more second beam portions along the first direction is constant in the second direction . A length of one of the three or more first beam portions along the second direction is substantially the same as a length of one of the three or more second beam portions along the second direction. The sensor according to item 1 . The length of one of the three or more first beam portions along the second direction is substantially the same as the length of another one of the three or more first beam portions along the second direction, The sensor according to claim 1 . A length of one of the three or more first beam portions along the third direction is substantially the same as a length of one of the three or more second beam portions along the third direction. The sensor according to item 1 . The length of one of the three or more first beam portions along the third direction is substantially the same as the length of another one of the three or more first beam portions along the third direction. , the sensor according to claim 1 . The length of each of the three or more first beam portions along the first direction is substantially the same as the length of each of the three or more second beam portions along the first direction. , the sensor according to claim 1 . The length of one of the three or more first beam portions along the first direction is substantially the same as the length of another one of the three or more first beam portions along the first direction. , the sensor according to claim 1 . The sensor according to claim 1, wherein the length of the second region along the first direction is longer than the length of the first region along the first direction. The movable part includes a third region,
The first region is between the second region and the third region in the first direction,
The sensor according to claim 1, wherein the length of the second region along the first direction is longer than the length of the third region along the first direction.

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