JP7410561B2 - Radio wave sensor and electric field component detection device - Google Patents

Description

One aspect of the present invention relates to a radio wave sensor and an electric field component detection device.

2. Description of the Related Art Conventionally, in the field of environmental electromagnetic engineering (EMC: Electromagnetic Compatibility), techniques for measuring radio wave (electromagnetic wave) noise emitted from various electronic devices have been known. In order to identify which part of a device actually generates radio noise, it is important to know the spatial distribution of radio noise around the device. Furthermore, when evaluating the directivity of an antenna built into a communication device, it is necessary to measure the spatial distribution of the radiated radio wave intensity.

Patent Document 1 describes a radio field intensity measuring device for measuring the intensity of radio waves. A radio field intensity measuring device measures the intensity of radio waves in a plurality of measurement regions using a radio wave absorption section having a plane having a plurality of measurement regions. The radio field strength measurement device is capable of generating a radio field strength distribution image, which is a visualized image corresponding to the position of the measurement region, based on the strength of radio waves in a plurality of measurement regions, and displaying the generated radio field strength distribution image. can. Further, the radio field strength measuring device can display the radio field strength distribution image generated at predetermined time intervals while updating it.

Patent Document 2 describes a technique for presenting information regarding a wave source. The wave source information presentation system described in Patent Document 2 includes a plurality of receiving elements that receive waves propagated in a three-dimensional space from a wave source, and a position of the wave source in the three-dimensional space based on the reception results of the plurality of receiving elements. The apparatus includes an estimating section that estimates a posture, and a presentation section that presents an image based on the position and posture of the wave source estimated by the estimating section. In this wave source information presentation system, a resistor is provided between the copper patches on the surface of the radio wave sensor to absorb the radio waves emitted from the wave source, and the electric power (energy) of the radio waves absorbed in the copper patch is consumed, resulting in a voltage generated in the resistor. By detecting , the electric field component of the incident radio wave can be calculated.

International Publication No. 2010/013408 Japanese Patent Application Publication No. 2019-158479

However, although the radio field intensity measurement device of Patent Document 1 described above can visualize the radio field intensity measured in the radio wave absorption section, it cannot present information regarding the source of the radio waves. The wave source information presentation system of Patent Document 2 calculates the electric field component using the resistance formed on the surface of the radio wave sensor, and therefore cannot detect the electric field component in the depth direction.

The present invention has been made based on the above-mentioned problem, and an object of the present invention is to provide a radio wave sensor and an electric field component detection device that can detect electric field components in the depth direction.

In order to solve the above problems, a radio wave sensor according to one embodiment of the present invention includes a substrate, and a plurality of first metal surfaces formed on the surface of the substrate in an array in a first direction and a second direction. and a plurality of first resistors connected along the first direction between the first metal surface and the first metal surface along the second direction. a plurality of connected second resistors, a second metal surface formed on the back surface of the substrate, and a plurality of via portions formed from each of the first metal surfaces to the back surface of the substrate; A plurality of third resistors are connected between each of the via portions and the second metal surface.

In order to solve the above problems, an electric field component detection device according to one aspect of the present invention includes a substrate and a plurality of first sensors formed on the surface of the substrate in an array in a first direction and a second direction. a plurality of first resistors connected in the first direction between a metal surface and the first metal surface; and a plurality of first resistors connected in the second direction between the first metal surface and the first metal surface; a plurality of second resistors connected along the substrate, a second metal surface formed on the back surface of the substrate, and a plurality of via portions formed from each of the first metal surfaces to the back surface of the substrate. and a plurality of third resistors connected between each of the via portions and the second metal surface. a first voltage detection section for detecting a voltage, a second voltage detection section for detecting a voltage generated in each of the second resistor, and a third voltage detection section for detecting a voltage generated in each of the third resistor. calculates an electric field component in the first direction based on the voltage detected by the voltage detection unit and the first voltage detection unit, and calculates the electric field component in the first direction based on the voltage generated in the second resistor. and a calculation unit that calculates an electric field component in the thickness direction of the substrate based on the voltage generated in the third resistor.

According to one aspect of the present invention, an electric field component in the depth direction can be detected.

1 is a diagram showing the configuration of a radio wave detection system 1 according to an embodiment. It is a figure showing an example of radio wave sensor 100 of an embodiment, (A) shows the front side, and (B) shows the back side. It is a sectional view showing an example of radio wave sensor 100 of an embodiment. It is a figure showing an equivalent circuit of radio wave sensor 100 of an embodiment. FIG. 3 is a diagram showing the results of simulating the relationship between the voltage value in the X direction and the incident angle of radio waves. FIG. 6 is a diagram showing the results of simulating the relationship between the voltage value and the incident angle of radio waves in the Y direction. FIG. 3 is a diagram showing the results of simulating the relationship between the voltage value and the incident angle of radio waves in the Z direction. FIG. 3 is a diagram for explaining simulation conditions. It is a sectional view showing other examples of a radio wave sensor of an embodiment. It is a figure which shows the result of simulating the relationship between the voltage value in the Z direction and the incident angle of a radio wave in 100 A of radio wave sensors.

EMBODIMENT OF THE INVENTION Hereinafter, a radio wave sensor and an electric field component detection device to which the present invention is applied will be explained with reference to the drawings.

(First embodiment)
FIG. 1 is a diagram showing the configuration of a radio wave detection system 1 according to an embodiment.
The radio wave detection system 1 is used, for example, when a user wants to obtain information about radio waves and wave sources existing in a three-dimensional space. When the user wants to obtain information about radio waves and wave sources, the user places the radio wave sensor 100 at a location where the user wants to detect radio waves, and causes the radio wave sensor 100 to detect radio waves propagating in three-dimensional space. Thereby, the radio wave detection system 1 can display images and the like corresponding to the radio waves detected by the radio wave sensor 100.

As shown in FIG. 1, the radio wave detection system 1 includes, for example, a radio wave sensor 100, an RF switch 200, a software defined radio 300, and a control personal computer 400. The radio wave detection system 1 receives radio waves as waves emitted from a wave source (not shown) by the radio wave sensor 100. Note that in this embodiment, the wave source is various electronic devices, antennas, etc., but any source that emits radio waves may be used.

The radio wave sensor 100 includes a plurality of cells that detect radio waves. The radio wave sensor 100 reads a voltage value corresponding to the energy of radio waves incident on each cell. The RF switch 200 is installed on the back surface of the radio wave sensor 100. RF switch 200 includes, for example, a plurality of measurement circuits (not shown). Each measurement circuit is electrically connected across a resistor connected to each of a plurality of copper patches (cells). Each measurement circuit measures the voltage developed across the corresponding resistance. A resistor placed on the surface of the radio wave sensor 100 consumes electric power (energy) of radio waves. At this time, the voltage generated across the resistor is proportional to the electric field component of the incident radio wave. Therefore, by measuring the amplitude and phase of the voltage generated across the corresponding resistor using the measurement circuit, it is possible to measure the amplitude and phase of the electric field component of the radio wave incident on the corresponding copper patch. That is, each measurement circuit can measure the strength and phase of the electric field component of the radio wave incident on the copper patch corresponding to the corresponding resistance. Note that the combination of the copper patch and the measurement circuit realizes a plurality of receiving elements (two-dimensional sensor array) that receive waves propagated in three-dimensional space. The RF switch 200 sequentially selects voltage signals containing radio wave (electric field component) signals measured by the measurement circuit and transmits them to the software defined radio 300.

Software defined radio 300 receives the voltage signal transmitted from RF switch 200. Software defined radio 300 transmits voltage signal information to control personal computer 400. The personal computer 400 calculates the amplitude of the voltage signal generated across the resistance in the radio wave sensor 100. At the same time, the difference between the phase of the voltage signal generated at the resistance at the reference point provided in the radio wave sensor 100 and the phase of the voltage signal generated at the resistance at a point distant from the reference point is calculated. Further, the amplitude and phase of the voltage signal are calibrated and converted into the amplitude and phase of the radio wave (field strength) incident on the surface of the radio wave sensor 100.

The control personal computer 400 includes, for example, a voltage detection section 410, a calculation section 420, and a display section 430. The voltage detection unit 410 and the calculation unit 420 are realized by, for example, one or more processors such as a CPU (Central Processing Unit) executing programs stored in one or more program memories. An X-direction voltage detection section 412 (first voltage detection section) of the voltage detection section 410 detects a voltage generated in an X-direction resistor, which will be described later. A Y-direction voltage detection section 414 (second voltage detection section) of the voltage detection section 410 detects a voltage generated in a Y-direction resistor, which will be described later. A Z-direction voltage detection section 416 (third voltage detection section) of the voltage detection section 410 detects a voltage generated in a Z-direction resistor, which will be described later. The calculation unit 420 calculates the electric field component in the X direction based on the voltage generated in the X direction of the radio wave sensor 100, calculates the electric field component in the Y direction based on the voltage generated in the Y direction of the radio wave sensor 100, and calculates the electric field component in the Y direction based on the voltage generated in the Y direction of the radio wave sensor 100. An electric field component in the Z direction (thickness direction of the radio wave sensor 100) is calculated based on the voltage generated in the Z direction of the sensor 100. The display unit 430 displays, for example, an image showing the electric field strength and phase of an X-direction component, a Y-direction component, and a Z-direction component for each cell.

FIG. 2 is a diagram showing an example of the radio wave sensor 100 of the embodiment, in which (A) shows the front surface and (B) shows the back surface. The surface 100a of the radio wave sensor 100 is a surface that receives radio waves. FIG. 3 is a cross-sectional view showing an example of the radio wave sensor 100 of the embodiment. On the surface 100a of the radio wave sensor 100, as shown in FIG. 2(A), a plurality of copper patches 102 (first metal surface) are formed on a dielectric substrate 110. Note that in the radio wave sensor 100, the substrate is a dielectric material, but is not limited to this, and may be other types of substrates. Note that the size of the dielectric substrate 110 is desirably such that it can be easily carried by the measurer. The shape of the dielectric substrate 110 is, for example, a sheet (thin plate) shape.

The plurality of copper patches 102 are formed (arranged) in an array in the X direction (first direction) and the Y direction (second direction) on the surface 100a of the radio wave sensor 100. Each copper patch 102 corresponds to each cell in the radio wave sensor 100. Each of the copper patches 102 is a rectangular electrode formed from a copper plate. Note that the shape of the copper patch 102 is not limited to a rectangle, and may be other shapes such as a triangle or a hexagon. Note that the copper patch 102 is not limited to a copper patch, and may be any other metal patch.

An X-direction resistor 106 is connected between each copper patch 102 and another copper patch 102 along the X direction. A Y-direction resistor 108 is connected between each copper patch 102 and another copper patch 102 along the Y direction. The X-direction resistor 106 and the Y-direction resistor 108 are formed of electrical resistance. Note that each of the plurality of copper patches 102 may be arranged at intervals sufficiently shorter than the wavelength of the radio waves irradiated from the wave source. The vertical and horizontal lengths (sizes) of each copper patch 102 may be sufficiently shorter than the wavelength of the radio waves emitted from the wave source.

A via 104 is formed approximately in the center of the copper patch 102 . The via 104 is metal formed in a hole formed in the dielectric substrate 110. Via 104 is formed from copper patch 102 to back surface 110b of dielectric substrate 110. Thereby, the vias 104 electrically connect each copper patch 102 and the metal plate 120 via the Z-direction resistor 124.

A metal plate 120 is formed on substantially the entire surface of the back surface 110b of the radio wave sensor 100, as shown in FIG. 2(B). The metal plate 120 is attached to the surface of the dielectric substrate 110 that faces the surface on which the copper patch 102 is formed (the back surface of the dielectric substrate 110). Metal plate 120 functions as a ground terminal. Note that the back surface 100b of the radio wave sensor 100 is not limited to a copper plate, and may be a plate of another metal.

A hole 122 is formed in the metal plate 120 at a position corresponding to the copper patch 102 (a position facing the copper patch 102 in the Z direction). By forming the hole 122, the via 104 is exposed from the back surface 110b of the radio wave sensor 100. A Z-direction resistor 124 (third resistor) is formed between the via 104 and the metal plate 120 to connect the via 104 and the metal plate 120. The Z-direction resistor 124 is referred to as "Z-direction resistor 124" in the sense that it is a resistor for detecting the Z-direction component of the radio wave (electric field) in the radio wave sensor 100, as will be described later. For example, the Z-direction resistor 124 is formed along the X direction, but is not limited thereto, and may be formed along the Y direction.

As shown in FIG. 3, a capacitor 112 is connected between the copper patches 102 in parallel with the X-direction resistor 106. The capacitance of the capacitor 112 is adjusted when adjusting the resonance frequency in the radio wave sensor 100.

In the embodiment, the thickness of the dielectric substrate 110 is approximately 3.2 mm, the length of the copper patch 102 in the X direction and the Y direction is 10 mm, and the resistance values of the X direction resistor 106 and the Y direction resistor 108 are is 470 ohms, the resistance value of the Z-direction resistor 124 is 50 ohms, and the capacitance of the capacitor is 1.2 picofarad. Note that the resistance values of the X-direction resistor 106 and the Y-direction resistor 108 are values based on efficiently absorbing the energy of radio waves detected by the radio wave sensor 100 in the X direction and the Y direction. The resistance value of the Z-direction resistor 124 is a value based on efficiently absorbing radio wave energy in the thickness direction of the dielectric substrate 110.

FIG. 4 is a diagram showing an equivalent circuit of the radio wave sensor 100 of the embodiment when a plane wave radio wave is perpendicularly incident on the radio wave sensor 100. When a radio wave is perpendicularly incident on the radio wave sensor 100, an electric charge is generated between the copper patches 102. Thereby, the copper patches 102 function as a capacitor Cs, and the dielectric substrate 110 sandwiched between the vias 104 functions as an inductor Ls. Thereby, the radio wave sensor 100 functions equivalently as an R (X-direction resistor 106 and Y-direction resistor 108), Ls, and Cs parallel circuit. That is, the radio wave sensor 100 functions as a sheet having surface impedance as an RLC parallel circuit with respect to radio waves incident on the surface 100a of the radio wave sensor 100. That is, the radio wave sensor 100 has the property of changing the reflection phase of an incident radio wave depending on the frequency and blocking surface wave propagation in a specific frequency band (band gap).

For example, if the impedance Z ₀ of a plane wave radio wave perpendicularly incident on the radio wave sensor 100 is 377 ohms, the impedance of Cs and Ls becomes infinite at the resonance frequency of Cs and Ls, and the equivalent circuit of the radio wave sensor 100 is as follows. Only R (resistance obtained by combining the electrical loss of the substrate in parallel with the X-direction resistor 106 and the Y-direction resistor 108) is considered. When R is 377Ω, the energy of the X-direction component of the electric field of the radio wave is absorbed by the X-direction resistor 106, and the energy of the Y-direction component of the electric field of the radio wave is absorbed by the Y-direction resistor 108. Furthermore, for a plane wave radio wave that obliquely enters the radio wave sensor 100, the energy of the Z-direction component of the electric field of the radio wave is absorbed by the Z-direction resistor 124. The radio wave detection system 1 measures the voltage value of the X-direction resistor 106 when a radio wave of the resonance frequency of the radio wave sensor 100 is absorbed, and calculates the measured voltage value by the distance between the centers of adjacent metal patches in the X direction. By dividing, the electric field component of the radio wave in the X direction can be calculated. The radio wave detection system 1 measures the voltage value of the Y-direction resistor 108 when a radio wave of the resonant frequency of the radio wave sensor 100 is absorbed, and calculates the measured voltage value by the distance between the centers of adjacent metal patches in the Y direction. By dividing, the electric field component of the radio wave in the Y direction can be calculated. The radio wave detection system 1 measures the voltage value of the Z-direction resistor 124 when a radio wave of the resonant frequency of the radio wave sensor 100 is absorbed, and converts the measured voltage value into the length of the via 104 in the Z direction (from the front surface 100a to the back surface). 110b), the electric field component of the radio wave in the Z direction can be calculated.

FIG. 5 is a diagram showing the results of simulating the relationship between the voltage value in the X direction and the angle of incidence of plane wave radio waves, and FIG. 6 is a diagram showing the results of simulating the relationship between the voltage value in the Y direction and the angle of incidence of plane wave radio waves. FIG. 7 is a diagram showing the results of simulating the relationship between the voltage value in the Z direction and the incident angle of plane wave radio waves. FIG. 8 is a diagram for explaining simulation conditions.

The electric field in the X direction can be calculated by dividing the voltage value generated in the X direction resistor 106 by the distance between the centers of adjacent metal patches in the X direction. The electric field in the Y direction can be calculated by dividing the voltage value generated in the Y direction resistor 108 by the distance between the centers of adjacent metal patches in the Y direction. The electric field in the Z direction can be calculated by dividing the voltage value generated in the Z direction resistor 124 by the length of the via 104 in the Z direction (the length from the front surface 100a to the back surface 110b).

The X-direction component, Y-direction component, and Z-direction component of the electric field were simulated when the incident angle (θ) of the electric field with respect to the surface 100a of the radio wave sensor 100 was changed. At this time, when a TM mode radio wave is perpendicularly incident on the surface 100a of the radio wave sensor 100, the electric field direction (E) of the radio wave exists in the X direction, and the magnetic field direction (H) of the radio wave exists in the Y direction. Here, the incident direction (k) of the electric field was tilted at an angle θ from the −Z direction to the +X direction on the XZ plane.

In the simulation, the incident radio wave was a plane wave with an electric field of 1 volt/meter. The voltage generated in the X-direction resistor 106 at 1.82 MHz was compared with a theoretical voltage value (theoretical value) determined from the strength of the electric field between the vias 104. The theoretical value in the X direction is the value obtained by multiplying the electric field in the X direction at the location corresponding to the measurement point by the length between the vias 104 in the X direction (distance between the centers of adjacent metal patches in the X direction), and Y The theoretical value in the direction is the value obtained by multiplying the Y-direction electric field at the location corresponding to the measurement point by the length between the vias 104 in the Y-direction (the distance between the centers of adjacent metal patches in the Y-direction). The theoretical value in is the value obtained by multiplying the Z-direction electric field at the location corresponding to the measurement point by the length of the via 104 from the front surface 100a to the back surface 100b (the length from the front surface 100a to the back surface 110b). Further, the boundary conditions in the X direction and the Y direction are infinite periodic boundary conditions.

Referring to the simulation results in the X direction shown in FIG. 5, it can be seen that the voltage value generated at the X direction resistor 106 and the theoretical value are within an error of about 2 dB, except for the incident angle of 80 degrees. Referring to the simulation results in the Y direction shown in FIG. 6, in TM mode there is no electric field in the Y direction, so theoretically it should be zero. Therefore, the voltage value generated across the Y-direction resistor 108 is considered to be sufficiently small. The error in the X direction in this simulation result is thought to be because as the incident angle increases, the reflection of the radio wave on the surface 100a of the radio wave sensor 100 increases, and the vector of the incident electric field on the surface 100a of the radio sensor 100 changes. .

Referring to the simulation results in the Z direction shown in Figure 7, the voltage value at an incident angle of 10 to 40 degrees has an error within 2 dB from the theoretical value, but as the incident angle increases from 50 degrees, the voltage value decreases to the theoretical value. When the angle of incidence was 80 degrees, the error between the voltage value and the theoretical value was 10 dB. This simulation result is considered to be because as the incident angle increases, the reflection of the radio wave on the surface 100a of the radio wave sensor 100 increases, and the vector of the incident electric field on the surface 100a of the radio wave sensor 100 changes. Furthermore, since the Z direction resistor 124 is mounted in the X direction, the Z direction resistor 124, which should originally detect only the electric field component in the Z direction, also detects the electric field component in the X direction. Conceivable.

The calculation unit 420 calculates the X-direction component of the electric field based on the length of the X-direction component of the via 104 from the electric field component in the Z-direction (thickness direction) of the dielectric substrate 110 based on the voltage generated in the Z-direction resistor 124. Correction may be performed to remove the influence of the Y-direction component of the electric field in the Y-direction based on the length of the via 104 in the Y-direction. The influence of the electric field component in the X direction and the electric field component in the Y direction is a part or all of the electric field component in the X direction and the electric field component in the Y direction (error, correction value) of the electric field component in the Z direction. Thereby, the influence of the electric field component in the X direction and the electric field component in the Y direction can be removed from the electric field component in the Z direction after correction.

The calculation unit 420 may correct the voltage value generated in the Z-direction resistor 124 so that it approaches the theoretical voltage value in the Z-direction based on the incident angle of the radio wave with respect to the dielectric substrate 110. Thereby, the radio wave detection system 1 can bring the voltage value calculated by measuring both ends of the Z-direction resistor 124 closer to the theoretical value as shown in FIG. 7, for example. Furthermore, when the angle of incidence of the radio waves on the dielectric substrate 110 is larger than a predetermined angle (for example, 40 degrees), the calculation unit 420 calculates that the Z-direction resistance increases as the angle of incidence of the radio waves on the dielectric substrate 110 becomes larger than the predetermined angle. The correction width of the voltage value generated in the body 124 may be increased. As a result, as shown in FIG. 7, the radio wave detection system 1 increases the correction width for the electric field component in the Z direction as the incident angle becomes larger than, for example, 40 degrees, thereby detecting the electric field component in the Z direction with high precision. Corrections can be made.

FIG. 9 is a sectional view showing another example of the radio wave sensor according to the embodiment. In the radio wave sensor 100A, one end of the Z-direction resistor 124A is connected to the via 104A connected to the copper patch 102, and the other end of the Z-direction resistor 124A is connected to the metal plate 120A. In addition, in the radio wave sensor 100A, the Z-direction resistor 124A can be said to be connected in series with the via 104A. In addition, in the radio wave sensor 100A, it can be said that the sensors are arranged in parallel in the Z direction.

In the radio wave sensor 100A, the metal plate 120A is formed over the entire back surface 110b of the radio wave sensor 100, and unlike the radio wave sensor 100 described above, the hole 122 is not formed. One end of the via 104A is connected to the copper patch 102, but the other end of the via 104A is connected to the Z-direction resistor 124A without being connected to the metal plate 120A. The Z-direction resistor 124A is connected between the via 104A and the metal plate 120A along the direction in which the via 104A is formed (Z direction). Wiring (not shown) for voltage measurement is connected to both ends of the Z-direction resistor 124A in the Z-direction. Note that since the wiring for voltage measurement may be arranged using any known method or any method, a description of that method will be omitted in this embodiment.

In the radio wave sensor 100A, for example, if the impedance Z0 of the vertically incident plane wave radio wave having the resonance frequency of the radio wave sensor 100A is 377 ohms, the impedance of Cs and Ls becomes infinite, and the equivalent circuit of the radio wave sensor 100A is R. (A resistance that combines the electrical loss of the substrate in parallel with the X-direction resistor 106 and the Y-direction resistor 108). As a result, the energy of the X-direction component of the electric field is absorbed by the X-direction resistor 106, and the energy of the Y-direction component of the radio wave is absorbed by the Y-direction resistor 108. Further, the energy of the Z-direction component of the electric field is absorbed by the Z-direction resistor 124A. The radio wave detection system 1 measures the voltage value of the X-direction resistor 106 when a radio wave at the resonance frequency of the radio wave sensor 100A is absorbed, and calculates the measured voltage value by the distance between the centers of adjacent metal patches in the X direction. By dividing, the electric field component of the radio wave in the X direction can be calculated. The radio wave detection system 1 measures the voltage value of the Y-direction resistor 108 when a radio wave of the resonance frequency of the radio wave sensor 100A is absorbed, and calculates the measured voltage value by the distance between the centers of adjacent metal patches in the Y direction. By dividing, the electric field component of the radio wave in the Y direction can be calculated. The radio wave detection system 1 measures the voltage value of the Z-direction resistor 124A when a radio wave of the resonance frequency of the radio wave sensor 100A is absorbed, and calculates the measured voltage value by measuring the length of the via 104 from the back surface 100b (from the front surface 100a to By dividing by the length (to the back surface 110b), the electric field component of the radio wave in the Z direction can be calculated.

FIG. 10 is a diagram showing the results of simulating the relationship between the voltage value in the Z direction and the incident angle of radio waves in the radio wave sensor 100A. The Z-direction component of the electric field was simulated when the incident angle (θ) of the electric field with respect to the surface 100a of the radio wave sensor 100A was changed. Note that the conditions for the simulation are the same as those for the simulation in the radio wave sensor 100.

Referring to the simulation results in the Z direction shown in FIG. 10, it can be seen that the error between the voltage value generated in the Z direction resistor 124A and the theoretical value is small from 10 degrees to 80 degrees. Furthermore, when the simulation results shown in FIG. 10 are compared with the simulation results shown in FIG. 7, it can be seen that the simulation results shown in FIG. 10 clearly have smaller errors from the theoretical values. As described above, the radio wave detection system 1 can determine the electric field component in the Z direction with high accuracy by providing the Z direction resistor 124A parallel to the Z direction.

According to the embodiment described above, the substrate (110) and the surface (100a) of the substrate have a plurality of arrays formed in the first direction (X direction) and the second direction (Y direction). A first metal surface (102), a plurality of first resistors (106) connected along the first direction between the first metal surface, and the first metal surface; A plurality of second resistors (108) connected along the second direction, a second metal surface (120) formed on the back surface of the substrate, and a second metal surface (120) formed on the back surface of the substrate from each of the first metal surfaces. A radio wave sensor (100) comprising: a plurality of via portions (104) formed up to can be realized. According to this embodiment, the electric field component in the depth direction of the radio wave sensor can be detected.

According to the embodiment, the resistance values of the first resistor and the second resistor are values based on the energy of radio waves detected by the radio wave sensor, and the resistance value of the third resistor is the value based on the energy of the radio wave detected by the radio wave sensor. The resistance values of the first resistor and the second resistor are set smaller than the resistance values of the first resistor and the second resistor. Thereby, according to the embodiment, the resistance value of the first resistor and the second resistor in consideration of the substrate loss is matched with the impedance of the radio wave in the first direction and the second direction. The third resistor can be designed to have a resistance value that takes substrate loss into consideration so as to be close to a direction that matches the impedance of radio waves in the depth direction. As a result, the efficiency of energy absorption in the first direction and the second direction corresponding to the radio waves to be detected can be increased by the first resistor and the second resistor, and by the third resistor , the efficiency of energy absorption in the third direction corresponding to the radio wave to be detected can be increased.

According to the embodiment, each of the third resistors is formed along the planar direction of the substrate, so that the electric field component in the depth direction can be reduced by simply attaching the third resistor along the back surface of the substrate. can be measured.

According to the embodiment, the third resistor is provided in parallel with the via section, each of one end of the third resistor is connected to the via section connected to the first metal surface, and the third resistor is connected to the via section connected to the first metal surface. The other ends of each of the resistors are connected to the second metal surface. Thereby, the electric field component in the depth direction can be detected with high accuracy.

According to the embodiment, a substrate, a plurality of first metal surfaces formed on the surface of the substrate in an array in a first direction and a second direction, and a first metal surface between the first metal surfaces; a plurality of first resistors connected along the direction and the first metal surface; a plurality of second resistors connected along the second direction; and a plurality of second resistors formed on the back surface of the substrate. a plurality of via portions formed from each of the first metal surfaces to the back surface of the substrate; and a plurality of second metal surfaces connected between each of the via portions and the second metal surface. a first voltage detection unit that detects the voltage generated in each of the first resistors; and a first voltage detection unit that detects the voltage generated in each of the second resistors. an electric field in the first direction based on the voltage detected by the second voltage detection section, the third voltage detection section that detects the voltage generated in each of the third resistor, and the first voltage detection section. The electric field component in the second direction is calculated based on the voltage generated in the second resistor, and the electric field component in the thickness direction of the substrate is calculated based on the voltage generated in the third resistor. It is possible to realize a radio wave electric field component detection device that includes a calculation unit that calculates an electric field component.

According to the embodiment, the calculation unit calculates the electric field in the first direction based on the length of the via portion in the first direction from the electric field component in the thickness direction of the substrate based on the voltage generated in the third resistor. component and the electric field component in two directions based on the length of the via portion in the second direction. Thereby, the electric field component in the depth direction can be measured with high accuracy.

According to the embodiment, the calculation unit corrects the voltage value generated in the third resistor so that it approaches the theoretical voltage value in the thickness direction of the substrate based on the angle of incidence of radio waves on the substrate. The electric field component in the depth direction can be measured with precision.

According to the embodiment, when the angle of incidence of the radio waves on the board is larger than the predetermined angle, the calculation unit determines that the voltage value generated in the third resistor increases as the angle of incidence of the radio waves on the board becomes larger than the predetermined angle. Since the correction width is increased, the electric field component in the depth direction can be measured with high accuracy.

As mentioned above, each embodiment and modification example as one aspect of the present invention has been described in detail with reference to the drawings, but the specific configuration is not limited to each embodiment and modification example, and departs from the gist of this invention. This also includes design changes to the extent that the changes will not be made. Further, one aspect of the present invention can be modified in various ways within the scope shown in the claims, and embodiments obtained by appropriately combining technical means disclosed in different embodiments may also be modified according to the technical aspects of the present invention. Included in the range. Also included are configurations in which the elements described in each of the above embodiments and modified examples are replaced with each other and have similar effects.

1 Radio wave detection system 100, 100A Radio wave sensor 102 Copper patch 104, 104A Via 106 X-direction resistor 108 Y-direction resistor 110 Dielectric substrate 110b Back surface 112 Capacitor 120, 120A Metal plate 122 Hole 124, 124A Z-direction resistor 200 RF switch 300 Software defined radio 400 Control personal computer 410 Voltage detection unit 412 X-direction voltage detection unit 414 Y-direction voltage detection unit 416 Z-direction voltage detection unit 420 Calculation unit 430 Display unit

Claims (7)

A substrate and
a plurality of first metal surfaces formed in an array in a first direction and a second direction on the surface of the substrate;
a plurality of first resistors connected along the first direction between the first metal surfaces; and a plurality of first resistors connected along the second direction between the first metal surfaces. a plurality of second resistors; a second metal surface formed on the back surface of the substrate;
a plurality of via portions formed from each of the first metal surfaces to the back surface of the substrate;
a plurality of third resistors connected between each of the via portions and the second metal surface;
A radio wave sensor equipped with. The resistance value of the third resistor is set to be smaller than the resistance values of the first resistor and the second resistor .
The radio wave sensor according to claim 1. The radio wave sensor according to claim 1 or 2, wherein each of the third resistors is formed along a planar direction of the substrate. Each of one ends of the third resistor is connected to the via portion connected to the first metal surface, and each of the other ends of the third resistor is connected to the second metal surface. , the radio wave sensor according to claim 1 or claim 2. A substrate and
a plurality of first metal surfaces formed in an array in a first direction and a second direction on the surface of the substrate;
a plurality of first resistors connected along the first direction between the first metal surfaces; and a plurality of first resistors connected along the second direction between the first metal surfaces. a plurality of second resistors; a second metal surface formed on the back surface of the substrate;
a plurality of via portions formed from each of the first metal surfaces to the back surface of the substrate;
a plurality of third resistors connected between each of the via portions and the second metal surface; a radio wave sensor;
a first voltage detection section that detects a voltage generated in each of the first resistors;
a second voltage detection unit that detects the voltage generated in each of the second resistors;
a third voltage detection unit that detects the voltage generated in each of the third resistors;
An electric field component in the first direction is calculated based on the voltage detected by the first voltage detection section, and an electric field component in the second direction is calculated based on the voltage generated in the second resistor. a calculation unit that calculates an electric field component in the thickness direction of the substrate based on the voltage generated in the third resistor;
An electric field component detection device comprising: The calculation unit calculates the first direction based on the length of the via portion in the first direction from the electric field component of the radio wave in the thickness direction of the substrate based on the voltage generated in the third resistor. performing correction to remove the influence of the electric field component in the second direction based on the length of the via portion in the second direction;
The electric field component detection device according to claim 5. 6. The calculation unit corrects the voltage value generated in the third resistor so that it approaches a theoretical voltage value in the thickness direction of the substrate based on the incident angle of radio waves to the substrate. 6. The electric field component detection device according to 6.

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