JP7405650B2 - grinding equipment - Google Patents

Description

The present invention relates to a grinding device.

A grinding device that uses a grindstone to grind a workpiece held in a holding means is one that performs rough grinding using a rough grindstone and then performs final grinding using a finishing grindstone to give the workpiece a predetermined thickness. There is.
For example, the biaxial grinding device disclosed in Patent Document 1, which includes rough grinding means and finish grinding means, has a large volume. Therefore, as disclosed in Patent Documents 2 and 3, a grinding device in which a rough whetstone and a finishing whetstone are attached to the spindle of one grinding means has been invented. This makes it possible to perform rough grinding and finish grinding using two types of grindstones, thereby reducing the size of the grinding device.

In the above invention, an annular roughing whetstone and a finishing whetstone are mounted on a spindle with the center of the circle of the roughing whetstone, the center of the circle of the finishing whetstone, and the axis of the spindle coinciding with each other, and the roughening whetstone is roughened in the direction of the axis. By moving the whetstone and the finishing whetstone relatively forward and backward (moving only one whetstone back and forth in the axial direction), either the roughing whetstone or the finishing whetstone approaches the holding means, and rough grinding and finishing grinding are performed. This makes it possible to carry out each of the following.

Japanese Patent Application Publication No. 2007-335458 JP2016-087748A Japanese Patent Application Publication No. 2018-192533

In the above-mentioned grinding device, it is necessary for the grinding device to recognize which grinding wheel, the roughing wheel or the finishing wheel, is brought closer to the holding surface. Detects whether the whetstone is close to the holding surface.
However, since it does not detect which grindstone is actually brought closer to the holding surface, there is a problem that the grindstone may not be selected correctly.
Therefore, the grinding device has the problem of detecting which grindstone, the rough grindstone or the finishing grindstone, is actually brought closer to the workpiece.

The present invention includes a holding means for holding a workpiece on a holding surface, a concentric annular roughing grindstone and an annular finishing grindstone, which are rotatably mounted around the center of the grindstone, and the roughening grinding wheel is rotated in the axial direction. a grinding means having an advancing/retracting mechanism for moving a grindstone and the finishing whetstone relatively forward and backward, and rough grinding or finishing grinding a workpiece held on the holding surface; A grinding device comprising at least a vertical moving means for moving the grinding means relatively, the grinding device relatively determining whether the grindstone being brought close to the holding means by the advance/retreat mechanism is the rough grindstone or the finishing grindstone. This grinding device is equipped with a judgment means that makes a judgment based on the relationship between the height positions of the grindstones.
It is preferable that the judgment means provided in the above-mentioned grinding device include a judgment sensor disposed in the advancing/retreating mechanism to judge whether the grindstone being brought close to the holding means is a rough grindstone or a finishing grindstone.
The above-mentioned grinding device includes a first grindstone detection sensor capable of detecting the lower surface of either the rough whetstone or the finishing whetstone, and the determining means detects whether the first grindstone detection sensor is the rough whetstone or the finishing whetstone. The grinding means is placed directly below one of the grinding wheels, and the vertical moving means is used to lower the grinding means in a direction approaching the first grinding wheel detection sensor, and the first grinding wheel detection sensor causes the grinding means to move toward the holding means. It is desirable that the whetstone being approached is one that determines whether it is the rough whetstone or the finishing whetstone.
The present invention includes a second whetstone detection sensor capable of detecting the lower surface of the rough whetstone and the lower surface of the finishing whetstone, and the determining means arranges the second whetstone detection sensor directly below the rough whetstone and the finishing whetstone. Then, the vertical moving means is used to lower the grinding means in a direction approaching the second whetstone detection sensor, and when the second whetstone detection sensor detects the lower surface of the rough whetstone or the lower surface of the finishing whetstone. From the height of the grinding means, it is desirable to determine whether the grindstone that is brought close to the holding surface is the rough grindstone or the finishing grindstone.

In this grinding device, it is possible to determine which grindstone is closer to the holding means based on the relative height position relationship between the rough grindstone and the finishing grindstone. Therefore, even if the grindstone is not selected correctly, it is possible to recognize the grindstone that is actually approaching the holding means.
By providing the determining means, it is possible to directly detect which of the coarse grindstone or the finishing grindstone is actually approaching the holding means.
By checking the height position of the grinding means when the light emitted from the light projecting part in the first grinding wheel detection sensor or the second grinding wheel detection sensor is blocked by the rough grinding wheel or the finishing grinding wheel and is no longer received by the light receiving part. , it is possible to determine whether the whetstone that is actually brought close to the holding surface is a rough whetstone or a finishing whetstone.

It is a perspective view showing the whole grinding device provided with a 1st whetstone detection sensor. FIG. 3 is a cross-sectional view illustrating how a first whetstone detection sensor is used to determine which of the rough whetstone and the finishing whetstone is brought closer to the holding surface. It is a perspective view showing the whole grinding device provided with the 2nd whetstone detection sensor. FIG. 7 is a cross-sectional view illustrating how a second whetstone detection sensor is used to determine which of the rough whetstone and the finishing whetstone is brought closer to the holding surface. FIG. 7 is a cross-sectional view illustrating how a third whetstone detection sensor is used to determine which of the rough whetstone and the finishing whetstone is brought closer to the holding surface.

1 Configuration of Grinding Apparatus A grinding apparatus 1 shown in FIG. 1 is a grinding apparatus that grinds a workpiece 12. The configuration of the grinding device 1 will be described below.

As shown in FIG. 1, the grinding device 1 includes a base 10 extending in the Y-axis direction and a column 11 erected on the +Y direction side of the base 10.

A holding means 2 is arranged on the base 10. The holding means 2 includes a disk-shaped suction section 20, an annular frame 21 that supports the suction section 20, and a base 22 that supports the frame 21.
The upper surface of the suction unit 20 is a holding surface 200 on which the workpiece 12 is held by suction, and the upper surface 210 of the frame 21 is formed flush with the holding surface 200.

The suction section 20 of the holding means 2 is connected to a suction source (not shown). By activating the suction source while the workpiece 12 is placed on the holding surface 200, the generated suction force is transmitted to the holding surface 200 of the suction unit 20, and the workpiece 12 is placed on the holding surface. 200 and is held under suction.

Further, the holding means 2 is connected to the rotating means 24. By driving the holding means 2 using the rotation means 24, the holding means 2 can be rotated about the axis in the Z-axis direction.

An internal base 100 extending in the Y-axis direction is disposed inside the base 10. A horizontal moving means 5 is arranged on the internal base 100.

The horizontal movement means 5 includes a ball screw 50 having a rotation axis 55 in the Y-axis direction, a pair of guide rails 51 arranged parallel to the ball screw 50, and a ball screw connected to the ball screw 50 and centered around the rotation axis 55. 50, and a movable plate 53 whose bottom nut is screwed onto the ball screw 50 and moves along the guide rail 51 in the Y-axis direction. A Y-axis encoder 520 that measures and controls the amount of rotation of the Y-axis motor 52 is connected to the Y-axis motor 52 .

Three support columns 54 are erected on the movable plate 53. In FIG. 1, two support columns 54 are illustrated. The support column 54 supports the base 22.
When the ball screw 50 is driven by the Y-axis motor 52 and rotates around the rotating shaft 55, the movable plate 53 is guided by the guide rail 51 and moves in the Y-axis direction, causing the support column 54 to be attached to the movable plate 53. The holding means 2 connected through the movable plate 53 moves integrally with the movable plate 53 in the Y-axis direction.

A cover 27 is disposed around the holding means 2, and the cover 27 is extendably connected to the bellows 28.
When the holding means 2 moves in the Y-axis direction, the cover 27 moves together with the holding means 2 in the Y-axis direction, and the bellows 28 expands and contracts.

For example, a vertical movement means 4 for supporting the grinding means 3 is disposed on the side surface of the column 11 on the −Y direction side. The vertical movement means 4 includes a ball screw 40 having a rotation axis 45 in the Z-axis direction, a pair of guide rails 41 arranged parallel to the ball screw 40, and a Z-axis that rotates the ball screw 40 about the rotation axis 45. It includes a shaft motor 42, an elevating plate 43 whose internal nut is screwed onto a ball screw 40 and whose side portion slides on a guide rail 41, and a holder 44 connected to the elevating plate 43 and supporting the grinding means 3.

When the ball screw 40 is driven by the Z-axis motor 42 and rotates around the rotating shaft 45, the elevating plate 43 is guided by the guide rail 41 and moves up and down in the Z-axis direction. This occurs when the grinding means 3 held by the holder 44 moves in a direction perpendicular to the holding surface 200 (Z-axis direction).

A Z-axis encoder 420 that measures and controls the amount of rotation of the Z-axis motor 42 is connected to the Z-axis motor 42 . Further, a storage unit 46 is connected to the Z-axis encoder 420. The storage unit 46 has a memory (not shown), and can store the amount of rotation of the Z-axis motor 42. Here, the amount of rotation of the Z-axis motor 42 corresponds to the amount of vertical movement of the grinding means 3 by the vertical movement means 4. The amount of vertical movement can be stored.
For example, by rotating the ball screw 40 using the Z-axis motor 42 by the amount of rotation stored in the storage section 46, the grinding means 3 can be positioned at a height position corresponding to the amount of rotation.

The grinding means 3 includes a spindle unit 31. As shown in FIG. 2, the spindle unit 31 includes a spindle 30 having an axis 35 in the Z-axis direction, and a spindle motor 32 that rotates the spindle 30. The spindle 30 includes a first shaft portion 300 and a second shaft portion 301 formed to have a larger diameter than the first shaft portion 300 . A thrust plate 310 is disposed between the first shaft section 300 and the second shaft section 301.
The spindle unit 31 includes a casing 18 surrounding the spindle 30 and spindle motor 32. An air flow path 180 is formed inside the casing 18 . The air passage 180 is connected to the air supply source 39 and branches into a plurality of branch passages inside the casing 18 . The air flow path 180 is open to an upper surface 181, a side surface 182, and a lower surface 183 of the casing 18.

When air is supplied from the air supply source 39, the air passes through the air passage 180 of the casing 18 and is ejected from the top surface 181, side surface 182, and bottom surface 183 of the casing 18 to the outside of the casing 18.
Air is blown out from the upper surface 181, side surface 182, and lower surface 183 of the casing 18, thereby creating a space between the casing 18 and the thrust plate 310, between the casing 18 and the second shaft portion 301 of the spindle 30, and between the casing 18 and the second shaft portion 301 of the spindle 30. A gap is formed between the cylinder 15 and the large diameter portion 150.

An advancing/retracting mechanism 6 is disposed below the second shaft portion 301 .
The advancing/retracting mechanism 6 includes a cylinder 15 disposed in a large diameter portion 150 connected to the second shaft portion 301 . The cylinder 15 includes a storage chamber 61 formed inside the large diameter portion 150 . A piston 600 is housed in the housing chamber 61 .

A plurality of rods 60 are connected to the lower part of the piston 600 and are provided at equal intervals in the circumferential direction of the piston 600. Only one rod 60 is shown in FIG. 2 .
An annular mount 33 is connected to the lower end of the rod 60. A finishing grinding wheel 34 is mounted on the annular mount 33. The finishing grinding wheel 34 includes a wheel base 341 and a plurality of substantially rectangular parallelepiped finishing grindstones 340 arranged in an annular manner at the lower end of the wheel base 341. A lower surface 342 of the finishing whetstone 340 is a grinding surface that comes into contact with the workpiece 12.

A disk mount 36 is connected to the lower end of the small diameter portion 151 of the cylinder 15 . A rough grinding wheel 37 is mounted on the disk mount 36. The rough grinding wheel 37 includes a wheel base 371 and a plurality of roughly rectangular parallelepiped rough grindstones 370 arranged in an annular manner at the lower end of the wheel base 371. The lower surface 372 of the rough grindstone 370 is a grinding surface that comes into contact with the workpiece 12.
A guide portion 67 is provided between the lower surface of the large diameter portion 150 of the cylinder 15 and the disk mount 36 to connect the two. Further, the annular mount 33 is formed with a through hole that penetrates the guide portion 67 .

An air supply means (not shown) is connected to the accommodation chamber 61 of the advancing/retracting mechanism 6 . In the advancing/retracting mechanism 6, by supplying air into the interior of the accommodation chamber 61 from above using an air supply means (not shown), a pushing force is applied to the piston 600 in the -Z direction, and the piston 600 is moved along the Z axis. It is possible to descend in the direction.
Moreover, by supplying air to the storage chamber 61 from below, it is possible to apply a pushing force to the piston 600 in the +Z direction and raise the piston 600 in the Z-axis direction.
When the piston 600 moves up and down in the Z-axis direction, the annular mount 33 connected to the piston 600 via the rod 60 moves up and down while being guided by the guide part 67, and the finish grinding device attached to the annular mount 33 moves up and down. The wheel 34 moves up and down, and the coarse grindstone 370 and the finishing grindstone 340 move forward and backward relative to each other in the Z-axis direction.

The grinding device 1 includes a determining means 7 that determines whether the grindstone that is being brought close to the holding surface 200 is the rough grindstone 370 or the finishing grindstone 340.

The determining means 7 includes a piston detection sensor 70 disposed above the accommodation chamber 61 of the advancing/retracting mechanism 6. The piston detection sensor 70 has a function as a determination sensor that determines whether the whetstone being brought close to the holding means 2 is the rough whetstone 370 or the finishing whetstone 340, and is connected to the detection section 700.
The piston detection sensor 70 is, for example, a capacitance type proximity sensor, and can detect the distance between the upper surface 601 of the piston 600 and the piston detection sensor 70. The distance between the upper surface 601 of the piston 600 and the piston detection sensor 70 detected by the piston detection sensor 70 is transmitted to the detection unit 700.

The determining means 7 includes a first grindstone detection sensor 71 disposed on the movable plate 53 of the horizontal moving means 5. The first grindstone detection sensor 71 includes an air cylinder 710, a piston 711 housed in the air cylinder 710, and a light emitter/receiver 712 supported by the piston 711.

An air source (not shown) is connected to the air cylinder 710. When air is supplied from the air source to the inside of the air cylinder 710, the piston 711 receives the pressing force of the air and protrudes in the +Z direction, and accordingly, the light emitter/receiver 712 supported by the piston 711 rises in the +Z direction. It happens. By controlling the amount of air supplied from the air source to the air cylinder 710, it is possible to move the piston 711 in the Z-axis direction and position the light emitter/receiver 712 at an appropriate height position. .

A first recess 713 is formed in the light emitter/receiver 712 . The first recess 713 has a size that can accommodate the finishing whetstone 340. Further, the first recess 713 has a size that can accommodate the rough grindstone 370. However, the size of the first recess 713 is such that when the finishing whetstone 340 is accommodated in the first recess 713, the rough whetstone 370 cannot be accommodated in the first recess 713; It is assumed that the size is such that the finishing whetstone 340 cannot be accommodated in the first recess 713 when the finishing whetstone 340 is accommodated therein.

A light projecting section 714 and a light receiving section 715 are arranged on the inner wall of the first recess 713, and light is projected from the light projecting section 714 toward the light receiving section 715.

For example, with the finishing whetstone 340 positioned below the roughing whetstone 370, the grinding means 3 is lowered in the -Z direction using the vertical movement means 4, and the lower surface 342 of the finishing whetstone 340 is positioned below the light emitting part. 714 and the light receiving section 715 are connected by a straight line, the light emitted from the light projecting section 714 is blocked by the finishing whetstone 340 and is no longer received by the light receiving section 715, and the lower surface of the finishing whetstone 340 342 is detected. Thereby, it can be determined that the finishing whetstone 340 is brought closer to the holding surface 200 than the roughing whetstone 370.

In addition, with the rough whetstone 370 positioned below the finishing whetstone 340, the grinding means 3 is lowered using the vertical movement means 4, and the lower surface 372 of the rough whetstone 370 is moved between the light projecting part 714 and the light receiving part 715. When positioned at a height that connects the two with a straight line, the light projected from the light projecting section 714 is blocked by the rough grindstone 370 and is not received by the light receiving section 715. As a result, the lower surface 372 of the rough whetstone 370 is detected, and it can be determined that the rough whetstone 370 is brought closer to the holding surface 200 than the finishing whetstone 340.

2 Operation of Grinding Device The operation of the grinding device 1 when grinding the workpiece 12 using the above-mentioned grinding device 1 will be explained. First, the height position of the rough whetstone 370 when the rough whetstone 370 blocks the light projected from the light projecting section 714 when the rough whetstone 370 is brought close to the holding surface 200 is stored in the storage unit 46 in advance. , and the height position of the finishing whetstone 340 when the finishing whetstone 340 blocks the light projected from the light projecting section 714 when the finishing whetstone 340 is brought close to the holding surface 200.

The workpiece 12 is placed on the holding surface 200 of the holding means 2. Then, by operating a suction source (not shown) and transmitting suction force to the holding surface 200, the workpiece 12 is suctioned and held on the holding surface 200.

Next, the coarse grindstone 370 is positioned below the finishing grindstone 340 using the advance/retreat mechanism 6. This brings the coarse grindstone 370 closer to the holding surface 200 than the finishing grindstone 340.

Next, air is supplied into the air cylinder 710 to raise the piston 711 so that the height of the light emitter/receiver 712 is higher than the height of the holding surface 200.

Then, as shown in FIG. 2, the movable plate 53 is moved in the +Y direction using the horizontal moving means 5, and the first grindstone detection sensor 71 is placed directly below the finishing grindstone 340.

After arranging the first grindstone detection sensor 71 directly below the finishing grindstone 340, the vertical movement means 4 is used to lower the grinding means 3 in the -Z direction to a height position stored in advance in the storage section 46. Finishing whetstone 340 is lowered to a predetermined height position.
At this time, if the lower surface 342 of the finishing whetstone 340 has not descended to the height position where the light projecting part 714 and the light receiving part 715 are connected by a straight line, the light projected from the light projecting part 714 is received by the light receiving part 715. Therefore, it is determined that the whetstone being brought closer to the holding surface 200 is the rough whetstone 370.

Next, the supply of air to the air cylinder 710 is stopped, and the piston 711 and the light emitter/receiver 712 supported by the piston 711 are moved in the -Z direction, so that the height position of the light emitter/receiver 712 is on the holding surface. Make it below the height position of 200.

Then, the holding means 2 is moved in the +Y direction using the horizontal moving means 5, and the workpiece 12 held by the holding means 2 is positioned below the grinding means 3.

Thereafter, the spindle 30 is rotated using the spindle motor 32 to rotate the rough grindstone 370, and the holding means 2 is rotated using a rotation means (not shown) to rotate the workpiece 12 held by the holding means 2. let

With the rough grindstone 370 and the workpiece 12 rotating, the vertical movement means 4 is used to lower the grinding means 3 in the -Z direction. As a result, the lower surface 372 of the rough grindstone 370 comes into contact with the upper surface 120 of the workpiece 12. With the lower surface 372 of the rough whetstone 370 in contact with the upper surface 120 of the workpiece 12, by further pushing the rough whetstone 370 down in the -Z direction using the vertical movement means 4, the workpiece 12 is roughened. Grinded.
After rough grinding the workpiece 12, the rough grindstone 370 is raised in the +Z direction using the vertical movement means 4 to separate the rough grindstone 370 from the upper surface 120 of the workpiece 12.

Next, the coarse whetstone 370 and the finishing whetstone 340 are moved relatively forward and backward using the advance/retreat mechanism 6, so that the finishing whetstone 340 is positioned below the rough whetstone 370.
Then, air is supplied into the air cylinder 710 again to raise the piston 711 so that the height of the light emitter/receiver 712 is higher than the height of the holding surface 200.

Thereafter, the movable plate 53 is moved in the +Y direction using the horizontal moving means 5, and the first grindstone detection sensor 71 is placed directly below the finishing grindstone 340.

Next, using the vertical movement means 4, the grinding means 3 is lowered in the -Z direction to a height position previously stored in the storage section 46, and the finishing whetstone 340 is placed in the first recess 713 of the first whetstone detection sensor 71. lower towards it. When the finishing whetstone 340 descends to a predetermined height position, if the lower surface 342 of the finishing whetstone 340 has descended to the height position where the light projecting part 714 and the light receiving part 715 are connected by a straight line, the light projecting part 714 The light emitted from the finishing whetstone 340 is blocked by the finishing whetstone 340 and is no longer received by the light receiving section 715, and it is determined that the whetstone that is brought closer to the holding surface 200 is the finishing whetstone 340.

Thereafter, the supply of air to the air cylinder 710 is stopped, and the piston 711 and the light emitter/receiver 712 supported by the piston 711 are moved in the -Z direction, so that the height position of the light emitter/receiver 712 is above the holding surface 200. Make sure it is below the height position.

Then, the holding means 2 is moved in the +Y direction using the horizontal moving means 5, and the workpiece 12 held by the holding means 2 is positioned below the grinding means 3.

Thereafter, the spindle 30 is rotated using the spindle motor 32 to rotate the finishing grindstone 340, and the holding means 2 is rotated using a rotating means (not shown) to rotate the workpiece 12 held by the holding means 2. let

With the finishing grindstone 340 and the workpiece 12 rotating, the grinding means 3 is lowered in the -Z direction using the vertical movement means 4. As a result, the lower surface 342 of the finishing whetstone 340 comes into contact with the upper surface 120 of the workpiece 12.
With the lower surface 342 of the finishing whetstone 340 in contact with the upper surface 120 of the workpiece 12, the finishing whetstone 340 is further pushed down in the -Z direction using the vertical movement means 4, so that the workpiece 12 becomes rough. Grinded. After finish grinding the workpiece 12, the finishing grindstone 340 is raised in the +Z direction using the vertical movement means 4.

As described above, the first grindstone detection sensor 71 is used to check whether the light emitted from the light projecting section 714 is no longer received by the light receiving section 715, and to determine which of the rough grindstone 370 and the finishing grindstone 340 is selected. It can be determined whether the grindstone is brought close to the holding surface 200.

The grinding device 1 may include a second grindstone detection sensor 72 instead of the first grindstone detection sensor 71, as shown in FIG.
The second grindstone detection sensor 72 includes an air cylinder 720 and a piston 721 housed in the air cylinder 720. The air cylinder 720 and the piston 721 are similar to the air cylinder 710 and the piston 711 included in the first grindstone detection sensor 71 shown in FIG.

As shown in FIG. 4, a light emitter/receiver 722 is supported on the piston 721.
A second recess 723 is formed in the light emitter/receiver 722 . The second recess 723 has a size that can accommodate the finishing whetstone 340 and the roughing whetstone 370 at the same time.
A light projecting section 724 and a light receiving section 725 are arranged on the inner wall of the second recess 723, and light is projected from the light projecting section 724 toward the light receiving section 725.

When determining which grindstone, the rough whetstone 370 or the finishing whetstone 340, is brought closer to the holding surface 200 using the second whetstone detection sensor 72, the coarse whetstone 370 is brought closer to the holding surface 200 in advance. The height position of the rough whetstone 370 when the rough whetstone 370 blocks the light emitted from the light projecting part 724 when the rough whetstone 370 is placed close to the holding surface 200; The height position of the finishing grindstone 340 when blocking the light projected from the light section 724 is stored in the storage section 46 shown in FIG. 4 .

Then, the grinding means 3 is lowered using the vertical movement means 4, and it is determined at which height position the grinding means 3 is positioned at which the light projected from the light projecting section 724 is blocked. By comparing which of the two height positions stored in the storage unit 46 the height position is, it is determined which grindstone is brought closer to the holding surface 200.

As described above, the height of the grinding means 3 when the light projected from the light projecting section 724 in the second grindstone detection sensor 72 is blocked by the rough grindstone 370 or the finishing grindstone 340 and is no longer received by the light receiving section 725. By checking the position, it can be determined whether the whetstone being brought closer to the holding surface 200 is the rough whetstone 370 or the finishing whetstone 340.

Note that, for example, when the lower surface 372 of the roughing whetstone 370 and the lower surface 342 of the finishing whetstone 340 are positioned at approximately the same height position due to a failure of the advance/retreat mechanism 6, etc., the roughing whetstone 370 and the finishing whetstone 340 are When the light emitted from the light emitting part 724 of the second whetstone detection sensor 72 is blocked by descending to the height position where the light part 724 and the light receiving part 725 are connected by a straight line, the light is blocked by which whetstone. It may be difficult to determine whether the light has been blocked.

In such a case, the piston detection sensor 70 is used. The piston detection sensor 70 is a sensor that reacts when the upper surface 601 of the piston 600 approaches the piston detection sensor 70 closer than a predetermined distance, and determines whether to use the coarse grindstone 370 or the finishing grindstone 340 based on the reaction of the piston detection sensor 70. It is determined whether the whetstone is brought close to the holding surface 200.
In this embodiment, it is determined that the rough grindstone 370 is brought closer to the holding surface 200 based on the reaction of the piston detection sensor 70.

Moreover, the piston detection sensor 70 may measure the distance between the piston 600 and the upper surface. Specifically, the distance between the piston detection sensor 70 and the upper surface 601 of the piston 600 when the roughing whetstone 370 is brought close to the holding surface 200, and the distance between the finishing whetstone 340 being brought close to the holding surface 200 are determined in advance. The distance between the piston detection sensor 70 and the upper surface 601 of the piston 600 at that time is stored.
The distance between the piston detection sensor 70 and the top surface 601 of the piston 600 is the distance between the piston detection sensor 70 and the top surface 601 of the piston 600 when the rough grindstone 370 is brought close to the holding surface 200. If so, it is determined that the rough grindstone 370 is brought close to the holding surface 200.
On the other hand, the distance between the piston detection sensor 70 and the top surface 601 of the piston 600 is the distance between the piston detection sensor 70 and the top surface 601 of the piston 600 when the finishing grindstone 340 is brought close to the holding surface 200. If so, it is determined that the finishing whetstone 340 is brought close to the holding surface 200.

Further, the determination of the grindstone using the piston detection sensor 70 is such that, for example, if the distance between the piston detection sensor 70 and the upper surface 601 of the piston 600 is larger than a certain value, the finishing grindstone 340 is placed on the holding surface 200. The structure may be such that it is determined that the rough grindstone 370 is brought close to the holding surface 200 if the rough grindstone 370 is brought closer to the holding surface 200 and, on the other hand, is less than the certain value.

By measuring the distance between the piston detection sensor 70 and the upper surface 601 of the piston 600 using the piston detection sensor 70, it is possible to determine whether the grindstone being brought closer to the holding surface 200 is the rough grindstone 370 or the finishing grindstone 340. can be judged.

The detection sensor for detecting the height of the grindstone may be a laser irradiation type third grindstone detection sensor 73 disposed on the +X direction side of the upper surface 101 of the base 10, as shown in FIG.
For example, the height position of the lower surface 372 of the rough whetstone 370 is determined by using the third whetstone detection sensor 73 to irradiate the lower surface 372 of the rough whetstone 370 with a laser and receive the reflected light from the lower surface 372. Detect. Furthermore, the height position of the lower surface 342 of the finishing whetstone 340 is detected by irradiating the lower surface 342 of the finishing whetstone 340 with a laser and receiving the reflected light reflected by the lower surface 342. Then, by comparing both height positions, it can be determined which of the rough grindstone 370 and the finishing grindstone 340 is brought closer to the holding surface 200.

In addition, the grinding device should just be equipped with any one of the piston detection sensor 70, the 1st grindstone detection sensor 71, the 2nd grindstone detection sensor 72, and the 3rd grindstone detection sensor 73.

1: Grinding device 10: Base 101: Top surface of base 11: Column 100: Internal base 12: Workpiece 120: Top surface of workpiece 2: Holding means 20: Suction part 200: Holding surface 21: Frame body 210: Frame Upper surface of body 22: Base 24: Rotating means 27: Cover 28: Bellows 3: Grinding means 30: Spindle 300: First shaft section 301: Second shaft section 310: Thrust plate 31: Spindle unit 32: Spindle motor 33: Annular mount 34: Finish grinding wheel 340: Finishing whetstone 341: Wheel base 342: Bottom surface of finishing whetstone 35: Rotating shaft 36: Disc mount 37: Rough grinding wheel 370: Rough whetstone 371: Wheel base 372: Rough whetstone Lower surface 39: Air supply source 4: Vertical movement means 40: Ball screw 41: Guide rail 42: Z-axis motor 420: Z-axis encoder 43: Elevating plate 44: Holder 45: Rotating shaft 46: Memory unit 5: Horizontal movement means 50: Ball screw 51: Guide rail 52: Y-axis motor 520: Y-axis encoder 53: Movable plate 54: Support column 55: Rotating shaft 6: Advance/retreat mechanism 60: Rod 61: Accommodation chamber 600: Piston 601: Top surface of piston 15: Cylinder 150 : Large diameter part 151: Small diameter part 67: Guide part 7: Judgment means 70: Piston detection sensor 700: Detection part 71: First grindstone detection sensor 710: Air cylinder 711: Piston 712: Light emitter/receiver 713: First recessed part 714 : Light emitter 715: Light receiver 72: Second whetstone detection sensor 720: Air cylinder 721: Piston 722: Light emitter/receiver 723: First recess 724: Light emitter 725: Light receiver 73: Third whetstone detection sensor 18: Casing 180: Air flow path 181: Top surface 182: Side surface 183: Bottom surface

Claims (4)

holding means for holding the workpiece on the holding surface;
A concentric annular roughing whetstone and an annular finishing whetstone are rotatably mounted around the center of the whetstone, and the coarse whetstone and the finishing whetstone are relatively moved back and forth in the axial direction. Grinding means for rough grinding or finishing grinding of the workpiece held on the holding surface;
A grinding device comprising at least vertical moving means for relatively moving the holding means and the grinding means in a direction perpendicular to the holding surface,
A grinding device comprising determining means for determining whether the grindstone being brought close to the holding means by the advance/retreat mechanism is the rough grindstone or the finishing grindstone, based on the relationship of relative height positions of the grindstones. 2. The grinding apparatus according to claim 1, wherein the determining means includes a determining sensor for determining whether the grindstone being brought close to the holding means by the advance/retreat mechanism is a rough whetstone or a finishing whetstone. a first whetstone detection sensor capable of detecting the lower surface of either the rough whetstone or the finishing whetstone;
The means of judgment is
The first whetstone detection sensor is placed directly under either the rough whetstone or the finishing whetstone,
lowering the grinding means in a direction approaching the first grindstone detection sensor using the vertical movement means;
The grinding device according to claim 1, wherein the first grindstone detection sensor determines whether the grindstone being brought close to the holding means is the rough grindstone or the finishing grindstone. a second whetstone detection sensor capable of detecting the lower surface of the rough whetstone and the lower surface of the finishing whetstone;
The means of judgment is
The second whetstone detection sensor is arranged directly below the rough whetstone and the finishing whetstone,
lowering the grinding means in a direction toward the second grindstone detection sensor using the vertical movement means;
From the height of the grinding means when the second whetstone detection sensor detects the lower surface of the rough whetstone or the lower surface of the finishing whetstone,
The grinding device according to claim 1, wherein it is determined whether the grindstone being brought close to the holding surface is the rough grindstone or the finishing grindstone.

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