JP7403801B2 - How to clean inside the pipe - Google Patents

How to clean inside the pipe Download PDF

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JP7403801B2
JP7403801B2 JP2020026322A JP2020026322A JP7403801B2 JP 7403801 B2 JP7403801 B2 JP 7403801B2 JP 2020026322 A JP2020026322 A JP 2020026322A JP 2020026322 A JP2020026322 A JP 2020026322A JP 7403801 B2 JP7403801 B2 JP 7403801B2
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cleaning
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tank
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suction
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淳 高田
克哉 内海
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Kansei Co
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特許法第30条第2項適用 (1)令和元年6月10日に東京都下水道局におけるプレゼンテーションにて下水管内清掃方法の内容をプレゼンテーションソフトにより公開。 (2)令和元年7月18日に大阪府大東市新田旭町4付近にて、下水管内清掃方法を実機を用いた現場試験及びデモンストレーションにより公開。 (3)令和元年7月24日に神奈川県小田原市飯泉11-1にて、下水管内清掃方法を実機を用いた現場試験及びデモンストレーションにより公開。 (4)令和元年7月31日に東京都下水道局におけるプレゼンテーションにて下水管内清掃方法の内容をプレゼンテーションソフトにより公開。 (5)令和元年8月6日~9日に高田淳及び内海克哉は、下水道展´19横浜にて、下水管内清掃方法の内容をビデオ上映により公開した。 (6)令和元年9年26日に広島県三原市本郷南2丁目9にて、下水管内清掃方法を実機を用いた現場試験及びデモンストレーションにより公開。 (7)令和元年10月10日に東京都下水道局西部第一事務所におけるプレゼンテーションにて下水管内清掃方法の内容をプレゼンテーションソフトにより公開。 (8)令和元年11月19日に内海克哉は、第30回非開削技術研究発表会にて、下水管内清掃方法の内容をプレゼンテーションソフトにより公開。 (9)令和元年11月19日発行の第30回非開削技術研究発表会論文集(一般社団法人日本非開削技術協会)に掲載。 (10)令和元年12月5日~7日に高田淳及び内海克哉は、エコプロダクツ2019にて、下水管内清掃方法の内容をビデオ上映により公開。 (11)令和2年2月14日に株式会社エヌ・エス・シー・エンジニアリングにおけるプレゼンテーションにて下水管内清掃方法の内容をプレゼンテーションソフトにより公開。 (12)令和2年2月17日に管清工業株式会社 横浜研修センターにて、東京都下水道局計画調整部技術開発課職員に対し実機を示して説明することにより公開Application of Article 30, Paragraph 2 of the Patent Act (1) On June 10, 2019, the contents of the method for cleaning inside sewer pipes were released using presentation software at a presentation at the Tokyo Metropolitan Bureau of Sewerage. (2) On July 18, 2019, near 4 Nitta Asahi-cho, Daito City, Osaka Prefecture, a method for cleaning inside sewage pipes was unveiled through an on-site test and demonstration using an actual machine. (3) On July 24, 2019, at 11-1 Iizumi, Odawara City, Kanagawa Prefecture, a method for cleaning inside sewage pipes was unveiled through an on-site test and demonstration using an actual machine. (4) On July 31, 2019, the details of how to clean inside sewage pipes were released using presentation software at a presentation at the Tokyo Metropolitan Bureau of Sewerage. (5) From August 6th to 9th, 2019, Jun Takada and Katsuya Utsumi presented a video showing how to clean inside sewer pipes at the Sewerage Exhibition '19 Yokohama. (6) On 26, 2019, at 2-9 Hongo Minami, Mihara City, Hiroshima Prefecture, a method for cleaning inside sewage pipes was unveiled through an on-site test and demonstration using an actual machine. (7) On October 10, 2019, the contents of the method for cleaning inside sewage pipes were released using presentation software at a presentation at the Tokyo Metropolitan Bureau of Sewerage West Office No. 1. (8) On November 19, 2019, Katsuya Utsumi released the details of the method for cleaning inside sewage pipes using presentation software at the 30th Trenchless Technology Research Presentation. (9) Published in the 30th Trenchless Technology Research Presentation Collection (Japan Trenchless Technology Association) published on November 19, 2019. (10) From December 5th to 7th, 2019, Jun Takada and Katsuya Utsumi will be showing a video of how to clean inside sewage pipes at Eco Products 2019. (11) On February 14, 2020, at a presentation at NSC Engineering Co., Ltd., the details of how to clean inside sewage pipes were released using presentation software. (12) Published on February 17, 2020 at the Yokohama Training Center of Kansei Kogyo Co., Ltd. by showing and explaining the actual machine to Tokyo Metropolitan Bureau of Sewerage Planning and Coordination Department Technology Development Division staff.

本発明は管内を清掃ロボットにより清掃する管内清掃方法に関し、特に大口径の下水管内を清掃する下水管内清掃方法に関する。 The present invention relates to a method for cleaning the inside of a pipe using a cleaning robot, and particularly to a method for cleaning the inside of a large-diameter sewer pipe.

下水管や側溝などの流路内には汚泥等が堆積したり付着したりするので、この堆積や付着する汚泥等を取り除くために流路内を清掃する必要がある。流路内の清掃は、例えば特許文献1に示すように、流路内で高圧洗浄水を噴射することによって堆積や付着している汚泥等を粉砕し、粉砕した汚泥等を洗浄水や下水などとともに吸引車で吸引することにより行っている。 Since sludge and the like accumulate or adhere to flow paths such as sewer pipes and side gutters, it is necessary to clean the inside of the flow paths in order to remove the accumulated sludge and the like. For example, as shown in Patent Document 1, the inside of the flow path is cleaned by spraying high-pressure cleaning water into the flow path to crush accumulated or attached sludge, and then flush the crushed sludge with cleaning water, sewage, etc. This is done by suctioning with a suction wheel.

特開2014-105520号公報Japanese Patent Application Publication No. 2014-105520

しかしながら、この流路内の清掃方法では、吸引車で吸引する洗浄水や下水などの水の量が多い場合には、吸引車の吸引タンクが早期に汚泥等を含んだ水によって満量となってしまう。吸引車の吸引タンクが満量となると、一旦清掃作業を中断し、吸引タンク内の水を排水してから再び清掃作業を開始することとなるので、吸引タンクの早期の満量は清掃作業効率を低下させる。 However, with this method of cleaning the inside of the flow path, if the amount of water such as washing water or sewage sucked in by the suction truck is large, the suction tank of the suction truck will quickly become full with water containing sludge, etc. It ends up. When the suction tank of the suction truck becomes full, cleaning work must be temporarily stopped and the water in the suction tank must be drained before cleaning can be started again, so filling the suction tank early will improve cleaning work efficiency. decrease.

そこで本発明は、清掃効率に優れた管内清掃方法の提供を目的とする。 Therefore, an object of the present invention is to provide a method for cleaning the inside of a pipe with excellent cleaning efficiency.

この目的を達成するための本発明の管内清掃方法は、下水管等の管内の汚泥等の堆積付着物を清掃する管内清掃方法であって、清掃ホースを有し、高圧水等の噴射装置又は発射装置が設けられた、下水管等の管内を走行できる管内清掃ロボットと、前記管内清掃ロボットの前記清掃ホースが接続されるレシーバタンク装置と、前記レシーバタンク装置の排出口からの排出物を受けるように配置される回収タンクと、吸引タンク及びこの吸引タンクに接続された吸引ホースを有し、前記レシーバタンク装置にこの吸引ホースが接続される吸引装置と、を準備する準備工程又は準備作業と、下水管等の管内に配置された前記管内清掃ロボットの前記噴射装置又は発射装置により粉砕等された管内の堆積付着物を前記清掃ホースで吸い込んで清掃するために、前記レシーバタンク装置を介する前記吸引装置の吸引力により管内の水を前記清掃ホースで吸い込み、吸い込んだ水を前記清掃ホースから前記レシーバタンク装置に吐き出す清掃工程又は清掃作業と、前記レシーバタンク装置に溜まった水を、前記レシーバタンク装置の排出口から前記回収タンクに回収する回収工程又は回収作業と、を備え、前記レシーバタンク装置には一対のレシーバタンクが設けられ、前記清掃工程又は清掃作業は、前記清掃ホースで吸い込んだ水を一方の前記レシーバタンクに吐き出す第1の清掃工程又は清掃作業と、前記清掃ホースで吸い込んだ水を他方の前記レシーバタンクに吐き出す第2の清掃工程又は清掃作業と、を有し、前記回収工程又は回収作業は、前記第1の清掃工程又は清掃作業の終了後に一方の前記レシーバタンクに溜まった水を一方の前記レシーバタンクの前記排出口から前記回収タンクに回収する第1の回収工程又は回収作業と、前記第2の清掃工程又は清掃作業の終了後に他方の前記レシーバタンクに溜まった水を他方の前記レシーバタンクの前記排出口から前記回収タンクに回収する第2の回収工程又は回収作業と、を有していて、前記回収タンクには、回収した水を前記堆積付着物を除去又は分離して排出するための排出構造が設けられているものである。 To achieve this object, the pipe cleaning method of the present invention is a pipe cleaning method for cleaning accumulated deposits such as sludge inside a pipe such as a sewage pipe, and includes a cleaning hose, a high-pressure water jetting device, or the like. A pipe cleaning robot that is equipped with a firing device and can travel inside a pipe such as a sewage pipe, a receiver tank device to which the cleaning hose of the pipe cleaning robot is connected, and a receiver tank device that receives discharged material from an outlet of the receiver tank device. A preparatory step or preparatory work for preparing a recovery tank arranged as shown in FIG. , in order to suck in and clean the accumulated deposits in the pipe, which have been crushed by the injection device or firing device of the pipe cleaning robot disposed in the pipe such as a sewage pipe, with the cleaning hose. A cleaning process or cleaning operation in which the water in the pipe is sucked in by the cleaning hose using the suction force of the suction device, and the sucked water is discharged from the cleaning hose to the receiver tank device, and the water accumulated in the receiver tank device is drained into the receiver tank. a recovery step or recovery operation of recovering the water from the discharge port of the device to the recovery tank; the receiver tank device is provided with a pair of receiver tanks; a first cleaning step or cleaning operation in which water is discharged into one of the receiver tanks, and a second cleaning step or cleaning operation in which water sucked in by the cleaning hose is discharged into the other receiver tank, and the recovery step Alternatively, the recovery operation is a first recovery step or recovery in which water accumulated in one of the receiver tanks is recovered from the discharge port of one of the receiver tanks to the recovery tank after the first cleaning step or the cleaning operation is completed. and a second recovery step or recovery operation of recovering water accumulated in the other receiver tank from the outlet of the other receiver tank to the recovery tank after the second cleaning step or cleaning operation is completed. , and the recovery tank is provided with a discharge structure for removing or separating the deposits from the recovered water and discharging it.

本発明の管内清掃方法は、例えば大口径の下水管内を清掃するために実施されるものである。管内清掃ロボットは、例えば10cm乃至50cmの深さ(最大深さ)の下水が流れる下水管内を、例えば下水の流れに逆らって又は上流側に移動しながら、あるいは下流側に移動しながら清掃を行っていく。管内清掃ロボットは、例えば高圧洗浄水の噴射装置又は発射装置により堆積付着物(堆積物又は付着物)の粉砕や剥離などを行う。管内清掃ロボットは、例えばテレビカメラを有し、このテレビカメラにより確認された堆積付着物の粉砕等を噴射装置又は発射装置により行う。管内清掃ロボットは停車して堆積付着物の粉砕等を噴射装置又は発射装置により行うことができる。 The inside pipe cleaning method of the present invention is carried out, for example, to clean the inside of a large-diameter sewer pipe. The pipe cleaning robot cleans the inside of a sewage pipe where sewage flows, for example, at a depth of 10 cm to 50 cm (maximum depth), while moving against the flow of sewage, upstream, or downstream. To go. The pipe cleaning robot uses, for example, a high-pressure cleaning water injection device or a firing device to crush or peel off deposits (deposits or deposits). The pipe cleaning robot has, for example, a television camera, and uses an injection device or a firing device to pulverize deposits detected by the television camera. The pipe cleaning robot can stop and use an injection device or a firing device to pulverize deposits or the like.

管内清掃ロボットの噴射装置又は発射装置により粉砕等された堆積付着物を清掃ホースで吸い込んで清掃するために、例えば、吸引装置の吸引力を常にレシーバタンク装置に作用させ、清掃ホースを常に吸引状態に保持しておくことができる。このように構成すると、清掃ホースからレシーバタンク装置に運ばれる下水等の水の量が多くなるが、レシーバタンク装置に一対のレシーバタンクを設けておき、例えば、清掃ホースから一方のレシーバタンクに水が吐き出される状態では他方のレシーバタンクは水が吐き出されない状態であり(第1の清掃工程又は清掃作業)、例えば、一方のレシーバタンクに水が所定量溜まると、一方のレシーバタンクは水が吐き出されない状態に切り換わり、例えば空の状態の他方のレシーバタンクは清掃ホースから水が吐き出される状態に切り換わる(第2の清掃工程又は清掃作業)。例えば、第1の清掃工程又は清掃作業が終了すると第2の清掃工程又は清掃作業中に一方のレシーバタンクに溜まった水が回収タンクに回収される(第1の回収工程又は回収作業)。また、例えば、他方のレシーバタンクに水が所定量溜まると、他方のレシーバタンクは水が吐き出されない状態に切り換わり、例えば空の状態の一方のレシーバタンクは清掃ホースから水が吐き出される状態に切り換わる(第1の清掃工程又は清掃作業)。例えば、第2の清掃工程又は清掃作業が終了すると第1の清掃工程又は清掃作業中に他方のレシーバタンクに溜まった水が回収タンクに回収される(第2の回収工程又は回収作業)。このようにして、例えば、第1の清掃工程又は清掃作業と第2の清掃工程又は清掃作業が必要な回数だけ交互に繰り返されるが、例えば、清掃工程又は清掃作業の間中又は全清掃工程又は清掃作業中、吸引装置の吸引力が常にレシーバタンク装置に作用している。 In order to suck in and clean accumulated deposits crushed by the injection device or firing device of the pipe cleaning robot with the cleaning hose, for example, the suction force of the suction device is always applied to the receiver tank device, and the cleaning hose is always in a suction state. can be kept in. With this configuration, the amount of water such as sewage transported from the cleaning hose to the receiver tank device increases, but if the receiver tank device is provided with a pair of receiver tanks, for example, water can be transferred from the cleaning hose to one receiver tank. When water is being discharged, water is not being discharged from the other receiver tank (first cleaning process or cleaning work). For example, when a predetermined amount of water accumulates in one receiver tank, water is discharged from the other receiver tank. The state is switched to a state in which no water is discharged, and the other receiver tank, which is in an empty state, for example, is switched to a state in which water is discharged from a cleaning hose (second cleaning process or cleaning operation). For example, when the first cleaning process or cleaning work is completed, water accumulated in one receiver tank during the second cleaning process or cleaning work is collected into a recovery tank (first collection process or collection work). Also, for example, when a predetermined amount of water accumulates in the other receiver tank, the other receiver tank switches to a state in which water is not discharged, and, for example, one receiver tank that is empty switches to a state in which water is discharged from the cleaning hose. Switch (first cleaning process or cleaning work). For example, when the second cleaning process or cleaning work is completed, the water accumulated in the other receiver tank during the first cleaning process or cleaning work is collected into a recovery tank (second collection process or work). In this way, for example, the first cleaning step or cleaning operation and the second cleaning step or cleaning operation are repeated alternately as many times as necessary, but for example throughout the entire cleaning step or operation or during the entire cleaning step or cleaning operation. During the cleaning operation, the suction force of the suction device is constantly acting on the receiver tank device.

ここで、回収タンクの容量が大きければ、回収されるべき総量の水を収容することができるが、それでは回収タンクの設置や運搬が煩雑となる。そこで、回収タンクに回収した水を堆積付着物を除去又は分離して排出するための排出構造を設けておくことが好ましい。このように構成すれば、堆積付着物を除去又は分離した水のみを、随時、例えば清掃工程又は清掃作業の実施中に若しくは清掃工程又は清掃作業の実施中から終了後にかけて、例えば下水管などの管内に戻すことができるので、回収タンクの容量を小さくしておくことができる。具体的には、回収タンクの内部を回収槽と水の槽とに区画する隔壁を形成し、隔壁に、回収槽に回収した水をろ過して水の槽に流し込むための窓(例えばメッシュ窓)を設け、水の槽の外壁の下側に排水手段を設けておく。窓は例えば排水手段よりも上側に設ける。 Here, if the capacity of the recovery tank is large, it is possible to accommodate the total amount of water to be recovered, but then the installation and transportation of the recovery tank becomes complicated. Therefore, it is preferable to provide a discharge structure for removing or separating deposits from the water collected in the collection tank and discharging it. With this configuration, only the water from which deposits have been removed or separated can be pumped into a sewer pipe, etc., at any time, for example, during the cleaning process or cleaning work, or during and after the cleaning process or cleaning work is completed. Since it can be returned into the pipe, the capacity of the recovery tank can be kept small. Specifically, a partition wall is formed to divide the inside of the recovery tank into a recovery tank and a water tank, and a window (for example, a mesh window) is installed in the partition wall to filter the water collected in the recovery tank and flow it into the water tank. ), and provide drainage means under the outer wall of the water tank. For example, the window is provided above the drainage means.

本発明の管内清掃方法を用いれば、効率的に下水管等の管内を清掃できる。 By using the method for cleaning inside a pipe of the present invention, the inside of a pipe such as a sewer pipe can be efficiently cleaned.

本発明に係る下水管内清掃方法の実施に用いられる下水管内清掃システムを概略的に示す図である。BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a diagram schematically showing a sewer pipe cleaning system used to carry out a sewer pipe cleaning method according to the present invention. 下水管内清掃ロボットを示す図である。It is a diagram showing a sewer pipe cleaning robot. ホース巻取リール装置、回収タンク及びレシーバタンク装置を示す図である。It is a figure showing a hose winding reel device, a collection tank, and a receiver tank device. 回収タンク及びレシーバタンク装置の斜視図である。It is a perspective view of a recovery tank and a receiver tank device. 回収タンクの斜視図である。FIG. 3 is a perspective view of a recovery tank. 第1の清掃工程、第2の清掃工程、第1の回収工程及び排出工程を説明する図である。It is a figure explaining a 1st cleaning process, a 2nd cleaning process, a 1st collection process, and a discharge process. 第2の清掃工程から切り替わった第1の清掃工程、第2の回収工程及び排出工程を説明する図である。It is a figure explaining the 1st cleaning process, the 2nd collection process, and the discharge process switched from the 2nd cleaning process. 清掃工程及び排出工程の終了状態を説明する図である。It is a figure explaining the completion state of a cleaning process and a discharge process.

まず、図1を参照して本発明に係る下水管内清掃方法の実施に用いられる下水管内清掃システムを概略的に説明する。 First, a sewer pipe cleaning system used to implement the sewer pipe cleaning method according to the present invention will be schematically explained with reference to FIG.

下水管内清掃システム1は、管径800mm以上の大口径の下水管3内を清掃するために下水管3内に配置された下水管内清掃ロボット5と、例えばマンホール7の近傍の道路9に設置された、下水管内清掃ロボット5の清掃ホース11を巻き取っているホース巻取リール装置13と、例えばマンホール7の近傍の道路9に設置された回収タンク15と、この回収タンク15上に載せられるように配置されたレシーバタンク装置17と、道路9に停車している吸引車19(吸収装置)と、を備えている。 A sewer pipe cleaning system 1 includes a sewer pipe cleaning robot 5 placed inside a sewer pipe 3 to clean the inside of a large-diameter sewer pipe 3 having a pipe diameter of 800 mm or more, and a sewer pipe cleaning robot 5 installed on a road 9 near a manhole 7, for example. In addition, there is a hose take-up reel device 13 that winds up the cleaning hose 11 of the sewer pipe cleaning robot 5, a recovery tank 15 installed on the road 9 near the manhole 7, and a hose that can be placed on the recovery tank 15. A receiver tank device 17 is disposed on the road 9, and a suction vehicle 19 (absorption device) is parked on the road 9.

次に、図2乃至図5を参照して下水管内清掃ロボット5、ホース巻取リール装置13、回収タンク15及びレシーバタンク装置17を詳細に説明する。 Next, the sewer pipe cleaning robot 5, the hose take-up reel device 13, the recovery tank 15, and the receiver tank device 17 will be described in detail with reference to FIGS. 2 to 5.

下水管内清掃ロボット5は、図2に拡大して示すように、モータ(図示せず)で駆動される車輪21を備えた本体23と、本体23の先端部に設けられた高圧洗浄水噴射装置(ノズル)25及びテレビカメラ27と、先端側がこの本体23の下側に配置され、後側がマンホール7を通って、道路9に設置されているホース巻取リール装置13(図3参照)に巻き取られている清掃ホース11と、この清掃ホース11の先端部に設けられた吸込口部材31と、本体23の先端部と吸込口部材31との間に設けられた、吸込口部材31の昇降用のシリンダ33と、を備えていて、ホース巻取リール装置13から清掃ホース11を繰り出しながら下水管3内を上流側に向かって自走し(矢印参照)、吸込口部材31内に高圧洗浄水により粉砕等した汚泥等を含んだ下水を集めて吸引する。なお、下水管3内には、例えば車輪21に達する深さの下水35が流れている。また、高圧洗浄水噴射装置25に高圧水を供給する高圧ホース及び高圧車と電源信号ケーブルなどは図示を省略している。 As shown in an enlarged view in FIG. 2, the sewer pipe cleaning robot 5 includes a main body 23 equipped with wheels 21 driven by a motor (not shown), and a high-pressure cleaning water injection device provided at the tip of the main body 23. (nozzle) 25 and a television camera 27, the tip side is arranged below this main body 23, the rear side passes through the manhole 7, and is wound around the hose take-up reel device 13 (see Fig. 3) installed on the road 9. Lifting and lowering of the cleaning hose 11 that has been removed, the suction port member 31 provided at the tip of the cleaning hose 11, and the suction port member 31 provided between the tip of the main body 23 and the suction port member 31. The cleaning hose 11 is self-propelled toward the upstream side within the sewer pipe 3 while being fed out from the hose take-up reel device 13 (see arrow), and is equipped with a cylinder 33 for high-pressure cleaning inside the suction port member 31. Sewage containing sludge, etc. that has been crushed with water is collected and sucked out. Note that sewage 35 flows in the sewage pipe 3 to a depth that reaches, for example, the wheels 21 . Further, a high-pressure hose, a high-pressure vehicle, a power signal cable, and the like that supply high-pressure water to the high-pressure cleaning water injection device 25 are not shown.

ホース巻取リール装置13は、図3に示すように、道路9上に設置された基台37と、この基台37に回転可能に取り付けられた巻取リール39と、を備え、この巻取リール39に清掃ホース11が繰出可能に巻き取られている。 As shown in FIG. 3, the hose take-up reel device 13 includes a base 37 installed on the road 9 and a take-up reel 39 rotatably attached to the base 37. The cleaning hose 11 is wound on a reel 39 so that it can be fed out.

回収タンク15は、図3、図4及び図5に示すように、上面開口のボックス状に形成され、内部は隔壁41によって、汚泥等を含んだ下水を回収する回収槽43と、汚泥等を分離して下水を受けるための下水槽45と、に区分けされている。隔壁41には、下側と上側に一つずつ、回収槽43から下水槽45に下水を流すための窓47、49があけられ、それぞれの窓47、49には取り外し可能な網目部材51、53が取り付けられていて、窓47、49はメッシュ窓として構成されている。下水槽45の外壁の下側には、下水槽45内の下水を排水するための下水戻しパイプ55(排水手段)が設けられ、この下水戻しパイプ55に接続された下水戻しホース57はマンホール7を通って下流側の下水管5に導かれている(図1も参照)。なお、図3の符号59、59は回収タンク15を移動させるための、ストッパ付きのキャスタである。また、図3の符号58は、回収槽43に溜った汚泥等を排出するためのドレン口であり、通常はキャップ60で閉塞されている。 As shown in FIGS. 3, 4, and 5, the collection tank 15 is formed in a box shape with an opening on the top surface, and the inside is separated by a partition wall 41 into a collection tank 43 for collecting sewage containing sludge, etc. It is divided into a sewage tank 45 for separately receiving sewage. The partition wall 41 has windows 47 and 49, one on the lower side and one on the upper side, for flowing sewage from the collection tank 43 to the sewage tank 45, and each window 47 and 49 has a removable mesh member 51, 53 is attached, and the windows 47, 49 are configured as mesh windows. A sewage return pipe 55 (drainage means) for draining the sewage in the sewage tank 45 is provided on the lower side of the outer wall of the sewage tank 45, and a sewage return hose 57 connected to this sewage return pipe 55 is connected to the manhole 7. through which it is led to the downstream sewer pipe 5 (see also Figure 1). Note that reference numerals 59 and 59 in FIG. 3 are casters with stoppers for moving the recovery tank 15. Further, reference numeral 58 in FIG. 3 is a drain port for discharging sludge and the like accumulated in the collection tank 43, and is normally closed with a cap 60.

レシーバタンク装置17は、図3及び図4に示すように、一対のレシーバタンク61、63を有していて、回収タンク15の支持バー65、67上に載せられて支えられている。一対のレシーバタンク61、63の前側の上端部にはそれぞれ、例えばコ字状の吸気パイプ69の一端部71及び他端部73が接続され、この吸気パイプ69の一端側及び他端側にはそれぞれ、一方側吸気用バタフライバルブ(図示せず)及び他方側吸気用バタフライバルブ(図示せず)を収容する一方側吸気バルブ収容部75及び他方側吸気バルブ収容部77が形成されていて、吸気パイプ69の中央部には真空引きパイプ79が接続され、この真空引きパイプ79には吸引車19の吸引タンク(吸引車のレシーバタンク)81(図1参照)から延びる吸引ホース83が連結されている。また、一対のレシーバタンク61、63の後側の上端部にはそれぞれ、例えばコ字状の吸水パイプ85の一端部87及び他端部89が接続され、この吸水パイプ85の一端側及び他端側にはそれぞれ、一方側吸水用バタフライバルブ(図示せず)及び他方側吸水用バタフライバルブ(図示せず)を収容する一方側吸水バルブ収容部91及び他方側吸水バルブ収容部93が形成されていて、吸水パイプ85の中央部には吸上げ用パイプ95が接続され、この吸上げ用パイプ95には、清掃ホース11の後端部と連通するように巻取リール39の軸に一端部が連通された吸上げホース97の他端部が接続されている。なお、図1及び図3に仮想線で示すように、吸上げホース97を用いずに、清掃ホース11の後端側を巻取リール39に1回乃至3回程度巻き付けた状態としておき、清掃ホース11の後端部をレシーバタンク装置17側に延ばして吸上げ用パイプ95に直接接続しておいてもよい。 As shown in FIGS. 3 and 4, the receiver tank device 17 includes a pair of receiver tanks 61 and 63, and is supported by being placed on support bars 65 and 67 of the recovery tank 15. For example, one end 71 and the other end 73 of a U-shaped intake pipe 69 are connected to the front upper ends of the pair of receiver tanks 61 and 63, respectively. One-side intake valve accommodating part 75 and the other-side intake valve accommodating part 77 are formed to accommodate one side intake butterfly valve (not shown) and the other side intake butterfly valve (not shown), respectively. A vacuum pipe 79 is connected to the center of the pipe 69, and a suction hose 83 extending from a suction tank (receiver tank of the suction vehicle) 81 (see FIG. 1) of the suction wheel 19 is connected to this vacuum pipe 79. There is. Furthermore, one end 87 and the other end 89 of a U-shaped water suction pipe 85 are connected to the rear upper ends of the pair of receiver tanks 61 and 63, respectively. A one-side water intake valve accommodating part 91 and an other-side water suction valve accommodating part 93 are formed on the sides, respectively, for accommodating a one-side water suction butterfly valve (not shown) and an other-side water suction butterfly valve (not shown). A suction pipe 95 is connected to the center of the water suction pipe 85, and one end of the suction pipe 95 is connected to the shaft of the take-up reel 39 so as to communicate with the rear end of the cleaning hose 11. The other end of the communicated suction hose 97 is connected. Note that, as shown by imaginary lines in FIGS. 1 and 3, the rear end of the cleaning hose 11 is wound around the take-up reel 39 one to three times without using the suction hose 97. The rear end of the hose 11 may be extended toward the receiver tank device 17 and directly connected to the suction pipe 95.

それぞれのレシーバタンク61、63の内部には、タンク内に吸い上げられた又は吸い込まれた下水の水面が所定高さに達したことを検知する一方側液面センサ99及び他方側液面センサ101が設けられ、それぞれのレシーバタンク61、63の下端開口(排出口)103、105は、一方側開閉シリンダ(図示せず)及び他方側開閉シリンダ(図示せず)の駆動により開閉する一方側ハッチ(一方側の蓋)107及び他方側ハッチ(他方側の蓋)109により閉塞されている。レシーバタンク61、63の下端開口103、105は回収槽43の上側に位置している。 Inside each of the receiver tanks 61 and 63, there is a liquid level sensor 99 on one side and a liquid level sensor 101 on the other side that detect when the water level of the sewage sucked up or sucked into the tank reaches a predetermined height. The lower end openings (discharge ports) 103 and 105 of the respective receiver tanks 61 and 63 are provided with one side hatch (not shown) that opens and closes by driving one side opening/closing cylinder (not shown) and the other side opening/closing cylinder (not shown). It is closed by a hatch on one side (lid) 107 and a hatch on the other side (lid on the other side) 109. Lower end openings 103 and 105 of the receiver tanks 61 and 63 are located above the collection tank 43.

図6乃至図8を参照して下水管内清掃システム1の作動態様を説明する。 The operating mode of the sewer pipe cleaning system 1 will be explained with reference to FIGS. 6 to 8.

まず、吸気パイプ69の一方側吸気バルブ収容部75に収容されている一方側吸気用バタフライバルブ及び吸水パイプ85の一方側吸水バルブ収容部91に収容されている一方側吸水用バタフライバルブを開状態、吸気パイプ69の他方側吸気バルブ収容部77に収容されている他方側吸気用バタフライバルブ及び吸水パイプ85の他方側吸水バルブ収容部93に収容されている他方側吸水用バタフライバルブを閉状態とし、かつ、一対のレシーバタンク61、63のハッチ107、109を閉状態として吸引車19の吸引タンク81内を減圧する。そうすると、吸引ホース83、真空引きパイプ79及び吸気パイプ69を介して一方のレシーバタンク61内が減圧され(図6のaの矢印A参照)、清掃ホース11を介し(図6のaの矢印B参照)、かつ吸水ホース97、吸上げ用パイプ95及び吸水パイプ85を介して(図6のaの矢印C参照)下水管3内の下水(あるいは下水及び洗浄水)が一方のレシーバタンク61内に吸い上げられる(第1の清掃工程又は清掃作業)。なお、吸水ホース97を使用しない場合は、清掃ホース11、吸上げ用パイプ95及び吸水パイプ85を介して下水管3内の下水(あるいは下水及び洗浄水)が一方のレシーバタンク61内に吸い上げられる。したがって、汚泥等の堆積付着物を粉砕等し、粉砕した堆積付着物を含んだ下水を吸い上げて下水管3内を清掃することができる。 First, the one-side intake butterfly valve accommodated in the one-side intake valve accommodating portion 75 of the intake pipe 69 and the one-side water intake butterfly valve accommodated in the one-side water intake valve accommodating portion 91 of the water intake pipe 85 are opened. , the other side intake butterfly valve accommodated in the other side intake valve accommodating portion 77 of the intake pipe 69 and the other side water intake butterfly valve accommodated in the other side water intake valve accommodating portion 93 of the water intake pipe 85 are closed. , and the hatches 107 and 109 of the pair of receiver tanks 61 and 63 are closed to reduce the pressure in the suction tank 81 of the suction wheel 19. Then, the pressure inside one receiver tank 61 is reduced through the suction hose 83, the vacuum pipe 79, and the suction pipe 69 (see arrow A in FIG. ), and the sewage (or sewage and wash water) in the sewage pipe 3 flows into one receiver tank 61 via the water suction hose 97, the suction pipe 95, and the water suction pipe 85 (see arrow C in a of FIG. 6). (first cleaning process or cleaning work). Note that when the water suction hose 97 is not used, the sewage (or sewage and washing water) in the sewer pipe 3 is sucked up into one receiver tank 61 via the cleaning hose 11, the suction pipe 95, and the water suction pipe 85. . Therefore, the interior of the sewer pipe 3 can be cleaned by pulverizing the deposits such as sludge and sucking up the sewage containing the crushed deposits.

一方のレシーバタンク61内に吸い上げられた下水が所定量となり、下水の液面が一方側液面センサ99によって検知されると、一方側液面センサ99から検知信号が出力され、吸気パイプ69の一方側吸気バルブ収容部75に収容されている一方側吸気用バタフライバルブ及び吸水パイプ85の一方側吸水バルブ収容部91に収容されている一方側吸水用バタフライバルブが閉状態に自動的に切り替わり、吸気パイプ69の他方側吸気バルブ収容部77に収容されている他方側吸気用バタフライバルブ及び吸水パイプ85の他方側吸水バルブ収容部89に収容されている他方側吸水用バタフライバルブが開状態に自動的に切り替わる。そうすると、吸引ホース83、真空引きパイプ79及び吸気パイプ69を介して他方のレシーバタンク63内が減圧され(図6のbの矢印D参照)、清掃ホース11を介し(図6のbの矢印E参照)、かつ吸水ホース97、吸上げ用パイプ95及び吸水パイプ85を介して(図6のbの矢印F参照)下水管3内の下水(あるいは下水及び洗浄水)が他方のレシーバタンク63内に吸い上げられる(第2の清掃工程又は清掃作業)。なお、吸水ホース97を使用しない場合は、清掃ホース11、吸上げ用パイプ95及び吸水パイプ85を介して下水管3内の下水(あるいは下水及び洗浄水)が他方のレシーバタンク63内に吸い上げられる。したがって、汚泥等の堆積付着物を粉砕等し、粉砕した堆積付着物を含んだ下水を吸い上げて下水管3内を清掃することができる。また、吸引車19の吸引タンク81内の減圧や下水管内清掃ロボット5の清掃作業を中断することなく継続させて第1の清掃工程又は清掃作業から第2の清掃工程又は清掃作業に移行できる。 When the sewage sucked into one receiver tank 61 reaches a predetermined amount and the liquid level of the sewage is detected by the one side liquid level sensor 99, a detection signal is output from the one side liquid level sensor 99, and the intake pipe 69 The one-side intake butterfly valve accommodated in the one-side intake valve accommodating portion 75 and the one-side water intake butterfly valve accommodated in the one-side water intake valve accommodating portion 91 of the water suction pipe 85 are automatically switched to the closed state; The other side intake butterfly valve accommodated in the other side intake valve accommodating portion 77 of the intake pipe 69 and the other side water intake butterfly valve accommodated in the other side water intake valve accommodating portion 89 of the water intake pipe 85 are automatically opened. It switches to Then, the pressure inside the other receiver tank 63 is reduced through the suction hose 83, the vacuum pipe 79, and the intake pipe 69 (see arrow D in FIG. 6b), and the pressure is reduced through the cleaning hose 11 (arrow E in FIG. 6b). ), and the sewage (or sewage and wash water) in the sewage pipe 3 is transferred to the other receiver tank 63 via the water suction hose 97, the suction pipe 95, and the water suction pipe 85 (see arrow F in FIG. 6b). (second cleaning process or cleaning operation). Note that when the water suction hose 97 is not used, the sewage (or sewage and washing water) in the sewer pipe 3 is sucked up into the other receiver tank 63 via the cleaning hose 11, the suction pipe 95, and the water suction pipe 85. . Therefore, the inside of the sewer pipe 3 can be cleaned by pulverizing the deposits such as sludge and sucking up the sewage containing the crushed deposits. Further, the pressure reduction in the suction tank 81 of the suction wheel 19 and the cleaning work of the sewer pipe cleaning robot 5 can be continued without interruption, and the first cleaning process or cleaning work can be shifted to the second cleaning process or cleaning work.

また、一方側液面センサ99から検知信号が出力されると、一方のレシーバタンク61の一方側ハッチ107が開状態に自動的に変位する(図6のc)。したがって、一方のレシーバタンク61内に引き込まれた下水111は回収タンク15の回収槽43内に流れ込む。一方側ハッチ107は開いてから所定時間経過後に自動的に閉状態に復帰する。回収槽43内に回収された下水111は窓47からろ過されて下水槽45内に流れ込み(符号112参照)、下水戻しパイプ55から下水管3内に流出する(図6のd)。 Furthermore, when a detection signal is output from the one side liquid level sensor 99, the one side hatch 107 of one receiver tank 61 is automatically displaced to the open state (FIG. 6c). Therefore, the sewage 111 drawn into one receiver tank 61 flows into the recovery tank 43 of the recovery tank 15. One side hatch 107 automatically returns to the closed state after a predetermined period of time has passed since opening. The sewage 111 collected in the recovery tank 43 is filtered through the window 47, flows into the sewage tank 45 (see reference numeral 112), and flows out into the sewage pipe 3 from the sewage return pipe 55 (d in FIG. 6).

他方のレシーバタンク63内に吸い上げられた下水が所定量となり、下水の液面が他方側液面センサ101によって検知されると、他方側液面センサ101から検知信号が出力され、吸気パイプ69の他方側吸気バルブ収容部77に収容されている他方側吸気用バタフライバルブ及び吸水パイプ85の他方側吸水バルブ収容部89に収容されている他方側吸水用バタフライバルブが閉状態に自動的に切り替わり、吸気パイプ69の一方側吸気バルブ収容部75に収容されている一方側吸気用バタフライバルブ及び吸水パイプ85の一方側吸水バルブ収容部91に収容されている一方側吸水用バタフライバルブが開状態に自動的に切り替わる。そうすると、吸引ホース83、真空引きパイプ79及び吸気パイプ69を介して一方のレシーバタンク61内が再び減圧され(図7のaの矢印G参照)、清掃ホース11を介し(図7のaの矢印H参照)、かつ吸水ホース97、吸上げ用パイプ95及び吸水パイプ85を介して(図7のaの矢印I参照)下水管3内の下水(あるいは下水及び洗浄水)が再び一方のレシーバタンク61内に吸い上げられる(第1の清掃工程又は清掃作業)。なお、吸水ホース97を使用しない場合は、清掃ホース11、吸上げ用パイプ95及び吸水パイプ85を介して下水管3内の下水(あるいは下水及び洗浄水)が再び一方のレシーバタンク61内に吸い上げられる。したがって、汚泥等の堆積付着物を粉砕等し、粉砕した堆積付着物を含んだ下水を吸い上げて下水管3内を清掃することができる。また、吸引車19の吸引タンク81内の減圧や下水管内清掃ロボット5の清掃作業を中断することなく継続させて第2の清掃工程又は清掃作業から第1の清掃工程又は清掃作業に移行できる。 When the sewage sucked into the other receiver tank 63 reaches a predetermined amount and the liquid level of the sewage is detected by the other side liquid level sensor 101, a detection signal is output from the other side liquid level sensor 101, and the intake pipe 69 is The other side intake butterfly valve accommodated in the other side intake valve accommodating portion 77 and the other side water intake butterfly valve accommodated in the other side water intake valve accommodating portion 89 of the water intake pipe 85 are automatically switched to the closed state, The one-side intake butterfly valve accommodated in the one-side intake valve accommodating portion 75 of the intake pipe 69 and the one-side water intake butterfly valve accommodated in the one-side water intake valve accommodating portion 91 of the water suction pipe 85 are automatically opened. It switches to Then, the pressure inside one of the receiver tanks 61 is reduced again via the suction hose 83, the vacuum pipe 79, and the intake pipe 69 (see arrow G in a in FIG. H), and the sewage (or sewage and wash water) in the sewage pipe 3 is returned to one receiver tank via the water suction hose 97, the suction pipe 95, and the water suction pipe 85 (see arrow I in Figure 7a). 61 (first cleaning step or cleaning operation). Note that when the water suction hose 97 is not used, the sewage (or sewage and washing water) in the sewage pipe 3 is sucked up again into one receiver tank 61 via the cleaning hose 11, the suction pipe 95, and the water suction pipe 85. It will be done. Therefore, the inside of the sewer pipe 3 can be cleaned by pulverizing the deposits such as sludge and sucking up the sewage containing the crushed deposits. Further, the pressure reduction in the suction tank 81 of the suction wheel 19 and the cleaning work of the sewer pipe cleaning robot 5 can be continued without interruption, and the second cleaning process or cleaning work can be shifted to the first cleaning process or cleaning work.

また、他方側液面センサ101から検知信号が出力されると、他方のレシーバタンク63の他方側ハッチ109が開状態に自動的に変位する(図7のb)。したがって、他方のレシーバタンク63内に引き込まれた下水111は回収タンク15の回収槽43内に流れ込む。他方側ハッチ109は開いてから所定時間経過後に自動的に閉状態に復帰する。回収槽43内に回収された下水111は窓47からろ過されて下水槽45内に流れ込み(符号112参照)、下水戻しパイプ55から下水管3内に流出する(図7のc)。 Further, when a detection signal is output from the other side liquid level sensor 101, the other side hatch 109 of the other receiver tank 63 is automatically displaced to the open state (FIG. 7b). Therefore, the sewage 111 drawn into the other receiver tank 63 flows into the recovery tank 43 of the recovery tank 15. The other side hatch 109 automatically returns to the closed state after a predetermined period of time has elapsed after opening. The sewage 111 collected in the collection tank 43 is filtered through the window 47, flows into the sewage tank 45 (see reference numeral 112), and flows out into the sewage pipe 3 from the sewage return pipe 55 (FIG. 7c).

このような一対のレシーバタンク61、63の切り替え作動を繰り返すことにより、下水管内清掃ロボット5の堆積付着物の粉砕等の作業や自走及び吸引車19の吸引タンク81内の減圧を中断することなく清掃作業を継続して行うことができる。 By repeating such a switching operation between the pair of receiver tanks 61 and 63, work such as crushing accumulated deposits by the sewer pipe cleaning robot 5 and depressurization in the suction tank 81 of the self-propelled and suction vehicle 19 can be interrupted. Cleaning work can be continued without any problems.

回収タンク15の回収槽43の収容容量は、それぞれのレシーバタンク61、63の収容容量の2倍乃至6倍とすることができるが、ここでは例えばほぼ4倍となっている。上側の窓49は回収槽43内の下水111の水位が上昇しすぎないようにするためのものである。 The storage capacity of the recovery tank 43 of the recovery tank 15 can be made twice to six times the storage capacity of each of the receiver tanks 61 and 63, but here, for example, it is approximately four times as large. The upper window 49 is provided to prevent the water level of the sewage 111 in the collection tank 43 from rising too much.

すべての清掃工程又は清掃作業が終了すると、あるいはすべての清掃工程又は清掃作業が終了し、排出工程も終了すると、回収槽43内に、回収した下水に含まれていた汚泥等113が溜った状態となっている。したがって、図8に示すように、キャップ60を外したドレン口58に吸収車19の吸引ホース83を接続し、この汚泥等113を吸引タンク81内に吸い込む。ドレン口58に吸引ホース83を接続する際にドレン口58から汚泥等113がこぼれてしまわないように、ドレン口58の内側に取り外し可能な栓(図示せず)を設けておくことが好ましい。そして、ドレン口58に吸引ホース83を接続したらこの栓を外して吸引ホース83で汚泥等113を吸収タンク81内に引き込む。 When all the cleaning processes or cleaning work are completed, or when all the cleaning processes or cleaning work are completed and the discharge process is also completed, the sludge etc. 113 contained in the collected sewage has accumulated in the collection tank 43. It becomes. Therefore, as shown in FIG. 8, the suction hose 83 of the absorption wheel 19 is connected to the drain port 58 with the cap 60 removed, and the sludge, etc. 113 is sucked into the suction tank 81. It is preferable to provide a removable stopper (not shown) inside the drain port 58 to prevent sludge, etc. 113 from spilling from the drain port 58 when the suction hose 83 is connected to the drain port 58. After connecting the suction hose 83 to the drain port 58, the stopper is removed and the sludge, etc. 113 is drawn into the absorption tank 81 by the suction hose 83.

なお、レシーバタンク装置17及び回収タンク装置15を小型に構成し、地上ではなくマンホール内に配置することもできる。 Note that the receiver tank device 17 and the recovery tank device 15 can also be configured in a small size and placed in a manhole instead of on the ground.

1 下水管内清掃システム
3 下水管
5 下水管内清掃ロボット
11 清掃ホース
13 ホース巻取リール装置
15 回収タンク
17 レシーバタンク装置
19 吸引車
41 隔壁
43 回収槽
45 下水槽
47、49 窓
55 下水戻しパイプ
61、63 レシーバタンク
1 Sewage pipe cleaning system 3 Sewage pipe 5 Sewer pipe cleaning robot 11 Cleaning hose 13 Hose take-up reel device 15 Recovery tank 17 Receiver tank device 19 Suction wheel 41 Bulkhead 43 Recovery tank 45 Sewage tank 47, 49 Window 55 Sewage return pipe 61, 63 Receiver tank

Claims (3)

下水管等の管内の汚泥等の堆積付着物を清掃する管内清掃方法であって、
清掃ホースを有し、高圧水等の噴射装置又は発射装置が設けられた、下水管等の管内を走行できる管内清掃ロボットと、前記管内清掃ロボットの前記清掃ホースが接続されるレシーバタンク装置と、前記レシーバタンク装置の排出口からの排出物を受けるように配置される回収タンクと、吸引タンク及びこの吸引タンクに接続された吸引ホースを有し、前記レシーバタンク装置にこの吸引ホースが接続される吸引装置と、を準備する準備工程と、
下水管等の管内に配置された前記管内清掃ロボットの前記噴射装置又は発射装置により粉砕等された管内の堆積付着物を前記清掃ホースで吸い込んで清掃するために、前記レシーバタンク装置を介する前記吸引装置の吸引力により管内の水を前記清掃ホースで吸い込み、吸い込んだ水を前記清掃ホースから前記レシーバタンク装置に吐き出す清掃工程と、
前記レシーバタンク装置に溜まった水を、前記レシーバタンク装置の前記排出口から前記回収タンクに回収する回収工程と、を備え、
前記レシーバタンク装置には一対のレシーバタンクが設けられ、
前記清掃工程は、前記清掃ホースで吸い込んだ水を一方の前記レシーバタンクに吐き出す第1の清掃工程と、前記清掃ホースで吸い込んだ水を他方の前記レシーバタンクに吐き出す第2の清掃工程と、を有し、
前記回収工程は、前記第1の清掃工程の終了後に一方の前記レシーバタンクに溜まった水を一方の前記レシーバタンクの前記排出口から前記回収タンクに回収する第1の回収工程と、前記第2の清掃工程の終了後に他方の前記レシーバタンクに溜まった水を他方の前記レシーバタンクの前記排出口から前記回収タンクに回収する第2の回収工程と、を有していて、
前記回収タンクには、回収した水を堆積付着物を除去又は分離して排出するための排出構造が設けられている、ことを特徴とする管内清掃方法。
A pipe cleaning method for cleaning accumulated deposits such as sludge inside a pipe such as a sewage pipe, the method comprising:
A pipe cleaning robot that has a cleaning hose and is equipped with an injection device or a firing device for high-pressure water or the like and can travel inside a pipe such as a sewer pipe; and a receiver tank device to which the cleaning hose of the pipe cleaning robot is connected; It has a recovery tank arranged to receive the discharge from the discharge port of the receiver tank device, a suction tank, and a suction hose connected to the suction tank, and the suction hose is connected to the receiver tank device. a preparation step for preparing a suction device;
The suction via the receiver tank device is used to suck in and clean deposits inside the pipe that have been pulverized by the injection device or the firing device of the pipe cleaning robot disposed in the pipe such as a sewer pipe, etc., using the cleaning hose. a cleaning step in which water in the pipe is sucked in by the cleaning hose using the suction force of the device, and the sucked water is discharged from the cleaning hose to the receiver tank device;
a recovery step of recovering water accumulated in the receiver tank device from the discharge port of the receiver tank device to the recovery tank,
The receiver tank device is provided with a pair of receiver tanks,
The cleaning process includes a first cleaning process in which water sucked in by the cleaning hose is discharged into one of the receiver tanks, and a second cleaning process in which water sucked in by the cleaning hose is discharged into the other receiver tank. have,
The recovery step includes a first recovery step of recovering water accumulated in one of the receiver tanks from the discharge port of one of the receiver tanks to the recovery tank after the end of the first cleaning step; a second recovery step of recovering water accumulated in the other receiver tank from the outlet of the other receiver tank to the recovery tank after the cleaning step of
A method for cleaning inside a pipe, characterized in that the recovery tank is provided with a discharge structure for removing or separating deposits from the collected water and discharging it.
前記排出構造による回収した水の排出工程は、前記清掃工程の実施中に又は前記清掃工程の実施中から終了後にかけて行われる、ことを特徴とする請求項1記載の管内清掃方法。 2. The method for cleaning an inside of a pipe according to claim 1, wherein the step of discharging the collected water by the discharge structure is performed during the execution of the cleaning step or from during to after the completion of the cleaning step. 前記回収タンクからの水の排出は前記管内に向けて行われる、ことを特徴とする請求項1又は2記載の管内清掃方法。 3. The method for cleaning inside a pipe according to claim 1, wherein water is discharged from the recovery tank into the pipe.
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JP5287796B2 (en) 2010-05-31 2013-09-11 三菱電機株式会社 Manufacturing method of semiconductor device
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