JP7401283B2 - Acceleration sensor - Google Patents

Description

The present invention relates to the structure of an acceleration sensor used for controlling the motion of a robot.

In order to control a robot that performs various movements, each movement is properly recognized by installing an acceleration sensor on each component driven by the robot, and the recognized movements are fed back for proper control. It will be done. Generally, the direction of acceleration detected by an acceleration sensor is determined in advance, so the acceleration sensor is Installed in each part of the robot.

In the technique described in Patent Document 1, a cylindrical acceleration sensor capable of detecting acceleration in the direction of its central axis is used to detect vibrations of the housing. This acceleration sensor is fixed to a flat housing such that the central axis of the acceleration sensor is in the normal direction of the flat housing. The acceleration sensor is fixed to the housing using a screw or the like along the central axis (normal line) direction. Furthermore, cable lines and the like for extracting the output from the acceleration sensor are drawn out parallel to or perpendicular to the central axis so as not to interfere with the housing.

Japanese Patent Application Publication No. 2000-69478

For example, when attaching an acceleration sensor to a robot that uses many joints and makes complex movements, the acceleration sensor described in Patent Document 1 detects movement (vibration) in the normal direction of a simple flat housing. Unlike the configuration, many restrictions are placed on the acceleration sensor or the manner in which it is installed.

For example, it is required that the fixed acceleration sensor itself and the cable line taken out from it do not have an adverse effect on the movement of the robot. For this purpose, the direction in which the cable is pulled out and the direction of the screw that fixes the acceleration sensor are restricted for each location where the acceleration sensor is installed. For this reason, when installing acceleration sensors at many locations, it has become necessary to use acceleration sensors with different specifications for each location. This has made it difficult to standardize acceleration sensors (components), and it has become difficult to make devices in which this robot is used inexpensive.

For this reason, there has been a demand for an acceleration sensor that can be installed in various ways depending on the situation.

The present invention was made in view of the above situation, and an object of the present invention is to obtain an acceleration sensor that can be installed in various ways depending on the situation.

An acceleration sensor according to the present invention is an acceleration sensor that uses a sensor unit that detects acceleration, and includes a main body in which the sensor unit is fixed, and one side of the main body along a first direction. a first support portion extending from the main body toward a side away from the main body along a second direction intersecting the first direction; and a first support portion extending along the first direction in the first support portion. The main body is connected to the first supporting portion on the other side opposite to the one side and on an end side along a third direction intersecting the first direction and the second direction. a second support part extending from the main body toward the other side along the first direction and away from the main body; a cable line that is pulled out toward the other side and takes out the output of the sensor unit to the outside, and a first fixing opening that penetrates the first support part along the first direction; A second fixing opening passing through the second support part along the third direction is provided in each of the second support parts, and the first support part and the second support part are connected to each other. , respectively on both sides of the main body in the second direction, and in the main body, the sensor unit is provided on both sides of the second fixing opening on both sides on a straight line connecting the second fixing openings on both sides when viewed from the third direction. The fixing opening is located between the two fixing openings, and is located midway between the first fixing openings on both sides on a straight line connecting the first fixing openings on both sides when viewed from the first direction.

In this configuration, by selecting and fixing either the first support part or the second support part to the member whose acceleration is to be detected, the mode of the acceleration sensor at the time of fixation is selected. can do. This allows the same acceleration sensor to be fixed in various ways and at various locations.
Moreover, according to this configuration, by inserting a fixing tool (screw) into the first fixing opening or by inserting a fixing tool into the second fixing opening, the first support part or the second support part can be attached to the member. It can be easily fixed against the
Moreover, according to this configuration, in either aspect, the acceleration sensor can be stably and firmly fixed to the member. Furthermore, since vibration of the sensor unit fixed inside the main body can be suppressed, the accuracy of acceleration detection can also be increased.
Further, in this configuration, since the sensor unit is fixed at a position between the two second fixing openings and the two first fixing openings where the fixture is locked when fixing the acceleration sensor to the member, In either of the above embodiments, vibration of the sensor unit relative to the member is suppressed. Therefore, the acceleration detection accuracy can be particularly improved.

Further, on the one side along the first direction, a part of the surface of the one side of at least any two of each of the first supporting parts on both sides and the main body is common to each other. A first plane is configured, and on the end side along the third direction, the ends of at least any two of each of the second supporting parts on both sides and the main body A second plane, which is a common plane and intersects the first plane, may be formed by part of the side surfaces.
According to this configuration, in either aspect, the surface on the acceleration sensor side (first plane, second plane) and the surface of the member can be brought into close contact, so that the acceleration sensor can be attached to the member particularly stably. can be installed.

Further, the main body has a substantially rectangular shape having sides along the first direction, the second direction, and the third direction, and the first direction is the longitudinal direction of the main body. There may be.
In this configuration, since the main body has a simple substantially rectangular shape, it is particularly easy to configure the first plane and the second plane as described above. In addition, in this case, by setting the longitudinal direction of the main body as the first direction, the difference in the state of the acceleration sensor in the two modes described above becomes remarkable, and it becomes particularly easy to use these two modes properly.

Further, a plate-shaped sensor substrate on which the sensor unit is mounted and which extends along the first direction and the second direction may be fixed inside the main body .

Further, the sensor board is formed with two sensor board fixing openings that penetrate the sensor board along the third direction, and the sensor board is configured to engage a fixture in the sensor board fixing openings. The sensor unit may be fixed to the main body by opening the sensor board, and the sensor unit may be fixed at a position intermediate between the two sensor board fixing openings when viewed from the third direction.
In this configuration, the sensor unit is fixed at a position between the two sensor board fixing openings where the fixture is locked when fixing the sensor board to the main body, so vibration of the sensor unit with respect to the main body is suppressed. . Therefore, the acceleration detection accuracy can be particularly improved.

Furthermore, when viewed from the third direction, a direction connecting the two sensor board fixing openings may intersect the first direction and the second direction.
By configuring the sensor board fixing opening in this manner, it is possible to stably fix a small sensor board without requiring wasted space for fixing, especially inside the substantially rectangular main body.

According to the present invention, it is possible to obtain an acceleration sensor that can be installed in various ways depending on the situation.

They are a top view (a), a left side view (b), and a front view (c) showing the configuration of an acceleration sensor according to an embodiment. It is a figure showing the 1st aspect when the acceleration sensor concerning an embodiment is fixed to a member. FIG. 7 is a diagram showing a second aspect when the acceleration sensor according to the embodiment is fixed to a member. 1 is an example of a configuration of a robot in which an acceleration sensor according to an embodiment is fixed and used. FIG. 2 is a perspective view showing the internal structure of the acceleration sensor according to the embodiment.

Hereinafter, embodiments of the present invention will be described in detail using the drawings. FIG. 1 is a top view (a), a left side view (b), and a front view (c) showing the configuration of an acceleration sensor 1 according to this embodiment. Here, as will be described later, since this acceleration sensor 1 can actually be installed in various ways, "top surface", "left side surface", and "front" refer to the directions determined here for convenience. It means that. Here, the x, y, and z axes are set as shown in each figure. The figure is a front view.

The acceleration sensor 1 includes a substantially rectangular main body 10 that includes a sensor substrate on which a sensor unit for actually detecting acceleration is formed, as will be described later. Each side of the substantially rectangular body constituting the main body 10 is parallel to one of the x, y, and z axes. The length of each side of this rectangular body is Lx>Ly>Lz, where the total length along the x direction, the total length along the y direction, and the total length along the z direction are respectively Lx, Ly, and Lz.

As shown in FIGS. 1(a) to (c), this acceleration sensor 1 has a thickness direction in which the x direction is the thickness direction at the positive side (one side) end in the x direction (first direction). A plate-shaped first support portion 11 is provided so as to protrude from the main body 10 toward both ends in the y direction (second direction). Each first support portion 11 is formed with a circular first fixing opening 11A that passes through the first support portion 11 in the x direction. In addition, as shown in FIGS. 1(b) and 1(c), the negative side (the other side) in the x direction and the negative side (end side) in the z direction (third direction) of the first support part 11 A plate-shaped second support part 12 connected to the first support part 11 and having a thickness direction in the z direction is provided so as to protrude from the main body 10 toward both ends in the y direction. A circular second fixing opening 12A is formed in each second support part 12, passing through the second support part 12 in the z direction. In reality, the first support part 11, the second support part 12 adjacent thereto, and the main body 10 are integrated at each end side in the y direction. Since the size relationship of Lx, Ly, and Lz is as described above, the first support portion 11 and the second support portion 12 are formed on one end side in the longitudinal direction of the main body 10.

Further, the cable line 20 from which the output is taken out from the acceleration sensor 1 is taken out from the surface of the main body 10 on the negative side in the x direction toward the negative side in the x direction, as shown in FIGS.

This acceleration sensor 1 can be fixed to a member having a planar surface in two different ways. FIG. 2 shows the first aspect. FIG. 2 is a sectional view ( a) and a cross-sectional view along the y direction (b).

In FIG. 2, the screw 100 is inserted through the two first fixing openings 11A from the negative side to the positive side in the x direction, and the end of the screw 100 on the positive side in the x direction is provided in the member O. By screwing into the hole, the acceleration sensor 1 is fixed. In this acceleration sensor 1, the surface of the first support portion 11 on the positive side in the x direction and the surface of the main body 10 on the positive side in the x direction constitute a common plane (first plane P1). Therefore, the acceleration sensor 1 can be stably fixed to the member O, as shown in FIG. 2, with the surface of the member O set to the first plane P1.

On the other hand, FIG. 3 shows another embodiment. FIG. 3 is a cross-sectional view (a) along the x direction at a location where the screw 100 is located when the acceleration sensor 1 is fixed by fixing the second support portion 12 to the member O using the screw 100, (a) and y FIG. In this case, the angle (posture) of the acceleration sensor 1 with respect to the surface of the member O differs by 90 degrees from the case of FIG.

In FIG. 3, the screw 100 is inserted through the two second fixing openings 12A from the positive side to the negative side in the z direction, and the end of the screw 100 on the negative side in the z direction is provided in the member O. By screwing into the hole, the acceleration sensor 1 is fixed. In this acceleration sensor 1, the surface of the second support portion 12 on the negative side in the z direction and the surface of part of the main body 10 on the negative side in the z direction constitute a common plane (second plane P2). Therefore, the acceleration sensor 1 can be stably fixed to the member O, as shown in FIG. 3, with the surface of the member O set to the second plane P2. The second plane P2 is orthogonal to the first plane P1.

In the embodiment of FIG. 2, the overall height of the acceleration sensor 1 as viewed from the member O is increased, but the width of the portion in contact with the member O can be reduced. On the other hand, in the embodiment of FIG. 3, although the width of the portion of the acceleration sensor 1 in contact with the member O is increased, the overall height as seen from the member O can be reduced. In either embodiment of FIGS. 2 and 3, the cable wire 20 does not interfere with the member O. Therefore, the acceleration of the member O can be detected by the acceleration sensor 1 in either embodiment. At this time, since the sensor unit can detect acceleration along all directions of the x, y, and z axes as described above, it is possible to detect acceleration in the normal direction of the surface of the member O or in the in-plane direction of the surface. Can be detected.

FIG. 4 is a diagram showing a simplified configuration of a robot 200, which is an example in which this acceleration sensor 1 is used. Here, the robot 200 includes rotational axes A1 to A4 and arms 202 to 205 that are driven around each of these rotational axes, as viewed from the base portion 201 side. For example, the rotational movement around the rotation axis A2 is performed by driving a belt 207 that is stretched around a pulley 206 with the rotation axis A2 as the central axis. The pulley 206, the belt 207, and the like are provided inside the arm 202, which has a small cross-sectional area along the longitudinal direction (left-right direction in the figure) and is driven by the rotation axis A1. Further, the rotating shafts A1 and A2 are rotatably supported by bearings 208 and 209, respectively. Although not shown, the interiors of other arms also have similar structures.

When using the above-mentioned acceleration sensor 1 in this robot 200, for example, when fixing it to the arm 202 at the location B in FIG. , is fixed to the arm 202 at the lower side in the figure. In this case, it is preferable that the overall height of the acceleration sensor 1 is set low so as not to interfere with the arm 203 on the upper side. In this case, the overall height of the acceleration sensor 1 viewed from the arm 202 can be reduced by using the arm 202 as the member O in FIG. 3 in the embodiment shown in FIG.

On the other hand, when the acceleration sensor 1 is fixed to the outer circumferential portion of the bearing 208 at the location C (bearing 208) in FIG. 4, for example, the acceleration sensor 1 is fixed to the side of the bearing 208. Even in this case, in order to prevent the acceleration sensor 1 from interfering with the arm 202, it is preferable to reduce the vertical width of the acceleration sensor 1 in FIG. 4. In this case, the width of the acceleration sensor 1 can be reduced by using the bearing 208 side as the member O in FIG. 2 in the embodiment shown in FIG.

In both of the above cases, a common acceleration sensor 1 can be used. At this time, by configuring the cable wire 20 to be taken out from the side where the first support part 11 and the second support part 12 are provided (positive side in the z direction) and the opposite side (negative side in the z direction), the above-mentioned In either case, interference between the arm 204 and the cable line 20 is also suppressed.

Next, the internal structure of the acceleration sensor 1 (main body 10) will be explained. The sensor unit used here is mounted on a sensor board, and by fixing this sensor board inside the main body 10, the sensor unit is fixed to the main body 10. FIG. 5 is a perspective view (a) of the acceleration sensor 1 seen from the positive side in the z direction and a perspective view seen from the negative side in the x direction, showing this state. Here, in particular, the positions of the sensor board 30 and the sensor unit 31 mounted thereon in the main body 10 are described. In addition, in FIG. 5(b), the description of the cable wire 20 is omitted.

The sensor substrate 30 has a plate shape with a surface extending in the x and y directions, and a sensor unit 31 is formed near the center thereof. The sensor unit 31 is known as a MEMS acceleration sensor described in, for example, Japanese Patent Laid-Open No. 2007-107934, and detects acceleration in each of the x, y, and z directions and outputs electrical output. This output is taken out to the outside of the acceleration sensor 1 via the cable line 20. In FIG. 5A, sensor board fixing openings 30A are formed in the sensor board 30 at the lower left and upper right of the sensor unit 31, respectively, which penetrate the sensor board 30 in the z direction. Therefore, similarly to the case where the first support part 11 and the second support part 12 are fixed to the member O in FIG. Can be fixed.

Here, since the acceleration sensor 1 is used to detect the acceleration of the member O to which it is fixed, it is not preferable that the sensor unit 31 vibrates with respect to the member O or the main body 10 in FIG. For this purpose, it is necessary to make it difficult for the sensor unit 31 to generate vibrations in the above structure.

For this reason, in FIG. 5(b) seen from the x direction, the sensor unit 31 is located at an intermediate position between the two first fixing openings 11A, and in FIG. 5(a) seen from the z direction, the sensor unit 31 is , is set to be located at an intermediate position between the two first fixing openings 12A. In the case of FIG. 2, the acceleration sensor 1 is fixed to the member O at two locations with the first fixing opening 11A, and in the case of FIG. 3, it is fixed to the member O at two locations with the second fixing opening 12A. Since the sensor unit 31 is fixed relative to the member O, such a configuration suppresses vibration of the sensor unit 31 relative to the member O in either case.

Further, in FIG. 5A viewed from the z direction, the sensor unit 31 is set to be at a position midway between the two sensor board fixing openings 30A. This also suppresses vibration of the sensor unit 31 relative to the main body 10. At this time, the straight line connecting the two sensor board fixing openings 30A is a direction that intersects both the x direction and the y direction (that is, the direction of the sides forming the substantially rectangular main body 10). Although the sensor board 30 and the sensor unit 31 are small, in order to stably fix the sensor board 30 inside the main body 10, it is preferable to have a wide interval between the two sensor board fixing openings 30A. With this configuration, the small sensor substrate 30 can be stably fixed within the substantially rectangular main body 10. At this time, it becomes unnecessary to provide extra space for fixing.

In the above example, the main body 10 has a rectangular shape, but the shape of the main body 10 is arbitrary. However, at least in both of FIGS. 2 and 3, it is preferable that the surface on the side that comes into contact with the member O has a substantially planar shape in order to stably install the acceleration sensor. In addition, in the above example, Lx (length along the x direction) > Ly (length along the y direction) > Lz (length along the z direction), but such a format can also be set as appropriate. be done. However, in order to make the effect of selectively using the modes shown in FIGS. 2 and 3 noticeable, it is preferable that the amount of protrusion of the acceleration sensor from the surface of the member O at the time of installation is significantly different between FIGS. 2 and 3. . For this purpose, it is particularly important that the x direction (the direction in which the first support part and the second support part are formed on one end side and the cable line is provided on the other end side) is the longitudinal direction of the main body. preferable.

Further, in the above example, the acceleration sensor 1 is attached to the member O by engaging the screw 100 with the first fixing opening 11A in the first support part 11 and the second fixing opening 12A in the second support part 12. Although the first support part and the second support part are fixed to the member, other known methods can also be used. Moreover, as long as the acceleration sensor is stably fixed to the member, the first support part and the second support part may be provided only on one side in the y direction. In this case, the first support part and the second support part can be provided on different sides, but by providing them on the same side and connecting and integrating them, the first support part and the second support part can be provided on different sides. The mechanical strength of the part can be increased. However, from the viewpoint of suppressing the vibration of the sensor unit as described above, the above-mentioned configuration in which the first support part and the second support part are provided on both sides is particularly preferable.

In addition, in the acceleration sensor 1 described above, as shown in FIG. 2, on the positive side in the x direction, the surface of the first support portion 11 and the surface of the main body 10 form a common first plane P1. As shown in FIG. . At this time, the first plane P1 and the second plane P2 are assumed to be perpendicular to each other, but it is clear that they do not need to be strictly orthogonal, and that the same effect can be achieved if they intersect.

In addition, as described above, the surfaces of the first support parts on both sides and the surface of the main body on the positive side in the x direction, and the surfaces of the second support parts on both sides and the surface of the main body on the negative side in the z direction, are all in the first plane. , it is not necessary to configure the second plane, and if the acceleration sensor can be installed in the form shown in FIGS. 2 and 3 by forming the first plane and the second plane by a part of each. good. For this purpose, for example, the first plane may be formed only by a portion of the surfaces of the first supporting parts on both sides, and the surface of the main body may not be on this first plane. Alternatively, the first plane may be formed by a portion of the surface of only one first support portion and a portion of the surface of the main body. The same applies to the second plane. That is, on the positive side in the x direction, the first plane may be formed by a portion of the surfaces on the positive side in the x direction of at least any two of the first support parts on both sides and the main body. . Similarly, on the negative side in the z direction, if the second surface is formed by a portion of the surfaces on the negative side in the z direction of at least any two of the second support parts on both sides and the main body. good. Thereby, the acceleration sensor can be stably installed as in FIGS. 2 and 3.

Further, in the above example, the sensor unit 31 detects acceleration in three directions, x, y, and z, but it is sufficient if at least acceleration in one direction is detected depending on the purpose. However, in order to detect the acceleration in the same direction in the member O in both the embodiments of FIGS. 2 and 3, it is particularly preferable that acceleration in two or more directions is detected.

(Main features of this form)
The features of this embodiment can be briefly summarized as follows.
(1) This acceleration sensor 1 is
A sensor unit 31 that detects acceleration is used, and the sensor unit 31 is fixed inside the main body 10, and on the positive side (one side) of the main body 10 along the x direction (first direction), the sensor unit 31 is fixed in the y direction ( a first support part 11 extending from the main body 10 toward the side away from the main body 10 along the second direction); and a negative side (the other side) of the first support part 11 along the x direction; It is connected to the first support part 11 on the negative side (end side) along the z direction (third direction), and extends from the main body 10 toward the side away from the main body 10 and the negative side along the x direction. It includes a second support part 12 and a cable line 20 that is pulled out from the negative side surface of the main body 10 along the x direction toward the negative side and takes out the output of the sensor unit 31 to the outside.

In this configuration, by selecting and fixing either the first support part 11 or the second support part 12 to the member O whose acceleration is to be detected, the acceleration sensor 1 when fixed The following aspects can be selected. Thereby, the same acceleration sensor 1 can be fixed at various locations in various manners.

(2) The first fixing opening 11A passing through the first support part 11 along the x direction is attached to the first support part 11, and the second fixing opening 12A passing through the second support part 12 along the z direction is attached to the first support part 11. They are provided in the second support section 12, respectively.
According to this configuration, by inserting the fixing tool (screw) 100 into the first fixing opening 11A or by inserting the fixing tool 100 into the second fixing opening 12A, the first support part 11 or the second support part 12 can be easily fixed to the member O.

(3) The first support portion 11 and the second support portion 12 are provided on both sides of the main body 10 in the y direction.
According to this configuration, the acceleration sensor 1 can be stably and firmly fixed to the member O in either embodiment. Furthermore, since vibration of the sensor unit 31 fixed inside the main body 10 can be suppressed, the accuracy of acceleration detection can also be increased.

(4) On the positive side along the x direction, a portion of the surface on the positive side along the x direction of at least any two of each of the first support parts 11 on both sides and the main body 10 has a common A first plane P1 is configured, and on the negative side along the z direction, at least any two of the second support parts 12 on both sides and the main body 10 on the negative side along the z direction. A second plane P2, which is a common plane and intersects the first plane P1, is formed by parts of the surfaces.
According to this configuration, in either aspect, the surface on the acceleration sensor 1 side (the first plane P1, the second plane P2) can be brought into close contact with the surface of the member O, so that the acceleration sensor 1 can be It can be stably installed on the member.

(5) The main body 10 has a substantially rectangular shape with sides along the x direction, the y direction, and the z direction, and the x direction is the longitudinal direction of the main body 10.
In this configuration, since the main body 10 has a simple substantially rectangular shape, it is particularly easy to configure the first plane P1 and the second plane P2 as described above. Furthermore, in this case, by setting the longitudinal direction of the main body 10 to be the x direction, the difference in the state of the acceleration sensor 1 in the above two modes becomes remarkable, so it becomes particularly easy to use these two modes properly.

(6) A plate-shaped sensor substrate 30 on which the sensor unit 31 is mounted and which extends along the x direction and the y direction is fixed inside the main body 10, and the sensor unit 31 is mounted on both sides of the main body 10 when viewed from the z direction. It is fixed at a position intermediate between the second fixing openings 12A and at a position intermediate between the first fixing openings 11A on both sides when viewed from the x direction.
In this configuration, the sensor unit 31 is fixed at a position intermediate between the two second fixing openings 12A and the two first fixing openings 11A where the fixture 100 is locked when fixing the acceleration sensor 1 to the member O. Therefore, in both of the above embodiments, vibration of the sensor unit 31 with respect to the member O is suppressed. Therefore, the acceleration detection accuracy can be particularly improved.

(7) The sensor board 30 is formed with two sensor board fixing openings 30A that penetrate the sensor board 30 along the z direction, and the sensor board 30 engages the fixture 101 with the sensor board fixing openings 30A. The sensor unit 31 is fixed to the main body 10 by doing so, and the sensor unit 31 is fixed at a position between the two sensor board fixing openings 30A when viewed from the z direction.
In this configuration, since the sensor unit 31 is fixed at a position between the two sensor board fixing openings 30A where the fixture 101 is locked when fixing the sensor board 30 to the main body 10, the sensor unit 31 is fixed to the main body 10. 31 vibration is suppressed. Therefore, the acceleration detection accuracy can be particularly improved.

(8) When viewed from the z direction, the direction connecting the two sensor board fixing openings 30A intersects the x direction and the y direction.
By configuring the sensor board fixing opening 30A in this manner, it is possible to stably fix the small sensor board 30 without wasting space for fixing, especially inside the substantially rectangular main body 10. can.

Although the present invention has been described based on the embodiment and its modifications, this embodiment is merely an example, and it is understood that various modifications are possible to the combinations of the respective components, and that such modifications are also included in the scope of the present invention. It will be understood by those skilled in the art that it is within the scope of the invention.

1 Acceleration sensor 10 Main body 11 First support part 11A First fixing opening 12 Second supporting part 12A Second fixing opening 20 Cable line 30 Sensor board 30A Sensor board fixing opening 31 Sensor unit 100, 101 Screw (fixing tool)
200 Robot 201 Base part 202-205 Arm 206 Pulley 207 Belt 208, 209 Bearing O Members A1-A4 Rotating axis P1 First plane P2 Second plane

Claims (6)

An acceleration sensor using a sensor unit that detects acceleration,
a main body in which the sensor unit is fixed;
a first support portion extending from the main body toward a side away from the main body along a second direction intersecting the first direction on one side of the main body along the first direction; ,
the other side of the first support part that is opposite to the one side along the first direction, and an end along a third direction that intersects the first direction and the second direction; a second support part that is connected to the first support part on a side thereof and extends from the main body toward a side away from the main body and the other side along the first direction;
a cable line that is pulled out from a surface on the other side of the main body along the first direction toward the other side and takes out the output of the sensor unit to the outside;
Equipped with
A first fixing opening passing through the first support part along the first direction is provided in the first support part, and a second fixing opening passing through the second support part along the third direction. are respectively provided on the second support part,
The first support portion and the second support portion are provided on both sides of the main body in the second direction,
In the main body, the sensor unit is located at an intermediate position between the second fixing openings on both sides on a straight line connecting the second fixing openings on both sides when viewed from the third direction, and An acceleration sensor characterized in that the acceleration sensor is located at a position midway between the first fixing openings on both sides on a straight line connecting the first fixing openings on both sides when viewed from the direction . On the one side along the first direction, a common plane is formed by a part of the surface of at least any two of the first supporting parts on both sides and the main body on the one side. A first plane is configured,
On the end side along the third direction, parts of the surfaces of at least any two of the second supporting parts on both sides and the main body on the end side are formed in a common plane. The acceleration sensor according to claim 1, further comprising a second plane that is parallel to the first plane and intersects with the first plane. The main body has a substantially rectangular shape having sides along the first direction, the second direction, and the third direction, and the first direction is a longitudinal direction of the main body. The acceleration sensor according to claim 2 , characterized in that: 4. The acceleration sensor according to claim 3 , wherein a plate-shaped sensor substrate on which the sensor unit is mounted and which extends along the first direction and the second direction is fixed inside the main body. . The sensor board is formed with two sensor board fixing openings that penetrate the sensor board along the third direction, and the sensor board is configured to engage a fixture with the sensor board fixing openings. fixed to the body by
The acceleration sensor according to claim 4 , wherein the sensor unit is fixed at a position intermediate between the two sensor board fixing openings when viewed from the third direction. 6. The acceleration sensor according to claim 5 , wherein a direction connecting the two sensor board fixing openings intersects the first direction and the second direction when viewed from the third direction.

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