JP7356141B2 - Fixed unit and fluid control device - Google Patents

Description

FIELD OF THE DISCLOSURE The present disclosure relates to fixation units and fluid control devices.

A fluid control device has been proposed in which a thermal sensor is attached to a casing of a fluid control device using a support member to measure the temperature of a fluid flowing through a fluid passage (for example, see Patent Document 1).

Patent No. 6240661

However, in the fluid control device of Patent Document 1, the distance between the tip of the thermal sensor, which is the measurement point, and the support member is large, so the tip of the thermal sensor may shift due to vibration, making it impossible to accurately measure the temperature. there were.

Therefore, an object of the present disclosure is to provide a fixing unit and a fluid control device that can fix a thermocouple to a fixed object near the tip of the thermocouple.

In order to solve the above object, a fixing unit that is an aspect of the present disclosure includes a first insertion hole and a second insertion hole that is inclined with respect to the first insertion hole and communicates with the first insertion hole. A fixing unit for fixing to a formed object to be fixed, comprising a fixture inserted into the first insertion hole and a pressing member inserted into the second insertion hole, the fixture including: an annular tip portion; an intermediate portion having one end connected to the tip portion and extending along the axial direction of the tip portion; and a middle portion provided at the other end of the intermediate portion and protruding outward in the radial direction of the tip portion. a protruding part, a slit is formed in the inner and/or outer surface of the intermediate part, the tip part and the intermediate part are inserted into the first insertion hole, and the protruding part is inserted into the first insertion hole. Insert the pressing member into the second insertion hole with the thermocouple in contact with the outer surface of the object to be fixed on the outside of the fixture, and insert the pressing member into the second insertion hole so that the tip of the pressing member is inserted into the fixture. The thermocouple is fixed to the object to be fixed by abutting and pressing the intermediate portion of the thermocouple, deforming the slit and deforming the intermediate portion, and pressing the intermediate portion against the thermocouple.

The intermediate portion includes a first intermediate portion and a second intermediate portion that are arranged to face each other and extend along the axial direction, and the slit is formed on an inner surface and/or an outer surface of the first intermediate portion. Good too.

The intermediate portion may have a cylindrical shape.

The intermediate portion may be divided into a plurality of portions in the circumferential direction of the tip portion.

The slit may be formed along the circumferential direction and/or the axial direction of the tip.

A plurality of slits may be formed in the intermediate portion.

A fluid control device according to an aspect of the present disclosure includes a thermocouple, a fixed body having a first insertion hole and a second insertion hole that is inclined with respect to the first insertion hole and communicates with the first insertion hole. , and the above fixed unit.

According to the present disclosure, it is possible to provide a fixing unit and a fluid control device that can fix a thermocouple to a fixed object near the tip of the thermocouple.

FIG. 1 is a perspective view of a fluid control device according to an embodiment of the present disclosure. FIG. 3 is a front view of the fluid control device with the heating device removed. FIG. 2 is a side view of a flow control device equipped with a thermocouple. It is an explanatory view of a fixing tool of a fixing unit. It is an explanatory view of a state where a thermocouple is fixed by a fixing unit. It is an explanatory view of a fixing tool of a fixing unit concerning a modification. It is an explanatory view of a fixing tool of a fixing unit concerning a modification. It is an explanatory view of a fixing tool of a fixing unit concerning a modification.

A fluid control device 1 including a fixing unit 10 according to an embodiment of the present disclosure will be described with reference to the drawings. Note that the fluid control device 1 of this embodiment is a vaporization supply device.

FIG. 1 is a perspective view of a fluid control device 1 according to this embodiment.
FIG. 2 is a front view of the fluid control device 1 with the heating device 7 removed.
FIG. 3 is a side view of the flow rate control device 5 equipped with a thermocouple 9C.

As shown in FIGS. 1 and 2, the fluid control device 1 includes a base plate 2, a vaporizer 3, a first valve 4, a flow rate control device 5, a second valve 6, a heating device 7, and a cooling device 8. , a plurality of thermocouples 9A to 9C, and a fixing unit 10 (FIGS. 3 and 5). A heat insulating plate 2A made of resin is fixed on a base plate 2 made of metal, and the remaining members are provided on the heat insulating plate 2A.

The vaporizer 3 heats and vaporizes the liquid raw material L. The flow rate control device 5 controls the flow rate of the gas G sent out from the vaporizer 3. The first valve 4 is provided on the vaporizer 3 and controls the amount of liquid raw material L supplied to the vaporizer 3 by opening/closing or adjusting the opening of a supply path (not shown).

The flow rate control device 5 is a known flow rate control device called a high temperature compatible pressure type flow rate control device. The flow rate control device 5 includes a valve block body 5A, a housing 5B, and an opening/closing section (not shown).

The valve block body 5A is made of, for example, stainless steel. The valve block body 5A is integrated by connecting an inlet side block 5C, a main body block (not shown), and an outlet side block 5D with bolts. A gas flow path (only the outlet side block 5D is shown) is formed in each block. The inlet block 5C is connected to the vaporizer 3. The outlet block 5D is connected to a block body 5E located downstream thereof. The second valve 6 is connected to the outlet side block 5D and the block body 5E.

As shown in FIG. 3, the outlet side block 5D is formed with a first insertion hole 5g and a second insertion hole 5h that are open to the upper surface 5F. The second insertion hole 5h is inclined toward the measurement point with respect to the first insertion hole 5g and communicates with the first insertion hole 5g. That is, the second insertion hole 5h is inclined so as to approach the first insertion hole 5g (thermocouple 9C) as it goes from the opening to the lower end. The lower end of the first insertion hole 5g extends to the vicinity of the flow path of the outlet side block 5D.

As shown in FIGS. 1 and 2, the housing 5B has a substantially rectangular parallelepiped shape and is installed in the main body block. A plurality of vent holes 5j are formed along the vertical direction on the side surface of the housing 5B.

The heating device 7 includes a plurality of plate heaters 7A and a plurality of heat transfer blocks 7B. The plurality of plate heaters 7A are provided in contact with both sides and the bottom of the vaporizer 3 and the flow rate control device 5. Each heat transfer block body 7B is made of metal (for example, aluminum alloy) and is fixed to a plurality of plate heaters 7A.

The cooling device 8 includes a Peltier element 8A, a heat sink 8B, and a fan 8C.

The Peltier element 8A is fixed onto the heat transfer block 7B via silicone grease. A heat sink 8B made of metal with high thermal conductivity is fixed in contact with the Peltier element 8A. The fan 8C is fixed to the upstream side surface of the housing 5B. The heat generated by the heating device 7 generates an electromotive force in the Peltier element 8A, and the electromotive force rotates the fan 8C. As the fan 8C rotates, air that has passed through the heat sink 8B on the upstream side of the fan 8C is drawn into the housing 5B through the vent 5j on the side surface of the housing 5B.

The tip of the thermocouple 9A is inserted into the heat transfer block 7B. The tip of the thermocouple 9B is inserted into the plate heater 7A located below the vaporizer 3. The tip of the thermocouple 9C is inserted into the first insertion hole 5g of the outlet block 5D. The lower end of the thermocouple 9C is in contact with the bottom surface of the first insertion hole 5g. Further, thermostats 9D to 9F are provided corresponding to each thermocouple 9A to 9C.

Next, the fixed unit 10 will be explained with reference to FIGS. 4 and 5.

FIG. 4 is an explanatory diagram of the fixture 11 of the fixture unit 10. 4(a) is a top view of the fixture 11, FIG. 4(b) is a vertical sectional view of the fixture 11 taken along line IVb-IVb in (a), and FIG. 4(c) is a bottom view of the fixture 11. It is.
FIG. 5 is an explanatory diagram of the thermocouple 9C fixed by the fixing unit 10.

The fixing unit 10 includes a fixture 11 and a bolt 12 that is a pressing member. The fixture 11 is made of, for example, resin (for example, polytetrafluoroethylene) or metal (for example, stainless steel, aluminum alloy), and has an annular tip 13 and one end connected to the tip 13 . It has an intermediate portion 14 that extends along the axial direction of the tip portion 14, and a protrusion portion 15 that is provided at the other end of the intermediate portion 14 and protrudes outward in the radial direction of the tip portion 13.

The tip portion 13 has a tapered surface 13A that tapers toward the tip. The intermediate portion 14 includes a first intermediate portion 14A and a second intermediate portion 14B that are arranged to face each other and extend along the axial direction of the tip portion 13. A slit 14c extending along the circumferential direction of the tip portion 13 is formed in the inner surface 14D of the first intermediate portion 14A.

As shown in FIG. 5, the second insertion hole 5h formed in the outlet side block 5D includes a 2-1 insertion hole 5h1 having a size in which the head of the bolt 12 can fit, and a 2-1 insertion hole 5h1 to a first insertion hole 5h1. 2-2 insertion hole 5h2 extending to insertion hole 5g and into which bolt 12 is inserted. A female thread is formed in a part of the inner peripheral surface of the 2-2 insertion hole 5h2. Thereby, when the bolt 12 is screwed into the female thread of the second-second insertion hole 5h2, the bolt 12 is configured not to protrude from the upper surface 5F of the outlet block 5D.

Then, the tip portion 13 and the intermediate portion 14 are inserted into the first insertion hole 5g, the protrusion 15 contacts the upper surface 5F of the outlet block 5D outside the first insertion hole 5g, and the thermocouple 9C is attached to the fixture 11. In the inserted state, the bolt 12 is inserted (screwed) into the second insertion hole 5h, and the tip of the bolt 12 is brought into contact with and pressed against the first intermediate portion 14A, deforming the slit 14c and forming the first intermediate portion 14A. The thermocouple 9C is fixed to the outlet side block 5D by deforming the portion 14A and pressing the first intermediate portion 14A against the thermocouple 9C. In this way, the thermocouple 9C is fixed to the outlet side block 5D by the fixing unit 10. The outlet side block 5D corresponds to a fixed object.

As described above, the fixing unit 10 of this embodiment includes the fixture 11 inserted into the first insertion hole 5g and the bolt 12 inserted into the second insertion hole 5h, and the fixture 11 has an annular shape. a distal end portion 13; an intermediate portion 14 whose one end is connected to the distal end portion 13 and extends along the axial direction of the distal end portion 13; A slit 14c is formed on the inner surface 14D of the intermediate portion 14. Then, the tip of the bolt 12 is brought into contact with and pressed against the intermediate part 14 of the fixture 11, deforming the slit 14c and deforming the intermediate part 14, and pressing the intermediate part 14 against the thermocouple 9C. Fix it to the exit side block 5D.

Thereby, the thermocouple 9C can be fixed to the outlet side block 5D at a position close to the tip of the thermocouple 9C while limiting the range of motion of the thermocouple 9C without applying a large force to the thermocouple 9C. Therefore, it is possible to suppress the dislocation of the tip of the thermocouple 9C due to vibration, and it is possible to accurately measure the temperature of the fluid. In addition, since the second insertion hole 5h is inclined toward the measurement point with respect to the first insertion hole 5g and communicates with the first insertion hole 5g, the intermediate portion 14 of the fixture 11 is deformed and the thermocouple 9C is pressed against the second insertion hole 5h. At the same time, the thermocouple 9C can be pressed against the measurement point, making it possible to control the temperature more accurately.

Since the intermediate portion 14 is composed of a first intermediate portion 14A and a second intermediate portion 14B that are arranged to face each other and extend along the axial direction of the tip portion 13, the entire intermediate portion 14 is deformed by the bolt 12. This can prevent the force for fixing the thermocouple 9C from decreasing.

Since the slit 14c is formed on the inner surface 14D of the first intermediate portion 14A along the circumferential direction of the tip portion 13, the slit 14c can be easily formed in the first intermediate portion 14A.

This concludes the description of one embodiment of the present disclosure, but the present disclosure is not limited to the above embodiment, and various changes can be made without departing from the spirit of the present disclosure.

FIG. 6 is an explanatory diagram of the fixing tool 11 of the fixing unit 10 according to a modification. 6(a) is a top view of the fixture 11, FIG. 6(b) is a longitudinal sectional view of the fixture 11, and FIG. 6(b) is a bottom view of the fixture 11.

As shown in FIG. 6, the intermediate portion 14 of the fixture 11 may have a cylindrical shape. A plurality of slits 14c are formed along the circumferential direction on the outer surface 14E of the cylindrical intermediate portion 14. The intermediate portion 14 and the protruding portion 15 are divided into a plurality of parts (three in this modification) in the circumferential direction. That is, three radially extending gaps are formed in the intermediate portion 14 and the protruding portion 15. The fixing unit 10 including the fixture 11 of this modification also provides the same effects as the fixing unit 10 of the above embodiment.

As shown in FIG. 7, the slit 14c may be formed along the axial direction of the tip portion 13. Furthermore, the direction in which the slit 14c is formed is not limited to the axial direction and circumferential direction of the tip portion 13. Further, as shown in FIG. 8, slits 14c may be formed on both the inner surface 14D and the outer surface 14E of the intermediate portion 14.

1: Fluid control device 5D: Outlet side block 5F: Top surface 5g: First insertion hole 5h: Second insertion hole 9C: Thermocouple 10: Fixing unit 11: Fixture 12: Bolt 13: Tip part 14: Intermediate part 14A: First intermediate portion 14B: Second intermediate portion 14c: Slit 14D: Inner surface 14E: Outer surface 15: Protrusion

Claims (7)

A fixing unit for fixing a thermocouple to a fixed body in which a first insertion hole and a second insertion hole that is inclined with respect to the first insertion hole and communicates with the first insertion hole are formed,
comprising a fixture inserted into the first insertion hole and a pressing member inserted into the second insertion hole,
The fixture is
an annular tip;
an intermediate portion having one end connected to the tip and extending along the axial direction of the tip;
a protrusion provided at the other end of the intermediate portion and protruding outward in the radial direction of the tip;
A slit is formed on the inner and/or outer surface of the intermediate portion,
The tip portion and the intermediate portion were inserted into the first insertion hole, and the protruding portion abutted against the outer surface of the object to be fixed outside the first insertion hole, causing the thermocouple to be inserted into the fixture. In the state, the pressing member is inserted into the second insertion hole, and the tip of the pressing member is brought into contact with and pressed against the intermediate portion of the fixing device, thereby deforming the slit and deforming the intermediate portion, A fixing unit that fixes the thermocouple to the object to be fixed by pressing the intermediate portion against the thermocouple. The intermediate portion includes a first intermediate portion and a second intermediate portion that are arranged opposite to each other and extend along the axial direction,
The fixing unit according to claim 1, wherein the slit is formed on an inner surface and/or an outer surface of the first intermediate section. The fixing unit according to claim 1, wherein the intermediate portion has a cylindrical shape. The fixing unit according to claim 3, wherein the intermediate part is divided into a plurality of parts in a circumferential direction of the tip part. The fixing unit according to any one of claims 1 to 3, wherein the slit is formed along the circumferential direction and/or the axial direction of the tip portion. The fixing unit according to any one of claims 1 to 4, wherein a plurality of the slits are formed in the intermediate portion. thermocouple and
a fixed body formed with a first insertion hole and a second insertion hole that is inclined with respect to the first insertion hole and communicates with the first insertion hole;
A fluid control device comprising the fixing unit according to any one of claims 1 to 6.

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