JP7324242B2 - Gas purifying device and transport heating device - Google Patents

Description

TECHNICAL FIELD The present invention relates to a gas purifying device and a transfer heating device that are applied to, for example, a reflow device.

A reflow apparatus is used in which a solder composition is supplied in advance to an electronic component or a printed wiring board, and the board is transported into a reflow furnace by a transport conveyor. In the heating zone of the reflow device, hot air is blown against the substrate to melt the solder in the solder composition and solder the electrodes of the substrate and the electronic component. The solder composition includes powdered solder, solvent and flux. Flux contains a base resin such as rosin as a component, removes the oxide film on the surface of the metal to be soldered, prevents re-oxidation due to heating during soldering, and reduces the surface tension of solder to improve wettability. It works as a coating agent to improve the

This flux is liquefied and partially vaporized by heating. Therefore, a gas in which vaporized substances are mixed with air or an inert gas (hereinafter referred to as flux fumes as appropriate) fills the furnace as a heating chamber. Flux fumes tend to adhere to low-temperature parts, liquefy when cooled, and drip from the adhered parts, so they may adhere to the upper surface of the substrate, impairing the performance of the substrate. Become. In addition, the reflow process may be greatly affected by depositing on the part where the temperature drops in the furnace. Therefore, the flux in the reflow furnace is reduced and eliminated.

In the conventional flux reduction method, the flux fumes inside the furnace serving as the heating chamber are led to the flux recovery device outside the furnace, and the flux fumes are cooled in the flux recovery device to liquefy the flux components and recover the flux. It was to return the later gas into the furnace.

For example, in Patent Document 1, hot air containing vaporized flux components circulates inside the main body, projects on the inner surface of the main body in a direction perpendicular to the flow direction of the hot air, and the vaporized substances collide and exchange heat to cool the air. and a flux recovery device provided with projecting members to which the cooled flux components adhere. Further, Patent Document 2 describes an impurity removing means having a cartridge configuration in which a plurality of cooling fins are provided so as to form zigzag passages inside a body cylinder having heat exchange fins on the outer peripheral surface.

JP 2008-246514 A Japanese Patent No. 2928843

Even when a flux recovery device for condensing these flux components is provided, the base resin component such as rosin does not liquefy, so powder stains remain as powder. Problems that powder clogs pipes and panel holes, lowers equipment functionality, requires substrate cleaning due to powder adhesion, causes substrate defects, and increases the particle value in the clean room. was there.

SUMMARY OF THE INVENTION Accordingly, it is an object of the present invention to provide a gas purifying device and a transport heating device that can remove such powder stains and that can be easily cleaned.
An object of the present invention is to provide a transfer heating device.

The present invention provides a cylindrical case and
a gas inlet for introducing into the case a gas obtained by mixing atmospheric air or an inert gas with a substance vaporized by heating;
a gas outlet for discharging gas after purification from the case;
a first plate-like body having an opening through which the gas flowing in the case from the gas inlet to the gas outlet passes;
a first cleaning means that rotates relative to the first plate-like body and cleans at least a part of the substance adhering to at least the surface of the first plate-like body;
a second plate-like body having a surface on which the gas passing through the opening collides;
and a storage section for storing at least part of the substance collected by the second plate-shaped body.
The present invention also provides a conveying/heating apparatus having a heating chamber for heating an object to be heated, and allowing the object to be heated to pass through the heating chamber by means of a conveying device,
A gas in which atmospheric air or an inert gas and a substance vaporized by heating are mixed is supplied to the gas purification device,
The gas purifier is
a cylindrical case, a gas introduction port for introducing into the case a gas in which atmospheric air or an inert gas and a substance vaporized by heating are mixed;
a gas outlet for discharging gas after purification from the case;
a first plate-like body having an opening through which the gas flowing in the case from the gas inlet to the gas outlet passes;
a first cleaning means that rotates relative to the first plate-like body and cleans at least a part of the substance adhering to at least the surface of the first plate-like body;
a second plate-like body having a surface on which the gas passing through the opening collides;
and a storage unit that stores at least part of the substance collected by the second plate-shaped body.

According to at least one embodiment, it is possible to purify the gas by recovering the powder, and to easily clean the dirt of the adhering powder. Note that the effects described here are not necessarily limited, and may be any of the effects described in the present invention. Also, the effects illustrated in the following description should not be construed as limiting the content of the present invention.

FIG. 1 is a schematic diagram showing an outline of a conventional reflow apparatus to which the present invention can be applied. FIG. 2 is a graph showing an example of a temperature profile during reflow. FIG. 3 is a cross-sectional view of an example of a heating furnace body. FIG. 4 is a cross-sectional view of the gas purification device of the first embodiment of the invention. FIG. 5 is a cross-sectional view of the gas purification device when the upper and lower cases are separated. 6A is a view taken along line II-II in FIG. 4, and FIG. 6B is a cross-sectional view taken along line II in FIG. FIG. 7 is a partially enlarged sectional view of the gas purifier. FIG. 8 is a perspective view of part of the gas purifier. 9 is an enlarged perspective view of a portion of FIG. 6; FIG. FIG. 10 is a perspective view of the shaft of the gas purifier and the cleaning fins attached to the shaft. FIG. 11 is a cross-sectional view of a gas purifier according to a second embodiment of the invention. FIG. 12 is a cross-sectional view of the gas purification device when the upper and lower cases are separated. FIG. 13 is a cross-sectional view of the gas purifier with the shaft linearly moved. 14A is a view taken along line II-II in FIG. 11, and FIG. 14B is a cross-sectional view taken along line II in FIG. FIG. 15 is a cross-sectional view of a gas purifier according to a third embodiment of the invention. FIG. 16 is a cross-sectional view of the gas purification device when the upper and lower cases are separated. FIG. 17 is a cross-sectional view of the gas purifier with the shaft linearly moved. FIG. 18 is a schematic diagram for explaining a modification of the invention. 19A and 19B are schematic diagrams for explaining another modified example and still another modified example of the present invention.

Embodiments of the present invention will be described below. In addition, description is given in the following order.
<1. Example of reflow device>
<2. First embodiment of the present invention>
<3. Second embodiment of the present invention>
<4. Third embodiment of the present invention>
<5. Variation>
The embodiment described below is a preferred specific example of the present invention, and is subject to various technically preferable limitations. It shall not be limited to these embodiments unless there is a description to the effect that the

<1. Example of reflow device>
FIG. 1 shows a schematic configuration of a conventional reflow device 101 to which the present invention can be applied. The reflow apparatus 101 includes a reflow furnace 102 and a conveying chain 103 as a means for conveying an object to be heated, such as a printed circuit board (hereinafter referred to as a work) W having surface-mounted electronic components mounted on both sides thereof, through the reflow furnace 102. , rotors (idlers, sprockets, etc.) 105a, 105b, 105c, 105d that define the movement path of the transport chain 103, and an outer plate . Note that FIG. 1 shows only one conveying chain 103 of the two parallel conveying chains.

The reflow furnace 102 is for heating the workpiece W from above and below and cooling it after heating. The conveying chain 103 is one of two conveying chains arranged in parallel with the conveying direction. For example, a roller chain is used as the transport chain 103 . The outer plate 106 is a case for covering the whole.

The workpiece W is carried into the reflow furnace 102 from the carry-in port 107 , then transported at a predetermined speed in the direction of the arrow (from left to right in FIG. 1) by the carrier chain 103 , and finally taken out from the carry-out port 108 . be Although not shown, a work loading device for loading the work W is provided in front of the loading port 107, and a work unloading device for sending out the work W to the outside is arranged in the rear stage of the loading port 108. .

The reflow furnace 102 is sequentially divided into nine zones Z1 to Z9, for example, along the transfer path from the carry-in port 107 to the carry-out port 108, and these zones Z1 to Z9 are arranged inline. Seven zones Z1 to Z7 from the inlet 107 side are heating zones, and two zones Z8 and Z9 on the outlet 108 side are cooling zones. Forced cooling units (not shown) are provided in connection with cooling zones Z8 and Z9. Note that the number of zones is an example, and other numbers of zones may be provided. A plurality of zones Z1 to Z9 control the temperature of the workpiece W according to the temperature profile during reflow.

Each of zones Z1-Z7 has an upper furnace body and a lower furnace body. An upper furnace body and a lower furnace body included in each of zones Z1 to Z7 are provided with blowers (for example, turbofans) and temperature detectors (for example, thermocouples). Cooling zones Z8 and Z9 are also equipped with fans and temperature sensors. M1 and M11 are the blower motors for zone Z1. M2-M9 and M12-M19 also indicate the blower motors for each zone.

The plurality of zones Z1 to Z9 described above control the temperature of the workpiece W according to the temperature profile during reflow. FIG. 2 shows an outline of an example of the temperature profile. The horizontal axis is time, and the vertical axis is the surface temperature of a work W, such as a printed wiring board on which electronic components are mounted. The first section is a temperature raising section R1 where the temperature rises by heating, the next section is a preheating (preheating) section R2 with a substantially constant temperature, the next section is a reflow (main heating) section R3, and the last section The section is the cooling section R4.

The temperature rising section R1 is a period during which the substrate is heated from room temperature to the preheating section R2 (for example, 150.degree. C. to 170.degree. C.). The preheating section R2 is a period for performing isothermal heating, for example, to activate the flux, remove oxide films on the surfaces of the electrodes and solder powder, and eliminate uneven heating of the printed wiring board. The reflow portion R3 (eg, 220° C. to 240° C. at peak temperature) is the period during which the solder melts and the joint is completed. In the reflow portion R3, it is necessary to raise the temperature to a temperature exceeding the melting temperature of the solder. Even after passing through the preheating portion R2, the reflow portion R3 has an uneven temperature rise, so heating to a temperature exceeding the melting temperature of the solder is required. The final cooling section R4 is a period during which the printed wiring board is rapidly cooled and the solder composition is formed. In the case of lead-free solder, the temperature in the reflow section is higher (for example, 240° C. to 260° C.).

In FIG. 2, curve 1 shows an example of the temperature profile of lead-free solder. An example temperature profile for Sn--Pb eutectic solder is shown by curve 2. Since the melting point of lead-free solder is higher than that of eutectic solder, the set temperatures in the preheating section R2 and the reflow section R3 are higher than those of eutectic solder.

In the reflow apparatus shown in FIG. 1, the zones Z1 and Z2 mainly take charge of the temperature control of the temperature raising section R1 in FIG. Zones Z3, Z4 and Z5 are mainly responsible for temperature control of the preheating section R2. Zones Z6 and Z7 take charge of temperature control of the reflow section R3. Zones Z8 and Z9 take charge of temperature control of the cooling section R4.

The configuration of one zone, for example, zone Z5, will be described with reference to FIG. In the gap between the upper furnace body 1 and the lower furnace body 11, a work W having surface-mounted electronic components mounted on both sides of a printed wiring board is placed on a conveyor 21 and conveyed. The interior of the upper furnace body 1 and the interior of the lower furnace body 11 are filled with an atmospheric gas such as nitrogen (N2) gas. The upper furnace body 1 and the lower furnace body 11 blow hot air (heated atmosphere gas) to the work W to heat the work W. As shown in FIG. In addition, you may irradiate infrared rays with a hot air.

The upper furnace body 1 comprises a main heating source 2, a sub-heating source 3, an air blower 4, a heat storage member 5, a hot air circulation duct 6, an opening 7 and the like. The lower furnace body 11 includes, for example, a main heating source 12, a sub-heating source 13, an air blower 14, a heat storage member 15, a hot air circulation duct 16, an opening 17, etc., in substantially the same manner as the lower furnace body 1 described above. there is The blower 4 has a motor M5, a motor mounting plate 8, and rotary vanes 9. As shown in FIG. Similarly, the blower 14 has a motor M15, a motor mounting plate 18, and rotary vanes 19. As shown in FIG. As the air blower, a centrifugal fan such as a turbo fan or a sirocco fan, an axial blower, or the like may be used. Note that the configuration of the furnace body shown in FIG. 3 is an example, and other configurations may be employed.

Hot air is blown against the work W through the openings 7 and 17 . The main heating source 2, the main heating source 12, the sub-heating source 3, and the sub-heating source 13 are composed of electric heaters, for example. The heat storage member 5 and the heat storage member 15 are made of, for example, aluminum, and are formed with a large number of holes through which hot air passes and is blown against the workpiece W. As shown in FIG.

For example, in the upper furnace body 1 , hot air is circulated by the blower 4 . That is, the hot air circulates through the route of (main heating source 2→heat storage member 3→opening 7→work W→hot air circulation duct 6→auxiliary heating source 3→hot air circulation duct 6→blower 4→main heating source 2). do. Hot air circulates in the lower furnace body 11 as well.

Atmospheric gas in zone Z5 is sent through pipe 22 to a flux recovery device (not shown). The flux recovery device removes and recovers the flux in the flux fumes, and generates purified gas in which the flux is reduced or removed. The gas purified by the flux recovery device is introduced into the lower furnace body 11 through the pipe 23 . In the upper furnace body 1 as well, the gas purified by the flux recovery device is introduced.

<2. First embodiment of the present invention>
More specifically, the gas purification device according to the present invention, the powder recovery device is provided after the flux recovery device described above. Furthermore, the gas purifying device according to the present invention may be provided in association with not only the furnace body (heating device) but also the cooling zones Z8 and Z9. Furthermore, the gas purifying device according to the present invention may be provided in association with a buffer chamber partitioned by a metal partition provided on the work unloading side. Alternatively, the gas purifying apparatus according to the present invention may be provided independently to perform both powder recovery and liquefaction recovery without using the liquefaction type flux recovery apparatus.

A gas purifier according to a first embodiment of the present invention will be described with reference to FIGS. 4 to 10. FIG. FIG. 4 is a cross-sectional view of the gas purification device, FIG. 5 is a cross-sectional view of the gas purification device when the upper and lower cases are separated, and FIG. 6B is a cross-sectional view taken along line II of FIG. 4. FIG. 7 is a partially enlarged sectional view of the gas purifier, FIG. 8 is a perspective view of the main part of the gas purifier, and FIG. 9 is a part (encircled portion A) of FIG. Figure 10 is an enlarged perspective view, Figure 10 is a perspective view of the shaft of the gas purifier and the cleaning fins attached to the shaft; The gas purification device is made of metal such as stainless steel and iron.

A shaft 31, which is rotated by a motor M during cleaning, is provided so as to pass through cover plates 34 and 35 of the substantially cylindrical case (FIGS. 4, 5 and 6A). The case consists of an upper case 32 and a lower case 33 . As shown in FIGS. 6B, 8 and 9, the upper case 32 is formed to have a semicircular cross section.

The upper part of the lower case 33 has a box-like shape that fits with the lower part of the upper case 32, and collection containers 36a, 36b, 36c, 36d, and 36e (in particular, individual collected powders) for storing the collected powder on the bottom surface of the lower case 33. When there is no need to distinguish between containers, simply referred to as collection container 36) is detachably connected. In FIG. 8, the upper case 32 and the lower case 33 are indicated by two-dot chain lines, and illustration of the motor M and the collection container 36 is omitted.

A gas introduction opening is formed in the upper portion near the cover plate 34 at one end of the upper case 32, and a cylindrical gas introduction portion 37 extending upward from this opening is provided. A gas discharge opening is formed in the upper portion near the cover plate 35 at the other end of the upper case 32, and a cylindrical gas discharge portion 38 extending upward from this opening is provided. A gas in which atmospheric air or an inert gas and a substance vaporized by heating are mixed, for example, a gas containing a base resin component from a liquefaction type flux recovery device is introduced into the gas introduction portion 37 . The temperature of the gas is, for example, about 100.degree. C. to 120.degree. Then, the gas flows through the case of the gas purifier, and the gas after powder recovery is returned from the gas discharge part 38 to the furnace body in the heating zone and/or the furnace body in the cooling zone.

Nozzle plates 39a, 39b, 39c, 39d, and 39e as first plate-like bodies are provided at approximately equal intervals between the gas introduction opening and the gas discharge opening. In some cases, simply referred to as a nozzle plate 39) is provided (FIGS. 4, 5, 7, 8 and 9). The nozzle plate 39 is a circular plate provided parallel to and substantially perpendicular to the longitudinal direction of the case (the gas traveling direction). Apertures 40a, 40b, 40c, 40d, and 40e (simply referred to as apertures 40 when there is no particular need to distinguish individual apertures) are formed in the center of the nozzle plate 39. As shown in FIG. A shaft 31 passes through the opening 40 . The diameter of the opening 40 is set to, for example, about twice the diameter of the shaft 31 . The gas passes through the area of the opening 40 that is not blocked by the shaft 31 .

An upper semicircular portion of the nozzle plate 39 is formed downward from the inner surface of the upper case 32 , and a lower semicircular portion of the nozzle plate 39 is formed upward from the lower case 33 . Partition walls 41a, 41b, 41c, 41d and 41e (especially when there is no need to distinguish individual partition is simply referred to as a partition wall 41). A lower semicircular portion of the nozzle plate 39 is formed continuously with the partition wall 41 and the upper end. The collected powder is held in a chamber partitioned by the partition wall 41 and further stored in the collection container 36 on the bottom.

Disk-shaped impingement plates 42a, 42b, 42c, 42d, and 42e as second plate-like bodies are arranged downstream of the nozzle plate 39 at predetermined intervals (especially when there is no need to distinguish individual impingement plates). ) is fixed to the shaft 31 . The impingement plate 42 has a diameter larger than the opening 40 of the nozzle plate 39 and a diameter smaller than the diameter of the nozzle plate 39 . Therefore, the gas that has passed through the opening 40 of the nozzle plate 39 collides with the impingement plate 42, passes through the gap between the outer circumference of the impingement plate 42 and the inner surface of the upper case 32, and flows toward the nozzle plate 39 on the downstream side. .

As the gas collides with the collision plate 42, at least part of the substance contained in the gas, for example, a base resin component such as rosin, is gradually deposited in the form of powder. The collision of the gas with the nozzle plate 39 also gradually deposits the base resin component in the gas in the form of powder. The powder falls into the accommodation space of the lower case 33 and is further stored in the collection container 36 .

When the gas purifying device operates for a certain period of time, the powder does not fall downward and adheres to the nozzle plate 39 and the impingement plate 42, and the ability to collect the powder is reduced. Cleaning fins 43a, 43b, 43c, 43d, and 43e as a first cleaning means for cleaning the powder adhering to the nozzle plate 39 (in particular, when there is no need to distinguish individual cleaning fins, only cleaning fins may be used). 43) is fixed to the shaft 31. As shown in FIG.

7 and 9, the cleaning fin 43c has a plate surface substantially orthogonal to the plate surface of the nozzle plate 39, and includes two rectangular plates 44a and 44a fixed to the peripheral surface of the shaft 31. 44b. Slits 45a and 45b are formed from the tips of the rectangular plates 44a and 44b toward the portion fixed to the shaft 31. As shown in FIG. The nozzle plate 39c enters the slits 45a and 45b, and the rectangular plates 44a and 44b intersect the gas collision surface (referred to as the front surface) of the nozzle plate 39c and the back surface of the nozzle plate 39c substantially perpendicularly. The opening width of the slits 45a and 45b is set slightly larger than the plate thickness of the nozzle plate 39c so that the nozzle plate 39 can rotate within the slits 45a and 45b. The slits 45 a and 45 b do not reach the shaft 31 , and base portions 46 a and 46 b are formed at the connecting portions of the rectangular plates 44 a and 44 b and the shaft 31 . Bases 46a and 46b are positioned within opening 40c of nozzle plate 39c. If the cleaning fins 43 have elasticity, the cleaning fins 43 may be brought into contact with the front and back surfaces of the nozzle plate 39 .

In the first embodiment of the present invention described above, as shown in FIG. 10, collision plates 42a to 42e and cleaning fins 43a to 43e are fixed to shaft 31, and when shaft 31 is rotated by motor M, Collision plates 42a-42e and cleaning fins 43a-43e rotate. The motor M is adapted to rotate the shaft 31 during cleaning.

When the shaft 31 is rotated by the motor M, the rectangular plates 44a and 44b forming the cleaning fins 43c are rotated to scrape off powder adhering to both the front and back surfaces of the nozzle plate 39c. Therefore, both surfaces of the nozzle plate 39c are cleaned, and deterioration of the collecting ability is suppressed. In addition, since the bases 46a and 46b are positioned within the opening 40c of the nozzle plate 39c, the bases 46a and 46b can scrape off the powder adhering to the opening 40c, thereby preventing clogging of the opening 40c. can.

The other cleaning fins 43a, 43b, 43d, and 43e also have the same shape as the cleaning fin 43c described above, and the cleaning fins 43a, 43b, 43d, and 43e cover both surfaces of the nozzle plates 39a, 39b, 39d, and 39e, respectively. to clean up. Since the back surface of the nozzle plate 39 on which gas enters is more likely to be covered with powder than the front surface, only the back surface of the nozzle plate 39 may be cleaned.

Powder adheres to the impingement plate 42 as well as the nozzle plate 39 . In particular, the amount of powder adhering to the surface (front side) of the impingement plate 42 with which the gas collides is greater than the amount of powder adhering to the back side thereof. Cleaning rods 47a, 47b, 47c, 47d, and 47e (especially individual cleaning rods) serving as second cleaning means are placed in the vicinity of the surface of the impact plate 42 to scrape off the powder adhering to the surface of the impact plate 42. If there is no need to distinguish between rods, simply referred to as cleaning rod 47) is provided. The cleaning rod 47 has one end fixed to the inner surface of the upper case 32 and the other end extending to the vicinity of the peripheral surface of the shaft 31, and is made of a material such as metal or rubber. When the shaft 31 is rotated by the motor M, the impingement plate 42 is rotated, and the powder adhering to the surface of the impingement plate 42 is scraped off by the cleaning rod 47 . Incidentally, if the cleaning rod 47 has elasticity, the cleaning rod 47 may be brought into contact with the surface of the collision plate 42 . Moreover, both surfaces of the collision plate 42 may be cleaned by the cleaning rod 47 .

According to the first embodiment of the present invention described above, flux fumes or gas after flux recovery is introduced into the case, and the gas collides with the impingement plate 42 through the opening of the nozzle plate 39. The base resin component becomes powder and drops into the lower case 33 . The gas from which the powder has been removed is discharged from the gas discharge port 38 and returned to the reflow device. Therefore, in the reflow equipment, the powder clogs the pipes and panel holes, and the function of the equipment deteriorates. can be prevented from rising. Furthermore, when flux fumes are introduced, the flux fumes can be liquefied and recovered.

<3. Second embodiment of the present invention>
A second embodiment of a gas purifier according to the present invention will be described with reference to FIGS. 11, 12 and 13. FIG. 11 is a cross-sectional view of the gas purification device, FIG. 12 is a cross-sectional view of the gas purification device when the upper and lower cases are separated, and FIG. 13 is a cross-sectional view when the shaft 31 is displaced in the extension direction. 14A is a view taken along line II-II in FIG. 11, and FIG. 14B is a cross-sectional view taken along line II in FIG.

As in the first embodiment, for example, the gas after flux recovery is introduced from the gas introduction part 37 into the cylindrical space formed by the upper case 32 and the lower case 33, and the gas that has passed through the opening of the nozzle plate 39 collides with the collision plate 42, the particle components such as the base resin in the gas are recovered as powder. Collision plates 42a to 42e and cleaning fins 51a, 51b, 51c, 51d, and 51e as nozzle plate cleaning means with respect to shaft 31 (when there is no particular need to distinguish individual cleaning fins, they are simply referred to as cleaning fins 51). ) is fixed.

As in the first embodiment, the cleaning fins 51 are fixed to the shaft 31 and have two rectangular plates whose plate surfaces are close to the back surface of the nozzle plate 39 . Further, the width of the cleaning fin 51 in the vicinity of the fixing portion to the shaft 31 in the lateral direction is made larger than the other portions, and the protruding portion of the base of the cleaning fin 51 enters the opening 40 at the center of the nozzle plate 39. is made as follows. Since the projecting portion is plate-shaped, it does not prevent the gas from passing through the opening 40 . As in the first embodiment, a cleaning rod 47 is provided close to the surface of the impingement plate 42 .

Therefore, when the shaft 31 is rotated by the motor M, the powder adhering to the back surface of the nozzle plate 39 is scraped off by the cleaning fins 51, and the powder adhering to the surface of the impingement plate 42 is removed by the cleaning rod 47. scraped off by At the same time, since the projecting portion of the base of the cleaning fin 51 is inserted into the opening 40 of the nozzle plate 39, it is possible to prevent the opening 40 from being narrowed or clogged with powder.

In the second embodiment described above, the shaft 31 may be linearly movable from the gas introduction side toward the gas discharge side, as indicated by the arrow in FIG. In this case, powder adhering to the cleaning rod 47 can be scraped off.

<4. Third embodiment of the present invention>
A gas purifier according to a third embodiment of the present invention will be described with reference to FIGS. 15, 16 and 17. FIG. 15 is a cross-sectional view of the gas purifier, FIG. 16 is a cross-sectional view of the gas purifier when the upper and lower cases are separated, and FIG. 17 is a cross-sectional view when the shaft 31 is displaced in the extension direction. is.

As in the first and second embodiments, the gas after flux recovery, for example, is introduced from the gas introduction portion 37 into the cylindrical space formed by the upper case 32 and the lower case 33, and the opening of the nozzle plate 39 is introduced. As the passing gas collides with the collision plate 42, the particle components such as the base resin in the gas are recovered as powder. Collision plates 42a', 42b, 42c, 42d, and 42e' with respect to shaft 31 (simply referred to as impingement plates 42' when there is no particular need to distinguish individual impingement plates) and cleaning as nozzle plate cleaning means Fins 52a, 52b, 52c, 52d, 52e (simply referred to as cleaning fins 52 when there is no particular need to distinguish individual cleaning fins) are fixed.

The cleaning fins 52 are fixed to the shaft 31 and have two rectangular plates whose plate surfaces are close to the back surface of the nozzle plate 39 . As in the first embodiment, a cleaning rod 47 is provided adjacent the surface of the impingement plate 42'. The diameter of the impingement plate 42' is smaller than the diameter of the opening 40 of the nozzle plate 39 so that the impingement plate 42' can pass through the opening 40. As shown in FIG.

Therefore, when the shaft 31 is rotated by the motor M, the powder adhering to the back surface of the nozzle plate 39 is scraped off by the cleaning fins 52, and the powder adhering to the surface of the impingement plate 42 is removed by the cleaning rod 47. scraped off by

In the above-described third embodiment, the shaft 31 is linearly movable from the gas introduction side toward the gas discharge side, as indicated by the arrow in FIG. 17, the collision plate 42' passes through the opening 40 of the nozzle plate 39 and the cleaning fins 52 come close to the surface of the nozzle plate 39. As shown in FIG. Since the cleaning fins 52 are plate-shaped and the cleaning rods 47 are rod-shaped, the cleaning fins 52 can pass through the cleaning rods 47 by adjusting the positions of the cleaning fins 52 .

Therefore, when the shaft 31 is rotated by the motor M, the powder adhering to the surface of the nozzle plate 39 is scraped off by the cleaning fins 52, and the powder adhering to the rear surface of the impingement plate 42' is removed by the cleaning rod. Scraped off by 47. At the same time, since the impingement plate 42' passes through the opening 40 of the nozzle plate 39, it is possible to prevent the opening 40 from being narrowed or clogged with powder. Thus, the third embodiment can clean both sides of the nozzle plate 39 as well as the openings 40 .

<5. Modified example of the present invention>
A modification of the present invention will now be described with reference to FIGS. 18, 19A and 19B. For the sake of simplicity, in these figures, the shaft 31 is represented by a dashed line, and the illustration of the cleaning fins, the cleaning rod, and the collection container is omitted. Also, the upper case and the lower case are represented as a cylindrical case 61 .

The structure shown in FIG. 18 is provided with inclined portions 62a and 62b in a shape expanding from the edges of the openings 40a and 40b toward the inner surface of the case 61 on the gas inlet side of the openings 40a and 40b of the nozzle plates 39a and 39b, respectively. is. Ramps 62a and 62b allow gas to be concentrated toward openings 40a and 40b to increase flow velocity. As a result, the powder recovery efficiency can be further increased.

In the modification shown in FIG. 19A, the intervals x1, x2 and x3 of the collision plates 42a, 42b and 42c with respect to the nozzle plates 39a, 39b and 39c provided at a constant interval L are changed. That is, the distance is gradually reduced from the gas inflow side (x1>x2>x3). By doing so, the collision energy gradually increases, and the recovery efficiency can be improved. In other words, it is possible to compensate for the slow flow rate of the gas on the gas discharge side.

In the modification shown in FIG. 19B, the distances between the collision plates 42a, 42b and 42c relative to the nozzle plates 39a, 39b and 39c are kept constant, and the diameters of the openings 40a, 40b and 40c of the nozzle plates 39a, 39b and 39c are gradually reduced. (d1>d2>d3). By doing so, the collision energy gradually increases, and the recovery efficiency can be improved. In other words, it is possible to compensate for the slow flow rate of the gas on the gas discharge side.

Although the embodiments of the present invention have been specifically described above, the present invention is not limited to the above-described embodiments, and various modifications are possible based on the technical idea of the present invention. For example, the nozzle plate cleaning means may be rod-shaped instead of plate-shaped, and the impingement plate cleaning means may be plate-shaped instead of rod-shaped. Moreover, it is also possible to provide collision plate cleaning means close to both surfaces of the collision plate so as to clean both surfaces of the collision plate. Furthermore, one of the nozzle plate cleaning means and the impingement plate cleaning means may be provided. Further, a partition may be provided at the upper part of the lower case at the boundary with the nozzle plate, and the powder may be recovered through an opening formed in the partition. Furthermore, the nozzle plate and the cleaning fins may be in a relatively rotating relationship, and similarly, the impingement plate and the cleaning rod may be in a relatively rotating relationship.

Furthermore, the present invention is not limited to a soldering device such as a reflow device, but also includes a mounting device for bonding surface-mounted components to a printed wiring board with a thermosetting adhesive, and a soldering device on a copper-clad laminate having a pattern formed thereon. It can also be applied to an apparatus for curing the formed solder resist. That is, the present invention can be applied to recovering powder from a gas in which a substance vaporized by heat treatment is mixed with the atmosphere or an inert gas.

In addition, the configurations, methods, processes, shapes, materials, numerical values, etc. mentioned in the above-described embodiments are merely examples, and different configurations, methods, processes, shapes, materials, numerical values, etc. may be used as necessary. may Also, the configurations, methods, steps, shapes, materials, numerical values, etc. of the above-described embodiments can be combined with each other without departing from the gist of the present invention.

M... motor, 1... upper furnace body, 11... lower furnace body, 31... shaft,
32 Upper case, 33 Lower case, 36a to 36e Collection container,
37... Gas introduction part, 38... Gas discharge part, 39a to 39e... Nozzle plate,
40a to 40e... openings, 42a to 42e... collision plates,
43a to 43e... cleaning fins, 47a to 47e... cleaning rods,
51a to 51e cleaning fins, 101 reflow device

Claims (11)

a cylindrical case,
a gas introduction port for introducing into the case a gas obtained by mixing atmospheric air or an inert gas with a substance vaporized by heating;
a gas outlet for discharging the purified gas from the case;
a first plate-like body having an opening through which the gas flowing in the case from the gas inlet toward the gas outlet passes;
a first cleaning means that rotates relative to the first plate-like body and cleans at least part of the substance adhering to at least the surface of the first plate-like body;
a second plate-like body having a surface on which the gas passing through the opening collides;
A gas purifying device comprising: a storage section that stores at least part of the substance collected by the second plate-like body. 2. The gas according to claim 1 , wherein said first cleaning means approaches the surface of said first plate-like body and scrapes off at least part of said substance adhering to said first plate-like body. purifier. 3. The gas purifier according to claim 1 , wherein said first cleaning means cleans said opening of said first plate-like body. 4. A gas purifier according to any one of claims 1 to 3 , wherein said first cleaning means is fixed to a rotating shaft. 5. The gas purifier according to claim 4 , wherein said rotary shaft is linearly movable, and said first cleaning means is fixed to said rotary shaft. 2. A second cleaning means which rotates relative to said second plate-like body and cleans at least part of said substance adhering to at least the surface of said second plate-like body. 6. The gas purifying device according to any one of 1 to 5 . 7. The gas according to claim 6 , wherein said second cleaning means approaches the surface of said second plate-like body and scrapes off at least part of said substance adhering to said second plate-like body. purifier. 8. A gas purifier according to claim 6 , wherein said second cleaning means is provided on said case. 9. The gas purifier according to any one of claims 1 to 8 , wherein said second plate-like body is fixed to a rotary shaft capable of direct movement. 10. The gas purifier according to any one of claims 1 to 9 , wherein the diameter of said opening of said first plate-like body is larger than the diameter of said second plate-like body. A conveying/heating device having a heating chamber for heating an object to be heated, wherein the object to be heated is passed through the heating chamber by a conveying device,
A gas in which atmospheric air or an inert gas and a substance vaporized by heating are mixed is supplied to the gas purification device,
The gas purifier,
a cylindrical case, a gas introduction port for introducing into the case a gas in which atmospheric air or an inert gas and a substance vaporized by heating are mixed;
a gas outlet for discharging the purified gas from the case;
a first plate-like body having an opening through which the gas flowing in the case from the gas inlet toward the gas outlet passes;
a first cleaning means that rotates relative to the first plate-like body and cleans at least part of the substance adhering to at least the surface of the first plate-like body;
a second plate-like body having a surface on which the gas passing through the opening collides;
and a storage unit that stores at least part of the substance collected by the second plate-shaped body.

Images