JP7273362B2 - insertion light source - Google Patents

Description

The present invention comprises a first magnet row in which a large number of magnets are arranged in a row, a first magnet support to which the first magnet row is attached and supported, a large number of magnets arranged in a row, and a second magnet row facing the first magnet row across a gap; a second magnet support to which the second magnet row is attached and supported; and the first magnet support for changing the size of the gap. an insertion light source ( insertion device).

When an electron beam accelerated to near the speed of light in a vacuum is bent in a magnetic field, it emits synchrotron radiation in the tangential direction of the trajectory of the electron beam, which is called synchrotron radiation. Practical use of various technologies by installing a light source that generates such synchrotron radiation in the straight part of an electron storage ring (electron beam storage ring) and taking advantage of its characteristics such as high directivity, high intensity, and high polarization. Research is being conducted to Today's electron storage rings are equipped with multiple insertion sources (undulators), which are bright sources with higher beam currents and smaller beam cross-sections.

As such an insertion light source, for example, an insertion light source disclosed in Non-Patent Document 1 below is known. This insertion light source has a configuration in which a first magnet row in which a large number of magnets are arranged in a row and a second magnet row in which a large number of magnets are arranged in a row face each other across a gap. Since many magnet rows face each other in this manner, a large attractive force acts between them. Due to the action of this attractive force, a large load is generated on the gap drive mechanism, which impairs precise gap drive. ), the initially set magnetic field intensity distribution in the direction of the electron beam is disturbed. As a result, there is a problem that synchrotron radiation having desired characteristics cannot be obtained.

Patent Document 1 below discloses a configuration in which a cancellation spring (compensation spring) mechanism is provided in order to solve such a problem. The magnet support is connected to the connecting beam via a vertical mechanism (connecting shaft), and the size of the gap is changed by moving the connecting beam in the vertical direction. On the other hand, the cancel spring mechanism is also connected to the connecting beam via the connecting portion.

As can be seen from FIG. 3 of Patent Literature 1 below, a connecting portion of a cancel spring mechanism is arranged between a plurality of connecting shafts. This is because they physically interfere with each other. Therefore, once the arrangement of the connecting shaft is determined, the arrangement of the connecting portion and the canceling spring mechanism is inevitably almost determined.

WO2018/143253A1

Winick, Herman; George Brown; Klaus Halbach; John Harris (May 1981).

In the insertion light source having the above configuration, the inventors of the present invention found that the optimum arrangement of the canceling spring mechanism for the arrangement of the connecting shaft can be obtained by simulation. That is, it has been found that there is an optimum position of the cancel spring mechanism that can most suppress the deformation of the connecting beam, depending on the length of the connecting beam, the mounting position of the connecting shaft, the number of cancel spring mechanisms to be arranged, and the like.

However, as described above, since the connecting portion cannot be arranged where the connecting shaft is arranged, the optimum position of the connecting shaft and the optimum position of the canceling spring mechanism may conflict. Therefore, there is a problem that the canceling spring mechanism cannot be arranged at the optimum position and the deformation of the connecting beam cannot be minimized.

The present invention has been made in view of the above circumstances, and an object thereof is to provide an insertion light source capable of optimizing the arrangement of the cancel spring mechanism and minimizing the deformation of the coupled beam.

In order to solve the above problems, the insertion light source according to the present invention includes:
a first magnet row in which a large number of magnets are arranged in a row;
a first magnet support to which the first magnet row is attached and supported;
a second magnet row in which a large number of magnets are arranged in a row and faces the first magnet row across a gap;
a second magnet support to which the second magnet row is attached and supported;
a gap drive mechanism for driving the first magnet support and/or the second magnet support in opposing magnet array directions to vary the size of the gap;
a first connecting beam integrally connected with the first magnet support;
a second connecting beam integrally connected with the second magnet support;
a driving interlocking mechanism for connecting at least one of the first connecting beam and the second connecting beam and the gap driving mechanism;
a canceling spring mechanism acting in a direction to cancel the attractive force acting between the first magnet row and the second magnet row;
a canceling spring mechanism and a spring interlocking mechanism for connecting the connecting beam,
The spring interlocking mechanism includes a first auxiliary frame connected to either one of the first connecting beam and the second connecting beam via a pair of first connecting portions;
a second auxiliary frame connected to the other of the first connecting beam and the second connecting beam via a pair of second connecting portions;
a first spring support frame attached to the first auxiliary frame;
a second spring support frame attached to the second auxiliary frame;
a guide mechanism for guiding the relative movement of the magnet rows of the first spring support frame and the second spring support frame in the facing direction,
The canceling spring mechanism is attached to both the first spring support frame and the second spring support frame, and when the size of the gap is changed, the magnets of the first spring support frame and the second spring support frame The canceling spring mechanism is configured to operate by allowing relative movement in the direction in which the rows face each other,
the first auxiliary frame is capable of arranging a mechanism for connecting the first magnet support and the first connection beam between the pair of first connection parts;
The second auxiliary frame is characterized in that a mechanism for connecting the second magnet support and the second connecting beam can be arranged between the pair of second connecting parts. .

The functions and effects of the inserted light source with this configuration are as follows. A first magnet support is integrally connected to the first connecting beam and a second magnet support is integrally connected to the second connecting beam. The gap driving mechanism changes the size of the gap by driving at least one of the first connecting beam and the second connecting beam. On the other hand, the spring interlocking mechanism has a first spring support frame and a second spring support frame, which are attached to the first auxiliary frame and the second auxiliary frame, respectively. These first and second auxiliary frames are connected to the first and second connection beams through a pair of first and second connection parts, respectively. Also, the first spring support frame and the second spring support frame can be moved in a direction in which the magnet rows face each other relatively by a guide mechanism. With such a configuration, the guide mechanism can receive the moment generated by the operation of the canceling spring mechanism, and the influence on the gap driving mechanism via the first and second connecting portions can be suppressed. . This can prevent the operation of the cancel spring from affecting precise gap driving.

Further, the first auxiliary frame and the second auxiliary frame can secure a space in which a mechanism for connecting the magnet support and the connecting beam can be arranged. As a result, the cancel spring mechanism can be arranged in a place other than the above space, and the optimum arrangement of the cancel spring mechanism can be realized.

The direction in which the magnet rows face each other depends on the manner in which the magnet rows are installed, and includes, for example, a vertical direction, a horizontal direction, and an arbitrary inclined direction. Moreover, the movement in the direction in which the magnet arrays face each other includes both cases in which the magnet arrays approach and separate from each other.

In the present invention, the first auxiliary frame includes a pair of first front and rear plates extending in the front-rear direction, and a first left and right plate extending in the left-right direction for connecting the pair of first front and rear plates,
The second auxiliary frame includes a pair of second front and rear plates extending in the front-rear direction, and a second left and right plate extending in the left-right direction for connecting the pair of second front and rear plates,
The pair of first front and rear plates are connected to the first connecting beam via the first connecting portion,
Preferably, the pair of second front and rear plates are connected to the second connection beam through the second connection portion.

According to the auxiliary frame having such a configuration, a mechanism for connecting the magnet support and the connecting beam can be arranged between the pair of front and rear plates. Also, the spring support frame can be attached to the left and right plates, and the optimum mounting position can be determined.

In the present invention, it is preferable that the first auxiliary frame and the second auxiliary frame have a portal shape in plan view.

By providing the gate shape, it is possible to secure a space for arranging a mechanism for connecting the magnet support and the connecting beam.

In the present invention, the first left and right plates and the second left and right plates are formed with both a mounting hole for mounting the first spring support frame and a mounting hole for mounting the second spring support frame. is preferred.

This makes it possible to manufacture the first left and right plates and the second left and right plates with common members, which contributes to member management and cost reduction.

FIG. 2 is a front perspective view of the insertion light source according to the present embodiment; FIG. 2 is a rear perspective view of the insertion light source according to the present embodiment; Front view of insertion light source according to the present embodiment FIG. 2 is a plan view of the insertion light source according to the present embodiment as seen from above; Side view of insertion light source according to the present embodiment AA sectional view of FIG. BB sectional view of FIG. CC sectional view of FIG. Front perspective view showing the configuration of the spring interlocking mechanism Back side perspective view showing the configuration of the spring interlocking mechanism Side view showing the configuration of the spring interlocking mechanism Rear view showing the configuration of the spring interlocking mechanism FF sectional view of FIG. Plan view seen from above showing the configuration of the spring interlocking mechanism EE sectional view of FIG. DD sectional view of FIG.

A preferred embodiment of an insertion light source according to the present invention will be described with reference to the drawings. FIG. 1 is a front perspective view of an insertion light source according to this embodiment. FIG. 2 is a perspective view of the back side. FIG. 3 is a front view. FIG. 4 is a plan view seen from above. FIG. 5 is a side view seen from the right side. FIG. 6 is a sectional view taken along line AA of FIG. FIG. 7 is a cross-sectional view along BB in FIG. 8 is a cross-sectional view taken along line CC of FIG. 3. FIG. In the following description, for convenience of explanation, the left-right direction of the paper surface of FIG. 3 is the left-right direction of the inserted light source, and the direction orthogonal thereto is the front-rear direction.

As shown in FIG. 5, the insertion light source consists of a first magnet row M1 having a large number of magnets arranged in a row and a second magnet row M2 having a large number of magnets arranged in a row through a gap δ. facing each other. An electron beam passes through this gap space. As the magnet array, for example, in addition to the one cited in Patent Document 1, various configuration examples such as those disclosed in JP-A-2001-143899 and JP-A-2014-13658 are conceivable. Therefore, it is not limited to any particular magnet arrangement.

The first magnet row M1 is supported by the first magnet support 1 and the second magnet row M2 is supported by the second magnet support 2 . For example, the individual magnets forming the first magnet row M1 are coupled to the first magnet support 1 by bolts or the like. The same applies to the second magnet row M2.

Also, the direction in which the first magnet row M1 and the second magnet row M2 face each other is the vertical direction, but the insertion light source is not limited to the above. It may have a combination of directions.

Note that the vacuum chamber 3 is supported on the base 10 by a support 600 . As also shown in FIG. 5, a support member 610 is provided on the support 600 to receive the lower portion of the vacuum chamber 3 . The support 600, the support member 610, and the vacuum chamber 3 are connected by mechanical means (for example, bolts and nuts) (not shown). Further, the support 600 is also coupled to the base 10 by suitable mechanical means (for example, bolts and nuts).

A connecting shaft 100 is attached to the top of the first magnet support 1 , and the upper end of the connecting shaft 100 is connected to a connecting plate 101 . As shown in FIG. 3, 14 connecting shafts 100 are arranged along the horizontal direction, and 14 connecting plates 101 are also arranged. As shown in FIG. 5 and the like, two connecting shafts 100 are arranged along the front-rear direction when viewed from the front side, and these two connecting shafts 100 are connected by one connecting plate 101 . That is, in the example shown in FIGS. 3 and 5, a total of 28 connecting shafts 100 are arranged, and each of the 28 connecting shafts 100 is connected by 14 connecting plates 101 .

A first connection beam 103 is arranged above the connection shaft 100 . The first connecting beam 103 and the connecting plate 101 are connected by a magnet support guide mechanism 102 such as a linear guide. This is provided in order to absorb the change when the length of the first magnet support 1 changes in the horizontal direction due to thermal expansion. Therefore, the influence of thermal expansion is prevented from reaching the gap drive mechanism and the drive interlocking mechanism. As described above, the first magnet support 1 and the first connecting beam 103 are integrally connected. When the first connecting beam 103 moves in the vertical direction (an example of the direction in which the magnet rows face each other; the same applies hereinafter), the first magnet support 1 also moves in the vertical direction together with it. The amount of vertical movement is the same. The mechanism for integrally connecting the first connecting beam 103 and the first magnet support 1 is not limited to the above, and various modifications are applicable.

The second magnet support 2 is also integrally connected to the second connection beam 203 via a connection shaft 200 , a connection plate 201 and a magnet support guide mechanism 202 . Since the configuration is the same as that of the first connecting beam 103, the description thereof is omitted. The same applies to the following description.

As shown in FIG. 1, the first connecting beam 103 has a body frame 103a having a rectangular parallelepiped shape extending in the left-right direction. Furthermore, two support frames 103b are connected to the rear side of the body frame 103a and extend along the front-rear direction when viewed from the front side.

<Gap drive mechanism>
A gap driving mechanism 50 for changing the size of the gap .delta. is provided at the rear upper portion of the insertion light source. The gap driving mechanism 50 is installed on the base 10 via a frame 500. As shown in FIG. As shown in FIG. 2, the frame 500 has a parallelepiped shape with a rectangular cross section in the horizontal direction, and two frames 500 are provided. A mounting plate 501 is provided on the top of the frame 500, and the gap driving mechanism 50 is mounted thereon.

The gap drive mechanism 50 has a drive motor 51 and converters 52 , 53 , 54 . The conversion unit 52 converts the direction of drive transmission by 90°. The conversion unit 53 converts the direction of drive transmission and branches left and right to transmit power. A pair of conversion units 54 are provided on the left and right, and convert horizontal driving to vertical driving. A specific configuration is performed by known mechanical elements such as bevel gears.

The conversion unit 54 converts the drive transmission in the vertical direction. For example, as shown in FIG. 8, the ball screw mechanism 7 having a vertical axis is driven. The ball screw mechanism 7 has a well-known structure and is composed of a screw shaft portion 70 and a nut portion 71 . The upper and lower portions of the screw shaft portion 70 are supported by bearings 70 a , and the bearings 70 a are attached to the frame 500 . The nut portion 71 is attached to the support frame 103b.

By driving the ball screw mechanism 7, the screw shaft portion 70 can rotate and the nut portion 71 can move up and down. Therefore, the first connecting beam 103 can be moved vertically. A support frame 103b is provided to move the first connecting beam 103 in the vertical direction (see FIGS. 1, 8, etc.). The rear side of the support frame 103b seen from the front side is attached to the front side of the frame 500 seen from the front side by two frame guide mechanisms 103c. The front side of the support frame 103 b is attached to the first connecting beam 103 when viewed from the front side.

As described above, the frame guide mechanism 103c and the ball screw mechanism 7 driven by the converting portion 54 correspond to a driving interlocking mechanism for connecting the first connecting beam 103 and the gap driving mechanism 50. FIG. By driving the drive motor 51, the first connecting beam 103 can be moved in the vertical direction, and the first magnet support 1 and the first magnet array M1 can be moved in the vertical direction. That is, the size of the gap δ can be changed.

The second connecting beam 203 located on the lower side can also be vertically moved by a gap driving mechanism (not shown) disposed on the lower side, and its configuration is basically the same as that of the first connecting beam 103 . Since it is the same as the case of , the explanation is omitted. By moving the first connecting beam 103 and the second connecting beam 203 in the vertical direction with the above configuration, the size of the gap δ can be changed. When the first connecting beam 103 and the second connecting beam 203 are moved toward each other, the gap δ becomes smaller, and when they are moved away from each other, the gap δ becomes larger.

<Compensation module>
Next, as a preferred embodiment of the compensating module according to the present invention, of the canceling spring mechanism 40 and the spring interlocking mechanism 30 constituting the compensating module 8, the spring interlocking mechanism 30 will be described first with reference to FIGS. 9 to 15. . FIG. 9 is a front perspective view showing the configuration of the spring interlocking mechanism 30. As shown in FIG. FIG. 10 is a perspective view similarly seen from the rear side. FIG. 11 is a side view. FIG. 12 is a front view. 13 is a cross-sectional view taken along line FF of FIG. 12. FIG. FIG. 14 is a plan view (view from above). 15 is a cross-sectional view taken along the line EE of FIG. 12. FIG. 16 is a cross-sectional view taken along line DD of FIG. 11. FIG. These drawings are drawings for explaining the compensation module, and other mechanisms are omitted.

The spring interlocking mechanism 30 is composed of a first spring support frame 31 and a second spring support frame 32 . The second spring support frame 32 has a pair of second plate portions 320, the thickness direction of which corresponds to the left-right direction. The second plate part 320 is installed in such a manner as to stand a plate vertically. The second plate portion 320 has an upper protruding portion 320a, a lower protruding portion 320b, and a recess 320c formed in the center thereof. As also shown in FIG. 5, the recess 320c has a shape for securing a space in which the vacuum chamber 3 is arranged. As shown in FIGS. 9, 11, etc., the amount of protrusion to the magnet row side of the lower protruding portion 320b and the upper protruding portion 320a is the same.

As shown in FIG. 9 , the pair of second plate portions 320 are coupled by bolts 321 via axial spacing members 322 . The bolts 321 are provided at two locations on the lower side and at two locations on the upper side. The interval between the pair of second plate portions 320 is set by the length of the interval member 322 .

As shown in FIG. 10, the back sides of the pair of second plate portions 320 (the side far from the magnet row) are integrally connected by a connecting plate 34 (corresponding to a plate connecting portion). The connecting plate 34 and the pair of second plate portions 320 are coupled with a large number of bolts 323 .

The first spring support frame 31 has one first plate portion 310 and is installed in a manner as if a plate were erected in the vertical direction. An upper projecting portion 310a is provided on the upper portion of the first plate portion 310 on the side closer to the magnet row (see FIG. 13). The upper protrusion 310 a protrudes by the same amount as the upper protrusion 320 a of the second plate portion 320 . As can be seen from FIG. 12, the first plate portion 310 is arranged so as to be sandwiched between the pair of second plate portions 320, and these are arranged with a predetermined gap therebetween. The first plate portion 310 is positioned right in the middle of the pair of second plate portions 320 .

As shown in FIG. 13 , the lower spacing member 322 is provided at a position that does not interfere with the first plate portion 310 . The upper spacing members 322 (at two locations) are formed with elongated holes 310b that are elongated in the vertical direction so as not to interfere with the first plate portion 310 . The reason why the holes are elongated holes 310b is to allow relative vertical movement of the first plate portion 310 and the second plate portion 320, as will be described later.

As shown in FIG. 13, the mounting plate 35 is arranged on the rear side of the first plate portion 310, which is the far side from the magnet row, and the guide mechanism 36 is arranged between the mounting plate 35 and the connecting plate 34. placed. The mounting plate 35 and the first plate portion 310 are coupled with a large number of bolts 350 . In the following description, this guide mechanism 36 will be referred to as a vertical guide mechanism 36 in order to distinguish it from the guide mechanisms installed in other parts and make it easier to understand. However, this does not mean that the guide mechanism 36 is limited to being installed in the vertical direction.

A linear guide, for example, can be used for the vertical guide mechanism 36. The guide rail 360 is arranged on the connecting plate 34, and the guide block 361 is arranged on the first plate portion 310 (see FIGS. 13 and 15). The arrangement of the guide rail and the guide block may be reversed. A guide mechanism other than a linear guide may be used for the vertical guide mechanism 36 . The vertical guide mechanism 36 corresponds to a guide mechanism for guiding the relative movement of the first spring support frame 31 and the second spring support frame 32 in the vertical direction (where the magnet rows face each other).

By configuring as described above, the first spring support frame 31 can be moved relative to the second spring support frame 32 in the vertical direction.

A spring mounting portion 320 d is provided on the upper end surface of the second plate portion 320 . A compressive force acting portion 310b is provided at the upper end portion of the first plate portion 310. As shown in FIG. The compressive force acting portion 310b is formed in a plate shape having a horizontal surface. A cancel spring 42 is arranged between the spring mounting portion 320d and the compressive force acting portion 310b. Therefore, the compressive force acting portion 310b also functions as a spring mounting portion.

The canceling spring mechanism 40 that constitutes the compensation module 8 together with the spring interlocking mechanism 30 will be described with reference to FIG. A spring mounting plate 41 is provided on the upper surface of the spring mounting portion 320d. A large number of cancel springs 42 are installed on the spring installation plate 41 . Six cancel springs 42 are arranged in the front-rear direction when viewed from the front side. In addition, this arrangement number can be set suitably. As shown in the top plan view of FIG. 4, the compensating modules 8 (the spring interlocking mechanism 30 and the canceling spring mechanism 40) are arranged at four locations in the left-right direction (the traveling direction of the electron beam). It should be noted that the number of arranged light sources can be appropriately set according to the length of the insertion light source in the left-right direction. For one cancel spring mechanism 40, the cancel springs 42 are arranged in two rows (because there is a pair of second plate portions 320), and a total of 12 cancel springs 42 are arranged.

A compression coil spring is used as the cancel spring 42 . A lower end portion of the canceling spring 42 is placed on the spring mounting plate 41 . A pusher 43 is arranged at the upper end of the cancel spring 42 . The pusher 43 is integrally formed with a pressing portion 43a and a bolt portion 43b. The pressing portion 43 a is configured to press the upper end portion of the cancel spring 42 . The bolt portion 43b allows the pusher 43 to be fastened to the compression force acting portion 310b. The pusher 43 can be positioned and fixed by the nut 44 . The initial compression amount of each canceling spring 42 can be adjusted by the pusher 43 . The compressive force applying portion 310b is coupled to the upper end surface of the first plate portion 310 with six bolts 310d.

Next, the connecting structure between the spring interlocking mechanism 30 and the first and second connecting beams 103, 203 will be described. As shown in FIG. 9, the first spring support frame 31 is attached to the first auxiliary frame 91 on the upper side, and the second spring support frame 32 is attached to the second auxiliary frame 92 on the lower side. That is, the first and second spring support frames 31 and 32 are not directly attached to the first and second connecting beams 103 and 203 but are attached via the first and second auxiliary frames 91 and 92 . Since the basic structures of the first auxiliary frame 91 and the second auxiliary frame 92 are the same, the first auxiliary frame 91 will be mainly described.

The first auxiliary frame 91 is composed of a first left and right plate 910 and a pair of first front and rear plates 911 . A pair of first front and rear plates 911 are coupled at left and right ends of the first left and right plates 910 with bolts 912 (see FIG. 10). When these plates are joined together, they have a portal shape when viewed from above. Thereby, a space is formed between the pair of first front and rear plates 911 . The second auxiliary frame 92 is similarly composed of a second left and right plate 920 and a pair of second front and rear plates 921 .

The first left-right plate 910 is formed with three rows of holes in the left-right direction in which five holes are formed in the up-down direction. Note that the number of holes, the number of hole rows, and the like are not limited to those of this embodiment. As shown in FIG. 12, the first plate portion 310 of the first spring support frame 31 is attached to the first left and right plates 910 by bolts 913 (see FIG. 12) using the middle row of holes among the three rows of holes. combined.

The second plate portion 320 of the second spring support frame 32 is coupled with bolts 923 (see FIG. 12) using the left and right hole rows out of the three hole rows. Therefore, the same member can be used for the first left and right plates 910 and the second left and right plates 920 .

A pair of first connecting parts 91A are provided to couple the first auxiliary frame 91 to the first connecting beam 103 . The first connecting portion 91A is provided at the distal end portion of the pair of left and right first front and rear plates 911 . The first connecting portion 91A has a connecting member 914 and a connecting shaft 915 . The connecting member 914 is integrally formed with a shaft hole portion 914a (see FIG. 10) and a flat portion 914b. A flat portion 914b is connected by a bolt 916 from the lower surface side of the first connecting beam 103 .

As shown in FIG. 16, the connecting shaft 915 is inserted into a hole 911a formed in the first front-rear plate 911 so as to allow sliding. The fitting is such that a gap is formed between the size of the outer diameter of the connecting shaft 915 and the hole 914 c of the connecting member 914 . A bolt 917 is positioned below the connecting shaft 915 , and the connecting member 914 and the connecting shaft 915 are fixed by the bolt 917 . The first front-rear plate 911 is not fixed and is allowed to rotate.

A pair of second connecting parts 92A are provided to connect the lower second auxiliary frame 92 to the second connecting beam 203 . The second connecting portion 92A is positioned above the second connecting beam 203 . Since the configuration of the second connecting portion 92A is the same as that of the first connecting portion 91A, the description thereof is omitted.

The spring interlocking mechanism 30 and the first and second connecting beams 103 and 203 are connected with the above configuration. That is, the cancel spring mechanism 40 , the first magnet support 1 and the second magnet support 2 are connected by the spring interlocking mechanism 30 via various members such as the connecting beams 103 and 203 . The first auxiliary frame 91 and the second auxiliary frame 92 are not completely fixed with respect to the first connecting beam 103 and the second connecting beam 203, respectively, but are allowed to rotate.

1 to 8, the compensation module 8 is installed on the rear side of the magnet row (the frame 500 side with respect to the vacuum chamber 3). It may be installed on the front side (opposite side of the frame 500 with respect to the vacuum chamber 3) or may be installed on both sides of the vacuum chamber 3, depending on the magnitude of the spring force required.

As shown in FIG. 5, a connecting shaft 100, a connecting plate 101, a magnet support guide mechanism 102, etc. are provided as a magnet/beam connection mechanism for connecting the first magnet support 1 and the first connection beam 103. ing. The magnet/beam coupling mechanism for coupling the second magnet support 2 and the second coupling beam 203 is similar.

As shown in FIG. 3, the first coupling portion 91A and the second coupling portion 92A are arranged in the space between the magnet/beam coupling mechanisms (see also FIG. 14). However, the cancel spring mechanism 40 is not arranged in that space. If there were no auxiliary frame, the first spring support frame 31 and the second spring support frame 32 would be placed between the adjacent magnet/beam coupling mechanisms, and of course the canceling spring mechanism 40 would also be located in this space. will be placed in However, the placement of the canceling spring mechanism 40 that minimizes deformation of the magnet support is not necessarily between adjacent magnet/beam coupling mechanisms.

The inventors have found that the optimum arrangement of the canceling spring mechanism 40 can be obtained by simulation. That is, depending on the length of the connecting beams 103 and 203, the mounting positions of the connecting shafts 100 and 200, the number of cancel spring mechanisms 40 to be arranged, and the like, the optimal position of the cancel spring mechanism 40 that can most suppress the deformation of the connecting beams 103 and 203 is determined. It turns out there is.

However, as described above, since the first and second connecting parts 91A and 92A cannot be arranged where the magnet/beam connecting mechanisms (connecting shafts 100, 200, etc.) are arranged, the connecting shafts 100, 200 , and the optimum positions of the connecting portions 91A and 92A may compete with each other. Therefore, conventionally, there was a problem that the cancel spring mechanism 40 could not be arranged at the optimum position, and the deformation of the connecting beams 103 and 203 could not be minimized.

However, according to the configuration of the present invention, there is flexibility in where the cancel spring mechanism 40 can be arranged. As shown in FIG. 14 , in this embodiment, the cancel spring mechanism 40 is arranged substantially behind the connecting shaft 100 . Therefore, if there is no auxiliary frame, the cancel spring mechanism 40 cannot be arranged at this position (the position where the arrangement conflicts with the connecting shaft 100 when viewed from the front), but according to the configuration of the present invention, such arrangement is possible. Become.

Also, as can be understood from FIG. 14, the mounting location of the cancel spring mechanism 40 can be changed within the range of the width W of the first left and right plates 910 . The design of the row of holes for attaching the first and second spring support frames 31 and 32 may be changed to the optimum position.

<Gap change operation>
The operation for changing the gap δ will be described with reference to FIGS. 6 to 8. FIG. The gap driving mechanism 50 moves the first connecting beam 103 downward and moves the second connecting beam 203 upward. As a result, the first magnet support 1 and the first magnet row M1 move downward, and the second magnet support 2 and the second magnet row M2 move upward. As a result, the first magnet array M1 and the second magnet array M2 approach each other and the gap δ becomes smaller. At the same time, the attractive force of the magnet also increases.

Further, the downward movement of the first connecting beam 103 causes the first plate portion 310 to move downward, and the upward movement of the second connecting beam 203 causes the second plate portion 320 to move upward. As a result, the cancel spring 42 of the cancel spring mechanism 40 is compressed. As the gap δ becomes smaller, the attractive force of the magnet also becomes larger, and the spring force of the cancel spring mechanism 40 is also made larger accordingly. When the attractive force increases, a force acts to deform the connecting beam that is integrally connected to the magnet support that supports the array of magnets. When the connecting beams are deformed, the magnet support is also deformed, and the size of the gap .delta. is not constant in the left-right direction, which is the direction of the electron beam. Therefore, a cancel spring mechanism 40 is provided to suppress the deformation of the connecting beams due to the attraction force.

As the compressive force of the canceling spring 42 increases, there is a possibility that moments in opposite directions act on the first connecting portion 91A and the second connecting portion 92A. Both of these moments are offset by the vertical guide mechanism 36 . Therefore, a large moment does not act on the first and second connecting portions 91A and 92A. Further, in the present embodiment, the first and second connecting portions 91A and 92A have a connecting structure of the shaft and the fitting hole. The moment is absorbed by the relative rotation. Therefore, it is possible to prevent the moment caused by the cancel spring mechanism 40 from adversely affecting the gap driving mechanism 50 and not to affect the precise gap driving.

Also, in this embodiment, the first and second connecting portions 91A and 92A are provided at the lower end portion of the first connecting beam 103 and the upper end portion of the second connecting beam 203, respectively. That is, both are provided on the side close to the magnet row. Therefore, it is possible to prevent the first spring support frame 31 and the second spring support frame 32 from increasing in size in the vertical direction. Further, the cancel spring mechanism 40 is provided on the rear side of the vacuum chamber 3 when viewed from the front side, and the front side of the vacuum chamber 3 is opened when viewed from the front side. Therefore, it does not interfere with the work of accessing the vacuum chamber 3 and the magnet array from the front side when viewed from the front side.

Regarding each element that constitutes the spring interlocking mechanism 30, the material, manufacturing method, and how the parts are configured, for example, whether they are configured as one component or as a combination of a plurality of components, are appropriately set. can do. For example, it may be integrally formed with one part, or may be formed by connecting a plurality of parts with bolts or the like. The same applies to the configuration of the plate portion, and its shape is not limited to a complete plate (flat plate).

In this specification, there are places where the numbers of parts are described along the drawings, but the numbers are not limited to the numbers in the drawings and can be set as appropriate.

<Another embodiment>
In this embodiment, all the compensation modules 8 are connected using the auxiliary frame. good too.

M1 First magnet row M2 Second magnet row δ Gap 1 First magnet support 2 Second magnet support 3 Vacuum chamber 4 Pedestal 10 Base
100 connecting shaft (magnet support connecting shaft)
101 connection plate (magnet support connection plate)
102 magnet support guide mechanism 103 first connection beam 104 connection plate (beam connection plate)
105 connecting shaft (beam connecting shaft)
200 connecting shaft (magnet support connecting shaft)
201 connection plate (magnet support connection plate)
202 magnet support guide mechanism 203 second connection beam 204 connection plate (beam connection plate)
205 connecting shaft (beam connecting shaft)
30 Spring interlocking mechanism 31 First spring support frame 32 Second spring support frame 33 Connection block 33a Fitting hole 34 Connection plate 36 Guide mechanism (vertical guide mechanism)
310 First plate portion 310a Upper projection portion 310b Lower projection portion 310d Spring mounting portion 310e Projection portion 310f Fitting hole 320 Second plate portion 320a Upper projection portion 320b Compressive force applying portion 320e Projection portion 320f Fitting hole 40 Cancel spring mechanism 42 Cancel spring 43 Pusher 43a Pressing portion 50 Gap driving mechanism 60 Fixed frame 61 Support frame 62 Fixed frame 7 Ball screw mechanism 70 Screw shaft portion 71 Nut portion 8 Compensating module 91 First auxiliary frame 91A First connecting portion 910 First left and right plate 911 First front/rear plate 914 Connection member 915 Connection shaft 92 Second auxiliary frame 92A Second connection portion 920 Second left/right plate 921 Second front/rear plate

Claims (4)

a first magnet row in which a large number of magnets are arranged in a row;
a first magnet support to which the first magnet row is attached and supported;
a second magnet row in which a large number of magnets are arranged in a row and faces the first magnet row across a gap;
a second magnet support to which the second magnet row is attached and supported;
a gap drive mechanism for driving the first magnet support and/or the second magnet support in opposing magnet array directions to vary the size of the gap;
a first connecting beam integrally connected with the first magnet support;
a second connecting beam integrally connected with the second magnet support;
a driving interlocking mechanism for connecting at least one of the first connecting beam and the second connecting beam and the gap driving mechanism;
a canceling spring mechanism acting in a direction to cancel the attractive force acting between the first magnet row and the second magnet row;
a canceling spring mechanism and a spring interlocking mechanism for connecting the connecting beam,
The spring interlocking mechanism includes a first auxiliary frame connected to either one of the first connecting beam and the second connecting beam via a pair of first connecting portions;
a second auxiliary frame connected to the other of the first connecting beam and the second connecting beam via a pair of second connecting portions;
a first spring support frame attached to the first auxiliary frame;
a second spring support frame attached to the second auxiliary frame;
a guide mechanism for guiding the relative movement of the magnet rows of the first spring support frame and the second spring support frame in the facing direction,
The canceling spring mechanism is attached to both the first spring support frame and the second spring support frame, and when the size of the gap is changed, the magnets of the first spring support frame and the second spring support frame The canceling spring mechanism is configured to operate by allowing relative movement in the direction in which the rows face each other,
the first auxiliary frame is capable of arranging a mechanism for connecting the first magnet support and the first connection beam between the pair of first connection parts;
The insertion light source, wherein the second auxiliary frame is capable of disposing a mechanism for connecting the second magnet support and the second connecting beam between the pair of second connecting portions. The first auxiliary frame includes a pair of first front and rear plates and a first left and right plate for connecting the pair of first front and rear plates, and the first spring support frame is attached to the first left and right plates. and
The second auxiliary frame includes a pair of second front and rear plates and a second left and right plate for connecting the pair of second front and rear plates, and the second spring support frame is attached to the second left and right plates. and
The pair of first front and rear plates are connected to the first connecting beam via the first connecting portion,
2. The insertion light source of claim 1, wherein the pair of second front and rear plates are connected to the second connecting beam through the second connecting portion. 3. The insertion light source according to claim 1, wherein the first auxiliary frame and the second auxiliary frame have a portal shape in plan view in a direction in which the magnet rows face each other. The first left and right plates and the second left and right plates are characterized in that both mounting holes for mounting the first spring support frame and mounting holes for mounting the second spring support frame are formed. 3. An insertion light source according to claim 2.

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