JP7259853B2 - Corrosive gas exhaust and sterilizer - Google Patents

Corrosive gas exhaust and sterilizer Download PDF

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JP7259853B2
JP7259853B2 JP2020521766A JP2020521766A JP7259853B2 JP 7259853 B2 JP7259853 B2 JP 7259853B2 JP 2020521766 A JP2020521766 A JP 2020521766A JP 2020521766 A JP2020521766 A JP 2020521766A JP 7259853 B2 JP7259853 B2 JP 7259853B2
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JPWO2019230209A1 (en
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健一 松尾
八寿雄 中村
久幸 波場
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    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L2/00—Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor
    • A61L2/16—Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor using chemical substances
    • A61L2/20—Gaseous substances, e.g. vapours
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
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    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/86—Catalytic processes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J23/00—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00
    • B01J23/16—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of arsenic, antimony, bismuth, vanadium, niobium, tantalum, polonium, chromium, molybdenum, tungsten, manganese, technetium or rhenium
    • B01J23/32—Manganese, technetium or rhenium
    • B01J23/34—Manganese

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Description

本開示は、腐食性ガス排出装置及び滅菌装置に関する。
本願は、２０１８年５月２８日に日本に出願された特願２０１８－１０１８８３号に基づき優先権を主張し、その内容をここに援用する。The present disclosure relates to corrosive gas evacuation devices and sterilizers.
This application claims priority based on Japanese Patent Application No. 2018-101883 filed in Japan on May 28, 2018, the content of which is incorporated herein.

例えば、特許文献１には、オゾンを含む排水からオゾンを除去する脱オゾン装置が開示されている。このような脱オゾン装置は、流路中に設けられる真空ポンプと、真空ポンプの前段に設けられる分解触媒とを備えており、分解触媒によりオゾンが除去された排出ガスを真空ポンプにより吸引する。 For example, Patent Literature 1 discloses a deozonator that removes ozone from wastewater containing ozone. Such a deozonator includes a vacuum pump provided in a flow path and a decomposition catalyst provided upstream of the vacuum pump, and exhaust gas from which ozone has been removed by the decomposition catalyst is sucked by the vacuum pump.

また、特許文献２には、オゾンと過酸化水素とに物品を露出させることにより物品を滅菌する滅菌装置が開示されている。このような滅菌装置は、物品が収容されるチャンバと、チャンバ内を真空とするための真空ポンプと、真空ポンプの後段に設けられるオゾン触媒（分解触媒）とを備えている。 Further, Patent Literature 2 discloses a sterilization apparatus that sterilizes articles by exposing them to ozone and hydrogen peroxide. Such a sterilization apparatus includes a chamber for storing articles, a vacuum pump for evacuating the chamber, and an ozone catalyst (decomposition catalyst) provided after the vacuum pump.

オゾン等の腐食性の強いガス（腐食性ガス）を排出する場合には、上述のように分解触媒を設けることで、腐食性ガスを分解する必要がある。 When discharging a highly corrosive gas (corrosive gas) such as ozone, it is necessary to decompose the corrosive gas by providing a decomposition catalyst as described above.

日本国特開２００４－４１９６３号公報Japanese Patent Application Laid-Open No. 2004-41963 日本国特表２０１３－５０５７９７号公報Japanese special table 2013-505797

しかしながら、特許文献１のように、ポンプの前段に分解触媒を設けると、ポンプの圧力損失が大きくなり、ポンプによる減圧速度に影響を与える。また、特許文献２のように、ポンプの後段に分解触媒を設けると、ポンプは、腐食性ガスと常に接触することになるため、高い耐腐食性が必要となる。 However, when the decomposition catalyst is provided in the front stage of the pump as in Patent Document 1, the pressure loss of the pump increases, which affects the decompression speed of the pump. Moreover, when a decomposition catalyst is provided in the rear stage of the pump as in Patent Document 2, the pump is always in contact with corrosive gas, and thus requires high corrosion resistance.

本開示は、上述する問題点に鑑みてなされたもので、ポンプにおける腐食を防止しつつ、ポンプの圧力損失を軽減することを目的とする。 The present disclosure has been made in view of the problems described above, and an object of the present disclosure is to reduce pressure loss in the pump while preventing corrosion in the pump.

本開示の一態様の腐食性ガス排出装置は、腐食性ガスを排出するポンプと、前記ポンプが設けられる排出配管と、前記排出配管において前記ポンプの前段に設けられると共に前記腐食性ガスと反応する第１分解触媒と、前記排出配管において前記ポンプの後段に設けられると共に前記腐食性ガスと反応する第２分解触媒とを備える。 A corrosive gas discharge device according to one aspect of the present disclosure includes a pump that discharges corrosive gas, a discharge pipe provided with the pump, and a discharge pipe that is provided upstream of the pump in the discharge pipe and reacts with the corrosive gas. A first decomposition catalyst and a second decomposition catalyst provided downstream of the pump in the discharge pipe and reacting with the corrosive gas are provided.

上記一態様の腐食性ガス排出装置において、前記排出配管は、前記第１分解触媒が設けられると共に他の部位よりも流路径の大きな第１チャンバ部を備えていてもよい。 In the corrosive gas discharge device of the aspect described above, the discharge pipe may include a first chamber portion provided with the first decomposition catalyst and having a flow path diameter larger than that of other portions.

上記一態様の腐食性ガス排出装置において、前記第２分解触媒は、前記第１分解触媒よりも高い触媒性能を有していてもよい。 In the corrosive gas discharge device of the aspect described above, the second decomposition catalyst may have higher catalytic performance than the first decomposition catalyst.

上記一態様の腐食性ガス排出装置において、前記第２分解触媒は、前記第１分解触媒よりも体積が大きくてもよい。 In the corrosive gas discharge device of the aspect described above, the second decomposition catalyst may have a larger volume than the first decomposition catalyst.

上記一態様の腐食性ガス排出装置において、前記排出配管は、前記第２分解触媒が設けられると共に他の部位よりも流路径の大きな第２チャンバ部をさらに備えていてもよい。 In the corrosive gas discharge device of the aspect described above, the discharge pipe may further include a second chamber section provided with the second decomposition catalyst and having a larger flow path diameter than other sections.

本開示の一態様の滅菌装置は、腐食性ガスが供給される滅菌庫と、前記滅菌庫に接続される、上記腐食性ガス排出装置とを備える。 A sterilization apparatus according to one aspect of the present disclosure includes a sterilization chamber to which corrosive gas is supplied, and the corrosive gas discharge device connected to the sterilization chamber.

本開示によれば、真空ポンプの前段に設けられる分解触媒の量を減らしつつ、労働環境基準等により定められた腐食性ガスの基準値以下となるように分解触媒を設置できる。したがって、真空ポンプの圧力損失を減少させつつ、労働環境基準等により定められた基準値以下まで腐食性ガス濃度を低下させることができる。 According to the present disclosure, it is possible to reduce the amount of the decomposition catalyst provided in the front stage of the vacuum pump, and install the decomposition catalyst so that the corrosive gas is below the standard value set by the working environment standards and the like. Therefore, it is possible to reduce the corrosive gas concentration to below the reference value determined by the working environment standards or the like while reducing the pressure loss of the vacuum pump.

本開示の一実施形態に係る滅菌装置の全体構成を示す模式図である。1 is a schematic diagram showing the overall configuration of a sterilization device according to an embodiment of the present disclosure; FIG. 本開示の一実施形態に係る滅菌装置が備える排出配管内の構成を示す模式図である。FIG. 4 is a schematic diagram showing the configuration inside the discharge pipe provided in the sterilization device according to the embodiment of the present disclosure; 本開示の一実施形態における滅菌庫内の圧力変化を示すグラフである。Fig. 10 is a graph showing pressure changes in a sterilizer in one embodiment of the present disclosure; 本開示の一実施形態における触媒ブロックの数と、減圧速度との相関を示すグラフである。4 is a graph showing the correlation between the number of catalyst blocks and depressurization rate in one embodiment of the present disclosure.

以下、図面を参照して、本開示に係る滅菌装置の一実施形態について説明する。 An embodiment of a sterilization apparatus according to the present disclosure will be described below with reference to the drawings.

本実施形態の滅菌装置１は、滅菌対象物を滅菌する。図１に示すように、滅菌装置１は、滅菌庫２と、オゾン発生装置３（滅菌ガス発生装置）と、フィルタ４と、排出配管５と、真空ポンプ６と、第１分解触媒７と、第２分解触媒８とを備えている。また、排出配管５と、真空ポンプ６と、第１分解触媒７と、第２分解触媒８とは、本開示における腐食性ガス排出装置に相当する。 The sterilization device 1 of this embodiment sterilizes an object to be sterilized. As shown in FIG. 1, the sterilization apparatus 1 includes a sterilization chamber 2, an ozone generator 3 (sterilization gas generator), a filter 4, a discharge pipe 5, a vacuum pump 6, a first decomposition catalyst 7, and a second decomposition catalyst 8 . Also, the exhaust pipe 5, the vacuum pump 6, the first decomposition catalyst 7, and the second decomposition catalyst 8 correspond to the corrosive gas exhaust device in the present disclosure.

滅菌庫２は、滅菌対象物を収容可能なチャンバであり、内部を密閉可能な扉を備えている。滅菌庫２には、オゾン発生装置３と、排出配管５とが接続されている。また、滅菌庫２の鉛直方向上部には、給気用の開口が設けられており、この開口にフィルタ４が設けられている。 The sterilization chamber 2 is a chamber capable of accommodating objects to be sterilized, and has a door capable of sealing the inside. An ozone generator 3 and a discharge pipe 5 are connected to the sterilization chamber 2 . Further, an opening for air supply is provided in the vertical upper part of the sterilization chamber 2, and a filter 4 is provided in this opening.

オゾン発生装置３は、滅菌庫２に対してオゾンガス（Ｏ３、腐食性ガス）を供給する。オゾン発生装置３は、平行電極と、平行電極間に設けられる誘電体とを備える。オゾン発生装置３は、例えば、無声放電により、酸素ガスまたは乾燥空気から酸素原子を分離し、さらに酸素原子と酸素分子とを結合させることによりオゾンを発生させる。また、オゾン発生装置３と滅菌庫２との間には、バルブが設けられており、不図示の制御装置によりバルブの開閉が制御されている。The ozone generator 3 supplies ozone gas (O 3 , corrosive gas) to the sterilization chamber 2 . The ozone generator 3 includes parallel electrodes and a dielectric provided between the parallel electrodes. The ozone generator 3 separates oxygen atoms from oxygen gas or dry air by, for example, silent discharge, and further combines oxygen atoms and oxygen molecules to generate ozone. A valve is provided between the ozone generator 3 and the sterilization chamber 2, and opening and closing of the valve is controlled by a control device (not shown).

フィルタ４は、滅菌庫２の上部開口の出口に設けられており、外気中の微粒子等を除去する。また、フィルタ４と滅菌庫２との間には、バルブが設けられており、不図示の制御装置によりバルブの開閉が制御されている。 The filter 4 is provided at the outlet of the upper opening of the sterilization chamber 2, and removes fine particles and the like in the outside air. A valve is provided between the filter 4 and the sterilization chamber 2, and opening and closing of the valve is controlled by a control device (not shown).

排出配管５は、滅菌庫２の排出口に接続される。排出配管５は、図２に示すように、第１分解触媒７及び第２分解触媒８を内部に収容している。排出配管５の流路中に真空ポンプ６が接続されている。また、排出配管５は、第１分解触媒７を収容する第１チャンバ部５ａと、第２分解触媒８を収容する第２チャンバ部５ｂとを備えている。第１チャンバ部５ａ及び第２チャンバ部５ｂは、排出配管５における他の流路径（排出配管５における第１チャンバ部５ａ及び第２チャンバ部５ｂ以外の部分の流路径）よりも拡径された部位である。排出配管５は、滅菌庫２に供給されたオゾンを含む排出ガスを外部へと案内する。また、排出配管５には、バルブが設けられており、不図示の制御装置によりバルブの開閉が制御されている。 The discharge pipe 5 is connected to the discharge port of the sterilization chamber 2 . The discharge pipe 5 accommodates a first decomposition catalyst 7 and a second decomposition catalyst 8 therein, as shown in FIG. A vacuum pump 6 is connected to the flow path of the discharge pipe 5 . Also, the discharge pipe 5 includes a first chamber portion 5 a that houses the first decomposition catalyst 7 and a second chamber portion 5 b that houses the second decomposition catalyst 8 . The first chamber portion 5a and the second chamber portion 5b are larger in diameter than the other passage diameters in the discharge pipe 5 (the passage diameters of the portions of the discharge pipe 5 other than the first chamber portion 5a and the second chamber portion 5b). It is a part. The exhaust pipe 5 guides the ozone-containing exhaust gas supplied to the sterilization chamber 2 to the outside. A valve is provided in the discharge pipe 5, and opening and closing of the valve is controlled by a control device (not shown).

真空ポンプ６は、図１及び図２に示すように、排出配管５の流路中に設けられる。真空ポンプ６は、滅菌庫２内の気体を吸引して排出することにより、滅菌庫２内を５０Ｐａ程度まで減圧する。真空ポンプ６は、例えば不図示のオイルミストトラップを備える油回転ポンプである。 The vacuum pump 6 is provided in the flow path of the discharge pipe 5, as shown in FIGS. The vacuum pump 6 reduces the pressure in the sterilization chamber 2 to about 50 Pa by sucking and discharging the gas in the sterilization chamber 2 . The vacuum pump 6 is, for example, an oil rotary pump provided with an oil mist trap (not shown).

第１分解触媒７及び第２分解触媒８はそれぞれ、図２に示すように、二酸化マンガンを含むハニカム構造型の複数の触媒ブロックを配列することにより形成される。第１分解触媒７は、真空ポンプ６の前段に設けられ、２個の触媒ブロックを排出ガスの流れ方向に配列している。また、第２分解触媒８は、真空ポンプ６の後段に設けられ、４個の触媒ブロックを排出ガスの流れ方向に配列している。第１分解触媒７及び第２分解触媒８は、滅菌庫２より排出される排出ガスに含まれるオゾンを分解し、酸素として排出する。また、第１分解触媒７及び第２分解触媒８の触媒ブロックの数は、日本の労働安全衛生規則等、各国に定められた屋内におけるオゾン排出濃度基準（本実施形態においては、オゾン濃度０．１ｐｐｍ以下）と、触媒ブロックの分解性能とに基づいて決定される。また、第１分解触媒７は、真空ポンプ６のオゾン濃度基準に依存して決定される。真空ポンプ６のオゾン濃度基準は、オゾン排出濃度基準よりも十分に大きく、本実施形態においては、５ｐｐｍ以下とされている。したがって、第１分解触媒７は、第２分解触媒８よりも触媒ブロックの数が少なく、すなわち、分解触媒の体積が小さくなるように設定される。 Each of the first cracking catalyst 7 and the second cracking catalyst 8 is formed by arranging a plurality of honeycomb structured catalyst blocks containing manganese dioxide, as shown in FIG. The first decomposition catalyst 7 is provided upstream of the vacuum pump 6, and has two catalyst blocks arranged in the flow direction of the exhaust gas. Also, the second decomposition catalyst 8 is provided in the rear stage of the vacuum pump 6, and has four catalyst blocks arranged in the flow direction of the exhaust gas. The first decomposition catalyst 7 and the second decomposition catalyst 8 decompose the ozone contained in the exhaust gas discharged from the sterilization chamber 2 and discharge it as oxygen. In addition, the number of catalyst blocks of the first decomposition catalyst 7 and the second decomposition catalyst 8 is determined according to the indoor ozone emission concentration standard (in this embodiment, the ozone concentration is 0.00) stipulated in each country, such as Japanese occupational safety and health regulations. 1 ppm or less) and the cracking performance of the catalyst block. Also, the first decomposition catalyst 7 is determined depending on the ozone concentration standard of the vacuum pump 6 . The ozone concentration standard for the vacuum pump 6 is sufficiently higher than the ozone discharge concentration standard, and is set to 5 ppm or less in this embodiment. Therefore, the first cracking catalyst 7 is set to have a smaller number of catalyst blocks than the second cracking catalyst 8, that is, the cracking catalyst has a smaller volume.

続いて、本実施形態における滅菌装置１の動作を、図３を参照して説明する。
まず、滅菌装置１の制御装置は、滅菌庫２内に滅菌対象物が収容されると、排出配管５のバルブを開放し、滅菌庫２内の空気を排出する。Next, the operation of the sterilization device 1 according to this embodiment will be described with reference to FIG.
First, when the object to be sterilized is stored in the sterilization chamber 2 , the controller of the sterilization apparatus 1 opens the valve of the discharge pipe 5 to exhaust the air in the sterilization chamber 2 .

そして、下記の手法で滅菌工程を行う。滅菌装置１の制御装置は、オゾン発生装置３のバルブを開放し、減圧状態の滅菌庫２に、オゾンガスを供給する。滅菌庫２内は、オゾンガスが充満した状態で一定時間保持される。滅菌装置１の制御装置は、一定時間の経過後に、滅菌庫２内にさらにオゾンガスを供給した後、排出配管５のバルブを開放し、滅菌庫２内のガスを排出し減圧状態とする。 Then, the sterilization process is performed by the following method. The controller of the sterilizer 1 opens the valve of the ozone generator 3 to supply ozone gas to the decompressed sterilizer 2 . The inside of the sterilization chamber 2 is kept filled with ozone gas for a certain period of time. After a certain period of time has elapsed, the control device of the sterilizer 1 further supplies ozone gas into the sterilization chamber 2, and then opens the valve of the discharge pipe 5 to exhaust the gas in the sterilization chamber 2 and reduce the pressure.

滅菌装置１の制御装置は、上記の滅菌工程を複数回行った後、フィルタ４を介して外気を滅菌庫２内に流入させる。滅菌装置１の制御装置は、滅菌庫２において、外気の流入、排出を複数回繰り返すエアレーション工程を行い、外気を流入させて滅菌庫２内を大気圧まで復圧させる。これにより、滅菌庫２内におけるオゾンガスが排出され、滅菌庫２の扉が開放可能となる。 The control device of the sterilization apparatus 1 causes outside air to flow into the sterilization chamber 2 through the filter 4 after performing the above sterilization process multiple times. The controller of the sterilizer 1 performs an aeration process in which outside air is introduced and discharged a plurality of times in the sterilization chamber 2, and the inside of the sterilization chamber 2 is returned to the atmospheric pressure by introducing the outside air. As a result, the ozone gas in the sterilization chamber 2 is discharged, and the door of the sterilization chamber 2 can be opened.

上述のような滅菌装置１における滅菌工程では、複数回にわたってオゾンガスの供給及び排出が行われる。この際、真空ポンプ６の前段に設けられる第１分解触媒７は、真空ポンプ６の吸入を妨げる圧損となりうる。 In the sterilization process in the sterilization apparatus 1 as described above, ozone gas is supplied and discharged multiple times. At this time, the first decomposition catalyst 7 provided in the preceding stage of the vacuum pump 6 may cause a pressure loss that prevents the suction of the vacuum pump 6 .

図４のグラフは、第１分解触媒７における触媒ブロックの数量と、滅菌庫２における目標圧力への到達時間との相関を示している。なお、破線が、目標圧力が５０Ｐａの場合を示し、一点鎖線が、目標圧力が４０Ｐａの場合を示している。 The graph of FIG. 4 shows the correlation between the number of catalyst blocks in the first decomposition catalyst 7 and the time to reach the target pressure in the sterilization chamber 2 . The dashed line indicates the case where the target pressure is 50 Pa, and the one-dot chain line indicates the case where the target pressure is 40 Pa.

図４のグラフに示すように、第１分解触媒７の触媒ブロックの数量が多いほど、目標圧力への到達速度が遅くなる。すなわち、第１分解触媒７における触媒ブロックの数量を減らすことにより、真空ポンプ６の圧力損失が減少し、減圧速度を上昇させることができる。これにより、滅菌装置１における減圧工程や、エアレーション工程の時間を短縮することが可能であり、滅菌装置１における処理時間全体の短縮が可能である。 As shown in the graph of FIG. 4, the greater the number of catalyst blocks of the first cracking catalyst 7, the slower the speed at which the target pressure is reached. That is, by reducing the number of catalyst blocks in the first decomposition catalyst 7, the pressure loss of the vacuum pump 6 can be reduced and the decompression speed can be increased. As a result, it is possible to shorten the time required for the decompression process and the aeration process in the sterilization apparatus 1, thereby shortening the overall processing time in the sterilization apparatus 1. FIG.

また、本実施形態においては、排出配管５が第１チャンバ部５ａ及び第２チャンバ部５ｂを備えることにより、第１分解触媒７及び第２分解触媒８における触媒ブロックの、排出ガスの流れに面する表面積を増加させることができる。これにより、第１分解触媒７及び第２分解触媒８における圧力損失をより減少させることができ、真空ポンプ６の減圧速度を上昇させることができる。 In addition, in the present embodiment, the discharge pipe 5 is provided with the first chamber portion 5a and the second chamber portion 5b, so that the catalyst blocks of the first decomposition catalyst 7 and the second decomposition catalyst 8 are inconvenient for the flow of the exhaust gas. surface area can be increased. As a result, the pressure loss in the first decomposition catalyst 7 and the second decomposition catalyst 8 can be further reduced, and the decompression speed of the vacuum pump 6 can be increased.

また、本実施形態においては、第１分解触媒７よりも第２分解触媒８の体積が大きく設定されている。これにより、真空ポンプ６の前段における圧力損失を最小限とすることができる。 Further, in this embodiment, the volume of the second decomposition catalyst 8 is set larger than that of the first decomposition catalyst 7 . As a result, the pressure loss in the preceding stage of the vacuum pump 6 can be minimized.

以上、図面を参照しながら本開示の好適な実施形態について説明したが、本開示は上記実施形態に限定されるものではない。上述した実施形態において示した各構成部材の諸形状や組み合わせ等は一例であって、本開示の趣旨から逸脱しない範囲において設計要求等に基づき種々変更可能である。 Although the preferred embodiments of the present disclosure have been described above with reference to the drawings, the present disclosure is not limited to the above embodiments. The various shapes, combinations, and the like of the constituent members shown in the above-described embodiment are examples, and can be variously changed based on design requirements and the like without departing from the gist of the present disclosure.

上記実施形態においては、第１分解触媒７及び第２分解触媒８は、複数の触媒ブロックを配列することにより形成されるが、本開示はこれに限定されない。第１分解触媒７及び第２分解触媒８として、例えばペレット状の分解触媒を排出配管５内に収容してもよい。この場合、触媒ブロックよりも量の調整が容易である。 In the above embodiment, the first cracking catalyst 7 and the second cracking catalyst 8 are formed by arranging a plurality of catalyst blocks, but the present disclosure is not limited to this. As the first decomposition catalyst 7 and the second decomposition catalyst 8 , for example, pellet-like decomposition catalysts may be accommodated in the discharge pipe 5 . In this case, it is easier to adjust the amount than with the catalyst block.

また、第１分解触媒７と第２分解触媒８とで異なる分解触媒を用いてもよい。この場合、例えば第２分解触媒８の触媒性能を第１分解触媒７の触媒性能よりも高めることにより、真空ポンプ６の後段において、オゾン排出基準以下までオゾン濃度を減少させることが容易となる。 Also, different decomposition catalysts may be used for the first decomposition catalyst 7 and the second decomposition catalyst 8 . In this case, for example, by making the catalytic performance of the second decomposition catalyst 8 higher than the catalytic performance of the first decomposition catalyst 7, it becomes easy to reduce the ozone concentration to below the ozone emission standard in the downstream stage of the vacuum pump 6.

また、上記実施形態においては、滅菌装置１は、オゾンガスにより滅菌対象物を滅菌したが、本開示はこれに限定されない。滅菌装置１は、例えば過酸化水素等の腐食性ガスを用いて滅菌対象物を滅菌してもよい。また、滅菌装置１に、複数種類の腐食性ガスが供給されてもよい。 Further, in the above embodiment, the sterilization apparatus 1 sterilizes the object to be sterilized using ozone gas, but the present disclosure is not limited to this. The sterilization apparatus 1 may sterilize the object to be sterilized using corrosive gas such as hydrogen peroxide. Moreover, multiple types of corrosive gases may be supplied to the sterilizer 1 .

また、腐食性ガスの種類や、真空ポンプ６の耐腐食性能によっては、第１分解触媒７の体積または触媒性能が第２分解触媒８よりも高くともよい。 Further, the volume or catalytic performance of the first decomposition catalyst 7 may be higher than that of the second decomposition catalyst 8 depending on the type of corrosive gas and the corrosion resistance performance of the vacuum pump 6 .

本開示は、腐食性ガス排出装置及び滅菌装置に適用することができる。 The present disclosure can be applied to corrosive gas evacuation devices and sterilization devices.

１ 滅菌装置
２ 滅菌庫
３ オゾン発生装置
４ フィルタ
５ 排出配管
５ａ 第１チャンバ部
５ｂ 第２チャンバ部
６ 真空ポンプ
７ 第１分解触媒
８ 第２分解触媒REFERENCE SIGNS LIST 1 sterilizer 2 sterilizer 3 ozone generator 4 filter 5 discharge pipe 5a first chamber 5b second chamber 6 vacuum pump 7 first decomposition catalyst 8 second decomposition catalyst

Claims (4)

腐食性ガス排出装置であって、
腐食性ガスを排出する真空ポンプと、
前記真空ポンプが設けられる排出配管と、
前記排出配管において前記真空ポンプの前段に設けられると共に前記腐食性ガスと反応する第１分解触媒と、
前記排出配管において前記真空ポンプの後段に設けられると共に前記腐食性ガスと反応する第２分解触媒と
を備え、
前記第１分解触媒と前記第２分解触媒とで異なる分解触媒を用い、
前記第２分解触媒は、前記第１分解触媒よりも高い触媒性能を有する腐食性ガス排出装置。 A corrosive gas discharge device,
a vacuum pump for discharging corrosive gases;
a discharge pipe provided with the vacuum pump;
a first decomposition catalyst provided in the discharge pipe upstream of the vacuum pump and reacting with the corrosive gas;
a second decomposition catalyst provided downstream of the vacuum pump in the exhaust pipe and reacting with the corrosive gas;
using different decomposition catalysts for the first decomposition catalyst and the second decomposition catalyst,
The corrosive gas discharging device, wherein the second decomposition catalyst has higher catalytic performance than the first decomposition catalyst. 腐食性ガス排出装置であって、
腐食性ガスを排出する真空ポンプと、
前記真空ポンプが設けられる排出配管と、
前記排出配管において前記真空ポンプの前段に設けられると共に前記腐食性ガスと反応する第１分解触媒と、
前記排出配管において前記真空ポンプの後段に設けられると共に前記腐食性ガスと反応する第２分解触媒と
を備え、
前記第１分解触媒及び前記第２分解触媒はそれぞれ、複数の触媒ブロック、又は、ペレット状の分解触媒により形成され、
前記第２分解触媒は、前記第１分解触媒よりも体積が大きく、
前記体積が大きいことは、前記触媒ブロックの数が多いこと、又は、前記ペレット状の分解触媒の量が多いことである腐食性ガス排出装置。 A corrosive gas discharge device,
a vacuum pump for discharging corrosive gases;
a discharge pipe provided with the vacuum pump;
a first decomposition catalyst provided in the discharge pipe upstream of the vacuum pump and reacting with the corrosive gas;
a second decomposition catalyst provided downstream of the vacuum pump in the exhaust pipe and reacting with the corrosive gas;
each of the first cracking catalyst and the second cracking catalyst is formed of a plurality of catalyst blocks or a pellet-shaped cracking catalyst;
the second decomposition catalyst has a larger volume than the first decomposition catalyst;
The corrosive gas discharge device wherein the large volume means a large number of the catalyst blocks or a large amount of the pellet-shaped cracking catalyst. 前記排出配管は、前記第２分解触媒が設けられると共に他の部位よりも流路径の大きな第２チャンバ部を備える請求項１又は請求項２に記載の腐食性ガス排出装置。 3. The corrosive gas discharge device according to claim 1, wherein the discharge pipe includes a second chamber portion in which the second decomposition catalyst is provided and the passage diameter of which is larger than that of other portions. 腐食性ガスが供給される滅菌庫と、
前記滅菌庫に接続される、請求項１又は請求項２に記載の腐食性ガス排出装置と
を備える滅菌装置。 a sterilizer supplied with corrosive gas;
and a corrosive gas evacuation device according to claim 1 or claim 2, connected to the sterilization chamber.
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Citations (4)

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JP2002272824A (en) 2001-03-19 2002-09-24 Hitachi Metals Ltd Air cleaning machine
JP2008212806A (en) 2007-03-02 2008-09-18 Semicon Materials Corp Ozone-decomposing material and manufacturing method thereof
JP2014122119A (en) 2014-01-17 2014-07-03 Mitsubishi Electric Corp Man conveyor

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JPH07265665A (en) * 1994-03-29 1995-10-17 Hokkaido Rehabili Method for decomposing and removing ozone
JPH07311519A (en) * 1994-05-18 1995-11-28 Ricoh Co Ltd Ozone processor
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Publication number Priority date Publication date Assignee Title
JP2001037851A (en) 1999-07-27 2001-02-13 Bosch Automotive Systems Corp Device for and method of ozone sterilization
JP2002272824A (en) 2001-03-19 2002-09-24 Hitachi Metals Ltd Air cleaning machine
JP2008212806A (en) 2007-03-02 2008-09-18 Semicon Materials Corp Ozone-decomposing material and manufacturing method thereof
JP2014122119A (en) 2014-01-17 2014-07-03 Mitsubishi Electric Corp Man conveyor

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