JP7253778B2 - Fluid transfer connector - Google Patents

Description

The present invention relates to fluid transfer connectors.

A fluid transfer connector is a device that connects two different piping systems, and is used, for example, to transfer a fluid (such as a chemical solution or gas) used in a semiconductor manufacturing apparatus from one side to the other. A fluid transfer connector consists of, for example, a socket fixedly installed on the side of a building where a buffer tank for temporarily storing fluid is installed, and a plug fixed to the tip of a fluid pipe such as a hose led from a tank lorry. I have. A fluid line connected to the buffer tank is connected to the socket.

The socket and plug are connected together to allow fluid to be transferred from the tank truck to the buffer tank or from the buffer tank to the tank truck.

In the fluid transfer connector, after the male plug is inserted into the receptacle on the socket side and fixed, the female socket main body is moved to the plug side by the operation of the internal mechanism. By connecting the plug and the socket main body, the fluid pipe on the socket side communicates with the fluid pipe on the plug side.

JP-A-2002-130574 Japanese Patent Application Laid-Open No. 2008-8403 (Patent No. 4944515)

The fluid pipe connected to the tank truck has, for example, a three-layer structure consisting of an inner tube, an intermediate tube, and an outer tube. The inner tube, etc. is sufficiently thick, and the outer tube is made of stainless steel, etc. . This provides safety measures such as leakage prevention, but increases the weight of the fluid pipe. Therefore, for the purpose of supporting the heavy fluid pipe and reducing the load on the connection part, a metal reinforcing part for supporting the inserted state of the metal plug is sometimes provided on the inlet side of the socket (Patent Document 1 mentioned above). ).

However, in this case, the outer diameter of the metal plug and the inner diameter of the metal reinforcing portion of the socket are strictly set so that there is no gap between the outer peripheral surface of the plug and the inner peripheral surface of the metal reinforcing portion. formed in Therefore, in Patent Document 2, attention is paid to the problem that when the plug is inserted into the socket, the metallic parts cannot be smoothly inserted due to the occurrence of a peculiar galling state between the metal parts. It is disclosed to provide the metal reinforcement with a resin liner. This prevents the metal parts from galling with each other when the plug is inserted. Thus, in the technology disclosed in Patent Document 2, the parts on the inlet side of the socket are replaced with resin.

On the other hand, unlike the problem described above, when the metal plug and the metal socket are connected to each other, there is a problem that the outer peripheral surface of the tip of the plug is damaged. When the tip of the plug is damaged, the sealing performance between the outer peripheral surface of the plug and the inner peripheral surface of the socket is degraded, causing a problem of leakage of circulating fluid. Specifically, after the plug is inserted into the receptacle on the socket side, when a load is applied to the rear end of the plug due to the weight of the fluid pipe on the plug side, the rear end of the plug connected to the fluid pipe It goes down and the tip of the plug faces up. Therefore, when the plug and the socket are connected to each other, the tip of the plug slides in contact with the inner peripheral surface of the socket, thereby scratching the outer peripheral surface of the tip of the plug. This problem is particularly likely to occur when the socket body is moved to the plug side by the operation of the internal mechanism, because the connecting operation is forcibly performed unlike manual operation.

The present invention has been made in view of such circumstances, and is capable of suppressing or preventing the occurrence of scratches at the tip of a plug that occurs when a plug and a socket are connected to each other. An object of the present invention is to provide a fluid transfer connector capable of improving maintainability.

In order to solve the above problems, the fluid transfer connector of the present invention employs the following means.
A fluid transfer connector according to the present invention comprises a male metal plug installed at the end of a fluid tube, and a female socket into which the plug can be inserted and which allows fluid communication when connected to the plug. wherein the socket has an accommodating portion with a circular cross-section that accommodates the tip portion of the plug in a state where the plug and the socket are connected, the accommodating portion includes a main body portion made of metal; A cylindrical portion made of synthetic resin is provided inside the body portion and is arranged between the tip portion of the plug and the body portion in a state where the plug and the socket are connected.

According to this configuration, a male metal plug is installed at the end of the fluid tube, and a female socket into which the plug can be inserted is in fluid communication when connected to the plug. The socket has an accommodating portion, and the accommodating portion accommodates the tip portion of the plug in a state where the plug and the socket are connected. The housing portion has a main body made of metal and a cylinder made of synthetic resin installed inside the main body. The tubular portion is arranged between the tip portion of the plug and the body portion in a state where the plug and the socket are connected. As a result, when the plug and socket are connected to each other, even if the tip of the plug slides while being in contact with the inner peripheral surface of the socket, the tip of the plug is not a metal main body but a synthetic resin barrel. , the tip of the plug is less likely to be scratched. Moreover, since the tubular portion is separate from the main body, it has a structure that can be attached to and detached from the main body. Therefore, even if the receiving portion of the socket is damaged due to contact with the plug, it is sufficient to replace the cylindrical portion, which improves maintainability.

In the above invention, a first groove that accommodates an O-ring is formed in the inner peripheral surface of the tubular portion, and the O-ring accommodated in the first groove is in a state where the plug and the socket are connected. may be in contact with the cylindrical portion and the plug.

According to this configuration, the first groove is formed in the inner peripheral surface of the cylindrical portion, and the O-ring is accommodated in the first groove. The O-ring accommodated in the first groove contacts the tubular portion and the plug when the plug and the socket are connected. This improves the sealing performance between the outer peripheral surface of the plug and the inner peripheral surface of the socket. In addition, unlike the case where the groove in which the O-ring is housed is directly formed in the main body made of metal, the first groove in which the O-ring is housed can be reconstructed by replacing the cylindrical part, so maintainability is improved. increase.

In the above invention, a second groove that is parallel to the axial direction of the cylindrical portion and connected to the first groove may be formed on the inner peripheral surface of the cylindrical portion.

According to this configuration, the second groove parallel to the axial direction of the cylindrical portion is formed in the inner peripheral surface of the cylindrical portion, and the second groove is connected to the first groove in which the O-ring is accommodated. . As a result, a rod-shaped member, for example, can be inserted into the second groove so that the tip of the rod-shaped member can reach the O-ring accommodated in the first groove. Become.

In the above invention, a third groove having a plane that is parallel to the axial direction of the tubular portion and intersects the circumferential direction may be formed in the inner peripheral surface of the tubular portion.

According to this configuration, the third groove parallel to the axial direction of the cylindrical portion is formed in the inner peripheral surface of the cylindrical portion, and the third groove has a plane that intersects the circumferential direction. Thereby, the rod-shaped member is installed in the third groove, and the side surface of the rod-shaped member can be brought into contact with the plane intersecting the circumferential direction of the third groove, and the cylindrical portion is rotated in the circumferential direction using the rod-shaped member. be able to. Therefore, after the tubular portion is inserted into the main body, positioning of the tubular portion in the circumferential direction is facilitated.

In the above invention, a nozzle may be installed in the storage section to spray the cleaning liquid to the storage section, and a through hole through which the nozzle can be installed may be formed in the cylindrical section.

According to this configuration, the nozzle is installed in the housing portion by penetrating through the through hole of the cylindrical portion. The nozzle can inject a cleaning liquid into the containing section, and can clean the inside of the containing section and the tip of the plug with the cleaning liquid. In addition, since the nozzle is installed so as to pass through the through hole of the cylindrical portion, the axial movement and circumferential rotation of the cylindrical portion are suppressed by the nozzle, and the cylindrical portion is less likely to come off from the main body.

In the above invention, the cylindrical portion is fixed by being press-fitted into the main body portion, fixed by a C ring inserted into a fourth groove formed in the inner peripheral surface of the main body portion, or fixed to the main body portion. may be screwed together and fixed.

According to this configuration, since the cylindrical portion is press-fitted and fixed to the main body, it is not necessary to use other parts for fixing, and the cylindrical portion can be attached to or detached from the main body. Relatively easy. In addition, positioning in the circumferential direction is easier than when fixing by screwing. In addition, the cylindrical portion is fixed to the main body by being fixed by a C-ring inserted into a fourth groove formed in the inner peripheral surface of the main body, or by being screwed and fixed to the main body. It becomes difficult to pull out in the axial direction.

In the above invention, the cylindrical portion may be configured by one integral member, or may be configured by a plurality of component parts.

According to this configuration, the rigidity of the tubular portion can be increased by forming the tubular portion from one integral member. In addition, by forming the tubular portion from a plurality of component parts, it is possible to facilitate the production of the tubular portion and to facilitate the attachment to the main body portion.

According to the present invention, it is possible to suppress or prevent the tip of the plug from being damaged when the plug and the socket are connected to each other, and to improve maintainability inside the socket.

1 is a longitudinal sectional view showing a fluid transfer connector according to an embodiment of the present invention, showing a state in which a socket and a plug are connected; FIG. FIG. 4 is a vertical cross-sectional view showing the socket of the fluid transfer connector according to the embodiment of the present invention, showing a state in which the moving portion has moved toward the first opening. FIG. 4 is a vertical cross-sectional view showing the socket of the fluid transfer connector according to the embodiment of the present invention, showing a state in which the moving portion has moved toward the second opening. FIG. 4 is a cross-sectional view showing a socket of a fluid transfer connector according to an embodiment of the present invention, cut at a position where an injection nozzle is installed; It is a front view which shows the cylinder part which concerns on one Embodiment of this invention. It is a longitudinal section showing a cylinder part concerning one embodiment of the present invention. FIG. 4 is a partially enlarged vertical cross-sectional view showing a housing portion according to one embodiment of the present invention; It is a partial enlarged vertical cross-sectional view showing a first modified example of a housing portion according to one embodiment of the present invention. It is a partial enlarged vertical cross-sectional view showing a second modified example of the housing portion according to the embodiment of the present invention. It is a partial enlarged vertical cross-sectional view showing a first modification of the tubular portion according to the embodiment of the present invention. FIG. 11 is a partially enlarged vertical cross-sectional view showing a second modified example of the tubular portion according to the embodiment of the present invention;

An embodiment of a fluid transfer connector 1 according to the present invention will be described below with reference to the drawings.
A fluid transfer connector 1 according to one embodiment of the present invention, as shown in FIG. Prepare. By connecting the socket 100 and the plug 200 to each other, the incompressible fluid can flow through the fluid transfer connector 1 . The incompressible fluid in this embodiment is, for example, a liquid such as pure water or a chemical used in a semiconductor manufacturing apparatus.

The socket 100 is connected to a fluid pipe 300 connected to, for example, a buffer tank installed in a building. The plug 200 is fixed to the tip of a fluid pipe 400 such as a hose led from a tank truck.

Hereinafter, the socket 100 according to this embodiment will be described in more detail.
As shown in FIGS. 1 to 3, the socket 100 includes a housing portion 10, a valve body portion 20, a bellows portion 30, a moving portion 40, and the like.

The housing part 10 is a member formed in a tubular shape along the axis X. As shown in FIG. The housing part 10 has a first opening 100a and a second opening 100b. The first opening 100a is formed at one end of the socket 100 along the axis X, and the plug 200 is inserted into the first opening 100a. The second opening 100b is formed at the other end of the socket 100 along the axis X, and the fluid pipe 300 is connected to the second opening 100b.

As shown in FIG. 2, the housing portion 10 includes a first housing portion 10a, a second housing portion 10b, a third housing portion 10c, and a fourth housing portion in order from the first opening portion 100a side along the axis X. and a part 10d. A front cover 10e is arranged on the first opening 100a side of the first housing part 10a, and a back cover 10f is arranged on the second opening 100b side of the fourth housing part 10d. Further, an annular side flange 10g extending around the axis X is arranged between the first housing portion 10a and the second housing portion 10b.

The front cover 10e is fastened to the first housing portion 10a with fastening bolts 90 at a plurality of locations around the axis X. As shown in FIG. Further, the first housing portion 10a is fastened to the side flange 10g by fastening bolts 91 at a plurality of locations around the axis X. As shown in FIG. Further, the side flange 10g is fastened to internal threads formed on the inner peripheral surface of the shaft 95 by fastening bolts 92 at a plurality of locations around the axis X. As shown in FIG. In addition, the back cover 10f is fastened to internal threads formed on the inner peripheral surface of the shaft 95 by fastening bolts 93 at a plurality of locations around the axis X. As shown in FIG.

Shafts 95 are inserted into insertion holes formed at a plurality of locations around the axis X in the second housing portion 10b, the third housing portion 10c, and the fourth housing portion 10d. A fastening bolt 92 is fastened to one end of the shaft 95 from the side flange 10g side, and a fastening bolt 93 is fastened to the other end of the shaft 95 from the back cover 10f side. and the fourth housing portion 10d are integrated. Adjacent members of the first housing portion 10a, the second housing portion 10b, the third housing portion 10c, and the fourth housing portion 10d are fitted to each other by a spigot joint structure. That is, one housing portion is formed with an annular convex portion sharing the central axis, and the other housing portion is formed with an annular concave portion sharing the central axis, so that the convex portion and the concave portion can be fitted to each other. formed. Thereby, the central axes of the first housing portion 10a, the second housing portion 10b, the third housing portion 10c, and the fourth housing portion 10d can be aligned.

As described above, the first housing portion 10a, the second housing portion 10b, the third housing portion 10c, and the fourth housing portion 10d are integrally connected. A tubular flow path is formed therein for circulating an incompressible fluid.

By contacting the plug 200 , the valve body portion 20 is in an open state in which an incompressible fluid can flow between the plug 200 and the housing portion 10 . The valve body portion 20, as shown in FIG. 2, includes a valve body 20a, a spring 20b, and a stopper 20c.
The valve body 20a is formed with an orifice 20d having a circular cross section for regulating the flow rate of the incompressible fluid flowing through the valve body 20a. The orifices 20d are arranged at a plurality of locations around the axis X at equal intervals.

The outer peripheral surface of the valve body 20a has a cylindrical shape extending along the axis X, and has an outer diameter slightly smaller than the inner peripheral surface of the valve body holder 40b, which will be described later. Therefore, the valve body 20a is movable along the axis X while being inserted into the internal space of the valve body holder 40b.

The stopper 20c is a member formed in an annular shape extending around the axis X, and by fastening a male threaded portion formed on the outer peripheral surface to a female threaded portion formed on the inner peripheral surface of the valve body holder 40b, the valve body is It is fixed to the holder 40b.
The stopper 20c holds a spring 20b extending along the axis X between itself and the valve body 20a. A first valve seat 41 protruding inward is formed near the center of the valve body holder 40b. The valve body 20 a is pressed against the first valve seat 41 by the biasing force of the spring 20 b to expand, and closes the opening of the first valve seat 41 . At this time, the valve body 20a forms an annular seal area extending around the axis X between itself and the first valve seat 41. As shown in FIG.

In the state shown in FIGS. 2 and 3, the O-ring 20e attached to the valve body 20a is in contact with the inner peripheral surface of the valve body holder 40b to form a sealing area, so that the first opening 100a and the second opening 100a are separated from each other. 100b, the incompressible fluid is blocked.

The bellows portion 30 is a member in which an expandable supply channel 31 through which an incompressible fluid flows is formed. The bellows portion 30 is arranged inside the housing portion 10 between the valve body portion 20 and the fluid pipe 300 .
As shown in FIG. 2, the bellows portion 30 includes, along the axis X, a tip portion 30a, a bellows main body 30b, and a base end portion 30c in order from the first opening 100a side. The distal end portion 30a, the bellows main body 30b, and the proximal end portion 30c are members integrally formed of a fluororesin material (for example, PTFE).

The distal end portion 30a is a member formed in an annular shape extending around the axis X, and a male threaded portion formed on the outer peripheral surface thereof is fastened to a female threaded portion formed on the inner peripheral surface of the stopper 20c on the side of the second opening 100b. By doing so, it is fixed to the stopper 20c.
The base end portion 30c is a cylindrical member extending around the axis X and held between the back cover 10f and the fourth housing portion 10d.

The bellows main body 30b has a bellows shape that can be extended and contracted along the axis X. As shown in FIG. The tip portion 30a is movable along the axis X together with the stopper 20c and the valve body holder 40b. On the other hand, the base end portion 30c is arranged in a state of being fixed to the housing portion 10 . As described above, the distance between the distal end portion 30a and the proximal end portion 30c in the direction of the axis X varies depending on the position of the moving portion 40, but the bellows body 30b has a bellows shape. Therefore, the supply channel 31 formed inside the bellows portion 30 can expand and contract along the axis X. As shown in FIG.

The moving part 40 is a member that can move along the axis X so as to contact or separate from the plug 200 installed in the first opening 100 a of the socket 100 . The moving part 40 is a member that is cylindrically formed along the axis X and accommodates the valve body part 20 and the bellows part 30 therein. As shown in FIG. 2, the moving part 40 includes a valve body holder 40b and a bellows holder 40a along the axis X in order from the first opening 100a side.
A male thread is formed on the outer peripheral surface of the valve body holder 40b on the side of the second opening 100b, and a female thread is formed on the inner peripheral surface of the bellows holder 40a on the side of the first opening 100a. By fastening the male thread of the valve body holder 40b and the female thread of the bellows holder 40a, the valve body holder 40b and the bellows holder 40a are integrated.

An annular protrusion 40c extending along the axis X is formed in an annular shape on the outer peripheral portion of the end of the bellows holder 40a on the side of the first opening 100a. The annular protrusion 40c divides a cylindrical space formed between the third housing portion 10c and the fourth housing portion 10d into a first pressure chamber P1 and a second pressure chamber P2. are arranged as The annular protrusion 40c is in contact with the inner peripheral surface of the third housing portion 10c via an O-ring 40d.

The first pressure chamber P1 is a space formed between the side surface of the annular protrusion 40c on the first opening 100a side (one end side) and the inner peripheral surface of the third housing portion 10c. It is connected to the air supply/exhaust port 80 via a through hole formed in the outer peripheral surface of 10c.
The second pressure chamber P2 is a space formed between the side surface of the annular protrusion 40c on the second opening 100b side (the other end side) and the inner peripheral surface of the third housing portion 10c. 3 is connected to the air supply/exhaust port 81 via another through hole formed in the outer peripheral surface of the housing portion 10c.

When compressed air (operating gas) is supplied through the supply pipe, the first pressure chamber P1 generates a biasing force that moves the annular projection 40c along the axis X toward the second opening 100b. This biasing force is a biasing force in the direction of contracting the bellows body 30 b of the bellows portion 30 .
As shown in FIG. 3, when the first pressure chamber P1 expands due to the biasing force generated by the first pressure chamber P1 while the second pressure chamber P2 contracts, the moving portion 40 moves toward the second opening 100b. . Therefore, when the plug 200 is inserted into the first opening 100a, the moving part 40 is separated from the plug 200. As shown in FIG.

The second pressure chamber P2 generates a biasing force that moves the annular projection 40c along the axis X toward the first opening 100a when compressed air (operating gas) is supplied through the supply pipe. This biasing force is a biasing force in the direction of extending the bellows body 30 b of the bellows portion 30 .
As shown in FIGS. 1 and 2, when the second pressure chamber P2 expands due to the biasing force generated by the second pressure chamber P2 while the first pressure chamber P1 contracts, the moving portion 40 moves toward the first opening 100a. Move to Therefore, as shown in FIG. 1, when the plug 200 is inserted into the first opening 100a, the moving part 40 contacts the plug 200. As shown in FIG.

As shown in FIG. 1, when the moving part 40 contacts the plug 200, the tip of the valve body 202 of the valve body part 201 of the plug 200 contacts the tip of the valve body 20a of the valve body part 20, and the valve body 20a contacts the moving part. It is separated from the inner peripheral surface of 40 . As a result, non-compressible fluid can flow between the valve body portion 201 of the plug 200 and the supply channel 31 formed inside the bellows portion 30 .

As shown in FIGS. 2 and 3, a housing portion 11 having a circular cross section is formed inside the valve body holder 40b on the side of the first opening 100a. The accommodating portion 11 is formed on the side of the valve body portion 20 positioned deeper than the inlet of the first opening portion 100a of the socket 100, and has a circular cross section. A tip portion of the plug 200 is accommodated in the accommodating portion 11 . The housing portion 11 is composed of a valve body holder 40b made of metal and a cylindrical portion 12 made of synthetic resin. In the accommodating portion 11, the cylindrical portion 12 is installed inside the valve body holder 40b.

The valve body holder 40b is made of metal, such as stainless steel, and has a cylindrical surface with a circular cross-section inside which the cylindrical portion 12 is formed. The cylindrical portion 12 is made of polytetrafluoroethylene, for example, and is composed of a low-friction material. As a result, the metal plug 200 in contact with the inner peripheral surface of the tubular portion 12 smoothly moves along the inner peripheral surface of the tubular portion 12 .

As shown in FIG. 1, the cylindrical portion 12 is arranged between the tip portion of the plug 200 and the valve body holder 40b in a state where the plug 200 and the socket 100 are connected. The tubular portion 12 is a cylindrical member, and the outer peripheral surface of the tubular portion 12 is placed in contact with the inner peripheral surface, which is the cylindrical surface of the valve body holder 40b. A tip of the plug 200 is inserted into the inner peripheral surface of the tubular portion 12 . The inner peripheral surface of the tubular portion 12 is arranged in contact with the outer peripheral surface of the plug 200 .

The tubular portion 12 has a length (length in the direction of the axis X) that covers the tip portion of the plug 200, for example, a small diameter portion (reduced diameter portion) of the plug 200 when the plug 200 and the socket 100 are connected. As a result, the portion where the tip of the plug 200 easily contacts the inner peripheral surface of the socket 100 is covered with the cylindrical portion 12 . In addition, it is desirable that the cylindrical portion 12 has a length in the direction of the axis X so that the stress is not concentrated so that the tip portion of the plug 200 can be received over a wide area when the plug 200 and the socket 100 are connected.

By installing the cylindrical portion 12 according to the present embodiment, when the plug 200 and the socket 100 are connected to each other, even if the tip of the plug 200 slides while being in contact with the inner peripheral surface of the socket 100, the plug 200 is The tip portion contacts the synthetic resin cylindrical portion 12 instead of the metallic valve body holder 40b. As a result, the tip of the plug 200 is less likely to be damaged.

As shown in FIG. 6, an O-ring accommodating groove (first groove) 13 for accommodating an O-ring 21 (see FIGS. 1 to 3) is formed on the inner peripheral surface of the cylindrical portion 12. As shown in FIG. Since the O-ring 21 accommodated in the O-ring accommodating groove 13 is in contact with the cylindrical portion 12 and the plug 200 when the plug 200 and the socket 100 are connected, the outer peripheral surface of the plug 200 and the inner peripheral surface of the socket 100 are in contact with each other. The sealing performance between is improved. Further, when the O-ring accommodating groove 13 is damaged or the like, the O-ring accommodating groove 13 can be reconstructed by replacing the cylindrical portion 12 . Therefore, unlike the case where the O-ring receiving groove 13 is directly formed in the metallic valve body holder 40b, when the O-ring receiving groove 13 is formed in the inner peripheral surface of the cylindrical portion 12, the maintainability of the socket 100 is improved. increase.

5 and 6, an O-ring replacement groove (second groove) 14 parallel to the axial direction of the cylindrical portion 12 is formed in the inner peripheral surface of the cylindrical portion 12. As shown in FIGS. The O-ring replacement groove 14 is connected to the O-ring receiving groove 13 . As a result, for example, a rod-shaped member (not shown) can be inserted into the O-ring replacement groove 14 and the tip of the rod-shaped member can reach the O-ring 21 housed in the O-ring housing groove 13. Removal of the O-ring 21 is facilitated by using the member.

As shown in FIGS. 5 and 6 , an alignment groove (third groove) 15 parallel to the axial direction of the cylindrical portion 12 is formed on the inner peripheral surface of the cylindrical portion 12 . The alignment groove 15 has a plane (upright surface 15a) that intersects the circumferential direction. The alignment grooves 15 are formed by, for example, notching the inner peripheral surface of the tubular portion 12 in a U-shape to have standing surfaces 15a facing each other.

As a result, a jig (not shown) can be placed in the alignment groove 15 and brought into contact with the upstanding surface 15a intersecting the circumferential direction of the alignment groove 15. can be used to rotate the cylindrical portion 12 in the circumferential direction. Therefore, after the tubular portion 12 is inserted into the valve body holder 40b, positioning of the tubular portion 12 in the circumferential direction becomes easy.

As shown in FIGS. 4 and 6, the cylindrical portion 12 is formed with a through hole 16 through which the cleaning nozzle 22 can be installed. As a result, the cleaning nozzle 22 is installed so as to pass through the through hole 16 of the cylindrical portion 12 and installed in the housing portion 11 . As shown in FIG. 4, the valve body holder 40b is formed with a through hole 42 into which the cleaning nozzle 22 is inserted and fixed. The cleaning nozzle 22 is configured to be detachable from the valve body holder 40b and the tubular portion 12 .

The cleaning nozzle 22 can inject a cleaning liquid into the inside of the housing portion 11, and can clean the inside of the housing portion 11 and the tip of the plug 200 with the cleaning liquid. Further, as shown in FIG. 4, since the tip of the cleaning nozzle 22 is installed so as to pass through the through hole 16 of the cylindrical portion 12, the movement of the cylindrical portion 12 in the direction of the axis X and the rotation in the circumferential direction are effective for cleaning. It is restrained by the tip of the nozzle 22, and the tubular portion 12 is less likely to come off from the valve body holder 40b.

The inner peripheral surface of the accommodating portion 11 expands in a tapered shape from the O-ring 21 toward the first opening portion 100a. A discharge hole (not shown) extending from the inner peripheral surface to the outer peripheral surface is formed in the first housing portion 10a, and the cleaning liquid sprayed from the cleaning nozzle 22 is discharged from the discharge hole.

The cylindrical portion 12 is fixed to the valve body holder 40b by press fitting. As a result, it is relatively easy to attach and detach the cylindrical portion 12 to and from the valve body holder 40b without the need to use other components such as a C-ring for fixing. In addition, positioning in the circumferential direction is easier than when fixing by screwing.

In addition, as shown in FIG. 7 , a protrusion 12 a may be formed on the outer peripheral surface of the cylindrical portion 12 . The projecting portion 12a is formed in a belt shape along the circumferential direction and is fitted into a recessed portion 43 formed in the inner peripheral surface of the valve body holder 40b. As a result, the axial movement of the cylindrical portion 12 is suppressed by the projection 12a and the concave portion 43 that are engaged with each other, and the cylindrical portion 12 is less likely to come off from the valve body holder 40b.

Fixing of the cylindrical portion 12 to the valve body holder 40b is not limited to the case of press-fitting, and as shown in FIG. 4 groove) 44 may be fixed by a C-ring 50 inserted therein. The C-ring groove 44 is formed outside the first opening 100a side end of the cylindrical portion 12 installed in the valve body holder 40b. The C-ring 50 inserted into the C-ring groove 44 is arranged in contact with the end of the tubular portion 12 . Alternatively, as shown in FIG. 9, the cylindrical portion 12 may be fixed by being screwed to the valve body holder 40b. That is, the male thread 17 formed on the outer peripheral surface of the tubular portion 12 and the female thread 45 formed on the inner peripheral surface of the valve element holder 40b are screwed together, thereby fixing the tubular portion 12 to the valve element holder 40b. be. As a result, the cylindrical portion 12 is less likely to come off from the valve body holder 40b in the axial direction.

The cylindrical portion 12 may be configured by one integral member, or may be configured by a plurality of pieces (components). The cylindrical portion 12, which is made up of one integral member, has high rigidity. Further, as shown in FIGS. 10 and 11, when the tubular portion 12 is composed of a plurality of component parts (for example, component parts 12A, 12B, 12C, and 12D), the production of the tubular portion 12 can be facilitated and the valve It can be easily attached to the body holder 40b. For example, as shown in FIGS. 10 and 11, component parts 12A and 12B, component parts 12A and 12C, and component parts 12C and 12D are divided with the O-ring accommodating groove 13 as a boundary, so that O Formation of the ring receiving groove 13 can be facilitated. In addition, since it is divided into a plurality of component parts, it is possible to replace only the component parts that need to be replaced.

As described above, according to this embodiment, the male metal plug 200 is installed at the end of the fluid pipe 400, and the female socket 100 into which the plug 200 can be inserted is connected to the plug 200. When the fluid is in communication. The socket 100 has an accommodating portion 11 in which the tip of the plug 200 is accommodated while the plug 200 and the socket 100 are connected. The housing portion 11 has a metal valve body holder 40b and a synthetic resin cylindrical portion 12 installed inside the valve body holder 40b. The cylindrical portion 12 is arranged between the tip portion of the plug 200 and the valve body holder 40b in a state where the plug 200 and the socket 100 are connected. As a result, when the plug 200 and the socket 100 are connected to each other, even if the tip of the plug 200 slides while being in contact with the inner peripheral surface of the socket 100, the tip of the plug 200 does not move in the metallic valve body holder 40b. Since the tip of the plug 200 is in contact with the cylindrical portion 12 made of synthetic resin, the tip portion of the plug 200 is less likely to be damaged. As a result, since the sealing performance between the outer peripheral surface of the plug 200 and the inner peripheral surface of the socket 100 is not deteriorated, the problem of leakage of the circulating fluid is less likely to occur.

Reference Signs List 1: fluid transfer connector 10: housing portion 11: housing portion 12: cylindrical portion 13: O-ring housing groove 14: O-ring replacement groove 15: alignment groove 16: through hole 17: male screws 20, 201: valve body Portions 20a, 202: valve body 20b: spring 20c: stopper 20d: orifices 20e, 21, 40d: O-ring 22: cleaning nozzle 30: bellows portion 30a: tip portion 30b: bellows body 30c: base end portion 31: supply flow Path 40 : Moving portion 40a : Bellows holder 40b : Valve body holder 40c : Annular projection 41 : First valve seat 42 : Through hole 43 : Recess 44 : C-ring groove 45 : Female screw 50 : C-rings 80, 81 : Supply/exhaust ports 90, 91, 92, 93: Fastening bolt 95: Shaft 100: Socket 100a: First opening 100b: Second opening 200: Plugs 300, 400: Fluid pipe P1: First pressure chamber P2: Second Pressure chamber X: axis

Claims (6)

a male metal plug placed at the end of the fluid tube;
a female socket into which said plug is insertable and in fluid communication when connected with said plug;
The socket has an accommodating portion with a circular cross-section that accommodates the tip of the plug in a state where the plug and the socket are connected,
The accommodation unit is
a metal body;
a synthetic resin cylindrical portion that is installed inside the main body portion and arranged between the tip portion of the plug and the main body portion in a state where the plug and the socket are connected;
A first groove in which an O-ring is accommodated is formed in the inner peripheral surface of the tubular portion, and the O-ring accommodated in the first groove is inserted into the tubular portion while the plug and the socket are connected. and a fluid transfer connector in contact with said plug. 2. The fluid transfer connector according to claim 1 , wherein a second groove parallel to the axial direction of the cylindrical portion and connected to the first groove is formed on the inner peripheral surface of the cylindrical portion. a male metal plug placed at the end of the fluid tube;
a female socket into which said plug is insertable and in fluid communication when connected with said plug;
The socket has an accommodating portion with a circular cross-section that accommodates the tip of the plug in a state where the plug and the socket are connected,
The accommodation unit is
a metal body;
a synthetic resin cylindrical portion that is installed inside the main body portion and arranged between the tip portion of the plug and the main body portion in a state where the plug and the socket are connected;
A fluid transfer connector, wherein a third groove having a plane that is parallel to the axial direction of the cylindrical portion and intersects the circumferential direction is formed in the inner peripheral surface of the cylindrical portion. a male metal plug placed at the end of the fluid tube;
a female socket into which said plug is insertable and in fluid communication when connected with said plug;
The socket has an accommodating portion with a circular cross-section that accommodates the tip of the plug in a state where the plug and the socket are connected,
The accommodation unit is
a metal body;
a synthetic resin cylindrical portion that is installed inside the main body portion and arranged between the tip portion of the plug and the main body portion in a state where the plug and the socket are connected;
further comprising a nozzle that is installed in the storage unit and that injects a cleaning liquid into the storage unit;
A fluid transfer connector, wherein a through hole through which the nozzle can be installed is formed in the cylindrical portion. The cylindrical portion is fixed by being press-fitted into the main body portion, fixed by a C-ring inserted into a fourth groove formed in the inner peripheral surface of the main body portion, or screwed to the main body portion. 5. The fluid transfer connector according to any one of claims 1 to 4 , wherein the fluid transfer connector is fixed by 6. The fluid transfer connector according to any one of claims 1 to 5 , wherein the cylindrical portion is configured by one integral member or configured by a plurality of component parts.

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