JP7237546B2 - Electric wiring penetration device and manufacturing method thereof - Google Patents

Electric wiring penetration device and manufacturing method thereof Download PDF

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JP7237546B2
JP7237546B2 JP2018223207A JP2018223207A JP7237546B2 JP 7237546 B2 JP7237546 B2 JP 7237546B2 JP 2018223207 A JP2018223207 A JP 2018223207A JP 2018223207 A JP2018223207 A JP 2018223207A JP 7237546 B2 JP7237546 B2 JP 7237546B2
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sealing member
metallized layer
holes
partition
electrical wiring
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JP2020089159A (en
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晋 奥田
友昭 金山
裕司 瀧口
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Toshiba Corp
Toshiba Energy Systems and Solutions Corp
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E30/00Energy generation of nuclear origin

Description

本発明の実施形態は、電気配線貫通装置およびその製造方法に関する。 TECHNICAL FIELD Embodiments of the present invention relate to an electrical wire feed-through device and a method of manufacturing the same.

一般に原子力発電所の原子炉格納容器等の隔壁を貫通する電気配線は、放射線遮蔽あるいは気密のために、電気配線貫通装置(電気ペネトレーション)により接続されている。この電気配線貫通装置の貫通孔には、円筒状で中心に導体を通したモジュールが、メタルOリングを介して取り付けられている。モジュールには一般にシール材が充填されており、貫通する導体を気密にシールしている。 2. Description of the Related Art In general, electrical wiring that penetrates a partition wall such as a reactor containment vessel of a nuclear power plant is connected by an electrical wiring penetration device (electrical penetration) for radiation shielding or airtightness. A cylindrical module with a conductor passing through the center is attached via a metal O-ring to the through hole of the electrical wiring through device. The module is generally filled with a sealant to hermetically seal the conductors passing through it.

従来の原子炉格納容器の電気配線貫通装置のモジュールは、シール材としてエポキシ樹脂などの有機物材料が使用されており、温度・放射線および経年の影響によりシール性能や絶縁性能が劣化する。今後のプラントの長寿命化や、過酷事故(SA)環境下での長期的な機能維持の観点から、電気配線貫通装置に対しての耐温度・放射線性能の向上および経年劣化への耐性が求められる。 The module of the conventional electrical wiring penetration device for the containment vessel uses an organic material such as epoxy resin as a sealing material, and the sealing performance and insulation performance deteriorate due to the effects of temperature, radiation, and aging. From the perspective of extending the life of future plants and maintaining long-term functions in severe accident (SA) environments, improvements in temperature and radiation resistance and resistance to aging degradation are required for electrical wiring penetration devices. be done.

上記課題を解決する方法として、バウンダリのシール材にセラミック等の無機物材料を使用する案が考えられている。 As a method for solving the above-mentioned problems, it is proposed to use an inorganic material such as ceramic as the boundary sealing material.

実開昭61-153428号公報Japanese Utility Model Laid-Open No. 61-153428

上述した無機物シール材を用いた電気配線貫通装置のモジュールにおいては、セラミック等の無機物材料と導体は直接接合することはできず、シール材をセラミック等の無機物とする場合には、モジュールを貫通する導体とシール材の接合部にメタライズ処理を施したうえで、ろう付けによる接合を行う必要がある。しかしながら、既設の原子力発電所で使用されている多ピン構造モジュールとの互換性を考慮したモジュールでは、メタライズ層により隣接する導体間の絶縁離隔距離が狭まり、絶縁性能確保が困難となる。 In the module of the electrical wiring penetrating device using the inorganic sealing material described above, the inorganic material such as ceramic and the conductor cannot be directly bonded. It is necessary to apply a metallizing treatment to the joint between the conductor and the sealing material, and then perform the joint by brazing. However, in a module designed for compatibility with multi-pin structure modules used in existing nuclear power plants, the metallized layer narrows the insulation distance between adjacent conductors, making it difficult to ensure insulation performance.

本発明の実施形態は、上述した課題を解決するためになされたものであり、無機物のシール部材を用いた電気配線貫通装置において、導体間絶縁性能を高めることを目的とする。 The embodiments of the present invention have been made to solve the above-described problems, and it is an object of the present invention to improve insulation performance between conductors in an electrical wiring penetration device using an inorganic sealing member.

本発明の実施形態に係る電気配線貫通装置は、電気絶縁性の無機物材料からなり複数の貫通孔が形成されたシール部材と、前記シール部材の前記貫通孔を貫通する金属製の導体と、複数の前記貫通孔それぞれを囲む前記シール部材の表面に気密に付着したメタライズ層と、前記メタライズ層と前記導体とを気密に接合するろう材部と、を有する電気配線貫通装置であって、前記シール部材は、複数の前記貫通孔同士の間を仕切るように当該シール部材の表面に沿って延びる仕切り部を有し、前記メタライズ層は、前記シール部材の表面で前記仕切り部以外の部分において複数の前記貫通孔のそれぞれを囲むように形成されている、ことを特徴とする。
また、本発明の他の実施形態に係る電気配線貫通装置は、電気絶縁性の無機物材料からなり複数の貫通孔が形成されたシール部材と、前記シール部材の前記貫通孔を貫通する金属製の導体と、複数の前記貫通孔それぞれを囲む前記シール部材の表面に気密に付着したメタライズ層と、前記メタライズ層と前記導体とを気密に接合するろう材部と、を有する電気配線貫通装置であって、複数の前記貫通孔同士の間を仕切るように前記シール部材の表面に沿って延びる仕切り部が形成され、前記メタライズ層は、前記シール部材の表面で前記仕切り部以外の部分において複数の前記貫通孔のそれぞれを囲むように形成されており、前記仕切り部は、前記シール部材の表面に沿って延びる隔壁であって、前記隔壁の表面のうちの少なくとも頂部が前記メタライズ層と前記ろう材部のいずれとも接していないこと、を特徴とする。
An electrical wiring penetration device according to an embodiment of the present invention includes a seal member made of an electrically insulating inorganic material and having a plurality of through holes formed therein; a metal conductor passing through the through holes of the seal member; a metallized layer airtightly adhered to the surface of the seal member surrounding each of the through holes of the electrical wiring through-hole, and a brazing material portion airtightly joining the metallized layer and the conductor, wherein the seal The member has a partition portion extending along the surface of the seal member so as to partition the plurality of through holes, and the metallized layer has a plurality of partition portions on the surface of the seal member other than the partition portion. It is characterized in that it is formed so as to surround each of the through holes.
Further, an electrical wiring penetration device according to another embodiment of the present invention includes a seal member made of an electrically insulating inorganic material and having a plurality of through holes formed therein; An electrical wiring penetration device comprising: a conductor; a metallized layer airtightly attached to a surface of the sealing member surrounding each of the plurality of through holes; and a brazing material portion airtightly joining the metallized layer and the conductor. A partition portion extending along the surface of the seal member is formed so as to partition the plurality of through holes, and the metallized layer forms the plurality of partition portions on the surface of the seal member other than the partition portion. The partition portion is formed so as to surround each of the through-holes, and the partition portion is a partition wall extending along the surface of the seal member, and at least the top portion of the surface of the partition wall includes the metallized layer and the brazing material portion. is not in contact with any of

本発明の実施形態に係る電気配線貫通装置製造方法は、電気絶縁性の無機物材料からなるシール部材に複数の貫通孔を形成し、前記シール部材の表面に沿って複数の前記貫通孔同士の間を仕切って延びるように仕切り部を形成するシール部材形成ステップと、前記シール部材形成ステップの後に、前記シール部材の表面で前記仕切り部以外の部分において複数の前記貫通孔のそれぞれを囲むようにメタライズ層を気密に付着させるメタライズ層形成ステップと、前記メタライズ層形成ステップの後に、複数の前記貫通孔それぞれに金属製の導体を挿入する導体挿入ステップと、前記導体挿入ステップの後に、前記導体と前記メタライズ層とをろう材部によって気密に接合するろう付けステップと、を有することを特徴とする。
A method of manufacturing an electrical wiring penetration device according to an embodiment of the present invention includes forming a plurality of through holes in a sealing member made of an electrically insulating inorganic material, and forming a plurality of through holes along the surface of the sealing member. forming a partition portion so as to partition and extend the sealing member, and after the step of forming the sealing member, a portion other than the partition portion on the surface of the sealing member is metallized so as to surround each of the plurality of through holes a metallized layer forming step for airtightly adhering layers; a conductor inserting step for inserting a metal conductor into each of the plurality of through holes after the metallizing layer forming step; and after the conductor inserting step, the conductor and the and a brazing step of air-tightly joining the metallized layer with a brazing member.

本発明の実施形態によれば、無機物のシール部材を用いた電気配線貫通装置において、導体間絶縁性能を高めることができる。 According to the embodiment of the present invention, it is possible to improve the insulation performance between conductors in an electrical wiring penetration device using an inorganic sealing member.

本発明の第1の実施形態に係る電気配線貫通装置の断面図。BRIEF DESCRIPTION OF THE DRAWINGS Sectional drawing of the electrical wiring penetration apparatus which concerns on the 1st Embodiment of this invention. 図1のII部分の拡大断面図。FIG. 2 is an enlarged sectional view of part II of FIG. 1; 図1のIII-III線矢視断面であって、絶縁カバーを設けていない状態を示す図。FIG. 2 is a cross-sectional view taken along the line III-III of FIG. 1 and showing a state where an insulating cover is not provided; 図3のIV部分の拡大断面図。FIG. 4 is an enlarged sectional view of part IV of FIG. 3; 本発明の第1の実施形態に係る電気配線貫通装置の製造方法を示すフロー図。FIG. 2 is a flowchart showing a method of manufacturing the electrical wiring penetration device according to the first embodiment of the present invention; 本発明の第2の実施形態に係る電気配線貫通装置の断面図であって、図1のII部分に相当する部分の拡大断面図。FIG. 2 is a cross-sectional view of the electrical wiring penetration device according to the second embodiment of the present invention, being an enlarged cross-sectional view of a portion corresponding to the II portion of FIG. 1; 本発明の第3の実施形態に係る電気配線貫通装置の断面図であって、図1のII部分に相当する部分の拡大断面図。FIG. 3 is a cross-sectional view of an electrical wiring penetration device according to a third embodiment of the present invention, being an enlarged cross-sectional view of a portion corresponding to the II portion of FIG. 1; 本発明の第4の実施形態に係る電気配線貫通装置の断面図であって、図1のII部分に相当する部分の拡大断面図。FIG. 4 is a cross-sectional view of an electrical wiring penetration device according to a fourth embodiment of the present invention, being an enlarged cross-sectional view of a portion corresponding to the II portion of FIG. 1;

以下、本発明に係る電気配線貫通装置の実施形態について、図面を参照して説明する。ここで、互いに同一または類似の部分には共通の符号を付して、重複説明は省略する。 Hereinafter, an embodiment of an electrical wiring penetration device according to the present invention will be described with reference to the drawings. Here, the same or similar parts are denoted by common reference numerals, and repeated explanations are omitted.

[第1の実施形態]
図1は、本発明の第1の実施形態に係る電気配線貫通装置の断面図である。図2は図1のII部分の拡大断面図である。図3は、図1のIII-III線矢視断面であって、絶縁カバーを設けていない状態を示す図である。図4は図3のIV部分の拡大断面図である。
[First embodiment]
FIG. 1 is a cross-sectional view of an electrical wiring penetration device according to a first embodiment of the present invention. FIG. 2 is an enlarged sectional view of part II of FIG. FIG. 3 is a cross-sectional view taken along the line III--III in FIG. 1, showing a state in which the insulating cover is not provided. FIG. 4 is an enlarged cross-sectional view of the IV portion of FIG.

本実施形態に係る電気配線貫通装置は、たとえば円柱状の電気絶縁性の無機材料からなるシール部材11と、シール部材11を貫通する金属製の複数の導体12と、を有する。シール部材11には複数の貫通孔13が軸方向に互いに平行に形成され、各導体12が各貫通孔13内を貫通する。 The electrical wiring penetration device according to the present embodiment has, for example, a cylindrical sealing member 11 made of an electrically insulating inorganic material and a plurality of metallic conductors 12 penetrating through the sealing member 11 . A plurality of through holes 13 are formed in the sealing member 11 in parallel with each other in the axial direction, and each conductor 12 passes through each through hole 13 .

シール部材11は、たとえばガラスやセラミックが用いられる。導体12は、線状に延び、銅などの高電気伝導率材料が用いられる。 For example, glass or ceramic is used for the sealing member 11 . The conductor 12 extends linearly and is made of a high electrical conductivity material such as copper.

ガラスやセラミックなどの無機材料は直接ろう付けなどによる接続ができないので、シール部材11の表面で導体12を取り囲む位置にメタライズ層14(図2、図3、図4参照)を形成し、メタライズ層14と導体12の間にろう材部15を形成する。これにより、導体12とシール部材11との間が、メタライズ層14およびろう材部15を介して、気密にかつ強固に接合される。ここで、メタライズ層14としては、たとえばMo-MnやAg-Cu-Tiが適用可能である。また、ろう材部15としては、たとえばAg-CuやAu-Niが適用可能である。 Since inorganic materials such as glass and ceramics cannot be directly connected by brazing or the like, a metallized layer 14 (see FIGS. 2, 3 and 4) is formed at a position surrounding the conductor 12 on the surface of the sealing member 11, and the metallized layer A brazing member 15 is formed between 14 and conductor 12 . As a result, the conductor 12 and the sealing member 11 are airtightly and firmly joined via the metallized layer 14 and the brazing material portion 15 . Here, as the metallized layer 14, for example, Mo--Mn or Ag--Cu--Ti can be applied. Further, Ag--Cu or Au--Ni, for example, can be applied as the brazing material portion 15 .

図3に示すように、導体12は、千鳥格子状に配列されている。これにより、限られたシール部材11の大きさの中で、導体12同士の最近接部の距離を所定値以上に保ちながら最大数の導体12を配列することができる。 As shown in FIG. 3, the conductors 12 are arranged in a houndstooth pattern. As a result, the maximum number of conductors 12 can be arranged within the limited size of the seal member 11 while maintaining the distance between the closest portions of the conductors 12 to a predetermined value or more.

この実施形態では、シール部材11の表面でメタライズ層14から離れた位置に、貫通孔13同士を仕切るように溝16が形成されている。溝16内にはメタライズ層14もろう材部15も存在しないのが好ましい。特に、少なくとも溝16の底部17(図2参照)にはメタライズ層14もろう材部15も存在しないのが好ましい。 In this embodiment, a groove 16 is formed on the surface of the sealing member 11 at a position apart from the metallized layer 14 so as to separate the through holes 13 from each other. Preferably, neither the metallization layer 14 nor the brazing material portion 15 are present in the grooves 16 . In particular, it is preferable that neither the metallization layer 14 nor the brazing material portion 15 are present at least on the bottom portion 17 (see FIG. 2) of the groove 16 .

図3および図4に示すように、シール部材11の表面で各貫通孔13を囲むようにメタライズ層14が形成され、各メタライズ層14を取り囲むように溝16が網目状に形成されている。図3および図4に示す例では、各メタライズ層14は六角形状であるが、円形であってもよい。また、図3および図4に示す例では、メタライズ層14は溝16の縁にまで延びているが、メタライズ層14の外縁は溝16の縁まで延びている必要はなく、メタライズ層14の外縁が溝16の縁の手前まで延びている構成でもよい。 As shown in FIGS. 3 and 4, a metallized layer 14 is formed on the surface of the sealing member 11 so as to surround each through hole 13, and grooves 16 are formed in a mesh shape so as to surround each metallized layer 14. As shown in FIGS. In the example shown in FIGS. 3 and 4, each metallization layer 14 has a hexagonal shape, but it could also be circular. Also, in the examples shown in FIGS. 3 and 4, the metallization layer 14 extends to the edges of the grooves 16, but the outer edges of the metallization layer 14 need not extend to the edges of the grooves 16. may extend to just before the edge of the groove 16.

このように、貫通孔13同士を仕切るように溝16が形成されていることから、互いに隣接するメタライズ層14同士の間で長い沿面距離を確保することができる。それにより、シール部材11の表面に沿った気中放電を避けることができ、絶縁性能を向上することができる。 Since the grooves 16 are formed so as to partition the through holes 13 in this manner, a long creepage distance can be secured between the metallized layers 14 adjacent to each other. Thereby, air discharge along the surface of the seal member 11 can be avoided, and the insulation performance can be improved.

さらに、溝16内には、電気絶縁材の絶縁充填材21が充填されている。また、シール部材11、メタライズ層14、ろう材部15および絶縁充填材21の全体を覆うように電気絶縁材の絶縁カバー(絶縁コーティング)22が配置されている。絶縁充填材21および絶縁カバー22に適用される絶縁材料は、特に、耐高温性に優れたものであることが好ましく、たとえば、エポキシ樹脂である。また、絶縁充填材21および絶縁カバー22に異なる絶縁材料を用いてもよい。このように、メタライズ層14の外気に触れる部分に絶縁充填材21および絶縁カバー22が配置されることにより、気中放電を避けることができ、絶縁性能を向上することができる。 Furthermore, the groove 16 is filled with an insulating filler 21 of an electrical insulating material. An insulating cover (insulating coating) 22 made of an electrical insulating material is arranged so as to cover the sealing member 11 , the metallized layer 14 , the brazing material portion 15 and the insulating filler 21 as a whole. The insulating material applied to insulating filler 21 and insulating cover 22 preferably has particularly high temperature resistance, such as epoxy resin. Also, different insulating materials may be used for the insulating filler 21 and the insulating cover 22 . By arranging the insulating filler 21 and the insulating cover 22 on the portion of the metallized layer 14 exposed to the outside air in this way, air discharge can be avoided and the insulating performance can be improved.

なお、上記説明では絶縁充填材21および絶縁カバー22を区別して記述したが、これらは一体のものとして絶縁カバー22でメタライズ層14およびろう材部15を覆うようにしてもよい。 In the above description, the insulating filler 21 and the insulating cover 22 are described separately, but they may be integrated and the insulating cover 22 may cover the metallized layer 14 and the brazing material portion 15 .

以上説明したように、第1の実施形態によれば、複数の導体12を千鳥配置とすることにより、導体12同士の間の最接近部の距離を所定値以上に保ちながら最大数の導体12を配列することができる。また、導体12間のシール部材11の表面に溝16を形成することにより、各導体12と無機物シール部材11を接合するためのメタライズ層14同士の間の沿面距離が確保される。また、形成した溝16内に絶縁材料を充填し、絶縁材料がメタライズ層14の溝16近傍を覆うような形状とすることにより、メタライズ層14間の気中放電を防止し、導体12間の絶縁性能を確保することができる。 As described above, according to the first embodiment, by staggering the plurality of conductors 12, the maximum number of conductors 12 can be obtained while maintaining the distance of the closest portion between the conductors 12 at a predetermined value or more. can be arranged. Further, by forming grooves 16 on the surface of the sealing member 11 between the conductors 12, the creepage distance between the metallized layers 14 for joining the conductors 12 and the inorganic sealing member 11 is ensured. In addition, by filling the formed grooves 16 with an insulating material and forming a shape in which the insulating material covers the vicinity of the grooves 16 of the metallized layer 14, air discharge between the metallized layers 14 is prevented, and the electrical discharge between the conductors 12 is prevented. Insulation performance can be secured.

ここで、第1の実施形態に係る電気配線貫通装置の製造方法について説明する。図5は、本発明の第1の実施形態に係る電気配線貫通装置の製造方法を示すフロー図である。 Here, a method for manufacturing the electrical wiring penetration device according to the first embodiment will be described. FIG. 5 is a flowchart showing a method of manufacturing an electrical wiring feed-through device according to the first embodiment of the present invention.

初めに、電気絶縁性の無機材料からシール部材11を形成する(シール部材形成ステップS11)。シール部材11には、複数の貫通孔13を形成し、また、溝16を形成する。貫通孔13および溝16は、切削加工などによって形成してもよいし、焼成などにより初めから一体的に形成してもよい。 First, the seal member 11 is formed from an electrically insulating inorganic material (seal member forming step S11). A plurality of through holes 13 and grooves 16 are formed in the seal member 11 . The through holes 13 and the grooves 16 may be formed by cutting or the like, or may be integrally formed from the beginning by firing or the like.

つぎに、各貫通孔13を囲むシール部材11の表面で溝16以外の部分にメタライズ層14を気密に付着させる(メタライズ層形成ステップS12)。つぎに、複数の貫通孔13それぞれに金属製の導体12を挿入する(導体挿入ステップS13)。つぎに、導体12とメタライズ層14との間をろう付けしてろう材部15を形成する(ろう付けステップS14)。つぎに、溝16内に絶縁充填材21を充填する(溝充填ステップS15)。つぎに、メタライズ層14およびろう材部15全体を絶縁カバー22で覆うように、コーティングを行う(コーティングステップS16)。 Next, the metallized layer 14 is hermetically adhered to the surface of the sealing member 11 surrounding each through hole 13 except for the grooves 16 (metallized layer forming step S12). Next, a metal conductor 12 is inserted into each of the plurality of through holes 13 (conductor insertion step S13). Next, brazing is performed between the conductor 12 and the metallized layer 14 to form the brazing member 15 (brazing step S14). Next, the groove 16 is filled with the insulating filler 21 (groove filling step S15). Next, coating is performed so as to cover the entire metallized layer 14 and brazing material portion 15 with the insulating cover 22 (coating step S16).

以上説明したように、第1の実施形態に係る電気配線貫通装置を組み立てることができる。 As described above, the electrical wiring penetration device according to the first embodiment can be assembled.

[第2の実施形態]
図6は、本発明の第2の実施形態に係る電気配線貫通装置の断面図であって、図1のII部分に相当する部分の拡大断面図である。
[Second embodiment]
FIG. 6 is a cross-sectional view of an electrical wire feed-through device according to a second embodiment of the present invention, and is an enlarged cross-sectional view of a portion corresponding to the portion II in FIG.

この第2の実施形態は第1の実施形態の変形であって、第1の実施形態の溝16を隔壁30に置き換えた構成である。第1の実施形態における図3および図4に相当する図は省略するが、この第2の実施形態では、図3および図4で溝16として表示されている部分が隔壁30に置き換えられる。 The second embodiment is a modification of the first embodiment, and has a structure in which the grooves 16 of the first embodiment are replaced with partition walls 30. FIG. Although drawings corresponding to FIGS. 3 and 4 in the first embodiment are omitted, in this second embodiment, the portions shown as grooves 16 in FIGS.

すなわち、この第2の実施形態では、シール部材11の表面でメタライズ層14から離れた位置に、貫通孔13同士を仕切るように隔壁30が形成されている。隔壁30の表面にはメタライズ層14もろう材部15も存在しないのが好ましい。特に、少なくとも隔壁30の頂部31にはメタライズ層14もろう材部15も存在しないのが好ましい。 That is, in the second embodiment, a partition wall 30 is formed on the surface of the seal member 11 at a position apart from the metallized layer 14 so as to separate the through holes 13 from each other. It is preferable that neither the metallized layer 14 nor the brazing material portion 15 exist on the surface of the partition wall 30 . In particular, it is preferable that neither the metallized layer 14 nor the brazing material portion 15 exist at least on the top portion 31 of the partition wall 30 .

図3および図4に示す構成とほぼ同様に、この第2の実施形態では、シール部材11の表面で各貫通孔13を囲むようにメタライズ層14が形成され、各メタライズ層14を取り囲むように隔壁30が網目状に形成されている。ただし、この第2の実施形態では、図3および図4に示す溝16の代わりに隔壁30が配置されている。 3 and 4, in this second embodiment, the metallized layer 14 is formed so as to surround each through-hole 13 on the surface of the seal member 11, and the metallized layer 14 is formed so as to surround each metallized layer 14. A partition wall 30 is formed in a mesh shape. However, in this second embodiment, partition walls 30 are arranged instead of the grooves 16 shown in FIGS.

メタライズ層14の外縁は隔壁30の縁まで延びていてもよいし、隔壁30の縁の手前まで延びていてもよい。 The outer edge of the metallized layer 14 may extend to the edge of the partition wall 30 or may extend just before the edge of the partition wall 30 .

この第2の実施形態では、貫通孔13同士を仕切るように隔壁30が形成されていることから、互いに隣接するメタライズ層14の間で長い沿面距離を確保することができる。それにより、シール部材11の表面に沿った気中放電を避けることができ、絶縁性能を向上することができる。 In the second embodiment, since the partition walls 30 are formed so as to partition the through holes 13, a long creepage distance can be secured between the metallized layers 14 adjacent to each other. Thereby, air discharge along the surface of the seal member 11 can be avoided, and the insulation performance can be improved.

さらにこの第2の実施形態では、隔壁30で囲まれた領域内には、電気絶縁材の絶縁充填材21が充填されている。また、シール部材11、メタライズ層14、ろう材部15および絶縁充填材21の全体を覆うように電気絶縁材の絶縁カバー22が配置されている。この第2の実施形態における絶縁充填材21および電気絶縁材の絶縁カバー22の機能や構成材料は、第1の実施形態の場合と同様である。 Furthermore, in the second embodiment, the area surrounded by the partition wall 30 is filled with an insulating filler 21 of an electrical insulating material. An insulating cover 22 made of an electrical insulating material is arranged so as to cover the sealing member 11 , the metallized layer 14 , the brazing material portion 15 and the insulating filler 21 as a whole. The functions and constituent materials of the insulating filler 21 and the insulating cover 22 made of an electrical insulating material in the second embodiment are the same as in the first embodiment.

以上説明したように、第2の実施形態によれば、第1の実施形態とほぼ同様に、導体12同士の間の最接近部の距離を所定値以上に保ちながら最大数の導体12を配列することができ、各導体12と無機物シール部材11を接合するためのメタライズ層14同士の間の沿面距離を確保できる。また、メタライズ層14間の気中放電を防止し、導体12間の絶縁性能を確保することができる。 As described above, according to the second embodiment, substantially the same as in the first embodiment, the maximum number of conductors 12 are arranged while maintaining the distance of the closest portion between the conductors 12 at a predetermined value or more. It is possible to secure the creepage distance between the metallized layers 14 for bonding each conductor 12 and the inorganic sealing member 11 . Also, air discharge between the metallized layers 14 can be prevented, and insulation performance between the conductors 12 can be ensured.

[第3の実施形態]
図7は、本発明の第3の実施形態に係る電気配線貫通装置の断面図であって、図1のII部分に相当する部分の拡大断面図である。
[Third embodiment]
FIG. 7 is a cross-sectional view of an electrical wire feed-through device according to a third embodiment of the present invention, and is an enlarged cross-sectional view of a portion corresponding to the portion II in FIG.

第3の実施形態は第1の実施形態の変形である。この第3の実施形態では、シール部材11の貫通孔13のうちで、ろう材部15に近い部分が他の部分よりも大径となって孔大径部40が形成され、その孔大径部40の内面およびその周辺のシール部材11の表面にメタライズ層14が形成されている。 The third embodiment is a modification of the first embodiment. In the third embodiment, in the through hole 13 of the seal member 11, the portion closer to the brazing material portion 15 has a larger diameter than the other portions to form a hole large diameter portion 40, and the hole large diameter portion 40 is formed. A metallized layer 14 is formed on the inner surface of the portion 40 and the surface of the sealing member 11 around it.

ろう材部15は、メタライズ層14と導体12とを接合するように形成されている。孔大径部40の内面に沿って形成されたメタライズ層14と導体12との間の環状の隙間は、ろう材で充満されてろう材部15の一部を構成する。 The brazing material part 15 is formed so as to join the metallized layer 14 and the conductor 12 . An annular gap between the metallized layer 14 formed along the inner surface of the large-diameter hole 40 and the conductor 12 is filled with a brazing material to constitute a part of the brazing material part 15 .

この第3の実施形態によれば、第1の実施形態と同様の効果が得られることに加えて、孔大径部40にメタライズ層14およびろう材部15が形成されることから、導体12とシール部材11との接合面積が大きくなり、強度や耐圧性能の向上を図ることができる。 According to the third embodiment, in addition to obtaining the same effect as the first embodiment, since the metallized layer 14 and the brazing material portion 15 are formed in the hole large diameter portion 40, the conductor 12 and the sealing member 11, the bonding area is increased, and the strength and pressure resistance performance can be improved.

[第4の実施形態]
図8は、本発明の第4の実施形態に係る電気配線貫通装置の断面図であって、図1のII部分に相当する部分の拡大断面図である。
[Fourth embodiment]
FIG. 8 is a cross-sectional view of an electrical wire feed-through device according to a fourth embodiment of the present invention, and is an enlarged cross-sectional view of a portion corresponding to the portion II in FIG.

第4の実施形態は第3の実施形態の変形である。上述の第3の実施形態では、第1の実施形態の変形として、貫通孔13に孔大径部40が形成されているものとした。第4の実施形態では、第3の実施形態における貫通孔13の孔大径部40に相当するものを、前述の第2の実施形態の電気配線貫通装置に組み込む。 The fourth embodiment is a modification of the third embodiment. In the third embodiment described above, as a modification of the first embodiment, the hole large diameter portion 40 is formed in the through hole 13 . In the fourth embodiment, the hole large-diameter portion 40 of the through hole 13 in the third embodiment is incorporated into the electrical wiring penetration device of the second embodiment.

すなわち、第4の実施形態では、第2の実施形態の電気配線貫通装置と同様の電気配線貫通装置において、シール部材11の貫通孔13のうちで、ろう材部15に近い部分が他の部分よりも大径となって孔大径部40が形成され、その孔大径部40の内面およびその周辺のシール部材11の表面にメタライズ層14が形成されている。ろう材部15は、メタライズ層14と導体12とを接合するように形成されている。 That is, in the fourth embodiment, in the electrical wiring penetration device similar to the electrical wiring penetration device of the second embodiment, the portion of the through hole 13 of the seal member 11 near the brazing material portion 15 is the other portion. A hole large-diameter portion 40 is formed with a larger diameter than the hole, and a metallized layer 14 is formed on the inner surface of the hole large-diameter portion 40 and the surface of the sealing member 11 around it. The brazing material part 15 is formed so as to join the metallized layer 14 and the conductor 12 .

この第4の実施形態によれば、第3の実施形態と同様の効果が得られる。 According to the fourth embodiment, effects similar to those of the third embodiment are obtained.

[他の実施形態]
以上、本発明のいくつかの実施形態を説明したが、これらの実施形態は、例として提示したものであり、発明の範囲を限定することは意図していない。これら実施形態は、その他の様々な形態で実施されることが可能であり、発明の要旨を逸脱しない範囲で、種々の省略、置き換え、変更を行うことができる。これら実施形態やその変形は、発明の範囲や要旨に含まれると同様に、特許請求の範囲に記載された発明とその均等の範囲に含まれるものである。
[Other embodiments]
Although several embodiments of the invention have been described above, these embodiments are presented by way of example and are not intended to limit the scope of the invention. These embodiments can be implemented in various other forms, and various omissions, replacements, and modifications can be made without departing from the scope of the invention. These embodiments and their modifications are included in the scope and spirit of the invention, as well as the scope of the invention described in the claims and equivalents thereof.

11…シール部材、 12…導体、 13…貫通孔、 14…メタライズ層、 15…ろう材部、 16…溝、 17…底部、 21…絶縁充填材、 22…絶縁カバー、 30…隔壁、 31…頂部、 40…孔大径部 DESCRIPTION OF SYMBOLS 11... Seal member 12... Conductor 13... Through hole 14... Metallized layer 15... Brazing material part 16... Groove 17... Bottom part 21... Insulating filler 22... Insulating cover 30... Partition wall 31... top part, 40... hole large diameter part

Claims (9)

電気絶縁性の無機物材料からなり複数の貫通孔が形成されたシール部材と、
前記シール部材の前記貫通孔を貫通する金属製の導体と、
複数の前記貫通孔それぞれを囲む前記シール部材の表面に気密に付着したメタライズ層と、
前記メタライズ層と前記導体とを気密に接合するろう材部と、
を有する電気配線貫通装置であって、
前記シール部材は、複数の前記貫通孔同士の間を仕切るように当該シール部材の表面に沿って延びる仕切り部を有し
前記メタライズ層は、前記シール部材の表面で前記仕切り部以外の部分において複数の前記貫通孔のそれぞれを囲むように形成されている、
ことを特徴とする電気配線貫通装置。
a sealing member made of an electrically insulating inorganic material and having a plurality of through holes;
a metal conductor passing through the through-hole of the sealing member;
a metallized layer hermetically adhered to the surface of the sealing member surrounding each of the plurality of through-holes;
a brazing material portion that airtightly joins the metallized layer and the conductor;
An electrical wiring penetration device comprising:
The sealing member has a partition extending along the surface of the sealing member so as to partition the plurality of through holes,
The metallized layer is formed so as to surround each of the plurality of through-holes on the surface of the sealing member other than the partition portion,
An electrical wiring penetration device characterized by:
前記仕切り部は、前記シール部材の表面に沿って延びる溝であって、前記溝の表面のうちの少なくとも底部が前記メタライズ層と前記ろう材部のいずれとも接していないこと、
を特徴とする請求項1に記載の電気配線貫通装置。
The partition portion is a groove extending along the surface of the seal member, and at least a bottom portion of the surface of the groove is in contact with neither the metallized layer nor the brazing material portion;
The electrical wiring penetration device according to claim 1, characterized by:
前記溝内に電気絶縁材の絶縁充填材が充填されていること、を特徴とする請求項2に記載の電気配線貫通装置。 3. The electrical wire feed-through device according to claim 2, wherein said groove is filled with an insulating filler made of an electrical insulating material. 電気絶縁性の無機物材料からなり複数の貫通孔が形成されたシール部材と、
前記シール部材の前記貫通孔を貫通する金属製の導体と、
複数の前記貫通孔それぞれを囲む前記シール部材の表面に気密に付着したメタライズ層と、
前記メタライズ層と前記導体とを気密に接合するろう材部と、
を有する電気配線貫通装置であって、
複数の前記貫通孔同士の間を仕切るように前記シール部材の表面に沿って延びる仕切り部が形成され、
前記メタライズ層は、前記シール部材の表面で前記仕切り部以外の部分において複数の前記貫通孔のそれぞれを囲むように形成されており
前記仕切り部は、前記シール部材の表面に沿って延びる隔壁であって、前記隔壁の表面のうちの少なくとも頂部が前記メタライズ層と前記ろう材部のいずれとも接していないこと、
を特徴とする電気配線貫通装置。
a sealing member made of an electrically insulating inorganic material and having a plurality of through holes;
a metal conductor passing through the through-hole of the sealing member;
a metallized layer hermetically attached to the surface of the sealing member surrounding each of the plurality of through holes;
a brazing material portion that airtightly joins the metallized layer and the conductor;
An electrical wiring penetration device comprising:
forming a partition extending along the surface of the sealing member so as to partition between the plurality of through-holes;
The metallized layer is formed so as to surround each of the plurality of through-holes on the surface of the sealing member other than the partition portion,
The partition portion is a partition wall extending along the surface of the sealing member, and at least a top portion of a surface of the partition wall is in contact with neither the metallized layer nor the brazing material portion;
An electrical wiring penetration device characterized by:
前記隔壁は、前記貫通孔と、前記メタライズ層と、前記ろう材部とを囲むように配置され、
前記隔壁で囲まれた領域内に電気絶縁材の絶縁充填材が充填されていること、を特徴とする請求項4に記載の電気配線貫通装置。
The partition wall is arranged to surround the through hole, the metallized layer, and the brazing material portion,
5. The electrical wiring penetration device according to claim 4, wherein the area surrounded by the partition wall is filled with an insulating filler made of an electrical insulating material.
前記シール部材、前記メタライズ層および前記ろう材部の表面を覆う電気絶縁材の絶縁カバーをさらに有すること、を特徴とする請求項1に記載の電気配線貫通装置。 2. The electrical wiring penetration device according to claim 1, further comprising an insulating cover made of an electrical insulating material covering surfaces of said sealing member, said metallized layer and said brazing material portion. 複数の前記貫通孔が千鳥配置されていること、を特徴とする請求項1に記載の電気配線貫通装置。 2. The electrical wiring penetration device according to claim 1, wherein the plurality of through holes are arranged in a zigzag pattern. 前記メタライズ層の一部は、前記シール部材の前記貫通孔の内表面の少なくとも一部に付着しており、前記ろう材部の一部は前記貫通孔の内表面に付着した前記メタライズ層の一部と前記導体とを接続していること、を特徴とする請求項1ないし請求項6のいずれか一項に記載の電気配線貫通装置。 A portion of the metallized layer adheres to at least a portion of the inner surface of the through hole of the seal member, and a portion of the brazing material portion adheres to the inner surface of the through hole. 7. The electrical wiring penetration device according to claim 1, wherein the portion and the conductor are connected. 電気絶縁性の無機物材料からなるシール部材に複数の貫通孔を形成し、前記シール部材の表面に沿って複数の前記貫通孔同士の間を仕切って延びるように仕切り部を形成するシール部材形成ステップと、
前記シール部材形成ステップの後に、前記シール部材の表面で前記仕切り部以外の部分において複数の前記貫通孔のそれぞれを囲むようにメタライズ層を気密に付着させるメタライズ層形成ステップと、
前記メタライズ層形成ステップの後に、複数の前記貫通孔それぞれに金属製の導体を挿入する導体挿入ステップと、
前記導体挿入ステップの後に、前記導体と前記メタライズ層とをろう材部によって気密に接合するろう付けステップと、
を有することを特徴とする電気配線貫通装置製造方法。
A sealing member forming step of forming a plurality of through holes in a sealing member made of an electrically insulating inorganic material, and forming a partition portion along the surface of the sealing member so as to partition and extend between the plurality of through holes. and,
a metallized layer forming step of airtightly adhering a metallized layer so as to surround each of the plurality of through-holes on the surface of the sealing member other than the partition portion, after the sealing member forming step;
a conductor inserting step of inserting a metallic conductor into each of the plurality of through-holes after the metallized layer forming step;
a brazing step of air-tightly joining the conductor and the metallized layer with a brazing material portion after the conductor inserting step;
A method for manufacturing an electrical wiring penetration device, comprising:
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