JP7206041B2 - cutting equipment - Google Patents

Description

The present invention relates to a cutting device.

Abrasive grains are buried in the bond material immediately after the cutting blade is attached to the spindle, and the rotation center of the spindle and the rotation center of the attached cutting blade are misaligned. The material is consumed, the center of rotation is aligned, and the abrasive grains are protruded from the bond material.

There are several types of dressing boards depending on the application and the type of cutting blade used for cutting. Dressing with the wrong combination of dressing board and cutting blade will render the dressing board ineffective. Therefore, it is important to ensure that the desired dressing board is attached to the cutting device. A device has been devised (see, for example, US Pat.

JP 2012-066328 A

However, in the cutting device disclosed in Patent Document 1, when the two-dimensional code is formed on the surface to be cut of the dressing board, the two-dimensional code is lost when the surface to be cut is cut. There is a risk of erroneously recognizing the type of dressing board because the two-dimensional code cannot be recognized.

SUMMARY OF THE INVENTION The present invention has been made in view of such problems, and an object thereof is to provide a cutting apparatus capable of suppressing erroneous recognition of the type of dressing board from which the surface to be cut has been cut. be.

In order to solve the above-described problems and achieve the object, the cutting apparatus of the present invention includes a chuck table for holding a workpiece, and a cutting blade mounted on a spindle for cutting the workpiece held on the chuck table. a cutting unit, a camera for photographing the workpiece held on the chuck table, a judgment unit for judging the type of the workpiece based on the image photographed by the camera, and lengthwise and widthwise from the blade thickness of the cutting blade. A cutting device comprising a two-dimensional code composed of a plurality of cells having a large width on a surface to be cut, and a sub-chuck table holding a dressing board to be cut by the cutting blade, wherein the determination unit is a type registration unit for registering type information of the dressing board to be cut by the cutting blade; An image registration unit for registering a photographed image in which the colored cells and cutting grooves of the two-dimensional code are displayed in black and other areas are displayed in white; and a dilation processing unit that whitens the cut grooves displayed in black and removes the cut grooves from the photographed image; Erosion processing is performed to blacken the entire region where black and white are mixed in terms of area, and the shrunk cells displayed in black by the dilation processing are expanded to shape the cells to the size before the dilation processing, and before cutting an erosion processing unit that restores the two-dimensional code of the above, reads the type information of the dressing board from the two-dimensional code restored by the erosion processing, and reads the read information and the dressing registered in advance in the type registration unit. a type determination unit that determines whether or not the type information of the board matches, the type determination unit stores the read information and the type information of the dressing board pre-registered in the type registration unit. If it is determined that the information does not match, the processing operation is stopped, and if it is determined that the read information matches the type information of the dressing board registered in advance in the type registration unit, a dressing step for dressing the cutting blade is performed. Characterized by progress .

In the cutting device, the vertical and horizontal widths of the cells may be two or more times the thickness of the cutting blade.

In the cutting device, the field of view of the camera is narrower than the two-dimensional code, and the photographed image processed by the determination unit is a combination of a plurality of images including a part of the two-dimensional code photographed by the camera. may be configured.

In the cutting apparatus, the determination unit includes a brightness distribution registration unit for registering the brightness distribution of a reference image obtained by photographing the cut surface of the dressing board without the two-dimensional code, and the two-dimensional code. A brightness difference removing unit for removing the brightness distribution registered in the reference image from the brightness distribution of the captured image may be provided, and the brightness distribution of the captured image captured by the camera may be smoothed.

ADVANTAGE OF THE INVENTION The cutting apparatus of this invention produces the effect that it can suppress erroneously recognizing the kind of dressing board by which the surface to be cut was cut.

FIG. 1 is a perspective view showing a configuration example of a cutting device according to Embodiment 1. FIG. FIG. 2 is a diagram showing a main part of a cutting unit of the cutting device shown in FIG. 1; 3 is a side view showing a main part of the cutting device shown in FIG. 1. FIG. 4 is a plan view showing an example of a dressing board of the cutting device shown in FIG. 1. FIG. 5 is a plan view showing an enlarged portion V in FIG. 4. FIG. FIG. 6 is a diagram showing an example of a reference image registered in the luminance distribution registration section of the control unit of the cutting apparatus shown in FIG. 1; FIG. 7 is a diagram showing an example of a photographed image registered in a luminance difference removing section of the control unit of the cutting apparatus shown in FIG. 1; 8 is a diagram showing an example of a binarized photographed image registered in the image registration section of the control unit of the cutting apparatus shown in FIG. 1. FIG. FIG. 9 is a flowchart showing a cutting blade dressing method performed by the cutting apparatus according to the first embodiment. FIG. 10 is a diagram showing an example of a binarized photographed image registered in the photographed image registration step of the cutting blade dressing method shown in FIG. FIG. 11 is a diagram for explaining the dilation processing step and the erosion processing step of the cutting blade dressing method shown in FIG. FIG. 12 is an example of a photographed image after the dilation processing step of the cutting blade dressing method shown in FIG. FIG. 13 is an example of a photographed image after the erosion processing step of the cutting blade dressing method shown in FIG.

A form (embodiment) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited by the contents described in the following embodiments. In addition, the components described below include those that can be easily assumed by those skilled in the art and those that are substantially the same. Furthermore, the configurations described below can be combined as appropriate. In addition, various omissions, substitutions, or changes in configuration can be made without departing from the gist of the present invention.

[Embodiment 1]
A cutting device according to Embodiment 1 of the present invention will be described with reference to the drawings. FIG. 1 is a perspective view showing a configuration example of a cutting device according to Embodiment 1. FIG. FIG. 2 is a diagram showing a main part of a cutting unit of the cutting device shown in FIG. 1; 3 is a side view showing a main part of the cutting device shown in FIG. 1. FIG. 4 is a plan view showing an example of a dressing board of the cutting device shown in FIG. 1. FIG. 5 is a plan view showing an enlarged portion V in FIG. 4. FIG.

A cutting device 1 according to Embodiment 1 is a device for cutting (machining) a workpiece 200 that is a plate-like object. In Embodiment 1, the workpiece 200 is a disk-shaped semiconductor wafer or optical device wafer whose base material is silicon, sapphire, gallium, or the like. A workpiece 200 has devices 203 formed in regions partitioned in a grid pattern by a plurality of division lines 202 formed in a grid pattern on a surface 201 . The workpiece 200 of the present invention may be a so-called TAIKO (registered trademark) wafer having a thin central portion and a thick outer peripheral portion. A rectangular package substrate, a ceramic plate, a glass plate, or the like may be used. The back surface 204 of the workpiece 200 is adhered to an adhesive tape 210 as a protective member. An annular frame 211 is attached to the outer periphery of the adhesive tape 210 .

A cutting apparatus 1 shown in FIG. 1 is an apparatus that holds a workpiece 200 having a planned dividing line 202 on a chuck table 10 and cuts the workpiece 200 along the planned dividing line 202 with a cutting blade 21 . As shown in FIG. 1, the cutting apparatus 1 includes a chuck table 10 that sucks and holds a workpiece 200 on a holding surface 11, and a cutting blade 21 that mounts the workpiece 200 held on the chuck table 10 on a spindle 22. A cutting unit 20 for cutting, a camera 30 for photographing a workpiece 200 held on a chuck table 10, and a control unit 100 are provided.

As shown in FIG. 1, the cutting apparatus 1 includes an X-axis movement unit (not shown) for processing and feeding the chuck table 10 in the horizontal direction and the X-axis direction parallel to the lateral direction of the apparatus main body 2, and a cutting unit 20. A Y-axis moving unit 40 for indexing and feeding in the Y-axis direction parallel to the horizontal direction and the longitudinal direction of the apparatus body 2 and orthogonal to the X-axis direction, and the cutting unit 20 orthogonal to both the X-axis direction and the Y-axis direction. At least a Z-axis moving unit 50 for cutting and feeding in the Z-axis direction parallel to the vertical direction is provided. As shown in FIG. 1, the cutting device 1 is a two-spindle dicer, that is, a so-called facing dual type cutting device provided with two cutting units 20 .

The chuck table 10 has a disk shape, and a holding surface 11 for holding the workpiece 200 is formed of porous ceramic or the like. The chuck table 10 is movable by an X-axis moving unit and rotatable by a rotary drive source. The chuck table 10 is connected to a vacuum suction source (not shown) and is sucked by the vacuum suction source to suck and hold the workpiece 200 . A plurality of clamping portions 12 for clamping the annular frame 211 are provided around the chuck table 10 .

2 and 3, the cutting unit 20 has a spindle 22 on which a cutting blade 21 for cutting a workpiece 200 held on the chuck table 10 is mounted. The cutting units 20 are provided to be movable in the Y-axis direction by the Y-axis movement unit 40 with respect to the workpiece 200 held on the chuck table 10, and are movable in the Z-axis direction by the Z-axis movement unit 50. It is movably provided.

As shown in FIG. 1, one cutting unit 20 is provided on one pillar 3 erected from the apparatus main body 2 via a Y-axis moving unit 40, a Z-axis moving unit 50, and the like. The other cutting unit 20, as shown in FIG. 1, is provided on the other column portion 4 erected from the apparatus main body 2 via a Y-axis moving unit 40, a Z-axis moving unit 50, and the like. The pillars 3 and 4 are connected by a horizontal beam 5 at their upper ends.

The cutting unit 20 can position the cutting blade 21 at any position on the holding surface 11 of the chuck table 10 by the Y-axis moving unit 40 and the Z-axis moving unit 50 .

The cutting blade 21 is an ultra-thin cutting whetstone having a substantially ring shape. The spindle 22 cuts the workpiece 200 by rotating the cutting blade 21 . The spindle 22 is housed within a spindle housing 23 , and the spindle housing 23 is supported by a Z-axis movement unit 50 . Axial centers of the spindle 22 and the cutting blade 21 of the cutting unit 20 are set parallel to the Y-axis direction.

The X-axis movement unit relatively feeds the chuck table 10 and the cutting unit 20 along the X-axis direction by moving the chuck table 10 in the X-axis direction, which is the feed direction. The Y-axis moving unit 40 relatively moves the chuck table 10 and the cutting unit 20 along the Y-axis direction by moving the cutting unit 20 in the Y-axis direction, which is the indexing direction. The Z-axis moving unit 50 relatively moves the chuck table 10 and the cutting unit 20 along the Z-axis direction by moving the cutting unit 20 in the Z-axis direction, which is the direction of cutting and feeding.

The X-axis movement unit, the Y-axis movement unit 40 and the Z-axis movement unit 50 are well-known ball screws 41, 51 provided rotatably around the axis, and a well-known ball screw 41, 51 that rotates the ball screws 41, 51 around the axis. Known guide rails 43, 53 are provided for supporting the pulse motors 42, 52 and the chuck table 10 or the cutting unit 20 so as to be movable in the X-axis direction, the Y-axis direction, or the Z-axis direction.

The cutting apparatus 1 also includes an X-axis position detection unit (not shown) for detecting the position of the chuck table 10 in the X-axis direction, and a Y-axis position detection unit (not shown) for detecting the position of the cutting unit 20 in the Y-axis direction. A detection unit and a Z-axis direction position detection unit for detecting the position of the cutting unit 20 in the Z-axis direction are provided. The X-axis direction position detection unit and the Y-axis direction position detection unit can be composed of a linear scale parallel to the X-axis direction or the Y-axis direction and a reading head. The Z-axis direction position detection unit detects the position of the cutting unit 20 in the Z-axis direction using pulses from the pulse motor 52 . The X-axis direction position detection unit, the Y-axis direction position detection unit, and the Z-axis direction position detection unit output the position of the chuck table 10 in the X-axis direction and the cutting unit 20 in the Y-axis direction or Z-axis direction to the control unit 100. .

The cutting apparatus 1 also includes a cassette elevator 60 on which a cassette 61 containing workpieces 200 before and after cutting is placed and which moves the cassette 61 in the Z-axis direction, and a cleaning unit for cleaning the workpiece 200 after cutting. 70 and a transfer unit (not shown) that transfers the workpiece 200 into and out of the cassette 61 and transfers the workpiece 200 .

1 and 3, the cutting apparatus 1 includes a sub-chuck table 80 on which a dressing board 90, which is a workpiece, can be detachably attached. The sub-chuck table 80 is provided integrally with the chuck table 10 so as to be movable along the X-axis direction. The sub-chuck table 80 is formed in a rectangular shape and arranged at a position where the upper surface 81 is at the same height as the holding surface 11 of the chuck table 10 . The sub-chuck table 80 is a chuck table that is connected to a vacuum suction source (not shown) and sucks and holds the dressing board 90 placed on the upper surface 81 by being sucked by the vacuum suction source. In Embodiment 1, two sub-chuck tables 80 are provided in correspondence with the cutting unit 20 as one body, and hold a dressing board 90 of a type suitable for the cutting blade 21 of the corresponding cutting unit 20. .

The dressing board 90 restores the cutting ability of the cutting blade 21 by dressing the cutting blade 21 whose cutting ability has deteriorated due to clogging or crushing. Dressing the cutting blade 21 to recover the cutting ability of the cutting blade 21 is called dressing. That is, the dressing board 90 is a board held by the sub-chuck table 80 corresponding to the cutting blade 21, which is held by the sub-chuck table 80 and causes the cutting blade 21 to cut into the upper surface 91, which is the surface to be cut. be.

The dressing board 90 is formed in a rectangular plate shape whose planar shape is substantially the same as the upper surface 81 of the sub-chuck table 80 . The dressing board 90 is formed by mixing abrasive grains such as WA (white alundum, alumina-based) and GC (green carbonite, silicon carbide-based) into resin or ceramic bond material.

The dressing board 90 has a two-dimensional code 92 on its upper surface 91, as shown in FIG. The two-dimensional code 92 includes type information of the dressing board 90 indicating the type (model number) of the dressing board 90 and the like. The two-dimensional code 92, as shown in FIGS. 4 and 5, is composed of a plurality of cells 93 in which part of the upper surface 91 is colored with a color different from that of the upper surface 91. FIG. The cells 93 are arranged along the X-axis direction and the Y-axis direction, and the two-dimensional code 92 indicates the type of the dressing board 90 by the position of the cells 93, the number of the cells 93, and the like. Moreover, the planar shape of the plurality of cells 93 is formed in the same shape. In Embodiment 1, the planar shape of the cell 93 is formed into a polygonal shape in which widths 94 and 95 in the X-axis direction and the Y-axis direction, which are widths in the vertical and horizontal directions, are larger than the blade thickness 24 of the cutting blade 21 . In Embodiment 1, the widths 94 and 95 of the cells 93 in the X-axis direction and the Y-axis direction are two or more times the blade thickness 24 of the cutting blade 21 .

When the cutting blade 21 is cut into the upper surface 91 of the dressing board 90 , a cutting groove 96 indicated by a dotted line in FIG. 1 is formed in the upper surface 91 . In the first embodiment, the cut groove 96 is formed in a straight line parallel to the X-axis direction, has a constant width over the entire length, and is also formed on the two-dimensional code 92 . Thus, when the cutting grooves 96 are formed on the two-dimensional code 92 , the dressing board 90 includes the two-dimensional code 92 in which some of the cells 93 are cut off by the cutting blade 21 . In the first embodiment, the width of the cut groove 96 exceeds 0% of the widths 94 and 95 of the cell 93 in the X-axis direction and the Y-axis direction, and is about 80% or less, preferably 50% or less.

Also, one cutting unit 20 is fixed so that a camera 30 for photographing the surface 201 of the workpiece 200 moves integrally. The camera 30 has an imaging element that captures an area to be divided of the workpiece 200 before cutting held on the chuck table 10 . The imaging device is, for example, a CCD (Charge-Coupled Device) imaging device or a CMOS (Complementary MOS) imaging device. The camera 30 photographs the workpiece 200 held on the chuck table 10 as shown by the dotted line in FIG. An image is obtained and the obtained image is output to the control unit 100 . The image captured by the camera 30 is a two-dimensional image in which the intensity of light received by each imaging element is arranged in a first direction and a second direction that are orthogonal to each other. The intensity of light received by each imaging element is defined by one of 256 levels of gradation, for example.

3, the camera 30 photographs the two-dimensional code 92 of the dressing board 90 held on the sub-chuck table 80, and transmits the image of the two-dimensional code 92 obtained by the photographing to the control unit 100. output to Note that the visual field range 31 (indicated by a dotted line in FIG. 5) of the camera 30 of the cutting apparatus 1 according to Embodiment 1 is narrower than the area of the two-dimensional code 92 .

The camera 30 also includes epi-illumination (also called coaxial illumination) and oblique illumination for illuminating the workpiece 200 and the dressing board 90 . When the two-dimensional code 92 is photographed, the camera 30 is arranged so that the light intensity reflected by the cells 93 and the cut grooves 96 is below a predetermined threshold and the light intensity reflected by the uncut top surface 91 . Oblique lighting and coaxial lighting are adjusted to .

Next, the control unit 100 will be described with reference to the drawings. FIG. 6 is a diagram showing an example of a reference image registered in the luminance distribution registration section of the control unit of the cutting apparatus shown in FIG. 1; FIG. 7 is a diagram showing an example of a photographed image registered in a luminance difference removing section of the control unit of the cutting apparatus shown in FIG. 1; 8 is a diagram showing an example of a binarized photographed image registered in the image registration section of the control unit of the cutting apparatus shown in FIG. 1. FIG.

The control unit 100 controls the above-described components of the cutting device 1 to cause the cutting device 1 to perform a machining operation on the workpiece 200 . Note that the control unit 100 is a computer. The control unit 100 includes a display unit (not shown) configured by a liquid crystal display device or the like for displaying the state of the machining operation, an image, etc., an input unit 110 used by the operator to register machining content information, etc., and a notification unit 120. It is connected to the. The input unit 110 is composed of at least one of a touch panel provided on the display unit and an external input device such as a keyboard. The notification unit 120 emits an error signal from the control unit 100 to notify the operator with at least one of light and sound.

Also, the control unit 100 is a determination unit that determines the type of the dressing board 90 based on the image captured by the camera 30 . The control unit 100 includes a type registration unit 101, an image registration unit 102, a dilation processing unit 103, an erosion processing unit 104, and a type determination unit 105, as shown in FIG.

The type registration unit 101 registers information indicating the type (model number) of the dressing board 90 that is to be cut by the cutting blade 21 . In the first embodiment, the operator operates the input unit 110 to store (register) information indicating the type of the dressing board 90 held in each sub-chuck table 80 in the type registration section 101 of the control unit 100 .

The image registration unit 102 includes a luminance distribution registration unit 106, a luminance difference removal unit 107, and a binarization processing unit 108, as shown in FIG.

The brightness distribution registration unit 106 registers the brightness distribution of the reference image 300 shown in FIG. In the first embodiment, the operator operates the input unit 110 to photograph a region of the upper surface 91 of the dressing board 90 held by each sub-chuck table 80 where the two-dimensional code 92 and the cutting groove 96 are not formed. Then, the captured image is stored (registered) in the brightness distribution registration section 106 of the control unit 100 as the reference image 300 .

In the first embodiment, the brightness distribution registration unit 106 causes the camera 30 to photograph once the region in which the two-dimensional code 92 and the cut groove 96 are not formed on the upper surface 91 of the dressing board 90, and once shown in FIG. , is stored as a reference image 300 . Further, the reference image 300 is an image showing the intensity of light received by each imaging element of the camera 30 in one of 256 levels of gradation, for example. That is, the reference image 300 is a so-called grayscale image. In this way, the brightness distribution registration unit 106 registers the brightness distribution of the reference image 300 by storing the reference image 300, which is a grayscale image.

The luminance difference removing unit 107 removes the luminance distribution registered in the reference image 300 from the luminance distribution of the photographed image 400 shown in FIG. 7 including the two-dimensional code 92 . In the first embodiment, the luminance difference removing unit 107 causes the camera 30 to photograph the two-dimensional code 92 of the dressing board 90 held on the sub-chuck table 80, and the photographed image 400 shown in FIG. , is stored (registered) in the luminance difference removing section 107 of the control unit 100 .

In the first embodiment, the luminance difference removing unit 107 photographs a plurality of mutually different locations where the two-dimensional code 92 is provided with the camera 30, and as shown in FIG. A plurality of images 401 including a part of the two-dimensional code 92 are combined to form one photographed image 400 and stored. In this way, the captured image 400 processed by the control unit 100 is formed by combining a plurality of images 401 including a part of the two-dimensional code 92 captured by the camera 30 . The luminance difference removing unit 107 combines nine images 401 captured by the camera 30 to form a photographed image 400, but the number of images 401 constituting the photographed image 400 is not limited to nine. Also, the captured image 400 is an image showing the intensity of light received by each imaging element of the camera 30 in one of 256 levels of gradation, for example. That is, the captured image 400 is a so-called grayscale image. In this manner, the luminance difference removing unit 107 registers the luminance distribution of the captured image 400 by storing the captured image 400 that is a grayscale image. Note that an area representing light received by one of the reference image 300 and the captured image 400 is hereinafter referred to as a pixel.

The luminance difference removing unit 107 subtracts the light intensity of each pixel of the reference image 300 shown in FIG. The luminance distribution registered in the reference image 300 is removed from the luminance distribution 400 . It should be noted that when subtracting the light intensity of each pixel of the reference image 300 shown in FIG. use the strength of In this way, the luminance difference removing unit 107 removes the luminance distribution of the reference image 300 from the luminance distribution of the photographed image 400 including the two-dimensional code 92, and obtains the luminance of the photographed image 400 obtained by photographing with the camera 30. equalize the distribution of

In the photographed image 400 from which the luminance distribution of the reference image 300 has been removed by the luminance difference removing unit 107, the binarization processing unit 108 assigns “1” to pixels whose light intensity is equal to or higher than a predetermined threshold value (embodiment 1 is white), and pixels whose light intensity is below a predetermined threshold are binarized to be “0” (black in the first embodiment), and a binarized captured image 500 shown in FIG. 8 is generated. to store (register).

A binarized captured image 500 is an image in which each pixel is indicated by "1" or "0". That is, the captured image 500 is a so-called binary image. Note that the predetermined threshold exceeds the intensity of light reflected from the cells 93 and the cut grooves 96 and is lower than the intensity of light reflected from the uncut top surface 91, so the binarized values shown in FIG. The captured image 500 shows the cells 93 and cut grooves 96 as black or "0" and the uncut top surface 91 as white or "1".

In this way, the image registering unit 102 photographs the upper surface 91 of the dressing board 90 including the two-dimensional code 92 cut by the cutting blade 21 and partially missing with the camera 30, and the colored cells 93 of the two-dimensional code 92 and the cut image are captured. A binarized captured image 500 shown in FIG. 8 in which the groove 96 is displayed in black and other regions are displayed in white is generated and stored (registered). Note that the cut grooves 96 are omitted from the photographed images 400 and 500 shown in FIGS.

The dilation processing unit 103 performs dilation processing to whiten the entire area in which black and white are mixed in a predetermined unit area on the binarized captured image 500 , so that the binarized captured image 500 is displayed in black. The cut grooves 96 are removed from the photographed image 500 by whitening the cut grooves 96 . That is, the dilation processing unit 103 dilates the white area of the binarized photographed image 500 .

The erosion processing unit 104 performs erosion processing to blacken the entire area in which black and white are mixed in a predetermined unit area on the photographed image 500 that has undergone the dilation processing, and removes the cells 93 that are displayed in black due to the dilation processing. The cell 93 is shaped into the size before the dilation process by expanding it, and the two-dimensional code 92 before cutting is restored.

The type determination unit 105 reads information indicating the type of the dressing board 90 from the two-dimensional code 92 restored by the erosion process, and determines whether the information matches information indicating the type of the dressing board registered in the type registration unit 101 in advance. is determined.

In the cutting apparatus 1 having the configuration described above, the operator registers the processing content information in the control unit 100 , and the cassette 61 containing the workpiece 200 before cutting is installed in the cassette elevator 60 . As the processing content information, the operator operates the input unit 110 to register information indicating the type (model number) of the dressing board 90 held in each sub-chuck table 80 in the type registration unit 101 of the cutting device 1. . Also, the operator places a desired type of dressing board 90 on each sub-chuck table 80 and operates the input unit 110 to suck and hold the dressing board 90 on each sub-chuck table 80, and then registers the luminance distribution. The unit 106 is caused to photograph an area of the upper surface 91 of the dressing board 90 in which the two-dimensional code 92 and the cutting groove 96 are not formed, and store the reference image 300 .

After that, the cutting device 1 starts the machining operation when the operator gives an instruction to start the machining operation. When the cutting apparatus 1 starts the machining operation, the control unit 100 causes the conveying unit to take out the workpiece 200 before cutting from the cassette 61 , and the back surface 204 side of the workpiece 204 is placed on the holding surface of the chuck table 10 via the adhesive tape 210 . 11 is sucked and held, and the annular frame 211 is clamped by the clamp portion 12 .

The control unit 100 of the cutting apparatus 1 moves the chuck table 10 toward the lower side of the cutting unit 20 by the X-axis movement unit, and causes the camera 30 to photograph the workpiece 200. Alignment is performed based on the image. The control unit 100 of the cutting device 1 relatively moves the workpiece 200 and the cutting unit 20 along the planned division lines 202, and causes the cutting blade 21 to cut into each planned division line 202 to cut the workpiece. 200 is divided into individual devices 203 , and after washing the workpiece 200 divided into individual devices 203 by the washing unit 70 , it is housed in the cassette 61 . The control unit 100 of the cutting device 1 sequentially cuts the workpieces 200 accommodated in the cassette 61, and ends the machining operation when all the workpieces 200 in the cassette 61 have been cut.

When the control unit 100 determines that it is time to dress each cutting blade 21 during the machining operation, the control unit 100 performs the cutting blade dressing method shown in FIG. FIG. 9 is a flowchart showing a cutting blade dressing method performed by the cutting apparatus according to the first embodiment. FIG. 10 is a diagram showing an example of a binarized photographed image registered in the photographed image registration step of the cutting blade dressing method shown in FIG. FIG. 11 is a diagram for explaining the dilation processing step and the erosion processing step of the cutting blade dressing method shown in FIG. FIG. 12 is an example of a photographed image after the dilation processing step of the cutting blade dressing method shown in FIG. FIG. 13 is an example of a photographed image after the erosion processing step of the cutting blade dressing method shown in FIG.

The dressing timing is the timing for dressing the cutting blade 21 . The dressing timing is, for example, each time a preset number of division lines 202 are cut, is determined for each cutting blade 21, and is registered in the control unit 100 as part of the processing content information. In addition, the dressing timing of the present invention may be during the processing of one work piece 200, or may be the timing of exchanging the work pieces 200 when processing a plurality of work pieces 200 continuously. good.

When the control unit 100 determines that it is the dressing timing, it determines whether information indicating the type of the dressing board 90 held in the sub-chuck table 80 corresponding to the cutting blade 21 at the dressing timing is registered in the type registration unit 101. is determined (step ST1). The control unit 100 determines that information indicating the type of the dressing board 90 held in the sub-chuck table 80 corresponding to the cutting blade 21 at the dressing timing is not registered in the type registration section 101 (step ST1: No). Then, an error signal is output to the notification unit 120, and the notification unit 120 is made to notify, the machining operation of the cutting device 1 is temporarily stopped, and the process proceeds to the type information registration step ST2.

The type information registration step ST2 is a step of registering the type information of the dressing board 90 sucked and held on the sub-chuck table 80 in the type registration section 101 . In the type information registration step ST2, the operator operates the input unit 110 to register information indicating the type of the dressing board 90 held in each sub-chuck table 80 in the type registration unit 101, and the operator inputs the information. By operating the unit 110, the machining operation of the cutting device 1 is restarted. If the control unit 100 determines that information indicating the type of the dressing board 90 is registered in the type registration unit 101 (step ST1: Yes), or if the operator performs processing of the cutting device 1 in the type information registration step ST2 When the operation is restarted, it is determined whether or not the reference image 300 is registered in the brightness distribution registration unit 106 (step ST3).

If the control unit 100 determines that the reference image 300 is not registered in the brightness distribution registration unit 106 (step ST3: No), it outputs an error signal to the notification unit 120 and causes the notification unit 120 to notify the cutting operation. The processing operation of the device 1 is temporarily stopped, and the process proceeds to the reference image registration step ST4.

The reference image registration step ST4 is a step of registering the luminance distribution of the reference image 300 in the luminance distribution registration unit 106. FIG. In the reference image registration step ST4, the operator operates the input unit 110 to cause the control unit 100 to suck and hold the dressing board 90-2 on the sub-chuck table 80, and then causes the luminance difference removal section 107 to perform dressing with the camera 30. A region in which the two-dimensional code 92 and the cut groove 96 of the board 90 are not formed is photographed to register the reference image 300 . After that, the operator operates the input unit 110 to restart the machining operation of the cutting device 1 .

When the control unit 100 determines that the reference image 300 is registered in the luminance distribution registration section 106 (step ST3: Yes), or when the operator restarts the machining operation of the cutting device 1 in the reference image registration step ST4. , the process proceeds to the photographed image obtaining step ST5.

The photographed image acquisition step ST5 is a step of causing the camera 30 to photograph the two-dimensional code 92 of the dressing board 90 held on the sub-chuck table 80 and registering the obtained photographed image 400 in the control unit 100 . In the captured image acquisition step ST5, the luminance difference removing section 107 of the control unit 100 captures the two-dimensional code 92 of the dressing board 90 held by the sub-chuck table 80 corresponding to the cutting blade 21 at the dressing timing with the camera 30. , the photographed image 400 including the two-dimensional code 92 is acquired and stored, and the process proceeds to the luminance difference elimination step ST6.

The brightness difference removal step ST6 is a step of removing the brightness distribution registered in the reference image 300 from the brightness distribution of the captured image 400 . In the luminance difference removing step ST6, the luminance difference removing unit 107 subtracts the light intensity of each corresponding pixel of the reference image 300 from the light intensity of each pixel of each image 401 of the captured image 400 to obtain the reference image 300. The photographed image 400 from which the luminance distribution of is removed is generated, and the process proceeds to the photographed image registration step ST7.

The photographed image registration step ST7 is a step of registering binarized photographed images 500 and 501, examples of which are shown in FIGS. In the photographed image registration step ST7, the binarization processing unit 108 binarizes the photographed image 400 from which the luminance distribution of the reference image 300 has been removed in the luminance difference removal step ST6 to obtain a binarized photographed image 500. , 501 are generated and registered, and the process proceeds to the dilation processing step ST8. Note that the binarized photographed image 501 shown in FIG. 10 includes the two-dimensional code 92 partially deficient due to the cutting groove 96 formed by cutting with the cutting blade 21 .

The dilation processing step ST8 is a step of performing dilation processing on the binarized photographed images 500 and 501 . Dilation processing means that at least one of eight pixels 600 (hereinafter denoted by reference numeral 602) around each pixel 600 (hereinafter denoted by reference numeral 601) indicated by a parallel chain line in FIG. This is a process of setting the pixel 601 to "1", ie, white, when it is 1, ie, white. That is, the dilation process is a process of expanding the white areas of the captured images 500 and 501 . In the first embodiment, the dilation process is a process of making each pixel 601 "1", ie, white when at least one of the eight pixels 602 surrounding each pixel 601 is "1", ie, white. However, in the present invention, when at least one of the four pixels 602 surrounding each pixel 601 in the vertical and horizontal directions in FIG. The processing to do is also good.

In the dilation processing step ST8, the dilation processing unit 103 performs the above-described dilation processing on all pixels 600 of the binarized captured images 500 and 501, thereby obtaining pixels 600 of a predetermined unit area. to whiten the entire area where black and white are mixed. In the dilation processing step ST8, the dilation processing unit 103 whitens the cut grooves 96 that are displayed black in the binarized photographed image 501 to obtain a binarized image in which the cut grooves 96 shown in FIG. 12 are removed. A photographed image 502 is generated, and the process proceeds to erosion processing step ST9.

The erosion processing step ST9 is a step of performing erosion processing on the binarized photographed image 502 from which the cut groove 96 has been removed. In the erosion process, when at least one of the eight pixels 602 surrounding each pixel 601 indicated by the parallel dashed lines in FIG. processing. That is, the erosion process is a process of contracting the white area of the captured image 502 . In the first embodiment, the erosion process is a process of making the pixel 602 "0" or black when at least one of the eight pixels 602 surrounding each pixel 601 is "0" or black. In the present invention, when at least one of the four pixels 602 surrounding each pixel 601 in the vertical and horizontal directions in FIG. But it's okay.

In the erosion processing step ST9, the erosion processing unit 104 performs the above-described erosion processing on all the pixels 600 of the binarized captured image 502 that has been subjected to the dilation processing, thereby obtaining a predetermined unit area. The entire area where black and white are mixed in the pixel 600 is made black. In the erosion processing step ST9, the erosion processing unit 104 dilates the cells 93 displayed in black that have shrunk in the dilation processing of the binarized captured image 502, and produces a captured image in which the cells 93 shown in FIG. 503 is generated. In the first embodiment, in the erosion processing step ST9, as shown in FIG. 11, the erosion processing unit 104 performs the erosion processing on pixels 600 in the same unit as the dilation processing. 93 is shaped, and as shown in FIG. 13, the two-dimensional code 92 before cutting, that is, before the cutting groove 96 is formed, is restored, and a binarized photographed image 503 including the restored two-dimensional code 92 is generated. Then, the process proceeds to the type determination step ST10.

The type determination step ST10 reads information indicating the type of the dressing board 90 from the two-dimensional code 92 of the photographed image 503 in which the two-dimensional code 92 is restored by the erosion process, and indicates the type of the dressing board 90 registered in advance. This is the step of determining whether or not it matches the information. In the type determination step ST10, the type determination unit 105 reads information indicating the type of the dressing board 90 from the two-dimensional code 92 of the photographed image 503, an example of which is shown in FIG. In type determination step ST10, the type determination unit 105 determines whether or not the information indicating the read type matches the information indicating the type of the dressing board 90 registered in advance in the type registration unit 101 or not.

The type determination unit 105 of the control unit 100 determines that the information indicating the read type and the like and the information indicating the type of the dressing board 90 registered in advance in the type registration unit 101 do not match (type determination step ST10: No), an error signal is output to the notification unit 120, and the notification unit 120 is made to notify, and the machining operation of the cutting device 1 is temporarily stopped. Then, the operator confirms information indicating the type of the dressing board 90 held in the sub-chuck table 80 and the type of the dressing board 90 registered in the type registration unit 101, and selects the proper type of dressing board 90. At least one of the replacement and the registration of information indicating the type of the regular type dressing board 90 in the type registration unit 101 is performed, and the input unit 110 is operated to restart the machining operation of the cutting device 1. . In the type determination step ST10, when the operator restarts the machining operation of the cutting device 1, the process returns to step ST1.

The type determination unit 105 of the control unit 100 determines that the information indicating the read type matches the information indicating the type of the dressing board 90 registered in advance in the type registration unit 101 (type determination step ST10: Yes ) and proceed to the dressing step ST11.

The dressing step ST11 is a step of dressing the cutting blade 21 at the dressing timing. In the dressing step ST11, the control unit 100 controls the X-axis movement unit, the Y-axis movement unit 40, and the Z-axis movement unit 50 to rotate the cutting blade 21 at the dressing timing by the spindle 22, and moves the corresponding sub-chuck table 80. The cutting blade 21 is dressed by cutting the dressing board 90 held by the cutting blade 21, and the cutting blade dressing method shown in FIG. 9 is finished.

As described above, the cutting apparatus 1 according to the first embodiment dilates the binarized photographed images 500 and 501 of the dressing board 90, so that the photographed image 502 with the cut groove 96 removed can be obtained. can. In addition, since the cutting apparatus 1 performs dilation processing on the binarized captured images 500 and 501 of the dressing board 90 and then performs erosion processing, cells 93 in the captured image 503 after erosion processing are dilated. It can be expanded to its pre-treatment size. As a result, even if the binarized photographed images 500 and 501 include the two-dimensional code 92 in which a part of the cell 93 is missing due to the cutting groove 96, the cutting device 1 removes the cutting groove 96 and cuts it. It is possible to restore the cell 93 so that the missing two-dimensional code 92 can be identified, thereby suppressing erroneous recognition of the type of the dressing board 90 whose upper surface 91 has been cut.

In addition, since the widths 94 and 95 of the cells 93 in the X-axis direction and the Y-axis direction are two times or more the blade thickness 24 of the cutting blade 21, the cutting apparatus 1 uses the binarized photographed images 500 and 501 as the die. Even if the cut groove 96 is removed by the erosion process, a part of the missing cell 93 remains in the photographed image 502. By applying the erosion process to the photographed image 502, the two-dimensional code before the cut groove 96 is removed. 92 can be restored.

Further, the cutting apparatus 1 is configured by combining a plurality of images 401 captured by the camera 30 as the captured image 400 processed by the control unit 100 . For this reason, the cutting apparatus 1 can obtain the captured images 500 and 501 even by using the alignment camera 30 having a narrower field of view 31 than the two-dimensional code 92 .

The cutting apparatus 1 also includes a luminance distribution registration unit 106 in which the image registration unit 102 of the control unit 100 registers the reference image 300, and a luminance distribution of the captured image 400 including the two-dimensional code 92 captured by the camera 30. and a luminance difference removing unit 107 for removing the luminance distribution of the reference image 300 from the captured image 400 and smoothing the luminance distribution of the captured image 400 . Therefore, the cutting device 1 can remove noise generated in the binarized photographed images 500 and 501 depending on the degree of reflection of the illumination light.

The control unit 100 of the cutting apparatus 1 according to the first embodiment described above includes an arithmetic processing unit having a microprocessor such as a CPU (central processing unit) and a CPU such as a ROM (read only memory) or a RAM (random access memory). It has a storage device with a memory and an input/output interface device. The arithmetic processing device of the control unit 100 performs arithmetic processing according to a computer program stored in the storage device, and outputs a control signal for controlling the cutting device 1 to the cutting device 1 via the input/output interface device. output to the configured element.

The functions of the dilation processing unit 103, the erosion processing unit 104, and the type determination unit 105 are realized by executing a computer program stored in the storage device by the arithmetic processing unit. The functions of the luminance difference removal unit 107 and the binarization processing unit 108 are realized by executing a computer program stored in the storage device by the arithmetic processing unit and storing necessary information in the storage device. The functions of the type registration unit 101 and the brightness distribution registration unit 106 of the control unit 100 are implemented by a storage device.

It should be noted that the present invention is not limited to the above embodiments. That is, various modifications can be made without departing from the gist of the present invention. The cutting apparatus 1 according to Embodiment 1 performs dilation treatment and erosion treatment once each, but the cutting apparatus of the present invention performs dilation treatment and erosion treatment twice or more, that is, at least once. You can do it one time at a time.

Further, the cutting apparatus of the present invention does not include the brightness distribution registration unit 106 and the brightness difference removal unit 107, and the binarization processing unit 108 of the image registration unit 102 of the control unit 100 captures the image with the camera 30 and obtains the The captured image 400 may be directly binarized. Further, the cutting apparatus of the present invention may include a dressing board for dressing the cutting blade 21 in order to align the center of the cutting edge with the rotation center of the spindle 22, that is, to perform so-called rounding. It should be noted that the misalignment (so-called out-of-roundness) between the rotation center of the spindle 22 and the center of the cutting edge of the cutting blade 21 occurs immediately after the spindle 22 is attached to the tip of the workpiece 200 and the cutting of the workpiece 200 or the cutting edge. This is caused by the occurrence of portions where abrasive grains protrude and portions where abrasive grains do not protrude.

Further, in the first embodiment, the luminance distribution registration unit 106 registers the reference image 300 by capturing an area of the upper surface 91 of the dressing board 90 in which the two-dimensional code 92 and the cutting grooves 96 are not formed. However, according to the present invention, the brightness distribution registration unit 106 uses the dressing board 90-2 (shown in FIG. 3) of the same type as the dressing board 90 held in each sub-chuck table 80 and having no two-dimensional code 92 formed thereon. 81, the input unit is operated to cause the camera 30 to photograph the upper surface 91 of the dressing board 90-2 under the same conditions as when photographing the two-dimensional code 92, and the photographed image is referred to as a reference image 300. You can register as In this case, it is preferable that the camera 30 captures the same position as the position where the two-dimensional code 92 of the dressing board 90 of the dressing board 90 - 2 is provided, and the brightness distribution registration unit 106 registers it as the reference image 300 .

REFERENCE SIGNS LIST 1 cutting device 10 chuck table 20 cutting unit 21 cutting blade 22 spindle 24 blade thickness 30 camera 31 visual field range 80 sub-chuck table (chuck table)
90 dressing board (workpiece)
91 upper surface (surface to be cut)
92 Two-dimensional code 93 Cell 94, 95 Width 96 Cutting groove 100 Control unit (judgment unit)
101 type registration unit 102 image registration unit 103 dilation processing unit 104 erosion processing unit 105 type determination unit 106 brightness distribution registration unit 107 brightness difference removal unit 200 workpiece 300 reference image 400 photographed image 401 image 500, 501, 502, 503 Binarized captured image (captured image)

Claims (4)

A chuck table that holds a workpiece, a cutting unit that cuts the workpiece held on the chuck table with a cutting blade attached to a spindle, a camera that photographs the workpiece held on the chuck table, The surface to be cut is provided with a determination unit for determining the type of the workpiece based on the image taken by the camera, and a two-dimensional code composed of a plurality of cells each having a width greater than the thickness of the cutting blade, A cutting device comprising a sub-chuck table holding a dressing board to be cut by the cutting blade,
The determination unit
a type registration unit for registering type information of the dressing board to be cut by the cutting blade;
The surface to be cut of the dressing board including the two-dimensional code cut by the cutting blade and partially missing is photographed, and the colored cells and cutting grooves of the two-dimensional code are displayed in black, and the other areas are displayed in white. an image registration unit for registering a captured image to be captured;
The photographed image is subjected to dilation processing for whitening the entire region in which black and white are mixed in a predetermined unit area, and the blackened cut groove is whitened to remove the cut groove from the photographed image. a processing unit;
Erosion processing for blackening the entire area in which black and white are mixed in a predetermined unit area is applied to the photographed image that has been subjected to the dilation processing, and dilation is performed by expanding the shrunk cells displayed in black due to the dilation processing. an erosion processing unit that reshapes the cells to the size before processing and restores the two-dimensional code before cutting;
The type information of the dressing board is read from the two-dimensional code restored by the erosion process, and it is determined whether or not the read information matches the type information of the dressing board pre-registered in the type registration unit. and a type determination unit for
The type determination unit
If it is determined that the read information and the type information of the dressing board pre-registered in the type registration unit do not match, the processing operation is stopped,
When it is determined that the read information matches the type information of the dressing board pre-registered in the type registration unit, the cutting device proceeds to a dressing step for dressing the cutting blade . 2. The cutting device according to claim 1, wherein the vertical and horizontal widths of the cells are at least twice the thickness of the cutting blade. The field of view range of the camera is narrower than the two-dimensional code, and the photographed image processed by the determination unit is composed of a combination of a plurality of images including a part of the two-dimensional code photographed by the camera. A cutting device according to claim 1 or claim 2. The determining unit comprises a luminance distribution registering unit for registering the luminance distribution of a reference image obtained by photographing the cutting surface of the dressing board without the two-dimensional code, and a luminance distribution registering unit for registering the luminance distribution of the photographed image including the two-dimensional code. and a luminance difference removing unit for removing the distribution of luminance registered in the reference image from the distribution, and smoothing the distribution of luminance of the photographed image photographed by the camera. The cutting device according to the paragraph.

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