JP7160169B2 - 流体デバイス及びその使用 - Google Patents

流体デバイス及びその使用 Download PDF

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Publication number
JP7160169B2
JP7160169B2 JP2021188361A JP2021188361A JP7160169B2 JP 7160169 B2 JP7160169 B2 JP 7160169B2 JP 2021188361 A JP2021188361 A JP 2021188361A JP 2021188361 A JP2021188361 A JP 2021188361A JP 7160169 B2 JP7160169 B2 JP 7160169B2
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diaphragm member
fluid
valve
region
diaphragm
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JP2022031754A5 (https=
JP2022031754A (ja
Inventor
耕磨 林
陽介 藤次
太郎 上野
遼 小林
永波 李
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Nikon Corp
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Nikon Corp
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Priority claimed from PCT/JP2018/002692 external-priority patent/WO2019146102A1/ja
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JP2021188361A 2018-01-29 2021-11-19 流体デバイス及びその使用 Active JP7160169B2 (ja)

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JP2021188361A JP7160169B2 (ja) 2018-01-29 2021-11-19 流体デバイス及びその使用

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
PCT/JP2018/002692 WO2019146102A1 (ja) 2018-01-29 2018-01-29 流体デバイス及びその使用
JP2019567809A JPWO2019146102A1 (ja) 2018-01-29 2018-01-29 流体デバイス及びその使用
JP2021188361A JP7160169B2 (ja) 2018-01-29 2021-11-19 流体デバイス及びその使用

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JP2019567809A Division JPWO2019146102A1 (ja) 2018-01-29 2018-01-29 流体デバイス及びその使用

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JP2022031754A JP2022031754A (ja) 2022-02-22
JP2022031754A5 JP2022031754A5 (https=) 2022-03-02
JP7160169B2 true JP7160169B2 (ja) 2022-10-25

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Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017213123A1 (ja) 2016-06-07 2017-12-14 国立大学法人東京大学 流体デバイス

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017213123A1 (ja) 2016-06-07 2017-12-14 国立大学法人東京大学 流体デバイス

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