JP7120688B1 - cleaning head - Google Patents

Abstract

An object of the present invention is to provide a cleaning head capable of reliably removing dust adhering to the edge of an object. A cleaning head for removing dust adhering to an edge portion of an object W, the cleaning head being arranged to face the surface of the edge portion of the object W and facing outward from the edge portion of the object. and a suction port 22 that is arranged outside the edge line of the edge portion of the object W and opens toward the edge portion side to suck the gas. . [Selection drawing] Fig. 14

Description

The present invention relates to cleaning heads.

Conventionally, a dust removal head (cleaning head) described in Patent Document 1 is known. This dust removal head removes dust adhering to the edges of a sheet-like work W (object), and has three discharge holes for ejecting gas and six suction holes for sucking gas. ing. Specifically, two suction holes and one ejection port located therebetween are arranged so as to face the surface of the edge portion of the moving work W, and two suction holes and one ejection port located therebetween are arranged. are arranged so as to face the back surface of the edge portion of the work W, and two suction holes and one discharge port located between them are arranged so as to face the edge line of the edge portion of the work W.

In the dust remover having such a structure, gas is ejected from the three discharge holes and sucked from the six suction holes while the sheet-like work W is moving. As a result, the dust adhering to the front surface, back surface, and edge line of the moving work W is blown away by the gas jetted from three directions of the three discharge holes, and the blown dust is blown off together with the gas from the six suction holes in three directions. is attracted to As a result, dust adhering to the front surface, back surface, and edge line of the edge portion of the sheet-like work W is removed.

JP 2018-83196 A

In the dust removal head as described above, gas is ejected from the discharge holes perpendicularly to the surface (rear surface) of the edge portion of the work W (see, for example, FIG. 9 of Patent Document 1). Dust can be generated that is blown inside the line. Such dust cannot be effectively sucked together with gas by the two suction holes arranged along the edge line of the work W. For this reason, there is a possibility that dust will remain on the inner surface of the workpiece W from the edge portion. Such a situation can occur on the back side of the workpiece W as well.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a cleaning head capable of reliably removing dust adhering to the edges of an object.

A cleaning head according to the present invention is a cleaning head for removing dust adhering to an edge portion of an object, is arranged to face the surface of the edge portion of the object, and is arranged outwardly from the edge portion of the object. and a suction port that is arranged outside the edge line of the edge portion of the object and opens to the edge portion side to suck the gas , wherein the The ejection port and the suction port are arranged so as to overlap in a direction along the edge line of the object, and the width of the suction port in the direction is greater than the width of the ejection port in the direction. configuration.

With such a configuration, dust adhering to the surface of the edge portion of the object is blown outward from the edge portion by the gas ejected from the ejection port. The blown dust can be sucked together with gas by a suction port arranged outside the edge line of the edge portion of the object.

In the cleaning head according to the present invention, a gas injection chamber coupled to an air supply mechanism, a gas suction chamber coupled to an intake mechanism, an air supply path connecting the gas injection chamber and the ejection port, and the gas suction a suction path connecting the chamber and the suction port, wherein the gas from the gas ejection chamber is jetted obliquely from the discharge port to the surface of the edge portion of the object in the air supply path. It can be configured to include a tilt guide portion that guides the

With such a configuration, the gas from the air supply mechanism passes through the air supply path from the gas injection chamber and reaches the discharge port. The gas passing through the air supply path is guided by the slanted guide portion and ejected obliquely from the surface of the edge portion of the object from the outlet toward the outside from the edge portion of the object. The dust blown outward from the edge portion of the object by the gas ejected from the discharge port is sucked together with the gas by the suction port by the suction action of the suction mechanism, passes through the suction path, and enters the gas suction chamber. reach.

In the cleaning head according to the present invention, the ejection port is formed in a slit shape, and the air supply path includes a portion formed as a gap sandwiched between two surfaces following the slit-shaped ejection port. can be

With such a configuration, the gas from the air supply mechanism is ejected from the gas ejection chamber through the slit-shaped ejection port through the gap formed between the two surfaces of the air supply path.

In the cleaning head according to the present invention, at least one of the two surfaces may be formed with an uneven streak extending in a direction crossing the flow direction of the gas.

With such a configuration, when the gas passes through the portion formed as a gap sandwiched between two surfaces in the air supply path, the passing gas vibrates due to the uneven streaks, resulting in a slit-like discharge. A vibrating gas is ejected from the outlet. Dust adhering to the edges of the object can be easily removed by the vibrating gas.

In the cleaning head according to the present invention, the inclined guiding portion is a wall formed between the two surfaces, and directs the gas flowing in the air supply path from the discharge port to the edge portion of the object. The configuration may include an inclined guide wall that guides the liquid to be discharged obliquely to the surface.

With such a configuration, the gas passing through the air supply path is guided by the inclined guide wall formed between the two surfaces, and flows from the discharge port obliquely to the surface of the edge portion of the object. It is jetted outwardly from the edge portion.

A cleaning head according to the present invention is a cleaning head for removing dust adhering to an edge portion of an object having a front surface and a back surface, the cleaning head comprising: a first head unit provided for the surface of the object; a second head portion provided against a back surface, the first head portion being disposed opposite the front surface of the edge portion of the object and extending outwardly from the edge portion of the object; and a first suction port that is arranged outside the edge line of the edge portion of the object and that opens toward the edge portion to suck the gas. and the first ejection port and the first suction port are arranged so as to overlap in a direction along the edge line of the object, and the width of the first suction port in the direction is , the second head portion is arranged to face the back surface of the edge portion of the object, and is obliquely directed outward from the edge portion of the object. and a second suction port that is arranged outside the edge line of the edge portion of the object and opens toward the edge portion side to suck gas , The second ejection port and the second suction port are arranged to overlap each other in the direction along the edge line of the object, and the width of the second suction port in the direction is the width of the second suction port in the direction. 2, the width of which is larger than that of the ejection port .

With such a configuration, dust adhering to the surface of the edge portion of the object is blown outward from the edge portion by the gas ejected from the first ejection port of the first head section. The blown dust can be sucked together with gas by the first suction port arranged outside the edge line of the edge portion of the object of the first head section. Further, the dust adhering to the rear surface of the edge portion of the object is blown outward from the edge portion by the gas ejected from the second ejection port of the second head section. The blown dust is sucked together with gas by the second suction port arranged outside the edge line of the edge portion of the object of the second head portion.

In the cleaning head according to the present invention, the first head section includes a first gas injection chamber coupled to an air supply mechanism, a first gas suction chamber coupled to an intake mechanism, the first gas injection chamber and the a first air supply path connecting with a first discharge port; and a first air intake path connecting the first gas suction chamber and the first suction port, wherein the first air supply path The second head includes a first tilt guide section that guides the gas from the gas jetting chamber to discharge obliquely from the first discharge port to the surface of the edge portion of the object, and a second gas injection chamber coupled to an air mechanism; a second gas suction chamber coupled to an intake mechanism; a second air supply path connecting the second gas injection chamber and the second discharge port; 2 a second intake path connecting the gas suction chamber and the second suction port, wherein the second air supply path allows the gas from the second gas injection chamber to flow from the second discharge port to the target object; may be configured to include a second inclined guiding portion that guides the ink to be discharged obliquely with respect to the back surface of the edge portion of the .

With such a configuration, in the first head portion, the gas from the air supply mechanism passes through the first air supply path from the first gas injection chamber and reaches the first ejection port. The gas passing through the first air supply path is guided by the first slant guide portion and is directed from the first discharge port obliquely to the surface of the edge portion of the object toward the outside from the edge portion of the object. to, it is erupted. Dust blown outward from the surface of the edge portion of the object by the gas ejected from the first discharge port is sucked together with the gas by the first suction port due to the suction action of the suction mechanism. It reaches the first gas suction chamber through the path. Also, in the second head portion, the gas from the air supply mechanism passes through the second air supply path from the second gas injection chamber and reaches the second ejection port. The gas passing through the second air supply path is guided by the second slant guide portion and is directed from the second discharge port obliquely to the back surface of the edge portion of the object toward the outside from the edge portion of the object. to, it is erupted. Dust blown outward from the rear surface of the edge portion of the object by the gas ejected from the second discharge port is sucked together with the gas by the second suction port by the suction action of the suction mechanism. It reaches the second gas suction chamber through the path.

A cleaning head according to the present invention is a cleaning head for removing dust adhering to an edge portion of an object having a front surface and a back surface, the cleaning head being arranged so as to face the surface of the edge portion of the object. a first ejection port for ejecting gas obliquely outward from the edge portion; and a suction port that is arranged outside the edge line of the edge portion of the object and opens toward the edge portion to suck the gas , wherein the object is The first ejection port, the second ejection port, and the suction port are arranged so as to overlap in the direction along the edge line, and the width of the suction port in the direction is equal to the width of the first ejection port in the direction. It is configured to be larger than the width of each of the outlet and the second outlet .

With such a configuration, dust adhering to the surface of the edge portion of the object is blown outward from the edge portion by the gas ejected from the first ejection port. Further, the dust adhering to the rear surface of the edge portion of the object is blown outward from the edge portion by the gas ejected from the second ejection port. The dust blown outward from each of the front surface and the back surface of the edge portion of the object can be sucked together with gas by the suction ports arranged outside the edge line of the edge portion of the object.

A cleaning head according to the present invention includes a first gas ejection chamber and a second gas ejection chamber coupled to an air supply mechanism, a gas suction chamber coupled to an intake mechanism, and the first gas ejection chamber and the first gas ejection chamber. a first air supply path connecting the ejection port; a second air supply path connecting the second gas ejection chamber and the second ejection port; and an intake path connecting the gas suction chamber and the suction port. and the first air supply path guides the gas from the first gas injection chamber to be discharged obliquely from the first discharge port to the surface of the edge portion of the object. The second gas supply path includes an inclined guide portion, and the second air supply path guides the gas from the second gas injection chamber to be discharged obliquely from the second discharge port to the back surface of the edge portion of the object. It can be configured to include a second tilt guide portion that

With such a configuration, the gas from the air supply mechanism reaches the first discharge port from the first gas injection chamber through the first air supply path. The gas passing through the first air supply path is guided by the first slant guide portion and is directed from the first discharge port obliquely to the surface of the edge portion of the object toward the outside from the edge portion of the object. to, it is erupted. Also, the gas from the air supply mechanism passes through the second air supply path from the second gas injection chamber and reaches the second discharge port. The gas passing through the second air supply path is guided by the second slant guide portion and is directed from the second discharge port obliquely to the back surface of the edge portion of the object toward the outside from the edge portion of the object. to, it is erupted. Dust is blown outward from the surface of the edge portion of the object by the gas ejected from the first ejection port, and dust is blown away from the back surface of the edge portion of the object by the gas ejected from the second ejection port. The dust blown outward is sucked together with gas by the suction port by the suction action of the suction mechanism, and reaches the gas suction chamber through the suction path.

A cleaning head according to the present invention is a cleaning head for removing dust adhering to an edge portion of a sheet, comprising: a first surface arranged to face the surface of the edge portion of the sheet; and the edge portion of the sheet. a second surface arranged toward the edge portion side outside the edge line of the first surface, and a discharge port is provided on the first surface so as to obliquely eject gas toward the second surface. a suction port for sucking gas is formed on the second surface, and the discharge port and the suction port are arranged so as to overlap in a direction along the edge line of the sheet; The width of the suction port is larger than the width of the discharge port in that direction .

With such a configuration, the cleaning head has the first surface facing the surface of the edge portion of the sheet and the second surface facing the edge line of the edge portion of the sheet. Placed facing sideways. In this state, gas is jetted obliquely toward the second side from the discharge port of the first surface, so that the dust adhering to the surface of the edge portion of the sheet is removed by the gas jetted from the discharge port. It can be blown outward from the part. The blown dust can be sucked together with gas into a suction port formed on the second surface arranged outside the edge line of the edge portion of the sheet.

A cleaning head according to the present invention is a cleaning head for removing dust adhering to an edge portion of a sheet, and includes a first head portion provided on the front surface of the sheet and a second head portion provided on the back surface of the sheet. a head portion, wherein the first head portion has a first head-side first surface arranged to face the surface of the edge portion of the sheet; and the outside of the edge line of the edge portion of the sheet. and a first head-side second surface arranged toward the edge portion side, and a gas is obliquely supplied to the first head-side first surface toward the first head-side second surface. A first ejection port for ejecting gas is formed, and a first suction port for sucking gas is formed on the second surface on the first head side. The first suction port is arranged so as to overlap with the first suction port, and the width of the first suction port in the direction is larger than the width of the first ejection port in the direction, and the second head section is arranged to cover the sheet. a second head-side first surface arranged to face the back surface of the edge portion; and a second head-side first surface arranged outside the edge line of the edge portion of the sheet toward the edge portion side. a second ejection port is formed on the first surface on the second head side to eject gas obliquely toward the second surface on the second head side; A second suction port for sucking gas is formed on the surface, and the second ejection port and the second suction port are arranged so as to overlap in a direction along the edge line of the sheet, and The width of the second suction port is larger than the width of the second ejection port in the direction .

With this configuration, the first head side first surface of the first head portion faces the surface of the edge portion of the sheet, and the first head side second surface of the sheet faces the edge portion of the sheet. The second head is arranged outside the edge line of the sheet so as to face the edge portion, and the second head faces the back surface of the edge portion of the sheet. In addition, the second head-side second surface is arranged outside the edge line of the edge portion of the sheet in a state facing the edge portion side. In the cleaning head in which the first head portion and the second head portion are arranged with respect to the sheet in this way, the side from the first ejection port on the first side first surface of the first head toward the second side of the first head side By jetting the gas obliquely, the dust adhering to the surface of the edge portion of the sheet can be blown outward from the edge portion by the gas jetted from the first ejection port. The blown dust can be sucked together with gas into the first suction port formed on the second surface of the first head located outside the edge line of the edge portion of the sheet. Further, the gas is jetted obliquely from the second discharge port on the first surface on the second head side toward the second surface on the second head side. It can be blown outward from its edges by the gas ejected from the two outlets. The blown dust can be sucked together with gas into a second suction port formed on the second surface of the second head located outside the edge line of the edge portion of the sheet.

A cleaning head according to the present invention is a cleaning head for removing dust adhering to an edge portion of a sheet, and comprises a first surface and a second surface facing each other, and a third surface as a bottom surface, which form a groove. the first surface is formed with a first discharge port that obliquely discharges gas toward the third surface; and the second surface is formed with a first discharge port that obliquely discharges gas toward the third surface. 2 ejection ports are formed, a suction port for sucking gas is formed on the third surface, the first surface faces the surface of the edge portion of the sheet, and the second surface is the edge of the sheet. The third surface faces the back surface of the portion, the third surface is arranged outside the edge line of the edge portion of the sheet, and the first ejection port and the second ejection port are arranged in a direction along the edge line of the sheet. and the suction port are arranged so as to overlap each other, and the width of the suction port in the direction is larger than the width of each of the first ejection port and the second ejection port in the direction .

With such a configuration, the front surface of the edge portion of the sheet faces the first surface, the back surface of the edge portion of the sheet faces the second surface, and the third surface is outside the edge line of the edge portion of the sheet. The sheet is placed against the groove formed by the first surface, the second surface and the third surface (bottom surface). In this state, gas is jetted obliquely from the first ejection port of the first surface toward the third surface, so that the dust adhering to the surface of the edge portion of the sheet is ejected from the first ejection port. It can be blown outward from its edge portion by gas. The blown dust can be sucked together with gas into a suction port formed on the third surface arranged outside the edge line of the edge portion of the sheet. In addition, since the gas is jetted obliquely toward the third side from the second ejection port of the second surface, the dust adhering to the back surface of the edge portion of the sheet is removed by the gas ejected from the second ejection port. It can be blown outward from its edge portion. The blown dust can be sucked together with gas into a suction port formed on the third surface arranged outside the edge line of the edge portion of the sheet.

According to the cleaning head of the present invention, the dust blown outward from the edge portion of the object by the gas ejected from the ejection port is removed by the suction port arranged outside the edge line of the edge portion of the object. Since it can be sucked together with gas, the dust adhering to the edge portion of the object can be reliably removed.

FIG. 1 is a perspective view showing a cleaning head according to one embodiment of the present invention arranged at the edge of a sheet to be cut by a slitter. FIG. 2 is a side view showing the appearance of the cleaning head according to the first embodiment of the invention. FIG. 3 is a front view showing the cleaning head according to the embodiment of the invention. FIG. 4 is a cross-sectional view showing the A1-A1 cross section in FIG. 3 of the cleaning head. FIG. 5 is a cross-sectional view showing the B1-B1 cross section in FIG. 4 of the cleaning head. FIG. 6 is a sectional view showing the C1-C1 section in FIG. 3 of the cleaning head. FIG. 7 is a diagram (side view) showing a modification of the cleaning head according to the first embodiment of the present invention. FIG. 8 is a side view showing the appearance of the cleaning head according to the second embodiment of the invention. FIG. 9 is a front view showing a cleaning head according to a second embodiment of the invention. FIG. 10 is a cross-sectional view showing the A2-A2 cross section in FIG. 9 of the cleaning head. 11 is a cross-sectional view showing the B2-B2 cross section in FIG. 10 of the cleaning head. FIG. 12 is a cross-sectional view showing the C1-C1 cross section in FIG. 9 of the cleaning head. FIG. 13 is a diagram (side view) showing a modification of the cleaning head according to the second embodiment of the invention. FIG. 14 is a side view showing a cleaning head according to a third embodiment of the invention. FIG. 15 is a plan view showing a cleaning head according to the third embodiment of the invention. FIG. 16A is a diagram (side view) showing another arrangement example of the cleaning head with respect to the object according to the third embodiment of the present invention. FIG. 16B is a diagram (side view) showing still another arrangement example of the cleaning head with respect to the object according to the third embodiment of the present invention;

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings.

The cleaning head according to the first embodiment of the invention can be used, for example, as shown in FIG.

In FIG. 1, the cleaning head 10 is used in a slitter that cuts a long sheet (for example, optical film, printed circuit board material, secondary battery material) to a certain width in its longitudinal direction. In the slitter, a disk-shaped slitter blade 100 is provided so as to face the roller 200 . A sheet delivered from a roll (not shown) is cut in the longitudinal direction by the slitter blade 100 in the process of passing between the roller 200 and the rotating slitter blade 100 to be divided into two sheet materials S1 and S2 having a predetermined width. is sent. A cleaning head 10 is provided so as to cover the cutting lines S1c and S2c of the two sheet materials S1 and S2. The cleaning head 10 removes dust generated by cutting and adhering to the front and rear surfaces of edge portions of a certain width from the cutting lines S1c and S2c (edge lines) of the sheet materials S1 and S2 (objects).

A cleaning head 10 according to the first embodiment of the present invention is constructed as shown in FIGS. 2 is a side view showing the appearance of the cleaning head 10, FIG. 3 is a front view showing the cleaning head 10, FIG. 4 is a sectional view showing the A1-A1 section of the cleaning head 10 in FIG. 3, and FIG. 5 is the cleaning head. 10 is a sectional view showing the B1-B1 section in FIG. 4, and FIG. 6 is a sectional view showing the C1-C1 section of the cleaning head 10 in FIG.

2 to 6, the cleaning head 10 has a first head portion 10a and a second head portion 10b, each of which is a block made of metal (for example, aluminum). The first head portion 10a and the second head portion 10b have the same structure, are opposed to each other, and are arranged symmetrically. The first head portion 10a and the second head portion 10b are integrated by being connected by a connecting plate or the like (not shown).

An air supply port 11a and an exhaust port 12a are provided on the rear surface of the first head portion 10a, and an air supply port 11b and an exhaust port 12b are also provided on the rear surface of the second head portion 10b (see FIG. 2). Each of the air supply ports 11a and 11b is connected to an air supply mechanism (not shown) such as a compressor that delivers high pressure air (gas). Each of the exhaust ports 12a and 12b is connected to an intake mechanism (not shown) such as a vacuum device for sucking air. On the side of the first head portion 10a facing the second head portion 10b, there is provided a first head-side first surface 13a, and a second head portion 13b rising at right angles from the edge of the first head-side first surface 13a toward the second head portion 10b. 1 head side second surface 14a is formed. Further, on the side of the second head portion 10b facing the first head portion 10a, a second head-side first surface 13b and a second head-side first surface 13b perpendicular to the first head portion 10a side from the edge of the second head-side first surface 13b. A rising second head side second surface 14b is formed.

The first head portion 10a and the second head portion 10b are configured such that the first head side first surface 13a and the second head side first surface 13b face each other with a predetermined gap, and the first head side second surface 14a It is arranged so that the second head-side second surface 14b faces the same direction (forward) and is aligned with a slight gap. Then, the first head-side first surface 13a and the second head-side first surface 13b, which face each other, and the first head-side second surface 14a and the second head-side first surface 14a and the second head-side first surface 14a and the second head-side first surface 14a, which face the same direction and are arranged side by side with a slight gap, are arranged. The cleaning head 10 is set on the sheet S so that the edge portion of the sheet S, which is an object to be dust-removed, passes through the groove 15 formed by the head-side second surface 14b (see FIGS. 1 and 2). ).

The first head-side first surface 13a has a direction toward the first head-side second surface 14a (for example, a direction perpendicular to the first head-side second surface 14a, a direction perpendicular to the plane of FIG. 6) is formed (see FIGS. 5 and 6). The first ejection port 21a faces one surface (surface) of the edge portion of the sheet S (object) passing through the groove portion 15 (see FIG. 4). Also on the second head side first surface 13b is a slit-shaped second ejection opening 21b extending in a direction toward the second head side second surface 14b (for example, a direction perpendicular to the second head side second surface 14b). is formed. The second ejection port 21b faces the other surface (back surface) of the edge portion of the sheet S (object) passing through the groove portion 15 (see FIG. 4).

Further, on the first head side second surface 14a arranged outside the edge line of the edge portion of the sheet S, there is a rectangular first suction that is elongated in the moving direction of the sheet S (horizontal direction in FIGS. 3 and 5). A mouth 22a is formed (see FIGS. 3 and 5). In addition, a rectangular second suction port 22b long in the moving direction of the sheet S is also formed on the second head side second surface 14b arranged outside the edge line of the edge portion of the sheet S (FIG. 3, see Figure 5).

In particular, referring to FIG. 4, the first head portion 10a is formed with a first gas injection chamber 23a connected to the air supply port 11a, and the first gas injection chamber 23a and the first head side first surface 13a are formed. A first air supply path 25a is formed to connect with the first discharge port 21a formed in . The high-pressure air introduced from the air supply mechanism to the first head portion 10a through the air supply port 11a passes through the first gas injection chamber 23a and the first air supply path 25a, and reaches the edge of the sheet S from the first ejection port 21a. It will erupt toward the surface of the part.

A first gas suction chamber 24a connected to the exhaust port 12a is formed in the first head portion 10a, and a first suction port is formed in the first gas suction chamber 24a and the first head side second surface 14a. 22a is formed. Due to the suction action of the suction mechanism, air sucked through the first suction port 22a passes through the first suction path 27a and the first gas suction chamber 24a and is discharged from the exhaust port 12a toward the suction mechanism.

In the second head portion 10b, as in the first head portion 10b, a second gas injection chamber 23b connected from the air supply port 11b is formed. A second air supply path 25b is formed to connect with the second outlet 21b formed in 13b. The high-pressure air introduced from the air supply mechanism to the second head portion 10b through the air supply port 11b passes through the second gas injection chamber 23b and the second air supply path 25b, and reaches the edge of the sheet S from the second discharge port 21b. It comes to blow out toward the back side of the part.

Further, in the second head portion 10b, a second gas suction chamber 24b connected to the exhaust port 12b is formed in the same way as in the first head portion 10a. A second intake path 27b is formed to connect with the second suction port 22b formed in the surface 14b. Due to the suction action of the suction mechanism, the air sucked through the second suction port 22b passes through the second suction path 27b and the second gas suction chamber 24b and is discharged from the exhaust port 12b toward the suction mechanism.

In the first head portion 10a, the first air supply path 25a is formed as a gap sandwiched between two surfaces following the slit-shaped first ejection port 21a formed in the first head-side first surface 13a (Fig. 5, see FIG. 6), and is opened at the first outlet 21a. The portion of the first air supply path 25a immediately before reaching the first outlet 21a is formed between the two surfaces forming the first air supply path 25a (gap), and the air is ejected from the first outlet 21a. A first tilt guide wall 26a (first tilt guide portion) is formed to guide the air to the first head side second surface 14a side. Due to this first inclined guide wall 26a, the air passing through the first air supply path 25a is directed outward from the edge portion of the sheet S from the first discharge port 21a obliquely with respect to the surface of the edge portion of the sheet S. It will be ejected in the direction side (see FIG. 4).

In the second head portion 10b, the second air supply path 25b is formed as a gap sandwiched between two surfaces following the slit-shaped second ejection port 21b formed in the second head side first surface 13b. It is opened at the second outlet 21b. A portion of the second air supply path 25b immediately before reaching the second outlet 21b is formed between the two surfaces forming the second air intake path 25b, and the air ejected from the second outlet 21b A second tilt guide wall 26b (second tilt guide portion) is formed to guide the second head side second surface 14b. Due to this second inclined guide wall 26b, the air passing through the second air intake path 25b is directed from the second discharge port 21b obliquely to the back surface of the edge portion of the sheet S in a direction outward from the edge portion of the sheet S. to the side, it will be ejected (see Figure 4).

In the first head portion 10a, on one of the two surfaces forming the first air supply path 25a (gap), as shown in FIG. 5 together with FIG. is formed. Also in the second head portion 10b, one of the two surfaces forming the second air supply path 25b (gap) is formed with an uneven streak portion ST extending in a direction crossing the air flow direction. Note that the uneven streaks ST may be formed on both of the two surfaces forming the first air supply path 25a (gap) and the second air intake path 25b (gap). Also, instead of the uneven grooves ST, a plurality of projections may be provided.

The cleaning head 10 as described above is configured such that the edge portion of the sheet S moving in the longitudinal direction passes through the groove portion 15 formed between the first head portion 10a and the second head portion 10b as described above (Fig. 1, see FIG. 2), and in a state where the sheet S is set, the operation is performed as follows.

In the first head portion 10a, the first gas injection chamber 23a coupled to the air supply mechanism through the air supply port 11a is maintained in a state where high pressure air is supplied from the air supply mechanism. In this state, the high-pressure air from the first gas injection chamber 23a reaches the first discharge port 21a through the first air supply path 25a. The high-pressure air passing through the first air supply path 25a is guided by the first inclined guide wall 26a, and is directed outward from the edge portion of the sheet S from the first discharge port 21a obliquely to the surface of the edge portion of the sheet S. (see FIG. 4). The high-pressure air ejected from the first ejection port 21a blows dust adhering to the surface of the edge portion of the sheet S outward from the edge portion.

The first gas suction chamber 24a, which is connected to the intake mechanism through the exhaust port 12a, is in a state where air is drawn by the intake action of the intake mechanism. The suction action through the first gas suction chamber 24a in which air is being drawn in this way reaches the first suction port 22a through the first suction path 27a, and the suction action causes the first discharge port The dust blown off by the high-pressure air jetted from 21a is sucked together with the air from the first suction port 22a. Air and dust sucked from the first suction port 22a are discharged from the exhaust port 12a through the first suction path 27a and the first gas suction chamber 24a. Dust discharged with air from the exhaust port 12a is removed by a filter or the like (not shown) before reaching the intake mechanism.

In this manner, the dust adhering to the surface of the edge portion of the moving sheet S is removed by the first head portion 10a.

In the second head portion 10b, similarly to the first head portion 10a, high-pressure air from the second gas injection chamber 23b coupled to the air supply mechanism through the air supply port 11b passes through the second air supply path 25b. It reaches the second outlet 21b. The high-pressure air passing through the second air supply path 25b is guided by the second inclined guide wall 26b, and is directed outward from the edge portion of the sheet S from the first discharge port 21a obliquely to the back surface of the edge portion of the sheet S. (see FIG. 4). The high-pressure air ejected from the second ejection port 21b blows dust adhering to the surface of the edge portion of the sheet S outward from the edge portion. The dust blown outward from the rear surface of the edge portion of the sheet S by the high-pressure air ejected from the second ejection port 21b is blown away by the suction action of the suction mechanism, as in the case of the first head portion 10a. Air is sucked from the second suction port 22b, passes through the second suction path 27b, reaches the second gas suction chamber 24b, and is discharged from the exhaust port 11b.

According to such a cleaning head 10, the dust attached to the surface of the edge portion of the sheet S is blown outward from the edge portion by the high-pressure air ejected from the first ejection port 21a of the first head portion 10a. Since the blown dust is sucked together with air by the first suction port 22a arranged outside the edge line of the edge portion of the sheet S, the dust adhering to the surface of the edge portion of the sheet S can be reliably removed. . Also, the dust adhering to the back surface of the edge portion of the sheet S is blown outward from the edge portion by the high-pressure air ejected from the second ejection port 21b of the second head portion 10b, and the blown dust is blown off the sheet S. Since the sheet S is sucked together with the air from the second suction port 22b arranged outside the edge line of the edge portion, the dust adhering to the back surface of the edge portion of the sheet S can be reliably removed. In this manner, dust adhering to both the front surface and the back surface of the edge portion of the sheet S can be reliably removed.

Further, in the first head portion 10a, the first air supply path 25a, which is formed as a gap sandwiched between two surfaces, is formed with an uneven streak portion ST on one side, so that the first air supply path 25a is formed on one side. High-pressure air can be ejected from the slit-shaped first ejection port 21a while vibrating (for example, ultrasonic vibration). Therefore, the dust attached to the surface of the edge portion of the sheet S can be more reliably removed by the vibrating high-pressure air. This can also be obtained in the second head portion 10b in which the uneven streak portion ST is formed on one surface of the second air supply path 25b formed as a gap sandwiched between two surfaces. can.

The degree of inclination of each of the first inclination guide wall 26a and the second inclination guide wall 26b is not particularly limited. Further, the shape of each of the first inclined guide wall 26a and the second inclined guide wall 26b is not particularly limited, and may be planar or curved.

Further, the length of each of the slit-shaped first ejection port 21a and the second ejection port 21b (the length in the width direction of the sheet S, the length in the horizontal direction in FIG. 6) is not particularly limited. Further, the extending directions of the slit-shaped first ejection port 21a and the second ejection port 21b are not particularly limited.

FIG. 7 shows a modification of the cleaning head according to the first embodiment of the invention described above.

The cleaning head 10 removes, for example, dust D adhering to each of the front and rear surfaces of the edge portion of a plate-shaped object W (object) having a predetermined thickness.

7, the cleaning head 10 has a first head portion 10a provided for the front surface of the object W and a second head portion 10b provided for the back surface of the object W. As shown in FIG. The first head portion 10a is arranged to face the surface of the edge portion of the object W, and is supplied from the air supply mechanism through the air supply port 11a obliquely outward from the edge portion of the object W. It has a first ejection port 21a for ejecting high-pressure air (gas). Further, the first head portion 10a is arranged outside the edge line (end surface) of the edge portion of the object W, is opened to the edge portion side, and sucks air by the suction action of the suction mechanism through the exhaust port 12a. It has a first suction port 22a for suction.

The second head portion 10b is arranged to face the back surface of the edge portion of the object W, and is obliquely directed outward from the edge portion of the object W from the air supply mechanism through the second air supply port 11b. It has a first ejection port 21b for ejecting high-pressure air (gas) to be supplied. In addition, the second head portion 10b is arranged outside the edge line (end surface) of the edge portion of the object W, and is opened to the edge portion side. It has a second suction port 22b for sucking air.

In the cleaning head 10 configured as described above, the dust D adhering to the surface of the edge portion of the object W is blown outward from the edge portion by the high-pressure air ejected from the first ejection port 21a of the first head portion 10a. The blown dust D is sucked together with air by the first suction port 22a arranged outside the edge line of the edge portion of the object W of the first head portion 10a. Further, the dust D adhering to the rear surface of the edge portion of the object W is blown outward from the edge portion by the high-pressure air ejected from the second ejection port 21b of the second head portion 10b. The blown dust D is sucked together with air by the second suction port 22b arranged outside the edge line (end face) of the edge portion of the object W of the second head portion 10b.

According to the cleaning head 10, the dust D is blown outward from the front and back surfaces of the edge portion of the object W by the high-pressure air ejected from the first ejection port 21a and the second ejection port 21b. Since air is sucked together with the first suction port 22a and the second suction port 22b arranged outside the edge line of the edge portion of the object W, the dust D adhering to the front and back surfaces of the edge portion of the object W can be reliably removed.

Next, a cleaning head according to a second embodiment of the invention will be described. The cleaning head according to the second embodiment is characterized in that the functions of the first head portion 10a and the functions of the second head portion 10b are housed in a single block.

A cleaning head 10 according to a second embodiment of the present invention is shown in FIGS. 8-12. 8 is a side view showing the appearance of the cleaning head 10, and FIG. 9 is a front view showing the cleaning head 10. As shown in FIG. 10 is a cross-sectional view of the cleaning head 10 taken along the line A2-A2 in FIG. 9, FIG. 11 is a cross-sectional view of the cleaning head 10 taken along the line B2-B2 in FIG. 10 is a cross-sectional view showing the C1-C1 cross section of FIG. 9 of the cleaning head 10. FIG.

For example, the rear surface of the cleaning head, which is composed of a single block made of metal, is provided with two air supply ports 11a and 11b and an exhaust port 12 arranged between the two air supply ports 11a and 11b. (see FIG. 8). The two air supply ports 11a and 11b are connected to an air supply mechanism (not shown), and the exhaust port 12 is connected to an intake mechanism.

A front surface of the cleaning head 10 is formed with a groove 15 that opens forward and extends in the width direction of the cleaning head 10 (the direction perpendicular to the paper surface in FIG. 8 and the horizontal direction in FIG. 9). The groove portion 15 is composed of a first surface 15a, a second surface 15b, and a third surface 15c as a bottom surface. The cleaning head 10 is set with respect to the sheet S so that the edges of the sheet S to be dust-removed pass through the grooves 15 (see FIG. 8). In a state in which the cleaning head 10 is set on the sheet S, the first surface 15a faces the front surface of the edge portion of the sheet S, the second surface 15b faces the back surface of the edge portion of the sheet S, and the third surface. 15c faces the longitudinal edge line of the sheet 15;

The first surface 15a of the groove 15 has a slit shape extending in the direction toward the third surface 15c (for example, the direction perpendicular to the third surface 15c: the direction perpendicular to the paper surface in FIG. 11, the horizontal direction in FIG. 12). is formed (FIGS. 11 and 12). The first ejection port 21a faces one surface (front surface) of the edge portion of the sheet S passing through the groove portion 15 (see FIG. 10). The second surface 15b of the groove portion 15 is also formed with a slit-shaped second ejection port 21b extending in a direction toward the third surface 15c (for example, a direction perpendicular to the third surface 15c). The second ejection port 21b faces the other surface (back surface) of the edge portion of the sheet S passing through the groove portion 15 (see FIG. 10). The third surface 15c is formed with a square suction port 22 having a side equal to the width (groove width) of the third surface 15c (see FIGS. 9 and 11). The suction port 22 faces the edge line of the edge portion of the sheet S passing through the groove portion 15 .

In particular, referring to FIG. 10, a first gas injection chamber 23a connected to the air supply port 11a is formed in the upper portion of the groove portion 15 from the first surface 15a. A first air supply path 25a is formed to connect with the first ejection port 21a formed in the first surface 15a. The high-pressure air introduced from the air supply mechanism to the cleaning head 10 through the air supply port 11a passes through the first gas injection chamber 23a and the first air supply path 25a, and is discharged from the first ejection port 21a to the edge portion of the sheet S. It will erupt toward the surface.

A second gas injection chamber 23b connected to the air supply port 11b is formed in the portion below the second surface 15b of the groove 15. Further, the second gas injection chamber 23b and the second surface 15b of the groove 15 are formed. A second air supply path 25b is formed to connect with the second outlet 21b. High-pressure air introduced into the cleaning head 10 from the air supply mechanism through the air supply port 11b passes through the second gas injection chamber 23b and the second air supply path 25b, and is discharged from the second ejection port 21b to the edge portion of the sheet S. It will be sprayed toward the back side.

In addition, a gas suction chamber connected to the exhaust port 12 is provided in a portion of the groove portion 15 of the cleaning head 10 on the rear side from the third surface 15c (bottom surface) so as to be sandwiched between the first gas injection chamber 23a and the second gas injection chamber 23b. A chamber 24 is formed. Furthermore, the cleaning head 10 is formed with a suction path 27 that connects the gas suction chamber 24 and a suction port 22 formed on the third surface 15 c (bottom surface) of the groove portion 15 . Due to the suction action of the suction mechanism, the air sucked through the suction port 22 passes through the suction path 27 and the gas suction chamber 24 and is discharged from the exhaust port 12a toward the suction mechanism.

The first air supply path 25a is formed as a gap sandwiched between two surfaces following a slit-shaped first discharge port 21a formed in the first surface 15a of the groove portion 15 (see FIGS. 11 and 12). It is opened at one ejection port 21a. The portion of the first air supply path 25a immediately before reaching the first outlet 21a is formed between the two surfaces forming the first air supply path 25a (gap), and the air is ejected from the first outlet 21a. A first inclined guide wall 26a (first inclined guide portion) is formed to guide the air to the third surface 15c (bottom surface) side of the groove portion 15 . Due to this first inclined guide wall 26a, the air passing through the first air supply path 25a is directed outward from the edge portion of the sheet S from the first discharge port 21a obliquely with respect to the surface of the edge portion of the sheet S. It will be ejected in the direction side (see FIG. 10).

The second air supply path 25b is formed as a gap sandwiched between two surfaces following the second discharge port 21b formed in a slit shape in the second surface 15b of the groove portion 15, and is opened at the second discharge port 21b. be done. A portion of the second air supply path 25b immediately before reaching the second outlet 21b is formed between the two surfaces forming the second air intake path 25b, and is a groove for air ejected from the second outlet 21b. A second tilt guide wall 26b (second tilt guide portion) is formed to guide the third surface 15c (bottom surface) of the second tilt guide wall 26b. Due to this second inclined guide wall 26b, the air passing through the second air intake path 25b is directed from the second discharge port 21b obliquely to the back surface of the edge portion of the sheet S in a direction outward from the edge portion of the sheet S. side, it will be ejected (see FIG. 10).

As in the case of the first embodiment (see FIGS. 4 and 5), on one of the two surfaces forming the first air supply path 25a (gap), as shown in FIGS. A concave-convex streak portion ST is formed extending in a direction crossing the direction of air flow. Also, one of the two surfaces forming the second air supply path 25b (gap) is formed with an uneven streak ST extending in a direction crossing the air flow direction.

In such a cleaning head 10, high-pressure air supplied from the air supply mechanism through the air supply port 11a reaches the first ejection port 21a through the first gas injection chamber 23a and the first air supply path 25a. The high-pressure air passing through the first air supply path 25a is guided by the first inclined guide wall 26a, and is directed outward from the edge portion of the sheet S from the first discharge port 21a obliquely to the surface of the edge portion of the sheet S. (See FIG. 10). The high-pressure air ejected from the first ejection port 21a blows dust adhering to the surface of the edge portion of the sheet S outward from the edge portion.

High-pressure air supplied from the air supply mechanism through the air supply port 11b reaches the second discharge port 21b through the second gas injection chamber 23b and the second air supply path 25b. The high-pressure air passing through the second air supply path 25b is guided by the second inclined guide wall 26b, and is directed outward from the edge portion of the sheet S from the second discharge port 21b obliquely to the back surface of the edge portion of the sheet S. (See FIG. 10). The high-pressure air ejected from the second ejection port 21b blows dust adhering to the surface of the edge portion of the sheet S outward from the edge portion.

A gas suction chamber 24 connected to the intake mechanism through the exhaust port 12 is in a state where air is drawn by the intake action of the intake mechanism. The suction action through the gas suction chamber 24 in which air is being drawn in this manner further reaches the suction port 22 through the suction path 27, and the suction action causes a high-pressure gas to be ejected from the first discharge port 21a. The dust adhering to the surface of the edge portion of the sheet S blown off by the air, and the dust adhering to the back surface of the edge portion of the sheet S blown off by the high-pressure air ejected from the second discharge port 21b are dispersed together with the air. It is sucked from the suction port 22 . Air and dust sucked from the suction port 22 are discharged from the exhaust port 12 through the suction path 27 and the gas suction chamber 24 . Dust discharged with air from the exhaust port 12 is removed by a filter or the like (not shown) before reaching the intake mechanism.

According to such a cleaning head 10, the dust attached to the surface of the edge portion of the sheet S is blown outward from the edge portion by the high-pressure air ejected from the first ejection port 21a, and the second ejection port 21b is blown off. The dust adhering to the rear surface of the edge portion of the sheet S is blown outward from the edge portion by the high-pressure air jetted from. Dust blown off from the front surface and back surface of the edge portion of the sheet S is sucked together with air by the suction ports 22 arranged outside the edge line of the edge portion of the sheet S. And dust adhering to the back surface can be reliably removed.

As in the case of the cleaning head 10 according to the first embodiment, since the uneven streak ST is formed on one surface of the first air supply path 25a (second air supply path 25b), the slit The high-pressure air can be ejected from the shaped first ejection port 21a (second ejection port 21b) in a vibrating state (for example, ultrasonic vibration). Therefore, dust attached to the front surface (back surface) of the edge portion of the sheet S can be more reliably removed by the vibrating high-pressure air.

Further, as in the case of the first embodiment, the degree of inclination of each of the first inclined guide wall 26a and the second inclined guide wall 26b is not particularly limited, and the first inclined guide wall 26a and the second inclined guide wall 26b The shape of each wall 26b is also not particularly limited. Further, the length of each of the slit-shaped first ejection openings 21a and the second ejection openings 21b (the length in the width direction of the sheet S, the length in the horizontal direction in FIG. 12) is not particularly limited. The direction in which the first ejection port 21a and the second ejection port 21b extend is also not particularly limited.

FIG. 13 shows a modification of the cleaning head according to the second embodiment of the invention described above.

The cleaning head 10 removes, for example, dust D adhering to each of the front and rear surfaces of the edge portion of a plate-shaped object W (object) having a predetermined thickness.

In FIG. 13, the cleaning head 10 has a groove portion 15 composed of a first surface 15a and a first surface 15b facing each other and a third surface 15c as a bottom surface. It is set so as to pass through the groove 15. The cleaning head 10 is formed on the first surface 15a of the groove portion 15 and has a first ejection port 21a arranged to face the surface of the edge portion of the object W, and the second surface 15b of the groove portion 15. , a second discharge port 21b arranged to face the back surface of the edge portion of the object W, and a third surface 15c (bottom surface) of the groove portion 15 formed on the edge line (end surface) of the edge portion of the object W. It has a suction port 22 arranged further outside. The first outlet 21a obliquely ejects high-pressure air, which is supplied from the air supply mechanism through the air supply port 11a, outward from the edge portion of the object W. As shown in FIG. The second outlet 21b obliquely ejects high-pressure air, which is supplied from the air supply mechanism through the air supply port 11b, outward from the edge portion of the object W. As shown in FIG. The suction port 22 is opened on the side of the edge portion of the object W and sucks air by the suction action of the suction mechanism through the exhaust port 12 .

In the cleaning head 10 configured as described above, the dust D adhering to the surface of the edge portion of the object W is blown outward from the edge portion by the high-pressure air ejected from the first ejection port 21a. Further, the dust D adhering to the rear surface of the edge portion of the object W is blown outward from the edge portion by the high-pressure air ejected from the second discharge port 21b. The dust D blown outward from each of the front and back surfaces of the edge portion of the object W is sucked together with gas by the suction ports 22 arranged outside the edge line (end surface) of the edge portion of the object W.

According to the cleaning head 10, the dust D blown outward from the front surface and the back surface of the edge portion of the object W by the high-pressure air ejected from the first ejection port 21a and the second ejection port 21b is removed from the target. Since the suction port 22 arranged outside the edge line of the object W is sucked together with the air, the dust D adhering to the edge of the object W can be reliably removed.

Next, a cleaning head according to a third embodiment of the invention will be described. The cleaning head according to the third embodiment is characterized by removing dust from only one surface (front surface) of a plate-like object W. FIG.

A cleaning head according to the third embodiment of the present invention is constructed as shown in FIGS. 14 and 15. FIG. 14 is a side view showing the cleaning head according to the third embodiment of the invention, and FIG. 15 is a plan view showing the cleaning head according to the third embodiment of the invention.

In FIGS. 14 and 15, the cleaning head 10 is arranged to face one surface (surface) of the edge portion of the object W, and supplies air obliquely outward from the edge portion of the object W. It has a discharge port 21 for discharging high-pressure air (gas) supplied from the air supply mechanism through the port 11 . Further, the cleaning head 10 is arranged outside the edge line (end surface) of the edge portion of the object W, is opened on the edge line side, and sucks air by the suction action of the suction mechanism through the exhaust port 12 . It has a suction port 22 for

In the cleaning head 10 configured as described above, the dust D adhering to the surface of the edge portion of the object W is blown outward from the edge portion by the high-pressure air ejected from the discharge port 21 . The dust D blown outward from the surface of the edge portion of the object W is sucked together with gas by the suction port 22 arranged outside the edge line (end surface) of the edge portion of the object W. In this way, the dust D blown outward from the surface of the edge portion of the object W by the high-pressure air ejected from the discharge port 21 is removed from the suction port arranged outside the edge line of the edge portion of the object W. Since it is sucked together with air by 22, the dust D adhering to the edge portion of the W object can be reliably removed.

It should be noted that the cleaning head 10 according to the third embodiment can be set as shown in FIGS. 16A and 16B, for example, on a plate-shaped object W (object) having a predetermined thickness. . In these cases, the cleaning head 10 is arranged so as to face the end surface of the object W. FIG. The dust D adhering to the edge portion of the object W is blown outward from the edge portion by the high-pressure air ejected from the discharge port 21 . The dust D blown outward from the edge portion of the object W is sucked together with gas by the suction port 22 arranged outside the edge portion of the object W. As shown in FIG. In this way, the dust D blown outward from the edge of the object W by the high-pressure air ejected from the discharge port 21 is blown away by the suction port 22 arranged outside the edge of the object W. Therefore, the dust D adhering to the edge portion of the W object can be reliably removed.

Although the embodiments of the present invention have been described above, the embodiments and modifications of each part are presented as examples, and are not intended to limit the scope of the invention. These novel embodiments described above can be implemented in various other forms, and various omissions, replacements, and modifications can be made without departing from the scope of the invention. These embodiments and their modifications are included in the scope and gist of the invention, and are included in the invention described in the claims.

INDUSTRIAL APPLICABILITY The cleaning head according to the present invention has the effect of reliably removing dust adhering to the edge portion of an object, and is useful as a cleaning head for removing dust adhering to the edge portion of an object.

10 cleaning head 10a first head section 10b second head section 11, 11a, 11b air supply port 12, 12a, 12b exhaust port 13a first head side first surface 13b first head side second surface 14a second head side second surface 1st surface 14b 2nd head-side second surface 15 groove 21 ejection port 21a first ejection port 21b second ejection port 22 suction port 22a first suction port 22b second suction port 23a first gas injection chamber 23b second gas injection chamber 24a First gas suction chamber 24b Second gas suction chamber 25a First air supply path 25b Second air supply path 26a First inclined guide wall 26b Second inclined guide wall 27a First intake path 27b Second air supply path ST Concavo-convex line Department

Claims (12)

A cleaning head for removing dust adhering to the edge of an object,
a discharge port arranged to face a surface of an edge portion of an object and ejecting gas obliquely outward from the edge portion of the object;
a suction port disposed outside the edge line of the edge portion of the object and opening toward the edge portion side to suck gas ;
The discharge port and the suction port are arranged so as to overlap in a direction along the edge line of the object, and the width of the suction port in the direction is larger than the width of the discharge port in the direction. , cleaning head. a gas injection chamber coupled to the air supply mechanism;
a gas suction chamber coupled to the suction mechanism;
an air supply path connecting the gas ejection chamber and the ejection port;
a suction path connecting the gas suction chamber and the suction port;
2. The cleaning method according to claim 1, wherein said air supply path includes an inclined guide portion for guiding the gas from said gas ejection chamber to be ejected obliquely from said ejection port toward said edge portion of said object. head. The ejection port is formed in a slit shape,
3. The cleaning head according to claim 2, wherein said air supply path includes a portion formed as a gap sandwiched between two surfaces following said slit-shaped ejection port. 4. The cleaning head according to claim 3, wherein at least one of said two surfaces is formed with an uneven streak extending in a direction crossing the flow direction of said gas. The inclined guiding portion is a wall formed between the two surfaces, and discharges the gas flowing in the air supply path obliquely from the discharge port to the surface of the edge portion of the object. 5. A cleaning head according to claim 3 or 4, including slanted guide walls for guiding the cleaning head. A cleaning head for removing dust adhering to an edge portion of an object having a front surface and a back surface,
a first head provided for the surface of the object;
a second head portion provided against the back surface of the object;
The first head section
a first ejection port arranged to face the surface of the edge portion of the object and ejecting gas obliquely outward from the edge portion of the object;
a first suction port arranged outside the edge line of the edge portion of the object, opening toward the edge portion side and sucking gas;
The first ejection port and the first suction port are arranged to overlap each other in the direction along the edge line of the object, and the width of the first suction port in the direction is the width of the first suction port in the direction. Larger than the width of one ejection port,
The second head section
a second ejection port arranged to face the back surface of the edge portion of the object and ejecting gas obliquely outward from the edge portion of the object;
a second suction port disposed outside the edge line of the edge portion of the object, opening toward the edge portion side and sucking gas ;
The second ejection port and the second suction port are arranged to overlap each other in the direction along the edge line of the object, and the width of the second suction port in the direction is the width of the second suction port in the direction. 2 A cleaning head that is larger than the width of the ejection port . The first head section
a first gas injection chamber coupled to the air supply mechanism;
a first gas suction chamber coupled to the suction mechanism;
a first air supply path connecting the first gas injection chamber and the first discharge port;
a first suction path connecting the first gas suction chamber and the first suction port;
The first air supply path includes a first inclined guide portion that guides the gas from the first gas injection chamber to obliquely discharge from the first discharge port with respect to the surface of the edge portion of the object. including
The second head section
a second gas injection chamber coupled to the air supply mechanism;
a second gas suction chamber coupled to the suction mechanism;
a second air supply path connecting the second gas injection chamber and the second discharge port;
a second suction path connecting the second gas suction chamber and the second suction port;
The second air supply path includes a second inclined guide portion that guides the gas from the second gas injection chamber to be discharged obliquely from the second discharge port to the back surface of the edge portion of the object. 7. The cleaning head of claim 6, comprising: A cleaning head for removing dust adhering to an edge portion of an object having a front surface and a back surface,
a first discharge port arranged to face the surface of an edge portion of an object and ejecting gas obliquely outward from the edge portion of the object;
a second ejection port arranged to face the back surface of the edge portion of the object and ejecting gas obliquely outward from the edge portion of the object;
a suction port disposed outside the edge line of the edge portion of the object and opening toward the edge portion side to suck gas ;
The first ejection port, the second ejection port, and the suction port are arranged so as to overlap in the direction along the edge line of the object, and the width of the suction port in the direction is the same as the width of the suction port in the direction. A cleaning head that is larger than the width of each of the first outlet and the second outlet . a first gas injection chamber and a second gas injection chamber coupled to the air supply mechanism, respectively;
a gas suction chamber coupled to the suction mechanism;
a first air supply path connecting the first gas injection chamber and the first discharge port;
a second air supply path connecting the second gas injection chamber and the second discharge port;
a suction path connecting the gas suction chamber and the suction port;
The first air supply path includes a first inclined guide portion that guides the gas from the first gas injection chamber to obliquely discharge from the first discharge port with respect to the surface of the edge portion of the object. including
The second air supply path includes a second inclined guide portion that guides the gas from the second gas injection chamber to be discharged obliquely from the second discharge port to the back surface of the edge portion of the object. 9. The cleaning head of claim 8, comprising: A cleaning head for removing dust adhering to the edge of a sheet,
a first surface arranged to face the surface of the edge portion of the sheet;
a second surface disposed outside the edge line of the edge portion of the sheet and facing the edge portion side;
A discharge port is formed on the first surface so as to obliquely eject gas toward the second surface,
A suction port for sucking gas is formed on the second surface ,
The discharge port and the suction port are arranged so as to overlap in a direction along the edge line of the sheet, and the width of the suction port in the direction is greater than the width of the discharge port in the direction. cleaning head. A cleaning head for removing dust adhering to the edge of a sheet,
a first head provided against the surface of the sheet;
a second head portion provided against the back surface of the sheet,
The first head section
a first head side first surface arranged to face the surface of the edge portion of the sheet;
a first head-side second surface arranged toward the edge portion on the outer side of the edge line of the edge portion of the sheet;
A first discharge port is formed in the first head-side first surface to obliquely jet gas toward the first head-side second surface, and
A first suction port for sucking gas is formed on the second surface on the first head side,
The first ejection port and the first suction port are arranged to overlap in the direction along the edge line of the sheet, and the width of the first suction port in the direction is the width of the first suction port in the direction. Larger than the width of the outlet,
The second head section
a second head side first surface arranged to face the back surface of the edge portion of the sheet;
a second head-side second surface arranged toward the edge portion on the outer side of the edge line of the edge portion of the sheet;
a second ejection port is formed in the first surface on the second head side for ejecting gas obliquely toward the second surface on the second head side;
A second suction port for sucking gas is formed on the second surface on the second head side ,
The second ejection port and the second suction port are arranged so as to overlap in the direction along the edge line of the sheet, and the width of the second suction port in the direction is the same as the width of the second suction port in the direction. A cleaning head that is larger than the width of the ejection port . A cleaning head for removing dust adhering to the edge of a sheet,
Having a first surface and a second surface facing each other and a third surface as a bottom surface, which constitute the groove,
A first ejection port is formed on the first surface for ejecting gas obliquely toward the third surface,
A second ejection port is formed on the second surface for ejecting gas obliquely toward the third surface,
A suction port for sucking gas is formed on the third surface,
The first surface faces the front surface of the edge portion of the sheet, the second surface faces the back surface of the edge portion of the sheet, and the third surface faces the edge line of the edge portion of the sheet. placed outside the
The first ejection port, the second ejection port, and the suction port are arranged so as to overlap in the direction along the edge line of the sheet, and the width of the suction port in the direction is the width of the suction port in the direction. A cleaning head that is larger than the width of each of the first ejection port and the second ejection port .

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