JP7100752B1 - Filling device - Google Patents

Abstract

An object of the present invention is to provide a filling apparatus capable of making the filling amount of each container more uniform. A nozzle section (62) has a supply channel (63) connected to a filling needle (61), an opening/closing valve (64), and a mass flowmeter (65), and a control section (10) controls a pulse signal output from the mass flowmeter (65). The valve control means 11 controls the opening and closing operation of the opening and closing valve based on the number of pulse signals output from the mass flow meter 65 after opening the opening and closing valve 64. The timing for closing the on-off valve 64 is determined based on the difference between the measured number of pulse signals and the target number of pulses at the time when the container 100 is completely filled with the liquid. change. [Selection drawing] Fig. 2

Description

The present invention relates to a filling device for filling various containers with liquid.

Conventionally, as a filling device for filling a container with a liquid, there is a device provided with a storage tank for storing the liquid and filling each container with the liquid supplied from the storage tank by a filling needle (filling nozzle). In such a filling device, it is desired that the amount of liquid (filling amount) filled in the container is as constant as possible, but particularly when a liquid such as a chemical solution is filled in a small-capacity container such as a vial. It is desired to control the filling amount with relatively high accuracy.

In response to such a request, a mass flow meter and an on-off valve controlled based on a pulse signal output from the mass flow meter are provided on the upstream side of the filling needle, and the opening time of the on-off valve is appropriately set. A filling device is known that adjusts the amount of liquid (filling amount) to be filled in a container by changing the amount. For example, by controlling the opening time of the on-off valve based on the pulse signal output from the mass flow meter, the container is filled with a predetermined amount of liquid (for example, Patent Documents 1 and 2 and the like). reference).

Japanese Patent Application Laid-Open No. 2003-231590 Japanese Unexamined Patent Publication No. 2006-335382

As described in the above document, by controlling the on-off valve based on the pulse signal output from the mass flow meter, it is possible to make the filling amount uniform for each container. However, it is difficult to control the filling amount for each container with high accuracy, and further improvement is desired.

The present invention has been made in view of such circumstances, and an object of the present invention is to provide a filling device capable of making the filling amount of each container more uniform.

A first aspect of the present invention that solves the above problems includes a storage tank in which a liquid is stored, and a plurality of filling needles connected to the storage tank via an introduction flow path to fill a container with the liquid. A filling device including a filling unit having a nozzle portion and a control unit for controlling the operation of the filling unit, wherein the nozzle portion opens and closes a supply flow path connected to the filling needle and the supply flow path. It has an on-off valve for the purpose and a mass flow meter provided on the upstream side of the on-off valve of the supply flow path and outputting a pulse signal according to the flow rate of the liquid passing through the supply flow path. The control unit has a valve control means for controlling the opening / closing operation of the opening / closing valve based on a pulse signal output from the mass flow meter so that the container is filled with the liquid in a predetermined amount. After opening the on-off valve, the valve control means closes the on-off valve so that the number of pulse signals output from the mass flow meter becomes a preset target number of pulses, and the container is opened. The timing of closing the on-off valve is changed based on the difference between the measured number of pulse signals and the target number of pulses at the time when the filling of the liquid into the container is completed, and the filling of the liquid into the container is performed a plurality of times. The filling device is characterized in that the average value of the difference each time is calculated at the end timing, and the timing for closing the opening / closing valve is changed by a value of ½ of the average value .

The second aspect of the present invention is the filling device of the first aspect, and the filling unit has a distribution flow path to which the introduction flow path is connected and a flow path area larger than that of the introduction flow path. The supply flow path of each nozzle section is connected to the distribution flow path, and the valve control means closes the on-off valve for each nozzle section based on the pulse signal output from the mass flow meter. It is in a filling device characterized by changing the timing of operation.

A third aspect of the present invention is the filling device according to the first or second aspect, which comprises a weighing means for weighing the liquid filled in the container, and the valve control means is a weighing result by the weighing means. The filling device is characterized in that the target pulse number is changed based on the above.

A fourth aspect of the present invention is the filling device according to any one of the first to third aspects, wherein the filling unit is installed in a dustproof chamber and the storage tank is installed outside the dustproof chamber. The filling device is provided with a filter device for filtering the liquid in the vicinity of the filling unit in the dustproof chamber.

A fifth aspect of the present invention is the filling device of the fourth aspect, and the filling unit has a distribution flow path to which the introduction flow path is connected and a flow path area larger than that of the introduction flow path. The supply flow path of each nozzle portion is connected to the distribution flow path, and a pressure detecting means for detecting the pressure in the distribution flow path and a pressure adjusting means for adjusting the pressure in the storage tank are provided. The pressure adjusting means is a filling device characterized in that the pressure in the storage tank is adjusted so that the pressure in the distribution flow path detected by the pressure detecting means becomes a predetermined pressure.

In the filling device according to the present invention, the timing of closing the on-off valve is appropriately changed (corrected) based on the difference between the measured number of pulse signals and the target pulse number at the time when the filling of the liquid in the container is completed. I did it. Thereby, the filling amount of each container can be made more uniform.

It is a figure which shows the schematic structure of the liquid processing system which includes the filling apparatus which concerns on Embodiment 1 of this invention. It is a figure which shows the schematic structure of the filling device which concerns on Embodiment 1 of this invention. It is a figure explaining the operation of the filling apparatus which concerns on Embodiment 1 of this invention. It is a figure which shows the flow rate change of the chemical liquid of a nozzle part at the time of filling a liquid with a container. It is a figure which shows the schematic structure of the filling device which concerns on Embodiment 2 of this invention.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

(Embodiment 1)
FIG. 1 is a diagram showing a schematic configuration of a liquid processing system including a filling device according to the first embodiment of the present invention. The liquid treatment system I is a part of a plant that manufactures a liquid pharmaceutical product (hereinafter referred to as a chemical liquid) as an example of a liquid, and is configured to include a filling device 1.

Specifically, the liquid processing system I connects a compounding tank 2, a sterilizer 3, a storage tank 4, a filling device 1 including a filter device 5 and a filling unit (filling machine) 6, and these devices. It is configured to include a production line L composed of pipes.

The compounding tank 2 is a tank for compounding a raw material for a chemical solution and a solvent such as water to obtain a chemical solution. The sterilizer 3 is a device for sterilizing a chemical solution by heat treatment, filtration treatment with a filter, or the like.

The filling device 1 including the storage tank 4, the filter device 5, and the filling unit 6 is a device for filling the container with the prepared chemical solution, and the detailed configuration will be described later.

The production line L is a pipe through which a chemical solution and a fluid for cleaning flow, and sequentially connects a compounding tank 2, a sterilizer 3, a storage tank 4 of a filling device 1, a filter device 5, and a filling unit 6. .. That is, the chemical solution in the compounding tank 2 is distributed to the filling unit 6 by the production line L via the sterilizer 3, the storage tank 4, and the filter device 5.

Further, the liquid processing system I includes a first cleaning unit 71 and a second cleaning unit 72. The first cleaning unit 71 and the second cleaning unit 72 are collectively referred to as a cleaning unit 7.

The cleaning unit 7 (71, 72) is a cleaning device for performing clean-in-place cleaning (CIP) and a sterilization device for performing stationary sterilization (SIP) of the liquid processing system I. Although not shown, the cleaning unit 7 is a source of a cleaning liquid used for clean-in-place cleaning, a source of a sterilizing fluid used for clean-in-place sterilization, and a device (pump) for pumping these cleaning liquids and sterilizing fluids. To control the flow of cleaning liquid and sterilizing fluid, a processing device for discarding or reusing the cleaning liquid and sterilizing fluid after clean-in-place cleaning and stationary sterilization. It is composed of a valve, a control device that controls the above-mentioned various devices to start / stop liquid feeding, and the like.

In the present embodiment, the first cleaning unit 71 is used for clean-in-place cleaning and stationary sterilization of the storage tank 4 constituting the compounding tank 2, the sterilizer 3, and the filling device 1. Specifically, the first cleaning unit 71 sends the cleaning liquid to the blending tank 2, the sterilizer 3, and the storage tank 4 via the first cleaning line A. Then, the first cleaning unit 71 collects the cleaning liquid discharged from the storage tank 4 via the first cleaning line B. After such clean-in-place cleaning, the first cleaning unit 71 performs stationary sterilization by supplying and recovering a sterilizing fluid in the same manner as the cleaning liquid.

The second cleaning unit 72 is used for clean-in-place cleaning and stationary sterilization of the filter device 5 and the filling unit 6. Specifically, the second cleaning unit 72 sends the cleaning liquid to the filter device 5 and the filling unit 6 via the second cleaning line C. Then, the second cleaning unit 72 collects the cleaning liquid discharged from the filling unit 6 via the second cleaning line D. After such clean-in-place cleaning, the second cleaning unit 72 performs stationary sterilization by supplying and recovering a sterilizing fluid in the same manner as the cleaning liquid.

The cleaning liquid includes water to which an alkaline agent such as caustic soda is added, water to which an acidic agent is added, water containing a surfactant, or water containing no such agent. Of course, these may be used together. The sterilizing fluid is hot water or steam obtained by heating purified water or the like.

The configuration of the liquid treatment system I described above is an example, and the liquid treatment system I is not limited to this configuration. For example, the first cleaning unit 71 and the second cleaning unit 72 do not need to be provided for each object to be subjected to clean-in-place cleaning and stationary sterilization. Further, the liquid processing system I may be configured to include equipment other than the above. Further, the configuration of the production line L for producing the chemical solution is not limited to the above-mentioned configuration.

Next, the configuration of the filling device 1 according to the present embodiment provided in the liquid processing system I will be described. FIG. 2 is a schematic configuration diagram of a filling device according to the first embodiment of the present invention. In FIG. 2, the cleaning unit and the cleaning line are not shown.

As shown in FIG. 2, the filling device 1 according to the present embodiment is a device for filling a container 100 such as a vial with a chemical solution, and is filled with a storage tank 4 and a filter device 5 as described above. It is equipped with a unit 6. The storage tank 4 and the filling unit 6 are connected by an introduction pipe (introduction flow path) 8 constituting the production line L. The filter device 5 is a device for sterilizing the chemical solution and the like, and is provided in the vicinity of the filling unit 6 of the introduction pipe 8.

In the filling device 1 according to the present embodiment, the filling unit 6 and the filter device 5 are installed in the clean room (dustproof room) CR, and the storage tank 4 is installed outside the clean room CR. By having such a configuration of the filling device 1, it is possible to reduce the number of devices installed in the clean room CR. Along with this, the clean room CR can be miniaturized, so that costs such as maintenance costs can be reduced. Further, the maintainability of the filling device 1 can be improved.

More specifically, the clean room CR is provided with a laminar flow booth (sterile area) in which a laminar flow in which sterile air flows in one direction (for example, in the horizontal direction) is formed, and equipment such as the filling unit 6 is equipped with this laminar. It is installed in the flow booth. Since the number of devices installed in the clean room CR is reduced, the size of the laminar flow booth can be reduced. As a result, the cost can be reduced.

In addition, since the number of devices installed in the clean room CR is kept small, it becomes easy to eliminate dust and fine particles and improve the degree of cleaning in the clean room CR, especially in the laminar flow booth, in performing aseptic control. Furthermore, since the number of devices is small, the number of joints in the pipes is also reduced, which reduces the risk of liquid leakage. This reduces the risk of contamination in the clean room CR, that is, the risk of contamination of the chemical solution filled in the container 100.

In addition, since the number of devices is small, the maintenance work in the clean room CR, especially the maintenance work in the laminar flow booth, is reduced. When working in the clean room CR, the worker needs to change clothes each time, but since the maintenance work in the clean room CR is reduced, the number of times of changing clothes can be reduced. Therefore, it is possible to reduce the burden on the maintenance worker.

Further, the filling device 1 includes, for example, a control device (control unit) 10 including a programmable logic controller (PLC) and the like. As will be described in detail later, each device included in the filling device 1 is controlled by the control device 10.

The storage tank 4 is a relatively large tank that is prepared by the preparation tank 2 as described above and stores the chemical solution sterilized by the sterilizer 3, and for example, a storage tank of about 10 to 6000 liters is used. Of course, the capacity of the storage tank 4 is not particularly limited, and may be, for example, a capacity larger than 6000 liters. The amount of the chemical solution to be filled in each container 100 can be appropriately adjusted, but is, for example, about 10 to 500 ml.

Further, the storage tank 4 is provided with a pressure adjusting means for adjusting the internal pressure. In the present embodiment, the gas supply device 9 as the pressure adjusting means is connected to the storage tank 4. A predetermined gas (for example, compressed air or the like) is appropriately supplied into the storage tank 4 by the gas supply device 9, so that the internal pressure of the storage tank 4 is adjusted to a substantially constant value.

The filling unit 6 fills the container 100 with the chemical solution supplied from the storage tank 4 via the filter device 5, and includes a plurality of nozzles 62 including a filling needle 61 for filling the container 100 with the chemical solution. ing. That is, the filling unit 6 is provided with a plurality of (n) filling needles 61, and is configured to be able to fill the plurality (n) containers 100 with the chemical solution at the same time. Further, in the present embodiment, a plurality of filling needles 61 are arranged in a row. Of course, the arrangement of the plurality of filling needles 61 is not particularly limited.

The filling device 1 is provided with a transport device (transport means) (not shown), and the container 100 filled with the liquid is continuously transported by this transport device, and the position corresponding to each filling needle 61 of the filling unit 6. Will be delivered to. Further, each container 100 filled with the chemical solution is carried out of the filling unit 6 from the position corresponding to the filling needle 61 by the transport device. Since the configuration of the transport device is not particularly limited and the existing configuration may be adopted, detailed description thereof will be omitted.

Each nozzle portion 62 has a filling needle 61, a supply pipe (supply flow rate) 63 connected to the filling needle 61, an opening / closing valve 64 for opening / closing the supply pipe 63, and an opening / closing valve 64 of the supply pipe 63 on the upstream side. The mass flow meter 65 is provided in the above and outputs a pulse signal according to the flow rate of the chemical solution passing through the supply pipe 63.

Further, the supply pipe 63 constituting each nozzle portion 62 is connected to the distribution pipe (distribution passage) 66 at predetermined intervals. That is, each filling needle 61 is connected to the distribution pipe 66 via the supply pipe 63. The distribution pipe 66 is formed with a flow path area (cross-sectional area) wider than that of the introduction pipe 8, is connected to the storage tank 4 via the introduction pipe 8, and the chemical liquid supplied from the storage tank 4 is supplied to each nozzle portion 62. It plays a role of distribution. That is, the amount of the chemical solution supplied to each nozzle portion 62 is temporarily stored in the distribution pipe 66.

Here, although the pressure in the branch pipe 66 varies slightly when the container 100 is filled with the chemical solution from each filling needle 61, the chemical solution in the storage tank 4 is appropriately supplied to the branch pipe 66 via the introduction pipe 8. By doing so, the value is always substantially constant. That is, the internal pressure of the storage tank 4 is appropriately adjusted by the gas supply device 9 so that the pressure in the distribution pipe 66 is always substantially constant.

In the present embodiment, the distribution pipe 66 is provided with a pressure sensor (pressure detecting means) 67 for detecting the internal pressure thereof. The gas supply device 9 described above operates based on the detection result of the pressure sensor 67. That is, the detection result of the pressure sensor 67 is sent to the control device 10, and the control device 10 appropriately operates the gas supply device 9 based on this detection result. As a result, the pressure in the storage tank 4 is adjusted so that the pressure in the distribution pipe 66 becomes a substantially constant value.

The size (volume) of the distribution pipe 66 may be larger than the size that can temporarily store the chemical liquid supplied to each nozzle portion 62 (filling needle 61 and supply pipe 63), but is connected to the distribution pipe 66. It is desirable that the volume is sufficiently larger than the total volume of all the nozzle portions 62 to be formed. This makes it easier to maintain the pressure in the distribution pipe 66 at a substantially constant value.

The arrangement of the on-off valve 64 and the mass flow meter 65 in each nozzle portion 62 is not particularly limited, but in the present embodiment, the mass flow meter 65 is arranged on the upstream side of the on-off valve 64.

In the filling device 1 according to the present embodiment, the filling unit 6 having such a configuration is appropriately controlled by the control device 10, and each container 100 is filled with a predetermined amount of chemical solution. Specifically, the control device 10 is a valve control means that controls the opening / closing operation of each opening / closing valve 64 based on the pulse signal output from the mass flow meter 65 so that the container 100 is filled with a predetermined amount of the chemical solution. 11 is provided.

Here, the supply pipe 63 of each nozzle portion 62 is formed of a tube made of a flexible material such as rubber. The on-off valve 64 is provided with, for example, a pressing member that can move in the radial direction of the supply pipe 63, and the supply pipe 63 is open when the supply pipe 63 is not pressed by the pressing member, and the on-off valve 64 is closed. The supply pipe 63 is configured to be closed by pressing the supply pipe 63 with the pressing member. Of course, the configuration of the on-off valve 64 is not limited to the above. Further, the configuration of the mass flow meter 65 is not particularly limited, and an existing one may be adopted, so detailed description thereof will be omitted.

In the filling device 1 including the filling unit 6 including the plurality of nozzle portions 62 having such a configuration, the valve control means 11 fills each container 100 with the chemical solution by opening and closing the opening / closing valve 64 as follows. .. FIG. 3 is a diagram illustrating a procedure for filling a container with a chemical solution, and the state in which the on-off valve 64 is open is shown in white, and the state in which the on-off valve 64 is closed is shown in black.

First, as shown in FIG. 3A, with the open / close valve 64 closed, the container 100 is carried in by the transport device to the position corresponding to the filling needle 61, and the container 100 is raised or the filling needle 61 is lowered. The filling needle 61 is inserted into the container 100. In this state, as shown in FIG. 3B, by opening the open / close valve 64, the chemical solution is supplied from the distribution pipe 66 to the supply pipe 63 of the nozzle portion 62, and the inside of the container 100 is supplied from each filling needle 61. Is filled with a chemical solution.

When the open / close valve 64 is maintained in the open state for a predetermined period and a predetermined amount of the chemical solution is supplied to the nozzle portion 62, the open / close valve 64 is closed as shown in FIG. 3C. As a result, the supply pipe 63 is closed, and when a predetermined amount of the chemical solution is filled in the container 100, the supply of the chemical solution to the filling needle 61 is stopped. That is, the opening / closing valve 64 is closed at the timing when the supply of the chemical solution to the filling needle 61 is stopped when the container 100 is filled with the predetermined amount of the chemical solution. After that, the container 100 is lowered or the filling needle 61 is raised, the filling needle 61 is taken out from the container 100, and the container 100 is carried out from the filling unit 6 by the transport device.

FIG. 4 is a diagram showing a change in the flow rate of the chemical solution supplied to the supply pipe 63 of the nozzle portion 62 when the container 100 is filled with the chemical solution. As shown in FIG. 4, when the opening / closing valve 64 is opened at the timing T1, the flow rate of the chemical solution gradually increases until the opening operation of the opening / closing valve 64 is completed at the timing T2, that is, until the supply pipe 63 is opened. (Between T1 and T2). When the on-off valve 64 is open, the flow rate supplied to the supply pipe 63 is maintained at the maximum flow rate F1 (between T2 and T3).

After that, when it is determined that a predetermined amount of the chemical solution has been supplied to the nozzle portion 62 and the on-off valve 64 is closed at the timing T3, it is supplied to the nozzle portion 62 until the on-off valve 64 is completely closed at the timing T4. The flow rate of the chemical solution gradually decreases (between T3 and T4). That is, even during this period (between T3 and T4), the container 100 is filled with the chemical solution from the filling needle 61, and when the opening / closing valve 64 is completely closed at the timing T4, the filling of the chemical solution into the container 100 is completed.

Here, the timing T3 for closing the on-off valve 64 by the valve control means 11, that is, the period during which the on-off valve 64 is open is determined based on the number of pulse signals output from each mass flow meter 65. ..

Specifically, the valve control means so that the number of pulse signals output from the mass flow meter 65 at the timing T4 becomes the preset target number of pulses P1 after the opening / closing valve 64 is opened at the timing T1. The timing T3 for closing the open / close valve 64 is determined by 11.

More specifically, the flow rate of the chemical solution corresponding to one pulse signal output from the mass flow meter 65 is obtained in advance by an experiment or the like. Further, the flow rate of the chemical solution supplied to the nozzle portion 62 is obtained in advance by an experiment or the like between the time when the on-off valve 64 is closed and the time when the on-off valve 64 is completely closed (between T3 and T4), and this result is obtained. From T3 to T4, the number of pulse signals (predicted number of pulses) P2 output from the mass flow meter 65 is calculated.

Then, after the opening / closing valve 64 is opened at the timing T1, the number of pulse signals output from the mass flow meter 65 is the predetermined number of pulses P3 (= P1-P2) obtained by subtracting the predicted pulse number P2 from the target pulse number P1. The timing is determined to be the timing T3 for closing the on-off valve 64.

As a result, the valve control means 11 closes the on-off valve 64 at the timing T3 when the number of pulse signals output from the mass flow meter 65 becomes the predetermined number of pulses P3 after the on-off valve 64 is opened at the timing T1. It will work. As a result, the number of pulse signals output from the mass flow meter 65 at the timing T4 is set to the target pulse number P1.

By the way, even if the open / close valve 64 is closed at the timing T3 in this way, the number of pulse signals (actually measured number) P4 actually measured at the timing T4 may not match the target pulse number P1. That is, the amount of the chemical solution filled in each container 100 may vary. There are various factors, but for example, deterioration of valve responsiveness due to deterioration of consumables such as packing, chamber pressure in clean room CR, hydraulic pressure in branch pipe 66, temperature of chemical solution, dissolved oxygen and the like can be mentioned. ..

Therefore, the valve control means 11 closes the on-off valve 64 for each nozzle portion 62 based on the difference D1 between the actually measured number P4 of the pulse signal and the target pulse number P1 at the time when the filling of the container 100 with the chemical solution is completed. The timing T3 to be operated is appropriately changed (corrected). In the present embodiment, the valve control means 11 calculates the difference D1 every time the container 100 is filled with the chemical solution a plurality of times (for example, three times), and changes the timing T3 based on the difference D1. There is. Specifically, the timing T3 is changed by obtaining the average value Av1 of the difference D1 in a plurality of fillings and subtracting the value equal to or less than the average value Av1 from the predetermined number of pulses P3.

The value to be subtracted may be appropriately determined, and may be, for example, an average value Av1 or a value halved of the average value Av1. That is, the timing T3 for closing the on-off valve 64 may be changed by the value of the average value Av1, or the timing T3 for closing the on-off valve 64 may be changed by the value of 1/2 of the average value Av1. May be good.

By appropriately changing the timing T3 for closing the on-off valve 64 in this way, it is possible to fill each container 100 with a uniform amount of the chemical solution. In particular, by appropriately changing the timing T3 for closing the on-off valve 64 for each nozzle portion 62, the filling amount for each container 100 can be made more uniform.

Further, in the present embodiment, the timing T3 is changed when the filling of the chemical solution is completed a plurality of times, but of course, the timing T3 may be changed each time the filling of the chemical solution is completed once. .. In this case, the timing T3 may be changed by subtracting a value of the difference D1 or less from the predetermined number of pulses P3.

(Embodiment 2)
FIG. 5 is a diagram showing a schematic configuration of a filling device according to the second embodiment. In the figure, the same members are designated by the same reference numerals, and the description overlapping with the first embodiment will be omitted.

As shown in FIG. 5, the filling device 1 according to the present embodiment includes a weighing unit (weighing means) 20, and the configuration other than the weighing unit 20 is the same as that of the first embodiment.

The weighing unit 20 is configured to include, for example, a weighing device such as an electronic balance, and each nozzle unit 62 weighs the chemical solution filled in the container 100. The container 100 filled with the chemical solution is sampled and carried into the weighing unit 20 by a transfer device after each filling of a plurality of times (for example, three times), and the chemical solution is weighed by the weighing unit 20. The procedure for weighing the drug solution by the weighing unit 20 is not particularly limited, but for example, the mass of the container 100 filled with the drug solution is measured, and the mass of the container 100 stored in advance is subtracted from the measurement result to obtain the drug solution. Find the mass.

Then, the valve control means 11 changes the target pulse number P1 preset based on the weighing result by the weighing unit 20 as necessary. For example, after weighing the chemicals in the weighing unit 20 a predetermined number of times, the average value of these weighing results is obtained. If the average value does not match the filling amount of the chemical solution calculated from the target pulse number P1, the number of pulses corresponding to the desired filling amount is calculated from the average value of the weighing result, and the calculated pulse number is newly used. Set as the target pulse number P1 (change the target pulse number P1).

By appropriately changing the target pulse number P1 in this way, the filling amount to each container 100 can be made more uniform.

In the present embodiment, the configuration in which the filling device 1 is provided with the weighing unit 20 is illustrated, but the weighing unit 20 may be a device independent of the filling device 1. Further, the valve control means 11 changes the target pulse number P1 based on the weighing result of the weighing unit 20, but of course, the target pulse number P1 is manually set at an arbitrary timing based on the weighing result of the weighing unit 20. You can also change it.

(Other embodiments)
Although the embodiments of the present invention have been described above, the present invention is not limited to the above-described embodiments.

For example, in the above-described embodiment, the present invention has been described by taking as an example a filling device for filling a container with a chemical solution. Can also be applied.

I ... Liquid processing system, 1 ... Filling device, 2 ... Mixing tank, 3 ... Sterilizer, 4 ... Storage tank, 5 ... Filter device, 6 ... Filling unit, 61 ... Filling needle, 62 ... Nozzle part, 63 ... Supply pipe , 64 ... Open / close valve, 65 ... Mass flow meter, 66 ... Minute piping, 67 ... Pressure sensor, 7 ... Cleaning unit, 71 ... 1st cleaning unit, 72 ... 2nd cleaning unit, 8 ... Introduction pipe, 9 ... Gas supply Device, 10 ... Control device, 11 ... Valve control means, 20 ... Weighing unit, 100 ... Container

Claims (5)

A storage tank in which a liquid is stored, a filling unit connected to the storage tank via an introduction flow path and having a plurality of nozzles including a filling needle for filling the container with the liquid, and an operation of the filling unit. A filling device including a control unit for controlling.
The nozzle portion is
The supply flow path connected to the filling needle and
An on-off valve for opening and closing the supply flow path,
It has a mass flow meter provided on the upstream side of the on-off valve of the supply flow path and outputting a pulse signal according to the flow rate of the liquid passing through the supply flow path.
The control unit has a valve control means for controlling the opening / closing operation of the opening / closing valve based on a pulse signal output from the mass flow meter so that the container is filled with the liquid in a predetermined amount.
After opening the on-off valve, the valve control means closes the on-off valve so that the number of pulse signals output from the mass flow meter becomes a preset target number of pulses, and the container is opened. The timing for closing the on-off valve is changed based on the difference between the measured number of pulse signals and the target number of pulses at the time when the filling of the liquid is completed .
At the timing when the filling of the liquid into the container is completed a plurality of times, the average value of the difference of each time is calculated, and the timing of closing the opening / closing valve is changed by a value of 1/2 of the average value.
A filling device characterized by that. The filling device according to claim 1 .
The filling unit has a distribution flow path to which the introduction flow path is connected and has a larger flow path area than the introduction flow path, and the supply flow path of each nozzle portion is connected to the distribution flow path.
The valve control means is a filling device characterized in that the timing for closing the open / close valve is changed for each nozzle portion based on a pulse signal output from the mass flow meter. The filling device according to claim 1 or 2 .
A weighing means for weighing the liquid filled in the container is provided.
The valve control means is a filling device, characterized in that the target pulse number is changed based on the weighing result by the weighing means. The filling device according to any one of claims 1 to 3 .
The filling unit is installed in the dustproof chamber, and the storage tank is installed outside the dustproof chamber.
Further, the filling device is characterized in that the introduction flow path is provided with a filter device for filtering the liquid in the vicinity of the filling unit in the dustproof chamber. The filling device according to claim 4 .
The filling unit has a distribution flow path to which the introduction flow path is connected and has a larger flow path area than the introduction flow path, and the supply flow path of each nozzle portion is connected to the distribution flow path.
A pressure detecting means for detecting the pressure in the distribution flow path and
A pressure adjusting means for adjusting the pressure in the storage tank is provided.
The pressure adjusting means is a filling device that adjusts the pressure in the storage tank so that the pressure in the distribution flow path detected by the pressure detecting means becomes a predetermined pressure.

Images