JP7075303B2 - Thickness measuring device - Google Patents

Description

The present invention relates to a thickness measuring device.

In a grinding device that grinds a plate-shaped work with a grinding wheel, grinding is performed while rotating a chuck table that holds the plate-shaped work and measuring the thickness of a specific portion of the plate-shaped work. Therefore, after grinding, it is confirmed whether or not the plate-shaped work has a set thickness on the entire surface by measuring the thickness of a plurality of points on the plate-shaped work.

The thickness measurement is carried out, for example, as follows. Light having a wavelength transmitted through the plate-shaped work is projected from above the plate-shaped work. Then, the reflected light reflected on the upper surface of the plate-shaped work and the reflected light reflected on the lower surface are received, and the thickness of the plate-shaped work is measured from the optical path difference between the two reflected lights. However, in this method, if the plate-shaped work contains a metal wiring or the like that blocks light, it is difficult for the light to reach the lower surface, which makes it difficult to measure the thickness.

The thickness of such a plate-shaped work is measured as follows, for example. A plate-shaped work is inserted between the top surface measuring instrument and the bottom surface measuring instrument. Then, the upper surface of the plate-shaped work is irradiated with the measurement light using the upper surface measuring instrument, and the distance between the upper surface measuring instrument and the upper surface (upper surface distance) is measured. Further, the lower surface of the plate-shaped work is irradiated with the measurement light using the bottom surface measuring instrument, and the distance between the bottom surface measuring instrument and the lower surface (bottom surface distance) is measured. The thickness of the plate-shaped work is obtained by subtracting the upper surface distance and the lower surface distance from the distance between the upper surface measuring instrument and the lower surface measuring instrument.

In this method, the upper surface distance and the lower surface distance are measured by separate measuring instruments. Therefore, the measurement points on the upper surface side and the measurement points on the lower surface side are positioned symmetrically with respect to the plate-shaped work. Further, in order to allow the plate-shaped work to enter between the upper surface measuring instrument and the lower surface measuring instrument, the upper surface measuring instrument and the lower surface measuring instrument are arranged and integrated on the U-shaped arm. A thickness measuring device including such an arm is disclosed in, for example, Patent Document 1.

Japanese Unexamined Patent Publication No. 2015-17904

In the thickness measuring device having a U-shaped arm as described above, in order to measure the thickness of the entire surface of the plate-shaped work, for example, the plate-shaped work is moved in the X-axis direction, while the U-shaped work is formed. Some move the arm in the Y-axis direction. In this configuration, the arm protrudes from the plate-shaped work along the Y-axis direction during measurement. Therefore, the measuring device becomes large. Such protrusion of the arm can also occur in a configuration in which the arm is moved in the X-axis direction and the Y-axis direction with respect to the fixed plate-shaped work.

An object of the present invention is to prevent the arm from protruding in a direction orthogonal to the moving direction of the plate-shaped work when measuring the thickness of the plate-shaped work.

The thickness measuring device (this thickness measuring device) according to the present invention is a thickness measuring device for measuring the thickness of a plate-shaped work, and has a first transporting means for transporting the plate-shaped work in the X-axis direction and an X-axis. A second transport means, which is attached to the first transport means with a gap extending in the Y-axis direction orthogonal to the direction, takes over the plate-shaped work from the first transport means, and further transports the plate-shaped work in the X-axis direction. Positioned above the transport means and the gap, the plate-shaped work is irradiated with measurement light from above, receives the reflected light from the upper surface of the plate-shaped work, and reaches from itself to the upper surface of the plate-shaped work. A top surface measuring device that measures the distance and a top surface measuring device that is positioned below the gap, irradiates the plate-shaped work with measurement light from below, receives reflected light from the lower surface of the plate-shaped work, and receives the reflected light from the plate-shaped work itself. A lower surface measuring device that measures the distance to the lower surface of the work, an upper arm provided with the upper surface measuring device on the lower side of the tip portion, and the upper surface measuring device in a direction orthogonal to the surface direction of the plate-shaped work. A lower arm provided with the lower surface measuring instrument on the upper side of the tip portion so as to be linearly opposed to each other, and an arm pillar portion connecting the rear end portion of the upper arm and the rear end portion of the lower arm. From the first distance, which is the preset distance between the upper surface measuring instrument and the lower surface measuring instrument, to the second, which is the distance from the upper surface measuring instrument to the upper surface of the plate-shaped work. A calculation means for calculating the thickness of the plate-shaped work by subtracting the distance and the third distance, which is the distance from the bottom surface measuring device to the bottom surface of the plate-shaped work, and the top surface measuring device and the bottom surface measuring device. The measuring instrument moving means includes a measuring instrument moving means for moving the lower arm in the Y-axis direction, and the measuring instrument moving means includes a Y-axis direction turntable that rotatably supports the tip of the lower arm from below, and a Y-axis direction turntable. A Y-axis direction guide that directs movement in the Y-axis direction, a Y-axis direction drive source that moves the Y-axis direction turntable in the Y-axis direction, and an X-axis that rotatably supports the rear end of the lower arm from below. The bottom surface measuring instrument is provided with a directional turntable and an X-axis direction guide that directs the movement of the X-axis direction turntable in the X-axis direction, and by moving the Y-axis direction turntable in the Y-axis direction. When the thickness of the plate-shaped work is measured at a plurality of points along the Y-axis direction with the top surface measuring instrument, the X-axis direction turntable is moved in the X-axis direction, and the arm member is swiveled. It has been downsized.

In this thickness measuring device, the measurement point of the upper surface measuring device and the measuring point of the lower surface measuring device may be positioned on the rotation axis center of the Y-axis direction turntable.

In this thickness measuring device, the tip of the arm member including the upper surface measuring instrument and the lower surface measuring instrument can be moved along the Y axis direction by the Y-axis rotary table and the Y-axis guide of the measuring instrument moving means. .. This makes it possible to set a plurality of measurement positions on the plate-shaped work along the Y-axis direction.

Further, in this thickness measuring device, as the tip of the arm member moves along the Y-axis direction, the rear end of the arm member is moved along the X-axis direction by the X-axis rotary table and the X-axis guide. Can be moved. That is, as the tip of the arm member moves, the arm member can be swiveled with the Y-axis direction rotary table and the X-axis direction rotary table as the swivel axis. Therefore, in this thickness measuring device, it is possible to prevent the rear end portion of the arm member from protruding significantly in the Y-axis direction from the first and second transport means. As a result, the thickness measuring device can be downsized.

Further, in this thickness measuring device, it is not necessary to arrange members on both sides of the first and second transport means in the X-axis direction. That is, in this thickness measuring device, it is possible to open the X-axis direction. As a result, the thickness measuring device can be easily arranged between the two processing devices. Therefore, the thickness measuring device can transfer the plate-shaped work between the two processing devices, and at that time, the thickness of the plate-shaped work can be easily measured.

When the measurement point of the top surface measuring instrument and the measurement point of the bottom surface measuring instrument are positioned on the center of rotation of the Y-axis direction turntable, the amount of movement of the Y-axis direction turntable in the Y-axis direction is measured. It is the amount of movement of the position. Here, the amount of movement of the Y-axis direction rotary table in the Y-axis direction is a value corresponding to the drive amount of the Y-axis direction drive source that drives the Y-axis direction rotary table. Therefore, in this thickness measuring device, it is possible to accurately adjust the measurement position in the Y-axis direction based on the drive amount of the drive source in the Y-axis direction.

FIG. 1A is an explanatory view showing the thickness measuring device from the side surface, and FIG. 1B is an explanatory view showing the same thickness measuring device from the upper surface. FIG. 2A is an explanatory view showing the first and second belt conveying means of the thickness measuring device from the side surface, and FIG. 2B is an explanatory view showing the same from the upper surface. It is a perspective view which shows the structure of the arm member and the measuring instrument moving means in this thickness measuring apparatus. It is a figure for demonstrating the thickness measuring method of a plate-shaped work by a top surface measuring instrument, a bottom surface measuring instrument, and a calculation means. FIG. 5A is an explanatory view showing the main thickness measuring device in a state where the measuring instrument is moving along the Y-axis direction from the side surface, and FIG. 5B is an explanatory view also showing from the upper surface. FIG. 6A is an explanatory view showing the main thickness measuring device in a state where the measuring instrument is located at the end in the Y-axis direction from the side surface, and FIG. 6B is an explanatory view also showing from the upper surface. ..

The thickness measuring device 10 shown in FIGS. 1 (a) and 1 (b) is a device for measuring the thickness of a plate-shaped work such as a wafer, and is a first transport means 11 and a second transport means 11 for transporting the plate-shaped work 1. It includes a transport means 13, an arm member 15, a calculation means 17 for calculating the thickness of the plate-shaped work 1, and a measuring instrument moving means 19 for moving the tip portion A of the arm member 15 in the Y-axis direction.

As shown in FIGS. 2A and 2B, the transport path R of the plate-shaped work 1 extends from the −X side toward the + X side along the X-axis direction. The first transport means 11 and the second transport means 13 are arranged so as to be lined up in the X-axis direction along the transport path R of the plate-shaped work 1, and transport the plate-shaped work 1 from the −X side to the + X side. ..

The first transport means 11 receives the plate-shaped work 1 from the outside and transports it along the X-axis direction. The first transport means 11 has, for example, a drive roller 11a that includes a motor M and rotates by itself, a driven roller 11b that rotates subordinately, and a plurality of belt members 11c stretched on both rollers 11a and 11b. is doing. The drive roller 11a and the driven roller 11b extend along the Y-axis direction. The driven roller 11b is located on the downstream side (+ X side) of the drive roller 11a in the transport path R. The plurality of belt members 11c are stretched on both rollers 11a and 11b so as to be aligned in the Y-axis direction. The plate-shaped work 1 is placed on the belt member 11c.

The second transport means 13 is provided in series with the first transport means 11 on the downstream side of the first transport means 11 in the transport path R of the plate-shaped work 1. The second transport means 13 takes over the plate-shaped work 1 transported by the first transport means 11 from the first transport means 11 and further transports it along the X-axis direction.

The second transport means 13 has, for example, a drive roller 13a, a driven roller 13b, and a plurality of belt members 13c stretched on both rollers 13a and 13b, similar to the first transport means 11. .. The plate-shaped work 1 is placed on the belt member 13c.
A gap S is provided between the first transport means 11 and the second transport means 13. The gap S extends in the Y-axis direction orthogonal to the X-axis direction.

As shown in FIG. 3, the arm member 15 is formed in a substantially U-shape having an open tip portion A and a closed rear end portion B, and has rigidity. The arm member 15 includes an upper arm 21 and a lower arm 23 extending in a substantially horizontal direction (X-axis direction), and an arm pillar portion 25 extending in a substantially vertical direction (Z-axis direction).

The tip portions of the upper arm 21 and the lower arm 23 are arranged so as to sandwich the gap S (see FIG. 2) between the first transport means 11 and the second transport means 13 from the vertical direction.
The rear end portion of the upper arm 21 is connected to the upper end portion of the arm pillar portion 25. Further, the rear end portion of the lower arm 23 is connected to the lower end portion of the arm pillar portion 25. In this way, the arm pillar portion 25 connects the upper arm 21 and the lower arm 23.

The upper arm 21 is provided with a top surface measuring device 27 for measuring the distance to the upper surface of the plate-shaped work 1 below the tip end portion thereof. The top surface measuring instrument 27 is positioned above the gap S. The top surface measuring instrument 27 irradiates the plate-shaped work 1 with the measurement light from above, receives the reflected light from the upper surface of the plate-shaped work 1 on the gap S, and receives the reflected light from the top surface measuring instrument 27 to the upper surface of the plate-shaped work 1. The second distance, which is the distance to, is measured.

The lower arm 23 has a tip portion facing the upper arm 21 side, and a lower surface measuring device 29 for measuring the distance to the lower surface of the plate-shaped work 1 is provided on the upper side of the tip portion. The bottom surface measuring instrument 29 is provided on the lower arm 23 so as to be linearly opposed to the top surface measuring instrument 27 in a direction (Z direction) orthogonal to the surface direction of the plate-shaped work 1. .. The bottom surface measuring instrument 29 is positioned below the gap S, irradiates the plate-shaped work 1 on the gap S with measurement light from below, receives the reflected light from the lower surface of the plate-shaped work 1, and receives the bottom surface measuring instrument. A third distance, which is the distance from 29 to the lower surface of the plate-shaped work 1, is measured.
The distance between the upper arm 21 and the lower arm 23 is set so that the plate-shaped work 1 passing through the gap S does not touch the upper surface measuring instrument 27 of the upper arm 21 and the lower surface measuring instrument 29 of the lower arm 23. ing.

The measuring instrument moving means 19 moves the upper surface measuring instrument 27 of the upper arm 21 and the lower surface measuring instrument 29 of the lower arm 23 in the Y-axis direction. As shown in FIG. 3, the measuring instrument moving means 19 moves in the Y-axis direction connected to the tip end portion A of the arm member 15 and the X-axis direction moving means connected to the rear end portion B of the arm member 15. The means 33 is provided.

The Y-axis direction moving means 31 is connected to the lower side of the tip portion A of the arm member 15 (lower arm 23), and enables the tip portion A of the arm member 15 to move in the Y-axis direction. The Y-axis direction moving means 31 includes a Y-axis direction guide 41 extending along the gap S in the Y-axis direction, and a Y-axis direction moving member 43 that can move along the Y-axis direction guide 41 together with the tip portion A of the arm member 15. And a Y-axis direction drive source 45 that generates a driving force for movement of the tip portion A of the arm member 15 and the Y-axis direction moving member 43.

The Y-axis direction guide 41 directs the movement of the Y-axis direction moving member 43 including the Y-axis direction rotary table 63 in the Y-axis direction. The Y-axis direction guide 41 is, for example, a rod-shaped (thin square columnar) member. In the present embodiment, the Y-axis direction guide 41 is arranged below the gap S.

The Y-axis direction drive source 45 applies a driving force to the Y-axis direction moving member 43 including the Y-axis direction rotary table 63 to move the Y-axis direction moving member 43 in the Y-axis direction. The Y-axis direction drive source 45 includes a ball screw 55 extending in the Y-axis direction, a motor 57 for rotating the ball screw 55, and an encoder 59 attached to the motor 57. The ball screw 55 is arranged on the downstream side of the Y-axis direction guide 41 in the transport path R in parallel with the Y-axis direction guide 41. The motor 57 is directly connected to the ball screw 55 and rotates the ball screw 55. The encoder 59 detects the amount of rotation of the motor 57.

The Y-axis direction moving member 43 includes a Y-axis direction rotation base 61 engaged with the Y-axis direction guide 41, and a Y-axis direction turntable 63 and a nut portion 65 integrally formed with the Y-axis direction rotation base 61. And a Y-axis direction support column 67 pivotally supported by the Y-axis direction turntable 63.

The Y-axis direction rotation base 61 is engaged with the Y-axis direction guide 41, and is configured to be movable in the Y-axis direction along the Y-axis direction guide 41.
The support column 67 in the Y-axis direction extends in the Z-axis direction. The lower end of the Y-axis direction support column 67 is rotatably supported on the Y-axis direction rotation base 61 by a Y-axis direction rotary table 63. The upper end of the Y-axis direction support column 67 is connected (fixed) to the lower side of the tip A of the arm member 15, that is, the lower part of the tip of the lower arm 23. As a result, the Y-axis direction support column 67 supports the tip portion A of the arm member 15.

The Y-axis direction rotary table 63 is integrally formed with the Y-axis direction rotation base 61 on the upper surface of the Y-axis direction rotation base 61. The Y-axis direction rotary table 63 rotatably supports the Y-axis direction support column 67. As a result, the Y-axis rotary table 63 rotatably supports the tip of the lower arm 23 from below. The rotation axis of the Y-axis direction support column 67 and the Y-axis direction turntable 63 is arranged linearly with the center of the upper surface measuring instrument 27 and the lower surface measuring instrument 29 in the Z-axis direction.

The nut portion 65 is provided integrally with the Y-axis direction rotation base portion 61 on the downstream side of the Y-axis direction rotation base portion 61 in the transport path R. A ball screw 55 of the Y-axis direction drive source 45 is screwed into the nut portion 65.

The X-axis direction moving means 33 is connected to the lower side of the rear end portion B of the arm member 15 (lower arm 23), and enables the rear end portion B of the arm member 15 to move in the X-axis direction. The X-axis direction moving means 33 includes an X-axis direction guide 47 extending along the X-axis direction and an X-axis direction moving member 49 that can move along the X-axis direction guide 47 together with the rear end portion B of the arm member 15. I have.

The X-axis direction guide 47 directs the movement of the X-axis direction moving member 49 including the X-axis direction rotary table 73 in the X-axis direction. The X-axis direction guide 47 is, for example, a rod-shaped (thin square columnar) member. In the present embodiment, the X-axis direction guide 47 extends to the upstream side of the transport path R with respect to the gap S.

The X-axis direction moving member 49 includes an X-axis direction rotation base 71 engaged with the X-axis direction guide 47, an X-axis direction turntable 73 integrally formed with the X-axis direction rotation base 71, and an X-axis. An X-axis directional support column 75 pivotally supported by the directional turntable 73 is provided.

The X-axis direction rotation base 71 is engaged with the X-axis direction guide 47, and is configured to be movable in the X-axis direction along the X-axis direction guide 47.
The support column 75 in the X-axis direction extends in the Z-axis direction. The lower end of the X-axis direction support column 75 is rotatably supported on the X-axis direction rotation base 71 by the X-axis direction rotary table 73. The upper end portion of the X-axis direction support column 75 is connected (fixed) to the lower side of the rear end portion B of the arm member 15, that is, the lower portion of the rear end portion of the lower arm 23. As a result, the support column 75 in the X-axis direction supports the rear end portion B of the arm member 15.

The X-axis direction rotary table 73 is integrally formed with the X-axis direction rotation base 71 on the upper surface of the X-axis direction rotation base 71. The X-axis rotary table 73 rotatably supports the X-axis support column 75. As a result, the rotary table 73 in the X-axis direction rotatably supports the rear end portion of the lower arm 23 from below.

The calculation means 17 shown in FIG. 1A calculates the thickness of the plate-shaped work 1 based on the measurement results of the top surface measuring instrument 27 and the bottom surface measuring instrument 29 described above.
Here, a method for measuring the thickness of the plate-shaped work 1 by the top surface measuring instrument 27, the bottom surface measuring instrument 29, and the calculating means 17 will be described. In the present embodiment, the thickness of the plate-shaped work 1 is measured by a spectroscopic interference method.

As shown in FIG. 4, the top surface measuring instrument 27 provided on the upper arm 21 of the arm member 15 irradiates the measurement light B1 from above toward the measurement point P1 on the upper surface of the plate-shaped work 1. Further, the top surface measuring instrument 27 receives the reflected light B2 from the measurement point P1 of the plate-shaped work 1, and is the distance from the top surface measuring instrument 27 (the lower end of the top surface measuring instrument 27) to the upper surface of the plate-shaped work 1. The second distance L2 is measured.

On the other hand, the lower surface measuring instrument 29 provided on the lower arm 23 of the arm member 15 irradiates the measurement light B3 from below toward the measurement point P2 on the lower surface of the plate-shaped work 1. Further, the bottom surface measuring instrument 29 receives the reflected light B4 from the measurement point P2 of the plate-shaped work 1 and is the distance from the bottom surface measuring instrument 29 (the upper end of the bottom surface measuring instrument 29) to the lower surface of the plate-shaped work 1. The third distance L3 is measured.

The first distance L1, which is the distance between the top surface measuring device 27 and the bottom surface measuring device 29, is set in advance and is stored in, for example, a memory (not shown). The calculation means 17 calculates the thickness of the plate-shaped work 1 by subtracting the second distance L2 and the third distance L3 from the first distance L1.

As described above, in the present embodiment, the rotation axis of the Y-axis direction support column 67 and the Y-axis direction turntable 63 shown in FIG. 3 is the center of the top surface measuring instrument 27 and the bottom surface measuring instrument 29, and Z. They are arranged linearly in the axial direction. Therefore, the measurement point P1 of the top surface measuring instrument 27 and the measuring point P2 of the bottom surface measuring instrument 29 are positioned on the rotation axis center of the Y-axis direction turntable 63 and the Y-axis direction support column 67.

Next, the adjustment of the measurement position in the thickness measuring device 10 will be described. The thickness measuring device 10 can measure the thickness of the plate-shaped work 1 shown with reference to FIG. 4 at an arbitrary position of the plate-shaped work 1. The adjustment of the position (measurement position) at which the thickness measurement is performed on the plate-shaped work 1 will be described below. The measurement position is the position on the XY plane of the measurement point P1 of the upper surface measuring instrument 27 and the measuring point P2 of the lower surface measuring instrument 29 described above.

The adjustment of the measurement position in the X-axis direction is performed by the first and second transport means 11 and 13. The top surface measuring instrument 27 and the bottom surface measuring instrument 29 for performing the measurement are on the gap S between the first transport means 11 and the second transport means 13. Therefore, the first and second transport means 11 and 13 transport the plate-shaped work 1 in the X-axis direction so that the measurement position of the plate-shaped work 1 is arranged on the gap S. This completes the adjustment of the measurement position in the X-axis direction.

On the other hand, the adjustment of the measurement position in the Y-axis direction is performed by adjusting the positions (positions on the gap S) of the top surface measuring instrument 27 and the bottom surface measuring instrument 29 along the Y-axis direction. This adjustment is performed by the Y-axis direction moving means 31 (see FIG. 3).

In the Y-axis direction moving means 31, when the ball screw 55 rotates with the rotation of the motor 57 in the Y-axis direction drive source 45, the nut portion 65 of the Y-axis direction moving member 43 receives a force along the Y-axis direction. As a result, the Y-axis direction rotation base 61 integrally formed with the nut portion 65 moves in the Y-axis direction together with the nut portion 65 along the Y-axis direction guide 41. Further, the Y-axis rotary table 63 and the Y-axis support column 67 arranged on the Y-axis rotation base 61 also move along the Y direction. That is, due to the rotation of the ball screw 55, the entire Y-axis direction moving member 43 including the Y-axis direction rotary table 63 moves in the Y-axis direction along the Y-axis direction guide 41. As a result, the tip portion A of the arm member 15 connected to the upper end portion of the Y-axis direction support column 67 also moves in the Y-axis direction together with the Y-axis direction moving member 43. As a result, the top surface measuring instrument 27 and the bottom surface measuring instrument 29 provided at the tip end portion A of the arm member 15 also move along the Y-axis direction.

The Y-axis direction support pillar 67 that supports the tip portion A of the arm member 15 is rotatably supported by the Y-axis direction rotary table 63 of the Y-axis direction moving member 43. Therefore, when the tip portion A of the arm member 15 and the Y-axis direction moving member 43 move along the Y-axis direction, the Y-axis direction support column 67 and the arm member 15 are oriented with respect to the Y-axis direction turntable 63. When a force for changing the force is applied, the Y-axis direction support column 67 and the arm member 15 can rotate relative to the Y-axis direction turntable 63 in response to this force. Therefore, the tip portion A of the arm member 15 and the Y-axis direction moving member 43 can smoothly move along the Y-axis direction.

Further, as described above, the arm member 15 has a rigidity, that is, a property of maintaining its shape. Therefore, when the tip portion A of the arm member 15 moves in the Y-axis direction, the rear end portion B of the arm member 15 receives a force along the longitudinal direction of the arm member 15 due to the rigidity of the arm member 15.

For example, as shown by the arrow D shown in FIG. 5B, when the tip portion A of the arm member 15 moves from the + Y side to the −Y side, the rear end portion B of the arm member 15 is moved from the tip end side. It receives a pressing force along the longitudinal direction of the arm member 15. On the other hand, when the tip A of the arm member 15 moves from the −Y side to the + Y side, the rear end B of the arm member 15 receives a tensile force from the tip A along the longitudinal direction of the arm member 15.

Here, as shown in FIG. 3, the rear end portion B of the arm member 15 is fixed to the X-axis direction guide 47 of the X-axis direction moving means 33 via the X-axis direction moving member 49. Therefore, the rear end portion B of the arm member 15 can easily move in the X-axis direction along the X-axis direction guide 47, but it is difficult to move in the other direction.

Therefore, when the rear end portion B of the arm member 15 receives a force from the tip portion A, the rear end portion B moves in the X-axis direction along the X-axis direction guide 47 so as to maintain the shape of the arm member 15.
For example, when the rear end portion B of the arm member 15 receives a pressing force due to the tip portion A moving from the + Y side to the −Y side, as shown by the arrows L shown in FIGS. 5A and 5B. , Along the X-axis direction guide 47, moves toward the −X side together with the X-axis direction moving member 49. On the other hand, when the rear end portion B of the arm member 15 receives a tensile force due to the movement of the tip portion A from the −Y side to the + Y side, the rear end portion B is along the X-axis direction guide 47, and the X-axis direction moving member 49 And move toward the + X side.

The X-axis direction support pillar 75 that supports the rear end portion B of the arm member 15 is rotatably supported by the X-axis direction rotary table 73 of the X-axis direction moving member 49. Therefore, when the rear end portion B of the arm member 15 and the X-axis direction moving member 49 move along the X-axis direction, the X-axis direction support column 75 and the arm member 15 are attached to the X-axis direction turntable 73. Even if a force for changing the direction is applied, the X-axis direction support column 75 and the arm member 15 can rotate relative to the X-axis direction turntable 73 according to this force. Therefore, the rear end portion B of the arm member 15 and the X-axis direction moving member 49 can smoothly move along the X-axis direction.

In this way, the adjustment of the measurement position in the Y-axis direction is performed. As a result, in the thickness measuring device 10, the end portion in the + Y-axis direction as shown in FIGS. 1 (a) and 1 (b) to the end portion in the −Y axis direction as shown in FIGS. 6 (a) and 6 (b). Within the range, it is possible to adjust the measurement position in the Y-axis direction.

For example, the thickness measuring device 10 performs a plurality of thickness measurements with respect to one position in the X-axis direction while changing the position in the Y-axis direction. After that, the thickness measuring device 10 shifts the position in the X direction and similarly performs a plurality of thickness measurements while changing the position in the Y axis direction. In this way, the thickness measuring device 10 can measure the thickness of the entire surface of the plate-shaped work 1.

As described above, in the thickness measuring device 10, the Y-axis direction moving means 31 of the measuring device moving means 19 causes the tip A of the arm member 15 including the top surface measuring device 27 and the bottom surface measuring device 29 to be moved in the Y-axis direction. Can be moved along. This makes it possible to set a plurality of measurement positions on the plate-shaped work 1 along the Y-axis direction.

Further, in the thickness measuring device 10, the rear end portion B of the arm member 15 is moved along the X-axis direction by the X-axis direction moving means 33 as the tip portion A of the arm member 15 moves along the Y-axis direction. Can be moved. That is, as the tip A moves, the arm member 15 can be swiveled with the Y-axis rotary table 63 and the X-axis rotary table 73 as swivel axes. Therefore, in the thickness measuring device 10, it is possible to prevent the rear end portion B of the arm member 15 from protruding significantly from the first and second transport means 11 and 13 in the Y-axis direction. As a result, the thickness measuring device 10 can be miniaturized.

Further, in the thickness measuring device 10, members are not arranged on both sides of the first and second transport means 11 and 13 in the X-axis direction. That is, in the thickness measuring device 10, it is possible to open the X-axis direction. As a result, the thickness measuring device 10 can be easily arranged between the two processing devices. Therefore, the thickness measuring device 10 can convey the plate-shaped work 1 between the two processing devices, and at that time, the thickness of the plate-shaped work 1 can be easily measured.

Further, in the thickness measuring device 10, the measurement point P1 of the upper surface measuring device 27 and the measuring point P2 of the lower surface measuring device 29 are positioned on the rotation axis center of the rotary table 63 in the Y-axis direction. As a result, the amount of movement of the Y-axis direction moving member 43 including the Y-axis direction rotary table 63 in the Y-axis direction becomes the amount of movement of the measurement position.
Here, the amount of movement of the rotary table 63 in the Y-axis direction in the Y-axis direction is a value corresponding to the amount of rotation of the motor 57. The rotation amount of the motor 57 can be read by the encoder 59. Therefore, the thickness measuring device 10 can accurately adjust the measurement position in the Y-axis direction based on the rotation amount of the motor 57 read by the encoder 59.

In this embodiment, a gap S is provided between the first transport means 11 and the second transport means 13. The gap S is preferably narrow in order to suppress the deflection of the plate-shaped work 1 when passing over the gap S.

Further, in the present embodiment, the thickness of the plate-shaped work 1 is measured by a spectroscopic interference method. However, the present invention is not limited to this, and the top surface measuring instrument 27, the bottom surface measuring instrument 29, and the calculating means 17 may measure the thickness of the plate-shaped work 1 by a triangular distance measuring method.

10: Thickness measuring device, 11: First transport means, 13: Second transport means,
15: Arm member, 17: Calculation means, 19: Measuring instrument moving means,
21: Upper arm, 23: Lower arm, 25: Arm pillar,
27: Top surface measuring instrument, 29: Bottom surface measuring instrument,
31: Y-axis direction moving means, 33: X-axis direction moving means,
41: Y-axis direction guide, 43: Y-axis direction moving member,
45: Y-axis direction drive source, 47: X-axis direction guide, 49: X-axis direction moving member,
55: Ball screw, 57: Motor, 59: Encoder,
61: Y-axis rotation base, 63: Y-axis rotary table, 65: nut,
67: Y-axis support pillar,
71: X-axis rotation base, 73: X-axis rotary table, 75: X-axis support pillar,

Claims (2)

A thickness measuring device that measures the thickness of a plate-shaped workpiece.
A first transport means for transporting the plate-shaped work in the X-axis direction,
A second transporting means, which is attached to the first transporting means with a gap extending in the Y-axis direction orthogonal to the X-axis direction, takes over the plate-shaped work from the first transporting means, and further transports the plate-shaped work in the X-axis direction. 2 transport means and
Positioned above the gap, the plate-shaped work is irradiated with measurement light from above, the reflected light from the upper surface of the plate-shaped work is received, and the distance from itself to the upper surface of the plate-shaped work is measured. Top surface measuring instrument and
Positioned below the gap, the plate-shaped work is irradiated with measurement light from below, the reflected light from the lower surface of the plate-shaped work is received, and the distance from itself to the lower surface of the plate-shaped work is measured. With a bottom surface measuring instrument,
An upper arm provided with the upper surface measuring instrument on the lower side of the tip portion, and the lower surface measuring so as to be linearly opposed to the upper surface measuring instrument in a direction orthogonal to the surface direction of the plate-shaped work. A lower arm provided with a vessel on the upper side of the tip portion, and an arm member provided with an arm pillar portion connecting the rear end portion of the upper arm and the rear end portion of the lower arm.
From the first distance, which is the preset distance between the top surface measuring device and the bottom surface measuring device, to the second distance, which is the distance from the top surface measuring device to the top surface of the plate-shaped work, and the bottom surface measuring device. A calculation means for calculating the thickness of the plate-shaped work by subtracting the third distance, which is the distance to the lower surface of the plate-shaped work, from
A measuring instrument moving means for moving the upper surface measuring instrument and the lower surface measuring instrument in the Y-axis direction is provided.
The measuring instrument moving means is
A Y-axis rotary table that rotatably supports the tip of the lower arm from below,
A Y-axis direction guide that directs the movement of the Y-axis rotary table in the Y-axis direction,
A Y-axis direction drive source that moves the Y-axis direction rotary table in the Y-axis direction,
An X-axis rotary table that rotatably supports the rear end of the lower arm from below,
It is provided with an X-axis direction guide that directs the movement of the X-axis direction rotary table in the X-axis direction.
By moving the Y-axis direction turntable in the Y-axis direction, when the thickness of the plate-shaped work is measured at a plurality of points along the Y-axis direction by the bottom surface measuring instrument and the top surface measuring instrument, the X-axis The directional turntable is moved in the X-axis direction, and the arm member is swiveled to be miniaturized.
A thickness measuring device characterized by this. The measurement point of the upper surface measuring instrument and the measuring point of the lower surface measuring instrument are positioned on the rotation axis center of the Y-axis direction rotary table.
The thickness measuring device according to claim 1.

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