JP7001506B2 - Equipment installation tool - Google Patents

Description

The present invention relates to a device installation tool used when two or more processing devices are installed side by side on an installation floor.

For example, a processing device (manual dicer or the like) for processing a workpiece such as a semiconductor wafer is provided with at least four legs, and the four legs are erected on the installation floor of a factory. Then, the processing device is fixed to the installation floor with a fall prevention metal fitting so that the processing device does not fall due to an earthquake (see, for example, Patent Document 1).

Japanese Unexamined Patent Publication No. 2008-183201

Since the installation floor and the jig attached to the processing device are fixed with the fall prevention metal fittings, when fixing multiple processing devices to the installation floor, many fall prevention metal fittings are attached to the processing device. Since it is necessary to attach it to the installation floor, there is a problem that the installation work becomes difficult.
Therefore, when two or more processing devices are installed side by side on the installation floor, there is a problem that it is easy to prevent the plurality of processing devices from tipping over.

The present invention for solving the above problems includes a processing apparatus having at least four legs, two front legs and two rear legs, which are larger in the depth direction than in the width direction and larger in the height direction than the width direction. A first quadrangular prism that is a device installation tool used when two or more units are installed side by side on the floor, and extends longer than the width of the processing device in which at least two units are arranged, and the front leg is placed on the upper surface. A second quadrangular prism having the same length as the first quadrangular prism, extending parallel to the extending direction of the first quadrangular prism, and having its hind legs mounted on the upper surface, and the processing apparatus. A connecting portion extending in the depth direction and connecting the first square pillar and the second square pillar, the front leg to the first square pillar, and the rear leg to the second square pillar. It is a device installation tool provided with a fixing tool for fixing each.

It is preferable to dispose a force supply member such as a power cable for supplying electricity to the processing apparatus or an air pipe for supplying air by utilizing the thickness of the first square pillar and the second square pillar.

It is preferable that the installation floor is provided with anchor bolts erected from the floor surface, and at least one of the first quadrangular prism, the second quadrangular prism, and the connecting portion is fixed to the floor surface with the anchor bolts. ..

When installing two or more processing devices that have at least four legs, two front legs and two rear legs, that are larger in the depth direction than in the width direction and larger in the height direction than the depth direction, side by side on the floor. The device installer according to the present invention to be used has a first square pillar extending longer than the width of at least two side-by-side processing devices and having a front leg mounted on the upper surface, and the same length as the first square pillar. A second quadrangular prism extending parallel to the extending direction of the first quadrangular prism and having a hind leg mounted on the upper surface, and a second quadrangular prism extending in the depth direction of the processing apparatus, the first quadrangular pillar and the second A processing device with a slender shape that is easy to fall down because it is equipped with a connecting part that connects the square pillars and a fixing tool that fixes the front legs to the first square pillar and the rear legs to the second square pillar. When at least two or more units are installed side by side on the installation floor, it is possible to easily prevent the processing device from tipping over.

Connected to the processing equipment by arranging a power supply member such as a power cable that supplies electricity to the processing equipment or an air pipe that supplies air using the thickness of the first square pillar and the second square pillar. It is possible to compactly organize the used force supply members.

The installation floor is equipped with anchor bolts that stand up from the floor surface, and by fixing at least one of the first square pillar, the second square pillar, and the connecting part to the floor surface with the anchor bolts, the processing device can be installed in 2 units. When more than one stand is placed side by side and installed on the floor via an equipment installation tool, it is possible to make the processing equipment more difficult to tip over due to shaking such as an earthquake.

It is a perspective view which shows an example of an apparatus installation tool and a processing apparatus. It is a perspective view which shows an example of the apparatus installation tool and the processing apparatus which installed two or more side by side. It is a perspective view which shows an example of the apparatus installation tool and the processing apparatus which installed two or more in an L shape.

The processing device 1 shown by the broken line in FIG. 1 is used in the manufacturing process of a semiconductor device. For example, a manual having a vertically long housing and manually setting a work piece on a holding table to perform cutting. It is a dicer. The processing device 1 is larger in the depth direction (X-axis direction) than in the width direction (Y-axis direction) and larger in the height direction (Z-axis direction) than the depth direction, and is flat by the device installer 2 according to the present invention. It is fixed to the floor surface of the installation floor F and prevents it from tipping over when shaking such as an earthquake occurs.
The processing device 1 is not limited to the manual dicer, and may be a fully automatic dicer, a grinding device, or the like.

As shown in FIGS. 1 and 2, the processing apparatus 1 is provided with two front legs 11 at two corners on the front side (+ X direction side) of the bottom surface of the housing of the apparatus. The front leg 11 includes an ankle portion 110 extending downward from the bottom surface of the housing of the apparatus, and a circular plate-shaped base portion 111 connected to the lower end of the ankle portion 110.
At the two corners on the rear side (-X direction side) of the bottom surface of the housing of the processing device 1, the rear legs 12 including the ankle portion 120 and the base portion 121 having the same configuration as the front legs 11 are respectively arranged.
For example, the front legs 11 and the rear legs 12 may be jack-based and their lengths may be variable. Further, the number of the front legs 11 and the rear legs 12 is not limited to two in the front and rear, and three or more may be arranged in each of the front and rear legs.

As shown in FIG. 2, the device installation tool 2 used when two or more processing devices 1 are installed side by side on the floor F extends longer than the width of the processing device 1 in which at least two units are arranged, and each extends on the upper surface 21a. The first quadrangular prism 21 on which the front legs 11 are placed and the first quadrangular prism 21 have the same length as the first quadrangular prism 21 and extend parallel to the extending direction (Y-axis direction) of the first quadrangular prism 21. A second quadrangular prism 22 on which the hind legs 12 are placed and a second quadrangular prism 22 extending in the depth direction (X-axis direction) of the processing apparatus 1 to connect the first quadrangular prism 21 and the second quadrangular prism 22. A connecting portion 23 and a fixture 25 for fixing the front leg 11 to the first quadrangular prism 21 and the rear leg 12 to the second quadrangular prism 22 are provided.

As shown in FIG. 1, the connecting portion 23 in the present embodiment has a long flat plate-shaped outer shape, extends in the depth direction (X-axis direction) of the processing device 1, and has the width of the processing device 1. It extends in the direction (Y-axis direction) with the same length as the first quadrangular prism 21. For example, the connecting portion 23 is fixed to the floor surface of the installation floor F by anchor bolts 27 that are erected from the floor surface. For example, a plurality of anchor bolts 27 (for example, the same number as the number of processing devices 1 to be installed) are erected at predetermined intervals in the Y-axis direction.

The anchor bolt 27 is a J-type anchor bolt in the example shown in FIG. 1, but may be an L-type anchor bolt or the like. The portion of the anchor bolt 27 below the screw head 270 is driven into the installation floor F. The screw head 270 of the anchor bolt 27 penetrates the connecting portion 23 in the thickness direction and protrudes from the upper surface of the connecting portion 23. The connecting portion 23 is installed by screwing and tightening the fixing nut 28 to the screw head 270. It is fixed to the floor surface of the floor F.

For example, the first quadrangular prism 21 and the second quadrangular prism 22 are made of steel or the like having a strength that can withstand the weight of the processing device 1 and do not deform, and are spaced apart from each other in the X-axis direction on the upper surface of the connecting portion 23. They are arranged and extend parallel to the width direction of the processing apparatus 1, respectively. For example, on the upper surface 21a of the first quadrangular prism 21 and the upper surface 22a of the second quadrangular prism 22, marks for aligning the front legs 11 or the rear legs 12 when the processing apparatus 1 is placed are formed. ing. Further, on the upper surface 21a of the first quadrangular prism 21 (the upper surface 22a of the second quadrangular prism 22), bolt holes (not shown) are provided in the extending direction between the two front legs 11 of the processing device 1 (between the two rear legs 12). ) Are formed at a predetermined interval according to the interval of).

The first quadrangular prism 21 and the second quadrangular prism 22 have, for example, a thickness (height) equal to or larger than the pipe diameter of the force supply members 30 and 31 shown in FIG. The force supply members 30 and 31 are crawled in the gap V surrounded by the inner surface, the inner surface of the second quadrangular prism 22, and the upper surface of the connecting portion 23, and the force supply members 30 and 31 are connected to each processing device 1. Can be made to.
The force supply member 30 is, for example, a power cable that supplies electric power to the processing device 1, and the force supply member 31 is, for example, an air pipe that supplies air to the processing device 1 or sucks air from the processing device 1.

The connecting portion 23 may be, for example, a connecting rod connecting the inner side surface of the first square pillar 21 and the inner side surface of the second square pillar 22, and the anchor bolt 27 may be the first square pillar 21. Alternatively, the second square pillar 22 may be fixed to the floor surface of the installation floor F.

The fixture 25 includes a fixing plate 250 formed in a substantially U-shaped flat plate shape, and a base portion 251 integrally formed with the fixing plate 250 and having an insertion hole (not shown) into which the fixing bolt 26 is inserted. There is. The shape of the fixture 25 is not limited to the example shown in FIG.

Hereinafter, a case where two or more processing devices 1 are arranged side by side and installed on the installation floor F by using the above-mentioned device installation tool 2 will be described.
For example, the processing device 1 is carried in a state of being lifted above the device installation tool 2 fixed on the floor surface of the installation floor F by a lifter for device transfer (not shown) or a worker's hand. Then, the two front legs 11 are processed so as to be approximately located on the mark on the upper surface of the first quadrangular prism 21, and the two rear legs 11 are substantially located on the mark on the upper surface of the second quadrangular prism 22. The position of the device 1 is adjusted.

After the processing device 1 is lowered and the two front legs 11 are mounted on the upper surface of the first quadrangular prism 21, and the two rear legs 12 are mounted on the upper surface of the second quadrangular prism 22, the illustration is shown. The lifter that does not is separated from the processing device 1. Next, the operator fixes the two front legs 11 to the first quadrangular prism 21 and the two rear legs 12 to the second quadrangular prism 22 by using the fixing tool 25.

For example, by inserting the ankle portion 110 of the front leg 11 from the side (+ Y direction side) into the U-shaped recessed portion of the fixing plate 250 of the fixing tool 25, an insertion hole (not shown) and a first hole of the base portion 251 of the fixing tool 25 are inserted. It is in a state of overlapping with a bolt hole (not shown) on the upper surface 21a of the square pillar 21 of 1. Then, by passing the fixing bolt 26 through the insertion hole and screwing it into the bolt hole, the base portion 111 is sandwiched and fixed between the fixing plate 250 and the upper surface 21a of the first quadrangular prism 21. Further, the horizontal movement of the front leg 11 is also restricted by the fixing plate 250.

The other front leg 11 is also fixed by the fixture 25, but the U-shaped recess of the fixture 25 is on the opposite side of the U-shaped recess of the fixture 25 to which one front leg 11 is fixed in the Y-axis direction. It is in a state of facing. Therefore, even if there is shaking such as an earthquake, the two front legs 11 will not be displaced in the horizontal direction on the upper surface 21a of the first quadrangular prism 21.
Similarly, when the operator fixes the two hind legs 12 to the second square pillar 22 using the fixture 25, the processing apparatus 1 is fixed on the apparatus installer 2 and installed on the installation floor F. It becomes a state.

Similar to the above, a plurality of (four in FIG. 2) processing devices 1 are installed on the installation floor F via the device installation tool 2 at predetermined intervals in the width direction. Further, the force supply members 30 and 31 are crawled in the gap V, and the force supply members 30 and 31 are connected to each processing device 1.
If the force supply members 30 and 31 are left exposed on the connecting portion 23 of the device installer 2 between the processing devices 1, the force supply members 30 and 31 are trampled and disconnected when the operator performs the work. In addition, dust and the like tend to collect in the gap V below the processing apparatus 1. In order to prevent this, a rectangular cover 32 in a plan view shown in FIG. 2 is detachably covered between the processing devices 1 on the device installer 2.
Further, as shown in FIG. 3, a plurality of processing devices 1 are installed on the installation floor F via the device installation tool 2 so as to be L-shaped as a whole by spacing a plurality of processing devices 1 in the X-axis direction in the same manner as described above. You may.

As described above, two or more processing devices 1 having at least four legs, two front legs 11 and two rear legs 12, which are larger in the depth direction than in the width direction and larger in the height direction than the depth direction, are provided. The device installation tool 2 according to the present invention used when installing side by side on the floor F extends longer than the width of at least two side-by-side processing devices 1, and the front leg 11 is placed on the upper surface 21a. A square pillar 21 and a second square pillar 22 having the same length as the first square pillar 21 and extending parallel to the extending direction of the first square pillar 21 and having a hind leg 12 mounted on the upper surface 22a. The connecting portion 23 extending in the depth direction of the processing apparatus 1 and connecting the first square pillar 21 and the second square pillar 22, the front leg 11 to the first square pillar 21, and the rear leg 12 to the first square pillar 21. Since the second square pillar 22 is provided with a fixture 25 for fixing each, when at least two or more processing devices 1 having a slender shape that are easily toppled are installed side by side on the installation floor F, the conventional fall prevention is prevented. It is no longer necessary to perform detailed work such as connecting the installation floor and the jig attached to the processing device with metal fittings, and the processing device 1 can be easily prevented from tipping over and installed on the installation floor F.

By arranging the force supply members 30 and 31 in the processing device 1 using the thicknesses of the first quadrangular prism 21 and the second quadrangular prism 22, the force supply members 30 and 31 connected to the processing device 1 Can be compactly organized.

The installation floor F is provided with anchor bolts 27 that are erected from the floor surface, and at least one of the first square pillar 21, the second square pillar 22, and the connecting portion 23 (in the present embodiment, the anchor bolt 27). By fixing the connecting portion 23) to the floor surface, when two or more processing devices 1 are installed side by side on the floor F via the device installer 2, the processing device 1 is more resistant to shaking such as an earthquake. It can be made difficult to fall.

1: Processing device 11: Front leg 110: Ankle part 111: Base part 12: Rear leg 2: Device installation tool 21: First square pillar 22: Second square pillar 23: Connecting part 25: Fixture 26: Fixture 27: Anchor bolt 270: Screw head 28: Fixture nut 30, 31: Force supply member

Claims (3)

With at least four legs, two front legs and two rear legs,
A device installation tool used when two or more processing devices that are larger in the depth direction than the width direction and larger in the height direction than the depth direction are installed side by side on the floor.
A first prism that extends longer than the width of at least two of the processing devices and has the front legs placed on the upper surface.
A second quadrangular prism having the same length as the first quadrangular prism, extending parallel to the extending direction of the first quadrangular prism, and having its hind legs mounted on the upper surface thereof.
A connecting portion extending in the depth direction of the processing apparatus and connecting the first quadrangular prism and the second quadrangular prism,
A device installer comprising a fixative for fixing the front leg to the first quadrangular prism and the rear leg to the second quadrangular prism. The first aspect of the present invention, wherein a force supply member such as a power cable for supplying electricity to the processing apparatus or an air pipe for supplying air by utilizing the thickness of the first square pillar and the second square pillar is arranged. Equipment installation tool. The installation floor is equipped with anchor bolts that stand up from the floor.
The device installation tool according to claim 1, wherein at least one of the first square pillar, the second square pillar, and the connecting portion is fixed to the floor surface with the anchor bolt.

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