JP6995815B2 - Laminating device and laminating method using it - Google Patents

Description

The present invention relates to a laminating device for laminating a base material and a film, and more specifically, the laminating body obtained when manufacturing a laminated body composed of a base material (for example, a printed circuit board or a wafer) and a resin film. It relates to a laminating device capable of making the thickness of the body more uniform.

Conventionally, in a device for laminating a base material and a resin film having irregularities provided by wiring or the like, if the thickness of the obtained laminate varies, quality defects occur or wasteful when these are laminated in multiple layers. Since space is generated and the thickness becomes bulky, various measures have been taken to make the thickness of the obtained laminate uniform (for example, Patent Document 1).

As one of such measures, when a film made of resin is pressed by a heated press plate, the surface temperature of the press plate is usually made as uniform as possible so that heat is evenly transferred to the entire surface of the film. Can be given. However, since the press plate usually has a large surface area, it is difficult to make the entire surface of the press plate a uniform temperature.

Therefore, even if the surface temperature of the press plate is set to be uniform, the uniformization is not strictly achieved, and as schematically shown in FIG. 8, the base material 52 and the film are formed on the press plate. When the laminated body 51 is manufactured by pressing the 53, the end portion of the film 53 may partially protrude from the base material 52 (bleed). With the progress of technology, the allowable range of bleeding has become narrower, and if any part of the end of the film 53 protrudes from the base material 52, the allowable range of the uniformity of the thickness of the film or the like in the laminated body 51 will be exceeded. There is a risk that it will end up. Therefore, countermeasures are strongly required.

International Publication No. 2016/199687

The present invention has been made in view of such circumstances, and by preventing partial protrusion of the film at the time of pressing and ensuring the uniformity of the thickness of the film or the like, the thickness of the laminated body can be made more uniform. The purpose is to provide a laminating device that is strictly planned.

In order to achieve the above object, the present invention has the following [1] to [8] as gist.
[1] A laminating device provided with a pressing means for pressing a base material and a film, wherein the pressing means can heat a press block that can move forward and backward, a press plate that can be attached to the press block, and the press plate. It has a plurality of heat sources and a control system set to perform heating control for each of the heat sources, and the plurality of heat sources include a central portion of the press plate and a peripheral portion that surrounds the central portion in an annular shape. A laminating device provided in an arrangement that allows individual heating.
[2] The laminating apparatus according to [1], wherein the central portion and the peripheral portion of the press plate are heated and controlled so as to have different temperatures from each other.
[3] The laminating apparatus according to [1], wherein the central portion and the peripheral portion of the press plate are heated and controlled to have the same temperature.
[4] The peripheral edge of the press plate is divided into a plurality of divisions, and different heat sources and control systems are provided in each division, and heating control for the heat source is possible for each division [1]. The laminating device according to any one of [3].
[5] A method of laminating a base material and a film using the laminating apparatus according to [1], wherein the press plate is heated by the plurality of heat sources and the base material is formed by the heated press plate. A laminating method comprising a pressing step of pressing a film and a heating step in which a central portion of the press plate and a peripheral edge portion surrounding the central portion in an annular shape are heated and controlled to different temperatures.
[6] The laminating method according to [5], wherein in the heating step, heating is controlled so that the central portion and the peripheral portion of the press plate have a temperature difference of 0.1 to 50 ° C.
[7] The laminating method according to [5] or [6], wherein in the heating step, the temperature of the peripheral portion is set lower than the temperature of the central portion of the press plate.
[8] A method of laminating a base material and a film using the laminating apparatus according to [1], wherein the press plate is heated by the plurality of heat sources and the base material is formed by the heated press plate. A laminating method in which a central portion of the press plate and a peripheral edge portion that surrounds the central portion in an annular shape are heated and controlled to the same temperature in the heating step, which comprises a pressing step of pressing the film.

That is, the inventors of the present invention have repeated research in order to solve the above-mentioned problems. As a result, it was found that in order to make the thickness of the film made of resin or the like uniform, it is necessary to strictly control the temperature of the surface of the press plate separately for the central portion and the peripheral portion, and reached the present invention. did.

According to the laminating device of the present invention, it is possible to prevent the film from sticking out at the time of pressing, and it is possible to ensure the uniformity of the film thickness. Thereby, it is possible to make the thickness of the obtained laminated body uniform.

It is a block diagram which shows the outline of the stacking apparatus which concerns on one Embodiment of this invention. It is a top view of the press plate in the said laminating apparatus. It is explanatory drawing explaining the structure of the heat source in the said stacking apparatus. It is explanatory drawing explaining the shape of the central part of the press plate and the peripheral part surrounding it in an annular shape. It is explanatory drawing explaining the shape of the central part of the press plate and the peripheral part surrounding it in an annular shape. It is a block diagram which shows the outline of the stacking apparatus which concerns on other embodiment of this invention. It is a block diagram which shows the outline of the stacking apparatus which concerns on still another Embodiment of this invention. It is explanatory drawing explaining the laminated body manufactured by the conventional laminating apparatus.

Next, a mode for carrying out the present invention will be described in detail. However, the present invention is not limited to the following embodiments.

FIG. 1 shows a laminating device I according to one embodiment of the present invention. The laminating device I is a device for laminating a base material for a build-up substrate and a film for laminating, and is a device for laminating the base material and the film between the upper press plate 1 and the lower press plate 2. (These may be referred to as "work 50") are arranged, and the work 50 is heated and pressed by the press plate 1 heated by the upper heat plate 3 and the press plate 2 heated by the lower heat plate 4. Then, a laminated body in which the base material and the film are integrated is manufactured.

In this embodiment, a plurality of columns 10 (only two are shown in FIG. 1) erected on the press table 12 and an upper side fixed to each of these columns 10 by fixing means such as bolts and nuts. The press block 6 is provided with a lower press block 7 and the like attached to each of the columns 10 so as to be movable up and down (advance and retreat). The lower press block 7 is connected to the servomotor 5 via the ball screw 11, and is moved up and down by the operation of the servomotor 5 (as the nut rises and falls with the rotation of the shaft in the ball screw 11). It is possible to move (advance and retreat). Reference numeral 8 is a cushioning material arranged between the upper press plate 1 and the hot plate 3, and reference numeral 9 is a cushioning material arranged between the lower press plate 2 and the hot plate 4. Is.
Since the upper press block 6 and the lower press block 7 have the same basic configuration, the lower press block 7 will be described below as a representative.

The press plate 2 comes into contact with the work 50 when pressed, and is usually made of metal in consideration of heat resistance. Examples of such a metal include stainless steel, iron, aluminum, alloys thereof and the like, and stainless steel is preferably used from the viewpoint of excellent rust resistance. Further, as the press plate 2, a flexible metal plate is preferably used. When such a flexible metal plate is used as the press plate 2, the thickness is usually 0.1 to 10 mm, preferably 1 to 3 mm. When the thickness of the flexible metal plate is within a preferable range, the thickness of the obtained laminated body can be made more uniform. Further, it is preferable that the surface of the press plate 2 is mirror-polished because the thickness of the obtained laminate can be made more uniform.

As shown in the plan view of FIG. 2, the press plate 2 arranged in the press block 7 has a central portion A (a central portion surrounded by a broken line in FIG. 2) and a peripheral portion B that surrounds the central portion A in an annular shape. (The peripheral portion shown by the diagonal line in FIG. 2) is heated by a heating plate that can be individually heated, and the laminating device I controls heating for each heat source provided in the heating plate. It has multiple control systems configured to do so. These points are the greatest features of the present invention.

That is, according to the above configuration, it is possible to control the heating of the central portion A of the press plate 2 and the peripheral portion B surrounding the press plate 2 so as to have different temperatures. As a result, the viscosity of the film can be made different between the peripheral portion and the central portion at the time of pressing. For example, if the viscosity of the peripheral portion of the film is lower than the viscosity of the central portion, the peripheral portion itself is a so-called stopper. Therefore, it is possible to effectively suppress the protrusion of the film.
On the other hand, in the above configuration, it is also easy to control the heating so that the central portion A of the press plate 2 and the peripheral portion B surrounding the central portion A in an annular shape have the same temperature. The peripheral edge portion B of the press plate 2 is more susceptible to the outside air (installation atmosphere of the laminating device I) temperature than the central portion A, and has the characteristic that heat can easily escape. This is because it is necessary to make the degree of heating for the central portion A different from the degree of heating for the peripheral portion B in order to make the temperature more strictly uniform.

Therefore, the laminating device of the present invention can effectively prevent the film from sticking out at the time of pressing by controlling the heating temperature without complicated configuration, and high-quality laminating with uniform thickness. The body can be manufactured at low cost. The control system in the present invention includes a series of devices for controlling the heating temperature and these control programs.

In order to make the surface of the lower press plate 2 have different temperatures in a specific range as shown in FIG. 2, for example, it can be realized by using the hot plate 4 shown in FIG. The hot plate 4 is arranged so as to be superposed on the press plate 2 via a cushioning material 9 (see FIG. 1), and is a plurality of (12 in this example) cartridge heaters 13 which are heat sources and a plurality of (12 in this example) cartridge heaters 13. In this example, it is provided with a thermocouple 14 for control (9).

The hot plate 4 can heat the central portion A'and the peripheral portions B'1 to 8 shown by the broken line in FIG. 3 to different temperatures, and are shown in the central column of FIG. 3, for example. Six cartridge heaters 13 arranged across these sections are arranged in the peripheral portion B'4, the central portion A', and the peripheral portion B'5. In the cartridge heater 13, a heating wire is spirally wound around a core such as ceramic and covered with a metal pipe (sheath). Each of these cartridge heaters 13 is divided into the above categories (peripheral portion B'4). , Central portion A', peripheral portion B'5), and each division can be heated to a different temperature.

In this embodiment, the cartridge heater 13 includes three heating wires, and the winding width of each heating wire is changed in the length direction of the core (for each division). If the winding width of the heating wire is coarse, the degree of heating is low, and conversely, if the winding width is dense, the degree can be increased. In any part of the three heating wires of the cartridge heater 13, the winding width of one heating wire corresponds to the above classification (peripheral portion B'4, central portion A', peripheral portion B'5). Make it dense and rough in other areas. The remaining two heating wires are made dense in parts other than the above-mentioned dense parts and different from each other, and roughened in the other parts. By doing so, it is possible to sufficiently heat only the necessary divisions only by switching the on / off of each heating wire. Similar cartridge heaters 13 are also arranged in the peripheral portions B'1 to B'3 and the peripheral portions B'6 to B'8 of the hot plate 4, and have the same effect (heating to a different temperature for each division). Can be played).

Further, in the heat plate 4, one thermocouple 14 is arranged in each section (central portion A'and peripheral portions B'1 to B'8) as one of the configurations of the control system, and the heat is described above. The temperature of the panel 4 is finely measured for each section, and the measurement result is fed back to a control mechanism (not shown) of the cartridge heater 13, so that the degree of heating is finely controlled for each section. As a result, the central portion A of the press plate 2 and the peripheral portions B (B1 to B8) thereof, which are arranged so as to be superposed on the hot plate 4 via the cushioning material 9, as shown in FIG. 4, are brought to different temperatures or the same temperature. You can do it.

Each section of the press plate 2 is virtually provided for the design and temperature control of the hot plate 4, and is clearly indicated by actually drawing a line or making a notch in the hot plate 4. is not it. Further, "it is possible to heat to a different temperature for each category" means that it is sufficient if it is possible to heat to a different temperature with respect to the virtually provided category in the design of the hot plate 4. That is, even if a clear temperature difference is generated between the virtually provided adjacent sections in the design of the hot plate 4 (arrangement of the cartridge heater 13, etc.), the hot plate 4 is continuously configured. Therefore, the temperature difference may be gentle, which means that such a thing is included.

In the heating step of heating the press plate 2 by the hot plate 4, the temperature of the central portion A of the press plate 2 varies depending on the type and thickness of the film, but is usually in the range of room temperature to 180 ° C. Further, the temperature of the peripheral portion B (category B1 to B8) of the press plate 2 is usually in the range of room temperature to 180 ° C., similarly to the temperature of the central portion A.

The temperature difference between the central portion A and the peripheral portion B (sections B1 to B8) of the press plate 2 varies depending on the type and thickness of the film, but is usually preferably 0.1 to 50 ° C. and 1 to 40 ° C. The temperature is more preferably 10 to 30 ° C. When the heating is controlled so that the temperature of the central portion A and the peripheral portion B are different from each other, it is preferable that the temperature of the peripheral portion is lower than that of the central portion. Further, a temperature difference may be provided in the peripheral edge portion B, or the same temperature may be set for each other. When providing a temperature difference, for example, a temperature difference may be provided between the categories B1 and B2, and the temperature of the category in which the temperature tends to drop due to the influence of the outside air may be set higher. As described above, if the temperature difference can be provided in the peripheral edge portion B, fine temperature control is possible and the thickness of the laminated body can be made more uniform. If the temperature of the press plate 2 is set to be lower in the peripheral portion B than in the central portion A, it is possible to more reliably prevent the film from sticking out during pressing, but in some cases, the temperature of the central portion A and the peripheral portion B can be prevented. The peripheral portion B may be set to the same temperature.

The temperature of the central portion A and the peripheral portion B of the press plate 2 can be obtained in light of the temperature of the hot plate 4 corresponding to each category (the temperature measured by the thermocouple). For example, it can be obtained by associating the temperature of each section of the hot plate 4 with the temperature measured by abutting each section of the corresponding press plate 2 with a thermometer.

The area ratio (B / A) of the peripheral portion B to the central portion A of the press plate 2 is usually 0.3 to 3, preferably 0.4 to 2, and 0.5 to 1. Is more preferable. When the area ratio (B / A) is within the above range, partial protrusion of the film can be suppressed more reliably.

Further, when the press plate 2 has a rectangular shape in a plan view as in this embodiment, the central portion A has a length (N or N or) from the edge of the press plate 2 as shown in FIG. It is preferably formed by a portion surrounded by a region that is 5 to 30% inside (length N ₁ or M ₁ ) in the M) direction, and is preferably 10 to 20% inside (length N ₁ or M ₁ ). It is more preferable that it is a region. When the central portion A is surrounded by the region in an annular shape, it is possible to more reliably suppress the protrusion of the film.

In the pressing step of pressing the work 50 with the heated press plates 1 and 2, the time for pressing the work 50 depends on the type of the target work 50 (base material and film), but is usually 0.1. It is from seconds to 60 minutes, preferably from 0.5 seconds to 10 minutes, and more preferably from 1 second to 1 minute. When the pressing time is within the above time, the balance between the uniformity of the thickness of the obtained laminated body 51 and the manufacturing efficiency becomes excellent.

Further, the pressing in the pressing step depends on the type of the target work 50 (base material and film), but usually, the thickness of the laminated body 51 to be manufactured is determined, and this thickness is used as the pressing block 6 at the end of pressing. And by setting the distance between the press blocks 7. That is, the rotational operation of the servomotor 5 is controlled by feeding back the distance information between the press blocks 6 and 7, and when the preset value (the distance) is reached, the rotational operation of the servomotor 5 is slowed down. Or, I try to stop it.

The base material constituting the work 50 is not particularly limited, but is, for example, a base such as an LED substrate in which light emitting elements (LEDs) are provided at predetermined intervals on an insulating substrate such as resin or ceramic. It is possible to use a material having relatively large irregularities, a printed circuit board having a pattern such as copper, or a substrate having relatively small irregularities such as a multi-layered substrate used in the build-up method.
The film constituting the work 50 is not particularly limited, but a film made of a resin composition having excellent adhesiveness, insulating property, adhesiveness, and hot melt property can be used. For example, a resin film in which a stabilizer, a curing agent, a dye, a lubricant, or the like is mixed with a thermosetting resin can be used. Specific examples thereof include those made of silicone resin, polyimide resin, epoxy resin, acrylic resin and the like.
Therefore, the laminating device of the present invention can seal a semiconductor device at a wafer level, protect the surface of a semiconductor chip mounted on an organic substrate, seal an LED device, seal a solar cell, a semiconductor and an LED, and an optical device. , Can be effectively used for forming a resist layer of a substrate used for a solar cell.

The cushioning material 9 arranged between the press plate 2 and the hot plate 4 disperses the pressure applied at the time of pressing, and is usually made of rubber, plastic, cloth, paper or the like. A rubber material is preferably used, and a fluorine-based rubber is particularly preferable, because the thickness of the laminated body obtained by pressing can be made more uniform. The cushioning material 9 may contain a heat-resistant resin, a glass fiber sheet, a metal foil sheet, or the like. It is preferable to include these in the inside because the durability is increased.

The thickness of the cushioning material 9 is usually 0.1 to 20 mm, preferably 0.2 to 10 mm, and more preferably 0.2 to 4 mm. When the thickness of the cushioning material 9 is within the above range, it is preferable because not only the elastic strength is excellent but also the deformation of the end portion can be prevented. Further, it is preferable that the shore A hardness of the surface of the cushioning material 9 is 60 degrees or more. The shore A hardness is measured in accordance with JIS Z 2246.

In this embodiment, the lower press plate 2 is divided into one central portion A and eight peripheral portions B (B1 to B8) for temperature control, but the number of divisions of the peripheral portion B is It does not have to be eight, or it may be one division without being divided. Further, if necessary, it is also possible to control the temperature by dividing the inside of the central portion A and the peripheral portion B, respectively. In this case, the number of each division is 2 to 10, preferably 2 to 8. That is, although it depends on the size of the press plate 2, even if the central portion A and the peripheral portion B are divided into too many divisions, the adjacent divisions interfere with each other and fine temperature control becomes difficult.

Further, in this embodiment, the hot plate 4 is provided with a cartridge heater 13 arranged across a plurality of sections, but the shape of the cartridge heater 13 is not limited to this. For example, compact ones having a shape that fits in the range of each division may be arranged by the number of divisions, or the number of cartridge heaters 13 arranged in each division may be different. Further, the heat source arranged on the hot plate 4 does not have to be the cartridge heater 13, and as such a heat source, for example, a seat heater or the like can be used.

Further, in this embodiment, the heat plates 3 and 4 are provided on both the upper press block 6 and the lower press block 7, respectively, but the film is laminated only on one surface of the base material. If this is the case, a hot plate is provided only on one of the upper press block 6 and the lower press block 7, and only one of the upper press plate 1 and the lower press plate 2 is heated. You may do so. However, from the viewpoint of heating efficiency and temperature control of the hot platen, it is preferable to provide hot plates on both the upper and lower press blocks.

In this embodiment, the shapes of the upper press plate 1 and the lower press plate 2 are made to be rectangular in a plan view, but the shapes of the press plates 1 and 2 are not limited to this. However, depending on the shape of the work 50, for example, the shapes of the press plates 1 and 2 can be designed into a circular shape, an elliptical shape, a polygonal shape, or the like in a plan view.

Further, the material, thickness, and degree of polishing of the press plate 1 arranged on the upper press block 6 and the press plate 2 arranged on the lower press block 7 may be the same or different from each other. May be.

The cushioning material 8 arranged in the upper press block 6 and the cushioning material 9 arranged in the lower press block 7 may be made of the same material or may be made of different materials from each other. .. Further, the thickness of the cushioning materials 8 and 9 and the shore A hardness of the surface may be the same or different from each other. Further, if the press plate 1 and the press plate 2 can sufficiently disperse the pressure at the time of pressing, these may not be provided.

Further, in this embodiment, the vertical movement (advance / retreat) of the press block 7 is performed by the operation of the servomotor 5, but the vertical movement (advance / retreat) of the press block 7 is limited to the operation of the servomotor 5. It is not something that can be done. For example, an air cylinder, a hydraulic cylinder, or the like can be used instead of the servo motor 5. However, it is preferable to use the servomotor 5 in that the thickness of the laminated body 51 can be controlled more strictly.

On the other hand, in the laminating apparatus of the present invention, in order to control the heating so that the central portion A and the peripheral portion B of the lower press plate 2 have the same temperature, for example, in the heating plate 4 shown in FIG. The temperature of the portion A'and the peripheral portions B'1 to 8 are set to the same temperature. However, even in that case, the heating control of the hot plate 4 is performed separately in the central portion A'and the peripheral portions B'1 to 8. This is because the peripheral edge portion B of the press plate 2 is more susceptible to the outside air (installation atmosphere of the laminating device I) temperature than the central portion A, and heat is also more likely to escape. Further, it is preferable that the heating control of the hot plate 4 is controlled separately in the peripheral portions B'1 to 8. For example, among the peripheral portions of the hot plate 4, the peripheral portions B'1, B'3, B'6, and B'8 corresponding to the four corners have a higher degree of heating than the peripheral portions other than these. Is preferable. This is because the four corners of the press plate 2 are more susceptible to the influence of outside air, and heat is more likely to escape.

The temperature of each division of the hot plate 4 can be appropriately set depending on the arrangement of the cartridge heater 13, the shape and material of the press plate 2, and the like.

[Other embodiments]
In the above embodiment, the laminating device I provided with only the pressing means is shown, but as shown in FIG. 6, the laminating device II provided with the film transporting means for transporting the work 50 to the pressing means may be used. ..

The film transporting means includes, for example, an upper and lower transport film feeding machine 20 located at the start point of the laminating process, a carry-in conveyor section 21 for carrying in the work 50, and a transport film winding located at the end point of the laminating process. It is provided with a removing machine 22, a transporting film 23 for transporting the work 50 and the laminated body 51, and the like.

The work 50 supplied from the carry-in conveyor section 21 is sandwiched and held between the upper and lower transport films 23 fed from the transport film feeding machine 20. Then, the work 50 is pressed together with the transport film 23 by the pressing means to form the laminated body 51 in a state synchronized with the running of the transport film 23, and is released from being held by the transport film 23 and taken out. Reference numeral 24 in FIG. 6 is a cooling fan for cooling the laminated body 51.

As described above, in the laminating apparatus II according to the embodiment of the present invention, the work 50 can be continuously supplied to the pressing means at predetermined intervals, so that the laminated body 51 can be efficiently manufactured.

[Still Another Embodiment]
Further, as shown in FIG. 7, the laminating device III may be provided with a vacuum pressing means further upstream of the pressing means.

The vacuum pressing means is attached to, for example, a plurality of columns 26 erected on the press table 25, an upper press block 27 fixed to these columns 26, and the columns 26 so as to be movable up and down (advance and retreat). It is provided with a lower press block 28 that has been evacuated. The lower press block 28 is connected to the servomotor 35 via the ball screw 36, and is moved up and down by the operation of the servomotor 35 (as the nut rises and falls with the rotation of the shaft in the ball screw 36). It is possible to move (advance and retreat).

Heat sources 29 and 30 having a built-in heater are attached to the inside (press side) of the upper and lower press blocks 27 and 28 via a heat insulating material (not shown), and further inside (press side). Is attached with elastic press plates 31 and 32 made of heat-resistant rubber or the like. Vacuum frames 33 and 34 that can be integrated with the upper and lower press blocks 27 and 28 are arranged, and when the lower press block 28 rises to a predetermined position, these press blocks 27 A closed space is formed between the and 28. The inside of this closed space can be depressurized, and the work 50 can be heated and pressurized in a depressurized state in this closed space.

In the laminating device III, the work 50 is vacuum-pressed by the vacuum pressing means prior to pressing the work 50 by the pressing means, so that the film can be more reliably aligned with the unevenness of the base material. Then, since the work 50 in a state where the film is surely aligned with the unevenness of the base material is pressed by the pressing means, not only the generation of voids is effectively prevented, but also the laminated body 51 having a more uniform thickness is manufactured. can do. The press block of the vacuum pressing means also has a plurality of heat sources capable of heating the press plate and a control system set to control heating for each of the heat sources, and these plurality of heat sources are used. The central portion of the press plate and the peripheral edge portion that surrounds the central portion in an annular shape may be provided in an arrangement that allows individual heating. As a result, a more uniform laminated body can be obtained depending on the type of film and the degree of unevenness of the base material.

An example using the laminating apparatus of the present invention will be described together with a comparative example. However, the present invention is not limited to this.

[Example 1]
The base material α and the film β shown below were laminated by the laminating device I shown in FIG. 1. That is, in both the upper and lower heating plates 3 and 4, the temperature of the central portion A'is set to 140 ° C. and the temperature of the peripheral portions B'1 to 8 is set to 120 ° C., and the distance between the upper and lower press plates 1 and 2 is set. Was set to 0.506 mm and pressed for 40 seconds to obtain the desired laminate. In this laminating device I, the sizes of the upper and lower press plates 1 and 2 are 640 mm × 720 mm, and the central portion A thereof has a length N ₁ shown in FIG. 5 of 22% of N and M ₁ of M. It is formed by a portion surrounded by an area that is 30% inside.
<Base material α>
A copper-clad laminate (Copper Clad Laminate) having a length of 510 mm, a width of 515 mm, and a thickness of 400 μm.
<Film β>
An epoxy resin-based film (interlayer insulating material) having a length of 470 mm, a width of 480 mm, and a thickness of 27.5 μm.

[Comparative Example 1]
Using a laminating device (set temperature of the hot plate: 140 ° C.) in which the temperature of the hot plate is controlled by only one system, the base material α and the film β are laminated in the same manner as in Example 1, and the target laminated body is formed. Got

The appearance of the laminates obtained in Example 1 and Comparative Example 1 was visually observed. As a result, no film protrusion was observed in the laminated body of Example 1, whereas in the laminated body of Comparative Example 1, the film protruded from the base material as in the conventional example shown in FIG.

In the laminating device of the present invention, since it is possible to laminate a base material and a film used for insulation between the base materials while precisely controlling the thickness, a build-up substrate, a light emitting element such as an LED, or the like is mounted. Suitable for manufacturing products (laminates) such as substrates that require control of the finished thickness.

2 Press plate 7 Press block 50 Work

Claims (7)

A laminating device provided with a pressing means for pressing a base material and a film.
The pressing means includes a pair of press blocks in which at least one of them can move forward and backward, a press plate that can be attached to the press block that can move forward and backward, a plurality of heat sources that can heat the press plates, and heating control for each of the heat sources. It has a control system set to perform, and one of a servomotor, an air cylinder, and a hydraulic cylinder that advances and retreats at least one of the press blocks.
The pressing by the pressing means is performed by advancing or retreating any of the servomotor, the air cylinder, and the hydraulic cylinder.
The plurality of heat sources are provided in such an arrangement that the central portion of the press plate and the peripheral edge portion surrounding the central portion in an annular shape can be individually heated, and the area ratio of the peripheral edge portion to the central portion is 0.3. ~ 3 and
In the heating control by the control system, the viscosity of the film corresponding to the peripheral portion of the press plate is lower than the viscosity of the film corresponding to the central portion of the press plate. A laminating device characterized by being set to heat at different temperatures . The stacking according to claim 1, wherein at least one of the press blocks is moved forward and backward, and the operation of the servo motor is controlled by feeding back distance information between the pair of press blocks. Device. As the heat source, a cartridge heater having a core and a heating wire wound around the core is used.
The laminating device according to claim 1 or 2, wherein the cartridge heater comprises a heating wire in which the winding width of the heating wire is changed for each portion corresponding to the division of the central portion and the peripheral portion. Claims 1 to 3 in which the press plate has a rectangular shape in a plan view, and the central portion is surrounded by a region that is 5 to 30% inward from the edge of the press plate in the length direction thereof. The laminating apparatus according to any one of the above. A method of laminating a base material and a film using the laminating apparatus according to any one of claims 1 to 4.
The heating process of heating the press plate with the above multiple heat sources,
It has a pressing step of pressing the base material and the film with the heated press plate.
A laminating method characterized in that, in the heating step, the central portion of the press plate and the peripheral edge portion that surrounds the central portion in an annular shape are controlled to be heated to different temperatures. The laminating method according to claim 5, wherein in the heating step, heating is controlled so that the central portion and the peripheral portion of the press plate have a temperature difference of 0.1 to 50 ° C. The laminating method according to claim 5 or 6, wherein in the heating step, the temperature of the peripheral portion is set lower than the temperature of the central portion of the press plate.

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