JP6986181B1 - Heat treatment equipment - Google Patents

Abstract

PROBLEM TO BE SOLVED: To heat a material to be treated while rotating a container for accommodating the material to be treated. SOLUTION: A heat treatment apparatus 10 has an internal space 28 for accommodating a material to be treated, and a furnace body 40 for accommodating a plurality of accommodating containers 20 having a columnar outer peripheral shape in series and heating the material to be processed. A carry-in line 60 for transporting the storage container 20 carried into the inside of the furnace body 40, and a rotation mechanism 70 provided in the carry-in line 60 for engaging with the storage container 20 to rotate the storage container 20. The furnace body 40 has a transport path 44 and a heater 46 having an inner wall 46W constituting at least a part of the transport path 44, and the plurality of storage containers 20 are configured to be engageable with each other and rotate. When the mechanism 70 and the storage container 20 are engaged and the plurality of storage containers 20 are engaged with each other, the plurality of storage containers 20 are configured to rotate in conjunction with the rotation of the rotation mechanism 70. [Selection diagram] FIG. 3A

Description

The present invention relates to a heat treatment apparatus.

Conventionally, there has been known a method in which a material to be treated is housed in a rotatable container, and the container is heated while being rotated to perform heat treatment. For example, Patent Document 1 discloses a method of heating a lithium raw material as a material to be treated by using a rotary kiln to perform heat treatment. Further, Patent Document 2 discloses a method of heating a plurality of raw material containers containing an object to be processed while rotating them around the axis of the core portion to perform heat treatment.

Japanese Patent No. 6753753 Japanese Patent No. 3230296

By the way, in the methods described in Patent Document 1 and Patent Document 2, the overall configuration of the apparatus for heating and heat-treating the material to be treated is complicated, and the apparatus tends to be large in size. Further, the devices described in Patent Document 1 and Patent Document 2 have a problem that the configuration of a rotating mechanism for rotating a container for accommodating a material to be processed is complicated, and maintenance work such as replacement and repair thereof is complicated. obtain.

The present invention has been made in view of this point, and an object of the present invention is to provide a heat treatment apparatus capable of heating a material to be treated while rotating a container for accommodating the material to be treated by a simpler configuration. Is.

One aspect of the heat treatment apparatus disclosed herein is a furnace having an internal space for accommodating a material to be treated, accommodating a plurality of accommodating containers having a columnar outer peripheral shape in series, and heating the material to be treated. The body, a carry-in line provided on the upstream side of the furnace body and carrying the storage container to be carried into the inside of the furnace body, and a carry-in line provided on the carry-in line and engaged with the storage container to carry the storage container. It is equipped with a rotation mechanism that rotates the container. The furnace body includes an outer case extending in a first direction, a transport path penetrating the outer case in the first direction, a heater having an inner wall forming at least a part of the transport path, and the outer case. The storage container is formed at one end of the first direction and is formed at an inlet capable of carrying the storage container into the transport path and at the other end of the outer case in the first direction. Has a carry-out port that can be carried out of the transport path. The plurality of storage containers are configured to be engageable with each other. When the rotation mechanism and the storage container are engaged and the plurality of storage containers are engaged with each other, the plurality of storage containers are configured to rotate in conjunction with the rotation of the rotation mechanism. ..

According to such a heat treatment apparatus, a plurality of storage containers arranged in series engage with each other and rotate in conjunction with the rotation of the rotation mechanism that engages with the storage container. Therefore, in the storage container located inside the heater, the material to be treated stored in the internal space is agitated in the internal space as the storage container rotates, so that the material is heated more uniformly. In this way, a plurality of storage containers can be rotated by a relatively simple configuration in which the storage containers for storing the material to be treated are arranged in series and engaged with each other to rotate the rotation mechanism that engages with the storage container. It can be rotated in conjunction with the rotation. As a result, the object to be treated contained in the container can be heat-treated more uniformly by the heater.

According to the heat treatment apparatus of the preferred embodiment, at one end of the storage container on one side in the first direction, between the plurality of first protrusions extending on one side in the first direction and the plurality of first protrusions. A plurality of formed first recesses are provided, and at the other end of the storage container in the first direction, a plurality of second protrusions extending to the other side in the first direction and a plurality of the first portions are provided. A plurality of second recesses formed between the two protrusions are provided, and the rotation mechanism has a plurality of engaging protrusions housed in the first recess and engaged with the first protrusion, and the said one. The second protrusion of the storage container is housed in the first recess of the other storage container and engages with the first protrusion of the other storage container, and the engaging protrusion is the first. When the second protrusion of the one storage container engages with one protrusion and the second protrusion of the other storage container engages with the first protrusion of the other storage container, the plurality of storage containers are rotated by the rotation mechanism. It is configured to rotate in conjunction with. In this way, with a relatively simple configuration in which the rotating mechanism is provided with the engaging protrusions and the storage container is provided with the first protrusions and the second protrusions, the rotation of the rotating mechanism is provided with the engaging protrusions, the first protrusions and the second protrusions. It can be transmitted to a plurality of storage containers via the protrusions, and the plurality of storage containers can be rotated in conjunction with the rotation of the rotation mechanism.

According to the heat treatment apparatus of the preferred embodiment, the rotation mechanism is provided so as to be movable in the first direction, and the storage container is configured to move in the first direction in the transfer path. According to such a configuration, by moving the rotation mechanism in the first direction, the storage container heat-treated by the heater can be transported to the outside of the furnace body from the carry-out port. In addition, the storage container that stores the material to be treated before the heat treatment can be newly transported from the carry-in port to the inside of the furnace body.

A preferred embodiment of the heat treatment apparatus is provided on the downstream side of the furnace body and includes a carry-out line for carrying the storage container carried out from the furnace body. According to such a configuration, the storage container carried out from the carry-out port of the furnace body can be carried by the carry-out line.

According to a preferred embodiment of the heat treatment apparatus, the furnace body includes a lid for opening and closing the carry-out port, the rotation mechanism is detachably provided at the carry-in port, and the rotation mechanism is attached to the carry-in port. At that time, the rotation mechanism and the storage container are engaged with each other, and the carry-in port is closed by the rotation mechanism. According to such a configuration, the airtightness of the transport path of the furnace body can be improved by closing the carry-out port with the lid and closing the carry-in port with the rotating mechanism.

According to the heat treatment apparatus of the preferred embodiment, a through hole communicating with the internal space is formed at one end of the storage container in the first direction or the other end of the storage container in the first direction. The containing container has a filter that closes the through hole. According to such a configuration, the atmosphere of the transport path can be flowed into the internal space through the through hole of the storage container. As a result, the atmosphere of the internal space and the atmosphere of the transport path can be made the same conditions. Further, since the through hole is provided with a filter, it is possible to prevent the material to be treated from flowing out of the container through the through hole.

According to a preferred embodiment of the heat treatment apparatus, the heater and the container are made of graphite. Since graphite has high heat resistance, the heat treatment temperature can be set relatively high. Further, since graphite has self-lubricating property, the storage container can rotate smoothly with respect to the inner wall of the heater.

According to a preferred embodiment of the heat treatment apparatus, a transport rail provided on a part of the inner wall of the heater and having an arcuate mounting surface on which the storage container is mounted is provided, and the transport rail is formed of graphite. Has been done. According to such a configuration, since the storage container moves on the mounting surface of the transport rail, the storage container and the heater do not come into direct contact with each other. As a result, wear of the heater can be suppressed. Further, since the transport rail is made of graphite, it can rotate smoothly with respect to the mounting surface of the transport rail.

It is a top view schematically showing the heat treatment apparatus which concerns on one Embodiment. It is a side view which shows typically the heat treatment apparatus which concerns on one Embodiment. It is sectional drawing which shows typically the furnace body which concerns on one Embodiment. FIG. 3 is a cross-sectional view taken along the line SS in FIG. 3A. It is a perspective view which shows typically the rotation mechanism which concerns on one Embodiment. It is a perspective view which shows typically the storage container which concerns on one Embodiment. It is a front view which shows typically the storage container which concerns on one Embodiment. It is sectional drawing which shows typically the storage container which concerns on one Embodiment. It is a side view which shows the state which the rotation mechanism and a plurality of storage containers are engaged with each other.

Hereinafter, one of the typical embodiments in the present disclosure will be described in detail with reference to the drawings. In the following drawings, members / parts having the same action are described with the same reference numerals. Further, the dimensional relations (length, width, thickness, etc.) in each drawing do not reflect the actual dimensional relations. The up, down, left, right, front, and back directions are represented by the arrows U, D, L, R, F, and Rr in the figure, respectively. Further, reference numeral X indicates a transport direction. For example, the transport direction X is the left-right direction. The storage container 20 (see FIG. 5), which will be described later, is transported from the upstream side to the downstream side (here, from the left side to the right side) in the transport direction X. The transport direction X is an example of the first direction. However, the above-mentioned direction is merely a direction determined for convenience of explanation, and does not limit the present invention unless otherwise specified.

FIG. 1 is a plan view schematically showing the heat treatment apparatus 10. The heat treatment apparatus 10 includes a furnace body 40, a carry-in line 60, a rotation mechanism 70, and a carry-out line 80. In the heat treatment apparatus 10, a plurality of storage containers 20 (see also FIG. 5) for storing the material to be treated are used. The storage container 20 is configured to be repeatedly movable in this order between the carry-in line 60, the furnace body 40, and the carry-out line 80. That is, the storage container 20 is repeatedly used in the heat treatment apparatus 10. In the present embodiment, the carry-in line 60 is arranged on the most upstream side and the carry-out line 80 is arranged on the most downstream side with respect to the transport direction X.

As shown in FIG. 2, the furnace body 40 is supported by the support base 41. As shown in FIG. 3A, the furnace body 40 accommodates a plurality of storage containers 20 (see also FIG. 5) arranged in series in the transport direction X. The furnace body 40 heats the object to be processed stored in the storage container 20. The furnace body 40 of the present embodiment is a continuous firing furnace that continuously fires the object to be processed contained in the storage container 20. The furnace body 40 is formed in a tunnel shape, and the storage container 20 is configured to be movable in the furnace body 40. The furnace body 40 includes an outer case 42 extending in the transport direction X, a transport path 44 formed in the outer case 42, a heater 46 forming at least a part of the transport path 44, a transport rail 47, and a heat insulating material 48. It has a carry-in inlet 50 capable of carrying the storage container 20 into the transport path 44, a carry-out port 52 capable of carrying the storage container 20 out of the transport path 44, and a lid 54 for opening and closing the carry-out port 52.

As shown in FIG. 3A, the exterior case 42 includes a main body portion 42A that houses the heater 46, the transport rail 47, and the heat insulating material 48, a first connecting portion 42B that is connected to the left end portion of the main body portion 42A, and the main body portion 42A. It has a second connecting portion 42C connected to the right end portion of the above. The main body portion 42A extends in the transport direction X. The outer peripheral shape of the main body portion 42A is formed in a columnar shape. The length of the main body portion 42A in the transport direction X is longer than the length of the first connecting portion 42B and the second connecting portion 42C in the transport direction X. The length of the main body portion 42A in the transport direction X may be shorter than the length of the first connecting portion 42B and the second connecting portion 42C in the transport direction X. The first connecting portion 42B and the second connecting portion 42C extend in the transport direction X. The first connecting portion 42B has a first portion 42BA and a second portion 42BB having a columnar outer peripheral shape. A part of the first portion 42BA is a copper electrode for passing an electric current through the heater 46. The second portion 42BB is located to the left of the first portion 42BA. The diameter of the second portion 42BB is smaller than the diameter of the first portion 42BA. The second connecting portion 42C has a first portion 42CA and a second portion 42CB whose outer peripheral shape is formed in a columnar shape. A part of the first portion 42CA is a copper electrode for passing an electric current through the heater 46. The second portion 42CB is located to the right of the first portion 42CA. The diameter of the second portion 42CB is smaller than the diameter of the first portion 42CA. The outer case 42 is made of, for example, stainless steel.

As shown in FIG. 3A, the transport path 44 penetrates the outer case 42 in the transport direction X. As shown in FIG. 3B, the transport path 44 is formed in a substantially circular cross section. In the transport path 44, the containment vessel 20 (also see FIG. 5) moves in the transport direction X and rotates about a shaft 20L (see FIG. 7). As shown in FIG. 3A, the transport path 44 includes a first path 44A formed in the main body portion 42A, a second path 44B formed in the first connecting portion 42B and communicating with the first path 44A, and a second connecting path 44B. It includes a third path 44C formed in the portion 42C and communicating with the first path 44A.

As shown in FIG. 3A, the heater 46 is arranged in the outer case 42. More specifically, it is housed in the main body 42A of the outer case 42. The heater 46 extends in the transport direction X. The heater 46 is formed in a cylindrical shape. The inner wall 46W of the cylindrical heater 46 constitutes a part of the transport path 44. Here, the inner wall 46W of the heater 46 constitutes a part of the first path 44A of the transport path 44. The heater 46 is, for example, a graphite heater containing graphite as a heating element. The inner diameter of the heater 46 is larger than the outer diameter of the storage container 20. The heater 46 can be set to, for example, 2000 ° C. or higher (for example, about 2000 ° C. to about 2500 ° C.).

As shown in FIG. 3A, the transport rail 47 is arranged in the outer case 42. More specifically, it is housed in the main body 42A of the outer case 42. The transport rail 47 extends in the transport direction X. The transport rail 47 is provided on a part of the inner wall 46W of the heater 46. The transport rail 47 is provided along the inner wall 46W. The outer diameter of the transport rail 47 is the same as the inner diameter of the heater 46. The transport rail 47 is formed in an arch shape. As shown in FIG. 3B, the transport rail 47 has an arc-shaped mounting surface 47A on which the storage container 20 is mounted. In the present embodiment, when the storage container 20 is mounted on the mounting surface 47A, the storage container 20 and the inner wall 46W of the heater 46 do not come into contact with each other. As shown in FIG. 3A, the mounting surface 47A of the transport rail 47 constitutes a part of the transport path 44. Here, the mounting surface 47A constitutes a part of the first path 44A of the transport path 44. The mounting surface 47A is flush with the inner surface 44BI of the second path 44B and the inner surface 44CI of the third path 44C. The transport rail 47 is made of, for example, graphite.

As shown in FIG. 3A, the heat insulating material 48 is arranged in the outer case 42. More specifically, it is housed in the main body 42A of the outer case 42. The heat insulating material 48 is arranged so as to surround the heater 46. As the heat insulating material 48, a material having high heat resistance and low reactivity can be used, and for example, a heat insulating material made of carbon fiber can be used.

As shown in FIG. 3A, the carry-in inlet 50 is formed at the left end portion of the outer case 42. More specifically, the carry-in inlet 50 is formed at the left end portion of the first connecting portion 42B of the outer case 42. The carry-out port 52 is formed at the right end of the outer case 42. More specifically, the carry-out port 52 is formed at the right end of the second connecting portion 42C of the outer case 42.

As shown in FIG. 3A, the lid 54 is provided so that the carry-out port 52 can be opened and closed. The lid 54 is provided on the second connecting portion 42C of the outer case 42 by a member (not shown). When the lid 54 closes the carry-out port 52, the transport path 44 is sealed. Further, when the lid 54 opens the carry-out port 52, the storage container 20 is carried from the carry-out path 44 to the carry-out line 80 via the carry-out port 52.

FIG. 5 is a perspective view of the storage container 20. FIG. 6 is a front view of the storage container 20. FIG. 7 is a cross-sectional view of the storage container 20. As shown in FIG. 5, the storage container 20 has a columnar outer peripheral shape. The storage container 20 stores the material to be treated. The storage container 20 is made of a material having excellent heat resistance (fire resistance). Examples of the material constituting the storage container 20 include graphite. Graphite has self-lubricating properties. The storage container 20 moves in the transport path 44 (see FIG. 3A) in the transport direction X. The storage container 20 rotates about a shaft 20L (see FIG. 7) in the transport path 44. A plurality of storage containers 20 arranged in series in the transport direction X are configured to be engaged with each other. As shown in FIG. 7, the storage container 20 has a cylindrical main body portion 21, a first lid portion 22 that closes a first opening 21A located at one end of the main body portion 21, and the other side of the main body portion 21. It has a second lid 32 that closes the second opening 21B located at the side end, and an internal space 28 that houses the material to be treated. In the present embodiment, the first opening 21A is provided at the left end of the main body 21, and the second opening 21B is provided at the right end of the main body 21. The internal space 28 is a space surrounded by the main body portion 21, the first lid portion 22, and the second lid portion 32. The main body 21 is mounted on the mounting surface 47A of the transport rail 47. The outer diameter of the main body 21 is the same as the inner diameter of the mounting surface 47A.

As shown in FIG. 7, the first lid portion 22 is detachably provided on the main body portion 21. The first lid portion 22 is located at the left end portion of the storage container 20. The first lid portion 22 is provided with a plurality of first protrusions 23 extending to the left and a plurality of first recesses 24 formed between the plurality of first protrusions 23. The second lid portion 32 is detachably provided on the main body portion 21. The second lid portion 32 is located at the right end portion of the storage container 20. The second lid portion 32 is provided with a plurality of second protrusions 33 extending to the right and a plurality of second recesses 34 formed between the plurality of second protrusions 33. Since the shapes and arrangements of the second protrusions 33 and the second recesses 34 in the second lid portion 32 are the same as the shapes and arrangements of the first protrusions 23 and the first recesses 24 in the first lid portion 22, they are described below. The first protrusion 23 and the first recess 24 will be described.

As shown in FIG. 6, the first lid portion 22 of the present embodiment is provided with three first protrusions 23 and three first recesses 24, but the first protrusions 23 and the first recesses 24 are provided. The number of may be 1, 2 or 4 or more, respectively. The first protrusions 23 are arranged at equal intervals in the circumferential direction. The first protrusion 23 extends in the circumferential direction. The first protrusion 23 has an outer peripheral edge 23A formed in an arc shape and extending in the circumferential direction in a front view, and an inner peripheral edge 23A formed in an arc shape and extending in a circumferential direction in a front view and located on the center side of the outer peripheral edge 23A. It is located between the outer peripheral 23A and the inner peripheral 23B, the first side 23C located on one end side in the circumferential direction and extending in the radial direction, and the outer peripheral 23A and the inner peripheral 23B. It has a second side 23D located on the other end side in the circumferential direction and extending in the radial direction. The circumferential length L1 of the outer peripheral 23A is longer than the circumferential length L2 of the inner peripheral 23B. The first recess 24 is located between the first side 23C of one first protrusion 23 and the second side 23D of the other first protrusion 23. The circumferential length L1 of the outer peripheral 23A of the first protrusion 23 is shorter than the circumferential length L3 of the first recess 24. In FIG. 3A, the first protrusion 23, the second protrusion 33, and the engagement protrusion 76 described later are not shown.

As shown in FIG. 7, the first lid portion 22 is formed with a through hole 25 that penetrates the first lid portion 22 in the transport direction X (that is, in the left-right direction). The through hole 25 communicates with the internal space 28. The through hole 25 is formed substantially in the center of the first lid portion 22. The first lid portion 22 has a filter 26 that closes the through hole 25. The filter 26 is configured to pass the gas but not the material to be treated. The filter 26 is made of, for example, carbon fiber. The through hole 25 may be provided in the second lid portion 32 instead of the first lid portion 22, or may be provided in each of the first lid portion 22 and the second lid portion 32.

As shown in FIG. 8, when the storage container 20 located on the left side is the first storage container 20A and the storage container 20 located on the right side is the second storage container 20B, the first storage container 20A and the second storage container 20B are It has the same configuration. The second protrusion 33 of the first storage container 20A is housed in the first recess 24 of the second storage container 20B and engages with the first protrusion 23. That is, the first protrusion 23 of the second storage container 20B is housed in the second recess 34 of the first storage container 20A and engages with the second protrusion 33. In the present embodiment, the first side 23C of the first protrusion 23 and the first side 33C of the second protrusion 33 engage with each other, but the second side 23D of the first protrusion 23 and the second side 33D of the second protrusion 33 are engaged. May engage with. Here, when the first protrusion 23 and the second protrusion 33 are engaged, a gap 29 is formed between the first protrusion 23 and the other second protrusion 33. As a result, even if a plurality of storage containers 20 are arranged in series in the transport direction X, the atmosphere outside the storage container 20 (for example, the atmosphere of the transport path 44) is contained through the gap 29 and the through hole 25 (see FIG. 7). It can flow into the internal space 28 of 20.

As shown in FIG. 1, the carry-in line 60 is provided on the upstream side (here, the left side) of the furnace body 40. The carry-in line 60 carries the storage container 20 carried into the inside of the furnace body 40. The carry-in line 60 is provided with, for example, a plurality of ball rollers (not shown), and the storage container 20 is conveyed in the transfer direction X while being supported by the ball rollers.

As shown in FIG. 1, the rotation mechanism 70 is provided on the carry-in line 60. The rotation mechanism 70 is provided so that the carry-in line 60 can be moved in the transport direction X. The rotation mechanism 70 moves the storage container 20 arranged in the carry-in line 60 in the transport direction X. The rotation mechanism 70 moves the storage container 20 in the transport direction X in the transport path 44. The rotation mechanism 70 can engage with the storage container 20 to rotate the storage container 20. The rotation mechanism 70 is detachably provided at the carry-in inlet 50 (see FIG. 3A) of the furnace body 40. When the rotation mechanism 70 is attached to the carry-in inlet 50, the rotation mechanism 70 and the storage container 20 are engaged with each other, and the carry-in inlet 50 is closed by the rotation mechanism 70.

As shown in FIG. 4, the rotation mechanism 70 includes a main body portion 71, a shaft portion 72 rotatably supported by the main body portion 71, an engaging portion 75 provided at the tip of the shaft portion 72, and a shaft portion 72. Of these, a lid portion 73 provided between the main body portion 71 and the engaging portion 75 is provided. The main body 71 of the present embodiment is formed in a box shape. The main body 71 is fixed to a ball screw 62 (see FIG. 1) extending in the transport direction X provided in the carry-in line 60. The main body 71 is provided with a drive source for rotating the shaft 72. The shaft portion 72 extends in the transport direction X. The shaft portion 72 extends to the right from the right end portion of the main body portion 71. The shaft portion 72 is configured to be rotatable relative to the lid portion 73. That is, even if the shaft portion 72 rotates, the lid portion 73 does not rotate. The rotation direction of the shaft portion 72 is not particularly limited. The lid portion 73 is detachably provided at the carry-in inlet 50 of the furnace body 40. The transport path 44 is sealed by the lid portion 73 closing (closing) the carry-in entrance 50. The engaging portion 75 is connected to the tip of the shaft portion 72. The engaging portion 75 rotates in conjunction with the rotation of the shaft portion 72. When the lid portion 73 is attached to the carry-in inlet 50, the engaging portion 75 engages with the storage container 20. The outer shape of the engaging portion 75 is smaller than the outer shape of the lid portion 73. Therefore, when the lid portion 73 is attached to the carry-in inlet 50, the engaging portion 75 is located in the transport path 44. The engaging portion 75 is made of, for example, a metal material.

As shown in FIG. 4, the engaging portion 75 is provided with a plurality of engaging protrusions 76 extending to the right and a plurality of engaging recesses 77 formed between the plurality of engaging protrusions 76. The shapes and arrangements of the engaging protrusions 76 and the engaging recesses 77 in the engaging portion 75 are the same as the shapes and arrangements of the first protrusions 23 and the first recesses 24 in the first lid portion 22. As shown in FIG. 8, the engaging protrusion 76 of the engaging portion 75 of the rotation mechanism 70 is housed in the first recess 24 of the first storage container 20A and engages with the first protrusion 23. That is, the first protrusion 23 of the first storage container 20A is housed in the engaging recess 77 of the engaging portion 75 and engages with the engaging protrusion 76. In the present embodiment, the first side 76C of the engaging protrusion 76 and the first side 23C of the first protrusion 23 are engaged with each other, but the second side 76D of the engaging protrusion 76 and the second side 23D of the first protrusion 23 are engaged. May engage with. Here, when one engaging protrusion 76 and one first protrusion 23 are engaged, a gap 79 is formed between one engaging protrusion 76 and the other first first protrusion 23. As a result, even if a plurality of storage containers 20 are arranged in series in the transport direction X, the atmosphere outside the storage container 20 (for example, the atmosphere of the transport path 44) is contained through the gap 79 and the through hole 25 (see FIG. 7). It can flow into the internal space 28 of 20.

As shown in FIG. 8, when the rotation mechanism 70 and the storage container 20 are engaged and the plurality of storage containers 20 are engaged with each other, the plurality of storage containers 20 rotate in conjunction with the rotation of the rotation mechanism 70. It is configured to do. That is, when the engaging portion 75 of the rotation mechanism 70 rotates, the engaging projections 76 and the first projections 23 that engage with each other and the first projections 23 and the second projections 33 are in series with each other in the transport direction X. All the storage containers 20 lined up in the above rotate. As a result, the material to be treated contained in the container 20 can be heated by the heater 46 (see FIG. 3A) while stirring. The heating of the material to be processed is usually performed when the lid 73 of the rotation mechanism 70 is attached to the carry-in inlet 50 and the carry-out port 52 is closed by the lid 54. Then, when the heat treatment is completed, the new storage container 20 is carried in from the carry-in inlet 50 by the rotation mechanism 70, so that the storage container 20 is carried out from the carry-out port 52 to the carry-out line 80.

As shown in FIG. 1, the carry-out line 80 is provided on the downstream side (here, on the right side) of the furnace body 40. The carry-out line 80 carries the storage container 20 carried out from the furnace body 40. The unloading line 80 is provided with, for example, a plurality of ball rollers (not shown), and the storage container 20 is transported in the transport direction X while being supported by the ball rollers.

Although the detailed description has been given with reference to specific embodiments, these are merely examples and do not limit the scope of the claims. Further, the disclosure here can be variously modified, and each component and each process referred to here may be appropriately omitted or appropriately combined as long as no particular problem arises.

The heat treatment apparatus 10 may include a suction pump that sucks air in the transport path 44 of the furnace body 40. Further, the heat treatment apparatus 10 may include a vacuum pump that evacuates the inside of the transport path 44. Further, the heat treatment apparatus 10 may include a gas supply apparatus for supplying a gas such as an inert gas (for example, nitrogen, argon, etc.) or a process gas (for example, chlorine, hydrogen chloride, hydrogen sulfide) in the transport path 44. ..

The heat treatment device 10 may include an air supply device that introduces air into the third path 44C in order to cool the material to be treated contained in the storage container 20 in the third path 44C of the second connecting portion 42C. ..

In the above-described embodiment, the heater 46 is not provided in the first connecting portion 42B and the second connecting portion 42C of the outer case 42, but the heater 46 is also provided in the first connecting portion 42B and the second connecting portion 42C. It may be provided.

In the above-described embodiment, the first lid portion 22 and the second lid portion 32 are detachably provided on the main body portion 21, but at least one of the first lid portion 22 and the second lid portion 32 is the main body. It suffices if it can be attached to and detached from the portion 21.

In the above-described implementation, the heater 46 is formed in a cylindrical shape, but the shape of the heater 46 is not particularly limited as long as the storage container 20 can pass through the inside of the heater 46. The heater 46 may be formed in a rectangular parallelepiped shape, for example.

In the above-described embodiment, the furnace body 40 has a transport rail 47 on which the storage container 20 is placed, but the furnace body 40 does not have to have the transport rail 47. In this case, the storage container 20 moves and rotates along the inner wall 46W of the heater 46.

10 Heat treatment device 20 Storage container 21 Main body 22 First lid 23 First protrusion 24 First recess 28 Internal space 32 Second lid 33 Second protrusion 34 Second recess 40 Furnace 44 Transport path 46 Heater 47 Transport rail 50 Carry-in entrance 52 Carry-out outlet 60 Carry-in line 70 Rotating mechanism 80 Carry-out line

Claims (8)

A furnace body having an internal space for accommodating the material to be treated, accommodating a plurality of accommodating containers having a columnar outer peripheral shape in series, and heating the material to be processed.
A carry-in line provided on the upstream side of the furnace body and carrying the storage container to be carried into the inside of the furnace body, and a carry-in line.
The carry-in line is provided with a rotation mechanism that engages with the storage container to rotate the storage container.
The furnace body is
An exterior case that extends in the first direction and
A transport path that penetrates the outer case in the first direction,
A heater having an inner wall constituting at least a part of the transport path,
A carry-in inlet formed at one end of the outer case in the first direction and capable of carrying the storage container into the transport path.
It has a carry-out port formed at the other end of the outer case in the first direction and capable of carrying the storage container out of the transport path.
The plurality of storage containers are configured to be engageable with each other.
When the rotation mechanism and the storage container are engaged and the plurality of storage containers are engaged with each other, the plurality of storage containers are configured to rotate in conjunction with the rotation of the rotation mechanism. , Heat treatment equipment. At one end of the storage container on one side in the first direction, a plurality of first protrusions extending on one side in the first direction and a plurality of first recesses formed between the plurality of first protrusions. Is provided,
At the other end of the storage container in the first direction, a plurality of second protrusions extending to the other side in the first direction and a plurality of second recesses formed between the plurality of second protrusions. Is provided,
The rotation mechanism has a plurality of engaging protrusions housed in the first recess and engaged with the first protrusion.
The second projection of one storage container is accommodated in the first recess of the other storage container and engages with the first projection of the other storage container.
When the engaging projection engages with the first projection and the second projection of the one containing container engages with the first projection of the other containing container, the plurality of the containing containers. 1 is the heat treatment apparatus according to claim 1, wherein is configured to rotate in conjunction with the rotation of the rotation mechanism. The heat treatment apparatus according to claim 1 or 2, wherein the rotation mechanism is provided so as to be movable in the first direction, and is configured to move the storage container in the first direction in the transport path. .. The heat treatment apparatus according to claim 3, further comprising a carry-out line provided on the downstream side of the furnace body and transporting the storage container carried out from the furnace body. The furnace body includes a lid that opens and closes the carry-out port.
The rotation mechanism is detachably provided at the carry-in entrance and is provided.
One of claims 1 to 4, wherein when the rotation mechanism is attached to the carry-in port, the rotation mechanism and the storage container are engaged and the carry-in port is closed by the rotation mechanism. The heat treatment apparatus according to. A through hole communicating with the internal space is formed at one end of the storage container in the first direction or the other end of the storage container in the first direction.
The heat treatment apparatus according to any one of claims 1 to 5, wherein the storage container has a filter for closing the through hole. The heat treatment apparatus according to any one of claims 1 to 6, wherein the heater and the storage container are made of graphite. A transport rail provided on a part of the inner wall of the heater and having an arcuate mounting surface on which the storage container is mounted is provided.
The heat treatment apparatus according to claim 7, wherein the transport rail is made of graphite.

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