JP6979004B2 - Fluid supply unit, fluid supply integration unit, and flow path block - Google Patents

Description

The present invention relates to a fluid supply unit, a fluid supply integration unit, and a flow path block in which a plurality of fluid devices are attached to a flow path block.

For example, in the semiconductor manufacturing process, one type or two or more types of gas are switched and supplied to a processing chamber in which a wafer is set, and the wafer is subjected to an etching process. For example, the fluid supply / integration unit 100 shown in FIG. 7 is connected to the processing chamber. In the fluid supply integration unit 100, a gas line for supplying gas is configured by a plurality of fluid supply units 110. The fluid supply unit 110 includes a first valve 111, a second valve 112, a mass flow controller (MFC) 113, and a third valve 114.

FIG. 8 is a side view of the conventional fluid supply / integration unit 100. FIG. 9 is a plan view of the conventional fluid supply / integration unit 100. In FIG. 8, the flow path block 120 is shown in cross section for the purpose of explaining the flow path.

As shown in FIGS. 8 and 9, the fluid supply unit 110 is attached to the mounting surface 121 located on the upper side of the flow path block 120 in the figure from the upstream side (left side in the figure) to the downstream side (in the figure) in the fluid flow direction. The input side piping joint 31, the first valve 111, the second valve 112, the MFC 113, the third valve 114, and the output side piping joint 32 are arranged side by side in a row toward the right side), and each is 2 It is attached to the flow path block 120 using the screws 141 and 141 of the book.

As shown in FIG. 8, on the mounting surface 121 of the flow path block 120, screw holes 51 for fastening screws 141 and 141 on both sides of the connection port 61 connected to the input side piping joint 31 in the left-right direction in the drawing. , 51 are formed. A connection port 62 connected to the input port of the first valve 111 and a connection port 62 connected to the output port of the first valve 111 are opened on the mounting surface 121, and a screw hole 52 for fastening the screw 141 is provided. , 52 have been established. The connection port 61 and the connection port 62 communicate with each other via the U-shaped flow path 171. The U-shaped flow path 171 is provided along the axis in the longitudinal direction (left-right direction in the figure) of the flow path block 120, bypassing the screw holes 51 and 52 provided between the connection port 61 and the connection port 62. Has been done. The other connection ports 64 to 70, the screw holes 53 to 56, and the U-shaped flow path 172 to 175 are also provided in the same manner as the connection ports 61 to 63, the screw holes 51, 52, and the U-shaped flow path 171.

In the fluid supply integration unit 100, a plurality of fluid supply units 110 are fixed to the mounting panel 130 using fixing screws 181, 182, respectively. In each fluid supply unit 110, the output side pipe joints 32 are coupled to each other to form a common pipe 185 (see, for example, Patent Document 1).

Japanese Patent No. 6404101

However, the prior art has the following problems. As shown in FIG. 9, the conventional fluid supply unit 110 flows the input side piping joint 31, the first valve 111, the second valve 112, the MFC 113, the third valve 114, and the output side piping joint 32. They were arranged side by side in a row on the road block 120. Therefore, the total length L11 of the fluid supply unit 110 has become long.

Further, as shown in FIG. 9, the width W11 of the flow path block 120 was set to be about the same as the width W10 of the first valve 111, the second valve 112, the MFC 113, and the third valve 114, that is, 10 mm. On the other hand, the maximum width W12 of the input side piping joint 31 and the maximum width W13 of the output side piping joint 32 are larger than the width W11 of the flow path block 120. Therefore, in the fluid supply unit 110, as shown in P11 and P12 in the figure of FIG. 9, the nut portion 311 of the input side piping joint 31 projects to the side of the flow path block 120, and P13 and P14 in the figure of FIG. 9 As shown in the above, the joint portions 322 and 323 of the output side piping joint 32 project to the side of the flow path block 120. When such a fluid supply unit 110 is integrated, it is necessary to secure a space for connecting the input side pipe joint 31 and the output side pipe joint 32 between the adjacent fluid supply units 110. Moreover, many of the input side pipe joints 31 are connected to other pipes by using a spanner, and when securing a space for using the spanner, a pitch of 20 mm or more between lines is required. Therefore, when the conventional fluid supply unit 110 is integrated, a wasted space S having a width W10 of the first valve 111 or the like, that is, about 10 mm is formed between the fluid supply units 110.

Since the total length of the fluid supply unit 110 and the wasted space S at the time of integration affect the installation area of the fluid supply and integration unit 100, it is preferable to make it as small as possible.

The present invention has been made to solve the above problems, and is a fluid supply unit, a fluid supply integration unit, and a fluid supply integration unit which can shorten the total length and suppress the wasted space formed between the lines at the time of integration. , To provide a flow path block.

One aspect of the present invention has the following configuration. (1) In a fluid supply unit including a plurality of fluid devices and a flow path block to which the plurality of fluid devices are mounted, the plurality of fluid devices are alternately arranged in two rows on the mounting surface of the flow path block. The flow path block is provided on both sides of the first connection port communicating with the fluid device arranged in the first row and the first connection port with respect to the row direction of the first row. For the first screw hole to which the screw for attaching the fluid device to the flow path block is fastened, the second connection port communicating with the fluid device arranged in the second row, and the direction of the second row. A second screw hole provided on both sides of the second connection port and to which a screw for attaching the fluid device to the flow path block is fastened, and the first connection port and the second connection port are connected to each other. It is characterized by having a connecting flow path.

In the fluid supply unit having the above configuration, a plurality of fluid devices are arranged in two rows by alternately changing the rows and screwed to the flow path block. Therefore, since the plurality of fluid devices are arranged in a row and screwed to the flow path block. The total length is shorter than when it is stopped. In addition, since the fluid supply unit can secure a connection space and a work space by using the space where the fluid equipment is not attached to the flow path block at the time of integration, the flow path blocks are integrated as close as possible and integrated between the lines. The wasted space formed can be suppressed.

(2) In the fluid supply unit described in (1), the arrangement of the first connection port and the second connection port is deviated along the column direction, and the connection flow path is the first screw hole. It is preferable that the second screw hole is bypassed and formed in a V shape.

Since the fluid supply unit having the above configuration forms the V-shaped connecting flow path in a zigzag shape while bypassing the screw holes, the total length of the flow path block can be shortened. Further, since the fluid supply unit forms a V-shaped connecting flow path in the flow path block by using, for example, a drill, the labor of processing the flow path can be reduced.

(3) In the fluid supply unit according to (1) or (2), it is preferable that the plurality of fluid devices include a piping joint, a valve, and a mass flow controller.

In the fluid supply unit having the above configuration, even if the width of the pipe joint is larger than the width of the valve or mass flow controller, the pipe joint is arranged on the flow path block by arranging the pipe joint so as to be offset from at least one of the valve and the MFC. Since it is possible to secure a joint space and a work space, wasteful space formed in the line pipe can be suppressed and accumulated.

(4) Another aspect of the present invention is a fluid supply integration unit characterized by having a plurality of fluid supply units according to any one of (1) to (3).

The fluid supply and integration unit having the above configuration has a short overall length and integrates fluid supply units that can suppress the formation of wasted space between lines during integration. Therefore, a plurality of fluid devices are arranged side by side in a row. The installation area can be made smaller than when the fluid supply unit is integrated.

(5) In the fluid supply integration unit described in (4), one of the plurality of fluid devices is a pipe joint having a nut portion at the tip portion, and the pipe joint attached to the adjacent fluid supply unit is a pipe joint. It is preferable that the heights of the nut portions are different.

The fluid supply and integration unit having the above configuration can secure a space for turning the nut portion of each fluid supply unit with a spanner or the like even when the fluid supply units are integrated by bringing the flow path blocks close to each other.

(6) Another aspect of the present invention is that, in a flow path block in which a plurality of fluid devices are mounted on a mounting surface, the plurality of fluid devices are alternately mounted on the mounting surface in two rows side by side. Multiple screw holes to which screws for attaching multiple fluid devices are fastened, a first connection port that communicates with the fluid devices located in the first row, and a second connection that communicates with the fluid devices located in the second row. It is characterized by having a port and a connection flow path connecting the first connection port and the second connection port.

According to the present invention, it is possible to realize a fluid supply unit, a fluid supply integration unit, and a flow path block which can shorten the total length and suppress the wasted space formed between the lines at the time of integration.

It is a perspective view of the fluid supply unit which concerns on embodiment of this invention. It is a top view of the fluid supply unit. It is a side view of a fluid supply unit. It is a top view of the flow path block. It is a top view of the fluid supply integration unit. It is a front view of the fluid supply integration unit. It is a circuit diagram of a fluid supply integration unit. It is a side view of the conventional fluid supply integration unit. It is a top view of the conventional fluid supply integration unit. It is a figure which shows the modification of the connection flow path. It is a partially enlarged perspective view of FIG.

Hereinafter, embodiments of the fluid supply unit, the fluid supply integration unit, and the flow path block according to the present invention will be described with reference to the drawings. FIG. 1 is a perspective view of the fluid supply unit 10 according to the embodiment of the present invention. FIG. 2 is a plan view of the fluid supply unit 10. FIG. 3 is a side view of the fluid supply unit 10. FIG. 4 is a plan view of the flow path block 20. FIG. 5 is a plan view of the fluid supply / integration unit 1. FIG. 6 is a front view of the fluid supply / integration unit 1. The fluid supply unit 10 shown in FIGS. 1 to 3 and the fluid supply integrated unit 1 shown in FIGS. 5 to 6 embody the circuit diagram shown in FIG. 7.

(Structure of fluid supply unit)
As shown in FIG. 1, the fluid supply unit 10 has an input side piping joint 31, a first valve 111, a second valve 112, an MFC 113, and a third valve on a mounting surface 21 located on the upper side of the flow path block 20 in the drawing. The 114 and the output side piping joint 32 are arranged side by side in two rows and alternately shifted in position, and are arranged in a staggered arrangement. The input side piping joint 31, the first valve 111, the second valve 112, the MFC 113, the third valve 114, and the output side piping joint 32 are examples of "plural fluid devices".

The first valve 111, the second valve 112, and the third valve 114 are air operated valves that open and close according to air pressure. The MFC 113 measures the flow rate of the fluid.

The first valve 111, the second valve 112, the MFC 113, and the third valve 114 are on the upstream side (left side in the figure) and the downstream side (right side in the figure) with respect to the X direction in the figure, which is the flow direction of the fluid, respectively. ) Is fastened to the flow path block 20 by fastening the screw 141 inserted through the portion located at) to the flow path block 20. The width W10 of the first valve 111, the second valve 112, the MFC 113, and the third valve 114 is narrower and smaller than those to which the four corners are screwed. In this embodiment, the width W10 is 10 mm.

As shown in FIG. 1, the input side piping joint 31 includes a fixing portion 313 fixed to the flow path block 20, a pipe portion 312 for inputting a fluid, and a nut portion 311 provided at the tip portion of the pipe portion 312. To prepare for. The fixing portion 313 is provided with a width similar to the width W10. As shown in FIG. 2, in the input side piping joint 31, the width W12 of the nut portion 311 is larger than the width W10, and the nut portion 311 projects laterally from the fixed portion 313.

As shown in FIG. 1, the output side piping joint 32 is a pair of a fixing portion 324 fixed to the flow path block 20, a pipe portion 321 for outputting a fluid, and a pair provided in opposite directions to the tip portion of the pipe portion 321. 322, 323 and 323 of the joint. The fixing portion 324 is provided with a width similar to the width W10. As shown in FIG. 2, in the output side piping joint 32, the width W13 of the joint portion 322, 323 is larger than the width W10, and the joint portion 322, 323 projects laterally from the fixed portion 324.

As shown in FIG. 1, the flow path block 20 is formed by forming a highly corrosive metal such as SUS into a rectangular parallelepiped shape. As shown in FIG. 2, the input side piping joint 31, the second valve 112, and the third valve 114 arranged in the first row on the upper side in the figure, and the second row arranged in the second row on the lower side in the figure. The 1-valve 111, the MFC 113, and the output side piping joint 32 are arranged so as to partially overlap each other between the upstream side and the downstream side devices. Therefore, as shown in FIG. 8, the total length L1 of the flow path block 20 shown in FIG. 1 includes the input side piping joint 31, the first valve 111, the second valve 112, the MFC 113, the third valve 114, and the output side piping joint 32. Is shorter than the total length L11 of the flow path block 120 mounted on the mounting surface 121 by arranging them in a row.

As shown in FIG. 1, the width W1 of the flow path block 20 is set to be 2 times or more and 2.1 times or less the width W10 of the first valve 111, and the input side pipe joint 31 arranged in the first row, the first The two valves 112 and the third valve 114, the first valve 111 and the MFC 113 arranged in the second row, and the output side piping joint 32 are arranged close to each other in the Y direction in the drawing. In this embodiment, the width W1 is 21 mm.

As shown in FIG. 4, the mounting surface 121 of the flow path block 20 has a plurality of connection ports 61, 62, 63, 64, 65, 66, 67, 68, 69, 70 and a plurality of screw holes 51, 51. , 52, 52, 53, 53, 54, 54, 55, 55, 56, 56 have been established. Connection ports 61, 64, 65, 68, 69 are examples of "first connection ports", and connection ports 62, 63, 66, 67, 70 are examples of "second connection ports". The screw holes 51, 51, 53, 53, 55, 55 are examples of the "first screw hole", and the screw holes 52, 52, 54, 54, 56, 56 are examples of the "second screw hole". be.

As shown in FIG. 2, the connection port 61 communicates with the input side piping joint 31. The connection port 62 communicates with the input port of the first valve 111, and the connection port 63 communicates with the output port of the first valve 111. The connection port 64 communicates with the input port of the second valve 112, and the connection port 65 communicates with the output port of the second valve 112. The connection port 66 communicates with the input port of the MFC 113, and the connection port 67 communicates with the output port of the MFC 113. The connection port 68 communicates with the input port of the third valve 114, and the connection port 69 communicates with the output port of the third valve 114. The connection port 70 communicates with the output side piping joint.

The connection ports 61, 64, 65, 68, 69 are arranged in a row in the X direction in the figure according to the arrangement of the input side piping joint 31, the second valve 112, and the third valve 114 arranged in the first row on the upper side in the figure. They are installed side by side. The connection ports 62, 63, 66, 67, 70 are arranged in the X direction in the figure as an example according to the arrangement of the first valve 111, the MFC 113, and the output side piping joint 32 arranged in the second row on the lower side in the figure. It is provided.

As shown in FIG. 4, the mounting surface 21 of the flow path block 20 is located on both sides of the connection port 61 with respect to the row direction (left-right direction in the figure) of the first row in the figure, and is a pipe joint on the input side. Screw holes 51, 51 are provided to which the screws 141, 141 for attaching the 31 to the flow path block 20 are fastened. Further, on the mounting surface 21, the first valve 111 is attached to the flow path block 20 at positions on both sides of the connection ports 62 and 63 with respect to the row direction (left-right direction in the figure) of the second row on the lower side in the drawing. Screw holes 52, 52 to which the mounting screws 141 and 141 are fastened are opened. Further, screws 141 and 141 for mounting the second valve 112 on the flow path block 20 are fastened to the mounting surface 21 at positions on both sides of the connection ports 64 and 65 with respect to the row direction of the first row. Screw holes 53, 53 are opened. Further, on the mounting surface 21, screws 141 and 141 for mounting the MFC 113 to the flow path block 20 are fastened at positions on both sides of the connection ports 66 and 67 with respect to the row direction of the second row. , 54 have been opened. Further, screws 141 and 141 for mounting the third valve 114 on the flow path block 20 are fastened to the mounting surface 21 at positions on both sides of the connection ports 68 and 69 with respect to the row direction of the first row. Screw holes 55 and 55 are opened. The mounting surface 21 has screw holes 56, to which screws 141 and 141 for mounting the output side piping joint 32 to the flow path block 20 are fastened at positions on both sides of the connection port 70 with respect to the row direction of the second row. 56 have been opened.

Therefore, as shown in FIG. 4, the mounting surface 21 of the flow path block 20 is provided with connection ports 61, 64, 65, 68, 69 and screw holes 51, 51, 53, 53, 55, 55 arranged side by side. Has been done. Further, the mounting surface 21 is provided with connection ports 62, 63, 66, 67, 70 and screw holes 52, 52, 54, 54, 56, 56 arranged side by side in a row.

The flow path block 20 includes connection ports 61, 64, 65, 68, 69 provided along the first row on the upper side in the figure and connection ports 62 provided along the second row on the lower side in the figure. 63, 66, 67, and 70 are provided so as to be offset from each other along the column direction (X direction in the figure). Then, the flow path block 20 has screw holes 52, 52, 54, 54, 56 in the second row next to the connection ports 61, 64, 65, 68, 69 in the first row (lower positions in the figure). , 56 are provided respectively. Further, the flow path block 20 has screw holes 51, 51, 53, 53, 55 in the first row next to the connection ports 62, 63, 66, 67, 70 in the second row (upper position in the figure). 55 are provided respectively.

The flow path block 20 is formed with connection flow paths 71 to 75 that allow the connection ports 61 to 70 to communicate with each other. The connection flow paths 71 to 75 are formed in a V shape so as to bypass the screw holes 51 to 56.

That is, as shown in FIGS. 3 and 4, in the flow path block 20, the upstream diagonal flow path 71a is formed diagonally downward from the connection port 61 between the screw hole 51 and the screw hole 52. .. Further, in the flow path block 20, the downstream diagonal flow path 71b is formed diagonally downward from the connection port 62 toward the space between the screw hole 51 and the screw hole 52. The upstream diagonal flow path 71a and the downstream diagonal flow path 71b form a V-shaped connection flow path 71 that communicates between the screw hole 51 and the screw hole 52 and communicates the connection port 61 and the connection port 62. .. In the same manner as this, the flow path block 20 has a V-shaped connecting flow path 72, 73 due to the upstream side diagonal flow paths 72a, 73a, 74a, 75a and the downstream side diagonal flow paths 72b, 73b, 74b, 75b. , 74, 75 are formed.

As shown in FIG. 4, the connecting flow paths 71 to 75 are formed diagonally with respect to the axis in the direction in which the fluid of the flow path block 20 flows (X direction in the figure), and are sewn between the screw holes 51 to 56. It is formed in a zigzag shape. Therefore, as shown in FIG. 8, the flow path block 20 can have a shorter overall length L1 than the flow path block 120 in which the U-shaped flow paths 171 to 175 are formed along the axis in the direction in which the fluid flows.

Further, the connection flow paths 71 to 75 shown in FIGS. 3 and 4 are provided, for example, by forming the upstream diagonal flow paths 71a to 75a and the downstream diagonal flow paths 71b to 75b in the flow path block 20 with a drill. Will be. On the other hand, in the U-shaped flow paths 171 to 175 shown in FIG. 8, for example, through holes 171a to 175a and 171b to 175b are formed by a drill, and the through holes 171a to 175a and the through holes 171b to 175b are communicated with each other. The recesses 171c to 175c are opened by cutting or the like, and the lids 191 and 192 are welded to the flow path block 120 to tightly close the communication recesses 171c to 175c. Therefore, the connection flow paths 71 to 75 can be easily formed in the flow path block 20 with less effort than the U-shaped flow paths 171 to 175.

As shown in FIG. 3, insertion holes 23 and 24 through which bolts 181, 182 are passed are formed at both ends of the flow path block 20 in the longitudinal direction.

(Structure of fluid supply and integration unit)
The fluid supply integration unit 1 integrates a plurality of fluid supply units 10A and 10B, for example, as shown in FIGS. 5 and 6. In FIGS. 5 and 6, the fluid supply units 10A and 10B have the same configuration, but for convenience of explanation, the reference numerals are added to the reference numerals of the fluid supply unit 10 having the short input side piping joint 31 of the pipe portion 312 and its components. "A" is added, and the subscript "B" is added to the code of the fluid supply unit 10 having the long input side piping joint 31 of the pipe portion 312 and its components. In the following description, when it is not necessary to distinguish the parts, the subscripts "A" and "B" are appropriately omitted.

As shown in FIG. 5, the fluid supply units 10A and 10B are arranged so that the adjacent flow path blocks 20A and 20B are close to each other, and are fixed to the mounting panel 30 by using bolts 181A, 182A, 181B and 182B, respectively. Has been done. In the fluid supply units 10A and 10B, the joint portions 322A and 323A of the output side pipe joint 32A and the joint portions 322B and 323B of the output side pipe joint 32B are joined to each other by welding or the like to form a common pipe 185. The common pipe 185 is connected to, for example, a processing chamber of a semiconductor manufacturing apparatus.

The total length L1 of the fluid supply unit 10 is shorter than the total length L11 of the conventional fluid supply unit 110 shown in FIG. Therefore, in the fluid supply / integration unit 1 shown in FIGS. 5 and 6, the panel area of the mounting panel 30 is made smaller than the panel area of the mounting panel 130 of the conventional fluid supply / integration unit 100 shown in FIG. 9, for example, to supply the fluid. The installation area can be made smaller than that of the integration unit 100.

As shown in FIG. 5, in the fluid supply unit 10A, the input side piping joint 31A and the first valve 111A are arranged in a staggered arrangement. Therefore, the fluid supply unit 10A has an empty space above the flow path block 20A on the right side of the figure of the input side piping joint 31A. The same applies to the fluid supply unit 10B. Therefore, for example, in the fluid supply unit 10A, as shown in P5 in the drawing, a portion where the nut portion 311A of the input side piping joint 31A projects from the fixing portion 313A to the right side in the drawing is arranged above the flow path block 20A. As shown in P1 in the drawing, a portion where the nut portion 311A projects from the fixing portion 313A to the left side in the drawing can be arranged on the flow path block 20B of the adjacent fluid supply unit 10B. In this way, even if the adjacent fluid supply units 10A are arranged so that the flow path block 20A is placed as close as possible to the flow path block 20B of the adjacent fluid supply unit 10B, the input side piping joint 31A is placed on the flow path blocks 20A and 20B. Since the connection space of, 31B can be secured, the wasted space Sx between the lines can be omitted or made as small as possible. The same applies to the fluid supply unit 10B.

Here, as shown in FIG. 6, in the adjacent fluid supply units 10A and 10B, since the pipe portion 312A of the input side piping joint 31A is shorter than the pipe portion 312B of the input side piping joint 31B, the tip of the input side piping joint 31A The nut portion 311A provided in the portion is arranged at a position lower than the nut portion 311B provided in the tip portion of the input side piping joint 31B. The fluid supply units 10A and 10B have different heights (positions in the Z direction in the figure of FIG. 1) of the nut portions 311A and 311B. The outer diameter of the pipe portion 312B is smaller than the outer diameter of the nut portion 311B. Therefore, as shown on P6 in the figure, the nut portion 311A of the fluid supply unit 10A secures a wider space between the nut portion 311A of the fluid supply unit 10B and the pipe portion 312B of the adjacent fluid supply unit 10B than when it is arranged next to the nut portion 311B. can. Using this space, the user can attach a spanner to the nut portion 311A and turn the nut portion 311A. On the other hand, as shown in P2 in the figure, in the fluid supply unit 10B, a space for using a spanner is formed around the nut portion 311B located at a position higher than the nut portion 311A.

Therefore, the fluid supply units 10A and 10B provide the space required for turning the nut portions 311A and 311B with a spanner without providing a wasteful space S between the lines as in the fluid supply integration unit 100 shown in FIG. It can be secured, and the flow path blocks 20A and 20B can be arranged so as to be close to each other to eliminate wasted space Sx or to make it as small as possible.

As shown in FIG. 5, for example, in the fluid supply unit 10B, as shown in P4 in the figure, the coupling portion 323B projecting from the fixed portion 324B to the right side in the figure is the flow of the fluid supply unit 10A on the right side in the figure. It is arranged on the road block 20A and is coupled to the coupling portion 322A of the output side piping joint 32A. Further, in the fluid supply unit 10B, as shown in P3 in the figure, a coupling portion 322B projecting from the fixed portion 324B to the left side in the figure is arranged on the flow path block 20B. The coupling portion 322B is coupled to the coupling portion 323A protruding from the fluid supply unit 10A on the left side in the drawing toward the fluid supply unit 10B above the flow path block 20. Therefore, the fluid supply units 10A and 10B do not need to secure a connecting space between the flow path blocks 20A and 20B for arranging the connecting portions 322B and 323B of the output side piping joint 32, which is useless and is formed between the lines. Space Sx can be omitted or made as small as possible.

(Explanation of operation of fluid supply and integration unit)
In each of the fluid supply integration units 1, the input side piping joint 31 of the fluid supply unit 10 is connected to various gas supply sources. The first valve 111 is connected to the manual valve 116, respectively. The manual valve 116 is normally opened to open the first valve 111. The manual valve 116 is closed, for example, during maintenance to close the first valve 111.

When the fluid supply integration unit 1 supplies a specific gas to a processing chamber (not shown) of the semiconductor manufacturing apparatus, the second valve 112 and the third valve 114 of the fluid supply unit 10 connected to the specific gas supply source are opened. Will be done. The MFC 113 controls the flow rate so that the flow rate of the gas input from the second valve 112 matches the target value. The specific gas whose flow rate is controlled is output from the output side pipe joint 32 to the common pipe 185 and supplied to a processing chamber (not shown). The second valve 112 and the third valve 114 are closed when a predetermined amount of a specific gas is supplied to a processing chamber (not shown).

(summary)
As described above, the fluid supply unit 10 of the present embodiment includes an input side pipe joint 31, a first valve 111, a second valve 112, an MFC 113, a third valve 114, and an output side pipe joint 32 (hereinafter, "a plurality of fluids"). Equipment 31,111,112,113,114,32 ") and a plurality of fluid supply units 10 including a flow path block 20 to which a plurality of fluid equipments 31,111,112,113,114,32 are attached. 31, 111, 112, 113, 114, 32 of the above are alternately mounted on the mounting surface 21 of the flow path block 20 side by side in two rows, and the flow path block 20 is arranged in the first row. Connection ports 61, 64, 65, 68, 69 communicating with the input side piping joint 31, the second valve 112, and the third valve 114 (hereinafter, also referred to as "first connection port 61, 64, 65, 68, 69"). It is provided on both sides of the first connection port 61, 64, 65, 68, 69 with respect to the row direction of the first row, and the input side pipe joint 31, the second valve 112, and the third valve 114 are passed through the flow path. Screw holes 51, 51, 53, 53, 55, 55 (hereinafter, also referred to as "first screw holes 51, 51, 53, 53, 55, 55") to which screws 141 for attaching to the block 20 are fastened) and 2. Connection ports 62, 63, 66, 67, 70 communicating with the first valve 111, MFC 113, and the output side pipe joint 32 arranged in the row (hereinafter also referred to as "second connection port 62, 63, 66, 67, 70"). The first valve 111, MFC 113, and the output side pipe joint 32 are provided on both sides of the second connection port 62, 63, 66, 67, 70 in the row direction of the second row to the flow path block 20. Screw holes 52, 52, 54, 54, 56, 56 (hereinafter also referred to as "second screw holes 52, 52, 54, 54, 56, 56") to which the mounting screws 141 are fastened, and the first connection port. It is characterized by having connection channels 71, 72, 73, 74, 75 connecting 61, 64, 65, 68, 69 and the second connection ports 62, 63, 66, 67, 70.

In the fluid supply unit 10 having the above configuration, a plurality of fluid devices 31, 111, 112, 113, 114, 32 are arranged side by side in two rows by alternately changing the rows, and screwed to the flow path block 20. The total length is shorter than the case where the fluid devices 31, 111, 112, 113, 114, 32 are arranged in a row and screwed to the flow path block 120. Further, since the fluid supply unit 10 can secure a space for interacting with each other, a work space, and the like by utilizing the space in which the fluid devices 31, 111, 112, 113, 114, and 32 are not attached to the flow path block 20 at the time of integration. The flow path blocks 20 can be integrated as close as possible to suppress the wasted space Sx formed between the lines.

Further, in the fluid supply unit 10 of the present embodiment, the arrangement of the first connection port 61, 64, 65, 68, 69 and the second connection port 62, 63, 66, 67, 70 are displaced along the column direction. The connection flow paths 71 to 75 are formed in a V shape by bypassing the first screw holes 51, 51, 53, 53, 55, 55 and the second screw holes 52, 52, 54, 54, 56, 56. There is.

Since the fluid supply unit 10 having the above configuration forms the V-shaped connecting flow paths 71 to 75 in a zigzag shape while bypassing between the screw holes 51 to 56, the total length L1 of the flow path block 20 can be shortened. Further, since the fluid supply unit 10 forms the V-shaped connection flow paths 71 to 75 in the flow path block 20 by using, for example, a drill, the labor of processing the flow path can be reduced.

Further, in the fluid supply unit 10 of the present embodiment, the plurality of fluid devices 31, 111, 112, 113, 114, 32 include the input side piping joint 31, the output side piping joint 32, and the first to third valves 111. 112, 114 and MFC 113 are included.

In the fluid supply unit 10 having the above configuration, even if the widths W12 and W13 of the input side piping joint 31 and the output side piping joint 32 are larger than the widths W10 of the first to third valves 111, 112 and 114 and the MFC 113, the input side piping By arranging the joint 31 in a row shifted from the first valve 111 and the MFC 113, or by arranging the output side pipe joint 32 in a row shifted from the third valve 114, the input side pipe joint is arranged on the flow path block 20. It is possible to secure a connection space and a work space between 31 and the output side piping joint 32. Therefore, according to the fluid supply unit 10 of the present embodiment, wasteful space Sx can be suppressed and accumulated between the lines.

The fluid supply integration unit 1 of the present embodiment is characterized by having a plurality of fluid supply units 10.

Since the fluid supply integration unit 1 having the above configuration has a short overall length and integrates the fluid supply unit 10 capable of suppressing the formation of wasted space Sx between lines during integration, a plurality of fluid devices 31, 111 are integrated. , 112, 113, 114, 32 can be arranged in a row to integrate the conventional fluid supply unit 110, and the installation area can be reduced.

Further, in the fluid supply integration unit 1 of the present embodiment, one of the plurality of fluid devices 31, 111, 112, 113, 114, 32 is an input side piping joint 31 having a nut portion 311 at the tip portion, and adjacent fluids. The heights of the nut portions 311A and 311B of the input side piping joints 31A and 31B attached to the supply units 10A and 10B are different.

In such a fluid supply integration unit 1, even if the fluid supply units 10A and 10B are arranged close to each other, it is possible to secure a space for turning the nut portions 311A and 311B of the fluid supply units 10A and 10B with a spanner or the like. ..

The present invention is not limited to the above embodiment, and various applications are possible.

For example, as in the fluid supply unit 210 shown in FIG. 10, the connection ports 61 to 70 may be connected by a connection flow path 76 to 80 provided at a right angle to the X direction. That is, in the flow path block 200, the input side piping joint 31, the first valve 111x, the second valve 112x, the MFC 113, the third valve 114x, and the output side piping joint 32 are arranged side by side in two rows on the mounting surface 200a, and the screw. By fastening 141 to the screw hole 51, it is fixed to the mounting surface 200a. As shown in FIGS. 10 and 11, the flow path blocks 200 are provided with the connection ports 61 to 70 arranged side by side in the Y direction orthogonal to the X direction, and the connection flow paths 76 to connect the connection ports 61 to 70. 80 is formed in a V shape along the Y direction. However, when the connection flow paths 71 to 75 are formed obliquely with respect to the X direction as in the flow path block 20 shown in FIG. 2, the first to third valves 111, 112, 114 are shown in FIG. Compared to the first to third valves 111x, 112x, 114x, the distance between the input port and the output port is narrower, and the interplane dimension in the X direction is smaller. Therefore, the flow path block 20 shown in FIG. 2 has a shorter overall length L1 in the X direction than the flow path block 200 shown in FIG. 9, and the fluid supply unit 10 shown in FIG. 2 is installed from the fluid supply unit 210 shown in FIG. The area becomes smaller. As a result, the fluid supply / integration unit 1 in which the fluid supply unit 10 is integrated can have a smaller installation area than the fluid supply / integration unit in which the fluid supply unit 210 is integrated.

The type and number of devices attached to the flow path block 20 are not limited to the above-mentioned form.

The fluid supply unit 10, the fluid supply integration unit 1, and the flow path block 20 may be used for devices other than the semiconductor manufacturing device. Further, the fluid may be a liquid such as a chemical solution as well as a gas.

The flow path block 20 may be made of a material other than metal, such as resin.

The connection flow paths 71 to 75 are not limited to the V shape, and may be formed in a U shape or the like. However, by forming the connection flow paths 71 to 75 in a V shape, the length of the flow path can be shortened and the time and effort for processing the flow path can be reduced.

1 Fluid supply integration unit 10 Fluid supply unit 20 Flow path block 21 Mounting surface 51-56 Screw holes 61-70 Connection port 31 Input side piping joint 111 1st valve 112 2nd valve 113 MFC
114 3rd valve

Claims (6)

In a fluid supply unit including a plurality of fluid devices arranged along a supply line for supplying fluid and a flow path block to which the plurality of fluid devices are attached.
Wherein the plurality of fluid devices, the mounting surface of the flow path block, that are attach in two rows by changing the columns alternately from a fluid device on the upstream side,
The flow path block is
A first connection port provided for each fluid device placed in the first row and communicating with the corresponding fluid device,
Respectively provided for one column in the column direction on either side of the first connection port, a first screw hole screw for mounting the fluid device in the flow passage block is fastened,
A second connection port that is provided for each fluid device located in the second row and communicates with the corresponding fluid device.
The relative second column in the column direction are provided on both sides of the second connection port, and a second screw hole screw for mounting the fluid device in the flow passage block is fastened,
A connection flow path that connects the first connection port and the second connection port and communicates the upstream fluid equipment arranged in one row with the downstream fluid equipment arranged in the other row. ,
To have
At least one of the connection flow paths is provided diagonally with respect to the row direction when viewed from the mounting surface side.
A fluid supply unit featuring. In the fluid supply unit according to claim 1,
The arrangement of the first connection port and the second connection port is offset along the column direction.
The connection flow path is formed in a V shape by bypassing the first screw hole and the second screw hole , and is further provided diagonally with respect to the row direction when viewed from the mounting surface side. ,
A fluid supply unit featuring. In the fluid supply unit according to claim 1 or 2.
The plurality of fluid devices includes a piping joint, a valve, and a mass flow controller.
A fluid supply unit featuring. A fluid supply integration unit comprising a plurality of fluid supply units according to any one of claims 1 to 3. In the fluid supply and integration unit according to claim 4,
One of the plurality of fluid devices is a piping joint having a nut portion at the tip portion.
The pipe joints attached to adjacent fluid supply units have different nut heights.
A fluid supply integration unit featuring. In a flow path block where multiple fluid devices arranged along a fluid supply line are mounted on the mounting surface.
Wherein the plurality of fluid devices, to the mounting surface, that are attach in two rows by changing the columns alternately from a fluid device on the upstream side,
A plurality of screw holes to which screws for attaching the plurality of fluid devices are fastened, and
A first connection port provided for each fluid device placed in the first row and communicating with the corresponding fluid device,
A second connection port that is provided for each fluid device located in the second row and communicates with the corresponding fluid device.
A connection flow path that connects the first connection port and the second connection port and communicates the upstream fluid equipment arranged in one row with the downstream fluid equipment arranged in the other row. To have,
At least one of the connection flow paths is provided diagonally with respect to the row direction when viewed from the mounting surface side.
A flow path block characterized by.

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