JP6951283B2 - Fine particle analyzer, fine particle analysis system and cleaning method - Google Patents

Description

The present invention relates to a technique for a fine particle analyzer, a fine particle analysis system, and a cleaning method.

In the fields of optics, environment, etc., the substances of fine particles adhering to the inspection object are analyzed. In particular, in the environmental field, in order to grasp the state of environmental pollution, there is a demand for an analyzer that measures deposits quickly and in real time with high sensitivity. Further, in the industrial field, for the purpose of production process control and quality control, there is a demand for an analyzer that measures deposit components adhering to industrial products quickly and in real time with high sensitivity. In the security field, devices are used at airports and the like to analyze whether fine particles adhering to passengers' hands or luggage are dangerous goods.

In addition, a device for analyzing not only fine particles of deposits but also fine particles in the atmosphere is required. For example, it is important to analyze the components of fine particles such as PM2.5, which is a problem of air pollution.

For example, Patent Document 1 states that "the gas and / or fine particles of the substance to be detected adhering to the certification target 2 are peeled off by the air flow from the air supply section 5, the peeled sample is sucked, and the fine particles are concentrated by the fine particle collecting section 10. The ion source unit 21 generates ions of the sample, and the mass spectrometry unit 23 analyzes the mass. From the obtained mass spectrum, the presence or absence of a mass spectrum derived from the substance to be detected is determined, and the result is obtained. By displaying on the display unit 27, the substance to be detected adhering to the certification target 2 is continuously detected in real time quickly and with low false alarm. ”An analyzer and an analysis method are disclosed (see summary).

Further, for example, Patent Document 2 states, "A certification unit that authenticates a target, an air supply unit that generates injection airflow from at least two different directions with respect to the target, and gas and / or fine particles separated from the target. A collection port for collecting the gas and / or an intake unit that sucks the gas and / or fine particles separated from the target, a flow control unit that controls the injection airflow of the air supply unit and the suction of the intake unit, the sucked gas, and the suctioned gas. / Or from the fine particle collection unit that concentrates and collects the detection target substance contained in the fine particles, the analysis unit that analyzes the detection target substance introduced from the fine particle collection unit, and the results of analysis by the analysis unit. An analyzer that includes an analysis determination control unit that determines the presence or absence of the substance to be detected is disclosed (see summary).

In Patent Documents 1 and 2, a cyclone dust collector is used as a part for concentrating and collecting fine particles, and a heating filter is arranged at the end of the cyclone dust collector. In the cyclone dust collector, the intake gas and fine particles are separated, and the fine particles fall to the lower end of the cyclone. The dropped fine particles are gasified in the heating filter section, and the gas is introduced into the analysis section.

When such a system is operated for a long period of time or when a large amount of fine particles are collected, the fine particles may be deposited on the inner wall of the heating filter or the cyclone dust collector. When fine particles are deposited on the heating filter, even if new fine particles fall on it, there is a problem that heat is not transferred and vaporization does not occur, or vaporized gas is adsorbed on the accumulated fine particles and does not reach the analysis unit. appear. Further, even when fine particles are deposited on the inner wall of the cyclone dust collector, there is a problem that the newly collected fine particles cannot be successfully dropped to the heating filter due to the influence of the accumulated fine particles. Such a problem leads to a decrease in the sensitivity of the system. Furthermore, in order to clean the filter and cyclone dust collector, it was necessary to disassemble the device, and it was necessary to stop the analysis during cleaning.

Further, for example, in Patent Document 3, the dust collection filter 9 is substantially concentric in the cyclone cylinder 1 provided with the gas introduction port 3 connected to the dust removal gas suction hose 5 and the outlet port 6 connected to the outlet hose 8. In such a dust collecting device 50, a pulse jet tube that intermittently supplies a pressure gas for removing dust adhering to the surface 9a of the dust collecting filter 9 to the internal space 11 of the dust collecting filter 9. 18 is arranged. The pulse jet tube 18 or the dust collection filter 9 may be rotatably attached so that the facing portion between the pulse jet tube 18 and the dust collection filter 9 can be changed. When the pressure gas is injected from the pulse jet tube 18 onto the inner surface of the dust collecting filter 9, the dust adhering to the surface 9a can be removed, and the dust collecting action is restored without stopping the dust collecting device 50. A cyclone-type dust collector and a dust collecting method are disclosed (see summary).

In Patent Document 3, which uses the cyclone dust collector as a vacuum cleaner, unlike Patent Documents 1 and 2, an air nozzle for cleaning the inner cylinder of the cyclone dust collector is introduced into the inner cylinder of the cyclone dust collector. In the cyclone dust collector of Patent Document 3, the inner cylinder has a filter shape. Then, Patent Document 3 discloses a method of blowing off dust by injecting gas from an air nozzle inserted in the inner cylinder when dust is accumulated on the inner cylinder.

International Publication No. 2012/063796 International Publication No. 2016/027320 Japanese Unexamined Patent Publication No. 05-076803

As described above, in the techniques described in Patent Documents 1 and 2, fine particles adhering to an inspection object and fine particles existing in the atmosphere are collected and concentrated by a cyclone dust collector for analysis. In such a system, there is a problem that deposits are accumulated in the cyclone dust collector, especially in the heating filter, and it is necessary to stop and disassemble the device for cleaning.

The present invention has been made in view of such a background, and an object of the present invention is to clean the inside of the fine particle analyzer without stopping and disassembling the fine particle analyzer.

In order to solve the above-mentioned problems, the present invention includes a cyclone dust collector, a filter unit connected to the downstream of the cyclone dust collector and heated, a gas analysis unit connected to the filter unit, and the above. a cyclone dust collecting part, and connecting the gas analyzing unit, and a gas pipe portion to which the filter unit is installed, it is installed in the gas pipe section, under flow of the filter portion in the gas pipe section, internal standard A first cleaning gas introduction section for introducing a cleaning gas containing at least one of a substance and a sensitizer, and an exhaust side of the cyclone dust collecting section, and an upper portion of the cyclone dust collecting section and the filter section. A second cleaning gas introduction unit which is arranged directly above and introduces a cleaning gas containing at least one of an internal standard substance and a sensitizer from the upper part of the cyclone dust collecting unit into the inside of the cyclone dust collecting unit, and the second cleaning gas collecting unit. It is connected to the cleaning gas introduction part of the above, and is installed inside the suction pipe part that connects the intake part that sucks the air inside the cyclone dust collector part and the cyclone dust collector part, and is installed in the cyclone dust collector part. It has a gas nozzle part that introduces the cleaning gas from the upper part into the inside of the cyclone dust collecting part , and at least in the cleaning mode that cleans the filter part, from the analysis mode in which the fine particles are analyzed by the gas analysis part. As the flow rate of the cleaning gas introduced from the first cleaning gas introduction unit increases , the second cleaning gas introduction unit of the filter unit and the cyclone dust collector unit passes through the gas nozzle unit. The cleaning gas is directly injected onto the inner wall .
Other solutions will be described as appropriate in the embodiments.

According to the present invention, the inside of the fine particle analyzer can be cleaned without stopping and disassembling the fine particle analyzer.

It is a schematic diagram (before introduction of cleaning gas) of the fine particle analysis system 100 which concerns on 1st Embodiment. It is a schematic diagram (after introduction of cleaning gas) of the fine particle analysis system 100 which concerns on 1st Embodiment. It is a photograph of the primary filter 16 before cleaning by the method of this embodiment. It is a photograph of the primary filter 16 after cleaning by the method of this embodiment. It is a flowchart (first method) which shows the procedure of the cleaning process performed in 1st Embodiment. It is a flowchart (second method) which shows the procedure of the cleaning process performed in 1st Embodiment. It is a figure which shows the structure of the fine particle analysis system 100a which concerns on 2nd Embodiment. It is a figure which shows the structure of the fine particle analysis system 100b which concerns on 3rd Embodiment. It is a figure which shows the structure of the fine particle analysis system 100c which concerns on 4th Embodiment. It is a figure which shows the structure of the fine particle analysis system 100d which concerns on 5th Embodiment. It is a figure which shows the structure of the fine particle analysis system 100e which concerns on 6th Embodiment.

Hereinafter, embodiments (referred to as “embodiments”) for carrying out the present invention will be described with reference to the accompanying drawings. In the present embodiment, specific examples based on the principle of the present invention are shown, but these are for the purpose of understanding the present invention and are never used for a limited interpretation of the present invention. It's not a thing. Modifications by combination or substitution of the following embodiments with known techniques are also included in the scope of the present invention. In all the drawings for explaining the embodiments, those having the same function are designated by the same reference numerals, and the repeated description thereof will be omitted.

[First Embodiment]
First, the first embodiment of the present invention will be described with reference to FIGS. 1 to 5.
FIG. 1 is a schematic view (before introduction of cleaning gas) of the fine particle analysis system 100 according to the first embodiment. Further, FIG. 2 is a schematic view (after introduction of the cleaning gas) of the fine particle analysis system 100 according to the first embodiment.
As shown in FIG. 1, the fine particle analysis system 100 includes a fine particle analysis device 10, a data processing device 41, and a control device 51.
As shown in FIG. 1, the fine particle analyzer 10 includes an intake device (intake unit) 11, a cyclone dust collector (cyclone dust collector) 14, a heater 15, and a primary filter (filter unit) 16. Further, the fine particle analyzer 10 includes a secondary filter 17, a cleaning gas introduction device ( first cleaning gas introduction unit) 21, and a gas analyzer (gas analysis unit) 31. The primary filter 16 is a heating filter. Of these, the cleaning gas introduction device 21 is a characteristic portion of the present embodiment. The data processing device 41 is connected to the gas analyzer 31. Then, the data processing device 41 acquires data from the gas analyzer 31 and analyzes the acquired data.

The cyclone dust collector 14 has a fine particle suction port (fine particle suction portion) 13. External gas (air or the like) is sucked into the inside of the cyclone dust collector 14 from the fine particle suction port 13 by the intake air of the intake device 11 connected to the cyclone dust collector 14. For example, when an inspection object (not shown) such as an IC card is brought close to the fine particle suction port 13, the fine particles P adhering to the inspection object are sucked from the fine particle suction port 13. The sucked fine particles P are sucked into the inside of the cyclone dust collector 14 via the introduction pipe 19. As in Patent Documents 1 and 2, gas is injected from an air nozzle installed in the fine particle suction port 13 to blow the gas onto the inspection object to peel off the fine particles P, and the peeled fine particles P are sucked from the fine particle suction port 13. It may be done.

Further, the control device 51 controls the cleaning gas introduction device 21 and the intake device 11. The processing performed by the control device 51 will be described later.
The data processing device 41 and the control device 51 may be integrated.

The concentration of the exfoliated fine particles P in air is very low. Therefore, it is difficult to perform the analysis by the gas analyzer 31 as it is. Therefore, the cyclone dust collector 14 is provided between the gas analyzer 31 and the fine particle suction port 13. By concentrating with the cyclone dust collector 14, the concentration of the exfoliated fine particles P can be increased, and the analysis can be performed with the gas analyzer 31.

The cyclone dust collector 14 separates and concentrates the fine particles P sucked together with the air flow. A mass spectrometer or an ion mobility analyzer, which is a typical gas analyzer 31, can generally suck only a sample flow rate of 1 L / min or less. For example, it is assumed that gas is injected from an air nozzle (not shown) at the fine particle suction port 13 at a flow rate of 40 L / min, and the fine particles P are separated from the inspection object. If the gas analyzer 31 sucks only 1 L / min in the air flow of 40 L / min, the inspection sensitivity becomes 1/40.

Therefore, as in the present embodiment, by installing the cyclone dust collector 14 between the fine particle suction port 13 and the gas analyzer 31, the deposits can be separated and concentrated from the air flow. The cyclone dust collector 14 can use centrifugal force to collect a sample having a particle size and density above a certain level in the lower part of the cyclone dust collector 14. For example, under certain conditions, fine particles P having a particle size of 1 μm or more rotate in the cyclone dust collector 14 and are separated into the outer peripheral side in the cyclone dust collector 14 by centrifugal force. The radius of gyration of the rotational motion in the cyclone dust collector 14 decreases toward the lower side of the cyclone dust collector 14. The deposits having a particle size of less than 1 μm are discharged from the central suction pipe (suction pipe portion) 12 together with the air flow by the intake device 11. The minimum particle size (separation limit particle size) of the fine particles P separated from the air flow by the rotational motion changes depending on the configuration of the cyclone dust collector 14 and the suction flow rate of the intake device 11.

For example, explosive fine particles, which are dangerous substances, usually have a particle size of about 5 to 100 μm, so it is preferable to recover the fine particles P having this particle size. Even if chemical substances, harmful substances, dangerous substances, combustible substances, biological agents, viruses, bacteria, genes, environmental substances, etc. are detected as long as they are attached to the inspection target as well as explosive particles. good.

The fine particles P collected at the lower part of the cyclone dust collector 14 settle into the heater 15 as they are. The heater 15 is provided with a primary filter 16. The settled fine particles P are collected by the primary filter 16 and vaporized by being heated by the heater 15. The vaporized fine particles P pass through the secondary filter 17 and are introduced into the gas analyzer 31. The secondary filter 17 is not always necessary, but has a role of preventing the fine particles P that have passed through the primary filter 16 from being introduced into the gas analyzer 31.

The heater 15 heats the fine particles P at, for example, 200 ° C. The temperature of the heater 15 may be any temperature as long as the collected fine particles P can be vaporized, and may be changed depending on the components of the fine particles P to be inspected. The primary filter 16 and the secondary filter 17 may have a filtration accuracy capable of capturing fine particles P having a particle size of 1 μm or more. For example, as the primary filter 16 and the secondary filter 17, stainless steel filters having a filtration accuracy of 1 to 50 μm can be used. The diameters and filtration accuracy of the primary filter 16 and the secondary filter 17 do not necessarily have to be the same. Further, the gas pipe (gas pipe portion) 18 connecting the heater 15 and the gas analyzer 31 is also heated. This is to prevent the molecules vaporized by the heater 15 from adsorbing to the inner wall of the gas pipe 18. The gas pipe 18 between the heater 15 and the gas analyzer 31 is not always necessary, and the heater 15 and the gas analyzer 31 may be directly connected to each other. In this case, the secondary filter 17 is omitted.

As the gas analyzer 31, for example, a linear ion trap mass spectrometer can be used. Further, as the gas analyzer 31, a quadrupole ion trap mass spectrometer, a quadrupole filter mass spectrometer, a triple quadrupole mass spectrometer, a time-of-flight mass analyzer, a magnetic field mass spectrometer, etc. are applied. You may. Alternatively, an ion mobility analyzer or the like may be used as the gas analyzer 31. Further, as the gas analyzer 31, an apparatus in which an ion mobility analyzer and a mass spectrometer are connected can also be used. Further, an apparatus using various light sources such as fluorescence, infrared rays, and ultraviolet rays may be used as the gas analyzer 31. Further, a semiconductor sensor may be used, and any gasified sample may be used as long as it can be analyzed.

When the mass spectrometer 31 is used as the gas analyzer 31, the data processing device 41 analyzes the mass spectrum measured by the gas analyzer 31 (mass spectrometer). Then, the data processing device 41 identifies and identifies the components of the fine particles P from the analyzed mass spectrum. For example, if the fine particle analyzer 10 is a dangerous substance detection device, the data processing device 41 stores a database related to dangerous substances in advance. In this database, threshold values for identifying the components of dangerous substances and determining the concentration are set. When the concentration of the detected component exceeds the specified threshold value, the data processing device 41 makes a positive determination. Not only the mass spectrometer but also other gas analyzers 31 such as the ion mobility analyzer 31 analyze the fine particles P by collating with the database.

The fine particle analyzer 10 can automatically perform a series of analysis sequences in which the collected fine particles P are collected by the cyclone dust collector 14, heated and vaporized, and analyzed by the gas analyzer 31 in real time. Here, a large amount of fine particles P may be sucked at one time, or a large amount of fine particles P may be sucked as a result of long-term operation. In such a case, the fine particles P may be deposited on the inner wall of the primary filter 16 and the cyclone dust collector 14.

For example, as described above, when the fine particles P are deposited on the primary filter 16, heat is not transferred and does not vaporize even if new fine particles P fall on the primary filter 16, or even if vaporized, gas is deposited on the deposited fine particles P. Occurs that the particles are adsorbed. Then, the vaporized gas of the fine particles P is not introduced into the gas analyzer 31, which leads to a decrease in the sensitivity of the fine particle analyzer 10.

In the present embodiment, in order to remove the fine particles P deposited on the primary filter 16, the cleaning gas introduction device 21 which is a characteristic part of the present embodiment is installed. The cleaning gas introduction device 21 introduces cleaning gas for cleaning the primary filter 16 into the gas pipe 18. Here, the cleaning gas may be air or may contain a substance for cleaning the primary filter 16.
The cleaning gas introduction device 21 may be located between the gas analyzer 31 and the primary filter 16, and the position of the secondary filter 17 is irrelevant.

For example, consider a case where the intake device 11 sucks gas at 100 L / min, the gas analyzer 31 sucks gas at 1 L / min, and the supply of cleaning gas from the cleaning gas introduction device 21 is 0 L / min. At this time, the fine particle suction port 13 sucks in a total of 101 L / min of gas. Of that amount, 100 L / min is spirally rotated inside the cyclone dust collector 14 and then exhausted from the suction pipe 12. When the cyclone phenomenon is occurring, an updraft is generated in the inner central portion of the cyclone dust collector 14 (arrow A12 in FIG. 1). However, since the fine particle analyzer 10 has a suction of 1 L / min on the gas analyzer 31 side, a downdraft is generated in the vicinity of the primary filter 16 as shown in FIG. 1 (arrow A11 in FIG. 1). Therefore, the gas vaporized from the fine particles P collected by the primary filter 16 flows downward and is introduced into the gas analyzer 31.

Under this circumstance, it is assumed that the cleaning gas introduction device 21 introduces the cleaning gas into the gas pipe 18 at 1 L / min, for example. In this case, the introduction flow rate of the cleaning gas coincides with the suction flow rate of the gas analyzer 31. Then, the cleaning gas introduced from the cleaning gas introduction device 21 is sucked toward the gas analyzer 31 side, so that the suction force to the gas analyzer 31 near the primary filter 16 is weakened. As a result, as shown in FIG. 2, no downdraft is generated in the vicinity of the primary filter 16. In the vicinity of the primary filter 16, no downdraft is generated, so that the updraft generated by the cyclone phenomenon is rather affected. That is, as the cleaning gas is introduced from the cleaning gas introduction device 21 into the gas pipe 18, as shown in FIG. 2, the influence of the updraft due to the cyclone phenomenon becomes stronger in the vicinity of the primary filter 16 (FIG. 2). Arrow A13).

In this way, when an updraft is generated in the vicinity of the primary filter 16, the fine particles P deposited on the primary filter 16 are separated from the primary filter 16 by the updraft and rise. The separated / raised fine particles P are discharged to the outside of the cyclone dust collector 14 (outside the fine particle analyzer 10) through the suction pipe 12 due to the updraft in the cyclone dust collector 14. This is the cleaning mechanism of the primary filter 16 which is a feature of this embodiment.

FIG. 3A is a photograph of the primary filter 16 before cleaning by the method of the present embodiment, and FIG. 3B is a photograph of the primary filter 16 after cleaning by the method of the present embodiment.
The white portion in the center in FIG. 3A is the deposited portion of the fine particles P.
As shown in FIG. 3A, fine particles P are accumulated before cleaning, but in FIG. 3B, the white portion in the central portion in FIG. 3A disappears. That is, as shown in FIG. 3B, it can be seen that most of the fine particles P disappear from the filter after cleaning.

The explanation is returned to FIG.
Here, assuming that the intake flow rate of the gas analyzer 31 is x and the cleaning gas introduction flow rate of the cleaning gas introduction device 21 is y, when y> x, the airflow is upward with the primary filter 16 regardless of the cyclone phenomenon. Occurs. That is, when y> x, of the cleaning gas introduced from the cleaning gas introduction device 21, the cleaning gas not sucked into the gas analyzer 31 flows back to the gas pipe 18 toward the primary filter 16. As a result, an updraft is generated in the vicinity of the primary filter 16, and the cleaning effect is improved.

However, even if y <x, there is a certain cleaning effect due to the influence of the updraft due to the cyclone phenomenon. That is, even if y <x, the suction force toward the gas analyzer 31 near the primary filter 16 is weakened by the introduction of the cleaning gas from the cleaning gas introduction device 21. Therefore, if the suction force to the gas analyzer 31 side is less than the updraft due to the cyclone phenomenon, the cleaning effect can be obtained.

It is also effective to increase the intake amount of the intake device 11. When the intake amount of the intake device 11 is increased, the updraft in the inner central portion of the cyclone dust collector 14 becomes stronger, so that the updraft in the vicinity of the primary filter 16 also becomes stronger, and the cleaning effect is enhanced.

The present embodiment has two states, an analysis mode and a cleaning mode, and is characterized in that the cleaning gas introduction flow rate from the cleaning gas introduction device 21 is changed between analysis and cleaning. Here, it is not always necessary to set the cleaning gas introduction flow rate from the cleaning gas introduction device 21 to 0 L / min in the analysis mode. That is, even in the analysis mode, if y <x and the suction force to the gas analyzer 31 side> the updraft due to the cyclone phenomenon, even if the cleaning gas is introduced from the cleaning gas introduction device 21, the gas analyzer Analysis by 31 is possible. For example, the cleaning gas may be introduced from the cleaning gas introduction device 21 at about 0.1 L / min at the time of analysis. By doing so, even if the cleaning gas is introduced from the cleaning gas introduction device 21 in the analysis mode, the vaporized gas of the fine particles P can be introduced into the gas analyzer 31.

Further, as the cleaning gas, an internal standard substance or a sensitizer may be used.
In such a case, the cleaning gas introduction device 21 plays a role of cleaning the primary filter 16 as well as a role of introducing an internal standard substance and a sensitizer for increasing the sensitivity of the gas analyzer 31.
The cleaning gas, the internal standard substance, and the sensitizer may be separately stored in the cleaning gas introduction device 21, and the gas introduced into the gas pipe 18 may be separated by a valve or the like (not shown).

When the gas analyzer 31 is a mass spectrometer, the accuracy of the mass-to-charge ratio, which is the horizontal axis of the mass spectrum obtained as data, is important. When the voltage output in the gas analyzer 31 (mass spectrometer) changes due to the temperature rise of the gas analyzer 31 (mass spectrometer) or the like, the measured mass-to-charge ratio shifts. In order to correct this deviation, it is preferable to always introduce the internal standard substance into the gas analyzer 31 (mass spectrometer) at a constant concentration.

Since the measured mass-to-charge ratio of the internal standard substance is known, the deviation can be corrected by using that value as a reference value. In addition, the introduction of an internal standard substance is important in order to ensure the soundness of the gas analyzer 31.

Further, the fine particle analyzer 10 of the present embodiment can be operated unattended. Therefore, a function for automatically determining whether or not the sensitivity of the gas analyzer 31 has decreased is required. If a certain amount of the internal standard substance is always introduced, the sensitivity state can be grasped based on the gas analysis result of the substance. When measuring both positive and negative ions, it is preferable to introduce both positive and negative internal standard substances. For example, 10,6-Tribromoresorcinol, 5-Bromo, 2-Chlorophenol, 4,4'-Dimethylbenzophenone and the like may be introduced.

Further, for example, when explosive fine particles are the subject of inspection, an organic acid such as lactic acid may be introduced as a sensitizer. At the stage of ionization of the gas analyzer 31, lactic acid is first ionized, and lactic acid ions are added to the explosive particles. As a result, the explosive fine particle ions of the lactic acid adduct are measured by the gas analyzer 31, and the sensitivity can be improved.

As described above, it is possible to introduce an internal standard substance or a sensitizer from the cleaning gas introduction device 21 at about 0.1 L / min at the time of analysis and increase the introduction flow rate at the time of cleaning.
By using the cleaning gas as an internal standard substance or a sensitizer in this way, it is possible to clean the primary filter 16 and maintain good sensitivity of the gas analyzer 31.
A mixed gas of the internal standard substance and the sensitizer may be used as the cleaning gas.

Another feature of this embodiment is that it is not necessary to change the setting of the gas analyzer 31 between the analysis mode and the cleaning mode. When the gas analyzer 31 sensitive to the parameter setting of the mass spectrometer or the like changes the parameters such as the suction flow rate of the gas analyzer 31 in the analysis mode and the cleaning mode, it takes time for the measurement result to stabilize. In the present embodiment, the primary filter 16 can be cleaned by changing only the introduction flow rate of the cleaning gas introduction device 21 or the suction flow rate of the intake device 11 in addition to the introduction flow rate. Then, it is not necessary to change the setting of the gas analyzer 31.

One method is to determine the timing of changing the analysis mode and the cleaning mode based on the pressure. Assuming that the pressure inside the cyclone dust collector 14 is P1, the pressure at the bottom of the primary filter 16 is P2, the conductance of the primary filter 16 is C, and the flow rate passing through the primary filter 16 is Q, the flow rate Q is expressed by the equation (1). ..

Q = C (P1-P2) ... (1)

When the equation (1) is modified with respect to the pressure P2 under the primary filter 16, the following equation (2) is obtained.

P2 = P1- (Q / C) ... (2)

Therefore, when dust accumulates on the primary filter 16 and the conductance C of the primary filter 16 decreases, the pressure P2 (hereinafter, referred to as pressure P2) under the primary filter 16 decreases. Therefore, it is preferable to measure the pressure P2 and change the analysis mode to the cleaning mode when the pressure P2 drops below a certain value. As the pressure P2, the pressure of the gas pipe 18 connecting the heater 15 and the gas analyzer 31 may be measured, or the pressure inside the gas analyzer 31 may be measured. When the gas analyzer 31 is a mass spectrometer or an ion mobility analyzer, it is preferable to measure the pressure of those ion sources 32.

(Washing process)
<Pressure judgment>
FIG. 4 is a flowchart (first method) showing the procedure of the cleaning process performed in the first embodiment.
FIG. 4 shows a method of changing the mode according to the pressure P2.
First, the mode of the fine particle analyzer 10 is the analysis mode (S101).
In such an analysis mode, the pressure P2 is measured at regular intervals, and the control device 51 determines whether or not the pressure P2 is equal to or less than a predetermined threshold value PT (P2 ≦ PT) (S102).
As a result of step S102, when the pressure P2 is larger than the predetermined threshold value PT (S102 → No), the control device 51 returns the process to step S102.

As a result of step S102, when the pressure P2 is equal to or less than the predetermined threshold value PT (S102 → Yes), the control device 51 sets the mode to the cleaning mode (S103).
Then, the control device 51 operates the cleaning gas introduction device 21 to increase the introduction flow rate of the cleaning gas (cleaning gas introduction flow rate) introduced from the cleaning gas introduction device 21 (S111). As described above, the cleaning gas may be an internal standard substance or a sensitizer.
Further, the control device 51 changes (increases) the intake amount of the intake device 11 (S112). However, the process of step S112 is not essential. The cleaning gas introduction flow rate and the intake amount of the intake device 11 may be changed by the control device 51 or manually by the user. By changing (increasing) the intake amount of the intake device 11 in step S112, the updraft of the cyclone dust collector 14 can be strengthened. Thereby, the cleaning effect can be enhanced.

Next, the control device 51 determines whether or not a certain time has elapsed (S121).
As a result of step S121, if a certain time has not elapsed (S121 → No), the control device 51 returns the process to step S121. That is, the cleaning mode is continued.
As a result of step S121, when a certain time has elapsed (S121 → Yes), the control device 51 again determines whether or not the pressure P2 is equal to or less than a predetermined threshold value PT (P2 ≦ PT) (S122).
As a result of step S122, when the pressure P2 is equal to or less than a predetermined threshold value PT (S122 → Yes), the control device 51 determines whether or not the determination in step S122 is continuously performed a predetermined number of times (S123). The predetermined number of times is, for example, 2 to 3 times.
As a result of step S123, if the predetermined number of times has not been performed (S123 → No), the control device 51 returns the process to step S122. That is, the cleaning mode is performed again for a predetermined time.

As a result of step S123, when the determination in step S122 is continuously performed a predetermined number of times (S123 → Yes), it is determined that cleaning by this method is not possible, and an alarm indicating that manual cleaning is required is notified (S124).

As a result of step S122, when the pressure P2 is larger than the predetermined threshold value PT (S122 → No), the control device 51 returns the mode to the analysis mode (S131). That is, the control device 51 returns the cleaning gas introduction flow rate by the cleaning gas introduction device 21 to the value in the analysis mode (S132), and returns the intake amount of the intake device 11 to the value in the analysis mode (S133).
After that, the control device 51 returns the process to step S102.

According to the process shown in FIG. 4, appropriate cleaning is possible.

<Time judgment>
FIG. 5 is a flowchart (second method) showing the procedure of the cleaning process performed in the first embodiment.
As in the process shown in FIG. 4, the analysis mode may be changed to the cleaning mode every time the continuous operation elapses for a certain period of time without determining the pressure P2. Such a method will be described with reference to FIG.
First, the mode of the fine particle analyzer 10 is the analysis mode (S201).
In such an analysis mode, the control device 51 measures the time from the previous cleaning and determines whether or not a certain time has elapsed from the previous cleaning (S202).
As a result of step S202, if a certain time has not elapsed (S202 → No), the control device 51 returns the process to step S202.

As a result of step S202, when a certain time has elapsed (S202 → Yes), the control device 51 sets the mode to the cleaning mode (S203).
Then, the control device 51 operates the cleaning gas introduction device 21 to increase the introduction flow rate of the cleaning gas (cleaning gas introduction flow rate) introduced from the cleaning gas introduction device 21 (S211).
Further, the control device 51 changes (increases) the intake amount of the intake device 11 (S212). However, the process of step S212 is not essential.

Next, the control device 51 determines whether or not a certain time has elapsed (S221).
As a result of step S221, if a certain time has not elapsed (S221 → No), the control device 51 returns the process to step S221. That is, the cleaning mode is continued.
As a result of step S221, when a certain time has elapsed (S221 → Yes), the control device 51 determines whether or not the pressure P2 is equal to or less than a predetermined threshold value PT (P2 ≦ PT) (S222).
As a result of step S222, when the pressure P2 is equal to or less than a predetermined threshold value PT (S222 → Yes), the control device 51 determines whether or not the determination in step S222 is continuously performed a predetermined number of times (S223). The predetermined number of times is, for example, 2 to 3 times.
As a result of step S223, if the predetermined number of times has not been performed (S223 → No), the control device 51 returns the process to step S222. That is, the cleaning mode is performed again for a predetermined time.

As a result of step S223, when the determination in step S222 is continuously performed a predetermined number of times (S223 → Yes), it is determined that cleaning by this method is not possible, and an alarm indicating that manual cleaning is required is notified (S224).

As a result of step S222, when the pressure P2 is larger than the predetermined threshold value PT (S222 → No), the control device 51 returns the mode to the analysis mode (S231). That is, the control device 51 returns the cleaning gas introduction flow rate by the cleaning gas introduction device 21 to the value in the analysis mode (S232), and returns the intake amount of the intake device 11 to the value in the analysis mode (S233).
After that, the control device 51 returns the process to step S202.

According to the process shown in FIG. 5, the primary filter 16 can be kept in a clean state at all times by periodically cleaning the primary filter 16.

Here, the process shown in FIG. 4 and the process shown in FIG. 5 can be compatible with each other.
For example, even if the cleaning is set every 10 hours, the control device 51 shifts to the cleaning mode when the pressure P2 becomes equal to or less than the threshold value PT even if it is within the elapsed time from the previous cleaning. Is also possible.

Further, in the process shown in FIG. 5, the control device 51 may shift to the cleaning mode at a fixed date and time instead of the elapsed time from the previous cleaning. For example, when the control device 51 shifts to the cleaning mode at 7 o'clock every day. This method can also be compatible with the process of FIG. 4 determined by the pressure P2. For example, although it is set to shift to the cleaning mode at 7 o'clock every day, when the pressure becomes equal to or lower than the threshold value at 21:00, the control device 51 shifts to the cleaning mode. Then, even if the control device 51 returns to the analysis mode after the cleaning is completed, the control device 51 shifts to the cleaning mode again at 7 o'clock.

Of course, the user may be forced to shift from the analysis mode to the cleaning mode regardless of pressure or time. Further, the analysis mode may be shifted to the cleaning mode based on the analysis result of the gas analyzer 31. For example, when the fine particles P are deposited on the primary filter 16, the gas vaporized from the fine particles P is continuously introduced into the gas analyzer 31, and the noise signal is increased as compared with the case where the fine particles P are not deposited. .. When the noise signal amount exceeds the threshold value, the control device 51 may shift to the cleaning mode. For example, when the gas analyzer 31 is a mass spectrometer, it is preferable to acquire a large amount of data on the environment in which the gas analyzer 31 (mass spectrometer) is operated. By doing so, it is possible to grasp the ions obtained when the environment-specific fine particles P are deposited on the primary filter 16. In such a case, the control device 51 may shift to the cleaning mode based on the specific amount of ions. Even if the ions that can predict the deposition of fine particles P cannot be specified, the total amount of ions detected so far by the gas analyzer 31 (mass spectrometer) is related to the amount of fine particles P deposited on the primary filter 16. .. Therefore, the transition to the washing mode may be determined based on the total amount of ions detected so far.

According to this embodiment, the primary filter 16 can be cleaned without stopping and disassembling the fine particle analyzer 10.

The cleaning gas introduction device 21 may be configured so as to be able to introduce cleaning gas and adjust the introduction flow rate. For example, a combination of a compressor, a pressure regulator, and a flow rate controller may be used, or a blower may be used instead of the compressor. When a method of injecting gas onto the inspection object to peel off and recover the adhering fine particles P is used, the compressor used for the gas injection and the compressor connected to the cleaning gas introduction device 21 are used. Should be the same. In this way, the configuration of the fine particle analyzer 10 is simplified.

[Second Embodiment]
FIG. 6 is a diagram showing the configuration of the fine particle analysis system 100a according to the second embodiment. In FIGS. 6 to 10, the same configurations as those in FIGS. 1 and 2 are designated by the same reference numerals, and the description thereof will be omitted. Further, in FIGS. 6 to 10, the control device 51 is not shown. Further, the methods shown in FIGS. 4 and 5 are used for the cleaning treatment procedure in FIGS. 6 to 10.
The fine particle analyzer 10a of the fine particle analysis system 100a shown in FIG. 6 differs from the fine particle analyzer 10 shown in FIG. 1 in the following points. That is, the cleaning gas introduction device 21 is not installed in the gas pipe 18 connecting the heater 15 and the gas analyzer 31, and the cleaning gas introduction device (second cleaning gas introduction unit) 21a and cleaning are installed in the suction pipe 12 to which the intake device 11 is connected. Gas nozzle (gas nozzle part) 22 is installed.

In the fine particle analyzer 10a, the cleaning gas is injected into the cyclone dust collector 14 via the cleaning gas nozzle 22 (arrow A21 in FIG. 6). By doing so, not only the fine particles P deposited on the primary filter 16 but also the fine particles P deposited on the inner wall of the cyclone dust collector 14 can be blown off and exhausted.
Here, the cleaning gas is blown onto the primary filter 16 from the cleaning gas nozzle 22 arranged directly above the primary filter 16. By doing so, the cleaning gas is directly sprayed onto the primary filter 16, so that the cleaning effect can be further enhanced.

In the fine particle analyzer 10a, when the cleaning gas is introduced from the cleaning gas nozzle 22 in the analysis mode, the collection efficiency of the cyclone dust collector 14 is affected. Therefore, the cleaning gas introduction flow rate in the analysis mode should be set to approximately 0 L / min. The cleaning gas introduction device 21a is preferably a combination of a compressor, a pressure regulator, and a high-speed valve. For example, a valve regulates the cleaning gas introduction time. For example, it is preferable that the injection pressure of the cleaning gas is set to 0.3 MPa by the pressure regulator, and the cleaning gas injection for about 1 second is repeated about 5 times by the valve. The injected cleaning gas causes the fine particles P deposited on the inner walls of the primary filter 16 and the cyclone dust collector 14 to fly up, be sucked from the suction pipe 12, and are discharged to the outside of the fine particle analyzer 10a.

In the fine particle analyzer 10a, it is desirable that the tip of the cleaning gas nozzle 22 is inside the suction pipe 12 in order to prevent the influence on the cyclone phenomenon (swirl airflow). In order to enhance the cleaning effect while preventing the influence on the cyclone phenomenon, it is preferable that the tip of the gas nozzle 22 is located at the end of the suction pipe 12 on the cyclone dust collector 14 side. Further, as shown in FIG. 6, it is desirable that the cleaning gas nozzle 22 is located at the center of the suction pipe 12.

[Third Embodiment]
FIG. 7 is a diagram showing the configuration of the fine particle analysis system 100b according to the third embodiment.
In the fine particle analyzer 10b of the fine particle analysis system 100b, the cleaning gas introduction device 21b and the gas introduction pipe 23 are arranged below the primary filter 16. The cleaning gas is introduced between the primary filter 16 and the secondary filter 17. This point is the same as that of the fine particle analyzer 10 shown in FIG. 1, but is different from FIG. 1 in that the gas pipe 18b has an L-shaped structure. That is, it differs from the fine particle analyzer 10 shown in FIG. 1 in that the gas analyzer 31 is arranged at a position that cannot be seen from the injection direction of the gas introduction pipe 23. Here, the gas analyzer 31 is connected to one of the L-shaped gas pipes 18b, and the cyclone dust collector 14 is connected to the other. The gas introduction pipe 23 is connected to a bent portion of the L-shaped gas pipe 18b.
This is because the injected cleaning gas does not flow to the gas analyzer 31 side but flows to the primary filter 16 side.

In FIG. 7, the gas pipe 18b is bent at about 90 °, but the angle is not limited to this as long as the injected cleaning gas does not flow into the gas analyzer 31 side.

In the fine particle analyzer 10a shown in FIG. 6 described above, since the cleaning gas is injected from above the primary filter 16, a force acts to press the fine particles P deposited on the primary filter 16 against the primary filter 16. On the other hand, in the fine particle analyzer 10b shown in FIG. 7, the cleaning gas is injected in the direction of passing from the lower side to the upper side of the primary filter 16 (arrow A22 in FIG. 7). Therefore, the fine particle analyzer 10b can enhance the cleaning effect of the primary filter 16 as compared with the fine particle analyzer 10a.

Similar to the fine particle analyzer 10a shown in FIG. 6, the fine particle analyzer 10b also affects the collection efficiency of the cyclone dust collector 14 when the cleaning gas is introduced from the cleaning gas introduction device 21 in the analysis mode. Further, when the cleaning gas is introduced from the cleaning gas introduction device 21 in the analysis mode, the gas vaporized by the primary filter 16 is prevented from flowing into the gas analyzer 31. Therefore, the cleaning gas introduction flow rate in the analysis mode should be set to approximately 0 L / min. The cleaning gas introduction device 21b is preferably a combination of a compressor, a pressure regulator, and a high-speed valve. For example, a valve regulates the cleaning gas introduction time. For example, it is preferable that the injection pressure of the cleaning gas is set to 0.3 MPa by the pressure regulator, and the cleaning gas injection for about 1 second is repeated about 5 times by the valve. The injected cleaning gas causes the fine particles P deposited on the primary filter 16 to fly up, be sucked from the suction pipe 12, and are discharged to the outside of the device.

[Fourth Embodiment]
FIG. 8 is a diagram showing the configuration of the fine particle analysis system 100c according to the fourth embodiment.
The fine particle analyzer 10c of the fine particle analysis system 100c shown in FIG. 8 has a configuration in which the fine particle analyzer 10 shown in FIG. 1 and the fine particle analyzer 10a shown in FIG. 6 are combined. That is, in the fine particle analyzer 10c, the cleaning gas introduction devices 21 and 21a are arranged in the suction pipe 12 and the gas pipe 18. An updraft is generated in the primary filter 16 by the action of the cleaning gas introduction device 21 connected to the gas pipe 18. Further, in that state, the cleaning gas is injected from the upper part of the primary filter 16 by the cleaning gas introduction device 21a having the cleaning gas nozzle 22. As a result, the fine particles P deposited on the primary filter 16 can be discharged more efficiently than the fine particle analyzer 10 and the fine particle analyzer 10a.

[Fifth Embodiment]
FIG. 9 is a diagram showing the configuration of the fine particle analysis system 100d according to the fifth embodiment.
In the fine particle analyzer 10d of the fine particle analysis system 100d shown in FIG. 9, the gas analyzer 31 is shown as being decomposed into an ion source 32 and an ion separation unit 33. In the fine particle analyzer 10d, unlike the fine particle analyzer 10 shown in FIG. 1, the cleaning gas introduction device 21 is connected to the ion source 32. The cleaning effect is the same as that of the fine particle analyzer 10 shown in FIG. 1, and when the cleaning gas is introduced from the cleaning gas introduction device 21, the downward flow of the primary filter 16 is weakened. As a result, the fine particles P accumulated due to the influence of the updraft generated in the cyclone dust collector 14 are discharged to the outside of the fine particle analyzer 10. In this case, the pressure at the ion source 32 may be used as the pressure P2 in FIG.
By doing so, proper cleaning can be performed.

[Sixth Embodiment]
FIG. 10 is a diagram showing the configuration of the fine particle analysis system 100e according to the sixth embodiment.
In the fine particle analyzer 10e of the fine particle analysis system 100e shown in FIG. 10, a lid 24 is installed at the fine particle suction port 13, and a cleaning gas introduction device 21 is arranged below the primary filter 16. The installation position of the cleaning gas introduction device 21 is the same as that of the fine particle analyzer 10 shown in FIG.

In the fine particle analyzer 10e, the fine particles P are sucked into the cyclone dust collector 14 by opening the lid 24 in the analysis mode. Then, in the cleaning mode, the lid 24 is closed (thick arrow in FIG. 10). When the lid 24 is open, gas (air) from the inspection object is introduced into the inside of the cyclone dust collector 14 from the fine particle suction port 13. On the other hand, when the lid 24 is closed, the inflow from the fine particle suction port 13 is stopped, so that only the intake by the intake device 11 is performed. That is, due to the intake by the intake device 11, the inside of the cyclone dust collector 14 has a negative pressure with respect to the outside of the cyclone dust collector 14. As a result, even if a special injection device is not provided, the cleaning gas introduction device 21 is simply opened to the gas pipe 18, and the cleaning gas of the cleaning gas introduction device 21 is sucked into the cyclone dust collector 14. Therefore, even if a special injection device is not provided, the cleaning gas from the cleaning gas introduction device 21 passes through the primary filter 16 and flows to the intake device 11.

As described above, when the lid 24 is closed, the inside of the cyclone dust collector 14 becomes a negative pressure with respect to the outside of the cyclone dust collector 14, so that the fine particles P deposited on the primary filter 16 fly up. Then, the soaring fine particles P are discharged from the suction pipe 12 to the outside of the fine particle analyzer 10.

At this time, if the suction flow rate of the intake device 11 and the introduction flow rate of the cleaning gas introduction device 21 are not balanced, that is, the suction flow rate of the intake device 11> the introduction flow rate of the cleaning gas introduction device 21, the gas analyzer 31 side ( (Inside the gas pipe 18) becomes a negative pressure. In order to solve this problem, in the fine particle analyzer 10e, it is desirable that the cleaning gas introduction device 21 is connected to the atmosphere side via a valve. When this valve is opened, the cleaning gas introduction device 21 is connected to the atmosphere. As described above, when the lid 24 is closed, the inside of the cyclone dust collector 14 becomes a negative pressure with respect to the outside of the cyclone dust collector 14. Then, the lid 24 is closed while the cleaning gas introduction device 21 is connected to the atmosphere, and the cleaning gas introduction device 21 is released to the gas pipe 18. Then, due to the negative pressure in the cyclone dust collector 14, the cleaning gas flows in the directions of the cleaning gas introduction device 21, the primary filter 16, and the intake device 11 without a special injection device. This makes it possible to simplify the configuration of the cleaning gas introduction device 21. Further, since the suction flow rate of the intake device 11 = the introduction flow rate of the cleaning gas introduction device 21, it is possible to prevent the gas analyzer 31 side (inside the gas pipe 18) from becoming a negative pressure.

Further, when the lid 24 is closed, the pressure inside the cyclone dust collector 14 becomes significantly negative as compared with the outside of the cyclone dust collector 14. As a result, the upper pressure of the cleaning gas is increased, so that the degree of cleaning can be improved.

The present invention is not limited to the above-described embodiment, and includes various modifications. For example, the above-described embodiment has been described in detail in order to explain the present invention in an easy-to-understand manner, and is not necessarily limited to those having all the described configurations. Further, it is possible to replace a part of the configuration of one embodiment with the configuration of another embodiment, and it is also possible to add the configuration of another embodiment to the configuration of one embodiment. Further, it is possible to add / delete / replace other configurations with respect to a part of the configurations of each embodiment.

Further, each of the above-mentioned configurations, functions and the like may be realized by hardware by designing a part or all of them by, for example, an integrated circuit. Further, each of the above-described configurations, functions, and the like may be realized by software by a processor such as a CPU interpreting and executing a program that realizes each function. In addition to storing information such as programs, tables, and files that realize each function in HD (Hard Disk), memory, recording devices such as SSD (Solid State Drive), or IC (Integrated Circuit) cards, etc. , SD (Secure Digital) card, DVD (Digital Versatile Disc) and other recording media.
Further, in each embodiment, the control lines and information lines are shown as necessary for explanation, and not all the control lines and information lines are necessarily shown in the product. In practice, almost all configurations can be considered interconnected.

10,10a-10e Fine particle analyzer 11 Intake device (intake section)
12 Suction piping (suction piping section)
13 Fine particle suction port (fine particle suction part)
14 Cyclone dust collector (Cyclone dust collector)
16 Primary filter (filter section)
18 Gas piping (gas piping section)
21 , 2 1b Cleaning gas introduction device ( 1st cleaning gas introduction unit)
21a Cleaning gas introduction device (second cleaning gas introduction unit)
22 Cleaning gas nozzle (gas nozzle part)
24 lid (closure)
31 Gas analyzer (Gas analyzer)
32 Ion source 33 Ion separator 41 Data processing device 51 Control device 100, 100a to 100e Fine particle analysis system P Fine particles

Claims (11)

Cyclone dust collector and
A filter unit connected to the downstream of the cyclone dust collecting unit and heated, and a filter unit
The gas analysis unit connected to the filter unit and
A gas piping unit that connects the cyclone dust collecting unit and the gas analysis unit and is installed with the filter unit.
Installed in the gas pipe section, under flow of the filter portion in the gas pipe portion, a first cleaning gas introduction unit for introducing a cleaning gas containing at least one of the internal standard substance and a sensitizer,
A cleaning gas that is arranged on the exhaust side of the cyclone dust collecting section, is arranged above the cyclone dust collecting section and directly above the filter section, and contains at least one of an internal standard substance and a sensitizer is collected by the cyclone dust collecting section. A second cleaning gas introduction part introduced from the upper part of the part into the inside of the cyclone dust collecting part, and
It is connected to the second cleaning gas introduction section and is installed inside the suction piping section that connects the intake section that sucks the air inside the cyclone dust collecting section and the cyclone dust collecting section, and is installed inside the cyclone collecting section. A gas nozzle part that introduces the cleaning gas from the upper part of the dust part to the inside of the cyclone dust collecting part, and
Have,
At least in the cleaning mode for cleaning the filter unit, the flow rate of the cleaning gas introduced from the first cleaning gas introduction unit is higher than in the analysis mode in which the fine particles are analyzed by the gas analysis unit, and the flow rate is increased. A fine particle analyzer characterized in that the second cleaning gas introducing unit directly injects the cleaning gas onto the inner walls of the filter unit and the cyclone dust collecting unit via the gas nozzle unit. The fine particle analyzer according to claim 1, wherein when the pressure downstream of the filter unit becomes a predetermined value or less, the analysis mode shifts to the cleaning mode. The fine particle analyzer according to claim 1, wherein a predetermined time elapses from the previous cleaning to shift from the analysis mode to the cleaning mode. The fine particle analyzer according to claim 1, wherein, in the analysis mode and the cleaning mode, the suction flow rate of the intake unit is increased in the cleaning mode. The gas pipe portion is bent and
The first cleaning gas introduction unit is installed in the gas piping unit so that the cleaning gas introduced by the first cleaning gas introduction unit does not flow into the gas analysis unit. The fine particle analyzer according to claim 1. It has a fine particle suction part that sucks fine particles introduced into the cyclone dust collecting part.
The fine particle suction portion is provided with a lid portion.
The fine particle analyzer according to claim 1, wherein in the analysis mode, the lid portion is in an open state, and in the cleaning mode, the lid portion is in a closed state. The gas analysis unit is an ion analysis unit.
The fine particle analyzer according to claim 1, wherein when the pressure value of the ion source constituting the ion analysis unit becomes equal to or less than a threshold value, the analysis mode is shifted to the cleaning mode. The cyclone dust collector, the filter unit connected to the downstream of the cyclone dust collector and heated, the gas analysis unit connected to the filter unit, the cyclone dust collector, and the gas analysis unit. connect a gas pipe portion to which the filter unit is installed, is installed in the gas pipe section, the cleaning gas under flow of the filter portion in the gas pipe section, which includes at least one of the internal standard substance and a sensitizer Is arranged on the exhaust side of the first cleaning gas introduction part and the cyclone dust collector part, and is arranged above the cyclone dust collector part and directly above the filter part, and is an internal standard substance and a sensitizer. A second cleaning gas introduction unit that introduces a cleaning gas containing at least one of the above into the inside of the cyclone dust collection unit from the upper part of the cyclone dust collection unit, and a second cleaning gas introduction unit that is connected to the second cleaning gas introduction unit and described above. The cleaning gas is installed inside a suction pipe section that connects an intake section that sucks air inside the cyclone dust collector section and the cyclone dust collector section, and from the upper part of the cyclone dust collector section to the inside of the cyclone dust collector section. In addition to having a fine particle analyzer equipped with a gas nozzle section for introducing
It has a control device that controls the fine particle analyzer, and has a control device.
The control device is
At least in the cleaning mode for cleaning the filter unit, the flow rate of the cleaning gas introduced from the first cleaning gas introduction unit is increased as compared with the analysis mode in which the fine particles are analyzed by the gas analysis unit .
The second cleaning gas introduction unit is
A fine particle analysis system characterized by directly injecting the cleaning gas onto the inner walls of the filter unit and the cyclone dust collecting unit via the gas nozzle unit. The cyclone dust collector, the filter unit connected to the downstream of the cyclone dust collector and heated, the gas analysis unit connected to the filter unit, the cyclone dust collector, and the gas analysis unit. connect a gas pipe portion to which the filter unit is installed, is installed in the gas pipe section, the cleaning gas under flow of the filter portion in the gas pipe section, which includes at least one of the internal standard substance and a sensitizer Is arranged on the exhaust side of the first cleaning gas introduction part and the cyclone dust collector part, and is arranged above the cyclone dust collector part and directly above the filter part, and is an internal standard substance and a sensitizer. A second cleaning gas introduction unit that introduces a cleaning gas containing at least one of the above into the inside of the cyclone dust collection unit from the upper part of the cyclone dust collection unit, and a second cleaning gas introduction unit that is connected to the second cleaning gas introduction unit and described above. The cleaning gas is installed inside the suction pipe section that connects the intake section that sucks the air inside the cyclone dust collector section and the cyclone dust collector section, and from the upper part of the cyclone dust collector section to the inside of the cyclone dust collector section. In addition to having a fine particle analyzer equipped with a gas nozzle section for introducing
In a fine particle analysis system having a control device for controlling the fine particle analyzer,
The control device
The analysis mode in which the analysis by the gas analysis unit is performed is shifted to the cleaning mode in which at least the filter unit is cleaned.
In the cleaning mode, the flow rate of the cleaning gas introduced from the first cleaning gas introduction unit is increased as compared with the analysis mode.
The second cleaning gas introduction unit
A cleaning method comprising directly injecting the cleaning gas onto the inner walls of the filter unit and the cyclone dust collecting unit via the gas nozzle unit. The control device is
The cleaning method according to claim 9 , wherein when the pressure downstream of the filter unit becomes a predetermined value or less, the analysis mode is shifted to the cleaning mode. The control device is
The cleaning method according to claim 9 , wherein a predetermined time elapses from the previous cleaning to shift from the analysis mode to the cleaning mode.

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