JP6927502B2 - Laser device - Google Patents

Description

The present invention relates to a laser device.

In recent years, in the field of processing equipment such as cutting equipment and marking equipment, the amount of laser equipment using a laser beam having excellent physical characteristics has been increasing.

Generally, a laser device includes a laser oscillator that generates and oscillates a laser beam, an optical system that transmits the laser beam oscillated from the laser oscillator according to a predetermined transmission method, and a laser beam transmitted via the optical system. Includes a laser nozzle that collects light and irradiates the object to be processed.

On the other hand, when the alignment state of the laser oscillator and the optical system is changed due to external force or vibration applied from the outside and the optical path of the laser beam is distorted, the laser beam is deviated from the predetermined reference optical path to the laser nozzle. Be transmitted. Then, the laser beam emitted from the laser nozzle irradiates the object to be processed in a state deviated from the predetermined processing position, which adversely affects the processing quality of the object to be processed.

By the way, since the conventional laser apparatus does not include a configuration capable of diagnosing and correcting the optical path of the laser beam, there is a problem that the optical path distortion of the laser beam cannot be quickly dealt with.

The present invention is to solve the above-mentioned problems of the prior art, and to provide a laser apparatus having an improved structure so that the optical path distortion and energy loss of the laser beam can be automatically diagnosed. There is a purpose.

Another object of the present invention is to provide a laser apparatus having an improved structure so that the optical path distortion and energy loss of the laser beam can be automatically corrected.

The laser apparatus according to a preferred embodiment of the present invention for solving the above-mentioned problems is a laser oscillator that oscillates a laser beam, a mirror mount, and a mount-side optical member that transmits the laser beam oscillated from the laser oscillator. A mirror mount assembly including an aligner that adjusts the alignment state of the mount-side optical member so that the optical path of the laser beam can be switched, and the laser beam transmitted from the mount-side optical member as an object to be processed. A laser nozzle assembly including a laser nozzle to irradiate, a nozzle-side sensing member that senses the laser beam and outputs a nozzle-side optical path signal corresponding to the mode of the optical path, and the laser based on the nozzle-side optical path signal. When it is diagnosed that the diagnostic unit that diagnoses whether the beam is irradiated to a predetermined reference position of the object to be processed and the actual position where the laser beam is irradiated and the reference position do not match each other. Including a controller including a correction unit that drives the aligner and corrects the optical path distortion of the laser beam so that the laser beam is irradiated to the reference position.

Preferably, the diagnostic unit calculates a vector value of the optical path distortion generated in the process of transmitting the laser beam to the laser nozzle assembly based on the nozzle-side optical path signal, and the correction unit calculates the vector value of the optical path distortion. Drives the aligner so that only the switching value corresponding to the vector value of the optical path distortion can be switched, and corrects the optical path distortion.

Preferably, a plurality of the mirror mount assemblies are installed so that the laser beams can be sequentially transmitted by using the mount-side optical member according to a predetermined reference transmission order.

Preferably, the compensator selectively selects the aligner provided in at least one of the mirror mount assemblies so that the optical path is switched by the switching value corresponding to the vector value of the optical path distortion. Drive.

Preferably, the mirror mount has a mirror plate on which the mount-side optical member is mounted, and the aligner adjusts the alignment mode of the mirror plate and the mount-side optical member according to a rotation direction and a rotation angle. It has an adjustment dial that is mounted on the mirror plate so as to be able to switch the optical path, and an actuator that rotationally drives the adjustment dial and is controlled by the correction unit.

Preferably, the controller further comprises a storage unit in which an optical path switching function indicating the mutual relationship between the rotation direction and the rotation angle and the switching value is individually pre-stored in each of the mirror mount assemblies, and the correction is performed. The unit selectively drives the actuator provided in at least one of the mirror mount assemblies based on the optical path switching function to correct the optical path distortion.

Preferably, when the predetermined learning conditions are satisfied, the correction unit individually drives the actuators provided in each of the mirror mount assemblies according to the predetermined learning mode, and the laser beam. The laser oscillator is driven so as to oscillate, and when the actuators provided in each of the mirror mount assemblies are individually driven in the learning mode, the storage unit analyzes the interrelationship and the said. The optical path switching function for each of the mirror mount assemblies is updated individually.

Preferably, the learning condition is at least whether or not a predetermined reference time has elapsed after updating the optical path switching function, and whether or not laser processing of the processing object has stopped. Including one.

Preferably, the learning mode is set so that the adjustment dial provided in each of the mirror mount assemblies is driven to rotate stepwise by a predetermined reference angle in a predetermined reference direction.

Preferably, when the learning condition is satisfied, the correction unit drives the actuators provided in each of the mirror mount assemblies stepwise according to the reference transmission order.

Preferably, the laser nozzle assembly further comprises a nozzle-side optical member that selectively guides at least a portion of the laser beam to the nozzle-side sensing member.

Preferably, the nozzle-side optical member branches by reflecting and transmitting the laser beam according to a predetermined branching ratio, and selectively guides at least a part of the laser beam to the nozzle-side sensing member. It has a nozzle-side beam splitter.

Preferably, the laser oscillator selectively oscillates either processing light or indicating light having different wavelength bands and the same optical axis, and the nozzle-side beam splitter causes at least one of the indicating lights. It is composed of a nozzle-side dichroic mirror that selectively guides a part of the nozzle-side sensing member.

The present invention relates to an optical path distortion correction method for a laser device according to another preferred embodiment of the present invention described above, and is output from (a) a nozzle-side sensing member that senses optical path information of a laser beam transmitted to a laser nozzle. Based on the nozzle-side optical path signal, a step of diagnosing whether the laser beam emitted from the laser nozzle is irradiated to a predetermined reference position of the object to be processed, and (b) the laser beam is the object to be processed. When it is diagnosed that the actual position irradiated to the object and the reference position do not match each other, one of the mount-side optical members that sequentially transmits the laser beam to the laser nozzle according to a predetermined reference transmission order. The alignment state of at least one of the mount-side optical members is selectively changed according to an optical path switching function individually determined for each mirror mount assembly in which one is installed to correct the optical path distortion of the laser beam. Including steps.

Preferably, in the step (a), a vector value indicating the magnitude and direction of the optical path distortion is calculated based on the nozzle-side optical path signal, and in the step (b), it is based on the vector value of the optical path distortion. Therefore, the alignment state of at least one of the mount-side optical members is selectively changed.

Preferably, in step (b), at least one of the adjustment dials capable of adjusting the alignment state of any one of the mount-side optical members is selectively selected according to the rotation direction and rotation angle corresponding to the vector value. It is driven to rotate.

Preferably, in step (b), the at least one adjustment dial is rotationally driven by selectively driving any one of the actuators axially coupled to any one of the adjustment dials.

Preferably, in the step (b), the mount-side optical member has a total switching value in which the total switching value of the optical path by adjusting the alignment state of the mount-side optical member corresponds to the vector value. At least one of them is individually adjusted according to the optical path switching function.

Preferably, the optical path switching function is a switching value of the optical path by adjusting the rotation direction and the rotation angle of any one of the adjustment dials and the alignment state of the mount-side optical member interlocking with the adjustment dial. Each mirror mount assembly is individually defined to show its interrelationship with.

Preferably, (c) when the predetermined learning conditions are satisfied, one of the adjustment dials is driven according to the predetermined learning mode, and the laser oscillator is driven so as to oscillate the laser beam. And (d) said that when any one of the adjustment dials is individually driven in the learning mode, the interrelationships are analyzed and the mirror mount assembly provided with any one of the adjustment dials. Further including a step of updating the optical path switching function, in the step (b), the optical path distortion is corrected with reference to the optical path switching function updated in the step (d).

Preferably, the step (c) and the step (d) are repeated so as to sequentially update the optical path switching function for each of the mirror mount assemblies according to the reference transmission order.

Preferably, the learning condition is at least whether or not a predetermined reference time has elapsed after updating the optical path switching function, and whether or not laser processing of the processing object has stopped. Including one.

Preferably, the learning mode is set so that any one of the adjustment dials is driven to rotate in a predetermined reference direction stepwise by a predetermined reference angle.

Since the present invention can automatically diagnose and correct the optical path distortion and energy loss of the laser beam with respect to the laser apparatus, it is possible to improve the processing quality of the object to be processed.

It is a figure which shows the schematic structure of the laser apparatus which concerns on a preferable embodiment of this invention. It is a partial cross-sectional view of the mirror mount assembly which mounted the mounting side beam splitter. It is a partial cross-sectional view of the mirror mount assembly which mounted the mount side reflection mirror. It is a top view of the mirror mount assembly. FIG. 5 is a partial cross-sectional view of a mirror mount assembly showing a mode in which processing light is absorbed by a fixed block. It is a figure for demonstrating the method of deriving the mount-side sensing optical path by using the mount-side sensing member. It is a figure which shows the mode of the processed optical path and the mounting side sensing optical path when the laser beam is transmitted to the mount side beam splitter without distortion of the optical path. It is a figure which shows the mode of the processed optical path and the mounting side sensing optical path when the laser beam is transmitted to the mount side beam splitter in the state where the optical path is distorted. It is a figure which shows the mode of the energy distribution of the laser beam transmitted to the mounting side beam splitter without energy loss. It is a figure which shows the mode of the energy distribution of a laser beam transmitted to a beam splitter on a mount side in a state where energy is lost. It is a figure which shows the schematic structure of the laser nozzle assembly. It is a figure for demonstrating the method of deriving the nozzle-side sensing optical path by using the nozzle-side sensing member. It is a figure which shows the mode of the processed optical path and the nozzle-side sensing optical path when the laser beam is transmitted to the nozzle-side beam splitter without distortion of the optical path. It is a figure which shows the mode of the processing optical path and the nozzle-side sensing optical path when a laser beam is transmitted to a nozzle-side beam splitter in a state where the optical path is distorted. It is a figure which shows the mode of the energy distribution of the laser beam transmitted to the nozzle side beam splitter without energy loss. It is a figure which shows the mode of the energy distribution of a laser beam transmitted to a beam splitter on a nozzle side in a state where energy is lost. It is a figure which shows the mode that the optical path is switched by a unit aligner. It is a figure which shows the other mode in which an optical path is switched by a unit aligner. It is a figure which shows the mode that the optical path is switched by the combination of a plurality of aligners. It is a figure which shows the mode in which the actual position on a work object to which a laser beam is irradiated is adjusted by an aligner. It is a flowchart for diagnosing and correcting the laser apparatus which concerns on a preferred embodiment of this invention.

Hereinafter, some examples of the present invention will be described in detail with reference to exemplary drawings. When adding reference codes to the components of each drawing, it should be noted that the same components have the same code as much as possible, even if they are displayed on other drawings. Must be. Further, in explaining the embodiment of the present invention, if it is determined that a specific description of the related known configuration or function hinders the understanding of the embodiment of the present invention, the detailed description thereof will be omitted. ..

In describing the components of the embodiments of the present invention, terms such as first, second, A, B, (a), and (b) can be used. Such a term is merely for distinguishing the component from other components, and the term does not limit the essence, order or order of the component. Also, unless otherwise defined, all terms used herein, including technical or scientific terms, are the same as those generally understood by those with ordinary knowledge in the technical field to which the present invention belongs. It has meaning. Terms such as those defined in commonly used dictionaries must be construed to have meanings that are consistent with the contextual meaning of the relevant technology and are ideal unless explicitly defined in this application. Or it is not interpreted as an overly formal meaning.

FIG. 1 is a diagram showing a schematic configuration of a laser apparatus according to a preferred embodiment of the present invention.

Referring to FIG. 1, a laser apparatus 1 according to a preferred embodiment of the present invention transmits a laser oscillator 10 that oscillates a laser beam LB and a laser beam LB transmitted from the laser oscillator 10 according to a predetermined reference transmission sequence S. The optical system 20 provided so as to be able to provide the optical path information of the laser beam LB while sequentially transmitting, and the laser beam LB transmitted from the optical system 20 are condensed and irradiated to the processing object P, and the laser beam LB A laser that controls the general drive of the laser nozzle assembly 30 provided so as to be able to provide optical path information and the laser apparatus 1 and laser based on the information on the optical path of the laser beam LB provided by the optical system 20 and the laser nozzle assembly 30. A controller 40 or the like that diagnoses and corrects the distortion of the optical path of the beam LB can be included.

First, the laser oscillator 10 is provided so that the laser beam LB of any one of the processed light LBp and the indicated light LBm having different wavelength bands can be selectively oscillated along the processed optical path OPp. The processed optical path OPp is an actual optical path of the laser beam LB that travels so that the laser beam LB oscillated from the laser oscillator 10 passes through the optical system 20 and the laser nozzle assembly 30 in sequence and then irradiates the processed object P. say. Such a processed optical path OPp may change depending on the alignment state of the mount-side optical member 220 and other members that affect the processed optical path OPp, which will be described later.

Further, the laser oscillator 10 can be provided so that the processing light LBp and the indicating light LBm have the same optical axis as each other. Then, the processed light LBp and the indicated light LBm oscillated from the laser oscillator 10 can be transmitted along the same optical path to each other.

The processing light LBp is a laser beam LB used for laser processing of the processing object P, and has a wavelength band that is absorbed by the processing object P by a predetermined absorption rate or more. The type of laser beam that can be used as the processing light LBp is not particularly limited. Depending on the type of the object to be processed P, at least one of various types of laser beams can be used as the processing light LBp.

The indicated light LBm is a laser beam LB for diagnosing the optical path of the laser beam LB, and has a visible light wavelength band in which the beam spot of the laser beam LB can be visually observed or photographed by a camera. In particular, the indicator light LBm preferably has a lower output than the processed light LBp so that the sensing members 250 and 350 described later are not damaged by the indicator light LBm, but the indicator light LBm is not limited to this. The type of laser beam that can be used as the indicator light LBm is not particularly limited. Depending on the types of sensing members 250 and 350 described later, at least one of various types of laser beams can be used as the indicator light LBm.

The controller 40 can control the laser oscillator 10 so as to selectively oscillate the laser beam LB of any one of the processing light LBp and the indicating light LBm according to a predetermined process condition. For example, the controller 40 can control the laser oscillator 10 so as to oscillate the processing light LBp when the processing object P is laser-processed. For example, when diagnosing the optical path of the laser beam LB, the controller 40 can control the laser oscillator 10 so as to oscillate the indicated light LBm.

On the other hand, the controller 40 has been described as selectively oscillating the laser beam LB of any one of the processing light LBp and the indicating light LBm, but the present invention is not limited to this. That is, the controller 40 may be provided so that other types of laser beams can be selectively oscillated in addition to the processing light LBp and the indicating light LBm.

Next, the optical system 20 is installed between the laser oscillator 10 and the laser nozzle assembly 30 so that the laser beam LB oscillated from the laser oscillator 10 can be transmitted to the laser nozzle assembly 30 along the processed optical path OPp. NS. Therefore, as shown in FIG. 1, the optical system 20 can include a mirror mount assembly 200 having a mount-side optical member 220 described later.

The number of mirror mount assemblies 200 installed is not particularly limited. For example, the optical system 20 can include a plurality of mirror mount assemblies 200 so that the laser beam LB can be sequentially transmitted according to the reference transmission order S by using the plurality of mount-side optical members 220. The specific structure of such a mirror mount assembly 200 will be described later.

Next, the laser nozzle assembly 30 is installed so that the laser beam LB transmitted from the optical system 20 along the processing optical path OPp can irradiate the processing object P. The specific structure of such a laser nozzle assembly 30 will be described later.

FIG. 2 is a partial cross-sectional view of the mirror mount assembly on which the mount-side beam splitter is mounted, and FIG. 3 is a partial cross-sectional view of the mirror mount assembly on which the mount-side reflective mirror is mounted.

Further, FIG. 4 is a plan view of the mirror mount assembly, and FIG. 5 is a partial cross-sectional view of the mirror mount assembly showing a mode in which the processing light is absorbed by the fixed block.

As shown in FIG. 2, in each mirror mount assembly 200, at least a part of the mirror mount 210 and the laser beam LB transmitted along the processed optical path OPp is related to the processed optical path OPp in a predetermined first manner. To the mount-side optical member 220 that selectively guides the mount-side sensing optical path OPs1 and the aligner 230 that adjusts the alignment state of the mount-side optical member 220, and the laser beam LB traveling along the mount-side sensing optical path OPs1. A noise filter 240 that removes the contained noise, a condenser lens 250 that collects the laser beam LB whose noise has been removed by the noise filter 240, and a laser beam LB that has been focused by the condenser lens 250 are sensed and mounted. It is possible to have a mount-side sensing member 260 or the like that outputs a mount-side optical path signal corresponding to the aspect of the side-sensing optical path OPs1.

The mirror mount 210 is provided so as to support the mount-side optical member 220 so that the laser beam LB transmitted along the processed optical path OPp is incident on the mount-side optical member 220. That is, in the mirror mount 210, the laser beam LB transmitted along the processing optical path OPp from the mirror mount assembly 200 located in the first order of the reference transmission sequence S in the laser oscillator 10 or the mirror mount assembly 200 is mounted-side optical member. The mount-side optical member 220 is provided so as to be supportable so as to be incident on the 220.

The structure of such a mirror mount 210 is not particularly limited. For example, as shown in FIG. 2, in the mirror mount 210, a base block 211 that provides a traveling passage for the laser beam LB and a mount-side optical member 220 are installed, and the laser beam LB that passes through the base block 211 is mounted-side optical. The mirror plate 212 arranged so as to be incident on the member 220, the fixing block 213 mounted on the mirror plate 212 so that the mount-side optical member 220 can be fixed, and the base block 211 and the mirror plate 212 are fastened to each other. It may have a fastening member 214, a sensor block 215 on which the mount-side sensing member 260 is installed, and the like.

As shown in FIG. 2, the base block 211 can have a laser passage 211a formed inside so that the laser beam LB can travel. The base block 211 is preferably fixedly installed at a predetermined position by bolts or other fixing members (not shown), but is not limited thereto.

The shape of the laser passage 211a is not particularly limited, and has a shape corresponding to the processed optical path OPp of the laser beam LB. For example, as shown in FIG. 2, the laser passage 211a can have an'L'shape when the mount-side optical member 220 is installed so as to vertically switch the extension direction of the processed optical path OPp. Then, the laser beam LB transmitted from the laser oscillator 10 or the mirror mount assembly 200 located in the preceding order along the processed optical path OPp enters the laser passage 211a through the one-side opening 211b of the laser passage 211a. It is incident on the mount-side optical member 220. Further, the laser beam LB reflected by the mount-side optical member 220 travels along the processed optical path OPp whose extension direction is vertically switched, and is emitted through the other side opening 211c of the laser passage 211a.

As shown in FIG. 2, the mirror plate 212 can support the opening 212a formed so that the mount-side optical member 220 can be inserted and the mount-side optical member 220 inserted into the opening 212a. It can have a flange 212b or the like projecting from the inner peripheral surface of the opening 212a. Such a mirror plate 212 may be fastened to one surface of the base block 211 by a fastening member 214 described later.

The opening 212a has a shape corresponding to the mount-side optical member 220 so that the mount-side optical member 220 can be inserted. The flange 212b is formed so as to project from the inner surface of the opening 212a by a predetermined length so that the outer peripheral portion of the mount-side optical member 220 inserted into the opening 212a can be supported. As a result, the mount-side optical member 220 can be detachably mounted on the mirror plate 212 by being inserted into the opening 212a so that the outer peripheral portion is supported by the flange 212b.

As shown in FIG. 2, the fixed block 213 can have a pressurizing portion 213a that is formed so as to protrude from one side surface so as to be inserted into the opening 212a. Such a fixing block 213 is preferably, but is not limited to, screwed to one surface of the mirror plate 212 by a bolt (not shown).

The pressurizing portion 213a may be formed so as to project from one surface of the fixed block 213 by a predetermined height so as to come into contact with the mount-side optical member 220 inserted into the opening 212a. The pressurizing portion 213a can pressurize the mount-side optical member 220 inserted into the opening 212a and fix the pressurizing portion 213a in close contact with the flange 212b. Therefore, the pressurizing unit 213a can prevent the mount-side optical member 220 from floating inside the opening 212a due to external force, vibration, or the like applied from the outside. Further, the pressurizing unit 213a can receive the heat applied to the mount-side optical member 220 by the laser beam LB through the contact surface in contact with the mount-side optical member 220. As a result, the fixed block 213 can prevent the mount-side optical member 220 from being damaged by the high heat by releasing the heat transmitted from the mount-side optical member 220 to the outside.

On the other hand, the fixed block 213 can be provided so as to transmit the indicator light LBm1 and absorb the processing light LBp1. Therefore, the fixed block 213 can be formed of glass or other material that selectively transmits the indicator light LBm1. In particular, the incident surface of the fixed block 213 facing the mount-side optical member 220 and the exit surface of the fixed block 213 facing the noise filter 240, which will be described later, are anti-reflective coated so as to selectively transmit the indicated light LBm1. can do. Then, as shown in FIG. 2, the indicator light LBm1 can pass through the fixed block 213 and travel toward the mount-side sensing member 260 along the mount-side sensing optical path OPs1. On the other hand, as shown in FIG. 5, the processed light LBp1 can be absorbed by the fixed block 213. Therefore, the fixed block 213 can prevent the mount-side sensing member 260 and other components of the laser device 1 from being damaged by the processing light LBp1 transmitted through the fixed block 213 during laser processing of the object P to be processed. ..

The fastening member 214 is provided so that the mirror plate 212 can be fastened to the base block 211. For example, as shown in FIG. 2, the fastening member 214 has a fastening bolt 214a in which a threaded portion penetrates the mirror plate 212 and is screwed to one surface of the base block 211, and the head of the fastening bolt 214a and the mirror plate 212. It may have a spring 214b or the like intervening between them. The spring 214b is preferably, but is not limited to, a compression coil spring.

The number of fastening members 214 installed is not particularly limited. For example, as shown in FIG. 4, a plurality of fastening members 214 may be installed at predetermined intervals.

According to such a fastening member 214, the mirror plate 212 is urged to one side of the base block 211 by the elastic force provided by the spring 214b. As a result, the fastening member 214 can elastically fasten the mirror plate 212 and the base block 211.

As shown in FIG. 2, the sensor block 215 is mounted on one surface of the fixed block 213 so that the indicator light LBm1 transmitted through the fixed block 213 can enter the inside. The sensor block 215 is preferably, but not limited to, screw-coupled to one surface of the fixing block 213 by bolts (not shown). Inside the sensor block 215, a noise filter 240, a condenser lens 250, a mount-side sensing member 260, and the like, which will be described later, can be installed at predetermined intervals.

Such a sensor block 215 can be selectively mounted on one surface of the fixed block 213. For example, as shown in FIG. 2, the sensor block 215 can be mounted on one surface of the fixed block 213 when diagnosing the optical path of the laser beam LB. For example, as shown in FIGS. 3 and 5, the sensor block 215 can be separated from one surface of the fixed block 213 when the object P to be processed is laser-processed. As a result, when the object P to be processed is laser-processed, it is possible to prevent the sensor block 215 from interfering with the progress of the processing light LBp, and the mirror mount assembly is carried out by the load of the sensor block 215 and the members installed therein. It is possible to prevent the durability of the 200 from being lowered.

The mount-side optical member 220 is provided so that the optical path of the laser beam LB transmitted along the processed optical path OPp from the laser oscillator 10 or the mirror mount assembly 200 located in the preceding order can be adjusted. The type of optical member that can be used as such a mount-side optical member 220 is not particularly limited. For example, as shown in FIGS. 2 and 3, the mount-side optical member 220 includes a mount-side beam splitter 222 that branches the laser beam LB into a plurality of optical paths, a mount-side reflection mirror 224 that totally reflects the laser beam LB, and the like. There may be.

As shown in FIG. 2, the mounting side beam splitter 222 has a shape corresponding to the opening port 212a of the mirror plate 212 so that it can be inserted into the opening port 212a of the mirror plate 212. The mounting-side beam splitter 222 is provided so that the laser beam LB incident along the processed optical path OPp can be branched into a plurality of optical paths having a predetermined first association.

For example, the mount-side beam splitter 222 can be provided so as to transmit and reflect the laser beam LB incident on the mount-side beam splitter 222 along the processing optical path OPp according to a predetermined branching ratio. Then, a part of the laser beam LB incident on the mount-side beam splitter 222 passes through the mount-side beam splitter 222, and the other part of the laser beam LB incident on the mount-side beam splitter 222 passes through the mount-side beam splitter 222. It is reflected by the mounting side beam splitter 222. As a result, the mounting-side beam splitter 222 can guide a part of the laser beam LB incident on the mounting-side beam splitter 222 to the first transmission optical path, and the mounting-side beam splitter 222 in the laser beam LB incident on the mounting-side beam splitter 222. The other part can be guided to the first reflected light path. The first transmitted optical path refers to an optical path in which the laser beam LB transmitted through the mount-side beam splitter 222 travels, and the first reflected optical path refers to an optical path in which the laser beam LB reflected by the mount-side beam splitter 222 travels.

Either one of the first transmitted optical path and the first reflected optical path can be utilized as the mount-side sensing optical path OPs1 for transferring the laser beam LB necessary for the optical path diagnosis of the laser beam LB, and the other of the first transmitted optical path and the first reflected optical path. Can be used as a processing optical path OPp for transferring the laser beam LB required for laser processing of the processing object P. For example, as shown in FIG. 2, the first transmitted optical path can be utilized as the mount-side sensing optical path OPs1, and the first reflected optical path can be utilized as the processed optical path OPp. As a result, the mounting side beam splitter 222 can extract a part of the laser beam LB from the processed optical path OPp and guide it to travel along the mounting side sensing optical path OPs1, and process the remaining part of the laser beam LB. It can be guided to proceed as it is along the optical path OPp.

Further, the mount-side beam splitter 222 can branch the laser beam LB so that the processing optical path OPp and the mount-side sensing optical path OPs1 have a predetermined first relationship. Therefore, the mounting side beam splitter 222 can reflect the laser beam LB so that the extension direction of the processing optical path OPp can be switched by a predetermined angle. For example, the mounting side beam splitter 222 can reflect the laser beam LB so that the extension direction of the processed optical path OPp can be switched vertically. Then, as shown in FIG. 2, the mount-side sensing optical path OPs1 is aligned with the processed optical path OPp in the section before the extension direction is switched by the mount-side beam splitter 222, and the extension direction is formed by the mount-side beam splitter 222. Will be perpendicular to the processed optical path OPp in the section after being vertically switched.

The type of optical member that can be used as such a mounting-side beam splitter 222 is not particularly limited. For example, the mounting-side beam splitter 222 selectively transfers at least a part of the indicating light LBm transmitted along the processed optical path OPp from the laser oscillator 10 or the mirror mount assembly 200 located in the preceding order to the mounting-side sensing optical path OPs1. It may be a first dichroic mirror that can guide. As described above, when the first transmitted optical path is the mount-side sensing optical path OPs1, the mounting-side beam splitter 222 is optically coated so that at least a part of the indicating light LBm can be selectively transmitted. It may be a dichroic mirror. Then, as shown in FIGS. 2 and 3, the mount-side beam splitter 222 can selectively totally reflect the processing light LBp incident on the mount-side beam splitter 222 so as not to enter the mount-side sensing optical path OPs1. It is possible to selectively transmit at least a part of the indicating light LBm incident on the mounting-side beam splitter 222 so as to enter the mounting-side sensing optical path OPs1.

According to such a mounting-side beam splitter 222, the processed light LBp oscillated from the laser oscillator 10 is sequentially reflected by the mounting-side beam splitter 222 of the mirror mount assembly 200 according to the reference transmission sequence S, so that the laser nozzle assembly 30 Can be transmitted to. Further, according to the mounting side beam splitter 222, the indicating light LBm oscillated from the laser oscillator 10 can be transmitted through the mounting side beam splitter 222 of the mirror mount assembly 200 and distributed to the mounting side sensing member 260 of the mirror mount assembly 200. ..

By the way, when the mounting side beam splitter 222s of the mirror mount assembly 200 have the same transmittance of the indicating light LBm, most of the indicating light LBm is a mirror located in the first half of the reference transmission sequence S in the mirror mount assembly 200. It has to be extracted from the processed optical path OPp by the mounting side beam splitter 222 of the mount assembly 200. Then, only a small amount of indicated light LBm reaches the mounting-side beam splitter 222 of the mirror mount assembly 200 located in the latter half of the reference transmission sequence S of the mirror mount assembly 200. Then, the mount-side sensing member 260 of the mirror mount assembly 200 located in the latter half of the mirror mount assembly 200 must diagnose the optical path of the laser beam LB using the indicated light LBm1 having a small amount of light, and thus the result of the optical path diagnosis of the laser beam LB. May cause an error.

In order to solve this problem, the mount-side beam splitter 222, which is located in the prior order among the mount-side beam splitter 222, can be formed so as to have a lower transmittance of the indicating light LBm1. As a result, the accuracy of the result of the optical path diagnosis of the laser beam LB can be improved by distributing the indicated light LBm of an equal amount of light to the mounting side sensing member 260.

As shown in FIG. 3, the mount-side reflection mirror 224 has a shape corresponding to the opening port 212a of the mirror plate 212 so that it can be mounted on the opening port 212a of the mirror plate 212 instead of the mounting-side beam splitter 222. The mount-side reflection mirror 224 totally reflects the laser beam LB transmitted along the processing optical path OPp from the laser oscillator 10 or the mirror mount assembly 200 located in the preceding order, and the extension direction of the processing optical path OPp is predetermined. It is installed so that it can be switched only by the angle. For example, as shown in FIG. 3, the mount-side reflection mirror 224 can be installed so that the extension direction of the processed optical path OPp can be vertically switched by totally reflecting the laser beam LB. Then, during laser processing of the object P to be processed, the processed light LBp oscillated from the laser oscillator 10 is sequentially transmitted by the mount-side reflection mirror 224 of the mirror mount assembly 200 according to the reference transmission order S and transmitted to the laser nozzle assembly 30. obtain.

The aligner 230 is provided with an adjustable alignment mode of the mirror mount 212 and the mount-side optical member 230 mounted on the mirror mount 212. The structure of such an aligner 230 is not particularly limited. For example, as shown in FIG. 2, the aligning machine 230 adjusts the alignment mode of the mirror plate 212 and the mount-side optical member 230 mounted on the mirror plate 212 according to the rotation direction and the rotation angle of the mirror plate 212. The adjustment dial 232 mounted on the device, the actuator 234 for rotationally driving the adjustment dial 232, and the like can be included.

As shown in FIG. 2, the adjustment dial 232 can have the shape of a bolt having a thread formed on the outer peripheral surface. Such an adjustment dial 232 may be screwed to the mirror plate 212 so that its end is in pressure contact with one surface of the base block 211.

The actuator 234 may be axially coupled to the adjustment dial 232 so that the adjustment dial 232 can be rotationally driven. The actuator 234 can include a motor (not shown) that provides a driving force, a speed reducer (not shown) that transmits the driving force provided by the motor to the adjustment dial 232, and the like. As shown in FIG. 1, the controller 40 can include a correction unit 42 that controls the drive of such an actuator.

When the adjustment dial 232 is rotationally driven by such an actuator 234, the mirror plate 212 either approaches the base block 211 by a predetermined distance or approaches the base block 211 according to the rotation direction and rotation angle of the adjustment dial 232. It can be moved progressively away from. As a result, the aligner 230 changes the angle between the base block 211 and the mirror plate 212 around the fastening member 214, so that the mirror plate 212 and the mount-side optical member 220 mounted on the mirror plate 212 are aligned. Can be adjusted. Then, the optical path of the laser beam LB including the processed optical path OPp and the mount-side sensing optical path OPs1 can be switched according to the driving mode of the aligner 230.

The number of such aligners 230 installed is not particularly limited. For example, as shown in FIG. 4, a pair of aligners 230 are placed at predetermined positions so that the angle between the base block 211 and the mirror plate 212 can be changed around each of the X-axis and the Y-axis. Can be installed in each. Then, the optical path of the laser beam LB can be switched around the X-axis and the Y-axis according to the driving mode of the aligner 230.

As shown in FIG. 2, the noise filter 240 is installed between the fixed block 213 and the condenser lens 250 so that the indicator light LBm1 transmitted through the fixed block 213 is incident. The noise filter 240 can remove the noise contained in the indicated light LBm1 so that the indicated light LBm1 can be shaped into a form suitable for the optical path diagnosis of the laser beam LB. Such a noise filter 240 transmits the indicator light LBm1 guided to the mounting side sensing optical path OPs1 to the condenser lens 250 in a state where the noise is removed, so that the result of the optical path diagnosis of the laser beam LB is obtained by the noise. It is possible to prevent an error from occurring.

As shown in FIG. 2, the condenser lens 250 is installed between the noise filter 240 and the mount-side sensing member 260 so that the indicator light LBm1 from which noise has been removed is incident. Such a condenser lens 250 is preferably installed so that the focal point is located on a predetermined sensing surface 260a of the mount-side sensing member 260, but is not limited thereto. Such a condensing lens 250 can condense the instruction light LBm1 from which noise has been removed and irradiate the sensing surface 260a of the mount-side sensing member 260.

FIG. 6 is a diagram for explaining a method of deriving a mount-side sensing optical path using the mount-side sensing member 260, and FIG. 7 is a case where a laser beam is transmitted to the mount-side beam splitter without distortion of the optical path. It is a figure which shows the mode of the processed optical path and the mounting side sensing optical path, and FIG. 8 shows the mode of the processed optical path and the nozzle side sensing optical path when the laser beam is transmitted to the mount side beam splitter in a state where the optical path is distorted. It is a figure.

The mount-side sensing member 260 can sense the indicated light LBm1 condensed by the condenser lens 250 and output a mount-side optical path signal corresponding to the aspect of the mount-side sensing optical path OPs1. The aspect of the mount-side sensing optical path OPs1 can include the coordinates of the mount-side sensing optical path OPs1, the extension direction of the mount-side sensing optical path OPs1, and various other information regarding the mount-side sensing optical path OPs1.

As shown in FIG. 6, the mount-side sensing member 260 can be provided so that the position of the first beam spot BSm1 of the indicator light LBm1 irradiated on the sensing surface 260a of the mount-side sensing member 260 can be sensed. Therefore, the mount-side sensing member 260 includes a camera that captures an image of the first beam spot BSm1 of the indicator light LBm1, a PSD sensor that outputs a position sensing signal corresponding to the position of the first beam spot BSm1 of the indicator light LBm1, and a PSD sensor. It may have at least one of various sensors capable of providing information about the position of the first beam spot BSm1 of the other indicator light LB1m. In particular, when the mount-side sensing member 260 has a camera, it is preferable, but not limited to, a CCD camera is adopted as the camera.

The controller 40 can perform an optical path diagnosis of the laser beam LB based on the mount side optical path signal output from the mount side sensing member 260. Therefore, as shown in FIG. 1, the controller 40 can further include a diagnostic unit 44 that performs an optical path diagnosis of the laser beam LB.

As shown in FIG. 6, the diagnostic unit 44 derives the aspect of the mount-side sensing optical path OPs1 based on the position of the first beam spot BSm1 of the indicator light LBm1 sensed by the mount-side sensing member 260, and then mounts the mount side. The optical path difference D1 between the sensing optical path OPs1 and the predetermined first reference sensing optical path OPrs1 can be calculated. In particular, the diagnostic unit 242 includes the position of the first beam spot BSm1 irradiated on the sensing surface 260a along the mount-side sensing optical path OPs1 and the first reference irradiated on the sensing surface 260a along the first reference sensing optical path OPrs1. The optical path difference D1 between the mount-side sensing optical path OPs1 and the first reference sensing optical path OPrs1 can be calculated by using the difference from the position of the beam spot BSr1.

Here, in the first reference sensing optical path OPrs1, the laser beam LB is mounted from the laser oscillator 10 or the mirror mount assembly 200 located in the preceding order along the predetermined first reference processing optical path OPrp1 222. Refers to the mounting side sensing optical path OPs1 when being transmitted to. Further, in the first reference processing optical path OPrp1, the laser beam LB transmitted from the laser oscillator 10 or the mount-side optical member 220 of the mirror mount assembly 200 located in the preceding order advances when the optical path is not distorted. Processing optical path OPp to be processed. As described above, the mount-side sensing optical path OPs1 has a first relationship with the processed optical path OPp. Thereby, the first reference sensing optical path OPrs1 can also be installed so as to have a first relationship with the first reference processed optical path OPrp1.

As shown in FIG. 7, when the indicating light LBm is transmitted to the mounting side beam splitter 222 along the processing optical path OPp that coincides with the first reference processing optical path OPrp1, the mount side sensing optical path OPs1 is the first reference sensing optical path. It comes to match with OPrs1. Further, as shown in FIG. 8, when the indicator light LBm is transmitted to the mount side beam splitter 222 along the processing optical path OPp deviated from the first reference processing optical path OPrp1 by a predetermined optical path difference D2, the mounting side sensing optical path The OPs1 and the first reference sensing optical path OPrs1 are inconsistent with each other by the optical path difference D1 proportional to the optical path difference D2 between the processed optical path OPp and the first reference processed optical path OPrp1.

The diagnostic unit 44 derives the mode of the processed optical path OPp based on the mode of the mount-side sensing optical path OPs1 by using the first association, and mounts the optical path difference D2 between the processed optical path OPp and the first reference processed optical path OPrp1. It can be calculated based on the optical path difference D1 between the side sensing optical path OPs1 and the first reference sensing optical path OPrs1. The mode of the processed optical path OPp can include the coordinates of the processed optical path OPp, the extension direction of the processed optical path OPp, and various other information regarding the processed optical path OPp.

As described above, the mirror mount assembly 200 is installed so that the laser beam LB oscillated from the laser oscillator 10 can be sequentially transmitted by the mount side beam splitter 222 according to the reference transmission sequence S. Therefore, the laser beam LB oscillated from the laser oscillator 10 is transmitted along the processing optical path OPp to the mounting side beam splitter 222 of the mirror mount assembly 200 located at the first position of the reference transmission sequence S in the mirror mount assembly 200. NS. Further, in the mirror mount assembly 200, the beam splitter 222 on the mount side of the mirror mount assembly 200 located at the second or higher specific order of the reference transmission sequence S is the mirror mount assembly 200 located at the order immediately before the specific order. The laser beam LB reflected by the mount-side beam splitter 222 is transmitted along the processing optical path OPp.

In consideration of such a transmission mode of the indicating light LBm, the diagnostic unit 44 transmits the indicating light LBm to the mounting side beam splitter 222 along the first reference processing optical path OPrp1 for each of the mirror mount assemblies 200. It can be individually determined based on the mode of the processed optical path OPp, the optical path difference D2, and the like. As described above, since the laser oscillator 10 oscillates the laser beam LBs such as the processed light LBp and the indicated light LBm so as to have the same optical axes, the laser beam LBs oscillated from the laser oscillator 10 are the same as each other. It is transmitted along the processed optical path OPp of. Further, the mounting side beam splitter 222 and the mounting side reflecting mirror 224 are selectively mounted on the mirror plate 212 so that the laser beam LB can be transmitted along the same processed optical path OPp. As a result, the diagnostic unit 44, for each of the mirror mount assemblies 200, mount-side optical members along the first reference processing optical path OPrp1 from the mirror mount assembly 200 in which the laser beam LB is located in the laser oscillator 10 or the prior order. Whether or not the light is transmitted to the 220 can be individually determined based on the mode of the processed optical path OPp, the optical path difference D2, and the like.

For example, when the diagnostic unit 44 performs an optical path diagnosis of the laser beam LB on the mirror mount assembly 200 located at the first position, if the processed optical path OPp and the first reference processed optical path OPrp1 do not match, the laser beam It can be determined that distortion of the processed optical path OPp occurs due to an abnormal phenomenon in the process of transmitting the LB to the mirror mount assembly 200 located at the first position. The abnormal phenomenon refers to a phenomenon in which the alignment state of the laser oscillator 10 is poor and other distortions of the processed optical path OPp are generated in the process of transmitting the laser beam LB to the mirror mount assembly 200 located at the first position.

For example, when the diagnostic unit 44 performs the optical path diagnosis of the laser beam LB on the mirror mount assembly 200 located at the second or higher rank, the processed optical path OPp and the first reference processed optical path OPrp1 do not match. Then, it can be determined that distortion of the processed optical path OPp occurs in the process of transmitting the laser beam LB to the mirror mount assembly 200 located in the posterior order. The abnormal phenomenon includes a poor alignment of the laser oscillator 10, a poor alignment of the mount-side optical member 220 of the mirror mount assembly 200 located in the first order, and a mirror mount in which the other laser beam LB is located in the second order. A phenomenon in which distortion of the processed optical path OPp can be generated in the process of being transmitted to the assembly 200.

The distortion of the processed optical path OPp generated in the process of transmitting the laser beam LB to the mount-side optical member 220 of the mirror mount assembly 200 located in the rear order is caused by the laser oscillator 10 and the mirror mount assembly 200 located in the prior order. It can be generated by various members such as the mount side optical member 220. As a result, if the processing optical path OPp is distorted in the process of transmitting the laser beam LB to the mount-side optical member 220 of the mirror mount assembly 200 located in the rear order, which member distorts the processing optical path OPp? Can be difficult to detect.

In order to solve this, the diagnostic unit 44 can sequentially perform the optical path diagnosis of the laser beam LB for each of the mirror mount assemblies 200 according to the reference transmission order S.

Therefore, when the diagnostic unit 44 determines that the laser beam LB is transmitted to the mount-side optical member 220 of the mirror mount assembly 200 located in the first order along the first reference processing optical path OPrp1, the laser beam It can be determined whether the LB is transmitted to the mount-side optical member 220 of the mirror mount assembly 200 located in the rear order along the first reference processing optical path OPrp1.

For example, when the diagnostic unit 44 determines that the laser beam LB is transmitted to the mount-side optical member 220 of the mirror mount assembly 200 located at the first position along the first reference processing optical path OPrp1, the laser beam LB Can be determined to be transmitted to the mount-side optical member 220 of the mirror mount assembly 200 located at the second position along the first reference processing optical path OPrp1.

Further, the diagnostic unit 44 determines that the laser beam LB is transmitted to the mount-side optical member 220 of the mirror mount assembly 200 located in the first order along the processed optical path OPp that does not match the first reference processed optical path OPrp1. In this case, it can be determined that the processing optical path OPp is distorted by the member that directly transmits the laser beam LB to the mount-side optical member 220 of the mirror mount assembly 200 located in the prior order.

For example, the diagnostic unit 44 determines that the laser beam LB is transmitted to the mount-side optical member 220 of the mirror mount assembly 200 located at the first position along the processed optical path OPp that does not match the first reference processed optical path OPrp1. In this case, it can be determined that the laser oscillator 10 distorts the processed optical path OPp. Then, the distortion of the processed optical path OPp can be corrected by the work of aligning the laser oscillator 10 in the normal state and other correction work.

Further, the diagnostic unit 44 determines that the laser beam LB is transmitted to the mount-side optical member 220 of the mirror mount assembly 200 located in the rear order along the processed optical path OPp that does not match the first reference processed optical path OPrp1. In this case, it can be determined that the processing optical path OPp is distorted by the member that directly transmits the laser beam LB to the mount-side optical member 220 of the mirror mount assembly 200 located in the rear order.

For example, the diagnostic unit 44 determines that the laser beam LB is transmitted to the mount-side optical member 220 of the mirror mount assembly 200 located at the second position along the processed optical path OPp that does not match the first reference processed optical path OPrp1. In this case, it can be determined that the mounted optical member 220 of the mirror mount assembly 200 located at the first position causes distortion of the processed optical path OPp. Then, the alignment machine 230 is used to align the mirror plate 212 of the mirror mount assembly 200 located at the first position and the mount-side optical member 220 installed on the mirror plate 212 in a normal state, and other correction operations to distort the optical path. Can be corrected.

In this way, the diagnostic unit 44 sequentially performs the optical path diagnosis of the laser beam LB for each of the mirror mount assemblies 200 according to the reference transmission order S, so that it is possible to accurately determine which member causes the distortion of the processed optical path OPp. Can be detected. However, according to the detection method as described above, the distortion of the processed optical path OPp generated in the mount-side optical member 220 of the mirror mount assembly 200 located at the last rank of the reference transmission sequence S cannot be detected. The method of detecting the distortion of the processed optical path OPp generated in the mount-side optical member 220 of the assembly of the mirror mount 210 located at the last rank will be described later.

FIG. 9 is a diagram showing an aspect of the energy distribution of the laser beam transmitted to the mount-side optical member without energy loss, and FIG. 10 is a diagram of the laser beam transmitted to the mount-side optical member in a state where energy is lost. It is a figure which shows the mode of the energy distribution.

The mount-side sensing member 260 described above may be provided so that both the position of the first beam spot BSm1 of the indicator light LBm1 and the energy of the indicator light LBm1 irradiated on the sensing surface 260a of the mount-side sensing member 260 can be sensed. Therefore, the mount-side sensing member 260 is an infrared sensor that detects the heat of the indicator light LBm1 irradiated on the sensing surface 260a of the mount-side sensing member 260 and senses the position of the first beam spot BSm1 and the energy of the indicator light LBm1. Information on the position of the first beam spot BSm1 of the indicator light LBm1 and the energy of the indicator light LBm1 and the thermal image camera that captures the thermal image of the indicator light LBm1 irradiated on the sensing surface 260a of the mount side sensing member 260. Can be provided with at least one of the sensors capable of providing together.

As shown in FIG. 9, the laser beam LB transmitted to the mount-side optical member 220 along the processed optical path OPp without energy loss has a concentric energy distribution mode. On the other hand, as shown in FIG. 10, the laser beam LB transmitted to the mount-side optical member 220 along the processed optical path OPp in a state where energy is lost due to an abnormal phenomenon has an energy distribution forming an eccentric circle or an ellipse. Has an aspect. The abnormal phenomenon refers to a phenomenon in which an energy loss of the laser beam LB traveling along the processed optical path OPp can be generated, such as a poor alignment of the laser oscillator 10 and a poor alignment of the mount-side optical member 220.

Since the laser beam LB oscillated from the laser oscillator 10 such as the processed light LBp and the indicated light LBm is transmitted along the same processed optical path OPp, they can have the same energy distribution mode. Further, since the laser beam LB extracted from the processed optical path OPp by the mounting side beam splitter 222 is guided to the mount side sensing optical path OPs1, the laser beam LB traveling along the processed optical path OPp and the mount side sensing optical path OPs1 The indicator light LBm1 traveling along the optical path has the same form of energy distribution as each other. Further, since the mount-side beam splitter 222 and the mount-side reflection mirror 224 switch the extension direction of the processing optical path OPp by the same angle, the laser beam LB guided to the processing optical path OPp by the mounting-side beam splitter 222 and the mount side The laser beam LB guided to the processed optical path OPp by the reflection mirror 224 has an energy distribution mode having the same form as each other.

In consideration of such an energy distribution mode, the diagnostic unit 44 uses the energy of the indicator light LBm1 sensed by the mount-side sensing member 260 to distribute the energy of the indicator light LBm1 traveling along the mount-side sensing optical path OPs1. After deriving the mode, the energy distribution mode of the laser beam LB traveling along the processing optical path OPp can be derived based on the energy distribution mode of the indicated light LBm1.

Further, when the energy distribution mode of the laser beam LB traveling along the processed optical path OPp is different from the predetermined reference energy distribution mode, the diagnostic unit 44 determines that the laser beam LB is mounted along the processed optical path OPp. It can be determined that the energy loss of the laser beam LB occurs in the process of being transmitted to. The reference energy distribution mode refers to the energy distribution mode of the laser beam LB when the laser beam LB is transmitted to the mount-side optical member 220 along the processed optical path OPp without energy loss. Such a reference energy distribution mode preferably has a concentric energy distribution mode, but is not limited thereto.

Further, the diagnostic unit 44 determines whether the laser beam LB is transmitted to the mount-side optical member 220 without energy loss for each of the mirror mount assemblies 200 by the energy of the laser beam LB traveling along the processed optical path OPp. It can be judged individually based on the distribution mode. In particular, the diagnostic unit 44 determines, for each of the mirror mount assemblies 200, whether the laser beam LB is transmitted to the mount-side optical member 220 along the processed optical path OPp without energy loss in a stepwise manner according to the reference transmission sequence S. Can be judged.

Therefore, when the diagnostic unit 44 determines that the laser beam LB is transmitted to the mount-side optical member 220 of the mirror mount assembly 200 located in the prior order along the processed optical path OPp without energy loss, the laser beam It can be determined whether the LB is transmitted to the mount-side optical member 220 of the mirror mount assembly 200 located in the rear order along the processed optical path OPp without energy loss.

For example, when the diagnostic unit 44 determines that the laser beam LB is transmitted to the mount-side optical member 220 of the mirror mount assembly 200 located at the first position along the processed optical path OPp without energy loss, the laser beam LB Can be determined to be transmitted to the mount-side optical member 220 of the mirror mount assembly 200 located at the second position along the processed optical path OPp without energy loss.

Further, the diagnostic unit 44 determines that the laser beam LB is transmitted to the mount-side optical member 220 of the mirror mount assembly 200 located in the prior order along the processed optical path OPp in a state where energy is lost. It can be determined that the energy loss of the laser beam LB occurs in the member that directly transmits the laser beam LB to the mount-side optical member 220 of the mirror mount assembly 200 located in the prior order.

For example, when the diagnostic unit 44 determines that the laser beam LB is transmitted to the mount-side optical member 220 of the mirror mount assembly 200 located at the first position in a state where energy is lost, the laser oscillator 10 determines that the laser beam LB is transmitted to the mount-side optical member 220. It can be determined that the energy loss of LB occurs. Then, the energy loss of the laser beam LB can be corrected by the work of aligning the laser oscillator 10 to the normal state and other correction work.

Further, when the diagnosis unit 44 determines that the laser beam LB is transmitted to the mount-side optical member 220 of the mirror mount assembly 200 located in the rear order along the processed optical path OPp in a state where energy is lost, the diagnosis unit 44 determines. It can be determined that the energy loss of the laser beam LB occurs in the member that directly transmits the laser beam LB to the mount-side optical member 220 of the mirror mount assembly 200 located in the rear order.

For example, the diagnostic unit 44 is located at the 1st position when it is determined that the laser beam LB is transmitted to the mounting side beam splitter 222 of the mirror mount assembly 200 located at the 2nd position in a state where energy is lost. It can be determined that the energy loss of the laser beam LB occurs at the mount side optical member 220 of the mirror mount assembly 200. Then, the laser beam is subjected to the work of aligning the mirror plate 212 of the mirror mount assembly 200 located at the first position and the mount-side optical member 220 installed on the mirror plate 212 in the normal state by using the aligner 230, and other correction operations. The energy loss of LB can be corrected.

In this way, the diagnostic unit 44 sequentially diagnoses the energy of the laser beam LB for each of the mirror mount assemblies 200 according to the reference transmission sequence S, so that which member causes the energy loss of the laser beam LB. Can be detected accurately. However, according to the energy loss detection method as described above, the energy loss of the laser beam LB generated in the mount-side optical member 220 of the mirror mount assembly 200 located at the last rank of the reference transmission sequence S in the mirror mount assembly 200 is Cannot be detected. A method for detecting the energy loss generated in the mount-side optical member 220 of the assembly of the mirror mount 210 located at the last rank will be described later.

FIG. 11 is a diagram showing a schematic configuration of a laser nozzle assembly.

As shown in FIG. 11, the laser nozzle assembly 30 has a predetermined second association between the laser nozzle 310 and at least a part of the laser beam LB transmitted along the processing optical path OPp with the processing optical path OPp. Noise is removed by the nozzle-side optical member 320 that selectively guides the nozzle-side sensing optical path OPs2, the noise filter 330 that removes noise contained in the laser beam LB traveling along the nozzle-side sensing optical path OPs2, and the noise filter 330. The condensing lens 340 that condenses the collected laser beam LB and the nozzle side that senses the laser beam LB condensed by the condensing lens 340 and outputs the nozzle side optical path signal corresponding to the aspect of the nozzle side sensing optical path OPs2. It can have a sensing member 350 or the like.

As shown in FIG. 11, the laser nozzle 310 has a hollow shape that allows the laser beam LB transmitted along the processed optical path OPp from the mount-side optical member 220 of the mirror mount assembly 200 located at the last position to enter the inside. Have. The laser nozzle 310 can have a condenser lens 312 capable of condensing the laser beam LB that has entered the inside. It is preferable that the condenser lens 312 is installed between the nozzle-side optical member 320 and the object to be processed P so that the laser beam LB branched into the processing optical path OPp by the nozzle-side optical member 320 can be focused. , Not limited to this.

The laser nozzle 310 is a beam expander (not shown) installed so that the diameter of the laser beam LB that has entered the inside of the laser nozzle 310 can be enlarged by a predetermined ratio and transmitted to the condenser lens 312. Various optical members (not shown) capable of shaping the other laser beam LB according to the processing purpose of the object P to be processed can be further provided.

The laser nozzle 310 is preferably provided so that the predetermined second reference processing optical path OPrp2 and the central axis of the laser nozzle 310 coincide with each other, but is not limited thereto. The second reference processed optical path OPrp2 refers to the processed optical path OPp in which the laser beam LB transmitted from the mount-side optical member 220 of the mirror mount assembly 200 located at the last position advances when the optical path distortion does not occur. ..

Such a laser nozzle 310 can laser-process the processing target object P by irradiating the processing target object P with the laser beam LB focused by the condenser lens 312 along the processing optical path OPp.

Next, as shown in FIG. 11, the nozzle-side optical member 320 can be installed inside the laser nozzle 310 so that the laser beam LB that has entered the inside of the laser nozzle 310 along the processed optical path OPp can be incident. .. The nozzle-side optical member 320 is preferably installed closer to the optical system 20 side than the condenser lens 312 so that the laser beam LB that has not reached the condenser lens 312 is incident. It is not limited to.

The nozzle-side beam splitter 322 is provided so that the laser beam LB incident along the processed optical path OPp can be branched into a plurality of optical paths having a predetermined second relationship.

For example, the nozzle-side beam splitter 322 can be provided so as to transmit and reflect the laser beam LB incident on the nozzle-side beam splitter 322 along the processing optical path OPp according to a predetermined branching ratio. Then, a part of the laser beam LB incident on the nozzle-side beam splitter 322 passes through the nozzle-side beam splitter 322, and the other part of the laser beam LB incident on the nozzle-side beam splitter 322 passes through the nozzle-side beam splitter 322. It is reflected by the nozzle-side beam splitter 322. As a result, the nozzle-side beam splitter 322 can guide a part of the laser beam LB incident on the nozzle-side beam splitter 322 to the second transmission optical path, and the nozzle-side beam splitter 322 is included in the laser beam LB incident on the nozzle-side beam splitter 322. The remaining part can be guided to the second reflected light path. The second transmitted optical path refers to an optical path in which the laser beam LB transmitted through the nozzle-side beam splitter 322 travels, and the second reflected optical path refers to an optical path in which the laser beam LB reflected by the nozzle-side beam splitter 322 travels.

Either one of the second transmitted optical path and the second reflected optical path can be utilized as nozzle-side sensing optical paths OPs2 for transferring the laser beam LB necessary for the optical path diagnosis of the laser beam LB, and the other of the second transmitted optical path and the second reflected optical path. Can be used as a processing optical path OPp for transferring the laser beam LB required for laser processing of the processing object P. For example, as shown in FIG. 11, the second transmitted optical path can be utilized as the processed optical path OPp, and the second reflected optical path can be utilized as the nozzle-side sensing optical path OPs2. As a result, the nozzle-side beam splitter 322 can extract a part of the laser beam LB from the processed optical path OPp and guide it to travel along the nozzle-side sensing optical path OPs2, and process the remaining part of the laser beam LB. It can be guided to proceed as it is along the optical path OPp.

Further, the nozzle-side beam splitter 322 can branch the laser beam LB so that the processing optical path OPp and the nozzle-side sensing optical path OPs2 have a predetermined second relationship. Therefore, the nozzle-side beam splitter 322 reflects the laser beam LB incident on the nozzle-side beam splitter 322 so that the processing optical path OPp and the nozzle-side sensing optical path OPs2 have a predetermined angle. Can be done. For example, the nozzle-side beam splitter 322 can reflect the laser beam LB incident on the nozzle-side beam splitter 322 so that the processing optical path OPp and the nozzle-side sensing optical path OPs2 are perpendicular to each other.

The type of optical member that can be used as such a nozzle-side beam splitter 322 is not particularly limited. For example, the nozzle-side beam splitter 322 can selectively guide at least a part of the indicator light LBm transmitted from the mount-side optical member 220 of the mirror mount assembly 200 located at the last position to the nozzle-side sensing optical path OPs2. It may be a dichroic mirror of 2. When the second reflected optical path is utilized as the nozzle-side sensing optical path OPs2, the nozzle-side beam splitter 322 is optical so as to selectively reflect at least a part of the indicated light LBm and guide it to the nozzle-side sensing optical path OPs2. It may be a coated second dichroic mirror. Then, the nozzle-side beam splitter 322 selectively transmits the processing light LBp incident on the nozzle-side beam splitter 322 so as not to enter the nozzle-side sensing optical path OPs2, and the instruction light incident on the nozzle-side beam splitter 322. At least a part of LBm can be selectively reflected so as to enter the nozzle-side sensing optical path OPs2.

As shown in FIG. 11, the noise filter 330 is installed between the nozzle-side beam splitter 322 and the condenser lens 340 so that the indicator light LBm2 guided by the nozzle-side sensing optical path OPs2 is incident. The noise filter 330 can remove the noise contained in the indicated light LBm2 so that the indicated light LBm2 can be shaped into a form suitable for the optical path diagnosis of the laser beam LB. Such a noise filter 330 transmits the indicator light LBm2 guided to the nozzle-side sensing optical path OPs2 to the condenser lens 340 in a state where the noise is removed, so that the result of the optical path diagnosis of the laser beam LB is obtained by the noise. It is possible to prevent an error from occurring.

As shown in FIG. 11, the condenser lens 340 is installed between the noise filter 330 and the nozzle-side sensing member 350 so that the indicated light LBm2 from which noise has been removed is incident. The condenser lens 340 is preferably installed so that the focal point is located on a predetermined sensing surface 350a of the nozzle-side sensing member 350, but is not limited thereto. Such a condensing lens 340 can condense the indicated light LBm2 from which noise has been removed and irradiate the sensing surface 350a of the nozzle-side sensing member 350.

FIG. 12 is a diagram for explaining a method of deriving a nozzle-side sensing optical path using a nozzle-side sensing member, and FIG. 13 is a diagram when a laser beam is transmitted to the nozzle-side optical member without distortion of the optical path. It is a figure which shows the mode of the processing optical path and the nozzle side sensing optical path, and FIG. Is.

The nozzle-side sensing member 350 can sense the indicated light LBm2 focused by the condenser lens 340 and output a nozzle-side optical path signal corresponding to the aspect of the nozzle-side sensing optical path OPs2. The aspect of the nozzle-side sensing optical path OPs2 can include the coordinates of the nozzle-side sensing optical path OPs2, the extension direction of the nozzle-side sensing optical path OPs2, and various other information regarding the nozzle-side sensing optical path OPs2.

As shown in FIG. 12, the nozzle-side sensing member 350 can provide the position of the second beam spot BSm2 of the indicator light LBm2 irradiated on the sensing surface 350a of the nozzle-side sensing member 350 so that it can be sensed. Therefore, the nozzle-side sensing member 350 includes a camera that captures an image of the second beam spot BSm2 of the indicator light LBm2, a PSD sensor that outputs a position sensing signal corresponding to the position of the second beam spot BSm2 of the indicator light LBm2, and a PSD sensor. It may have at least one of various sensors capable of providing information about the position of the second beam spot BSm2 of the other indicator light LBm2. In particular, when the nozzle-side sensing member 350 has a camera, it is preferable, but not limited to, a CCD camera is adopted as the camera.

The diagnosis unit 44 can perform an optical path diagnosis of the laser beam LB based on the nozzle side optical path signal output from the nozzle side sensing member 350 in this way.

As shown in FIG. 12, the diagnostic unit 44 derives the aspect of the nozzle-side sensing optical path OPs2 based on the position of the second beam spot BSm2 of the indicating light LBm2 sensed by the nozzle-side sensing member 350, and then the nozzle side. The optical path difference D3 between the sensing optical path OPs2 and the predetermined second reference sensing optical path OPrs2 can be calculated. In particular, the diagnostic unit 44 irradiates the sensing surface 350a along the position of the second beam spot BSm2 of the indicator light LBm2 irradiated on the sensing surface 350a along the nozzle-side sensing optical path OPs2 and the second reference sensing optical path OPrs2. The optical path difference D3 between the nozzle-side sensing optical path OPs2 and the second reference sensing optical path OPrs2 can be calculated by using the difference from the position of the second reference beam spot BSr2 of the indicated light LBm2.

Here, the second reference sensing optical path OPrs2 is the nozzle side when the laser beam LB is transmitted from the mirror mount assembly 200 located at the last position to the nozzle side beam splitter 322 along the second reference processing optical path OPrp2. Refers to sensing optical path OPs2. As described above, the nozzle-side sensing optical path OPs2 has a second relationship with the processed optical path OPp. Thereby, the second reference sensing optical path OPrs2 can also be installed so as to have a second relationship with the second reference processed optical path OPrp2.

As shown in FIG. 13, when the indicating light LBm is transmitted to the nozzle-side beam splitter 322 along the processing optical path OPp that coincides with the second reference processing optical path OPrp2, the nozzle-side sensing optical path OPs2 is the second reference. It comes to coincide with each other with the sensing optical path OPrs2. Further, as shown in FIG. 14, when the indicator light LBm is transmitted to the nozzle-side beam splitter 322 along the processing optical path OPp deviated from the second reference processing optical path OPrp2 by a predetermined optical path difference D4, the nozzle-side sensing The optical path OPs2 and the second reference sensing optical path OPrs2 are inconsistent with each other by the optical path difference D3 proportional to the optical path difference D4 between the processed optical path OPp and the second reference processed optical path OPrp2.

The diagnostic unit 44 derives the mode of the processed optical path OPp based on the mode of the nozzle-side sensing optical path OPs2 by using the second relationship, and sets the optical path difference D4 between the processed optical path OPp and the second reference processed optical path OPrp2 as a nozzle. It can be calculated based on the optical path difference D3 between the side sensing optical path OPs2 and the second reference sensing optical path OPrs2.

The diagnostic unit 44 determines whether the indicated light LBm is transmitted to the nozzle-side optical member 320 along the second reference processed optical path OPrp2, the mode of the processed optical path OPp derived by using the nozzle-side sensing member 350, the optical path difference D4, and the like. Can be judged based on. The processing light LBp is applied to the processing object P along the processing optical path OPp in the same manner as the indicated light LBm. As a result, when the diagnostic unit 44 determines that the indicator light LBm is transmitted to the nozzle-side optical member 320 along the second reference processing optical path OPrp2, the processing light LBp is a predetermined reference of the processing object P. It can be judged that the position is irradiated. On the other hand, the diagnostic unit 44 determines that the indicated light LBm is transmitted to the nozzle-side optical member 320 along the processed optical path OPp in which the second reference processed optical path OPrp2 and the predetermined optical path difference D4 do not match. In this case, it can be determined that the processing light LBp is emitted to a position separated from the reference position of the processing object P by a predetermined optical path difference D4.

As described above, the laser beam LB oscillated from the laser oscillator 10 is transmitted to the nozzle-side optical member 320 along the processed optical path OPp by the mount-side optical member 220 of the mirror mount assembly 200. Therefore, if the processed optical path OPp and the second reference processed optical path OPrp2 do not match each other, it can be considered that optical path distortion occurs in at least one member of the laser oscillator 10 and the mount-side optical member 220.

By the way, when the optical path diagnosis of the laser beam LB is performed stepwise according to the reference transmission sequence S for each of the mirror mount assemblies 200, the rest excluding the laser oscillator 10 and the mirror mount assembly 200 located at the last rank. Of the mount-side optical members 220 of the mirror mount assembly 200 of the above, it is possible to detect which member causes the optical path distortion. When the diagnostic unit 44 determines that the laser beam LB is transmitted to the mount-side optical member 220 of the mirror mount assembly 200 located at the last position along the first reference processing path, the laser beam 44 determines that the laser beam LB is transmitted to the mount-side optical member 220 of the mirror mount assembly 200. It can be determined whether the LB is transmitted to the nozzle-side optical member 320 along the second reference processing optical path OPrp2.

Further, when the diagnosis unit 44 determines that the laser beam LB is transmitted to the nozzle-side optical member 320 along the processed optical path OPp that does not match the second reference processed optical path OPrp2, the mirror located at the last position is the mirror. It can be determined that the optical path distortion occurs in the mount-side optical member 220 of the mount assembly 200. Then, using the aligner 230, the mirror plate 212 of the mirror mount assembly 200 located at the last position and the mount-side optical member 220 installed on the mirror plate 212 are aligned in a normal state, and other correction operations are performed to perform an optical path. Distortion can be corrected.

FIG. 15 is a diagram showing an aspect of the energy distribution of the laser beam transmitted to the nozzle-side optical member without energy loss, and FIG. 16 is a diagram of the laser beam transmitted to the nozzle-side optical member in a state where energy is lost. It is a figure which shows the mode of the energy distribution.

The nozzle-side sensing member 350 described above may be provided so that both the position of the second beam spot BSm2 of the indicator light LBm2 and the energy of the indicator light LBm2 irradiated on the sensing surface 350a of the nozzle-side sensing member 350 can be sensed. Therefore, the nozzle-side sensing member 350 is an infrared sensor that detects the heat of the indicator light LBm2 irradiated on the sensing surface 350a of the nozzle-side sensing member 350 and senses the position of the second beam spot BSm2 and the energy of the indicator light LBm2. Information on the position of the second beam spot BSm2 of the indicator light LBm2 and the energy of the indicator light LBm2, and the thermal image camera that captures the thermal image of the indicator light LBm2 irradiated on the sensing surface 350a of the nozzle-side sensing member 350. Can be provided with at least one of the sensors capable of providing together.

As shown in FIG. 15, the laser beam LB transmitted to the nozzle-side optical member 320 along the processed optical path OPp without energy loss has a concentric energy distribution mode. On the other hand, as shown in FIG. 16, the laser beam LB transmitted to the nozzle-side optical member 320 along the processed optical path OPp in a state where energy is lost due to an abnormal phenomenon has an energy distribution forming an eccentric circle or an ellipse. Has an aspect. The abnormal phenomenon refers to a phenomenon in which the alignment state of the laser oscillator 10 is poor, the alignment state of the mount-side optical member 220 is poor, and other energy loss of the laser beam LB traveling along the processed optical path OPp can be generated.

Using such an energy distribution mode, the diagnostic unit 44 uses the energy of the indicated light LBm2 sensed by the nozzle-side sensing member 350 to travel along the nozzle-side sensing optical path OPs2, and the energy distribution mode of the indicated light LBm2. After deriving, the energy distribution mode of the laser beam LB traveling along the processed optical path OPp can be derived based on the energy distribution mode of the indicating light LBm2 traveling along the nozzle-side sensing optical path OPs2.

Further, the diagnostic unit 44 determines whether the laser beam LB is transmitted to the nozzle-side optical member 320 along the processed optical path OPp without energy loss, based on the energy distribution mode of the laser beam LB traveling along the processed optical path OPp. Can be judged. In particular, when the diagnostic unit 44 determines that the laser beam LB is transmitted to the mount-side optical member 220 of the mirror mount assembly 200 located at the last position along the processed optical path OPp without energy loss, the laser beam 44 It can be determined whether the LB is transmitted to the nozzle-side optical member 320 along the processed optical path OPp without energy loss.

Further, when the diagnosis unit 44 determines that the laser beam LB is transmitted to the nozzle-side optical member 320 along the processing optical path OPrp2 without energy loss, the processing light LBp is in a normal state in which no energy is lost. It can be determined that the object to be processed P is irradiated. On the other hand, when the diagnostic unit 44 determines that the laser beam LBm is transmitted to the nozzle-side optical member 320 along the processing optical path OPp in a state where the energy is lost, the processing light LBp loses energy. It can be determined that the object to be processed P is irradiated in an abnormal state.

Further, when the diagnosis unit 44 determines that the laser beam LB is transmitted to the nozzle-side optical member 320 along the processed optical path OPp in a state where energy is lost, the diagnosis unit 44 directly transmits the laser beam LB to the nozzle-side optical member 320. It can be determined that the energy loss of the laser beam LB occurs in the mount-side optical member 220 of the mirror mount assembly 200 located at the last position to be transmitted. Then, the laser is subjected to the work of aligning the mirror plate 212 of the mirror mount assembly 200 located at the last position and the mount-side optical member 220 installed on the mirror plate 212 in the normal state by using the aligner 230, and other correction operations. The energy loss of the beam LB can be eliminated.

As described above, according to the laser device 1, the points where the optical path distortion occurs in the entire section of the processed optical path OPp and the points where the optical path distortion occurs based on the results of the optical path diagnosis of the laser beam LB for each of the mirror mount assembly 200 and the laser nozzle assembly 30. It is possible to easily detect which member causes the optical path distortion.

Further, according to the laser device 1, the point where the energy loss of the laser beam LB occurs in the entire section of the processed optical path OPp based on the result of the energy diagnosis of the laser beam LB for each of the mirror mount assembly 200 and the laser nozzle assembly 30. In addition, it is possible to easily detect which member causes the energy loss of the laser beam LB.

FIG. 17 is a diagram showing a mode in which the optical path is switched by the unit aligner, and FIG. 18 is a diagram showing another mode in which the optical path is switched by the unit aligner.

Further, FIG. 19 is a diagram showing a mode in which the optical path is switched by a combination of a plurality of aligners, and FIG. 20 is a mode in which the actual position on the workpiece to be irradiated with the laser beam is adjusted by the aligner. It is a figure which shows.

The optical path of the laser beam LB including the processed optical path OPp, the mounting side sensing optical path OPs1, the nozzle side sensing optical path OPs2, etc. is driven by rotating the adjustment dial 232 of the aligner 230 provided in the mirror mount assembly 200, respectively, to drive the mirror plate 212. The switching can be performed by moving the mount-side optical member 220 mounted on the mirror plate 212 and the mirror plate 212.

By the way, the installation direction of the adjustment dial 232 is determined according to the installation direction of the mirror mount assembly 200 to which the adjustment dial 232 is mounted in the mirror mount assembly 200. As a result, as shown in FIGS. 17 and 18, the direction in which the optical path is switched by the adjustment dial 232 may be different for each adjustment dial 232.

Further, due to tolerances in the manufacturing process, the pitch spacing and shape of the threads formed on the outer peripheral surface of the adjustment dial 232 may be non-uniform. Further, when the laser device 1 is used for a long time, foreign matter may flow into the contact portion between the adjustment dial 232 and the mirror plate 212, the contact portion between the adjustment dial 232 and the base block 211, or wear may occur. There is.

Due to such tolerances, foreign matter, wear, etc., when the adjustment dial 232 is driven to rotate, the actual relationship between the rotation angle of the adjustment dial 232 and the moving distance of the mirror plate 212 does not match the predetermined reference relationship. Singularity may occur. The reference relationship refers to the relationship between the rotation angle of the adjustment dial 232 measured for the adjustment dial 232 having no tolerance, foreign matter, and wear and the moving distance of the mirror plate 212. Further, the size of the tolerance, the inflow amount of foreign matter, the inflow position of foreign matter, the amount of wear, and the like may be different for each adjustment dial 232. As a result, as shown in FIGS. 17 and 18, the mode of generation of the singularity may differ depending on the adjustment dial 232.

In this way, the optical path switching direction, the generation mode of the singular point, etc. are different for each adjustment dial 232. Therefore, the optical path switching indicating the mutual relationship between the rotation direction and rotation angle of the adjustment dial 232 and the optical path switching value by the adjustment dial 232. The function is preferably defined differently for each adjustment dial 232. For example, the optical path switching function for some adjustment dials 232 may be a linear function, and the optical path switching function for some other adjustment dials 232 may be a multi-order function.

The controller can further include a storage unit 46 in which an optical path switching function individually determined for each adjustment dial 232 is stored.

By the way, the inflow amount of foreign matter, the inflow position of foreign matter, the position where wear occurs, the amount of wear, and the like may change irregularly depending on the period of use of the laser device 1. Therefore, it is preferable to periodically update the optical path switching function for each adjustment dial 232 using a machine learning technique.

Therefore, when the predetermined learning conditions are satisfied, the correction unit 42 individually drives the actuators 234 provided in the mirror mount assembly 200 according to the predetermined learning mode, and emits the indicator light LBm. The laser oscillator 10 can be driven so as to oscillate.

The learning conditions are not particularly limited. For example, the learning condition is at least one of whether or not a predetermined reference time has elapsed after updating the optical path switching function and whether or not laser processing of the object to be processed P has stopped. Can include. Then, the correction unit 42 uses the actuators 234 provided in each of the mirror mount assemblies 200, such as when the reference time elapses after the last update of the optical path switching function or when the laser processing of the object P to be processed is stopped. It can be driven according to the learning mode.

The learning mode is not particularly limited. For example, the learning mode may be set so that the adjustment dial 232 provided in each of the mirror mount assemblies 200 is driven to rotate stepwise by a reference angle in a predetermined reference direction. Then, when the learning condition is satisfied, the correction unit 42 rotates the adjustment dial 232 provided in each of the mirror mount assemblies 200 stepwise by the reference angle in the reference direction. The actuator 234 provided in each of the 200 can be driven. In particular, the correction unit 42 intermittently drives the actuator 234 so that the adjustment dial 232 is rotated by a reference angle and then stops for a predetermined standby time, and gives an instruction when the adjustment dial 232 is in standby mode. The laser actuator 10 can be driven intermittently so as to oscillate the optical LBm.

Further, when the learning condition is satisfied, the correction unit 42 can drive the actuators 234 provided in each of the mirror mount assemblies 200 stepwise according to the reference transmission sequence S. That is, the correction unit 42 selectively drives only one actuator 234 step by step according to the learning mode while advancing from the first order to the second order side of the reference transmission sequence S.

When the actuators 234 provided in each of the mirror mount assemblies 200 are individually driven in the learning mode, the storage unit 46 individually analyzes the interrelationship between the rotation direction and rotation angle and the optical path switching value for each adjustment dial 232. Then, the optical path switching function can be individually updated for each adjustment dial 232.

On the other hand, the correction unit 42 diagnoses that the actual position on the processing object P irradiated with the laser beam LB and the reference position of the processing object P do not match each other due to the distortion of the optical path. In this case, the actuators 234 provided in each of the mirror mount assemblies 200 can be driven to correct the distortion of the optical path so that the laser beam LB is irradiated to the reference position of the object P to be processed.

As described above, the diagnostic unit 44 calculates the optical path difference D2 between the processed optical path OPp and the first reference processed optical path OPrp1, the optical path difference D4 between the processed optical path OPp and the second reference processed optical path OPrp2, and then the optical path difference D2. Based on D4, it is diagnosed in which member the distortion of the optical path occurs, and whether the laser beam LB is irradiated to the reference position of the object to be processed P. At this time, since the optical path differences D2 and D4 are generated due to the distortion of the optical path, the optical path differences D2 and D4 can correspond to the vector values of the optical path distortion indicating the magnitude and direction of the distortion of the optical path, respectively. That is, the optical path difference D2 can correspond to the vector value of the optical path distortion generated in the process of transmitting the laser beam LB to the mount side optical member 220, and the optical path difference D4 is such that the laser beam LB is the nozzle side optical member 320. It can correspond to the vector value of the optical path distortion generated in the process of being transmitted to.

In consideration of the characteristics of the optical path differences D2 and D4, the correction unit 42 is provided in at least one of the mirror mount assemblies 200 so that the optical path can be switched only by the switching value corresponding to the optical path differences D2 and D4. The actuator 234 can be selectively driven to correct the distortion of the optical path. That is, the correction unit 42 selectively drives the actuator 234 provided in at least one of the mirror mount assemblies 200 so that the optical paths can be switched by using the adjustment dial 232 to remove the optical path differences D2 and D4. Can be done.

Which of the mirror mount assemblies 200 the correction unit 42 drives the actuator 234 provided in the mirror mount assembly 200, comprehensively considering the optical path differences D2, D4 and the optical path switching function stored in the storage unit 46. , And the method of driving the actuator 234 and the like can be determined.

For example, the correction unit 42 is provided with an actuator 234 in at least one of the mirror mount assemblies 200 so that the optical path distortion is corrected over the entire section of the processing optical path OPp from the laser oscillator 10 to the processing object P. Can be selectively driven. That is, in the correction unit 42, the optical path distortion is generated in the mount side optical member 220 so that all the mount side optical members 220 detected by the diagnosis unit 44 to generate the optical path distortion due to the alignment abnormality are aligned in the normal state. The actuator 234 provided in all the mirror mount assemblies 200 can be selectively driven.

More specifically, in the correction unit 42, in consideration of the optical path switching function stored in the storage unit 46, the adjustment dial 232 provided in each mirror mount assembly 200 that generates the optical path distortion has the optical path difference D2. The actuator 234 provided in each mirror mount assembly 200 that generates optical path distortion can be driven so as to be rotationally driven by the rotation direction and rotation angle corresponding to D4. Then, as shown in FIGS. 17 to 20, the laser beam LB can be irradiated to the reference position of the object to be processed P by correcting the optical path distortion together in all the mirror mount assemblies 200 that generate the optical path distortion. In FIG. 20,'BSp' indicates the beam spot of the processed light LBp irradiated to a specific position of the processed object P separated by the optical path difference D4 from the reference position due to the optical path distortion, and BSr3 is the beam spot of the processed object P. The beam spot of the processing light LBp irradiated to the reference position is shown.

For example, the correction unit 42 selectively corrects the optical path distortion only in the section between the mirror mount assembly 200 located at the last position in the entire section of the processing optical path OPp and the processing object P. The actuator 234 provided in at least one of the mount assemblies 200 can be selectively driven. This is because the optical path distortion is corrected so that the laser beam LB travels along the second reference optical path OPrp2 only in the section between the mirror mount assembly 200 located at the last position and the object P to be processed. It is considered that the laser beam LB can be irradiated to the reference position of the processed object P even if the optical path distortion remains in the remaining section of the processed optical path OPp.

More specifically, the correction unit 42 considers the optical path differences D2 and D4 and the optical path switching function, and makes the optical path difference D4 in the section between the mirror mount assembly 200 located at the last position and the processing object P. The actuator 234 provided in at least one of the mirror mount assemblies 200 can be selectively driven so that it is selectively removed. For example, as shown in FIG. 19, the correction unit 42 of the mirror mount assembly 200 so that the total optical path switching value obtained by adding the switching values of the nozzle-side sensing optical path OPs2 by each of the adjustment dials 232 corresponds to the optical path difference D3. The actuator 234 provided in at least one of them can be selectively driven. At this time, the correction unit 42 preferably selects, but is not limited to, the actuator 234 to be driven so that only the minimum number of actuators 234 are driven in a limited manner.

As described above, according to the laser device 1, the optical path distortion can be automatically corrected by using the aligner 230, so that the processing quality of the processing object P can be improved.

FIG. 21 is a flowchart for explaining a method of diagnosing and correcting a laser apparatus according to a preferred embodiment of the present invention.

Referring to FIG. 21, the method of diagnosing and correcting the laser apparatus 1 is a step (S10) of diagnosing the presence or absence of optical path distortion and energy loss of the laser beam LB, and in step S10, the optical path distortion and energy of the laser beam LB. When the loss is detected, the step (S20) of correcting the optical path distortion and the energy loss of the laser beam LB can be included.

In step S10, the diagnostic unit 44 controls the laser oscillator 10 so that the indicated light LBm oscillates along the processed optical path OPp. Then, the indicating light LBm oscillated from the laser oscillator 10 is distributed to the mount-side sensing optical path OPs1 and the nozzle-side sensing optical path OPs2 by the mounting-side beam splitter 222 and the nozzle-side beam splitter 322 according to the reference transmission sequence S, and the mount-side sensing member. It is transmitted to 260 and the nozzle-side sensing member 350. The mount-side sensing member 260 outputs a mount-side optical path signal corresponding to the mode of the mount-side sensing optical path OPs1 and the energy of the indicator light LBm1 guided to the mount-side sensing optical path OPs1, respectively. Further, the nozzle-side sensing member 350 outputs a nozzle-side optical path signal corresponding to the aspect of the nozzle-side sensing optical path OPs2 and the energy of the indicated light LBm2 guided by the nozzle-side sensing optical path OPs2.

Based on the mount-side optical path signal and the nozzle-side optical path signal, the diagnostic unit 44 determines at which point the optical path distortion and the energy loss of the laser beam LB occur in the entire section of the processed optical path OPp, and which member causes the optical path distortion and the laser. Diagnose whether energy loss of the beam LB occurs or not. At this time, the diagnostic unit 44 can sequentially diagnose the optical path distortion and energy loss of the laser beam LB for each of the mirror mount assembly 200 and the laser nozzle assembly 30 according to the reference transmission sequence S.

Further, the diagnostic unit 44 is in the process of sequentially performing the optical path distortion and energy loss diagnosis work of the laser beam LB according to the reference transmission sequence S for the mirror mount assembly 200 and the laser nozzle assembly 30, while the optical path of the laser beam LB is being sequentially performed. When strain and energy loss are detected, the diagnostic work is stopped. At the same time, the diagnostic unit 44 uses a display device and other display devices to determine the points where the optical path distortion and energy loss of the laser beam LB occur in the entire section of the processed optical path OPp, and the optical path distortion and energy loss of the laser beam LB. Display the members that cause the occurrence of.

Further, as a result of performing the diagnosis work of the optical path distortion and the energy loss of the laser beam LB according to the reference transmission sequence S for all of the mirror mount assembly 200 and the laser nozzle assembly 30, the diagnostic unit 44 performs the diagnosis work of the optical path distortion and the energy loss of the laser beam LB, and as a result, the entire section of the processed optical path OPp. When the optical path distortion and energy loss of the laser beam LB are not detected, the display device is used to indicate that the laser device 1 is in a normal state.

In step S20, the correction unit 42 aligns the members causing the optical path distortion and energy loss of the laser beam LB to the normal state based on the diagnosis result of the optical path distortion and energy loss of the laser beam LB performed in step S10. And other correction work. For example, the correction unit 42 may drive the alignment machine 230 to align the mirror mount 210 of the mirror mount assembly 200 and the mount-side optical member 220 installed on the mirror mount 210 in a normal state, and perform other correction operations. can.

Further, the diagnostic unit 44 checks whether the optical path distortion and energy loss of the laser beam LB are normally corrected by the correction work performed in step S20, and in step S10 of the mirror mount assembly 200 and the laser nozzle assembly 30. Step S10 can be restarted so that the diagnostic work can be performed on the remaining members that have not been subjected to the diagnostic work.

The above description is merely an exemplary explanation of the technical idea of the present invention, and a person having ordinary knowledge in the technical field to which the present invention belongs does not deviate from the essential characteristics of the present invention. Various modifications and modifications will be possible.

Therefore, the examples disclosed in the present invention are not for limiting the technical idea of the present invention, but for explaining the technical idea, and such examples limit the scope of the technical idea of the present invention. It's not something. The scope of protection of the present invention shall be construed according to the following claims, and all technical ideas within the equivalent scope shall be construed as being included in the scope of rights of the present invention.

1 Laser device 10 Laser oscillator 20 Optical system 30 Laser nozzle assembly 200 Mirror mount assembly 210 Mirror mount 211 Base block 212 Mirror plate 213 Fixed block 214 Fastening member 215 Sensor block 220 Mount side optical member 222 Mount side beam splitter 224 Mount side reflection mirror 230 Aligner 232 Adjustment Dial 234 Actuator 240 Noise Filter 250 Condensing Lens 260 Mount Side Sensing Member 310 Laser Nozzle 312 Condensing Lens 320 Nozzle Side Optical Member 322 Nozzle Side Beam Splitter 330 Noise Filter 340 Condensing Lens 350 Nozzle Side Sensing Member LB Laser beam P Machining object LBm, LBm1, LBm2 Indicator light LBp, LBp1 Machining light OPp Machining optical path OPrp1 1st reference machining optical path OPrp2 2nd reference machining optical path OPs1 Mount side sensing optical path OPrs1 1st reference sensing optical path OPs2 Nozzle side Second reference sensing optical path

Claims (7)

A laser oscillator that oscillates a laser beam and
A mirror mount is mounted with the mirror plate mounted side optical member is mounted for transmitting the laser beam oscillated from the laser oscillator, the mirror plate and the mirror plate so that the optical path of the laser beam is switched A plurality of mirror mount assemblies that are provided with an aligner that adjusts the alignment state of the mount-side optical members, and are installed so as to be sequentially transmit according to a predetermined reference transmission order using the mount-side optical members, and a plurality of mirror mount assemblies.
It includes a laser nozzle that irradiates the object to be processed with the laser beam transmitted according to the reference transmission order, and a nozzle-side sensing member that senses the laser beam and outputs a nozzle-side optical path signal corresponding to the mode of the optical path. Laser nozzle assembly and
Based on the nozzle-side optical path signal, the vector value of the optical path distortion generated in the process of transmitting the laser beam to the laser nozzle assembly is calculated, and the laser beam is moved to a predetermined reference position of the object to be processed. When it is diagnosed that the actual position where the laser beam is irradiated and the reference position do not match each other with the diagnostic unit that diagnoses whether the laser beam is irradiated, the optical path corresponds to the vector value of the optical path distortion. It said alignment device is driven to be switched by the switching value, look including a controller for said laser beam and a correcting unit for correcting the optical path distortion of the laser beam to be irradiated to the reference position,
The aligner has an adjustment dial that is mounted on the mirror plate so that the alignment state can be adjusted according to a rotation direction and a rotation angle, switches the optical path, and an actuator that rotationally drives the adjustment dial.
In the controller, an optical path switching function indicating the interrelationship between the rotation direction and the rotation angle and the switching value is individually pre-stored in each of the adjustment dials provided in the plurality of mirror mount assemblies. With more
When the predetermined learning conditions are satisfied, the correction unit individually drives each of the plurality of actuators according to the predetermined learning mode, and causes the laser oscillator to oscillate the laser beam. Driven, the retractor individually analyzes the interrelationships for each of the adjustment dials and individually updates the optical path switching function for each of the adjustment dials.
When correcting the optical path distortion, the correction unit selectively drives the minimum number of actuators among the plurality of actuators based on the optical path switching function updated by the storage unit to switch the optical path. A laser device characterized by switching only a value. The learning condition is at least one of whether or not a predetermined reference time has elapsed after updating the optical path switching function and whether or not laser processing of the processing object has been stopped. The laser apparatus according to claim 1 , further comprising. The learning mode, a plurality of the adjusting dial, characterized in that defined as stepwise rotary drive by the reference angle minutes predetermined in each of the predetermined reference direction, to claim 1 The laser device described. The laser device according to claim 1 , wherein the correction unit drives a plurality of the actuators stepwise according to the reference transmission order when the learning conditions are satisfied. The laser apparatus according to claim 1, wherein the laser nozzle assembly further includes a nozzle-side optical member provided so as to selectively guide at least a part of the laser beam to the nozzle-side sensing member. .. The nozzle-side optical member reflects and transmits the laser beam according to a predetermined branching ratio to branch, and selectively guides at least a part of the laser beam to the nozzle-side sensing member. The laser apparatus according to claim 5 , further comprising a splitter. The laser oscillator selectively oscillates either processing light or indicating light having different wavelength bands and the same optical axis.
The laser apparatus according to claim 6 , wherein the nozzle-side beam splitter is composed of a nozzle-side dichroic mirror that selectively guides at least a part of the indicated light to the nozzle-side sensing member. ..

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