JP6878157B2 - Manufacturing method of droplet ejection head, manufacturing method of image forming apparatus, droplet ejection head and image forming apparatus - Google Patents

Description

The present invention relates to a method for manufacturing a droplet ejection head, a method for manufacturing an image forming apparatus, a droplet ejection head and an image forming apparatus, and in particular, a liquid having a water-repellent film around a nozzle hole which is a droplet ejection port. The present invention relates to a technique for manufacturing a droplet ejection head and an image forming apparatus using the droplet ejection head.

In a droplet ejection head used in an inkjet recording device or the like, a water-repellent film is formed on the ejection side surface of a nozzle plate in which nozzle holes are arranged. Patent Document 1-2 discloses a method for manufacturing a droplet ejection head containing a water-repellent film. The method for manufacturing a droplet ejection head described in Patent Document 1 includes a nozzle forming substrate having a nozzle hole, a water repellent film forming step of forming a water repellent film inside the nozzle hole, and a water repellent film surface on the surface of the nozzle forming substrate. It includes a protective film sticking step of sticking the protective film, a plasma irradiation step of removing the water-repellent film inside the nozzle hole by plasma treatment, and a protective film peeling step of peeling the protective film.

Japanese Unexamined Patent Publication No. 2013-99880 Japanese Unexamined Patent Publication No. 2010-143106

The droplet ejection head manufactured by applying the conventional method has a non-uniformity of the water-repellent film in the direction parallel to the sticking direction in which the protective film is stuck to the nozzle forming substrate during the protective film sticking process. Occurs. For example, in the process of attaching the protective film, the protective film rises in the vicinity of the nozzle hole in the direction in which the protective film is attached, and plasma enters the raised portion to remove a part of the water-repellent film, resulting in the nozzle hole. The surrounding water-repellent film becomes uneven.

Further, in the process of attaching the protective film, a part of the protective film is pushed into the nozzle hole, and the water-repellent film inside the nozzle hole is not partially removed by the plasma treatment, and the water-repellent film inside the nozzle hole is not partially removed. Non-uniformity of the water-repellent film also occurs due to the remaining residue.

If the water-repellent film around the nozzle hole is non-uniform, the ejection direction of the droplets ejected from the nozzle hole is bent, and the ejected droplets land at a position deviated from the target landing position. In the case of an image forming apparatus that forms an image on a medium by adhering droplets ejected from the nozzle hole of the droplet ejection head to the medium, the ejection bending due to the non-uniformity of the water-repellent film causes the droplets to be bent on the medium. The dot formation position shifts, and the quality of the image formed on the medium deteriorates.

The present invention has been made in view of such circumstances, and is a method for manufacturing a droplet ejection head capable of suppressing deterioration of image quality due to non-uniformity of a water-repellent film, a method for manufacturing an image forming apparatus, and a droplet. It is an object of the present invention to provide a discharge head and an image forming apparatus.

In order to solve the problem, the following aspects of the invention are provided.

The method for manufacturing a droplet ejection head according to the first aspect is a water-repellent film forming step of forming a water-repellent film on the ejection side surface of a nozzle forming substrate having a plurality of nozzle holes and inside the nozzle holes, and ejection of the nozzle forming substrate. A protective film sticking step of sticking a protective film on the surface of the water repellent film formed on the side surface, a plasma irradiation step of removing the water repellent film inside the nozzle hole by plasma treatment, and peeling the protective film from the nozzle forming substrate. The protective film peeling step is provided, and the protective film is attached to the nozzle forming substrate in the protective film attaching step. The attachment direction is such that the droplet ejection head including the nozzle forming substrate and the nozzle hole eject the protective film. It is a direction that satisfies the angle θ in the range of −10 ° <θ <10 ° with respect to the relative movement direction with respect to the medium to which the droplets are attached.

According to the first aspect, even if the water-repellent film around the nozzle hole becomes non-uniform due to the variation in the method of attaching the protective film, the direction in which the non-uniform water-repellent film defect occurs is an image. The direction is substantially parallel to the relative movement direction of the droplet ejection head and the medium at the time of formation. Therefore, the direction of discharge bending due to the non-uniformity of the water-repellent film, that is, the direction in which the landing position (dot formation position) of the discharged droplet deviates is substantially parallel to the relative movement direction, and the landing position shifts. Image defects due to are difficult to see. Approximately parallel here refers to parallel or non-parallel including an allowable range of angle θ in the range of −10 ° <θ <10 °. The permissible range of the angle θ is based on the permissible variation in the sticking direction in the work of sticking the protective film.

The method for manufacturing a droplet ejection head according to the second aspect is a water-repellent film forming step of forming a water-repellent film on the ejection side surface of a nozzle forming substrate having a plurality of nozzle holes and inside the nozzle holes, and ejection of the nozzle forming substrate. A protective film sticking step of sticking a protective film on the surface of the water repellent film formed on the side surface, a plasma irradiation step of removing the water repellent film inside the nozzle hole by plasma treatment, and peeling the protective film from the nozzle forming substrate. The protective film peeling step is performed, and the sticking direction of sticking the protective film to the nozzle forming substrate in the protective film sticking step is the nozzle hole arrangement direction of the nozzle row composed of a plurality of nozzle hole arrangement patterns. It is a direction that satisfies the angle θ in the range of −10 ° <θ <10 ° with respect to the direction orthogonal to.

When a plurality of nozzle holes are one-dimensionally arranged on the nozzle forming substrate, the nozzle hole arrangement direction is the arrangement direction of the one-dimensionally arranged nozzle holes.

When a plurality of nozzle holes are two-dimensionally arranged on a nozzle forming substrate, a nozzle array composed of a two-dimensional array pattern can be regarded as substantially equivalent to a single array of nozzle arrays. Means a typical nozzle array. This substantial nozzle array corresponds to a projected nozzle array in which a plurality of two-dimensionally arranged nozzle holes are projected so as to be arranged in the nozzle hole arrangement direction.

Aspect 3 is a method for manufacturing a droplet ejection head in which the shape of the nozzle hole is quadrangular in the method for manufacturing the droplet ejection head according to the first aspect or the second aspect.

A square nozzle having a square nozzle hole has a larger variation in peeling of the water-repellent film depending on the sticking direction in which the protective film is attached, as compared with a nozzle having a circular nozzle hole shape. It is beneficial.

Aspect 4 comprises a step of forming a plurality of nozzle-forming substrate dies in a wafer in the method for manufacturing a droplet ejection head according to any one of aspects 1 to 3, and a plurality of dies in the wafer. The water-repellent film is formed in the state of a wafer containing a plurality of dies in the water-repellent film forming step, and the protective film is attached in the protective film attaching step by using a plurality of dies. This is a method for manufacturing a droplet ejection head, which is performed in the state of a wafer containing the wafer.

According to the fourth aspect, the manufacturing process is easy because the water-repellent film is collectively formed on the plurality of nozzle-forming substrates and the protective film is attached in the state of the wafer.

The method for manufacturing the image forming apparatus according to the fifth aspect is a water-repellent film forming step of forming a water-repellent film on the discharge side surface of a nozzle forming substrate having a plurality of nozzle holes and inside the nozzle holes, and a discharging side of the nozzle forming substrate. A protective film affixing step of attaching a protective film to the surface of the water repellent film formed on the surface, a plasma irradiation step of removing the water repellent film inside the nozzle hole by plasma treatment, and peeling the protective film from the nozzle forming substrate. A step of manufacturing a droplet ejection head including a nozzle forming substrate through a protective film peeling step, and a medium for adhering the manufactured droplet ejection head and the droplets ejected from the nozzle holes of the droplet ejection head. It has a relative movement mechanism for relative movement and an assembly process for arranging the droplet ejection head in combination, and the attachment direction for attaching the protective film to the nozzle forming substrate in the protective film attachment step is the relative movement mechanism. It is a direction that satisfies the angle θ in the range of -10 ° <θ <10 ° with respect to the relative movement direction between the medium and the droplet ejection head, and the assembly process is the relative movement by the protective film sticking direction and the relative movement mechanism. The relative movement mechanism and the droplet ejection head are arranged so as to satisfy the positional relationship in which the angle formed by the direction is the angle θ in the range of −10 ° <θ <10 °.

According to the fifth aspect, it is possible to obtain an image forming apparatus capable of suppressing deterioration of image quality due to non-uniformity of the water-repellent film.

The method for manufacturing the image forming apparatus according to the sixth aspect is a water-repellent film forming step of forming a water-repellent film on the discharge side surface of a nozzle forming substrate having a plurality of nozzle holes and inside the nozzle holes, and a discharging side of the nozzle forming substrate. A protective film affixing step of attaching a protective film to the surface of the water repellent film formed on the surface, a plasma irradiation step of removing the water repellent film inside the nozzle hole by plasma treatment, and peeling the protective film from the nozzle forming substrate. A step of manufacturing a droplet ejection head including a nozzle forming substrate through a protective film peeling step, and a medium for adhering the manufactured droplet ejection head and the droplets ejected from the nozzle holes of the droplet ejection head. It has a relative movement mechanism that moves relative to each other and an assembly process in which the droplet ejection head is arranged in combination. In the protective film attaching process, the protective film is attached to the nozzle forming substrate in a plurality of nozzles. The direction satisfies the angle θ in the range of -10 ° <θ <10 ° with respect to the direction orthogonal to the nozzle hole arrangement direction of the nozzle array composed of the hole arrangement pattern, and the assembly process is a liquid by a relative movement mechanism. The relative movement mechanism and the droplet discharge head are arranged so as to satisfy the positional relationship in which the relative movement direction of the drop discharge head and the medium and the nozzle hole arrangement direction are orthogonal to each other.

According to the sixth aspect, it is possible to obtain an image forming apparatus capable of suppressing deterioration of image quality due to non-uniformity of the water-repellent film.

Aspect 7 is a single-pass method in which in the method of manufacturing the image forming apparatus of Aspect 5 or Aspect 6, the recording of an image on the medium is completed by one relative movement in the relative movement direction between the droplet ejection head and the medium. This is a method of manufacturing an image forming apparatus.

Since the single-pass type image forming apparatus is easily affected by image deterioration due to ejection bending, the application of the present invention is more beneficial.

Aspect 8 is a method of manufacturing an image forming apparatus including an inkjet head bar which is a line head configured by using a droplet ejection head in the method for manufacturing an image forming apparatus according to any one of aspects 5 to 7. is there.

Aspect 9 is an image forming method comprising an inkjet head bar formed by connecting a plurality of head modules as droplet ejection heads in the width direction of a medium orthogonal to the relative moving direction in the method for manufacturing the image forming apparatus of the eighth aspect. It is a method of manufacturing an apparatus.

Aspect 10 is a method of manufacturing an image forming apparatus according to aspect 8 or 9, wherein the image forming apparatus includes a plurality of inkjet headbars for ejecting the same color ink.

According to the tenth aspect, when the ejection directions of the plurality of nozzle holes are aligned and the ejection is shifted in a specific direction, the image is based on the combination of a plurality of inkjet headbars that eject the same color ink. The shift is inconspicuous, and deterioration of image quality can be effectively suppressed.

The droplet ejection head according to the eleventh aspect is a droplet ejection head including a nozzle-forming substrate having a plurality of nozzle holes and a water-repellent film formed on the ejection side surface of the nozzle-forming substrate. The surrounding water-repellent film satisfies the angle θ in the range of −10 ° <θ <10 ° with respect to the relative movement direction between the droplet ejection head and the medium to which the droplet ejected from the nozzle hole is attached. Defective parts of the water repellent film are unevenly distributed.

By using the droplet ejection head of the eleventh aspect, it is possible to form an image of good image quality in which image defects due to the influence of ejection bending due to the non-uniformity of the water-repellent film are inconspicuous.

The droplet ejection head according to the twelfth aspect is a droplet ejection head including a nozzle-forming substrate having a plurality of nozzle holes and a water-repellent film formed on the ejection side surface of the nozzle-forming substrate. The surrounding water-repellent film satisfies the angle θ in the range of -10 ° <θ <10 ° with respect to the direction orthogonal to the nozzle hole arrangement direction of the nozzle array composed of a plurality of nozzle hole arrangement patterns. Defective parts of the water repellent film are unevenly distributed.

By using the droplet ejection head of the twelfth aspect, it is possible to form an image of good image quality in which image defects due to the influence of ejection bending due to the non-uniformity of the water-repellent film are inconspicuous.

The image forming apparatus according to the thirteenth aspect is a droplet ejection head composed of a nozzle forming substrate having a plurality of nozzle holes, a medium for adhering droplets ejected from the nozzle holes of the droplet ejection head, and droplets. An image forming apparatus including a relative moving mechanism that moves the discharge head relative to each other. A water repellent film is formed on the discharge side surface of the nozzle forming substrate, and the water repellent film around the nozzle hole moves relative to each other. The defective parts of the water-repellent film are unevenly distributed in the direction satisfying the angle θ in the range of −10 ° <θ <10 ° with respect to the relative movement direction between the droplet ejection head and the medium by the mechanism.

According to the thirteenth aspect, it is possible to form an image of good image quality in which image defects due to the influence of discharge bending due to the non-uniformity of the water-repellent film are inconspicuous.

The image forming apparatus according to the fourteenth aspect is a droplet ejection head composed of a nozzle forming substrate having a plurality of nozzle holes, a medium for adhering droplets ejected from the nozzle holes of the droplet ejection head, and droplets. An image forming apparatus including a relative moving mechanism for moving the discharge head relative to each other. A water repellent film is formed on the discharge side surface of the nozzle forming substrate, and a plurality of water repellent films around the nozzle hole are formed. Defective parts of the water-repellent film are unevenly distributed in the direction satisfying the angle θ in the range of -10 ° <θ <10 ° with respect to the direction orthogonal to the nozzle hole arrangement direction of the nozzle array composed of the nozzle hole arrangement pattern. ing.

According to the fourteenth aspect, it is possible to form an image of good image quality in which image defects due to the influence of discharge bending due to the non-uniformity of the water-repellent film are inconspicuous.

According to the present invention, deterioration of image quality due to non-uniformity of the water-repellent film can be suppressed.

FIG. 1 is a partial cross-sectional view schematically showing an example of a manufacturing process of a droplet ejection head. FIG. 2 is a partial cross-sectional view schematically showing an example of a manufacturing process of the droplet ejection head. FIG. 3 is a partial cross-sectional view schematically showing an example of a manufacturing process of the droplet ejection head. FIG. 4 is a partial cross-sectional view schematically showing an example of a manufacturing process of the droplet ejection head. FIG. 5 is a partial cross-sectional view schematically showing an example of a manufacturing process of the droplet ejection head. FIG. 6 is a schematic view showing a state in which a droplet is ejected from the nozzle hole of the droplet ejection head. FIG. 7 is a partial cross-sectional view schematically showing the state of the protective film attaching process. FIG. 8 is a partial cross-sectional view schematically showing the state of the plasma irradiation process. FIG. 9 is a partial cross-sectional view schematically showing the state of the protective film peeling process. FIG. 10 is a partial cross-sectional view schematically showing a state in use of the droplet ejection head manufactured through the steps shown in FIGS. 7 to 9. FIG. 11 is a partial cross-sectional view schematically showing the state of the protective film attaching process. FIG. 12 is a partial cross-sectional view schematically showing the state of the plasma irradiation process. FIG. 13 is a partial cross-sectional view schematically showing the state of the protective film peeling process. FIG. 14 is a partial cross-sectional view schematically showing a state in use of the droplet ejection head manufactured through the steps shown in FIGS. 11 to 12. FIG. 15 is a plan view showing a part of the nozzle surface of the droplet ejection head according to the comparative example. FIG. 16 is a diagram schematically showing a printing result when a solid image is recorded on paper using the droplet ejection head according to the comparative example. FIG. 17 is a plan view showing a part of the nozzle surface of the droplet ejection head according to the first embodiment. FIG. 18 is a diagram schematically showing a printing result when a solid image is recorded on paper using the droplet ejection head according to the first embodiment. FIG. 19 is a plan perspective view showing an example of the arrangement form of the inkjet head bar in the single bar type inkjet recording device. FIG. 20 is a plan perspective view showing an example of an arrangement form of an inkjet head bar in a dual bar type inkjet recording device. FIG. 21 is a diagram showing an example of the state of the water-repellent film around the nozzle hole. FIG. 22 is a diagram showing an example of the state of the water-repellent film around the nozzle hole. FIG. 23 is a side view schematically showing the state of ejection bending of the droplet ejection head having the state of the water-repellent film shown in FIG. FIG. 24 is a side view schematically showing the state of ejection bending of the droplet ejection head having the state of the water-repellent film shown in FIG. 22. FIG. 25 is a diagram showing a state of a water-repellent film obtained by applying the technique of the present invention. FIG. 26 is a diagram showing a state of a water-repellent film obtained by applying the technique of the present invention. FIG. 27 is a plan view of dies of a plurality of head modules patterned on a wafer. FIG. 28 is a perspective view of the inkjet head bar. FIG. 29 is an enlarged view of the inkjet head bar as viewed from the nozzle surface side. FIG. 30 is a plan view showing an example of the nozzle surface of the head module. FIG. 31 is a cross-sectional view showing an example of the internal structure of the droplet ejection element for one nozzle of the head module. FIG. 32 is a side view showing the configuration of the inkjet recording device according to the embodiment. FIG. 33 is a block diagram showing a schematic configuration of a control system of the inkjet recording device.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

<< Manufacturing method of droplet ejection head >>
1 to 5 are partial cross-sectional views schematically showing an example of a manufacturing process of a droplet ejection head. The series of drawings from FIG. 1 to FIG. 5 corresponds to a process diagram showing a procedure of a method for manufacturing a droplet ejection head. 1 to 5 show a nozzle forming substrate 10 corresponding to a portion of the nozzle plate of the droplet ejection head. The droplet ejection head is manufactured through steps 1 to 5 shown below.

Step 1: Step of preparing the nozzle forming substrate As shown in FIG. 1, first, the nozzle forming substrate 10 is prepared. The nozzle forming substrate 10 is a substrate having a nozzle hole 12. The nozzle forming substrate 10 is manufactured by using, for example, a silicon substrate. The nozzle hole 12 can be formed by etching. For example, the nozzle hole 12 is processed by anisotropic etching such as reactive ion etching (RIE).

The nozzle-forming substrate 10 may be in the state of a laminated structure in which a channel-forming substrate or the like having another channel structure (not shown) communicating with the nozzle hole 12 is joined. Further, the nozzle-forming substrate 10 may be in a state of a single substrate before other flow path-forming substrates and the like are joined. In the nozzle forming substrate 10, a flow path forming substrate (not shown), a piezoelectric element, or the like is arranged on the upper side of FIG. 1, and droplets are ejected from the nozzle hole 12 toward the lower side of FIG. In FIG. 1, the lower surface of the nozzle forming substrate 10 is the ejection side surface 10A.

Step 2: Water-repellent film forming step Next, as shown in FIG. 2, the water-repellent film 14 is attached to the surface of the nozzle forming substrate 10. There may be various forms of the material and the method of forming the water-repellent film 14. The water-repellent film 14 can be formed by using, for example, a fluorine-based silane coupling agent. The water-repellent film 14 can be formed by using a physical vapor deposition method such as a vapor deposition method. The water-repellent film 14 is formed on the discharge side surface 10A and the nozzle inner surface 10B of the nozzle forming substrate 10.

Step 3: Protective film affixing step Of the water-repellent film 14 formed on the surface of the nozzle forming substrate 10, only the water-repellent film 14 attached to the discharge side surface 10A is left, and the water-repellent film 14 attached to the nozzle inner surface 10B is left. It is necessary to remove the film 14. Therefore, as shown in FIG. 3, the protective film 16 is attached to the place where the water-repellent film 14 is desired to remain, that is, on the surface of the water-repellent film 14 formed on the discharge side surface 10A of the nozzle-forming substrate 10.

The protective film 16 is a film adhesive tape in which an adhesive is applied to one side surface of a film as a base material. As the protective film 16, for example, a weakly adhesive film using a polyester film having a thickness of 80 μm as a base material and using an olefin elastomer as an adhesive can be used. The protective film 16 is attached to the surface of the water-repellent film 14 by bringing the adhesive side of the protective film 16 into contact with the water-repellent film 14. The arrow A in FIG. 3 indicates the sticking direction in which the protective film 16 is stuck. The sticking direction means the direction (direction) in which the protective film 16 is stuck. In FIG. 3, the protective film 16 is attached in the direction of the arrow A.

Step 4: Plasma irradiation step Next, as shown in FIG. 4, the water-repellent film 14 inside the nozzle is removed by plasma-treating the inside of the nozzle. That is, the nozzle-forming substrate 10 is subjected to plasma treatment from the side opposite to the protective film 16 (from the flow path side connected to the nozzle hole 12) to remove the water-repellent film 14 attached to the nozzle inner surface 10B. As a method of plasma treatment, for example, the nozzle forming substrate 10 is placed in a vacuum chamber, evacuated, and then oxygen is substituted to generate oxygen plasma.

The plasma can reach the inside of the nozzle via a pressure chamber or other flow path formed on the flow path forming substrate (not shown). The water repellent film 14 in the plasma exposed area is removed.

The plasma irradiation step is not limited to the process using the vacuum decompression plasma, and the atmospheric pressure plasma by the gas flow can also be used. In this case, for example, dry air or nitrogen can be used for the gas flow.

Step 5: Protective film peeling step Then, as shown in FIG. 5, the protective film 16 is peeled off from the nozzle forming substrate 10 and removed. In this way, a droplet ejection head including a nozzle plate having a water-repellent film 14 formed on the ejection side surface 10A of the nozzle forming substrate 10 can be obtained.

FIG. 6 is a cross-sectional view schematically showing a state of the droplet ejection head generated through the manufacturing method of the droplet ejection head including the procedures 1 to 5 when the droplet ejection head is used. The inside of the nozzle is filled with ink 20, and a droplet 22 of ink is ejected from the nozzle hole 12 by driving a piezoelectric element (not shown).

<< Explanation of issues >>
During the protective film sticking step described with reference to FIG. 3, the sticking state of the protective film 16 varies, and the protective film 16 may float in the vicinity of the nozzle holes. The “floating” refers to a state in which a part that should be in close contact with the film is released and a gap is formed between the protective film 16 and the water-repellent film 14.

The drawings of FIGS. 7 to 10 are explanatory views of discharge bending caused by the lifting of the protective film 16. FIG. 7 is a partial cross-sectional view schematically showing the state of the protective film attaching process. As shown in FIG. 7, a lift 26 of the protective film 16 may occur in the vicinity of the nozzle hole within the range of variation in the sticking state of the protective film 16 allowed in the protective film sticking step. In the example of FIG. 7, a space due to the floating 26 is generated on the left side of the nozzle hole 12, that is, on the upstream side in the direction in which the protective film is attached.

FIG. 8 is a partial cross-sectional view schematically showing the state of the plasma irradiation process. When plasma irradiation is performed with the floating 26 of the protective film 16 present, the water-repellent film 14 exposed on the floating 26 portion is removed.

FIG. 9 is a partial cross-sectional view schematically showing the state of the protective film peeling process. When the protective film 16 is peeled off from the nozzle forming substrate 10 after the plasma irradiation step shown in FIG. 8, a nozzle plate having a water repellent film 14 formed on the discharge side surface 10A of the nozzle forming substrate 10 as shown in FIG. Is obtained. As is clear from a comparison between FIGS. 9 and 4, in the example of FIG. 9, a part of the water-repellent film 14 in the vicinity of the nozzle hole 12 is peeled off to form a water-repellent film defective portion 30, and the area around the nozzle hole 12 is formed. The water repellent film 14 is non-uniform.

FIG. 10 is a partial cross-sectional view schematically showing a state in use of the droplet ejection head generated through the steps described in FIGS. 7 to 9. The inside of the nozzle is filled with ink 20, and a droplet 22 of ink is ejected from the nozzle hole 12 by driving a piezoelectric element (not shown). At this time, the ejection direction of the droplet 22 bends toward the water-repellent film defective portion 30.

The drawings of FIGS. 11 to 14 are explanatory views of the discharge direction bending due to the lifting of the protective film 16 as compared with the drawings of FIGS. 7 to 10.

FIG. 11 is a partial cross-sectional view schematically showing the state of the protective film attaching process. As shown in FIG. 11, the floating 26 of the protective film 16 may occur in the vicinity of the nozzle hole within the range of variation in the sticking state of the protective film 16 allowed in the protective film sticking step. In the example of FIG. 11, a space due to the floating 26 is generated on the right side of the nozzle hole 12, that is, on the downstream side in the direction in which the protective film is attached.

FIG. 12 is a partial cross-sectional view schematically showing the state of the plasma irradiation process. When plasma irradiation is performed with the floating 26 of the protective film 16 present, the water-repellent film 14 exposed on the floating 26 portion is removed.

FIG. 13 is a cross-sectional view schematically showing the state of the peeling process. When the protective film 16 is peeled off from the nozzle forming substrate 10 after the plasma irradiation step shown in FIG. 12, the nozzle plate in which the water repellent film 14 is formed on the discharge side surface 10A of the nozzle forming substrate 10 as shown in FIG. Is obtained. As is clear from a comparison between FIGS. 13 and 4, in the example of FIG. 13, a part of the water-repellent film 14 in the vicinity of the nozzle hole 12 is peeled off to form a water-repellent film defective portion 30, and the vicinity of the nozzle hole 12 is formed. The water repellent film 14 is non-uniform.

FIG. 14 is a cross-sectional view schematically showing a state in use of the droplet ejection head generated through the steps described in FIGS. 11 to 13. The inside of the nozzle is filled with ink 20, and a droplet 22 of ink is ejected from the nozzle hole 12 by driving a piezoelectric element (not shown). The ejection direction of the droplet 22 bends toward the water-repellent film defective portion 30.

As described with reference to FIGS. 7 to 14, the water-repellent film 14 around the nozzle hole 12 becomes non-uniform due to the floating of the protective film 16 that occurs in the process of attaching the protective film, and as a result, the protective film is attached. The ejection direction of the droplet bends in a direction parallel to the direction. If this is not taken into consideration, the quality of the image formed by using the droplet ejection head deteriorates.

Patent Document 1 and Patent Document 2 do not describe the direction in which the protective film is attached. Further, Patent Document 1 and Patent Document 2 do not describe the relationship between the relative movement direction of the paper and the droplet ejection head at the time of image formation and the protective film sticking direction.

In the present disclosure, even if non-uniformity (variation) of the water-repellent film due to the method of attaching the protective film 16 occurs, the droplets that can suppress the deterioration of the image quality formed by the droplets ejected from the nozzle holes can be suppressed. A method for manufacturing a discharge head and a method for manufacturing an image forming apparatus are provided. Further, the present disclosure provides a droplet ejection head and an image forming apparatus capable of suppressing deterioration of image quality formed by droplets ejected from a nozzle hole.

In the present specification, the relative movement direction between the paper and the droplet ejection head at the time of image formation is referred to as “paper-head relative movement direction”. Paper is an example of a "medium". In the case of an inkjet recording device that forms an image on paper by a single-pass method using a line head, the "paper-head relative movement direction" corresponds to the paper transport direction.

<< Outline of Embodiment 1 >>
In the method for manufacturing a droplet ejection head according to the first embodiment, in the protective film attaching step, the direction in which the protective film 16 is attached is set to the paper-head relative movement direction (θ = 0 °). As a result, even if the water-repellent film 14 around the nozzle hole 12 becomes non-uniform, the bending in the ejection direction in the paper-head relative movement direction is not noticeable as an image quality defect, and thus is unlikely to appear as an image defect.

This will be specifically described with reference to FIGS. 15 to 18. Here, an inkjet recording device that forms an image by a single-pass method using a line head will be illustrated. In the case of a single-pass inkjet recording device, the "paper-head relative movement direction" corresponds to the paper transport direction. The alignment direction of the nozzle holes 12 in the line head is defined as the X direction, and the paper transport direction is defined as the Y direction. The X direction corresponds to the main scanning direction, and the Y direction corresponds to the sub-scanning direction.

<Comparison example>
FIG. 15 is a plan view showing a part of the nozzle surface of the droplet ejection head according to the comparative example. FIG. 15 schematically shows the state of the water-repellent film around the nozzle hole. A plurality of nozzle holes 12 are two-dimensionally arranged on the nozzle surface of the droplet ejection head 40. In FIG. 15, for convenience of illustration, only 4 × 3 nozzle holes 12 arranged in 4 rows and 3 columns are shown. The nozzle hole 12 has a quadrangular shape in a plan view.

In FIG. 15, the arrow B indicates the protective film affixing direction in the protective film affixing step. The droplet ejection head 40 has a protective film affixing direction in a direction parallel to the X direction (θ = 90 °), and a water repellent film defective portion 30 is generated at an end portion in the direction parallel to the X direction of the nozzle. ..

When the droplet ejection head 40 shown in FIG. 15 is mounted on the inkjet recording device, the paper is conveyed in the Y direction, and an image is recorded, the result is as shown in FIG.

FIG. 16 is a diagram schematically showing a printing result when a solid image is recorded on paper 44 using the droplet ejection head 40. A solid image refers to an image having a uniform density with a single color. The upward arrow in FIG. 16 indicates the paper transport direction.

Each of the lines 46 in the Y direction shown in FIG. 16 indicates a line recorded by ejecting ink from each of the 4 × 3 nozzle holes 12 shown in FIG. The discharge direction of each nozzle hole 12 varies in the X direction due to the influence of the peeling of the water-repellent film 14 (water-repellent film defective portion 30). Therefore, the image recorded on the paper 44 has conspicuous streaks.

<Embodiment 1>
On the other hand, FIG. 17 is a plan view showing a part of the nozzle surface of the droplet ejection head according to the first embodiment. FIG. 17 schematically shows the state of the water-repellent film 14 around the nozzle hole 12. A plurality of nozzle holes 12 are two-dimensionally arranged on the nozzle surface of the droplet ejection head 50. In FIG. 17, the arrow C indicates the protective film affixing direction in the protective film affixing step. The droplet ejection head 50 has a protective film affixing direction parallel to the Y direction, and a water-repellent film defective portion 30 is generated at an end portion in the direction parallel to the Y direction of the nozzle.

When the droplet ejection head 50 shown in FIG. 17 is mounted on the inkjet recording device, the paper is conveyed in the Y direction, and an image is recorded, the result is as shown in FIG.

FIG. 18 is a diagram schematically showing a printing result when a solid image is recorded on paper 44 using the droplet ejection head 50. Each of the lines 46 in the Y direction shown in FIG. 18 indicates a line recorded by ejecting ink from each of the 4 × 3 nozzle holes 12 shown in FIG. Although the ejection direction of each nozzle hole 12 of the droplet ejection head 50 shown in FIG. 17 is bent in the Y direction due to the influence of the peeling of the water repellent film 14, the X direction is relative to the X coordinate of each nozzle hole 12. It is discharged accurately. That is, according to the first embodiment, the influence of the ejection direction bending due to the floating of the protective film 16 which is difficult to avoid in the manufacturing process becomes the direction coincide with the paper-head relative movement direction, so that the printed image It is unlikely to appear as a defect in image quality.

It should be noted that the human eye can easily see the image defect connected to the paper transport direction. As shown in FIG. 18, variations in the Y direction (unevenness of the print start portion and the print complete portion) due to the positions of the print start portion and the print complete portion of each line 46 being different in the Y direction are visually recognized in the actual printed matter. hard.

Further effects can be obtained by applying the technique of the present disclosure to a single-pass inkjet recording apparatus in which streaks are likely to occur due to bending in the ejection direction in the X direction perpendicular to the paper transport direction.

<Relationship between the sticking direction of the protective film and the relative movement direction of the paper-head>
The sticking direction of the protective film is preferably parallel to the paper-head relative moving direction, but is not required to be exactly parallel. Considering the permissible range such as the work variation of the actual protective film sticking work, the sticking direction of the protective film should be an angle θ in the range of -10 ° <θ <10 ° with respect to the paper-head relative movement direction. Any direction may be satisfied.

From another point of view, the sticking direction of the protective film is −10 ° <θ <with respect to the direction orthogonal to the nozzle hole arrangement direction of the substantial nozzle array formed by the arrangement pattern of the two-dimensional nozzle arrangement. Any direction may be used as long as it satisfies the angle θ in the range of 10 °.

In the droplet ejection head manufactured by applying the method for manufacturing the droplet ejection head according to the first embodiment, the water-repellent film around the nozzle hole has a water-repellent film of −10 ° <θ <with respect to the paper-head relative movement direction. The defective parts of the water-repellent film are unevenly distributed in the direction satisfying the angle θ in the range of 10 °.

Expressed from another point of view, in the droplet ejection head manufactured by applying the method for manufacturing the droplet ejection head according to the first embodiment, the water-repellent film around the nozzle hole is arranged in a two-dimensional nozzle arrangement. Defective parts of the water-repellent film are unevenly distributed in the direction satisfying the angle θ in the range of -10 ° <θ <10 ° with respect to the direction orthogonal to the nozzle hole arrangement direction of the substantial nozzle array composed of the pattern. Will be.

<About the shape of the nozzle hole>
In the first embodiment, the rectangular nozzle hole has been described. Comparing the case where the nozzle hole shape is quadrangular and the case where the nozzle hole shape is circular, it is more difficult to uniformly attach the protective film when the nozzle hole shape is quadrangular. When the protective film is attached to the nozzle forming substrate 10, the circular nozzle has no step, so that it is less likely to be lifted and can be attached neatly.

Therefore, when the nozzle hole shape is quadrangular, the water-repellent film variation generated around the nozzle hole is more likely to occur than when the nozzle hole shape is circular. In carrying out the present invention, the shape of the nozzle hole is not particularly limited, but the application of the present invention is particularly effective for a droplet ejection head having a quadrangular nozzle. The quadrangle here means a square and a rectangle, and the quadrangle nozzle means a square nozzle and a rectangular nozzle.

<< About single bar method and dual bar method >>
FIG. 19 is a plan perspective view showing an example of the arrangement form of the inkjet head bar in the single bar type inkjet recording device. The single bar method is a device configuration including a single inkjet head bar for each color of ink. The inkjet head bar refers to a bar-shaped inkjet head that constitutes a line head.

For example, in the case of an inkjet recording device that uses four color inks of cyan (C), magenta (M), yellow (Y), and black (K), as shown in FIG. 19, one inkjet head bar 70K for each color. , 70C, 70M, 70M, 70Y.

In the example of FIG. 19, from the upstream side in the paper transport direction (from the bottom of FIG. 19) to the downstream side, the inkjet head bar 70K for black ink ejection amount, the inkjet head bar 70C for cyan ink ejection, and the magenta ink ejection amount. The inkjet head bar 70M and the inkjet head bar 70Y for ejecting yellow ink are arranged side by side in this order, but the number of ink colors (number of color types) and the arrangement order of the inkjet head bars are not particularly limited.

FIG. 20 is a plan perspective view showing an example of an arrangement form of an inkjet head bar in a dual bar type inkjet recording device. The dual bar system is a device configuration including two inkjet head bars for each color of ink. That is, the dual bar method is a method having two inkjet headbars for ejecting ink of the same color. For example, in the case of an inkjet recording device that uses four color inks of cyan (C), magenta (M), yellow (Y), and black (K), as shown in FIG. 20, two inkjet headbars 70K1 for each color. , 70K2, 70C1, 70C2, 70M1, 70M2, 70Y1, 70Y2.

Also in the case of the dual bar method, the number of ink colors (number of color types) and the arrangement order of the inkjet headbars are not particularly limited.

Further, the device configuration is not limited to the dual bar system, and may have three or more inkjet head bars for ejecting ink of the same color. A method having a plurality of inkjet headbars for ejecting ink of the same color can improve the printing speed as compared with the single bar method.

<< Tendency of peeling of water-repellent film (variation mode) >>
There are several types of "variation modes" that indicate the tendency of the water-repellent film to peel off. As shown in FIG. 3, in addition to the random peeling mode in which the peeling of the water-repellent film 14 around the nozzle hole occurs randomly (irregularly) on the upstream side and / or the downstream side in the protective film attachment direction. As shown in FIGS. 21 and 22, the direction in which the water-repellent film 14 is peeled off may be determined in one direction.

21 and 22 are views showing an example of the state of the water-repellent film around the nozzle hole. FIG. 21 shows an example in which the water-repellent film tends to peel off on the upstream side in the protective film affixing direction around the nozzle hole. FIG. 22 shows an example in which the water-repellent film tends to peel off on the downstream side in the protective film affixing direction around the nozzle hole.

FIG. 23 is a side view schematically showing the state of ejection bending of the droplet ejection head 41 having the state of the water-repellent film shown in FIG. As described with reference to FIG. 21, when the water-repellent film 14 around the nozzle holes has a certain regularity in peeling, as shown in FIG. 23, the directions of the droplets ejected from the nozzle holes are all in the same direction. The landing position of the droplets ejected from each nozzle hole shifts in the same direction.

FIG. 24 is a side view schematically showing the state of ejection bending of the droplet ejection head 42 having the state of the water-repellent film shown in FIG. 22. As described with reference to FIG. 22, when the water-repellent film 14 around the nozzle holes has a certain regularity in peeling, as shown in FIG. 24, the directions of the droplets ejected from the nozzle holes are in the same direction. Aligned, the landing position of the droplets ejected from each nozzle hole shifts in the same direction.

In the case of a single-bar inkjet recording apparatus using the droplet ejection head 41 or 42 having the state of the water-repellent film shown in FIG. 21 or FIG. 22, the droplets of ink ejected from each nozzle hole are shown in FIG. 23 or FIG. As shown in FIG. 24, the printed image is drawn almost neatly because it only shifts in the same direction as a whole.

On the other hand, when the droplet ejection head 41 having the water-repellent film state shown in FIG. 21 and the droplet ejection head 42 having the water-repellent film state shown in FIG. 22 are used side by side as a dual bar system, Since the ejection direction of the droplets of the same color ink is bent in the opposite direction, the shift of the printed image is conspicuous. In the case of the dual bar method, the image data is usually divided and sent to the two bars, and the two images recorded by each inkjet head bar are shifted in the X direction.

Therefore, when the dual bar method is applied, even in the variation mode having the state of the water-repellent film shown in FIG. 21 or FIG. 22, an image defect is caused. In this regard, by applying the technique of the present invention, it is possible to avoid the occurrence of image defects even in the variation mode of the water-repellent film showing a certain regularity as described with reference to FIG. 21 or FIG.

25 and 26 are diagrams showing the state of the water-repellent film obtained by applying the technique of the present invention instead of FIGS. 21 and 22.

FIG. 25 shows an example in which the water-repellent film tends to peel off on the upstream side in the protective film affixing direction around the nozzle hole. FIG. 26 shows an example in which the water-repellent film tends to peel off on the downstream side in the protective film affixing direction around the nozzle hole.

In both cases of FIG. 26 and FIG. 26, the peeling of the water-repellent film occurs in the Y direction parallel to the paper transport direction. Therefore, by applying the droplet ejection head having such a water-repellent film state to the dual bar method, although the two images are displaced in the Y direction, there is no deviation in the X direction, and the deviation in the Y direction is human. It is hard to be recognized by the eyes.

Therefore, the present invention is more effective in the dual bar system. Further, it is useful to apply the present invention not only to the dual bar method but also to the multi-bar method provided with two or more inkjet headbars for ejecting ink of the same color.

<< Wafer process >>
The inkjet head bar is configured by connecting a plurality of head modules in the X direction. The head module is manufactured by processing a silicon substrate. FIG. 27 is a plan view of the dies 62 of the plurality of nozzle forming substrates 10 patterned on the wafer 60, and shows an example of patterns of the plurality of dies 62 constituting the head module.

The method for manufacturing a droplet ejection head according to the embodiment may include a step of forming a plurality of nozzle forming substrate 10 dies 62 in the wafer 60.

The orientations of the plurality of dies 62 in the wafer 60 are aligned. The formation of the water-repellent film in the water-repellent film forming step is performed in the state of the wafer 60 including the plurality of dies 62. Further, the protective film 16 is attached in the protective film attaching step in the state of the wafer 60 including the plurality of dies 62.

By aligning the orientations of the plurality of dies 62 as shown in FIG. 27, the protective film 16 can be attached to the entire wafer 60 in the same orientation. This simplifies the manufacturing process.

<< About verification method of non-uniformity of water-repellent film >>
The non-uniformity of the water-repellent film 14 formed on the nozzle surface of the droplet ejection head may be difficult to confirm with the naked eye. The distribution of the water-repellent film around the nozzle hole can be investigated by using the following method.

[Method 1] The distribution of fluorine is investigated using a time-of-flight secondary ion mass spectrometer (TOF-SIMS).

[Method 2] Wet the area around the nozzle hole with a liquid having a low surface tension, and observe the presence or absence of a water-repellent film with a microscope.

<< Configuration example of inkjet head bar >>
A configuration example of an inkjet head bar used in the inkjet recording apparatus according to the embodiment will be described.

FIG. 28 is a perspective view of the inkjet head bar 110. The inkjet head bar 110 is a print head installed in a drawing unit of a single-pass inkjet recording device, and is a full-line type line head in which a plurality of head modules 112-i are arranged in the X direction and lengthened. ing. The full-line type line head is also called a page wide head.

The inkjet head bar 110 is configured by connecting a plurality of (n or more integers) head modules 112-i (i = 1,2, ... n) in the X direction. Here, an example in which 17 (n = 17) head modules 112-i are arranged is shown. A plurality of head modules 112-i (i = 1,2, ... n) are attached to a common frame 116 and integrated to form a bar-shaped line head (inkjet head bar).

The frame 116 functions as a frame for fixing the plurality of head modules 112-i. Each head module 112-i is fixed to the frame 116 with the nozzle surface 120 facing in a common direction. The structure of each head module 112-i is common.

Each head module 112-i is manufactured by applying the method for manufacturing a droplet ejection head according to the first embodiment described above.

A flexible substrate 118 is connected to each head module 112-i. A drive signal, a discharge control signal, and the like are supplied to each head module 112-i via the flexible substrate 118.

FIG. 29 is an enlarged view of the inkjet head bar 110 as viewed from the nozzle surface 120 side. Each head module 112-i is supported by head module holding members 122 from both sides in the Y direction, and both ends in the X direction are supported by head protection members 124.

FIG. 30 is a plan view showing an example of the nozzle surface 120 of the head module 112-i. The head module 112-i has an end face on the long side along the v direction having an inclination of an angle γ with respect to the X direction and a short side along the w direction having an inclination of an angle α with respect to the Y direction. It is a parallelogram with an end face in a plan view. Nozzle holes 12 are two-dimensionally arranged on the nozzle surface 120 of the head module 112-i. Although FIG. 30 shows an example in which the shape of the nozzle hole 12 is circular, the shape of the nozzle hole 12 may be quadrangular. The projected nozzle row LN in which a plurality of two-dimensionally arranged nozzle holes 12 are projected so as to line up in the X direction is equivalent to a row of nozzle rows in which the nozzle holes 12 are arranged at equal intervals at a nozzle density that achieves recording resolution. Is.

By connecting a plurality of head modules 112-i in the X direction (see FIG. 29), the inkjet head bar 110 is formed with a nozzle array that covers the entire printing range of the paper.

The full-line inkjet headbar applied to the single-pass method is not limited to the case where the entire surface of the paper is the print range, but also when a part of the paper is the print area (for example, a margin around the recording medium). In the case of providing a portion, etc.), it suffices if a nozzle row in a range required for printing is formed.

The number of nozzles, the nozzle density, and the arrangement form of the nozzles of the head module 112-i are not particularly limited. Each of the head modules 112-i corresponds to an example of a "droplet ejection head".

<< Example of internal structure of head module >>
The head module 112-i includes an ejection energy generating element that generates ejection energy required for ink ejection corresponding to each nozzle hole 12. The discharge energy generating element may be, for example, a piezoelectric element or a heat generating element. The head module 112-i ejects ink droplets on demand according to a drive signal and an ejection control signal supplied via the flexible substrate 118.

FIG. 31 is a cross-sectional view showing an example of the internal structure of the droplet ejection element for one nozzle of the head module 112-i. The head module 112-i has a nozzle plate 130 in which a nozzle hole 12 which is an ink droplet ejection port is formed, and a flow path such as a pressure chamber 132, a supply port 134, and a common flow path 136 corresponding to the nozzle hole 12. It includes the formed flow path forming plate 138. The nozzle plate 130 is a member corresponding to the nozzle forming substrate 10.

The flow path forming plate 138 forms a side wall portion of the pressure chamber 132, and also forms a supply port 134 as a narrowing portion (maximum narrowing portion) of an individual supply path for guiding ink from the common flow path 136 to the pressure chamber 132. It is a road forming member. The flow path forming plate 138 may be composed of one substrate, or may have a structure in which a plurality of substrates are laminated. The nozzle plate 130 and the flow path forming plate 138 can be processed into a required shape by using silicon as a material and using semiconductor manufacturing technology.

A plurality of pressure chambers 132 are connected to the common flow path 136 via their respective supply ports 134. Ink is supplied to the common flow path 136 from the outside of the head module 112-i.

The diaphragm 140 forming a part of the surface (top surface in FIG. 31) of the pressure chamber 132 is provided with a piezoelectric element 144 provided with an individual electrode 142 for each pressure chamber 132. The diaphragm 140 of this example is made of silicon with a conductive layer that functions as a common electrode 146 corresponding to the lower electrode of the piezoelectric element 144, and also serves as a common electrode of the piezoelectric element 144 arranged corresponding to each pressure chamber 132. .. It is also possible to form the diaphragm with a non-conductive material such as resin. In this case, a common electrode layer made of a conductive material such as metal is formed on the surface of the diaphragm member. Further, a diaphragm that also serves as a common electrode may be formed of a metal (conductive material) such as stainless steel.

By applying a driving voltage to the individual electrodes 142, the piezoelectric element 144 is deformed to change the volume of the pressure chamber 132, and the pressure change accompanying this causes ink to be ejected from the nozzle hole 12. After ejecting the ink, new ink is refilled in the pressure chamber 132 from the common flow path 136 through the supply port 134.

By selecting the drive voltage applied to the individual electrodes 142, the head module 112-i has a small drop having a relatively small amount of ink from each nozzle hole 12, and a medium drop having a relatively large amount of ink than the small drop. It is possible to eject one of three types of ink droplets, that is, a large droplet having a relatively larger amount of ink than a medium droplet.

The ink chamber unit 150 including the nozzle hole 12, the pressure chamber 132, the supply port 134, and the piezoelectric element 144 is a droplet ejection element as a recording element unit responsible for recording one pixel. The head module 112-i includes a plurality of ink chamber units 150 corresponding to the two-dimensional nozzle arrangement described with reference to FIG. The nozzle portion including the nozzle hole 12 may be referred to as a "nozzle". The ink chamber unit 150 is an example of an ejector as a droplet ejection mechanism.

<< Example of device configuration of inkjet recording device >>
FIG. 32 is a side view showing the configuration of the inkjet recording device 201 according to the embodiment. The inkjet recording device 201 is an example of an image forming device. The inkjet recording device 201 includes a paper feeding unit 210, a processing liquid applying unit 220, a processing liquid drying unit 230, a drawing unit 240, an ink drying unit 250, and an integrating unit 260.

The paper feed unit 210 automatically feeds the paper P one by one. The paper feed unit 210 includes a paper feed device 212, a feeder board 214, and a paper feed drum 216. The type of paper P is not particularly limited, but for example, printing paper mainly composed of cellulose such as high-quality paper, coated paper, and art paper can be used. Paper P corresponds to a form of medium on which an image is formed. The paper P is placed on the paper feed tray 212A in a bundle in which a large number of sheets are stacked.

The paper feeding device 212 takes out the bundled paper P set in the paper feeding table 212A one by one from the top and feeds the paper P to the feeder board 214. The feeder board 214 conveys the paper P received from the paper feed device 212 to the paper feed drum 216.

The paper feed drum 216 receives the paper P to be fed from the feeder board 214, and conveys the received paper P to the processing liquid applying unit 220.

The treatment liquid application unit 220 applies the treatment liquid to the paper P. The treatment liquid is a liquid having a function of aggregating, insolubilizing or thickening the color material components in the ink. The treatment liquid application unit 220 includes a treatment liquid application drum 222 and a treatment liquid application device 224.

The processing liquid application drum 222 receives the paper P from the paper feed drum 216 and transfers the received paper P to the processing liquid drying unit 230. The processing liquid application drum 222 is provided with a gripper 223 on the peripheral surface, and the paper P is wound around the peripheral surface and conveyed by gripping and rotating the tip end portion of the paper P with the gripper 223.

The treatment liquid coating device 224 applies the treatment liquid to the paper P conveyed by the treatment liquid application drum 222. The treatment liquid is applied with a roller.

The treatment liquid drying unit 230 dries the paper P coated with the treatment liquid. The treatment liquid drying unit 230 includes a treatment liquid drying drum 232 and a warm air blower 234. The processing liquid drying drum 232 receives the paper P from the processing liquid application drum 222, and transfers the received paper P to the drawing unit 240. The treatment liquid drying drum 232 is provided with a gripper 233 on its peripheral surface. The processing liquid drying drum 232 conveys the paper P by gripping the tip end portion of the paper P with the gripper 233 and rotating the paper P.

The hot air blower 234 is installed inside the processing liquid drying drum 232. The warm air blower 234 blows warm air onto the paper P conveyed by the processing liquid drying drum 232 to dry the processing liquid.

The drawing unit 240 includes a drawing drum 242, a head unit 244, and an image reading device 248. The drawing drum 242 receives the paper P from the processing liquid drying drum 232 and transfers the received paper P to the ink drying unit 250. The drawing drum 242 is provided with a gripper 243 on the peripheral surface, and the paper P is wound around the peripheral surface and conveyed by gripping and rotating the tip of the paper P with the gripper 243. The drawing drum 242 has a suction mechanism (not shown), and sucks and conveys the paper P wound around the peripheral surface to the peripheral surface. Negative pressure is used for adsorption. The drawing drum 242 has a large number of suction holes on the peripheral surface, and the paper P is attracted to the peripheral surface by sucking from the inside through the suction holes.

The head unit 244 includes an inkjet head 246C, 246M, 246Y, and 246K. Inkjet head 246C, a recording head that ejects droplets of cyan (C) ink. The inkjet head 246M is a recording head that ejects droplets of magenta (M) ink. The inkjet head 246Y is a recording head that ejects droplets of yellow (Y) ink. The inkjet head 246K is a recording head that ejects droplets of black (K) ink. Inkjet heads 246C, 246M, 246Y, and 246K are each supplied with ink from an ink tank (not shown), which is an ink supply source of the corresponding color, via a piping path (not shown).

Each of the inkjet heads 246C, 246M, 246Y, and 246K is the inkjet head bar 110 described with reference to FIGS. 28 to 31.

Each of the inkjet heads 246C, 246M, 246Y, and 246K is composed of line heads corresponding to the paper width, and each nozzle surface is arranged so as to face the peripheral surface of the drawing drum 242. The paper width referred to here refers to a paper width in a direction orthogonal to the transport direction of the paper P. The inkjet heads 246C, 246M, 246Y, and 246K are arranged at regular intervals along the transport path of the paper P by the drawing drum 242.

Although not shown in the figure, a plurality of nozzle holes, which are ink ejection ports, are two-dimensionally arranged on each nozzle surface of the inkjet heads 246C, 246M, 246Y, and 246K. The “nozzle surface” refers to an ejection surface on which a nozzle is formed, and is synonymous with terms such as “ink ejection surface” or “nozzle forming surface”. The nozzle arrangement of a plurality of nozzles arranged in two dimensions is called a "two-dimensional nozzle arrangement".

Each of the inkjet heads 246C, 246M, 246Y, and 246K can be configured by connecting a plurality of head modules in the paper width direction. Each of the inkjet heads 246C, 246M, 246Y, and 246K can complete image recording with a specified recording resolution in a single scan of the entire recording area of the paper P in the paper width direction orthogonal to the transport direction of the paper P. It is a full-line type recording head having various nozzle rows. The specified recording resolution may be a recording resolution predetermined by the inkjet recording apparatus 201, or a recording resolution set by the user's selection or by automatic selection by a program according to the print mode. May be good. The recording resolution can be, for example, 1200 dpi. The paper width direction orthogonal to the paper P transport direction may be referred to as the nozzle row direction of the line head, and the paper P transport direction may be referred to as the nozzle row vertical direction.

In the case of an inkjet head having a two-dimensional nozzle arrangement, the projected nozzle row in which each nozzle in the two-dimensional nozzle arrangement is projected (orthogonally projected) along the nozzle row direction achieves the maximum recording resolution in the nozzle row direction. It can be considered that the nozzle density is equivalent to a row of nozzles in which each nozzle is arranged at approximately equal intervals. "Approximately evenly spaced" means that the drip points that can be recorded by the inkjet recording device are substantially evenly spaced. For example, the concept of "equal spacing" includes cases where the spacing is slightly different in consideration of manufacturing errors and the movement of droplets on the medium due to landing interference. Considering the projection nozzle array (also referred to as "substantial nozzle array"), it is possible to associate each nozzle with a nozzle number indicating the nozzle position in the order in which the projection nozzles are arranged along the nozzle array direction.

The arrangement form of the nozzles in each of the inkjet heads 246C, 246M, 246Y, and 246K is not limited, and various nozzle arrangement forms can be adopted. For example, instead of the form of a matrix-like two-dimensional array, a line-shaped nozzle array, a V-shaped nozzle array, a polygonal line-shaped nozzle array such as a W-shaped array having a V-shaped array as a repeating unit, etc. are also possible. Is.

Ink droplets are ejected from the inkjet heads 246C, 246M, 246Y, and 246K toward the paper P conveyed by the drawing drum 242, and the ejected droplets adhere to the paper P, so that an image is displayed on the paper P. Recorded.

The drawing drum 242 functions as a means for relatively moving the inkjet head 246C, 246M, 246Y, 246K and the paper P. The drawing drum 242 corresponds to a form of a relative moving mechanism that moves the paper P relative to the inkjet heads 246C, 246M, 246Y, and 246K. The ejection timings of the inkjet heads 246C, 246M, 246Y, and 246K are synchronized with the rotary encoder signal obtained from the rotary encoder installed on the drawing drum 242. In FIG. 32, the rotary encoder is not shown. The ejection timing is a timing for ejecting ink droplets, and is synonymous with a droplet ejection timing.

In this example, the configuration of CMYK standard colors (4 colors) is illustrated, but the combination of ink colors and the number of colors is not limited to this embodiment, and light ink, dark ink, and special color ink are used as needed. Etc. may be added. For example, it is possible to add an inkjet head that ejects light inks such as light cyan and light magenta, or add an inkjet head that ejects special color inks such as green and orange, and inkjets of each color. The arrangement order of the heads is also not particularly limited.

The inkjet heads 246C, 246M, 246Y, and 246K are examples of image forming units.

The image reading device 248 is an optical reading device that optically reads the image recorded on the paper P by the inkjet heads 246C, 246M, 246Y, and 246K, and generates electronic image data indicating the read image. The image reading device 248 includes an imaging device that captures an image recorded on the paper P and converts it into an electric signal indicating image information. In addition to the image pickup device, the image reader 248 may include an illumination optical system that illuminates the reading target and a signal processing circuit that processes signals obtained from the image pickup device to generate digital image data.

The image reader 248 is composed of, for example, a line scanner using a CCD (Charge Coupled Device) line sensor. The image reading device 248 preferably has a configuration capable of reading a color image. In the image reading device 248 of this example, for example, a color CCD linear image sensor is used as an image pickup device. The color CCD linear image sensor is an image sensor in which light receiving elements equipped with color filters of R (red), G (green), and B (blue) are linearly arranged. A color CMOS (complementary metal oxide semiconductor) linear image sensor can be used instead of the color CCD linear image sensor. The image reading device 248 reads the image on the paper P while the paper P is being conveyed by the drawing drum 242.

Based on the data of the scanned image read by the image reader 248, information such as image density and ejection failure of the inkjet heads 246C, 246M, 246Y, and 246K can be obtained.

The ink drying unit 250 dries the paper P on which the image is recorded by the drawing unit 240. The ink drying unit 250 includes a chain delivery 310, a paper guide 320, and a warm air blowing unit 330.

The chain delivery 310 receives the paper P from the drawing drum 242 and transfers the received paper P to the accumulating unit 260. The chain delivery 310 includes a pair of endless chains 312 traveling on a specified travel path, and grips the tip of the paper P with a gripper 314 provided on the pair of chains 312 to convey the paper P to the specified size. Transport along the route. A plurality of grippers 314 are provided on the chain 312 at regular intervals.

The paper guide 320 is a member that guides the transport of the paper P by the chain delivery 310. The paper guide 320 is composed of a first paper guide 322 and a second paper guide 324. The first paper guide 322 guides the paper P transported in the first transport section of the chain delivery 310. The second paper guide 324 guides the paper transported in the second transport section after the first transport section. The warm air blowing unit 330 blows warm air onto the paper P conveyed by the chain delivery 310.

The accumulating unit 260 includes an accumulating device 262 that receives and accumulates the paper P conveyed from the ink drying unit 250 by the chain delivery 310.

The chain delivery 310 releases the paper P at a predetermined stacking position. The stacking device 262 includes a stacking tray 262A, receives the paper P released from the chain delivery 310, and stacks the paper P on the stacking tray 262A in a bundle. The collecting unit 260 corresponds to a paper ejection unit.

<Explanation of control system of inkjet recording device>
FIG. 33 is a block diagram showing a schematic configuration of a control system of the inkjet recording device 201. The inkjet recording device 201 includes a system controller 300. The system controller 300 includes a CPU 300A, a ROM 300B, and a RAM 300C. CPU is an abbreviation for Central Processing Unit. ROM is an abbreviation for Read Only Memory. RAM is an abbreviation for Random Access Memory. The storage unit such as the ROM 300B and the RAM 300C may be provided outside the system controller 300.

The system controller 300 functions as an overall control unit that collectively controls each unit of the inkjet recording device 201. Further, the system controller 300 functions as a calculation unit that performs various calculation processes. Further, the system controller 300 functions as a memory controller that controls reading and writing of data in memories such as the ROM 300B and the RAM 300C.

The inkjet recording device 201 includes a communication unit 302, an image memory 304, a transfer control unit 350, a paper feed control unit 352, a processing liquid application control unit 354, a processing liquid drying control unit 356, a drawing control unit 358, and an ink drying control unit 360. And a paper ejection control unit 364 is provided. The elements of each of these parts can be realized by one or more computers. That is, each element of the control system including the system controller 300 can be configured by a combination of computer hardware and software.

The communication unit 302 includes a communication interface (not shown), and can transmit and receive data between the communication interface and the connected host computer 400.

The image memory 304 functions as a temporary storage unit for various data including image data. The image data taken in from the host computer 400 via the communication unit 302 is temporarily stored in the image memory 304.

The transfer control unit 350 controls the operation of the transfer system 211 of the paper P in the inkjet recording device 201. The transport system 211 includes a paper transport mechanism such as a paper feed drum 216, a treatment liquid application drum 222, a treatment liquid drying drum 232, and a drawing drum 242 shown in FIG. 32. Further, the transport system 211 includes a motor as a power source (not shown) and a drive unit such as a motor drive circuit.

The paper feed control unit 352 shown in FIG. 22 operates the paper feed unit 210 in response to a command from the system controller 300. The paper feed control unit 352 controls the paper P supply start operation, the paper P supply stop operation, and the like.

The processing liquid application control unit 354 operates the processing liquid application unit 220 in response to a command from the system controller 300. The treatment liquid application control unit 354 controls the application amount of the treatment liquid, the application timing, and the like.

The processing liquid drying control unit 356 operates the processing liquid drying unit 230 in response to a command from the system controller 300. The processing liquid drying control unit 356 controls the drying temperature, the flow rate of the dry gas, the injection timing of the dry gas, and the like.

The drawing control unit 358 controls the operation of the drawing unit 240 in response to a command from the system controller 300. The drawing control unit 358 includes an image processing unit, a waveform generation unit, a waveform storage unit, and a drive circuit. The image processing unit, waveform generation unit, waveform storage unit, and drive circuit are not shown. The image processing unit forms dot data from the input image data. The waveform generator generates a waveform of the drive voltage. The waveform storage unit stores the waveform of the drive voltage. The drive circuit generates a drive voltage having a drive waveform corresponding to the dot data. The drive circuit supplies the drive voltage to the liquid discharge head.

In the image processing unit, color separation processing that separates the input image data into RGB colors, color conversion processing that converts RGB to CMYK, correction processing such as gamma correction and unevenness correction, and gradation values for each pixel of each color are performed. Halftone processing is performed to convert to a gradation value less than the original gradation value.

As an example of the input image data, raster data represented by a digital value from 0 to 255 can be mentioned. The dot data obtained as a result of the halftone processing may be a binary value or a multi-valued value of three values or more and less than the gradation value before the halftone processing.

The ejection timing and ink ejection amount of each pixel position are determined based on the dot data generated through the processing by the image processing unit, and the ejection timing of each pixel position, the drive voltage according to the ink ejection amount, and the ejection of each pixel are determined. A control signal for determining the timing is generated, this drive voltage is supplied to the liquid discharge head, and dots are recorded by the ink discharged from the liquid discharge head.

The drawing control unit 358 may include a correction processing unit (not shown). The correction processing unit executes correction processing for the abnormal nozzle. When the correction process is applied, deterioration of image quality due to the occurrence of abnormal nozzles is suppressed.

The ink drying control unit 360 operates the ink drying unit 250 in response to a command from the system controller 300. The ink drying control unit 360 controls the temperature of the dry gas, the flow rate of the dry gas, the injection timing of the dry gas, and the like.

The paper output control unit 364 operates the integration unit 260 in response to a command from the system controller 300. When the stacking device 262 shown in FIG. 32 includes an elevating mechanism, the paper ejection control unit 324 controls the operation of the elevating mechanism according to the increase or decrease of the paper P.

The inkjet recording device 201 shown in FIG. 33 includes an operation unit 331, a display unit 332, a parameter storage unit 334, and a program storage unit 336.

The operation unit 331 includes an input device including an operation button, a keyboard, a mouse, a touch panel, or a combination thereof. The operation unit 331 may include a plurality of types of operation members. The illustration of the operating member is omitted.

The information input via the operation unit 331 is sent to the system controller 300. The system controller 300 executes various processes according to the information sent from the operation unit 331.

The display unit 332 includes a display device (display) such as a liquid crystal panel. The display unit 332 can display various information such as various setting information of the device or abnormality information in response to a command from the system controller 300. A user interface is composed of an operation unit 331 and a display unit 332. The user can set various parameters and input and edit various information by using the operation unit 331 while observing the contents displayed on the screen of the display unit 332.

The parameter storage unit 334 stores various parameters used in the inkjet recording device 201. Various parameters stored in the parameter storage unit 334 are read out via the system controller 300 and set in each unit of the device.

The program storage unit 336 stores programs used in each unit of the inkjet recording device 201. Various programs stored in the program storage unit 336 are read out via the system controller 300 and executed in each unit of the device.

The inkjet recording device 201 shown in FIG. 33 includes a maintenance control unit 338. The maintenance control unit 338 controls the operation of the maintenance unit 340 in response to a command from the system controller 300. The operation of the maintenance unit 340 includes an operation of applying a cleaning liquid to the web (not shown) and an operation of wiping with the web. Further, the operation of the maintenance unit 340 may include a purge process of the inkjet head, a preliminary discharge, and the like.

System controller 300, transfer control unit 350, paper feed control unit 352, processing liquid application control unit 354, processing liquid drying control unit 356, drawing control unit 358, ink drying control unit 360, paper discharge control unit 364 shown in FIG. 33. , And the hardware structure of the processing unit that executes various processes such as the maintenance control unit 338 is various processors as shown below.

Various processors include CPUs (Central Processing Units), which are general-purpose processors that execute programs and function as various processing units, and FPGAs (Field Programmable Gate Arrays), which can change the circuit configuration after manufacturing. A programmable logic device (PLD), a dedicated electric circuit which is a processor having a circuit configuration specially designed for executing a specific process such as an ASIC (Application Specific Integrated Circuit), and the like are included. Program is synonymous with software.

One processing unit may be composed of one of these various processors, or may be composed of two or more processors of the same type or different types. For example, one processing unit may be composed of a plurality of FPGAs or a combination of a CPU and an FPGA. Further, a plurality of processing units may be configured by one processor. As an example of configuring a plurality of processing units with one processor, first, one processor is configured by a combination of one or more CPUs and software, as represented by a computer such as a client or a server. There is a form in which the processor functions as a plurality of processing units. Secondly, as typified by System On Chip (SoC), there is a form in which a processor that realizes the functions of the entire system including a plurality of processing units with one IC (Integrated Circuit) chip is used. is there. As described above, the various processing units are configured by using one or more of the above-mentioned various processors as a hardware-like structure.

Further, the hardware structure of these various processors is, more specifically, an electric circuit (circuitry) in which circuit elements such as semiconductor elements are combined.

<< About the manufacturing method of the inkjet recording apparatus 201 >>
The inkjet recording apparatus 201 can be manufactured by combining the inkjet heads 246C, 246M, 246Y, 246K manufactured by applying the method for manufacturing a droplet ejection head according to the first embodiment and various elements such as a drawing drum 242. ..

The process of arranging and assembling the inkjet head 246C, 246M, 246Y, 246K and the drawing drum 242 in an aligned positional relationship corresponds to an example of the assembly process.

In the assembly process when manufacturing the inkjet recording apparatus 201, the positional relationship is satisfied in which the angle formed by the sticking direction of the protective film and the paper transporting direction by the drawing drum 242 is an angle θ in the range of −10 ° <θ <10 °. As described above, the drawing drum 242 and the inkjet heads 246C, 246M, 246Y, and 246K are arranged.

For example, in the assembly step of assembling the inkjet recording device 201 of the embodiment, the positional relationship in which the paper transport direction by the drawing drum 242 and the substantial nozzle hole arrangement direction of each inkjet head 246C, 246M, 246Y, 246K are orthogonal to each other is determined. The drawing drum 242 and the inkjet heads 246C, 246M, 246Y, and 246K are arranged so as to satisfy the requirements. The method of manufacturing the inkjet recording apparatus 201 corresponds to an example of the “method of manufacturing an image forming apparatus”.

<< Advantages of the embodiment >>
According to the above-described embodiment, even if the water-repellent film varies around the nozzle hole, the defective portion of the water-repellent film is unevenly distributed in a direction substantially parallel to the paper-head relative movement direction, and the discharge bends. Image defects due to are difficult to see. According to the present embodiment, image defects such as streaks caused by the non-uniformity of the water-repellent film are inconspicuous, and good quality image formation is possible.

<< About the ejection method of the droplet ejection head >>
The ejector of the droplet discharge head includes a nozzle for discharging a liquid, a pressure chamber communicating with the nozzle, and a discharge energy generating element for supplying discharge energy to the liquid in the pressure chamber. Regarding the ejection method for ejecting droplets from the nozzle of the ejector, the means for generating the ejection energy is not limited to the piezoelectric element, and various ejection energy generating elements such as a heat generating element and an electrostatic actuator can be applied. For example, a method of ejecting droplets by utilizing the pressure of film boiling due to heating of a liquid by a heat generating element can be adopted. Depending on the ejection method of the inkjet head, a corresponding ejection energy generating element is provided in the flow path structure.

<< Modification 1 >>
In the above-described embodiment, the single-pass inkjet recording apparatus has been described as an example of the image forming apparatus, but the present invention can be applied to various types of image forming apparatus using a droplet ejection head.

<< Modification 2 >>
In the above-described embodiment, the inkjet head bar in which a plurality of head modules are combined has been illustrated, but an image forming apparatus using a single droplet ejection head may be used.

<< Modification 3 >>
Although FIG. 32 illustrates a single-bar type inkjet recording device, it may be an inkjet recording device including a plurality of inkjet headbars that eject ink of the same color, such as a dual-bar type.

<< Modification 4 >>
In the above description, the non-uniformity of the water-repellent film due to the peeling of the water-repellent film has been described, but the non-uniformity of the water-repellent film due to a part of the water-repellent film remaining inside the nozzle hole is also protected. It is the same as the case of peeling in that defective parts of the water-repellent film are unevenly distributed in the direction parallel to the film sticking direction.

<< About paper >>
"Paper" is a medium used to form an image. The term paper is a general term for what is called by various terms such as recording paper, printing paper, printing medium, printing medium, printed medium, image forming medium, image forming medium, image receiving medium, and ejecting medium. The material and shape of the paper are not particularly limited, and various sheet bodies can be used regardless of the seal paper, resin sheet, film, cloth, non-woven fabric, and other materials and shapes. The paper notation is not limited to a sheet-fed medium, and may be a continuous medium such as continuous paper. Further, the sheet-fed paper is not limited to cut paper prepared in advance to a specified size, and may be obtained by cutting from a continuous medium to a specified size at any time.

<< About terms >>
The term "image forming apparatus" is synonymous with terms such as a printing machine, a printer, a printing apparatus, a printing apparatus, an image recording apparatus, an image output apparatus, or a drawing apparatus.

"Image" shall be interpreted in a broad sense, and includes color images, black-and-white images, single-color images, gradation images, uniform density (solid) images, and the like. "Image" is not limited to a photographic image, but is used as a comprehensive term including a pattern, characters, symbols, line drawings, mosaic patterns, color-coded patterns, various other patterns, or an appropriate combination thereof.

"Formation" of an image includes the concept of terms such as image recording, printing, printing, drawing, and printing. "Printing" includes the concept of digital printing based on digital data.

Further, the "image" is not limited to the one formed by the ink containing the coloring material, and the treatment liquid applied to the paper before the ink is applied and / or other functions such as varnish applied to the paper after the ink is applied. It may be an image formed by a sex material.

The term "orthogonal" or "vertical" as used herein refers to the case where the intersections are made at an angle of less than 90 ° or an angle of more than 90 ° and intersect at an angle of substantially 90 °. A mode in which the same action and effect as is generated is included.

The technical scope of the present invention is not limited to the scope described in the above embodiments. The configurations and the like in each embodiment can be appropriately combined between the respective embodiments without departing from the spirit of the present invention.

10 Nozzle forming substrate 10A Discharge side surface 10B Nozzle inner surface 12 Nozzle hole 14 Water repellent film 16 Protective film 20 Ink 22 Droplet 30 Water repellent film defective part 40, 41, 42 Droplet discharge head 44 Paper 46 Line 50 Droplet discharge Head 60 Wafer 62 Die 70K, 70C, 70M, 70Y Inkjet headbar 70C1, 70C2, Inkjet headbar 70K1, 70K2 Inkjet headbar 70M1, 70M2 Inkjet headbar 70Y1, 70Y2 Inkjet headbar 110 Inkjet headbar 112-i Head module 116 Frame 118 Flexible substrate 120 Nozzle surface 122 Head module holding member 124 Head protection member 130 Nozzle plate 132 Pressure chamber 134 Supply port 136 Common flow path 138 Flow path forming plate 140 Vibration plate 142 Individual electrode 144 Inkjet element 146 Common electrode 150 Inkjet chamber unit 201 Inkjet recording device 210 Feeding unit 211 Conveying system 212 Feeding device 212A Feeding stand 214 Feeder board 216 Feeding drum 220 Processing liquid application unit 222 Processing liquid application drum 223 Gripper 224 Processing liquid coating device 230 Processing liquid drying unit 232 Processing Liquid drying drum 233 Gripper 234 Warm air blower 240 Drawing unit 242 Drawing drum 243 Gripper 244 Head unit 246K Inkjet head 246C Inkjet head 246M Inkjet head 246Y Inkjet head 248 Image reader 250 Inkjet drying unit 260 Integration unit 262 Integration device 262A Integration tray 300 System controller 302 Communication unit 304 Image memory 310 Chain delivery 312 Chain 314 Gripper 316 Processing liquid drying control unit 320 Paper guide 322 First paper guide 324 Second paper guide 330 Warm air blower unit 331 Operation unit 332 Display unit 334 Parameter storage unit 336 Program storage unit 338 Maintenance control unit 340 Maintenance unit 350 Transport control unit 352 Feed feed control unit 354 Processing liquid application control unit 356 Processing liquid drying control unit 358 Drawing control unit 360 Ink drying control unit 364 Inkjet drying control unit 364 Paper discharge control unit 400 Host computer LN projection Nozzle row P paper

Claims (14)

A water-repellent film forming step of forming a water-repellent film on the discharge side surface of a nozzle forming substrate having a plurality of nozzle holes and inside the nozzle holes.
A protective film attaching step of attaching a protective film to the surface of the water-repellent film formed on the ejection side surface of the nozzle forming substrate, and a step of attaching the protective film.
A plasma irradiation step of removing the water-repellent film inside the nozzle hole by plasma treatment, and
It has a protective film peeling step of peeling the protective film from the nozzle forming substrate.
The discharge side surface of the nozzle forming substrate is flat, and the surface is flat.
In the process of attaching the protective film, the protective film is attached to the nozzle-forming substrate in the sticking direction in which the droplet ejection head including the nozzle-forming substrate and the droplets ejected from the nozzle holes are attached. A method for manufacturing a droplet ejection head, which is a direction that satisfies an angle θ in the range of −10 ° <θ <10 ° with respect to the relative movement direction with respect to the medium to be moved. A water-repellent film forming step of forming a water-repellent film on the discharge side surface of a nozzle forming substrate having a plurality of nozzle holes and inside the nozzle holes.
A protective film attaching step of attaching a protective film to the surface of the water-repellent film formed on the ejection side surface of the nozzle forming substrate, and a step of attaching the protective film.
A plasma irradiation step of removing the water-repellent film inside the nozzle hole by plasma treatment, and
It has a protective film peeling step of peeling the protective film from the nozzle forming substrate.
The discharge side surface of the nozzle forming substrate is flat, and the surface is flat.
In the protective film affixing step, the affixing direction in which the protective film is affixed to the nozzle forming substrate is a direction orthogonal to the nozzle hole arrangement direction of the nozzle array formed by the arrangement pattern of the plurality of nozzle holes. A method for manufacturing a droplet ejection head in a direction that satisfies an angle θ in the range of −10 ° <θ <10 °. The method for manufacturing a droplet ejection head according to claim 1 or 2, wherein the shape of the nozzle hole is quadrangular. It has a step of forming a plurality of dies of the nozzle forming substrate in a wafer.
The orientation of the plurality of dies in the wafer is aligned.
The formation of the water-repellent film in the water-repellent film forming step is performed in the state of a wafer including the plurality of dies.
The method for manufacturing a droplet ejection head according to any one of claims 1 to 3, wherein the protective film is attached in the protective film attaching step in the state of a wafer including the plurality of dies. A water-repellent film forming step of forming a water-repellent film on the discharge side surface of a nozzle forming substrate having a plurality of nozzle holes and inside the nozzle holes.
A protective film attaching step of attaching a protective film to the surface of the water-repellent film formed on the ejection side surface of the nozzle forming substrate, and a step of attaching the protective film.
A plasma irradiation step of removing the water-repellent film inside the nozzle hole by plasma treatment, and
A protective film peeling step of peeling the protective film from the nozzle forming substrate, and
A process of manufacturing a droplet ejection head including the nozzle forming substrate, and
The relative movement mechanism for relatively moving the manufactured droplet ejection head and the medium to which the droplets ejected from the nozzle hole of the droplet ejection head are adhered, and the droplet ejection head are arranged in combination. Assembling process and
Have,
The discharge side surface of the nozzle forming substrate is flat, and the surface is flat.
The sticking direction of sticking the protective film to the nozzle forming substrate in the protective film sticking step is −10 ° <θ with respect to the relative moving direction of the medium and the droplet ejection head by the relative moving mechanism. It is a direction that satisfies the angle θ in the range of <10 °.
The assembly step satisfies the positional relationship in which the angle formed by the sticking direction of the protective film and the relative movement direction by the relative movement mechanism is an angle θ in the range of −10 ° <θ <10 °, and the relative movement is satisfied. A method for manufacturing an image forming apparatus in which a mechanism and the droplet ejection head are arranged. A water-repellent film forming step of forming a water-repellent film on the discharge side surface of a nozzle forming substrate having a plurality of nozzle holes and inside the nozzle holes.
A protective film attaching step of attaching a protective film to the surface of the water-repellent film formed on the ejection side surface of the nozzle forming substrate, and a step of attaching the protective film.
A plasma irradiation step of removing the water-repellent film inside the nozzle hole by plasma treatment, and
A protective film peeling step of peeling the protective film from the nozzle forming substrate, and
A process of manufacturing a droplet ejection head including the nozzle forming substrate, and
The relative movement mechanism for relatively moving the manufactured droplet ejection head and the medium to which the droplets ejected from the nozzle hole of the droplet ejection head are adhered, and the droplet ejection head are arranged in combination. Assembling process and
Have,
The discharge side surface of the nozzle forming substrate is flat, and the surface is flat.
In the protective film affixing step, the affixing direction in which the protective film is affixed to the nozzle forming substrate is a direction orthogonal to the nozzle hole arrangement direction of the nozzle array formed by the arrangement pattern of the plurality of nozzle holes. It is a direction that satisfies the angle θ in the range of -10 ° <θ <10 °.
In the assembly step, the relative movement mechanism and the droplet discharge head satisfy the positional relationship in which the relative movement direction of the droplet discharge head and the medium by the relative movement mechanism and the nozzle hole arrangement direction are orthogonal to each other. A method of manufacturing an image forming apparatus to be arranged. The fifth or sixth aspect of the present invention, wherein the single-pass type image forming apparatus for completing the recording of an image on the medium is completed by one relative movement of the droplet ejection head and the medium in the relative movement direction. A method for manufacturing an image forming apparatus. The method for manufacturing an image forming apparatus according to any one of claims 5 to 7, wherein an image forming apparatus including an inkjet head bar which is a line head configured by using the droplet ejection head is manufactured. The image according to claim 8, wherein the image forming apparatus including the inkjet head bar is formed by connecting a plurality of head modules as the droplet ejection heads in the width direction of the medium orthogonal to the relative moving direction. Manufacturing method of forming device. The method for manufacturing an image forming apparatus according to claim 8 or 9, wherein an image forming apparatus including a plurality of the inkjet headbars that eject ink of the same color is produced. A nozzle forming substrate having a plurality of nozzle holes and
A water-repellent film formed on the discharge side surface of the nozzle-forming substrate and
A droplet ejection head equipped with
The water-repellent film around the nozzle hole is −10 to the relative movement direction of the droplet ejection head and the medium to which the droplet ejected from the nozzle hole is attached at the end of the nozzle hole. The protective film is attached to the end in the direction satisfying the angle θ in the range of ° <θ <10 °, and the defective portions of the water-repellent film generated in the attaching direction satisfying the angle θ are unevenly distributed. Droplet ejection head. A nozzle forming substrate having a plurality of nozzle holes and
A water-repellent film formed on the discharge side surface of the nozzle-forming substrate and
A droplet ejection head equipped with
The water-repellent film around the nozzle hole is −10 ° with respect to a direction orthogonal to the nozzle hole arrangement direction of the nozzle array formed by the arrangement pattern of the plurality of nozzle holes at the end of the nozzle hole. The protective film is attached to the end in the direction satisfying the angle θ in the range of <θ <10 °, and the defective portions of the water-repellent film generated in the attaching direction satisfying the angle θ are unevenly distributed. Droplet ejection head. A droplet ejection head composed of a nozzle forming substrate having a plurality of nozzle holes,
An image forming apparatus including a medium for adhering droplets ejected from the nozzle hole of the droplet ejection head and a relative moving mechanism for relatively moving the droplet ejection head.
A water-repellent film is formed on the discharge side surface of the nozzle forming substrate.
The water-repellent film around the nozzle hole is −10 ° <θ <10 ° with respect to the relative movement direction of the droplet ejection head and the medium by the relative movement mechanism at the end of the nozzle hole. An image forming apparatus in which a protective film is attached to the end portion in a direction satisfying the angle θ in the range of the above, and defective portions of the water-repellent film generated in the attaching direction satisfying the angle θ are unevenly distributed. A droplet ejection head composed of a nozzle forming substrate having a plurality of nozzle holes,
An image forming apparatus including a medium for adhering droplets ejected from the nozzle hole of the droplet ejection head and a relative moving mechanism for relatively moving the droplet ejection head.
A water-repellent film is formed on the discharge side surface of the nozzle forming substrate.
The water-repellent film around the nozzle hole is −10 ° with respect to a direction orthogonal to the nozzle hole arrangement direction of the nozzle array formed by the arrangement pattern of the plurality of nozzle holes at the end of the nozzle hole. The protective film is attached to the end in the direction satisfying the angle θ in the range of <θ <10 °, and the defective portions of the water-repellent film generated in the attaching direction satisfying the angle θ are unevenly distributed. Image forming device.

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