JP6864605B2

JP6864605B2 - Millimeter-wave band filter bank and millimeter-wave band spectrum analyzer using it

Info

Publication number: JP6864605B2
Application number: JP2017214258A
Authority: JP
Inventors: 尚史河村; 坂本　英之; 英之坂本; 瞭近藤
Original assignee: Anritsu Corp
Current assignee: Anritsu Corp
Priority date: 2017-11-06
Filing date: 2017-11-06
Publication date: 2021-04-28
Anticipated expiration: 2037-11-06
Also published as: JP2019087862A

Description

本発明は、ミリ波帯でそれぞれ通過帯域が異なる複数のフィルタを有し、それらのフィルタを選択して、入力信号から所望の通過帯域の信号成分を抽出させるためのミリ波帯フィルタバンクおよびそれを用いたミリ波帯スペクトラムアナライザに関する。 The present invention has a plurality of filters having different pass bands in the millimeter wave band, and a millimeter wave band filter bank for selecting those filters to extract signal components in a desired pass band from an input signal and a millimeter wave band filter bank thereof. The present invention relates to a millimeter-wave band spectrum analyzer using.

近年、ユビキタスネットワーク社会を迎え、電波利用ニーズが高まる中、家庭内のワイヤレスブロードバンド化を実現するＷＰＡＮ（ワイヤレスパーソナルエリアネットワーク）や安全・安心な運転をサポートするミリ波レーダー等のミリ波帯無線システムが利用され始めている。また、１００ＧＨｚ超無線システム実現への取組も積極的に行われてきている。 In recent years, with the ubiquitous network society, the need for radio wave usage is increasing, and millimeter-wave band wireless systems such as WPAN (Wireless Personal Area Network) that realizes wireless broadband in the home and millimeter-wave radar that supports safe and secure driving. Is beginning to be used. In addition, efforts to realize a 100 GHz ultra-wireless system have been actively carried out.

その一方で、６０〜７０ＧＨｚ帯の無線システムの２次高調波評価や１００ＧＨｚ超の周波数帯における無線信号の評価については、周波数が高くなるにつれ、スペクトラムアナライザ等の測定器の雑音レベル及びミキサの変換損失が増加するとともに周波数精度が低下するため、１００ＧＨｚを超える無線信号の高感度、高精度測定技術が確立されていない状況となっている。 On the other hand, regarding the evaluation of the second harmonic of the wireless system in the 60 to 70 GHz band and the evaluation of the wireless signal in the frequency band over 100 GHz, as the frequency increases, the noise level of the measuring instrument such as a spectrum analyzer and the conversion of the mixer are performed. Since the loss increases and the frequency accuracy decreases, a high-sensitivity and high-precision measurement technique for a radio signal exceeding 100 GHz has not been established.

しかも、これまでのスペクトラムアナライザ等の測定技術では、局部発振の高調波を測定結果から分離するこができず、不要発射等の厳密な測定が困難となっている。 Moreover, with conventional measurement techniques such as spectrum analyzers, the harmonics of local oscillation cannot be separated from the measurement results, making rigorous measurement of unnecessary emission and the like difficult.

これらの技術課題を克服し、１００ＧＨｚ超帯域無線信号の高感度・高精度測定を実現するためには、イメージ応答及び高次高調波応答を抑制するためのミリ波帯の可変同調フィルタ（前置フィルタ）が必要となる。 In order to overcome these technical problems and realize high-sensitivity and high-precision measurement of 100 GHz ultra-wideband radio signals, a millimeter-wave band variable tuning filter (prefix) for suppressing image response and high-order harmonic response. Filter) is required.

可変同調フィルタの実現方式としてフィルタバンクがある。フィルタバンクは、導波管スイッチにより固定周波数のバンドパスフィルタを切り替えることで透過周波数を切り替える装置である。このため、フィルタバンクの実現には導波管スイッチとバンドパスフィルタが必要となる。 There is a filter bank as a method for realizing a variable tuning filter. A filter bank is a device that switches the transmission frequency by switching a fixed frequency bandpass filter with a waveguide switch. Therefore, a waveguide switch and a bandpass filter are required to realize a filter bank.

１００ＧＨｚを超えるミリ波帯で使用可能な導波管スイッチとしては、例えば特許文献１が知られており、この特許文献１に開示された１対複数のスイッチを、入力側と出力側に用い、その間を通過帯域が異なる複数のバンドパスフィルタを介して接続することで、フィルタバンクを構成することができる。 For example, Patent Document 1 is known as a waveguide switch that can be used in a millimeter wave band exceeding 100 GHz, and one-to-many switches disclosed in Patent Document 1 are used on the input side and the output side. A filter bank can be configured by connecting between them via a plurality of bandpass filters having different pass bands.

特開２０１６−１１６０１５号公報Japanese Unexamined Patent Publication No. 2016-116015

しかしながら、上記のように、入力側と出力側にそれぞれ１対複数の導波管スイッチを設けた構造では、必然的に入出力間の距離が長くなり、フィルタバンク全体の大きさが大きくなってしまう。また、全体として電磁波の伝搬経路が長くなるので、損失が多くなる。 However, as described above, in the structure in which one-to-many waveguide switches are provided on the input side and the output side, the distance between the input and output is inevitably long, and the size of the entire filter bank is large. It ends up. In addition, since the propagation path of the electromagnetic wave becomes long as a whole, the loss increases.

しかも、導波管スイッチ間を接続するバンドパスフィルタも導波管構造となるので、汎用の導波管型のバンドパスフィルタを用いる場合、その両端にフランジを設ける必要があり、バンドパスフィルタの数が多くなるとフランジの占有する幅が大きくなり、バンドパスフィルタの並び方向の寸法が無駄に大きくなってしまい、フィルタバンク全体の寸法がさらに大きくなるという問題が発生する。また、フィルタ間の間隔が大きくなり、フィルタの切替えに時間が掛かり、高速な帯域変更が行なえない。 Moreover, since the bandpass filter that connects between the waveguide switches also has a waveguide structure, when using a general-purpose waveguide type bandpass filter, it is necessary to provide flanges at both ends of the bandpass filter. As the number increases, the width occupied by the flanges increases, the dimensions in the arrangement direction of the bandpass filters become unnecessarily large, and there arises a problem that the dimensions of the entire filter bank become even larger. In addition, the interval between filters becomes large, it takes time to switch filters, and high-speed band change cannot be performed.

さらに、複数のバンドパスフィルタのうちの一つを選択するために、入力側の導波管スイッチと出力側の導波管スイッチとを連動駆動させる必要があり、制御が複雑になるとともに、消費電力も大きくなるという問題があった。 Furthermore, in order to select one of a plurality of bandpass filters, it is necessary to drive the waveguide switch on the input side and the waveguide switch on the output side in an interlocking manner, which complicates control and consumes power. There was a problem that the power consumption also increased.

本発明は、これの問題を解決して、小型、低損失で、フィルタ切替えが高速に行なえ、その制御が容易で消費電力が少なくて済むミリ波帯フィルタバンクおよびそれを用いたミリ波帯スペクトラムアナライザを提供することを目的としている。 The present invention solves this problem, is a millimeter-wave band filter bank that is compact, has low loss, can perform filter switching at high speed, is easy to control, and consumes less power, and a millimeter-wave band spectrum using the same. It is intended to provide an analyzer.

前記目的を達成するために、本発明の請求項１のミリ波帯フィルタバンクは、
ベース部（２１）と、
前記ベース部に固定され、金属壁で囲まれ、ミリ波帯の電磁波を伝搬させる導波路（３１）が第１の端面から第２の端面まで貫通形成された第１の固定導波管ブロック（３０）と、
それぞれが金属壁で囲まれ、前記ミリ波帯内で異なる通過帯域特性が付与された複数の導波路（４１〜４７）が、前記第１の固定導波管ブロックの前記第２の端面に所定の隙間を持って平行に対向する第３の端面と、該第３の端面に平行な第４の端面まで並列的に貫通形成され、前記第１の固定導波管ブロックの前記第２の端面に沿って移動可能に支持されたフィルタブロック（４０、１４０）と、
前記ベース部に設けられ、前記フィルタブロックを支持した状態で、該フィルタブロックの複数の導波路のうち、指定された任意の導波路が前記第１の固定導波管ブロックの導波路に接続する位置に移動させる駆動機構（６０）と、
金属壁で囲まれ、前記ミリ波帯の電磁波を伝搬させる導波路（７１）が、前記フィルタブロックの前記第４の端面に所定の隙間を持って平行に対向する第５の端面と第６の端面まで貫通形成され、該導波路が、前記フィルタブロックの前記複数の導波路のうち、前記第１の固定導波管ブロックの導波路に接続される導波路に対して接続される位置で前記ベース部に固定された第２の固定導波管ブロック（７０）とを有し、
前記第１の固定導波管ブロックの前記第２の端面側の導波路開口の周囲、前記フィルタブロックの前記第３の端面側および第４の端面側の導波路開口の周囲、および、前記第２の固定導波管ブロックの前記第５の端面側の導波路開口の周囲には、各端面間の隙間からの電磁波漏出を防止するためのチョーク溝（３４、４８、７４）が設けられており、
前記フィルタブロックは、互いの一面側が接合された状態で一体的に連結された第１ブロック（１００）と第２ブロック（１０５）からなり、
前記異なる通過帯域特性が付与された複数の導波路が、前記第１ブロックと第２ブロックとが接合する面に形成されていることを特徴とする。 In order to achieve the above object, the millimeter wave band filter bank according to claim 1 of the present invention can be used.
Base part (21) and
A first fixed waveguide block (31) fixed to the base, surrounded by a metal wall, and having a waveguide (31) for propagating electromagnetic waves in the millimeter wave band penetrating from the first end face to the second end face. 30) and
A plurality of waveguides (41-47), each surrounded by a metal wall and endowed with different passband characteristics within the millimeter wave band, are defined on the second end face of the first fixed waveguide block. The second end face of the first fixed waveguide block is formed in parallel to the third end face parallel to each other with a gap of the above and the fourth end face parallel to the third end face. Filter blocks (40, 140) movably supported along the
With the filter block provided on the base portion and supporting the filter block, any designated waveguide among the plurality of waveguides of the filter block is connected to the waveguide of the first fixed waveguide block. The drive mechanism (60) that moves to the position and
The fifth end face and the sixth end face, which are surrounded by a metal wall and propagate the electromagnetic waves in the millimeter wave band, are opposed to the fourth end face of the filter block in parallel with a predetermined gap. The waveguide is formed through to the end face, and the waveguide is connected to the waveguide connected to the waveguide of the first fixed waveguide block among the plurality of waveguides of the filter block. It has a second fixed waveguide block (70) fixed to the base portion and has.
Around the waveguide opening on the second end face side of the first fixed waveguide block, around the waveguide opening on the third end face side and the fourth end face side of the filter block, and the first. It said second fixed waveguide block around the fifth end face side of the waveguide opening and the choke groove (34,48,74) is provided for preventing the electromagnetic waves leaking from the gaps between the end faces Cage,
The filter block is composed of a first block (100) and a second block (105) that are integrally connected with one side of each other joined.
A plurality of waveguides to which the different passband characteristics are imparted are formed on a surface where the first block and the second block are joined .

また、本発明の請求項２のミリ波帯フィルタバンクは、
ベース部（２１）と、
前記ベース部に固定され、金属壁で囲まれ、ミリ波帯の電磁波を伝搬させる導波路（３１）が第１の端面から第２の端面まで貫通形成された第１の固定導波管ブロック（３０）と、
それぞれが金属壁で囲まれ、前記ミリ波帯内で異なる通過帯域特性が付与された複数の導波路（４１〜４７）が、前記第１の固定導波管ブロックの前記第２の端面に所定の隙間を持って平行に対向する第３の端面と、該第３の端面に平行な第４の端面まで並列的に貫通形成され、前記第１の固定導波管ブロックの前記第２の端面に沿って移動可能に支持されたフィルタブロック（４０、１４０）と、
前記ベース部に設けられ、前記フィルタブロックを支持した状態で、該フィルタブロックの複数の導波路のうち、指定された任意の導波路が前記第１の固定導波管ブロックの導波路に接続する位置に移動させる駆動機構（６０）と、
金属壁で囲まれ、前記ミリ波帯の電磁波を伝搬させる導波路（７１）が、前記フィルタブロックの前記第４の端面に所定の隙間を持って平行に対向する第５の端面と第６の端面まで貫通形成され、該導波路が、前記フィルタブロックの前記複数の導波路のうち、前記第１の固定導波管ブロックの導波路に接続される導波路に対して接続される位置で前記ベース部に固定された第２の固定導波管ブロック（７０）とを有し、
前記第１の固定導波管ブロックの前記第２の端面側の導波路開口の周囲、前記フィルタブロックの前記第３の端面側および第４の端面側の導波路開口の周囲、および、前記第２の固定導波管ブロックの前記第５の端面側の導波路開口の周囲には、各端面間の隙間からの電磁波漏出を防止するためのチョーク溝（３４、４８、７４）が設けられており、
前記フィルタブロックは、
前記異なる通過帯域特性が付与された導波路（４１〜４７）をそれぞれが有する複数の導波管フィルタ（１４１〜１４７）と、
前記複数の導波管フィルタを、その側壁同士が近接するように並んだ状態で、前記側壁と直交する壁面を挟持する第１基板（１５０）および第２基板（１５５）とを有しており、
前記第１基板と前記第２基板の少なくとも一方には、
前記複数の導波管フィルタの並び方向の位置ずれを防ぐための第１規制手段（１５１）と、
前記複数の導波管フィルタの長さ方向の方向の位置ずれを防ぐ第２規制手段（１５２）とが設けられていることを特徴とする。 Further, the millimeter wave band filter bank according to claim 2 of the present invention is:
Base part (21) and
A first fixed waveguide block (31) fixed to the base, surrounded by a metal wall, and having a waveguide (31) for propagating electromagnetic waves in the millimeter wave band penetrating from the first end face to the second end face. 30) and
A plurality of waveguides (41-47), each surrounded by a metal wall and endowed with different passband characteristics within the millimeter wave band, are defined on the second end face of the first fixed waveguide block. The second end face of the first fixed waveguide block is formed in parallel to the third end face parallel to each other with a gap of the above and the fourth end face parallel to the third end face. Filter blocks (40, 140) movably supported along the
With the filter block provided on the base portion and supporting the filter block, any designated waveguide among the plurality of waveguides of the filter block is connected to the waveguide of the first fixed waveguide block. The drive mechanism (60) that moves to the position and
The fifth end face and the sixth end face, which are surrounded by a metal wall and propagate the electromagnetic waves in the millimeter wave band, are opposed to the fourth end face of the filter block in parallel with a predetermined gap. The waveguide is formed through to the end face, and the waveguide is connected to the waveguide connected to the waveguide of the first fixed waveguide block among the plurality of waveguides of the filter block. It has a second fixed waveguide block (70) fixed to the base portion, and has.
Around the waveguide opening on the second end face side of the first fixed waveguide block, around the waveguide opening on the third end face side and the fourth end face side of the filter block, and the first. Chalk grooves (34, 48, 74) for preventing electromagnetic wave leakage from the gaps between the end faces are provided around the waveguide opening on the fifth end face side of the fixed waveguide block of 2. Cage,
The filter block is
A plurality of waveguide filters (141-147), each of which has a waveguide (41-47) to which the different passband characteristics are imparted, and
The plurality of waveguide filters have a first substrate (150) and a second substrate (155) that sandwich a wall surface orthogonal to the side wall in a state where the side walls are arranged so as to be close to each other. ,
At least one of the first substrate and the second substrate
A first regulating means (151) for preventing misalignment in the arrangement direction of the plurality of waveguide filters, and
It is characterized in that a second regulating means (152) for preventing misalignment in the length direction of the plurality of waveguide filters is provided.

また、本発明の請求項３のミリ波帯フィルタバンクは、請求項１または請求項２記載のミリ波帯フィルタバンクにおいて、
前記第１の固定導波管ブロックの導波路の前記第２の端面側の開口と、前記第２の固定導波管ブロックの導波路の前記第５の端面側の開口とが、前記第２の端面に直交する直線上に並んでいることを特徴とする。 The millimeter-wave band filter bank according to claim 3 of the present invention is the millimeter-wave band filter bank according to claim 1 or 2.
The opening on the second end face side of the waveguide of the first fixed waveguide block and the opening on the fifth end face side of the waveguide of the second fixed waveguide block are the second. It is characterized in that it is arranged on a straight line orthogonal to the end face of.

また、本発明のミリ波帯フィルタバンクにおいて、
前記フィルタブロックは、
前記異なる通過帯域特性が付与された導波路（４１〜４７）をそれぞれが有する複数の導波管フィルタ（１４１〜１４７）と、
前記複数の導波管フィルタを、その側壁同士が近接するように並んだ状態で、前記側壁と直交する壁面を挟持する第１基板（１５０）および第２基板（１５５）とを有しており、
前記第１基板と前記第２基板の少なくとも一方には、
前記複数の導波管フィルタの並び方向の位置ずれを防ぐための第１規制手段（１５１）と、
前記複数の導波管フィルタの長さ方向の方向の位置ずれを防ぐ第２規制手段（１５２）とが設けられていることを特徴とする。 In addition, Oite to the millimeter-wave band filter bank of the present invention,
The filter block is
A plurality of waveguide filters (141-147), each of which has a waveguide (41-47) to which the different passband characteristics are imparted, and
The plurality of waveguide filters have a first substrate (150) and a second substrate (155) that sandwich a wall surface orthogonal to the side wall in a state where the side walls are arranged so as to be close to each other. ,
At least one of the first substrate and the second substrate
A first regulating means (151) for preventing misalignment in the arrangement direction of the plurality of waveguide filters, and
It is characterized in that a second regulating means (152) for preventing misalignment in the length direction of the plurality of waveguide filters is provided.

また、本発明の請求項４のミリ波帯スペクトラムアナライザは、
ミリ波帯の被測定信号を、ローカル信号発生器（２１２）から出力されるローカル信号とともにミキサ（２１１）に与え、そのミキシング出力から所定の中間周波数帯の信号を抽出するフィルタ（２１３）とを有する周波数変換部（２１０）と、前記中間周波数帯の信号を検波する検波部（２２０）とを有し、解析対象周波数に応じて前記ローカル信号の周波数を変化させて、前記被測定信号のスペクトラム特性を求めるミリ波帯スペクトラムアナライザ（２００）において、
前記周波数変換部の前段に、前記請求項１〜３のいずれかに記載のミリ波帯フィルタバンクを設けるとともに、
前記解析対象周波数に応じて、前記ミリ波帯フィルタバンクの前記駆動機構を制御し、前記フィルタブロックの複数の導波路のうち前記解析対象周波数が含まれる通過帯域の導波路を、前記第１の固定導波管ブロックの導波路に接続させるフィルタ切替手段（２３３）とを備えていることを特徴とする。 Further, the millimeter wave band spectrum analyzer according to claim 4 of the present invention
A filter (213) that applies a signal to be measured in the millimeter wave band to the mixer (211) together with a local signal output from the local signal generator (212) and extracts a signal in a predetermined intermediate frequency band from the mixing output. It has a frequency conversion unit (210) and a detection unit (220) that detects signals in the intermediate frequency band, and changes the frequency of the local signal according to the frequency to be analyzed to change the spectrum of the signal to be measured. In the millimeter wave band spectrum analyzer (200) for obtaining the characteristics,
The millimeter-wave band filter bank according to any one of claims 1 to 3 is provided in front of the frequency conversion unit, and the filter bank is provided.
The drive mechanism of the millimeter-wave band filter bank is controlled according to the frequency to be analyzed, and the waveguide in the pass band including the frequency to be analyzed among the plurality of waveguides of the filter block is the first. It is characterized by including a filter switching means (233) for connecting to the waveguide of the fixed waveguide block.

また、本発明の請求項５のミリ波帯スペクトラムアナライザは、
ミリ波帯の被測定信号を、ローカル信号発生器（２１２）から出力されるローカル信号とともにミキサ（２１１）に与え、そのミキシング出力から所定の中間周波数帯の信号を抽出するフィルタ（２１３）とを有する周波数変換部（２１０）と、前記中間周波数帯の信号を検波する検波部（２２０）とを有し、解析対象周波数に応じて前記ローカル信号の周波数を変化させて、前記被測定信号のスペクトラム特性を求めるミリ波帯スペクトラムアナライザ（２００）において、
前記周波数変換部の前記ローカル信号発生器から前記ミキサの間に、前記請求項１〜３のいずれかに記載のミリ波帯フィルタバンクを設けるとともに、
前記解析対象周波数に応じて、前記ミリ波帯フィルタバンクの前記駆動機構を制御し、前記フィルタブロックの複数の導波路のうち前記解析対象周波数に対応したローカル信号周波数が含まれる通過帯域の導波路を、前記第１の固定導波管ブロックの導波路に接続させるフィルタ切替手段（２３３）とを備えていることを特徴とする。 Further, the millimeter wave band spectrum analyzer according to claim 5 of the present invention
A filter (213) that applies a signal to be measured in the millimeter wave band to the mixer (211) together with a local signal output from the local signal generator (212) and extracts a signal in a predetermined intermediate frequency band from the mixing output. It has a frequency conversion unit (210) and a detection unit (220) that detects signals in the intermediate frequency band, and changes the frequency of the local signal according to the frequency to be analyzed to change the spectrum of the signal to be measured. In the millimeter wave band spectrum analyzer (200) for obtaining the characteristics,
The millimeter wave band filter bank according to any one of claims 1 to 3 is provided between the local signal generator and the mixer of the frequency conversion unit, and the millimeter wave band filter bank is provided.
The drive mechanism of the millimeter-wave band filter bank is controlled according to the frequency to be analyzed, and the waveguide in the pass band including the local signal frequency corresponding to the frequency to be analyzed among the plurality of waveguides of the filter block. Is provided with a filter switching means (233) for connecting the first fixed waveguide block to the waveguide.

このように、本発明のミリ波帯フィルタバンクは、ミリ波帯の電磁波を伝搬させる導波路を有する第１の固定導波管ブロックと第２の固定導波管ブロックの端面間に、異なる通過帯域特性が付与された複数の導波路が並列的に貫通形成されたフィルタブロックが所定の隙間を開けた状態で配置され、そのフィルタブロックの複数の導波路のうち、指定された任意の導波路が第１の固定導波管ブロックと第２の固定導波管ブロックの導波路の間に移動し、入出力間に所望の通過帯域特性を与えている。 Thus, millimeter wave band filter bank of the present invention, between the end surface of the first fixed waveguide block and the second fixed waveguide block having a waveguide for propagating an electromagnetic wave in the millimeter wave band, different A filter block in which a plurality of waveguides having a passband characteristic are formed in parallel is arranged with a predetermined gap, and any of the plurality of waveguides of the filter block is specified. The waveguide moves between the waveguides of the first fixed waveguide block and the second fixed waveguide block, providing the desired passband characteristics between the input and output.

このため、前記したように、入力側と出力側にそれぞれ１対複数の導波管スイッチを設けた構造に比べて、入出力間の距離が格段に短くなり、フィルタバンク全体を小型化できる。 Therefore, as described above, the distance between the input and output is significantly shorter than that of the structure in which one-to-many waveguide switches are provided on the input side and the output side, respectively, and the entire filter bank can be miniaturized.

また、第１の固定導波管ブロックの第２の端面側の導波路開口の周囲、フィルタブロックの第３の端面側および第４の端面側の導波路開口の周囲、および、第２の固定導波管ブロックの第５の端面側の導波路開口の周囲に、電磁波漏出を防止するためのチョーク溝が設けられているので、各端面間に隙間のある状態でフィルタブロックを移動でき、磨耗などによる特性劣化が発生しにくく、高速な通過帯域変更が可能となる。 Further, around the waveguide opening on the second end face side of the first fixed waveguide block, around the waveguide opening on the third end face side and the fourth end face side of the filter block, and the second fixing. Since a choke groove for preventing electromagnetic wave leakage is provided around the waveguide opening on the fifth end face side of the waveguide block, the filter block can be moved with a gap between each end face, and the filter block is worn out. Characteristic deterioration due to such factors is unlikely to occur, and high-speed passband change is possible.

また、導波管型のバンドパスフィルタの両端にフランジを設ける必要がないので、フィルタの数が多くなってもフランジの占有幅の影響を受けず最小幅で形成でき、フィルタバンク全体の寸法をさらに小型化でき、さらに、フィルタ間隔が短くて済むから、高速な通過帯域の切替えが可能となる。また、全体として電磁波の伝搬経路が短くなるので、低損失化できる。 In addition, since it is not necessary to provide flanges at both ends of the waveguide type bandpass filter, it can be formed with the minimum width without being affected by the occupied width of the flange even if the number of filters increases, and the dimensions of the entire filter bank can be adjusted. Since the size can be further reduced and the filter interval can be shortened, high-speed switching of the pass band becomes possible. Moreover, since the propagation path of the electromagnetic wave is shortened as a whole, the loss can be reduced.

また、通過帯域の切替えはフィルタブロックのみを移動すればよく、その駆動制御が簡単になり、消費電力も小さくできる。 Further, the pass band needs to be switched only by moving the filter block, which simplifies the drive control and reduces the power consumption.

また、第１の固定導波管ブロックの導波路の第２の端面側開口と、第２の固定導波管ブロックの導波路の第５の端面側開口とが、第２の端面に直交する直線上に並んでいる構造では、必然的にフィルタブロックの各導波路がその直線に沿って平行に並んだ状態となり、フィルタブロックの構造が簡単化され、フィルタバンク全体をより小型化できる。 Further , the second end face side opening of the waveguide of the first fixed waveguide block and the fifth end face side opening of the waveguide of the second fixed waveguide block are orthogonal to the second end face. In the structure of arranging on a straight line, each waveguide of the filter block is inevitably arranged in parallel along the straight line, the structure of the filter block can be simplified, and the entire filter bank can be made smaller.

また、フィルタブロックが、互いの一面側が接合された状態で一体的に連結された第１ブロックと第２ブロックからなり、異なる通過帯域特性が付与された複数の導波路が、第１ブロックと第２ブロックとが接合する面に形成されたものでは、複数の導波路の一部(例えば下半部の溝と共振板や誘電体共振器のような共振素子）を第１ブロックの一面側に形成し、残りの一部（例えば上半部の溝と共振素子）を第２ブロックの一面側に形成して、両ブロックの一面側同士を重ね合わせて一体化することで構成でき、複数の導波路を少ない部品点数で効率的に且つ精度よく製造できる。 Also, off Irutaburokku is composed of a first block and a second block which is integrally connected in a state in which one side of each other are joined, a plurality of waveguides different pass band characteristics imparted, the first block In the one formed on the surface where the second block is joined, a part of a plurality of waveguides (for example, a groove in the lower half and a resonance element such as a resonance plate or a dielectric resonator) is placed on one surface side of the first block. The remaining part (for example, the groove in the upper half and the resonance element) is formed on one side of the second block, and the one side of both blocks can be overlapped and integrated. The waveguide can be manufactured efficiently and accurately with a small number of parts.

また、フィルタブロックが、異なる通過帯域特性が付与された導波路をそれぞれが有する複数の導波管フィルタをその側壁同士が近接するように並んだ状態で、その側壁と直交する壁面を第１基板と第２基板とで挟持する構造の場合であっても、第１基板と第２基板の少なくとも一方には、複数の導波管フィルタの並び方向の位置ずれと、長さ方向の方向の位置ずれを防ぐ規制手段を設けているので、例えば導波管フィルタ個々の製造誤差による各導波路の位置ずれを防止でき、安定に動作させることができ、また、導波管フィルタの交換や数の変更等の仕様変更に容易に対応できる。 Also, off Irutaburokku is in a state arrayed a plurality of waveguide filters, each having a waveguide that is different pass band characteristics are imparted to the side walls close to each other, the walls perpendicular to the side wall first Even in the case of a structure sandwiched between the substrate and the second substrate, at least one of the first substrate and the second substrate has a misalignment in the arrangement direction of a plurality of waveguide filters and a direction in the length direction. Since the regulating means for preventing the misalignment is provided, for example, the misalignment of each waveguide due to the manufacturing error of each waveguide filter can be prevented, the operation can be performed stably, and the number of waveguide filters can be replaced. It is possible to easily respond to changes in specifications such as changes in.

また、ミリ波帯スペクトラムアナライザでは、周波数変換部の前段に、前記いずれかに記載のミリ波帯フィルタバンクを設け、解析対象周波数に応じて、ミリ波帯フィルタバンクの駆動機構を制御し、フィルタブロックの複数の導波路のうち解析対象周波数が含まれる通過帯域の導波路を、第１の固定導波管ブロックの導波路に接続させるフィルタ切替手段を設けている。 Further, in the millimeter wave band spectrum analyzer, in front of the frequency converter, either before or SL have shifted provided a millimeter wave band filter bank described in accordance with the analysis target frequency, controls the drive mechanism of the millimeter-wave band filter bank Further, a filter switching means is provided for connecting the waveguide in the pass band including the frequency to be analyzed among the plurality of waveguides of the filter block to the waveguide of the first fixed waveguide block.

また、ミリ波帯スペクトラムアナライザでは、ローカル信号発生器とミキサの間に前記いずれかに記載のミリ波帯フィルタバンクを設け、解析対象周波数に応じて、ミリ波帯フィルタバンクの駆動機構を制御し、フィルタブロックの複数の導波路のうち解析対象周波数に対応したローカル信号周波数が含まれる通過帯域の導波路を、第１の固定導波管ブロックの導波路に接続させるフィルタ切替手段を設けている。 Further, in the millimeter wave band spectrum analyzer, a millimeter-wave band filter bank according to any deviation had before SL between the local signal generator and a mixer provided in accordance with the analyzed frequency, the millimeter wave band filter bank drive mechanism A filter switching means for connecting a passband waveguide including a local signal frequency corresponding to the frequency to be analyzed among a plurality of waveguides of the filter block to the waveguide of the first fixed waveguide block. It is provided.

このように、従来に比べて格段に小型化され、駆動制御が容易で、消費電力が少ないミリ波帯フィルタバングを用いれば、ミリ波帯スペクトラムアナライザ全体としても小型化でき、制御部の制御が容易となり、省電力化が可能となり、しかも、フィルタブロックの複数の導波路の切替を高速に行なえるので、解析対象周波数の掃引範囲が広い場合であってもローカル信号の周波数掃引を途中で長時間待たせる必要がなく、効率的に正確なスペクトラム解析を行なうことができる。 In this way, by using the millimeter-wave band filter bang, which is much smaller than before, easy to drive control, and consumes less power, the entire millimeter-wave band spectrum analyzer can be miniaturized, and the control unit can be controlled. It is easy, power saving is possible, and multiple waveguides of the filter block can be switched at high speed, so even if the sweep range of the frequency to be analyzed is wide, the frequency sweep of the local signal is lengthened in the middle. There is no need to wait for a long time, and accurate spectrum analysis can be performed efficiently.

本発明の実施形態の一部を破断した平面図Top view of a part of the embodiment of the present invention 本発明の実施形態の分解斜視図An exploded perspective view of an embodiment of the present invention 本発明の実施形態の要部の導波路部分の断面図Sectional drawing of the waveguide part of the main part of embodiment of this invention 本発明の実施形態の要部の通過帯域特性図Passband characteristic diagram of the main part of the embodiment of the present invention 本発明の実施形態の動作説明図Operation explanatory diagram of embodiment of this invention 本発明の実施形態の要部の分解斜視図An exploded perspective view of a main part of the embodiment of the present invention. 本発明の実施形態の要部の別の構成例を示す図The figure which shows another structural example of the main part of the Embodiment of this invention. 本発明の実施形態の要部の別の構成例の分解斜視図An exploded perspective view of another configuration example of the main part of the embodiment of the present invention. 本発明のミリ波帯フィルタバンクを用いたミリ波帯スペクトラムアナライザの構成図Configuration diagram of a millimeter-wave band spectrum analyzer using the millimeter-wave band filter bank of the present invention

以下、図面に基づいて本発明の実施の形態を説明する。
図１は、本発明の実施形態のミリ波帯フィルタバンク(以下、単にフィルタバンクと記す)２０の平面図、第２はその分解斜視図である。なお、これらの図には各部の方向が分かりやすいように、Ｘ、Ｙ、Ｚの直交軸を示している。 Hereinafter, embodiments of the present invention will be described with reference to the drawings.
FIG. 1 is a plan view of a millimeter-wave band filter bank (hereinafter, simply referred to as a filter bank) 20 according to an embodiment of the present invention, and FIG. 2 is an exploded perspective view thereof. In these figures, the orthogonal axes of X, Y, and Z are shown so that the directions of each part can be easily understood.

これらの図に示すように、フィルタバンク２０は、ベース部２１、第１の固定導波管ブロック３０、フィルタブロック４０、駆動機構６０、第２の固定導波管ブロック７０、側板８０、８１、カバー９０を有している。 As shown in these figures, the filter bank 20 includes a base portion 21, a first fixed waveguide block 30, a filter block 40, a drive mechanism 60, a second fixed waveguide block 70, and side plates 80, 81. It has a cover 90.

ベース部２１は有底角枠状に形成され、その底部には後述する駆動機構６０が設けられている。 The base portion 21 is formed in a bottomed square frame shape, and a drive mechanism 60 described later is provided on the bottom portion thereof.

ベース部２１の上面側には、第１の固定導波管ブロック３０が固定されている。第１の固定導波管ブロック３０は、Ｙ方向に延び、外形が横長矩形で厚さ一定の金属板からなり、第１の端面３０ａの中央からその反対側の第２の端面３０ｂの中央までＸ方向に沿って貫通する導波路３１が形成されている。この金属壁で囲まれた導波路３１の口径は、例えば７０〜１４０ＧＨｚのミリ波帯の電磁波を単一モード（ＴＥ１０モード）で低損失に伝搬させる口径（概略１ｍｍ×２ｍｍ程度）に設定されている。導波路３１の断面の長辺はＹ方向、短辺はＺ方向であり、この長辺と短辺の向きは、後述する他の導波路についても同様である。この導波路３１の第１の端面側開口の周囲には、外部に接続する導波管（図示せず）のフランジに係合してネジ止め可能なフランジ受け３３が形成されており、その反対の第２の端面側開口の周囲には、端面間の隙間からの電磁波漏出を防止するためのチョーク溝３４が３重に形成されている（チョーク溝については後述する）。 A first fixed waveguide block 30 is fixed to the upper surface side of the base portion 21. The first fixed waveguide block 30 extends in the Y direction and is made of a metal plate having a horizontally long rectangular shape and a constant thickness, from the center of the first end surface 30a to the center of the second end surface 30b on the opposite side. A waveguide 31 penetrating along the X direction is formed. The diameter of the waveguide 31 surrounded by the metal wall is set to, for example, a diameter (approximately 1 mm × 2 mm) for propagating electromagnetic waves in the millimeter wave band of 70 to 140 GHz in a single mode (TE10 mode) with low loss. There is. The long side of the cross section of the waveguide 31 is in the Y direction and the short side is in the Z direction, and the directions of the long side and the short side are the same for other waveguides described later. Around the first end face side opening of the waveguide 31, a flange receiver 33 that can be screwed by engaging with the flange of a waveguide (not shown) connected to the outside is formed, and vice versa. Around the second end face side opening, a choke groove 34 for preventing electromagnetic wave leakage from the gap between the end faces is formed in three layers (the choke groove will be described later).

第１の固定導波管ブロック３０の第２の端面３０ｂには、フィルタブロック４０の第３の端面４０ａが、所定の隙間ｇ（例えば３０μｍ程度）をもって平行に対向している。 The third end surface 40a of the filter block 40 faces the second end surface 30b of the first fixed waveguide block 30 in parallel with a predetermined gap g (for example, about 30 μm).

フィルタブロック４０は、外形が略直方体の金属製で、例えば７０〜１４０ＧＨｚのミリ波帯内で異なる通過帯域特性が付与された複数（この例では７本）の導波路４１〜４７が、第３の端面４０ａと、第３の端面４０ａに平行な第４の端面４０ｂまで並列に貫通形成されている。これら複数の導波路４１〜４７の長手方向はＸ方向、導波路断面の短辺側を隣接させるようにしてＹ方向に一定間隔で並んでいる。また、各導波路４１〜４７の第３の端面側開口の周囲および第４の端面側開口の周囲にも、第１の固定導波管ブロック３０の第２の端面と同様に、端面間の隙間ｇによる電磁波漏出を防止するためのチョーク溝４８が３重に形成されている。 The filter block 40 is made of a metal having a substantially rectangular parallelepiped outer shape, and for example, a plurality of (7 lines in this example) waveguides 41 to 47 to which different passband characteristics are imparted within a millimeter wave band of 70 to 140 GHz are the third. The end face 40a and the fourth end face 40b parallel to the third end face 40a are formed through in parallel. The plurality of waveguides 41 to 47 are arranged in the X direction at regular intervals in the X direction and in the Y direction so as to be adjacent to each other on the short side of the cross section of the waveguide. Further, also around the third end face side opening of each waveguide 41 to 47 and around the fourth end face side opening, as in the case of the second end face of the first fixed waveguide block 30, between the end faces. The choke grooves 48 for preventing electromagnetic wave leakage due to the gap g are formed in three layers.

フィルタブロック４０の下面側には、駆動機構６０の移動ステージ６３の上部に係合する凹部４９が形成されており、フィルタブロック４０の上面側には、導波路４１〜４７の並び方向（Ｙ方向）に沿って幅一定の溝５０が形成されている。 A recess 49 that engages with the upper part of the moving stage 63 of the drive mechanism 60 is formed on the lower surface side of the filter block 40, and the arrangement direction (Y direction) of the waveguides 41 to 47 is formed on the upper surface side of the filter block 40. ), A groove 50 having a constant width is formed.

駆動機構６０は、ベース部２１の底部の一端側に固定されたモータ６１と、モータ６１からベース部２１の底部の長手方向（Ｙ方向）に延び、モータ６１により回転するネジ体６２と、ベース部２１の底部の上に配置され、ネジ体６２に螺合するネジ穴（図示せず）がＹ方向に貫通形成され、ネジ体６２の回転によりネジ体６２の長さ方向（Ｙ方向）にスライド移動する移動ステージ６３と、移動ステージ６３の両側部に近接して移動ステージ６３の移動をガイドするガイド板６４とにより構成されている。 The drive mechanism 60 includes a motor 61 fixed to one end side of the bottom portion of the base portion 21, a screw body 62 extending from the motor 61 in the longitudinal direction (Y direction) of the bottom portion of the base portion 21, and being rotated by the motor 61, and a base. A screw hole (not shown) screwed into the screw body 62 is formed through the bottom of the portion 21 in the Y direction, and is formed in the length direction (Y direction) of the screw body 62 by the rotation of the screw body 62. It is composed of a moving stage 63 that slides and moves, and a guide plate 64 that guides the movement of the moving stage 63 in close proximity to both sides of the moving stage 63.

この駆動機構６０は、外部からのモータ６１に対する制御により、ベース部２１内で移動ステージ６３を任意の位置に移動させることができ、この移動ステージ６３の上部に係合するフィルタブロック４０を、移動ステージ６３と一体的にベース部２１上をＹ方向に沿って移動させることができる。ここでは、移動ステージ６３の上部にフィルタブロック４０の下面側が係合して支持されている例を示すが、ネジ止め等の固着手段を用いて、移動ステージ６３にフィルタブロック４０を固定状態で支持させてもよい。なお、図示していないが、ベース部２１内における移動ステージ６３の位置（即ち、移動ステージに６３に支持されたフィルタブロック４０の位置）は、移動ステージ６３（即ち、移動ステージに６３に支持されたフィルタブロック４０）が所定の基準位置に来たことをセンサで検知し、その基準位置からモータ６１の回転数や回転角度により精密に特定できる。 The drive mechanism 60 can move the moving stage 63 to an arbitrary position in the base portion 21 by controlling the motor 61 from the outside, and moves the filter block 40 that engages with the upper part of the moving stage 63. The base portion 21 can be moved along the Y direction integrally with the stage 63. Here, an example is shown in which the lower surface side of the filter block 40 is engaged and supported on the upper part of the moving stage 63, but the filter block 40 is supported on the moving stage 63 in a fixed state by using a fixing means such as screwing. You may let me. Although not shown, the position of the moving stage 63 in the base portion 21 (that is, the position of the filter block 40 supported by the moving stage 63) is supported by the moving stage 63 (that is, the moving stage 63). The sensor detects that the filter block 40) has reached a predetermined reference position, and the reference position can be precisely specified by the rotation speed and rotation angle of the motor 61.

なお、ベース部２１や駆動機構６０の構造は任意であり、この実施形態に限定されるものではない。 The structure of the base portion 21 and the drive mechanism 60 is arbitrary and is not limited to this embodiment.

フィルタブロック４０の具体的な構造については後述するが、フィルタブロック４０の複数の導波路４１〜４７のＺ方向に沿った高さ位置（厳密には、端面側開口の高さ位置：以下同様）は、第１の固定導波管ブロック３０の導波路３１の高さと一致しており、駆動機構６０によりフィルタブロック４０がＹ方向に移動すれば、第１の固定導波管ブロック３０の導波路３１に対し、フィルタブロック４０の複数の導波路４１〜４７が順番に接続されることになる。この場合の接続とは、隙間ｇを介して互いの導波路の開口の中心位置が一致した状態を示すものとする。 The specific structure of the filter block 40 will be described later, but the height position of the plurality of waveguides 41 to 47 of the filter block 40 along the Z direction (strictly speaking, the height position of the end face side opening: the same applies hereinafter). Is the same as the height of the waveguide 31 of the first fixed waveguide block 30, and if the filter block 40 is moved in the Y direction by the drive mechanism 60, the waveguide of the first fixed waveguide block 30 A plurality of waveguides 41 to 47 of the filter block 40 are connected to 31 in order. The connection in this case means a state in which the center positions of the openings of the waveguides of the waveguides coincide with each other through the gap g.

フィルタブロック４０の第４の端面４０ｂには、第２の固定導波管ブロック７０の第５の端面７０ａが所定の隙間ｇを持って平行に対向している。 The fifth end surface 70a of the second fixed waveguide block 70 faces the fourth end surface 40b of the filter block 40 in parallel with a predetermined gap g.

第２の固定導波管ブロック７０は、フィルタブロック４０を挟んで、第１の固定導波管ブロック３０と対称に形成されている。即ち、第２の固定導波管ブロック７０はＹ方向に延び、外形が横長矩形で厚さ一定の金属板からなり、第５の端面７０ａの中央からその反対側の第６の端面７０ｂの中央までＸ方向に沿って貫通する導波路７１が形成されている。 The second fixed waveguide block 70 is formed symmetrically with the first fixed waveguide block 30 with the filter block 40 interposed therebetween. That is, the second fixed waveguide block 70 extends in the Y direction and is made of a metal plate having a horizontally long rectangular shape and a constant thickness, from the center of the fifth end face 70a to the center of the sixth end face 70b on the opposite side. A waveguide 71 is formed that penetrates along the X direction.

この金属壁で囲まれた導波路７１の口径も、第１の固定導波管ブロック３０の導波路３１と同じに設定され、その導波路７１の第５の端面側開口の周囲には、端面間の隙間からの電磁波漏出を防止するためのチョーク溝７４が３重に形成され、その反対側の第６の端面側開口の周囲にはフランジ受け７３が形成されている。 The diameter of the waveguide 71 surrounded by the metal wall is also set to be the same as that of the waveguide 31 of the first fixed waveguide block 30, and the end face is around the fifth end face side opening of the waveguide 71. A choke groove 74 for preventing electromagnetic wave leakage from the gap between them is formed in three layers, and a flange receiver 73 is formed around the sixth end face side opening on the opposite side thereof.

第２の固定導波管ブロック７０は、その導波路７１が、第１の固定導波管ブロック３０の導波路３１と同心に並ぶようにベース部２１上に固定されており、フィルタブロック４０の複数の導波路４１〜４７のうち、第１の固定導波管ブロック３０の導波路３１に接続される導波路に対して一直線上に並ぶことになる。なお、ここでは、フィルタブロック４０の複数の導波路４１〜４７が一直線で、端面に対して直交する（Ｘ方向に沿っている）場合を示しているが、導波路４１〜４７の少なくとも一部が、Ｘ方向に対して傾きをもつ場合には、それに合わせて、第１の固定導波管ブロック３０の導波路３１の第２の端面側開口の位置に対して、第２の固定導波管ブロック７０の導波路７１の第５の端面側開口の位置をＹ方向にずらすことで対応できる。 The second fixed waveguide block 70 is fixed on the base portion 21 so that the waveguide 71 is concentrically aligned with the waveguide 31 of the first fixed waveguide block 30 and is fixed on the base portion 21 of the filter block 40. Of the plurality of waveguides 41 to 47, the waveguides are aligned with the waveguide connected to the waveguide 31 of the first fixed waveguide block 30. Here, the case where the plurality of waveguides 41 to 47 of the filter block 40 are straight and orthogonal to the end face (along the X direction) is shown, but at least a part of the waveguides 41 to 47 is shown. However, when it has an inclination with respect to the X direction, a second fixed waveguide is provided with respect to the position of the second end face side opening of the waveguide 31 of the first fixed waveguide block 30. This can be done by shifting the position of the fifth end face side opening of the waveguide 71 of the tube block 70 in the Y direction.

第１の固定導波管ブロック３０と第２の固定導波管ブロック７０は、平行に対向する状態でその両端同士が側板８０、８１により連結されて、全体として枠状となり、ベース部２１上に直立した状態で固定されている。 The first fixed waveguide block 30 and the second fixed waveguide block 70 are connected to each other by the side plates 80 and 81 in a state of being opposed to each other in parallel, and form an overall frame shape on the base portion 21. It is fixed in an upright position.

また、第１の固定導波管ブロック３０と第２の固定導波管ブロック７０の上縁間は、一定厚の長方形状のカバー９０により塞がれている。カバー９０の下面側には、フィルタブロック４０の上面側の溝５０に係合して、フィルタブロック４０の横方向（Ｘ方向）の位置ずれを抑制するガイドレール９５が設けられている。 Further, the space between the upper edge of the first fixed waveguide block 30 and the second fixed waveguide block 70 is closed by a rectangular cover 90 having a constant thickness. On the lower surface side of the cover 90, a guide rail 95 is provided that engages with the groove 50 on the upper surface side of the filter block 40 to suppress the displacement of the filter block 40 in the lateral direction (X direction).

なお、フィルタブロック４０の導波路４１〜４７に通過帯域特性を付与する構成としては、種々のものが知られており、図３にその一例を示す。図３の（ａ）は、一つの導波路（ここでは導波路４１とする）の内部を長辺側から見た図、図３の（ｂ）は短辺側から見た図であり、導波路４１の内部に、スリット付きの共振板（アイリスと呼ばれる）５１を通過帯域中心周波数に対応した間隔ａで連続的に設け、導波路内に多数の共振回路を形成し、隣り合う共振回路間の結合度を共振板５１のスリット間隔ｂで設定することで、所望の通過帯域特性を実現している。ただし、このような共振板を用いた構造だけでなく、導波路内に誘電体共振器を配置したり、その他、周知の種々の構成が可能である。 Various configurations are known for imparting passband characteristics to the waveguides 41 to 47 of the filter block 40, and an example thereof is shown in FIG. FIG. 3A is a view of the inside of one waveguide (referred to as a waveguide 41 in this case) from the long side, and FIG. 3B is a view of the inside of one waveguide (referred to as waveguide 41) from the short side. A resonance plate (called an iris) 51 with a slit is continuously provided inside the waveguide 41 at an interval a corresponding to the center frequency of the pass band to form a large number of resonance circuits in the waveguide and between adjacent resonance circuits. By setting the degree of coupling of the above with the slit spacing b of the resonance plate 51, a desired pass band characteristic is realized. However, in addition to the structure using such a resonance plate, a dielectric resonator can be arranged in the waveguide, and various other well-known configurations are possible.

図３に示すような構造を用いることで、各導波路４１〜４７に対して、例えば図４のように、所望範囲（７０〜１４０ＧＨｚ）のミリ波帯を７分割する通過帯域Ｂａｎｄ１〜Ｂａｎｄ７を付与することができる。なお、複数の導波路に与える通過帯域特性は、用途に応じて設定すればよく、例えば、複数の導波路のうちの一つだけは、７０ＧＨｚ以上を通過させるハイパス特性（実際には導波管そのものの特性）にしてもよい。 By using the structure shown in FIG. 3, for each waveguide 41 to 47, for example, as shown in FIG. 4, a pass band Band 1 to Band 7 that divides the millimeter wave band of a desired range (70 to 140 GHz) into seven is provided. Can be granted. The passband characteristic given to the plurality of waveguides may be set according to the application. For example, only one of the plurality of waveguides has a high-pass characteristic for passing 70 GHz or more (actually, a waveguide). It may be a characteristic of itself).

また、図３において、隙間ｇからの電磁波の漏出を防ぐために、フィルタブロック４０の両端面の導波路４１の開口を囲むようにチョーク溝４８を３重に設けている。各チョーク溝は、導波路の開口縁からｃ１、ｃ２、ｃ３の間隔（任意とする）で、それぞれ深さｄ１〜ｄ３に設けられており、３重に設けることで、漏出阻止効果を高めたり、漏出阻止帯域を広くしている。原理的には、チョーク溝の深さを漏出阻止波長のほぼ１／４波長とすることで、等価的に短絡状態と見なせることを利用している。 Further, in FIG. 3, in order to prevent leakage of electromagnetic waves from the gap g, three choke grooves 48 are provided so as to surround the openings of the waveguide 41 on both end surfaces of the filter block 40. Each choke groove is provided at a depth of d1 to d3 at intervals of c1, c2, and c3 (optional) from the opening edge of the waveguide, and by providing the choke groove in three layers, the leakage prevention effect can be enhanced. , The leakage prevention band is widened. In principle, by setting the depth of the choke groove to approximately 1/4 of the leakage prevention wavelength, it is possible to equivalently consider it as a short-circuit state.

例えば、ｄ１＝ｄ２＝ｄ３として、全てのチョーク溝の深さを等しくすれば、その深さが１／４波長に相当する特定の漏出阻止波長の漏れを大きく抑圧することができる。 For example, if the depths of all the choke grooves are made equal by setting d1 = d2 = d3, the leakage of a specific leakage prevention wavelength whose depth corresponds to the 1/4 wavelength can be greatly suppressed.

また、例えば、ｄ１＜ｄ２＜ｄ３とすれば、漏出阻止波長が導波路の開口縁から外側に行くほど長くなるので、漏出阻止帯域を広くすることができる。 Further, for example, if d1 <d2 <d3, the leakage prevention wavelength becomes longer toward the outside from the opening edge of the waveguide, so that the leakage prevention band can be widened.

なお、このチョーク溝による漏出阻止作用は、前記した第１の固定導波管ブロック３０、第２の固定導波管ブロック７０に設けられたチョーク溝３４、７４についても同様であり、これらのチョーク溝により、フィルタブロック４０は、第１、第２の固定導波管ブロック３０、７０に対して非接触状態で移動して、磨耗などによる特性劣化を起こすことなく、異なる通過帯域特性が付与された複数の導波路のうち、任意の導波路の接続を長期に渡って安定に行なえる。 The leakage prevention action by the choke groove is the same for the choke grooves 34 and 74 provided in the first fixed waveguide block 30 and the second fixed waveguide block 70 described above, and these chokes are also used. Due to the groove, the filter block 40 moves in a non-contact state with respect to the first and second fixed waveguide blocks 30 and 70, and is provided with different passband characteristics without causing characteristic deterioration due to wear or the like. Of the plurality of waveguides, any waveguide can be stably connected for a long period of time.

このフィルタバンク２０は、例えば、駆動機構６０に対して導波路４１が指定されると、図５の（ａ）のように、駆動機構６０がフィルタブロック４０を、その導波路４１の両端が、第１の固定導波管ブロック３０の導波路３１と第２の固定導波管ブロック７０の導波路７１に接続される位置までＹ方向に移動させる。また、駆動機構６０に対して例えば導波路４７が指定されると、図５の（ｂ）のように、駆動機構６０がフィルタブロック４０を、その導波路４７の両端が、第１の固定導波管ブロック３０の導波路３１と第２の固定導波管ブロック７０の導波路７１に接続される位置までＹ方向に移動させる。 In the filter bank 20, for example, when the waveguide 41 is designated for the drive mechanism 60, the drive mechanism 60 sets the filter block 40, and both ends of the waveguide 41, as shown in FIG. 5A. It is moved in the Y direction to a position where it is connected to the waveguide 31 of the first fixed waveguide block 30 and the waveguide 71 of the second fixed waveguide block 70. Further, when a waveguide 47 is designated for the drive mechanism 60, for example, as shown in FIG. 5B, the drive mechanism 60 connects the filter block 40, and both ends of the waveguide 47 are the first fixed guides. It is moved in the Y direction to a position where it is connected to the waveguide 31 of the wave guide block 30 and the waveguide 71 of the second fixed waveguide block 70.

なお、フィルタブロック４０に形成される複数の導波路４１〜４７の最小間隔は、導波路の開口を囲む最も外側のチョーク溝の外径＋最小の余裕分であり、例えば前記ｃ１〜ｃ３を１／４波長、最小の余裕分を１ｍｍとすれば、導波路の長辺寸法（例えば１ｍｍ）と、最小の余裕分１ｍｍと、３×１／４波長分を加えた長さになり、大凡５ｍｍ程度となる。 The minimum distance between the plurality of waveguides 41 to 47 formed in the filter block 40 is the outer diameter of the outermost choke groove surrounding the opening of the waveguide + the minimum margin. For example, c1 to c3 are set to 1. If the / 4 wavelength and the minimum margin is 1 mm, the length is the sum of the long side dimension of the waveguide (for example, 1 mm), the minimum margin of 1 mm, and the 3 × 1/4 wavelength, which is approximately 5 mm. It becomes a degree.

これに対し、既製の導波管で一般的に用いられる導波管のフランジ径は、第１、第２の固定導波管ブロック３０、７０のフランジ受け３３、７３の径から分かるように格段に大きく、前記したように、入出力のスイッチの間に既製の帯域通過型の導波管をフランジ接続する構造に比べて、複数の導波管の並び方向の寸法を格段に小さくでき、しかも、導波路の間隔が狭いから、極めて短時間に所望の導波路に接続できる。また、フィルタバンク全体として電磁波の伝搬路長を短くできるから低損失化できる。 On the other hand, the flange diameter of the waveguide generally used in the ready-made waveguide is remarkably large as can be seen from the diameters of the flange receivers 33 and 73 of the first and second fixed waveguide blocks 30 and 70. Compared to the structure in which a ready-made band-passing waveguide is flanged between the input and output switches, the dimensions of the plurality of waveguides in the arrangement direction can be made significantly smaller, and moreover, as described above. Since the distance between the waveguides is narrow, it is possible to connect to the desired waveguide in an extremely short time. Further, since the propagation path length of the electromagnetic wave can be shortened as the entire filter bank, the loss can be reduced.

また、通過帯域の切替えはフィルタブロック４０のみを移動すればよく、その駆動制御が簡単になり、消費電力も小さくできる。 Further, the pass band needs to be switched only by moving the filter block 40, which simplifies the drive control and reduces the power consumption.

次に、フィルタブロック４０の構成例について説明する。前記実施形態のフィルタブロック４０は、異なる通過帯域特性が付与された複数の導波路を精度よく形成するために、図６に示すように、互いの一面側が接合された状態で一体的に連結された矩形板状の第１ブロック１００と第２ブロック１０５により構成され、その接合面に複数の導波路４１〜４７が形成されている。言い換えれば、前記フィルタブロック４０全体を、各導波路を通過する平面で上下に分割した構造ともいえる。 Next, a configuration example of the filter block 40 will be described. As shown in FIG. 6, the filter blocks 40 of the above embodiment are integrally connected in a state where one side of each other is joined in order to accurately form a plurality of waveguides having different passband characteristics. It is composed of a rectangular plate-shaped first block 100 and a second block 105, and a plurality of waveguides 41 to 47 are formed on the joint surface thereof. In other words, it can be said that the entire filter block 40 is vertically divided by a plane passing through each waveguide.

下側の第１ブロック１００の下面側には移動ステージ６３の上部に係合する凹部４９が形成されており、上面１００ａ側には、複数の導波路４１〜４７の例えば下半部をなす導波路形成溝４１ａ〜４７ａが一端から他端にまで連続して形成されており、その内部にはそれぞれ異なる通過帯域特性を与えるための図示しない共振素子（その一部の場合もある）が設けられている。 A recess 49 that engages with the upper part of the moving stage 63 is formed on the lower surface side of the lower first block 100, and a guide forming, for example, the lower half of a plurality of waveguides 41 to 47 is formed on the upper surface 100a side. Waveguide forming grooves 41a to 47a are continuously formed from one end to the other end, and resonance elements (which may be a part thereof) (not shown) for giving different passband characteristics are provided inside the grooves. ing.

また、上側の第２ブロック１０５の上面側にはガイドレール９５を受け入れる溝５０が形成され、下面１０５ａ側には、複数の導波路４１〜４７の例えば上半部をなす導波路形成溝４１ｂ〜４７ｂが、導波路形成溝４１ａ〜４７ａと同じ間隔で一端から他端まで連続して形成されており、その内部にはそれぞれ異なる通過帯域特性を与えるための図示しない共振素子（その一部の場合もある）が設けられている。なお、各チョーク溝４８も、下半部４８ａと上半部４８ｂに分割されている。 Further, a groove 50 for receiving the guide rail 95 is formed on the upper surface side of the upper second block 105, and on the lower surface 105a side, for example, the waveguide forming grooves 41b to form the upper half of the plurality of waveguides 41 to 47. 47b is continuously formed from one end to the other end at the same interval as the waveguide forming grooves 41a to 47a, and inside the resonance elements (in the case of some of them) for giving different passband characteristics. There is also). Each choke groove 48 is also divided into a lower half portion 48a and an upper half portion 48b.

第１ブロック１００の上面１００ａと第２ブロック１０５の下面１０５ｂが接合され、互いの導波路形成溝４１ａ〜４７ａ、４１ｂ〜４７ｂが上下に合わせられ導波路４１〜４７を形成する状態で一体化されている。このとき、チョーク溝の下半部４８ａと上半部４８ｂも連結される。なお、ここでは、各導波路４１〜４７を上半部と下半部に分けているが、導波路の短辺中央以外の位置で分割してもよく、一方のブロック（例えば、第１ブロック１００）側だけに導波路形成溝と前記共振素子を設け、その導波路形成溝の開口面を、他方のブロック（例えば、第２ブロック１０５）の平坦な面で塞いで一体化してもよい。 The upper surface 100a of the first block 100 and the lower surface 105b of the second block 105 are joined, and the waveguide forming grooves 41a to 47a and 41b to 47b are vertically aligned to form the waveguides 41 to 47. ing. At this time, the lower half 48a and the upper half 48b of the choke groove are also connected. Here, each of the waveguides 41 to 47 is divided into an upper half portion and a lower half portion, but it may be divided at a position other than the center of the short side of the waveguide, and one block (for example, the first block) may be divided. A waveguide forming groove and the resonance element may be provided only on the 100) side, and the opening surface of the waveguide forming groove may be closed with a flat surface of the other block (for example, the second block 105) to be integrated.

このような構造を採用すれば、複数の導波路を少ない部品点数で効率的に且つ精度よく製造できる。 If such a structure is adopted, a plurality of waveguides can be efficiently and accurately manufactured with a small number of parts.

ただし、第１ブロック１００の上面１００ａと第２ブロック１０５の下面１０５ｂとの接合が不十分で、導波路形成部に隙間ができると導波路としての所望の特性が得られないので、この実施形態では、導波路の両側の位置における両ブロックの接合を完全にするために、多数のネジ（図示せず）を楕円で示すネジ穴１１０、１１１に締め付けて、一体化している。 However, if the upper surface 100a of the first block 100 and the lower surface 105b of the second block 105 are not sufficiently joined and a gap is formed in the waveguide forming portion, the desired characteristics as a waveguide cannot be obtained. Then, in order to complete the joining of both blocks at the positions on both sides of the waveguide, a large number of screws (not shown) are tightened into the screw holes 110 and 111 shown by ellipses to integrate them.

図７、図８は、別の構成のフィルタブロック１４０を示している。
このフィルタブロック１４０は、異なる通過帯域特性が付与された導波路４１〜４７をそれぞれが有する複数の導波管フィルタ１４１〜１４７と、これらの導波管フィルタ１４１〜１４７を、その側壁同士が近接するように並んだ状態で、その側壁と直交する上下の壁面を挟持する矩形板状の第１基板１５０および第２基板１５５とを有している。 7 and 8 show a filter block 140 having a different configuration.
In this filter block 140, a plurality of waveguide filters 141 to 147 each having waveguides 41 to 47 to which different passband characteristics are imparted, and these waveguide filters 141 to 147 are close to each other on their side walls. It has a rectangular plate-shaped first substrate 150 and a second substrate 155 that sandwich the upper and lower wall surfaces orthogonal to the side wall thereof in a state of being arranged side by side.

ここで、導波管フィルタ１４１〜１４７は、それぞれ単独に形成された同型の導波管であり、それぞれの導波路内に所定の通過帯域特性を与える共振素子等が設けられている。なお、この実施形態では、フィルタブロック１４０の一方の端面（第３の端面）は、各導波管フィルタ１４１〜１４７の一方の端面が連続しているものと想定したものであり、フィルタブロック１４０の他方の端面（第４の端面）は、導波管フィルタ１４１〜１４７の他方の端面が、連続しているものと想定したものである。また、各導波管フィルタ１４１〜１４７の導波路の開口の周囲には、前記同様に複数（図では２重）のチョーク溝４８が設けられている。 Here, the waveguide filters 141 to 147 are waveguides of the same type formed independently, and resonance elements and the like that give a predetermined passband characteristic are provided in each waveguide. In this embodiment, one end face (third end face) of the filter block 140 is assumed to have one end face of each waveguide filters 141 to 147 continuous, and the filter block 140 The other end face (fourth end face) of the director is assumed to be continuous with the other end face of the waveguide filters 141 to 147. Further, a plurality of (double in the figure) choke grooves 48 are provided around the openings of the waveguides of the waveguide filters 141 to 147 in the same manner as described above.

第１基板１５０の下面側には、移動ステージ６３の上部に係合する凹部４９が設けられ、第２基板１５５の上面側には、ガイドレール９５を受け入れる溝５０が形成されている。 A recess 49 that engages with the upper part of the moving stage 63 is provided on the lower surface side of the first substrate 150, and a groove 50 that receives the guide rail 95 is formed on the upper surface side of the second substrate 155.

また、第１基板１５０の上面１５０ａには、複数の導波管フィルタの並び方向の位置ずれを防ぐための第１規制手段として、幅一定で前後方向に延びた規制リブ１５１が突設されている。各導波管フィルタ１４１〜１４７は、その側壁が規制リブ１５１に接した状態で第１基板１５０上に配置されて、その並び方向の位置ずれが規制される。 Further, on the upper surface 150a of the first substrate 150, a regulation rib 151 having a constant width and extending in the front-rear direction is projected as a first regulation means for preventing the positional deviation of the plurality of waveguide filters in the arrangement direction. There is. Each of the waveguide filters 141 to 147 is arranged on the first substrate 150 with its side wall in contact with the regulation rib 151, and the misalignment in the arrangement direction is regulated.

また、第１基板１５０の上面１５０ａの規制リブ１５１の間には、複数の導波管フィルタ１４１〜１４７の長さ方向の方向の位置ずれを防ぐ第２規制手段として、円柱の規制ボス１５２が突設されている。この規制ボス１５２は、各導波管フィルタ１４１〜１４７の下面側に設けられた円形穴１５３に係合して、複数の導波管フィルタ１４１〜１４７の長さ方向の方向の位置ずれを防ぐ。これらの規制手段により、第１基板１５０と第２基板１５５に挟まれた状態の各導波管フィルタ１４１〜１４７の位置は、高い精度でほぼ均一となり、例えば、既製の導波管フィルタを用いた場合であっても、その製造誤差の影響を少なくでき、正確な導波路切替えが可能となる。なお、図７、図８において、符号１５４は、第１基板１５０と第２基板１５５をネジ止めする際に用いるスペーサである。 Further, between the regulating ribs 151 on the upper surface 150a of the first substrate 150, a cylindrical regulating boss 152 is provided as a second regulating means for preventing the displacement of the plurality of waveguide filters 141 to 147 in the length direction. It is projected. The regulation boss 152 engages with the circular holes 153 provided on the lower surface side of each waveguide filter 141 to 147 to prevent the plurality of waveguide filters 141 to 147 from being displaced in the longitudinal direction. .. By these regulating means, the positions of the waveguide filters 141 to 147 sandwiched between the first substrate 150 and the second substrate 155 become almost uniform with high accuracy. For example, a ready-made waveguide filter is used. Even if there is, the influence of the manufacturing error can be reduced, and accurate waveguide switching becomes possible. In FIGS. 7 and 8, reference numeral 154 is a spacer used when screwing the first substrate 150 and the second substrate 155.

また、上記のように、複数の独立した導波管フィルタを用いた場合、仕様変更等により、フィルタの通過帯域を一部変更したい場合に、その導波管フィルタのみを交換すればよく、容易に対応できる。また、導波管フィルタの数の変更にも容易に対応できる。 Further, as described above, when a plurality of independent waveguide filters are used, if it is desired to partially change the pass band of the filter due to a specification change or the like, it is easy to replace only the waveguide filter. Can be handled. In addition, it is possible to easily cope with a change in the number of waveguide filters.

なお、図示していないが、導波管フィルタの上下方向の寸法のバラツキが無視できない場合には、第２基板１５５の下面側と導波管フィルタの上壁との間に薄い樹脂等を挟み、導波管フィルタの上下方向の機械公差を吸収する。なお、上記の第１規制手段および第２規制手段は、上基板と下基板の少なくとも一方に設ければよく、上基板１５５側に設けたり、両基板に設けてもよい。 Although not shown, if the variation in the vertical dimensions of the waveguide filter cannot be ignored, a thin resin or the like is sandwiched between the lower surface side of the second substrate 155 and the upper wall of the waveguide filter. , Absorbs the vertical mechanical tolerances of the waveguide filter. The first regulating means and the second regulating means may be provided on at least one of the upper substrate and the lower substrate, may be provided on the upper substrate 155 side, or may be provided on both substrates.

上記したフィルタバンク２０は、ミリ波帯において、小型、低損失で、フィルタ切替えが高速に行なえ、その制御が容易で消費電力が少なくて済むので、これをミリ波帯スペクトラムアナライザに用いれば測定精度を向上させるために格別有効である。 The filter bank 20 described above is compact, has low loss, can perform filter switching at high speed in the millimeter wave band, is easy to control, and requires low power consumption. Therefore, if this is used in a millimeter wave band spectrum analyzer, measurement accuracy is high. It is exceptionally effective for improving.

図９は、上記フィルタバンク２０を用いたミリ波帯スペクトラムアナライザ２００の基本的な構成を示している。 FIG. 9 shows the basic configuration of the millimeter wave band spectrum analyzer 200 using the filter bank 20.

このミリ波帯スペクトラムアナライザ２００は、フィルタバンク２０、周波数変換部２１０、検波部２２０、制御部２３０、表示部２４０により構成されている。 The millimeter-wave band spectrum analyzer 200 includes a filter bank 20, a frequency conversion unit 210, a detection unit 220, a control unit 230, and a display unit 240.

ミリ波帯の被測定信号Ｓｘは、フィルタバンク２０を介して周波数変換部２１０のミキサ２１１に与えられ、ローカル信号発生器２１２から出力されるローカル信号とミキシングされ、そのミキシング出力からフィルタ２１３により所定の中間周波数帯の信号が抽出される。ローカル信号の周波数は、制御部２３０の周波数掃引手段２３１により所望の解析対象周波数範囲に対応して掃引可変され、その所望の解析対象周波数範囲の信号成分が時間経過にともなって中間周波数帯の信号として抽出されてその強度が検波部２２０で検出される。なお、ここでは説明を容易にするために、周波数変換部２１０での周波数変換処理（ヘテロダイン変換）を１回だけ行なう例を示しているが、ミリ波帯のような高い周波数の信号を正確に解析する場合には、周波数変換処理を複数回行なってデジタル処理が可能な中間周波数帯に変換することになる。 The measured signal Sx in the millimeter wave band is given to the mixer 211 of the frequency conversion unit 210 via the filter bank 20, mixed with the local signal output from the local signal generator 212, and is determined by the filter 213 from the mixing output. The signal of the intermediate frequency band of is extracted. The frequency of the local signal is swept and variable by the frequency sweeping means 231 of the control unit 230 according to the desired frequency range to be analyzed, and the signal component of the desired frequency range to be analyzed becomes a signal in the intermediate frequency band with the passage of time. And its intensity is detected by the detection unit 220. In addition, in order to facilitate the explanation, an example in which the frequency conversion process (heterodyne conversion) is performed only once in the frequency conversion unit 210 is shown here, but a high frequency signal such as a millimeter wave band is accurately obtained. In the case of analysis, frequency conversion processing is performed a plurality of times to convert to an intermediate frequency band capable of digital processing.

制御部２３０のスペクトラムデータ取得手段２３２は、解析対象周波数毎に検出される信号強度をスペクトラムデータとして記憶し、これを表示部２４０に表示させる。また、制御部２３０のフィルタ切替手段２３３は、フィルタバンク２０のフィルタブロック４０の複数の導波路のうち、解析対象周波数が含まれる通過帯域の導波路を指定して、被測定信号Ｓｘから、指定された導波路に付与された通過帯域に含まれる信号成分のみを抽出させて周波数変換部２１０に出力させる。 The spectrum data acquisition means 232 of the control unit 230 stores the signal strength detected for each frequency to be analyzed as spectrum data, and displays this on the display unit 240. Further, the filter switching means 233 of the control unit 230 designates a passband in the pass band including the frequency to be analyzed among the plurality of waveguides of the filter block 40 of the filter bank 20, and designates the waveguide from the signal to be measured Sx. Only the signal components included in the pass band assigned to the waveguide are extracted and output to the frequency conversion unit 210.

このように構成されたミリ波帯スペクトラムアナライザ２００では、小型に構成でき、フィルタ切替制御が容易となり、省電力化が可能となり、しかも、フィルタブロック４０の各導波路の通過帯域による周波数選択作用により、イメージ成分の誤検出を防止できる。また、フィルタブロック４０の複数の導波路の切替えを高速に行なえるので、解析対象周波数の掃引範囲が広い場合であってもローカル信号の周波数掃引を途中で長時間待たせる必要がなく、効率的に正確なスペクトラム解析を行なうことができる。また、低損失であるから、被測定信号ＳｘのＳ／Ｎを低下させることがなく、小レベルの信号のスペクトラム検出が可能となる。 The millimeter-wave band spectrum analyzer 200 configured in this way can be configured in a small size, filter switching control becomes easy, power saving becomes possible, and moreover, the frequency selection action by the pass band of each waveguide of the filter block 40 makes it possible. , False detection of image components can be prevented. Further, since the plurality of waveguides of the filter block 40 can be switched at high speed, it is not necessary to wait for a long time in the middle of the frequency sweep of the local signal even when the sweep range of the analysis target frequency is wide, which is efficient. Accurate spectrum analysis can be performed. Further, since the loss is low, it is possible to detect the spectrum of a small level signal without lowering the S / N of the signal to be measured Sx.

なお、図９において、点線で示しているように、周波数変換部２１０のローカル信号発生器２１２からミキサ２１１の間に、フィルタバンク２０と同等の構成で、全体の周波数帯域がローカル信号の周波数可変範囲に対応したフィルタバンク２０′を設け、フィルタ切替手段２３３により、フィルタバンク２０′のフィルタブロック４０の複数の導波路のうち解析対象周波数に対応したローカル信号周波数が含まれる通過帯域の導波路を、選択的に接続させるようにすれば、ローカル信号に含まれる高調波やスプリアスを減衰させてミキサ２１１に与えることができ、ローカル信号に含まれる高調波やスプリアスに影響されないより正確なスペクトラム測定が可能となる。 As shown by the dotted line in FIG. 9, between the local signal generator 212 and the mixer 211 of the frequency conversion unit 210, the entire frequency band has a variable frequency of the local signal with the same configuration as the filter bank 20. A filter bank 20'corresponding to the range is provided, and the filter switching means 233 is used to provide a waveguide in a pass band including a local signal frequency corresponding to the frequency to be analyzed among a plurality of waveguides of the filter block 40 of the filter bank 20'. By selectively connecting, the harmonics and spurious contained in the local signal can be attenuated and given to the mixer 211, resulting in more accurate spectrum measurement that is not affected by the harmonics and spurious contained in the local signal. It will be possible.

なお、周波数変換部２１０の入力側だけにフィルタバンク２０を設ける構成、ローカル信号発生器２１２とミキサ２１１の間だけにフィルタバンク２０′を設ける構成、あるいは両方にそれぞれフィルタバンク２０、２０′を設ける構成のいずれであってもよい。 The filter banks 20 are provided only on the input side of the frequency conversion unit 210, the filter banks 20'are provided only between the local signal generator 212 and the mixer 211, or the filter banks 20 and 20'are provided on both of them, respectively. It may be any of the configurations.

２０、２０′……ミリ波帯フィルタバンク、２１……ベース部、３０……第１の固定導波管ブロック、３１……導波路、３３……フランジ受け、３４……チョーク溝、４０……フィルタブロック、４１〜４７……導波路、４１ａ〜４７ａ、４１ｂ〜４７ｂ……導波路形成溝、４８……チョーク溝、４９……凹部、５０……溝、６０……駆動機構、６１……モータ、６２……ネジ体、６３……移動ステージ、６４……ガイド板、７０……第２の固定導波管ブロック、７１……導波路、７３……フランジ受け、７４……チョーク溝、８０、８１……側板、９０……カバー、９５……ガイドレール、１００……第１ブロック、１０５……第２ブロック、１１０、１１１……ネジ穴、１４０……フィルタブロック、１４１〜１４７……導波管フィルタ、１５０……下基板、１５１……規制リブ、１５２……規制ボス、１５３……円形穴、１５４……スペーサ、１５５……上基板、２００……ミリ波帯スペクトラムアナライザ、２１０……周波数変換部、２２０……検波部、２３０……制御部、２３１……周波数掃引手段、２３２……スペクトラムデータ取得手段、２３３……フィルタ切替手段、２４０……表示部 20, 20'... mmWave band filter bank, 21 ... base, 30 ... first fixed waveguide block, 31 ... waveguide, 33 ... flange receiver, 34 ... choke groove, 40 ... ... Filter block, 41-47 ... Waveguide, 41a-47a, 41b-47b ... Waveguide forming groove, 48 ... Chalk groove, 49 ... Recess, 50 ... Groove, 60 ... Drive mechanism, 61 ... ... motor, 62 ... screw body, 63 ... moving stage, 64 ... guide plate, 70 ... second fixed waveguide block, 71 ... waveguide, 73 ... flange receiver, 74 ... choke groove , 80, 81 ... Side plate, 90 ... Cover, 95 ... Guide rail, 100 ... 1st block, 105 ... 2nd block, 110, 111 ... Screw holes, 140 ... Filter block, 141-147 Waveguide filter, 150 ... Lower substrate, 151 ... Regulatory rib, 152 ... Regulatory boss, 153 ... Circular hole, 154 ... Spacer, 155 ... Upper substrate, 200 ... Millimeter wave band spectrum analyzer , 210 ... Frequency conversion unit, 220 ... Detection unit, 230 ... Control unit, 231 ... Frequency sweeping means, 232 ... Spectrum data acquisition means, 233 ... Filter switching means, 240 ... Display unit

Claims

Base part (21) and
A first fixed waveguide block (31) fixed to the base, surrounded by a metal wall, and having a waveguide (31) for propagating electromagnetic waves in the millimeter wave band penetrating from the first end face to the second end face. 30) and
A plurality of waveguides (41-47), each surrounded by a metal wall and endowed with different passband characteristics within the millimeter wave band, are defined on the second end face of the first fixed waveguide block. The second end face of the first fixed waveguide block is formed in parallel to the third end face parallel to each other with a gap of the above and the fourth end face parallel to the third end face. Filter blocks (40, 140) movably supported along the
With the filter block provided on the base portion and supporting the filter block, any designated waveguide among the plurality of waveguides of the filter block is connected to the waveguide of the first fixed waveguide block. The drive mechanism (60) that moves to the position and
The fifth end face and the sixth end face, which are surrounded by a metal wall and propagate the electromagnetic waves in the millimeter wave band, are opposed to the fourth end face of the filter block in parallel with a predetermined gap. The waveguide is formed through to the end face, and the waveguide is connected to the waveguide connected to the waveguide of the first fixed waveguide block among the plurality of waveguides of the filter block. It has a second fixed waveguide block (70) fixed to the base portion, and has.
Around the waveguide opening on the second end face side of the first fixed waveguide block, around the waveguide opening on the third end face side and the fourth end face side of the filter block, and the first. Chalk grooves (34, 48, 74) for preventing electromagnetic wave leakage from the gaps between the end faces are provided around the waveguide opening on the fifth end face side of the fixed waveguide block of 2. Cage,
The filter block is composed of a first block (100) and a second block (105) that are integrally connected with one side of each other joined.
It said different pass band characteristics plurality of waveguides granted there is, the first block, features and to Rumi re sideband filter bank that the second block is formed on a surface to be bonded.

Base part (21) and
A first fixed waveguide block (31) fixed to the base, surrounded by a metal wall, and having a waveguide (31) for propagating electromagnetic waves in the millimeter wave band penetrating from the first end face to the second end face. 30) and
A plurality of waveguides (41-47), each surrounded by a metal wall and endowed with different passband characteristics within the millimeter wave band, are defined on the second end face of the first fixed waveguide block. The second end face of the first fixed waveguide block is formed in parallel to the third end face parallel to each other with a gap of the above and the fourth end face parallel to the third end face. Filter blocks (40, 140) movably supported along the
With the filter block provided on the base portion and supporting the filter block, any designated waveguide among the plurality of waveguides of the filter block is connected to the waveguide of the first fixed waveguide block. The drive mechanism (60) that moves to the position and
The fifth end face and the sixth end face, which are surrounded by a metal wall and propagate the electromagnetic waves in the millimeter wave band, are opposed to the fourth end face of the filter block in parallel with a predetermined gap. The waveguide is formed through to the end face, and the waveguide is connected to the waveguide connected to the waveguide of the first fixed waveguide block among the plurality of waveguides of the filter block. It has a second fixed waveguide block (70) fixed to the base portion, and has.
Around the waveguide opening on the second end face side of the first fixed waveguide block, around the waveguide opening on the third end face side and the fourth end face side of the filter block, and the first. Chalk grooves (34, 48, 74) for preventing electromagnetic wave leakage from the gaps between the end faces are provided around the waveguide opening on the fifth end face side of the fixed waveguide block of 2. Cage,
The filter block is
A plurality of waveguide filters (141-147), each of which has a waveguide (41-47) to which the different passband characteristics are imparted, and
The plurality of waveguide filters have a first substrate (150) and a second substrate (155) that sandwich a wall surface orthogonal to the side wall in a state where the side walls are arranged so as to be close to each other. ,
At least one of the first substrate and the second substrate
A first regulating means (151) for preventing misalignment in the arrangement direction of the plurality of waveguide filters, and
Wherein the plurality of features and to Rumi re sideband filter banks that waveguide second regulating means for preventing the positional deviation in the longitudinal direction of the direction of the filter and (152) are provided.

The opening on the second end face side of the waveguide of the first fixed waveguide block and the opening on the fifth end face side of the waveguide of the second fixed waveguide block are the second. The millimeter waveguide filter bank according to claim 1 or 2, wherein the filter banks are arranged on a straight line orthogonal to the end face of the above.

A filter (213) that applies a signal to be measured in the millimeter wave band to the mixer (211) together with a local signal output from the local signal generator (212) and extracts a signal in a predetermined intermediate frequency band from the mixing output. It has a frequency conversion unit (210) and a detection unit (220) that detects signals in the intermediate frequency band, and changes the frequency of the local signal according to the frequency to be analyzed to change the spectrum of the signal to be measured. In the millimeter wave band spectrum analyzer (200) for obtaining the characteristics,
The millimeter-wave band filter bank according to any one of claims 1 to 3 is provided in front of the frequency conversion unit, and is provided with a millimeter-wave band filter bank.
The drive mechanism of the millimeter-wave band filter bank is controlled according to the frequency to be analyzed, and the waveguide in the pass band including the frequency to be analyzed among the plurality of waveguides of the filter block is the first. A millimeter-wave band spectrum analyzer including a filter switching means (233) for connecting to a waveguide of a fixed waveguide block.

A filter (213) that applies a signal to be measured in the millimeter wave band to the mixer (211) together with a local signal output from the local signal generator (212) and extracts a signal in a predetermined intermediate frequency band from the mixing output. It has a frequency conversion unit (210) and a detection unit (220) that detects signals in the intermediate frequency band, and changes the frequency of the local signal according to the frequency to be analyzed to change the spectrum of the signal to be measured. In the millimeter wave band spectrum analyzer (200) for obtaining the characteristics,
The millimeter wave band filter bank according to any one of claims 1 to 3 is provided between the local signal generator and the mixer of the frequency conversion unit, and the millimeter wave band filter bank is provided.
A passband waveguide that controls the drive mechanism of the millimeter-wave band filter bank according to the analysis target frequency and includes a local signal frequency corresponding to the analysis target frequency among a plurality of waveguides of the filter block. A millimeter-wave band spectrum analyzer comprising a filter switching means (233) for connecting the first fixed waveguide block to the waveguide.