JP6862509B2 - UV protective coating for lens assembly - Google Patents

Description

Description of related application

This application claims the benefit of priority under 35 USC 120 of US Patent Application 14/201021 filed on 6 September 2013. The present specification depends on the contents of the specification of the above-mentioned patent application, and the contents of the above-mentioned specification of the patent application are included in the present specification as a reference in its entirety.

The present specification generally relates to a protective coating for a lens and a method for adhering a lens to an optical system.

Lens systems are used in a variety of end-user applications, including lithography and semiconductor inspection equipment. In these applications, light from the light source is introduced into the lens system to perform the operation. However, in some applications, the UV light introduced into the lens element can degrade the adhesive that is placed to bond the lens element to the lens holder. Deterioration of the adhesive can cause misalignment of the lens element.

Therefore, a UV protective coating for the optical system will be desired.

According to one embodiment, it has a lens, a light absorber having a wavelength from about 250 nm or more to about 400 nm or less, a lens holder, and an adhesive arranged so as to adhere the lens to the lens holder. The optical assembly is described. The absorber is arranged so that light having a wavelength from about 190 nm or more to about 500 nm or less does not enter the adhesive.

In another embodiment, an optical assembly with a lens, a light-impermeable absorber having wavelengths from about 190 nm to about 500 nm and a protective layer placed on the absorber is described.

In yet another embodiment, a method of reducing the deterioration of the adhesive in an optical assembly.
A step of applying an absorber that does not transmit light having a wavelength of about 190 nm or more to about 500 nm or less, and an absorber and an adhesive to the lens, and light having a wavelength of about 190 nm or more to about 500 nm or less is used as an adhesive. The process of arranging so that it does not enter
The method of having is described.

Further features and advantages are described in the detailed description below, which will be readily apparent to those skilled in the art to some extent, or the detailed description and claims below, as well as the accompanying drawings. It will be appreciated by implementing the embodiments as described herein.

It is not surprising that both the general description above and the detailed description below are intended to explain the various embodiments and to provide an overview or framework for understanding the nature and nature of the claimed subject matter. Is. The accompanying drawings are included to provide a deeper understanding of the various embodiments and are incorporated herein by reference. The drawings show the various embodiments described herein and, along with the description, serve to explain the principles and operations of the claimed subject matter.

The embodiments shown in the drawings are for illustration purposes only and are exemplary in nature and are not intended to limit the subject matter defined by the claims. A detailed description of the illustrated embodiments below can be understood when read with the drawings below, where similar structures are indicated by similar reference numerals.

FIG. 1 briefly shows a frontal fracture view of an optical system in which a lens is coupled to a lens holder, according to one or more embodiments illustrated or described herein. FIG. 2 briefly shows a top view of a lens assembly in which a lens is coupled to a lens holder, according to one or more embodiments illustrated or described herein. FIG. 3 is seen along line AA of FIG. 2 of the lens assembly in which the lens is coupled to the lens holder, according to one or more embodiments illustrated or described herein. , The front sectional view is briefly shown. FIG. 4 is a detailed front view of a lens assembly in which a lens is coupled to a lens holder, as seen in enclosure J of FIG. 3, according to one or more embodiments illustrated or described herein. The cross-sectional view is shown briefly. FIG. 5 briefly shows a top view of a lens assembly in which a lens is coupled to a lens holder, according to one or more embodiments illustrated or described herein. FIG. 6 is seen along line BB of FIG. 5 of the lens assembly in which the lens is coupled to the lens holder, according to one or more embodiments illustrated or described herein. , The front sectional view is briefly shown. FIG. 7 briefly shows a laminated structure for adhering a lens to a lens holder, according to one or more embodiments illustrated or described herein. FIG. 8 briefly shows a laminated structure for adhering a lens to a lens holder, including an antireflection layer and a protective layer, according to one or more embodiments illustrated or described herein. FIG. 9 shows a laminated structure for adhering a lens to a lens holder, comprising a plurality of antireflection layers and a plurality of absorbers, according to one or more embodiments illustrated or described herein. Shown briefly. FIG. 10 is a graph showing the transmittance and reflectance of the lens assembly according to the embodiment.

An embodiment of a lens assembly having a lens and a lens holder and a method for adhering a lens to the lens assembly is referred to herein in detail. An embodiment of an optical system incorporating a lens assembly can have a lens and a lens holder. The lens can be stably fixed to the lens holder by the adhesive. The adhesive can be placed in many forms at positions where the lens is placed in contact with the lens holder. In embodiments, the lens assembly with the lens and lens holder can be incorporated into an optical system that includes a light source that supplies light to the lens. The light source may have a wavelength at which the adhesive can deteriorate when exposed to the light source. Thus, in embodiments, the lens assembly comprises an absorber arranged to prevent exposure of the adhesive to degrading light.

With reference to FIG. 1, the optics 90 is shown briefly, with some components cut out for clarity. In the illustrated embodiment, the optical system 90 comprises a light source 92, at least one beam shaping element 94, a lens assembly 100 and a parts carrier 96. The lens assembly 100 includes a lens holder 110 and a lens 130. The light supplied by the light source 92 is guided through the lens 130 of the lens assembly 100, which transmits and refracts the light toward the workpiece 80 supported on the part carrier 96. The optical system 90 can be used to perform a manufacturing process on the work 80, for example, inspection of the work 80, or modification of the work 80, for example in a lithography process.

With reference to FIG. 2 next, one embodiment of the lens assembly 100 is shown. In this embodiment, the lens assembly 100 includes a lens holder 110 and a lens 130. The lens holder 110, shown in cross section in FIG. 3, has a coupling portion 112 and a lens support portion 118. The coupling portion 112 has a plurality of mounting elements 114 that provide a stable and fixed position for coupling the lens holder 110 into and / or another lens holder in the optical system. In the embodiment shown in FIG. 2, the through hole passes through the joint 112. The coupling portion 112 may also have a clocking element 116, such as a key and / or a keyway. The clocking element 116 can provide an orientation reference between adjacent components of the optical system 90 so that the components of the optical system 90 can be maintained in alignment.

In the illustrated embodiment, the lens support 118 extends radially inward from the coupling 112. The lens support portion 118 can have a flat portion 124 and a contour forming portion 126 as shown in FIG. In this embodiment, the contour forming portion 126 is located radially inside the flat portion 124. The contour forming portion 126 can be shaped so as to match the overall shape of the lens 130 at a position where the lens 130 is coupled to the lens supporting position 118 by the adhesive 140.

Referring to FIG. 4, the attachment portion 134 of the lens 130 is coupled to the lens support portion 118 by the adhesive 140. In some embodiments, the adhesive 140 is placed at a plurality of positions arranged along the circumference of the lens 130. The regions of the adhesive 140 are separated from each other at the intermediate circumferential position between the regions of the adhesive 140 so that the lens assembly 100 is generally free of the adhesive 140 at the circumferential position between the regions of the adhesive 140. Can be done.

Materials suitable for Adhesive 140 include commercially available materials, including adhesive cements and adhesives, examples of which are discussed in US Pat. Nos. 7,232,595 and 725,221. Each of these specifications is incorporated herein by reference in its entirety. When assembling the lens assembly 100, the adhesive 140 can be placed in a desired position along the lens support 118 of the lens holder 110. The lens 130 can be inserted and held at a predetermined position with respect to the reference feature of the lens holder 110, including the clocking element 116. The lens 130 can be held in place until the adhesive 140 has the opportunity to dry or cure and maintain the position of the lens 130 with respect to the reference feature of the lens holder 110. These adhesives generally meet the safe operating requirements of modulus of elasticity and coefficient of thermal expansion and are well suited for use in the optical system 90 described herein.

However, the material used as the adhesive 140 may easily deteriorate when irradiated with a light source having a specific wavelength. Degradation can be particularly severe when the light source emits light at short wavelengths, such as wavelengths corresponding to deep ultraviolet and extreme ultraviolet wavelengths. At short wavelengths, the energy from the light source tends to destroy the material of the adhesive 140. Deterioration can cause outgassing from the adhesive 140, which can cause contamination of the optical system 90. Deterioration of the adhesive 140 can also adversely affect the tensile strength and / or elasticity of the adhesive 140, which can reduce the ability of the adhesive 140 to maintain the position of the lens with respect to the reference feature of the lens holder 110. .. Misalignment between the reference features of the lens 130 and the lens holder 110 can reduce the performance characteristics of the optical system 90.

In the embodiment shown in FIGS. 2 and 3, the lens support 118 has a plurality of support pads 120 arranged along the circumferential direction of the lens support 118. Each of the plurality of support pads 120 is separated from each other by an escape channel 122 separated from the indicator pad 120 in a direction corresponding to the optical axis 132 of the lens 130. The support pad 120 and the relief channel 122 provide an intermittent mounting surface along the lens support 118 to which the lens 130 is coupled. In this embodiment, the adhesive 140 is placed along a support pad 120 that contacts the lens 130. The adhesive 140 is generally not placed near the channel 122 such that the lens 130 is separated from the lens holder 110 at a position near the relief channel 120. The distance between the lens 130 and the escape channel 122 of the lens holder 110 provides a clearance through which fluid can flow. In some embodiments of the optical system 90, any contaminants can be washed away so that purge gas can be fed into the lens assembly 100 to flush through the gap created between the escape channel 122 and the lens 130.

The embodiments of FIGS. 2 and 3 show a lens holder 110 incorporating regions of three support pads 120, thus three relief channels 122 and three adhesives 140, wherein the lens holder 110 is the optical system 90. It should be understood that any number of areas of support pads 120, relief channels 122 and adhesive 140 can be provided, as specified by the design and requirements of.

With reference to FIGS. 5 and 6, another embodiment of the lens assembly 200 incorporating the lens holder 210 and the lens 130 is shown. In this embodiment, the lens holder 210 has a coupling portion 112 and a lens support portion 118. The coupling portion 112 has a plurality of mounting elements 112 that, in this embodiment, are through holes that pass through the coupling portion 112, which provide a stable and fixed position for coupling the lens holder 210 into the optical system. The coupling portion 112 may also have a clocking element 116, such as a key and / or a keyway. The clocking element 116 can provide an orientation reference between adjacent components of the optical system 90 so that the radial alignment of the components of the optical system 90 can be maintained.

In this embodiment, the lens support portion 118 can have a shape along its circumference 136 so as to be continuous so that the lens support portion 118 is not interrupted in the circumferential direction. The lens 130 is coupled to the lens support 118 by an adhesive 140 arranged in a discrete region arranged at a position close to the circumference 136 of the lens 130. The adhesive 140 can generally be placed only within the discrete regions so that the adhesive 140 is not located between adjacent regions.

Since the adhesive 140 is arranged in a discrete region between the lens support 118 and the lens 130 of the lens holder 110, and because the adhesive 140 can have a thickness, the lens 130 adheres above the lens support 118. Can be arranged by agent 140. In these embodiments, the space between the lens support 118 and the lens 130 can provide a gap through which the fluid can flow, at positions between the discrete regions of the adhesive 140. In some embodiments of optics 90, purge gas is pumped into the lens assembly 100 to flush away any contaminants between the lens support 118 and the lens 130 at a position separated from the discrete regions of the adhesive 140. The gaps that have been created can be washed away.

The embodiments discussed above with reference to FIGS. 2-6 list adhesives that can be placed in discrete regions, but in another embodiment the adhesive is suitable for adhering the lens to the lens holder. The form can also be applied to the lens. For example, in some embodiments, the adhesive can be applied continuously along the circumference of the lens.

With reference to the embodiment shown in FIG. 7, the lens assembly can have a laminated structure 900 containing an absorber 190 disposed between the lens 130 and the adhesive 140. The absorber 190 absorbs and / or reflects light of a wavelength emitted from the light source 910, which can degrade the adhesive 140 and thus shift the position of the lens 130 with respect to the lens holder 310. It is composed. In an embodiment, the absorber 190 is arranged between the light source 910 and the adhesive 140, and thus incident light into the adhesive 140 within a wavelength range that is absorbed and / or reflected, as shown in FIG. Can be prevented. FIG. 7 shows the horizontal direction of the laminated structure 900, but other directions of the laminated structure, such as the vertical direction, are also within the scope of the present disclosure.

The absorber 190 can include any material that absorbs UV light over a wide spectrum. In embodiments, the absorber 190 comprises a material that absorbs both chemical ray wavelengths and predominant cure wavelengths. In some embodiments, the absorber 190 absorbs light from about 190 nm to about 500 nm, such as wavelengths from about 220 nm to about 480 nm. In another embodiment, the absorber 190 absorbs light from about 230 nm to about 460 nm, such as wavelengths from about 240 nm to about 440 nm. In yet another embodiment, the absorber 190 absorbs light from about 250 nm to about 400 nm, such as wavelengths from about 260 nm to about 375 nm. In yet another embodiment, the absorber 190 absorbs light having a wavelength from about 265 nm or more to about 365 nm or less.

The material forming the absorber 190 can absorb and / or reflect at least a portion of the UV light, as described above. In some embodiments, the material forming the absorber 190 can be one or more metals capable of absorbing and / or reflecting UV light. In another embodiment, the material forming the absorber 190 can be one or more transition metals. In yet another embodiment, the material forming the absorber 190 can be selected from chromium, titanium, zinc, nickel, manganese, iron, niobium, silver, gold, hafnium, aluminum, tantalum and mixtures thereof. The metal can exist as a substantially pure metal or as a metal oxide, metal nitride, metal carbide or mixture thereof. The various materials that can be used as absorbers allow for differently structured laminated structures not previously available. For example, in some embodiments, the absorptiometer material can be selected so that the absorptiometer can be applied to the surface of the lens 130 that does not face the light source. However, in another embodiment, the absorptiometer material can be selected so that the absorptiometer can be applied to the surface of the lens 130 facing the light source.

FIG. 7 shows layers having approximately the same thickness of the laminated structure 900, but in embodiments, each layer of the laminated structure 900 can have any suitable thickness. The absorber 190 can have a thickness such that the transmittance of light at the chemical ray wavelength is about 5% or less, or even about 4% or less. In some embodiments, the thickness of the absorber is such that the light transmittance at the chemical line wavelength is no more than about 3%, or even about 2% or less. In addition, the absorber does not transmit light of wavelengths that would cure the adhesive. Therefore, in the embodiment, it is not necessary to adjust the thickness of the absorber so as to transmit light at the curing wavelength. Therefore, conventionally undesirable optical assembly configurations can be used in some embodiments, as the thickness of the absorber will not be adjusted to transmit light at the curing wavelength.

In some embodiments, the laminated structure 900 can be configured to give the lens device other properties. In embodiments, the laminated structure 900 scatters the reflected light from the absorber 190, the adhesive 140 and / or the lens holder 310 into various components of the optics that can cause the optics to operate poorly. It can be configured to be reduced. Antireflection properties can be provided by choosing an absorber 190 that reflects little or no light. However, in some embodiments, antireflection properties can be imparted by adding a layer to the laminated structure 900. In some embodiments, a layer can be added to the laminated structure 900 to facilitate adhesion of one layer to another and / or to protect one layer of the laminated structure 900.

With reference to the embodiment shown in FIG. 8, the laminated structure 900 can have a layer in addition to the lens 130, the absorber 190, the adhesive 140 and the lens holder 310. In some embodiments, the laminated structure 900 can have one or more of an adhesion promoter / antireflection layer 1100 and a protective layer 1200. The adhesion promoter / antireflection layer 1100 can be placed between the lens 130 and the absorber 190. The adhesion promoter / antireflection layer 1100 can include a material that promotes adhesion of the absorber 190 to the lens 130 and also acts as an intermediate antireflection layer. The material forming the adhesion promoter / antireflection layer 1100 can be any material that promotes adhesion of the lens 130 to the absorber 130 and / or imparts antireflection properties to the laminated structure 900. In some embodiments, the adhesion promoter / antireflection layer 1100 can consist of metal oxides, metal carbides, metal nitrides or mixtures thereof. In some embodiments, the adhesion promoter / antireflection layer 1100 consists of oxides of chromium, titanium, zinc, nickel, manganese, iron, niobium, silver, gold, hafnium, aluminum, tantalum and mixtures thereof. Can be done. In some embodiments, the adhesion promoter / antireflection layer 1100 can consist of a metal oxide containing an absorber 190. For example, if the absorber 190 is made of chromium, the adhesion promoter / antireflection layer 1100 can be made of chromium oxide, such as chromium oxide (III). However, in another embodiment, the adhesion promoter / antireflection layer 1100 can consist of a metal oxide containing a metal different from the metal of the absorber 190. In some embodiments, the laminated structure with the adhesion promoter / antireflection layer 1100 can have a reflectance of about 20% or less, such as about 18% or less, or even about 16% or less.

The laminated structure 900 can also have a protective layer 1200. In embodiments, the protective layer is applied between the absorber 190 and the adhesive 140. The protective layer 1200 prevents damage to the absorber 190 during treatment. For example, if the absorber 190 is scratched, the light from the light source can pass through the scratches on the absorber 190 and enter the adhesive 140, degrading the adhesive 10 and aligning the lens 130. It can be shifted. The protective layer 1200 reduces the likelihood that the absorber 190 will be damaged, as by scratches. The protective layer 1200 can be made of any material that can provide protection to the absorber 190 and is also compatible with the absorber 190 and the adhesive 140. In some embodiments, the protective layer 1200 can consist of metal oxides, metal nitrides, metal carbides or mixtures thereof. In some embodiments, the protective layer 1200 can consist of oxides of chromium, titanium, zinc, nickel, manganese, iron, niobium, silver, gold, hafnium, aluminum, tantalum and mixtures thereof. In some embodiments, the protective layer 1200 can consist of a metal oxide containing an absorber 190. For example, if the absorber 190 is made of chromium, the protective layer 1200 can be made of chromium oxide, such as chromium (III) oxide. However, in another embodiment, the protective layer 1200 can be made of a metal oxide containing a metal different from the metal of the absorber 190.

With reference to FIG. 9, the laminated structure 900 can have a plurality of absorbers 190 and a plurality of adhesion promoters / antireflection layers 1100. The number of absorber 190 and adhesion promoter / antireflection layer 1100 is limited by the physical constraints of the optics. In an embodiment, each absorber 190 has an adhesion promoter / antireflection layer 1100 arranged on the side closest to the lens 130. In some embodiments, there may be two absorbers 190 and two adhesion promoters / antireflection layers 1100, or even three absorbers 190 and three adhesion promoters / antireflection layers 1100. In another embodiment, there may be four absorbers 190 and four adhesion promoters / antireflection layers 1100, or even five absorbers 190 and five adhesion promoters / antireflection layers 1100.

7-9 show all of the laminated structural layers arranged on one side of the lens, but in some embodiments the adhesive is opposite to the other constituent layers of the lens laminated structure. It can be placed on the side as long as the other constituent layers of the laminated structure prevent UV light from entering the adhesive. For example, in embodiments, the absorber (and, if desired, the adhesion promoter / antireflection and protective layer) can be placed on the light incident side of the lens with respect to the light source. The adhesive can be placed on the opposite side, on the anti-light incident side of the lens, yet the absorber can prevent UV light incident on the adhesive if the adhesive is properly configured. it can.

The laminated structure can be applied to the lens by any suitable method. For example, in some embodiments, the laminated structure can be applied by vacuum deposition, sputtering, spray coating, inkjet printing, and the like. In embodiments where the laminated structure is applied, for example, by vacuum deposition or sputtering, a mask can be used to protect the optical surface of the lens during construction. The mask contacts only the periphery of the lens and directly on the optical surface of the lens to prevent scratching or other damage to the optical surface of the lens and at the same time to provide protection from the method of attachment. It is configured so that it does not touch. The mask does not cover the predetermined area of the lens, which is to be glued to the lens holder. When the mask is placed, a laminated structure is applied to a predetermined area of the lens.

Methods for protecting the adhesive in optics are also disclosed. In embodiments, the method comprises applying at least an absorber to the lens as described herein. The absorbers are arranged such that when the lens is attached to the optical device, the absorbers are positioned to shield the adhesive so that UV light does not enter the adhesive. The absorber does not transmit UV light from the light source, which can degrade the adhesive. Embodiments of the method can further include applying an adhesion promoter / antireflection layer, as described herein, to the lens, which is placed between the lens and the absorber. Some method embodiments include a protective layer, as described herein for protecting the lens during handling, such as during mounting in an optical device, on the opposite side of the lens, of the absorber. A step of applying to the surface can be included. Each layer of the laminated structure is one of the suitable deposition methods such as vacuum deposition, spin-on coating, sol-gel deposition, inkjet deposition, chemical vapor deposition, physical vapor deposition and electron beam deposition. Can be applied by. In some embodiments, each layer of the laminated structure can be applied by the same deposition method. However, in another embodiment, one or more layers of the laminated structure can be applied in a manner different from the other (one or more) layers. Some embodiments include contacting one of the absorbers or protective layers with an adhesive configured to adhere the lens to the lens holder.

The embodiments will be further clarified by the following examples.

Example 1
In the lens holder, the lens is arranged on one surface of the lens, 30 to 60 nm thick Cr ₂ O ₃ adhesion promoter / antireflection layer, and 100 to 300 nm thick Cr absorption arranged on the adhesion promoter / antireflection layer. body layer, absorber layer 100~200nm thickness Cr ₂ O ₃ protective layer disposed on and between the lens holder for holding the stacked structure and the lens and the protective layer, an adhesive to the lens holder, a laminated structure An optical assembly that was glued was made. Each of the above layers was applied using an electron beam deposition method. The laminated structure was irradiated with light, and the transmittance and reflectance of UV light having a wavelength of 250 nm to 400 nm were measured. As shown in FIG. 10, the transmittance of UV light having a wavelength of 250 nm to 400 nm through the laminated structure was 0% (along the x-axis). The reflectance of UV light having a wavelength of 190 nm to 500 nm due to the laminated structure (with AR) was less than 15%.

Example 2
Examples were prepared in the same manner as in Example 1 except that the laminated structure _{did not have a Cr 2} O ₃ adhesion promoter / antireflection layer and the protective layer thickness was 60 to 100 nm. Each layer of this example was applied using an electron beam deposition method. The laminated structure was irradiated with light, and the transmittance and reflectance of UV light having a wavelength of 250 nm to 400 nm were measured. As shown in FIG. 10, the transmittance of UV light having a wavelength of 250 nm to 400 nm through the laminated structure was 0% (along the x-axis). The reflectance of UV light with wavelengths from 190 nm to 500 nm due to the (without AR) laminated structure was between 15% and 40%.

It should now be understood that the lens assembly and the optical system including the lens assembly according to the present disclosure have a lens holder and a lens. The lens is attached to the lens holder by an intermittent adhesive at a position close to the circumference of the lens. The light in the optical system is provided in a light irradiation region having a plurality of high intensity regions separated from the plurality of low intensity regions assessed along the circumference of the lens. The lens assembly is arranged so that the adhesive is separated from the high intensity area of the light irradiation area.

Note that the term "substantially" can be used herein to describe the intrinsic magnitude of uncertainty that can be attributed to any quantitative comparison, value, measurement or other expression. I want to be. The term is also used herein to describe the magnitude by which a quantitative expression can change from a stated standard without changing the basic function of the subject.

Although specific embodiments have been shown and described herein, it is not surprising that various other modifications and modifications can be made without departing from the spirit and scope of the claimed subject matter. Further, the various aspects claimed herein have been described herein, but such aspects need not be used in combination. Therefore, the appended claims are said to include all such modifications and modifications within the scope of the claimed subject matter.

80 Workpiece 90 Optical system 92,910 Light source 94 Beam shaping element 96 Parts carrier 100,200 Lens assembly 110,210,310 Lens holder 112 Coupling part 114 Mounting element 116 Clocking element 118 Lens support part 120 Support pad 122 Escape channel 124 Flat part 126 Contouring part 130 Lens 132 Optical axis 134 Attachment part 136 Circumference 140 Adhesive 190 Absorber 900 Laminated structure 910 Light source 1100 Adhesive promoter / antireflection layer 1200 Protective layer

Claims (8)

In the lens assembly (100, 200)
Lens (130),
Absorbent (190), which has a wavelength from about 190 nm or more to about 500 nm or less and does not transmit light.
A lens holder (310), and an adhesive (140) arranged so as to bond the lens (130) to the lens holder (310).
Have,
The absorber (190) is arranged so that light having a wavelength from about 190 nm or more to about 500 nm or less does not enter the adhesive (140).
Wherein the adhesive has a curing wavelength, so that the absorption body does not transmit the curing wavelength that is included in the light from the lens (130) is disposed on the side light source of said lens assembly (100, 200) It is composed and
A lens assembly (100, 200) characterized in that the absorber (190) is provided between the lens (130) and the adhesive (140). The lens assembly (100, 200) according to claim 1, further comprising an adhesion promoter / antireflection layer (1100) disposed between the lens (130) and the absorber (190). The lens assembly according to claim 2, wherein the adhesion promoter / antireflection layer (1100) contains a material selected from the group consisting of metal oxides, metal nitrides, metal carbides and mixtures thereof. (100, 200). A metal, metal oxide in which the adhesion promoter / antireflection layer (1100) contains one or more of chromium, titanium, zinc, nickel, manganese, iron, niobium, silver, gold, hafnium, aluminum and tantalum. The lens assembly (100, 200) according to claim 3, wherein the material is selected from the group consisting of metal nitrides, metal carbides and mixtures thereof. Any of claims 2 to 4, wherein the adhesion promoter / antireflection layer (1100) has a reflectance of about 20% or less with respect to light having a wavelength of about 190 nm or more and about 500 nm or less. The lens assembly (100, 200) according to item 1. The absorber (190) further has a protective layer (1200) arranged on the surface opposite to the adhesion promoter / antireflection layer (1100), and the protective layer (1200) is a metal. The lens assembly (100, 200) according to any one of claims 2 to 5, further comprising a material selected from the group consisting of oxides, metal nitrides, metal carbides and mixtures thereof. The lens according to any one of claims 1 to 6, wherein the absorber (190) contains one or more metals, metal oxides, metal nitrides, metal carbides and mixtures thereof. Assembly (100, 200). Metals, metal oxides, wherein the absorber (190) comprises one or more of chromium, titanium, zinc, nickel, manganese, iron, niobium, silver, gold, hafnium, aluminum and tantalum. The lens assembly (100, 200) according to claim 7, wherein the lens assembly (100, 200) includes a metal nitride, a metal carbide, and a mixture thereof.

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