JP6809662B2 - Transfer robot system - Google Patents

Description

The present invention relates to a transfer robot system that conveys a workpiece such as a semiconductor substrate or a liquid crystal substrate.

In the manufacturing process of semiconductor substrates and liquid crystal substrates, multiple substrates are stored in multiple stages in a substrate transport container called a cassette, and the cassette is transported to a process device or inspection device for process processing and inspection processing of the substrates in the cassette. Will be done. Then, in the process apparatus and the inspection apparatus, the transfer robot is used as an industrial robot for storing the substrate in the conveyed cassette and taking out the substrate from the cassette. As a transfer robot, for example, Patent Document 1 discloses a horizontal articulated transfer robot.

The horizontal articulated transfer robot has a support portion, a swivel portion that moves up and down and turns with respect to the support portion, a first arm that rotates with respect to the swivel portion, and a second arm that rotates with respect to the first arm. It includes an arm and a hand that rotates with respect to the second arm.

Japanese Unexamined Patent Publication No. 2016-16471

Some transfer robots used in a vacuum environment are equipped with an endless mechanism in order to shorten the tact time. The endless mechanism is a mechanism that allows the swivel portion to rotate 360 degrees without limiting the swivel of the swivel portion. Specifically, a motor that is a drive source for rotating the first arm, the second arm, and the hand is arranged in the support portion, and the rotational force is transmitted to each portion via a drive mechanism composed of gears and belts. .. Since the motor is arranged in the support portion, it does not move regardless of the rotation of the swivel portion. Therefore, the problem that the cable connected to the motor is twisted by the swivel of the swivel portion does not occur. As a result, the swivel portion can swivel without limitation.

On the other hand, in order to detect whether or not a work is placed on the hand, it is common to provide a sensor on the surface on which the work of the hand is placed. In this case, a cable for transmitting the detection signal of the sensor is connected from the sensor to the controller via the support portion. As a result, the presence or absence of the work can be confirmed by the controller.

However, in a transfer robot provided with an endless mechanism, a problem arises when the cable is routed from the sensor to the support portion. Specifically, the cable routed from the sensor to the support portion needs to pass through the swivel portion existing between the sensor and the support portion. Note that passing through the swivel portion includes not only the case where the cable is arranged inside the swivel portion but also the case where the cable is arranged along the outside of the swivel portion. However, if the swivel portion repeatedly swivels in the same direction, the cable may be twisted. Therefore, in the conventional transfer robot system provided with the endless mechanism, the sensor is not provided in the hand, but the sensor is provided in the transfer chamber in which the transfer robot is arranged.

The present invention has been made in view of the above problems, and can transmit a signal between a hand and a controller without wiring a cable for transmitting a signal through a swivel portion. An object of the present invention is to provide a transfer robot system.

The transfer robot system provided by the first aspect of the present invention has a support portion, a swivel portion rotatably provided with respect to the support portion, and a hand for mounting a work, and the swivel portion. A transfer robot that is supported by a unit and includes a moving unit that moves the hand on a predetermined route, a first communication unit that is arranged in the moving unit and performs wireless communication, and at least covers the moving unit. A transfer chamber that keeps the inside in a vacuum state and a controller that is arranged outside the transfer chamber and has a second communication unit that controls the transfer robot and communicates with the first communication unit. The transfer chamber is provided with a passing portion through which radio waves for communication can pass. According to this configuration, the first communication unit arranged in the mobile unit and the second communication unit provided in the controller communicate with each other. The moving part is covered with a transfer chamber, but since the transfer chamber has a passing part through which radio waves for communication can pass, the signal transmitted wirelessly by the first communication unit can be wirelessly communicated to the outside of the transfer chamber. Is. Therefore, it is possible to transmit a signal between the moving unit and the controller via the first communication unit and the second communication unit without wiring the cable for transmitting the signal through the swivel unit. it can.

In a preferred embodiment of the present invention, a relay device that is arranged outside the transfer chamber and in the vicinity of the passing portion and relays communication between the first communication unit and the second communication unit is used. The transfer robot system is further provided. According to this configuration, even if the output of the first communication unit or the second communication unit is small, the first communication unit and the second communication unit can communicate with each other via the relay device. That is, the first communication unit or the second communication unit can have a small output.

In a preferred embodiment of the present invention, the relay device and the second communication unit perform wireless communication. According to this configuration, a communication cable for connecting the relay device and the second communication unit is not required.

In a preferred embodiment of the present invention, the hand includes a sensor for detecting the presence or absence of the mounted work, and the first communication unit transmits a detection result detected by the sensor. According to this configuration, the detection signal detected by the sensor can be transmitted to the controller. Therefore, it is not necessary to arrange a sensor for detecting the presence or absence of the work in the transfer chamber.

In a preferred embodiment of the present invention, the hand is provided with a gripping mechanism that grips the work based on a signal received by the first communication unit. According to this configuration, an operation signal can be transmitted from the controller to grip the work by the gripping mechanism. As a result, the moving speed of the hand can be increased.

In a preferred embodiment of the invention, the transfer chamber is made of metal and the passage is a transparent window provided in a portion of the transfer chamber. According to this configuration, it is possible to monitor the internal state while maintaining the strength of the transfer chamber.

In a preferred embodiment of the invention, the passage is made of glass or synthetic resin. According to this configuration, radio waves for communication can be reliably passed.

In a preferred embodiment of the present invention, the transfer robot further includes a closed container for sealing the first communication unit. According to this configuration, the air pressure in the closed container is kept constant even when the inside of the transfer chamber is in a vacuum state. Therefore, the first communication unit is not exposed to the vacuum environment.

In a preferred embodiment of the present invention, the transfer robot system further includes a high frequency power supply device, and the support unit is a power transmission unit that generates a magnetic field by flowing an alternating current supplied from the high frequency power supply device. The moving unit further includes a power receiving coil that is magnetically coupled to the power transmission unit, and the power received by the power receiving coil is supplied to the first communication unit. According to this configuration, power can be transmitted from the power transmission unit to the power receiving coil in a non-contact manner. Therefore, power can be supplied from the high-frequency power supply to the first communication unit without wiring the cable for power transmission through the swivel unit.

In a preferred embodiment of the present invention, the power transmission unit is two parallel conductor wires extending around the swivel unit over the entire circumference in the circumferential direction of the swivel unit. According to this configuration, since the power transmission unit is arranged over the entire circumference in the circumferential direction of the swivel portion, the power receiving coil can receive power from the power transmission unit even when the swivel portion swivels with respect to the support portion. Moreover, since the power transmission unit is two parallel conductor wires, the arrangement is easy.

In a preferred embodiment of the present invention, the moving portion further includes a plurality of arms, and the plurality of arms rotate in conjunction with each other to move the hand. According to this configuration, the hand can be moved on a predetermined route.

In a preferred embodiment of the present invention, the moving portion further includes a guide rail, and the hand moves while being supported by the guide rail. According to this configuration, the hand can be moved along a predetermined path along the guide rail.

According to the present invention, the first communication unit arranged in the mobile unit and the second communication unit provided in the controller communicate with each other. The moving part is covered with a transfer chamber, but since the transfer chamber has a passing part through which radio waves for communication can pass, the signal transmitted wirelessly by the first communication unit can be wirelessly communicated to the outside of the transfer chamber. Is. Therefore, it is possible to transmit a signal between the moving unit and the controller via the first communication unit and the second communication unit without wiring the cable for transmitting the signal through the swivel unit. it can.

Other features and advantages of the present invention will become more apparent with the detailed description given below with reference to the accompanying drawings.

The outline of the transfer robot system according to the 1st Embodiment is shown, (a) is a perspective view, and (b) is a front view. The outline of the transfer robot according to the 1st Embodiment is shown, (a) is a plan view, (b) is a side view, and (c) is a sectional view taken along line II-II of (a). It is a figure for demonstrating the power supply in the transfer robot which concerns on 1st Embodiment, (a) is the schematic plan view which omitted a part of the transfer robot, and (b) is the part about power supply in a transfer robot. It is a circuit diagram which shows. The outline of the hand which concerns on 1st Embodiment is shown, (a) is a plan view, and (b) is a functional block diagram of a circuit on a substrate. An outline of a hand according to another embodiment of the first embodiment is shown, (a) is a plan view, and (b) is a functional configuration diagram of a circuit on a substrate. It is a perspective view which shows the outline of the transfer robot system which concerns on 2nd Embodiment. The outline of the transfer robot system according to the 3rd Embodiment is shown, (a) is a perspective view, and (b) is a front view. The outline of the transfer robot system according to the 4th Embodiment is shown, (a) is a perspective view, and (b) is a front view. It is a perspective view which shows the outline of the transfer robot system which concerns on 5th Embodiment.

Hereinafter, preferred embodiments of the present invention will be specifically described with reference to the accompanying drawings.

FIG. 1 shows an outline of the transfer robot system A1 according to the first embodiment. FIG. 1A is a perspective view of the transfer robot system A1. FIG. 1B is a front view of the transfer robot system A1. In FIG. 1, the transfer chamber 9 described later is passed through, and the internal transfer robot B1 and the like are shown by broken lines (the same applies to FIGS. 6 to 9). Further, in FIG. 1 (b), the description of the controller 8 and the like is omitted (the same applies to FIGS. 7 (b) and 8 (b)).

The transfer robot system A1 is used in, for example, a process apparatus, and transfers a work between a cassette and a process chamber. As shown in FIG. 1, the transfer robot system A1 includes a transfer robot B1, a controller 8, a transfer chamber 9, and a relay device 92. A load lock chamber (not shown) and a process chamber (not shown) in which cassettes are arranged are arranged around the transfer chamber 9, and each opening is connected to an opening (not shown) of the transfer chamber 9. Has been done. The inside of the transfer chamber 9, the load lock chamber, and the process chamber is kept in a vacuum state. The vacuum does not mean an absolute vacuum, but means a state in which the pressure is lower than the atmospheric pressure. The transfer robot B1 is a robot that takes out a work from the cassette or the process chamber and stores the work in the cassette or the process chamber in a vacuum environment in the transfer chamber 9.

FIG. 2 shows an outline of the transfer robot B1 according to the first embodiment. FIG. 2A is a plan view of the transfer robot B1. FIG. 2B is a side view of the transfer robot B1 and shows a view of the right side surface in FIG. 1A. FIG. 2C is a sectional view taken along line II-II of FIG. 2A. In FIG. 2C, the description of a part of the configuration (second arms 4a, 4b and hands 5a, 5b described later) is omitted, and the internal structure of the swivel portion 2 and the first arms 3a, 3b is described. Is also omitted.

As shown in FIG. 2, the transfer robot B1 includes a support portion 1, a swivel portion 2, first arms 3a and 3b, second arms 4a and 4b, and hands 5a and 5b. In FIG. 2, the description will be made based on the x direction, which is the direction in which the hands 5a and 5b move, the y direction, which is the direction orthogonal to the x direction in the horizontal plane, and the z direction, which is the vertical direction. (The same applies to the figure below). The local coordinate system is set with reference to the swivel portion 2, and rotates in the x-direction and the y-direction according to the swivel of the swivel portion 2, and translates in the z-direction as the swivel portion 2 moves up and down.

The support portion 1 is fixed to the transport chamber 9 and supports the swivel portion 2 so as to be able to move up and down and swivel. The support portion 1 may be directly fixed to the floor surface. In the present embodiment, the support portion 1 is made of a bottomed cylindrical metal, and a flange portion 11 is provided at the upper end portion. The shape, dimensions, and material of the support portion 1 are not limited.

The swivel portion 2 is made of hollow cylindrical aluminum and is arranged inside the support portion 1. The shape, size, and material of the swivel portion 2 are not limited. The swivel portion 2 is provided so as to be movable up and down so as to protrude from the opening portion 1a of the support portion 1. In the present embodiment, the swivel portion 2 can move up and down by about 50 mm. In addition, it may be possible to move up and down more. FIG. 2 shows a state in which the swivel portion 2 is raised and protrudes from the opening 1a. Further, the swivel portion 2 is provided so as to be swivelable around the swivel shaft Z1 extending in the z direction with respect to the support portion 1. Since the swivel unit 2 is provided with an endless mechanism, it can swivel without limitation. The description and description of the drive mechanism for moving the swivel portion 2 up and down and the drive mechanism (endless mechanism) for swiveling the swivel portion 2 will be omitted. The turning unit 2 changes the directions of the hands 5a and 5b by turning, and changes the moving directions of the hands 5a and 5b. Further, the swivel portion 2 changes the position of the hands 5a and 5b in the vertical direction by moving up and down.

The first arm 3a is rotatably provided around a rotation shaft Z2a extending in the z direction with respect to the swivel portion 2. The first arm 3b is rotatably provided around a rotation shaft Z2b extending in the z direction with respect to the swivel portion 2. The rotation axis Z2a of the first arm 3a and the rotation axis Z2b of the first arm 3b are located at the same position as the rotation axis Z1 in the x direction and equidistant from the rotation axis Z1 in the y direction ( See FIG. 2 (b)). That is, the rotation shaft Z2a, the rotation shaft Z1, and the rotation shaft Z2b are arranged in this order in a row in the y direction at equal intervals. The arrangement of the rotation shaft Z2a and the rotation shaft Z2b is not limited to this. The first arm 3a and the first arm 3b are arranged at the same height (the same position in the z direction), but since their rotation ranges are limited, they do not come into contact with each other. Illustration and description of the drive mechanism for rotating the first arm 3a and the first arm 3b will be omitted.

The second arm 4a is rotatably provided around a rotation shaft Z3a extending in the z direction with respect to the first arm 3a. The second arm 4b is rotatably provided around a rotation shaft Z3b extending in the z direction with respect to the first arm 3b. The rotation shaft Z3a is arranged on the tip end side of the first arm 3a, and the rotation shaft Z3b is arranged on the tip end side of the first arm 3b. The second arm 4a and the second arm 4b are arranged at the same height (the same position in the z direction), but since their rotation ranges are limited, they do not come into contact with each other. Illustration and description of the drive mechanism for rotating the second arm 4a and the second arm 4b will be omitted.

The hands 5a and 5b are for mounting the work. The hand 5a is fixed to the hand holder 5c and is rotatably provided around a rotation shaft Z4a extending in the z direction with respect to the second arm 4a. The hand 5b is fixed to the hand holder 5d and is rotatably provided around a rotation shaft Z4b extending in the z direction with respect to the second arm 4b. The rotation shaft Z4a is arranged on the tip end side of the second arm 4a, and the rotation shaft Z4b is arranged on the tip end side of the second arm 4b. The hand holder 5d has a substantially U-shaped cross section when viewed from the side (when viewed from the x direction) (see FIG. 2B), and the hand 5b is an upper inner surface of the hand holder 5d. It is fixed to. Further, the hand 5a is fixed to the upper surface of the hand holder 5c. Since the position of the hand 5b in the z direction is higher than that of the hand 5a (see FIG. 2B), the hand 5a and the hand 5b do not come into contact with each other. Further, the hand 5a and the hand 5b can move on the same orbit in a plan view (when viewed from the z direction). Illustration and description of the drive mechanism for rotating the hand 5a and the hand 5b will be omitted.

The first arm 3a, the second arm 4a, and the hand 5a rotate in conjunction with each other, so that the hand 5a moves in the x direction. Further, the first arm 3b, the second arm 4b, and the hand 5b rotate in conjunction with each other, so that the hand 5b moves in the x direction. The movements of the hands 5a and 5b in the x direction are controlled independently of each other. Further, as described above, they are configured so as not to come into contact with each other. The arrangement of the first arms 3a and 3b, the second arms 4a and 4b and the hands 5a and 5b in the z direction is not limited to those described above. The first arms 3a and 3b, the second arms 4a and 4b, the hand holders 5c and 5d and the hands 5a and 5b require a certain level of strength and are preferably lightweight. Therefore, in the present embodiment, all of them are used. It is made of aluminum. The shapes, dimensions, and materials are not limited. In the present embodiment, the first arm 3a, the second arm 4a, the hand holder 5c and the hand 5a are combined, or the first arm 3b, the second arm 4b, the hand holder 5d and the hand 5b are combined. , Corresponds to the "moving part" of the present invention.

The transfer robot B1 changes the moving direction (x direction) of the hands 5a and 5b by turning the swivel portion 2, and moves the swivel portion 2 up and down to move the hand 5a and 5b in the vertical direction (z direction). By changing the position and rotating the first arms 3a, 3b, the second arms 4a, 4b, and the hands 5a, 5b, the hands 5a, 5b are moved in the x direction. The transfer robot B1 takes out the work in the cassette and stores the work in the cassette by each of these operations.

When the hand 5a (5b) is not operating, the hand 5a (5b) is located at a basic position which is a predetermined position above the turning portion 2. At this time, the first arm 3a (3b) and the second arm 4a (4b) are also located at the corresponding basic positions. FIG. 2A shows a state (basic state) in which the hand 5a, the first arm 3a, and the second arm 4a are respectively located at the basic positions. When the swivel portion 2 turns, the hands 5a and 5b (also the first arms 3a and 3b and the second arms 4a and 4b) are all controlled to be positioned at the basic positions.

Next, the power supply in the transfer robot B1 will be described.

The transfer robot B1 supplies electric power from the support portion 1 to the first arms 3a and 3b in a non-contact manner so that disconnection does not occur when the swivel portion 2 repeatedly swivels in the same direction. Further, power can be supplied regardless of the position where the swivel portion 2 is swiveled.

FIG. 3 is a diagram for explaining the supply of electric power in the transfer robot B1. FIG. 3A is a schematic plan view of the transfer robot B1, omitting the first arm 3b, the second arms 4a, 4b, and the hands 5a, 5b.

A donut-shaped insulating sheet 12 is arranged on the upper surface of the flange portion 11 of the support portion 1 (the surface facing the first arm 3a) over the entire circumference. Then, on the upper surface of the insulating sheet 12, parallel two wires 13 provided with two parallel conductor wires 131 and 132 are arranged so as to extend over the entire circumference along the circumferential direction of the upper surface of the flange portion 11. (See FIGS. 3 (a) and 2 (c)). The insulating sheet 12 insulates the parallel two wires 13 from the support portion 1. If the support portion 1 is an insulator, the insulating sheet 12 does not have to be arranged. Further, if the support portion 1 is an insulator, the parallel two wires 13 may be arranged inside the flange portion 11. The two parallel conductor wires 131 and 132 are arranged concentrically around the swivel shaft Z1. Further, the surface defined by the two parallel conductor wires 131 and 132 is parallel to the upper surface of the flange portion 11. Further, in the present embodiment, the ends of the conductor wires 131 and 132 are short-circuited. The ends of the conductor wires 131 and 132 may be open or may be connected to a specific impedance. High-frequency power is supplied to the parallel two wires 13 from the high-frequency power supply device 61. When a high-frequency current flows, a high-frequency magnetic field in the z direction is generated between the conductor wire 131 and the conductor wire 132. That is, the parallel two wires 13 function as a power transmission antenna (power transmission coil) for transmitting the power output by the high frequency power supply device 61. In the present embodiment, the parallel two wires 13 correspond to the "power transmission unit" of the present invention.

The high-frequency power supply device 61 is arranged inside the support portion 1 and supplies high-frequency power to the parallel two wires 13. The high-frequency power supply device 61 includes a DC power supply device and an inverter device (not shown). The DC power supply device generates and outputs DC power. For example, an AC voltage input from a commercial power supply (for example, a commercial voltage of 200 [V]) is rectified and smoothed to a predetermined level (target). It is converted to DC voltage (voltage) and output to the inverter circuit. The inverter circuit converts DC power into high frequency power, and converts the DC power input from the DC power supply device into high frequency power and outputs it. The inverter circuit is, for example, a single-phase full-bridge type inverter circuit. The inverter circuit outputs high frequency power of a predetermined frequency f ₀ (for example, 13.56 [MHz]). The configuration of the high-frequency power supply device 61 is not limited as long as it outputs high-frequency power.

The high frequency power supply device 61 and the parallel two wires 13 are connected by a connecting wire, and a resonance capacitor 62 is connected in series to one of the connecting wires. The resonance capacitor 62 is for forming a series resonance circuit with the parallel two wires 13. The parallel two-wire 13 and the resonance capacitor 62 are designed so that the resonance frequency coincides with the frequency f _{0 of the} high frequency power supplied from the high frequency power supply device 61. That is, the self-inductance L _t of the parallel two wires 13 and the capacitance C _t of the resonance capacitor 62 are designed to have the relationship of the following equation (1).

An insulating sheet 31 is arranged on the lower surface of the first arm 3a (the surface facing the support portion 1). A power receiving coil 32 is arranged on the lower surface of the insulating sheet 31 so that the coil surface is parallel to the lower surface of the first arm 3a. (See FIGS. 3 (a) and 2 (c)). In FIG. 3A, the insulating sheet 31 and the power receiving coil 32 are on the lower surface of the first arm 3a and are therefore shown by broken lines. The insulating sheet 31 insulates the power receiving coil 32 from the first arm 3a. If the first arm 3a is an insulator, the insulating sheet 31 may not be arranged. Further, if the first arm 3a is an insulator, the power receiving coil 32 may be arranged inside the first arm 3a.

The power receiving coil 32 magnetically couples with the parallel two wires 13 to receive power in a non-contact manner. That is, by arranging the power receiving coil 32 within the range of the high frequency magnetic field generated by the parallel two wires 13 by the high frequency current input from the high frequency power supply device 61, the magnetic flux interlinking with the power receiving coil 32 changes, and the power receiving coil A high frequency current flows through 32. As a result, power can be supplied from the parallel two wires 13 to the power receiving coil 32 in a non-contact manner. In the present embodiment, the power receiving coil 32 is a substantially rectangular coil having a number of turns of 1. The shape and number of turns of the power receiving coil 32 are not limited. The power receiving coil 32 may be, for example, a rectangular spiral coil (a coil in which a winding is wound on the same surface as the coil surface). In this case, the inductance of the power receiving coil 32 can be increased without increasing the thickness (dimension in the z direction) of the power receiving coil 32. Further, it may be a rectangular tubular coil (a coil in which windings are wound so as to be stacked in a direction orthogonal to the coil surface), a circular spiral coil, or a cylindrical coil (so-called cylindrical coil). It may be a solenoid coil). However, in the case of the tubular shape, the thickness (dimension in the z direction) of the power receiving coil 32 becomes large, so even when the swivel portion 2 moves to the lowest position, it is designed so as not to come into contact with the parallel two wires 13. There is a need to.

Further, the shape of the coil surface of the power receiving coil 32 is designed so that the power receiving coil 32 can receive the most power when the first arm 3a is located at the basic position. That is, when the first arm 3a is located at the basic position, the long side of the coil surface of the power receiving coil 32 overlaps the conductor wires 131 and 132, respectively, in a plan view (see FIG. 3A). ). In this case, since the coil surface of the power receiving coil 32 and the parallel two wires 13 have a large overlap in a plan view, the amount of power received by the power receiving coil 32 is large. The conductor wires 131 and 132 are concentric circles centered on the swivel shaft Z1, and the swivel portion 2 swivels around the swivel shaft Z1 (see the solid arrow shown in FIG. 3A). Therefore, when the first arm 3a is located at the basic position, the coil surface of the power receiving coil 32 overlaps the parallel two wires 13 in a plan view regardless of the direction in which the swivel portion 2 is swiveled. .. That is, when the first arm 3a is located at the basic position, the amount of power received by the power receiving coil 32 can always be increased. Conversely, when the swivel portion 2 is swiveled in a state where the first arm 3a is located at the basic position, the parallel two wires 13 are arranged at positions facing the orbit of the coil surface of the power receiving coil 32. It can be said that.

On the other hand, the first arm 3a rotates about a rotation shaft Z2a different from the rotation shaft Z1 (see the broken line arrow shown in FIG. 3A). Therefore, when the first arm 3a is not located at the basic position (when it is located at a position rotated from the basic position), the coil surface of the power receiving coil 32 deviates from the parallel two lines 13 in a plan view (FIG. FIG. 3 (a), see the power receiving coil 32 of the first arm 3a described by the broken line). In this case, the amount of power received by the power receiving coil 32 is reduced depending on the degree of deviation of the coil surface of the power receiving coil 32 (according to the area of the overlapping portion with the parallel two wires 13 in a plan view). Therefore, while the hand 5a is moving, the amount of power received by the power receiving coil 32 is smaller than that in the case where the hand 5a is located at the basic position.

A resonance capacitor 71 is connected in series to the power receiving coil 32. The resonance capacitor 71 is for forming a series resonance circuit with the power receiving coil 32. The power receiving coil 32 and the resonance capacitor 71 are designed so that the resonance frequency matches the frequency f _{0 of the} high frequency power supplied from the high frequency power supply device 61. That is, the self-inductance L _r of the power receiving coil 32 and the capacitance C _r of the resonance capacitor 71 are designed to have the relationship of the following equation (2).

The electric power received by the power receiving coil 32 is converted into DC electric power by the DC power supply circuit 72 and supplied to the electric power load 73. The DC power supply circuit 72 includes a rectifier circuit (not shown), a smoothing circuit, and a DC / DC converter circuit (not shown). The rectifier circuit is, for example, a full-wave rectifier circuit in which four diodes are bridge-connected, rectifies an input high-frequency voltage, and outputs it as a DC voltage to a smoothing circuit. The smoothing circuit smoothes the DC voltage input from the rectifier circuit and outputs it to the DC / DC converter circuit. The DC / DC converter circuit converts the DC voltage input from the rectifier circuit into a predetermined voltage and outputs it to the power load 73. The configuration of the DC power supply circuit 72 is not limited as long as it converts high-frequency power into DC power.

The resonance capacitor 71 and the DC power supply circuit 72 are mounted on a substrate arranged on the hand 5a. The power receiving coil 32 and the DC power supply circuit 72 are connected by, for example, a cable. The cable is arranged between the first arm 3a and the hand 5a, but since the range of rotation of the second arm 4a and the hand 5a is limited, the cable rotates in the same direction indefinitely and the cable is screwed. It never cuts. The resonance capacitor 71 and the DC power supply circuit 72 may be arranged in the first arm 3a or the second arm 4a.

The power load 73 is driven by the DC power input from the DC power supply circuit 72. The power load 73 in this embodiment is provided on the hand 5a.

FIG. 4 is a diagram for explaining a power load 73 provided on the hand 5a, FIG. 4A is a plan view showing an outline of the hand 5a, and FIG. 4B is arranged on the hand 5a. The functional block diagram of the circuit on the board is shown.

As shown in FIG. 4A, the substrate 51 is arranged at the base end portion of the hand 5a. As shown in FIG. 4B, the above-mentioned resonance capacitor 71, the DC power supply circuit 72, and the power load 73 are mounted on the substrate 51. The substrate 51 may be arranged on the hand holder 5c to which the hand 5a is fixed, or may be arranged on the first arm 3a or the second arm 4a. The electric power load 73 is supplied with electric power from the DC power supply circuit 72. The power load 73 includes a detection unit 52 and a communication unit 54.

The detection unit 52 detects the presence or absence of the work W, and includes a sensor 52a. As shown in FIG. 4A, two sensors 52a are provided on the upper surface of the hand 5a. The sensor 52a is, for example, a reflection type photosensor, which includes a light emitting element and a light receiving element, and is energized when the light emitted by the light emitting element is reflected by the work W and the reflected light is received by the light receiving element. It is used to detect the presence or absence of the work W placed on the upper surface of the hand 5a. The detection unit 52 outputs the detection signal to the communication unit 54. The number of sensors 52a is not limited, and the placement location is not limited. Further, the detection unit 52 may detect the presence or absence of the work W by another method using a limit switch or the like as the sensor 52a. However, if a moving part such as a limit switch is used, particles may be generated, so it is desirable to use a photosensor that does not move.

The communication unit 54 performs wireless communication with the communication unit 81 of the controller 8 described later, and includes a communication module corresponding to a wireless communication standard such as ZigBee (registered trademark). The wireless communication standard is not limited, and may be Wi-Fi (registered trademark), Bluetooth (registered trademark), or the like. The communication unit 54 transmits the detection signal input from the detection unit 52 by wireless communication. The communication unit 54 may be dedicated to transmission or may be for two-way communication. In the present embodiment, the communication unit 54 corresponds to the "first communication unit" of the present invention.

Since the substrate 51 is arranged in a vacuum environment, it is necessary that each circuit mounted on the substrate 51 does not fail even in the vacuum environment. Further, it is preferable that the substrate 51 does not generate gas that adversely affects the work W, or even if gas is generated, the amount is so small that it does not substantially affect the work W. The substrate 51 may be covered with a closed container. The closed container may be made of, for example, a material that allows radio waves to pass through (for example, synthetic resin), or may be made of metal, and part of the container may be made of glass or synthetic resin to allow radio waves to pass through. In this case, even if the inside of the transfer chamber 9 is in a vacuum state, the air pressure inside the closed container is kept constant, so that each circuit mounted on the substrate 51 is not exposed to the vacuum environment. When glass or synthetic resin is used as the closed container, gas that adversely affects the work W is not generated in a vacuum environment, or even if gas is generated, the amount is very small and substantially affects the work W. Those that do not exist are selected. In this way, even if the substrate 51 is a material that generates a gas that adversely affects the work W in a vacuum environment, the substrate 51 can be covered with a closed container so as not to adversely affect the work W. it can.

The configurations of the first arm 3b and the hand 5b are the same as those of the first arm 3a and the hand 5a, respectively.

FIG. 3B is a circuit diagram showing a part related to power supply in the transfer robot B1. As shown in FIG. 3B, the parallel two wires 13 and the resonance capacitor 62 form a series resonance circuit to transmit high frequency power supplied from the high frequency power supply device 61. Further, the power receiving coil 32 magnetically coupled to the parallel two wires 13 and the resonance capacitor 71 form a series resonance circuit to receive high frequency power transmitted from the parallel two wires 13. That is, in the transfer robot B1, non-contact power transmission is performed by the magnetic field resonance method.

Returning to FIG. 1, the controller 8 controls the operation of the transfer robot B1. The controller 8 operates the transfer robot B1 by transmitting a drive signal to each motor of the transfer robot B1 via the motor power line 82. Further, the rotation angle of each motor detected by the encoder is received via the motor encoder wire 83 to perform feedback control. The controller 8 stores the operation procedure of the transfer robot B1, and operates the transfer robot B1 according to the operation procedure.

Further, the controller 8 includes a communication unit 81 for wirelessly communicating with the communication unit 54 of the transfer robot B1 via a relay device 92 described later. The communication unit 81 includes a communication module corresponding to a wireless communication standard such as ZigBee. The wireless communication standard is not limited. The communication unit 81 receives the detection signal transmitted by the communication unit 54 of the transfer robot B1. The communication unit 81 may be dedicated to reception or may be for two-way communication. The controller 8 uses the detection signal (the signal for detecting the presence / absence of the work W) received by the communication unit 81 to control the operation of the transfer robot B1. In the present embodiment, the communication unit 81 corresponds to the "second communication unit" of the present invention.

The transfer chamber 9 provides a vacuum environment space for the work W to be transferred between the process chamber and the load lock chamber. The transfer chamber 9 has, for example, a rectangular parallelepiped shape and a hollow inside, and is fixed to the floor surface by a fixing portion (not shown). A circular opening is provided in the center of the lower surface of the transfer chamber 9, and the transfer robot B1 allows the support portion 1 to pass through the opening so that the lower surface of the flange portion 11 becomes a peripheral portion of the opening of the transfer chamber 9. It is abutted and fixed, and is arranged in the space inside the transfer chamber 9. That is, the transfer chamber 9 covers the first arms 3a, 3b, the second arms 4a, 4b, and the hands 5a, 5b of the transfer robot B1. The support portion 1 of the transfer robot B1 may be fixed to the floor surface, and the transfer chamber 9 may be fixed to the flange portion 11 of the support portion 1. The transfer chamber 9 may at least cover the first arms 3a, 3b, the second arms 4a, 4b, and the hands 5a, 5b of the transfer robot B1. Further, the transfer chamber 9 is made of a metal such as aluminum, and the inside can be kept in a vacuum state. As a result, the transfer chamber 9 can maintain a space for the transfer robot B1 to transfer the work W in a vacuum environment. The transfer chamber 9 is designed to be as small as possible so that the transfer robot B1 does not come into contact with the inner wall. Further, in the present embodiment, the case where the transfer chamber 9 has a rectangular parallelepiped shape is shown, but the shape of the transfer chamber 9 is not limited. The shape of the transfer chamber 9 is appropriately designed according to the number and shape of the process chambers and load lock chambers arranged around the chamber.

Further, the transfer chamber 9 is provided with a window 91. The window 91 is a peep window for monitoring the operation of the transfer robot B1 in the transfer chamber 9 and the state of the work W. The window 91 is made of glass, for example, and is attached to a part of the surface forming the transport chamber 9 so as not to have a gap. The window 91 allows the inside of the transfer chamber 9 to be monitored while keeping the inside in a vacuum state. In the present embodiment, the window 91 is provided on the upper surface of the transfer chamber 9, and the inside can be monitored from above the transfer chamber 9. The radio wave for communication output by the communication unit 54 of the transfer robot B1 cannot pass through metal, but can pass through the window 91 which is glass. As a result, the communication unit 54 can communicate with the outside of the transfer chamber 9. In the present embodiment, the window 91 corresponds to the "passing portion" of the present invention.

The window 91 is not limited to glass, and may be made of a transparent synthetic resin such as an acrylic resin. However, it needs to be a material that does not allow air to pass through and allows radio waves for communication to pass through. Further, when it is not necessary to monitor the inside of the transfer chamber 9, the window 91 does not have to be transparent. For example, even if there is a glass window for monitoring the inside, if the relay device 92 cannot be attached in the vicinity of the glass window, or the communication state between the communication unit 54 of the transfer robot B1 and the communication unit 81 of the controller 8 If the problem is poor, a window 91 made of synthetic resin dedicated to communication can be provided separately so that communication can be performed appropriately. When glass or synthetic resin is used as the window 91, gas that adversely affects the work W is not generated in a vacuum environment, or even if gas is generated, the amount is very small and substantially affects the work W. Those that do not exist are selected.

The relay device 92 relays between the communication unit 54 of the transfer robot B1 and the communication unit 81 of the controller 8. The relay device 92 includes a communication module corresponding to a wireless communication standard such as ZigBee. The wireless communication standard is not limited. The relay device 92 is arranged outside the transfer chamber 9 and in the vicinity of the window 91. The relay device 92 receives the detection signal transmitted by the communication unit 54 of the transfer robot B1, amplifies it, and then transmits it to the communication unit 81 of the controller 8. The received signal may be transmitted as it is without being amplified. In the relay device 92, the communication unit 54 and the communication unit 81 can directly perform wireless communication based on the positional relationship between the communication unit 54 and the communication unit 81 and the window 91 and the output size of the communication unit 54 and the communication unit 81. Since it may not be available, it is provided to relay both. Therefore, when the communication unit 54 and the communication unit 81 can directly perform wireless communication as in the third embodiment described later, the relay device 92 may not be provided.

Next, the operation and effect of the transfer robot system A1 according to the present embodiment will be described.

According to the present embodiment, the communication unit 54 of the transfer robot B1 transmits the detection signal detected by the detection unit 52 by wireless communication. The radio wave for communication output from the communication unit 54 passes through the window 91 provided in the transfer chamber 9 and is output to the outside of the transfer chamber 9. Then, the radio wave is relayed by the relay device 92 arranged near the window 91 on the outside of the transport chamber 9, and is input to the communication unit 81 of the controller 8. As a result, the detection signal transmitted by the communication unit 54 by wireless communication is received by the communication unit 81 of the controller 8. Therefore, the transfer robot B1 can transmit the detection signal detected by the detection unit 52 to the controller 8. Further, it is not necessary to wire a cable from the hand 5a (5b) on which the detection unit 52 is arranged to the support unit 1. That is, the signal can be transmitted between the hand 5a (5b) and the controller 8 without wiring the cable for transmitting the signal through the swivel portion 2. Therefore, even if the transfer robot B1 is provided with an endless mechanism, the cable will not be screwed. Since the sensor 52a (detection unit 52) for detecting the presence / absence of the work W can be provided on the hand 5a (5b), it is not necessary to arrange the sensor for detecting the presence / absence of the work W in the transfer chamber 9.

Further, since the relay device 92 relays the signal transmitted by the communication unit 54, the communication unit 54 and the communication unit 81 can communicate with each other even if the output of the communication unit 54 is small. That is, the communication unit 54 can have a small output. Further, the relay device 92 and the communication unit 81 perform wireless communication. Therefore, a communication cable for connecting the relay device 92 and the communication unit 81 is not required.

Further, according to the present embodiment, the high frequency current output from the high frequency power supply device 61 flows through the parallel two wires 13 arranged in the support portion 1, and the high frequency magnetic field in the z direction is formed between the conductor wire 131 and the conductor wire 132. Occurs. Then, the power receiving coil 32 arranged in the first arm 3a (3b) is arranged within the range of the high frequency magnetic field, and a high frequency current flows through the power receiving coil 32. That is, non-contact power transmission is performed by the magnetic field coupling between the parallel two wires 13 and the power receiving coil 32. Therefore, high-frequency power can be supplied from the support portion 1 to the first arm 3a (3b) without providing a cable between the support portion 1 and the first arm 3a (3b). The high-frequency power received by the power receiving coil 32 is converted into DC power by the DC power supply circuit 72 and supplied to the detection unit 52 and the communication unit 54 (power load 73) provided on the hand 5a (5b). Therefore, even the transfer robot B1 provided with the endless mechanism can supply electric power to the hands 5a (5b).

According to this embodiment, since the magnetic field resonance method is used for the non-contact power transmission from the parallel two wires 13 to the power receiving coil 32, the swivel portion 2 rises and the distance between the parallel two wires 13 and the power receiving coil 32 increases. Power can be supplied to the power receiving coil 32 from the parallel two wires 13 even when they are relatively far apart. Further, according to the present embodiment, the parallel two wires 13 are arranged over the entire circumference of the upper surface of the flange portion 11 of the support portion 1. Therefore, even if the position of the power receiving coil 32 changes due to the turning of the turning portion 2, the power receiving coil 32 can receive power. Further, according to the present embodiment, when the first arm 3a (3b) is located at the basic position, the overlap between the coil surface of the power receiving coil 32 and the parallel two wires 13 in the plan view is the largest, and the power receiving coil 32 The amount of power received is the largest. When the hand 5a (5b) is not operating or when the swivel portion 2 turns, the first arm 3a (3b) is located at the basic position, so that the first arm 3a (3b) is located at the basic position. I have been there for a long time. Therefore, electric power can be transmitted efficiently.

According to this embodiment, two hands 5a and 5b are provided. Therefore, work efficiency can be improved as compared with the case where there is only one hand.

In the first embodiment, the case where the parallel two wires 13 and the resonance capacitor 62 form a series resonance circuit and the power receiving coil 32 and the resonance capacitor 71 form a series resonance circuit has been described. Not limited. Either or both may form a parallel resonant circuit. Further, in the first embodiment, the case where the non-contact power transmission from the parallel two wires 13 to the power receiving coil 32 uses the magnetic field resonance method has been described, but the present invention is not limited to this. For example, an electromagnetic induction method may be used.

In the first embodiment, the case where the power load 73 directly consumes the power output by the DC power supply circuit 72 has been described, but the present invention is not limited to this. A storage means such as a battery or a capacitor may be connected between the DC power supply circuit 72 and the power load 73 so that the DC power output by the DC power supply circuit 72 is stored in the storage means. In this case, even if the hand 5a (5b) is separated from the basic position and the amount of power received by the power receiving coil 32 becomes small, the power stored in the power storage means can be supplied, so that the power load 73 is prevented from becoming insufficient. it can. It is also possible to control the operating state of the high frequency power supply device 61 according to the charging state of the power storage means. For example, the high frequency power supply device 61 may be operated only when the power storage means is less than a predetermined charge amount.

In the first embodiment, the case where the parallel two wires 13 provided in the support portion 1 transmit power is described, but the present invention is not limited to this. The support portion 1 may be provided with a power transmission coil instead of the parallel two wires 13, and the power transmission coil may perform power transmission. The power transmission coil is, for example, a coil extending over the entire circumference along the circumferential direction of the upper surface of the flange portion 11 (a rectangular spiral or tubular coil is stretched on the same plane as the coil surface to form a circular shape. It may be). Further, a large number of spiral or tubular power transmission coils may be arranged along the entire circumference along the circumferential direction of the upper surface of the flange portion 11. In these cases, the power transmission coil corresponds to the "power transmission unit" of the present invention.

In the first embodiment, the case where the parallel two wires 13 are provided on the upper surface of the flange portion 11 has been described, but the present invention is not limited to this. For example, the parallel two wires 13 may be provided on the side surface of the flange portion 11. In this case, the power receiving coil 32 needs to be arranged so as to face the side surface of the flange portion 11 so that the parallel two wires 13 can be interlinked with the generated high frequency magnetic flux.

In the first embodiment, the case where power is supplied from the high frequency power supply device 61 of the support unit 1 to the power load 73 by non-contact power transmission using the parallel two wires 13 and the power receiving coil 32 has been described. Not limited to. For example, a battery may be arranged on the hand 5a (5b) to supply power to the power load 73 from the battery. Even in this case, the transfer robot B1 provided with the endless mechanism can supply electric power to the electric power load 73. Further, the configurations of the parallel two-wire 13, the power receiving coil 32, the DC power supply circuit 72, and the like can be omitted.

In the first embodiment described above, the case where two hands are provided has been described, but the present invention is not limited to this. For example, there may be only one hand, or three or more hands.

In the first embodiment, the case where the hand is moved on the straight path has been described, but the present invention is not limited to this. The hand may be moved on a path other than a straight line. Further, the first arm 3a, the second arm 4a and the hand 5a (the first arm 3b, the second arm 4b and the hand 5b) are not limited to those that rotate in conjunction with each other, and each of them is allowed to rotate freely. You may.

In the first embodiment, the case where only one window 91 is provided on a part of the upper surface of the transfer chamber 9 has been described, but the present invention is not limited to this. A plurality of windows 91 may be provided. Further, the shape and size of the window 91 are not limited. For example, the entire upper surface of the transfer chamber 9 may be the window 91. Further, the arrangement position of the window 91 is not limited, and may be arranged on the side surface of the transfer chamber 9, for example. If the inside is strong enough to keep the inside in a vacuum state, the entire transfer chamber 9 may be formed of glass or synthetic resin to form the entire transfer chamber 91 as a window 91.

In the first embodiment, the case where the communication unit 54 transmits the detection signal of the presence / absence of the work W detected by the detection unit 52 to the communication unit 81 has been described, but the present invention is not limited to this. The signal transmitted by the communication unit 54 to the communication unit 81 may be another signal. For example, an acceleration sensor may be mounted on the substrate 51 to detect the acceleration of the hand 5a (5b) in the three axial directions and transmit the detection signal. In this case, the controller 8 can obtain the acceleration information of the hand 5a (5b) based on the detection signal received by the communication unit 81, so that the failure can be predicted. For example, the vibration of the hand 5a (5b) is detected based on the acceleration information when the hand 5a (5b) is moving, and if the vibration becomes larger than a predetermined value, a warning is given as there is a risk of failure. You may.

Further, the communication unit 81 of the controller 8 may transmit a signal to the communication unit 54 of the transfer robot B1. For example, a gripping mechanism for gripping the work W may be provided on the upper surface of the hand 5a (5b), and the gripping mechanism may be operated based on an operation signal from the controller 8.

5A and 5B are views for explaining a case where a gripping mechanism is provided on the upper surface of the hand 5a, FIG. 5A is a plan view showing an outline of the hand 5a, and FIG. 5B is arranged on the hand 5a. The functional configuration diagram of the circuit on the board is shown.

As shown in FIG. 5A, the gripping mechanism includes a locking portion 56, a contact portion 57, and a motor 58. The locking portion 56 is fixed to the tip end portion of the upper surface of the hand 5a (the front side in the moving direction (x direction) of the hand 5a), and engages with the edge of the work W (the front edge in the moving direction of the hand 5a). Stop. In this embodiment, two locking portions 56 are provided. The contact portion 57 is provided near the center of the upper surface of the hand 5a so as to be movable in the x direction. The contact portion 57 is moved to the work W side by the motor 58 and comes into contact with the edge of the work W (the edge opposite to the edge locked by the locking portion 56). In this embodiment, one contact portion 57 is provided. The motor 58 moves the contact portion 57. When the motor 58 is off, the contact portion 57 is moved to the rear side in the moving direction of the hand 5a by a spring or the like (see the contact portion 57 shown by the broken line in FIG. 5A). Then, when the motor 58 is turned on, the contact portion 57 is moved to the front side in the moving direction of the hand 5a, comes into contact with the edge of the work W, and grips the work W with the locking portion 56. (See the contact portion 57 shown by the solid line in FIG. 5A). The number, shape, and arrangement location of the locking portion 56 and the contact portion 57 are not limited.

As shown in FIG. 5B, the motor 58 is connected to the DC power supply circuit 72 via a switch 59 mounted on the substrate 51. The motor 58 is also a power load 73 to which power is supplied from the DC power supply circuit 72. The controller 8 transmits an operation signal from the communication unit 81 according to the stored operation procedure. The communication unit 54 receives the operation signal transmitted from the communication unit 81, and switches between the open state and the conduction state of the switch 59 according to the received signal. The switch 59 is a semiconductor switch such as a transistor, and is in a conductive state when the operation signal is on. As a result, the motor 58 is driven by being supplied with electric power from the DC power supply circuit 72 (on state), and the work W is gripped by the contact portion 57 and the locking portion 56. On the other hand, when the operation signal is off, the switch 59 is in the open state. As a result, the motor 58 is no longer supplied with electric power from the DC power supply circuit 72 and stops driving (off state), and the grip of the work W is released. The gripping mechanism may have another configuration. For example, it may be an electrostatic chuck or the like.

When the gripping mechanism is operated by the operation signal from the controller 8, the communication unit 81 may be dedicated to transmission and the communication unit 54 may be dedicated to reception. It should be noted that the detection unit 52 shown in FIG. 4 may detect the presence or absence of the work W, and the gripping mechanism shown in FIG. 5 may grip the work W. In this case, it is necessary to enable the communication unit 54 and the communication unit 81 to perform bidirectional communication.

In the first embodiment, the case where the transfer robot B1 conveys the circular work W has been described, but the present invention is not limited to this. The work W may be a rectangular work such as a liquid crystal substrate. Further, the work W is not limited to the semiconductor substrate and the liquid crystal substrate.

In the first embodiment, the case where the relay device 92 and the communication unit 81 of the controller 8 perform wireless communication has been described, but the present invention is not limited to this. A case where the relay device 92 and the communication unit 81 perform wired communication will be described below as a second embodiment.

FIG. 6 is a perspective view showing an outline of the transfer robot system A2 according to the second embodiment. In FIG. 6, elements that are the same as or similar to the transfer robot system A1 (see FIG. 1A) according to the first embodiment are designated by the same reference numerals. As shown in FIG. 6, the transfer robot system A2 is first implemented in that the relay device 92 and the communication unit 81 are connected by a communication cable 93, and the relay device 92 and the communication unit 81 perform wired communication. It is different from the transfer robot system A1 according to the embodiment.

Also in the second embodiment, the same effect as that of the first embodiment can be obtained. Further, in the second embodiment, since the relay device 92 and the communication unit 81 are connected by the communication cable 93, even if there is a shield that blocks radio waves between the relay device 92 and the controller 8. The relay device 92 and the communication unit 81 can reliably communicate with each other.

In the first embodiment, the case where the communication between the communication unit 54 of the transfer robot B1 and the communication unit 81 of the controller 8 is relayed by the relay device 92 has been described, but the present invention is not limited to this. A case where relaying by the relay device 92 is not performed will be described below as a third embodiment.

FIG. 7 shows an outline of the transfer robot system A3 according to the third embodiment. FIG. 3A is a perspective view, and FIG. 9B is a front view. In FIG. 7, the same or similar elements as those of the transfer robot system A1 (see FIG. 1) according to the first embodiment are designated by the same reference numerals. As shown in FIG. 7, the transfer robot system A3 does not include the relay device 92, and the transfer robot system according to the first embodiment is in that the communication unit 54 and the communication unit 81 directly perform wireless communication. Different from A1.

In the third embodiment, the window 91 is provided on the side surface of the transfer chamber 9 on the side where the controller 8 is arranged. Further, the window 91 is provided so as to extend in the longitudinal direction of the side surface of the transport chamber 9. Therefore, regardless of the position of the hand 5a (5b) of the transfer robot B1, the communication unit 54 arranged in the hand 5a (5b) and the communication unit 81 arranged in the controller 8 directly perform wireless communication. be able to.

Also in the third embodiment, the same effect as that of the first embodiment can be obtained. Further, in the third embodiment, it is not necessary to provide the relay device 92. The communication outputs of the communication unit 54 and the communication unit 81 are sufficiently large, and the communication unit 54 and the communication unit 81 can directly communicate with each other regardless of the position of the window 91 (for example, the position of the window 91 shown in FIG. 1). If wireless communication can be performed, the relay device 92 may not be provided.

In the first embodiment, the case where the transfer robot B1 is attached to the transfer chamber 9 and the transfer chamber 9 covers a part of the transfer robot B1 has been described, but the present invention is not limited to this. A case where the transfer chamber 9 covers the entire transfer robot B1 will be described below as a fourth embodiment.

FIG. 8 shows an outline of the transfer robot system A4 according to the fourth embodiment. FIG. 3A is a perspective view, and FIG. 9B is a front view. In FIG. 8, the same or similar elements as those of the transfer robot system A1 (see FIG. 1) according to the first embodiment are designated by the same reference numerals. As shown in FIG. 8, the transfer robot system A4 is different from the transfer robot system A1 according to the first embodiment in that the transfer chamber 9 covers the entire transfer robot B1.

Also in the fourth embodiment, the same effect as that of the first embodiment can be obtained. Further, in the fourth embodiment, the support portion 1 can be made movable in parallel with the xy plane defined by the x direction and the y direction.

In the first embodiment, the case where the transfer robot B1 is a horizontal articulated transfer robot has been described, but the present invention is not limited to this. A case where a transfer robot that slides the hand is provided instead of the transfer robot B1 will be described below as a fifth embodiment.

FIG. 9 is a perspective view showing an outline of the transfer robot system A5 according to the fifth embodiment. In FIG. 9, elements that are the same as or similar to the transfer robot system A1 (see FIG. 1A) according to the first embodiment are designated by the same reference numerals. As shown in FIG. 9, the transfer robot system A5 is different from the transfer robot system A1 according to the first embodiment in that the transfer robot B2 is provided instead of the transfer robot B1.

The transfer robot B2 includes a support portion 1, a swivel portion 2 (not shown), a guide body 21, and hands 5a and 5b. The support portion 1 and the swivel portion 2 are the same as the support portion 1 and the swivel portion 2 of the transfer robot B1 according to the first embodiment. The guide body 21 has a box shape having a rectangular shape in a plan view, and is provided with two pairs of guide rails that extend linearly in the longitudinal direction inside. The guide body 21 is fixed to the swivel portion 2, moves up and down together with the swivel portion 2, and swivels together with the swivel portion 2. The hands 5a and 5b are provided so as to be slidable along the guide rail of the guide body 21, respectively. The transfer robot B1 changes the moving direction of the hands 5a and 5b by turning the swivel portion 2, and changes the vertical position of the hands 5a and 5b by moving the swivel portion 2 up and down, and the guide body 21 Slide the hands 5a and 5b along the guide rail of. Each of the hands 5a and 5b includes a communication unit 54. In the present embodiment, the combination of the guide body 21 and the hand 5a (hand 5b) corresponds to the "moving portion" of the present invention.

Also in the fifth embodiment, the same effect as that of the first embodiment can be obtained.

In the first to fifth embodiments, the case where the transfer robot B1 is provided with the endless mechanism has been described, but the present invention is not limited to this. The present invention can also be applied to a transfer robot system that does not have an endless mechanism. Even if the endless mechanism is not provided, if the present invention is applied, the cable for outputting the detection signal of the sensor becomes unnecessary, so that the cable can be avoided from becoming an obstacle.

The transfer robot system according to the present invention is not limited to the above-described embodiment. The specific configuration of each part of the transfer robot system according to the present invention can be freely redesigned.

A1, A2, A3, A4, A5: Transfer robot system B1, B2: Transfer robot 1: Support part 1a: Opening 11: Flange part 12: Insulation sheet 13: Parallel two wires (transmission part)
131, 132: Conductor wire 2: Swirling part 21: Guide body (moving part)
3a, 3b: 1st arm (moving part)
31: Insulation sheet 32: Power receiving coils 4a, 4b: Second arm (moving part)
5a, 5b: Hand (moving part)
5c, 5d: Hand holder (moving part)
51: Substrate 52: Detection unit 52a: Sensor 54: Communication unit (first communication unit)
56: Locking part (grip mechanism)
57: Contact portion (grip mechanism)
58: Motor (grip mechanism)
59: Switch 61: High-frequency power supply device 62: Resonant capacitor 71: Resonant capacitor 72: DC power supply circuit 73: Power load 8: Controller 81: Communication unit (second communication unit)
82: Motor power line 83: Motor encoder line 9: Conveyance chamber 91: Window (passing part)
92: Relay device 93: Communication cable W: Work Z1: Swirling shaft Z2a, Z2b: Rotating shaft Z3a, Z3b: Rotating shaft Z4a, Z4b: Rotating shaft

Claims (6)

Support part and
A swivel portion provided so as to be swivel with respect to the support portion,
A moving portion that has a hand for mounting a work, is supported by the turning portion, and moves the hand on a predetermined path, and a moving portion.
The first communication unit, which is arranged in the mobile unit and performs wireless communication,
With a transfer robot,
A transfer chamber that covers at least the moving part and keeps the inside in a vacuum state,
A controller arranged outside the transfer chamber, having a second communication unit that controls the transfer robot and communicates with the first communication unit, and a controller.
High frequency power supply and
Is equipped with
The transfer chamber is provided with a passage portion through which radio waves for communication can pass .
The support unit includes a power transmission unit that generates a magnetic field by flowing an alternating current supplied from the high-frequency power supply device.
The moving unit further has a power receiving coil that is magnetically coupled to the power transmission unit.
The power received by the power receiving coil is supplied to the first communication unit.
The power transmission unit is two parallel conductor wires extending around the swivel portion over the entire circumference of the swivel portion in the circumferential direction.
A transfer robot system characterized by this. A relay device which is arranged outside the transfer chamber and in the vicinity of the passing portion and relays communication between the first communication unit and the second communication unit is further provided.
The transfer robot system according to claim 1. The relay device and the second communication unit perform wireless communication.
The transfer robot system according to claim 2. The hand is provided with a sensor that detects the presence or absence of the mounted work.
The first communication unit transmits the detection result detected by the sensor.
The transfer robot system according to any one of claims 1 to 3. The hand includes a gripping mechanism for gripping the work based on a signal received by the first communication unit.
The transfer robot system according to any one of claims 1 to 4. The moving part
It also has multiple arms
The hand is moved by rotating the plurality of arms in conjunction with each other.
The transfer robot system according to any one of claims 1 to 5 .

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