JP6805904B2 - Measuring equipment, measuring methods and robots - Google Patents

Description

The present invention relates to a measuring device, a measuring method and a robot.

When performing operations such as picking and automatic assembly of loosely stacked parts using a robot, it is possible to improve control performance by using a robot arm in combination with a measuring device capable of acquiring three-dimensional information.

As a measuring device that acquires such three-dimensional information, the projection unit switches the pattern light according to the distance to the measurement target and images the measurement target with the imaging unit while projecting the light, and the measurement target is imaged with high accuracy in the vicinity and the distance. A technique for acquiring dimensional information is known (for example, Patent Document 1).

However, the prior art presupposes that the robot arm and the measuring device are separate bodies. When a measuring device is attached to the robot arm, the measuring device also moves at the same time, so it is necessary to simultaneously image the vicinity and the distance. However, in the prior art, it was not possible to image near and far at the same time. Further, since the measurable area is limited by the focal length adjustment function of the imaging unit or the depth of field, it is difficult to increase the measurable area.

The present invention has been made in view of the above, and in a measuring device capable of acquiring three-dimensional information in a predetermined direction, it is possible to simultaneously acquire three-dimensional information in the vicinity and a distance, and a large measurable area is set. The purpose is to make it possible to do.

In order to solve the above-mentioned problems and achieve the object, the present invention is a measuring device that measures three-dimensional information in a predetermined direction, and images a region of a first distance from the measuring device to obtain a first captured image. The output first imaging unit, the second imaging unit that captures a second distance region different from the first distance from the measuring device and outputs the second captured image, the first distance region, and the second distance. A projection unit capable of light-scanning parallel light to a region and projecting pattern light, an arithmetic processing unit that calculates three-dimensional information in a predetermined direction based on at least one image of a first captured image and a second captured image, and a processing unit. A control unit for controlling the first imaging unit, the second imaging unit, and the projection unit is provided, and the control unit controls the first imaging unit and the second imaging unit in synchronization with each other.

According to the present invention, in a measuring device capable of acquiring three-dimensional information in a predetermined direction, it is possible to simultaneously acquire near and far three-dimensional information, and it is possible to set a large measurable area. Play.

FIG. 1 is a diagram showing a configuration of an example of a measuring device according to the first embodiment. FIG. 2 is a diagram showing a configuration of an example of a projection unit applicable to the first embodiment. FIG. 3 is a diagram for explaining the operation of the deflection element applicable to the first embodiment. FIG. 4 is a functional block diagram of an example for explaining the function of the measuring device according to the first embodiment. FIG. 5 is a block diagram showing a hardware configuration of an example of a processing / control unit in a measuring device applicable to the first embodiment. FIG. 6 is a diagram showing an example of a projection pattern used in the phase shift method applicable to the first embodiment. FIG. 7 is a diagram for explaining a projection pattern used in the optical cutting method applicable to the first embodiment. FIG. 8 is a diagram showing an example of a projection pattern used in the random dot method applicable to the first embodiment. FIG. 9 is a flowchart of an example showing the measurement process according to the first embodiment. FIG. 10 is a diagram schematically showing a robot arm according to the second embodiment. FIG. 11 is a block diagram schematically showing a configuration of an example of a robot arm according to a second embodiment. FIG. 12 is a flowchart showing an example of control of the robot arm according to the second embodiment. FIG. 13 is a diagram for explaining the operation of the robot arm according to the modified example of the second embodiment.

The measuring device, the measuring method, and the embodiment of the robot will be described in detail with reference to the accompanying drawings.

(First Embodiment)
FIG. 1 shows a configuration of an example of a measuring device for measuring a three-dimensional shape according to the first embodiment. In FIG. 1, the measuring device 1 includes a processing / control unit 10 and a projection / imaging unit 20. The processing / control unit 10 includes an arithmetic processing unit 11 and a control unit 12. The projection / imaging unit 20 includes a camera 21a which is a first imaging unit, a camera 21b which is a second imaging unit, and a projection unit 30.

The projection unit 30 includes a light source that emits laser light and an optical system that derives the laser light emitted from the light source in a predetermined direction. The projection unit 30 deflects the laser beam in each of the two axes to perform optical scanning under the control of the projection control unit 12, and projects a two-dimensional pattern onto the measurement target. The light source included in the projection unit 30 is not limited to the light source that emits the laser beam. That is, any light source capable of emitting parallel light can be applied as a light source of the projection unit 30.

The camera 21a, which is the first image pickup unit, includes the lens 22a having the first focal length and the image pickup element 23a, and the incident light is irradiated to the image pickup element 23a via the lens 22a. The camera 21a converts an electric signal obtained by converting the light emitted by the image sensor 23a into an image signal and outputs the signal. Similarly, the camera 21b includes a lens 22b having a second focal length longer than the first focal length and an image sensor 23b, and converts the incident light into an image signal and outputs it. As the image pickup devices 23a and 23b, general image pickup elements such as a CCD (Charge Coupled Device) and a CMOS (Complementary Metal Oxide Semiconductor) image sensor can be used. Further, the cameras 21a and 21b can have a common configuration except for the focal lengths (lenses 22a and 22b).

The position and angle of the camera 21b, which is the second imaging unit, are fixed so as to image the first measurement region 40 centered on the projection center 300, which is the center of the two-dimensional pattern projected by the projection unit 30. .. On the other hand, the camera 21a is positioned and positioned so as to image the second measurement area 41, which is centered on the projection center 300 and is farther than the first measurement area 40 when viewed from the projection unit 30. The angle is fixed. In other words, the second measurement area 41 is an area in which a two-dimensional pattern is projected from the projection unit 30 via the first measurement area 40.

The cameras 21a and 21b perform imaging under the control of, for example, the control unit 12. The image signal (first captured image) output from the camera 21a and the image signal (second captured image) output from the camera 21b are supplied to the arithmetic processing unit 11, respectively. The arithmetic processing unit 11 calculates the three-dimensional coordinates based on the supplied image signal and acquires the three-dimensional shape. The calculation of the three-dimensional coordinates will be described later.

The arithmetic processing unit 11 outputs the three-dimensional shape information indicating the calculated three-dimensional shape to the outside of the measuring device 1 and supplies it to the control unit 12.

The control unit 12 can switch the pattern light (for example, two-dimensional pattern light) projected by the projection unit 30 according to the signal (for example, three-dimensional shape information) supplied from the arithmetic processing unit 11. Further, the control unit 12 performs image pickup control in synchronization with the camera 21a and the camera 21b. That is, the camera 21a and the camera 21b are controlled so that they can take images at substantially the same time. Approximately simultaneous means, for example, within the exposure time of one frame of the camera.

As described above, the measuring device 1 has a configuration capable of executing three-dimensional measurement for each of the cameras 21a and 21b based on the image signal.

FIG. 2 shows the configuration of an example of the projection unit 30 applicable to the first embodiment. In FIG. 2, the projection unit 30 includes a light source 31 that emits laser light 33, for example, by a laser diode, and a deflection element 32 that deflects and reflects the irradiated light. The laser beam 33 emitted from the light source 31 is applied to the fixed mirror 36 via, for example, the lens 34 and the aperture 35. The reflected light reflected by the laser beam 33 on the fixed mirror 36 is applied to the deflection center of the deflection element 32.

The deflection element 32 deflects the irradiated laser beam 33 in two axial directions (indicated by an arrow M in the figure) to form a two-dimensional projection pattern 60. The projection pattern 60 is irradiated and projected on a region including, for example, the target 50.

The deflection element 32 will be described more specifically. For example, as shown in FIG. 3, the deflection element 32 deflects the irradiated laser beam 33 in the line direction (X-axis direction), and further deflects the irradiated laser light 33 in the Y-axis direction, that is, in line order. Such optical scanning with parallel light is called a raster scan method. As a result, a certain region on the two-dimensional surface is scanned by the laser beam 33, and the projection pattern 60 is formed. At this time, for example, by controlling the lighting and extinguishing (on / off) of the light source 31, a desired projection pattern 60 can be projected onto the target.

As the deflection element 32, for example, a MEMS (Micro Electro Mechanical Systems) optical scanner can be used. The MEMS optical scanner forms a structure including a movable plate whose surface is in a mirror state, a beam whose movable plate can be tilted in a biaxial direction, and a support portion for supporting the beam by MEMS technology. By driving the movable plate by electromagnetic drive or electrostatic drive, the MEMS optical scanner can deflect the light irradiated to the movable plate in each direction of the two axes, reflect the light, and emit the light. By forming the deflection element 32 using MEMS technology, the projection unit 30 can be miniaturized. For example, when the measuring device 1 is mounted on a robot arm or the like and used, the payload of the robot arm can be reduced. It is possible to suppress the restriction on.

The laser light 33 emitted from the projection unit 30 can obtain sufficient resolution in each of the first measurement area 40 and the second measurement area 41 due to the straightness of the laser light 33. Therefore, the projection unit 30 that performs scanning using the laser beam 33 in this way does not need to adjust the focus in the cameras 21a and 21b. Therefore, by light-scanning the parallel light and projecting the pattern light, it is possible to project the pattern light suitable for the near and far directions at the same time without adjusting the focus.

FIG. 4 is a functional block diagram of an example for explaining the function of the measuring device 1 according to the first embodiment. In FIG. 4, the same reference numerals are given to the portions common to those in FIGS. 1 and 2 described above, and detailed description thereof will be omitted.

The arithmetic processing unit 11 analyzes the image signals output from the cameras 21a and 21b. The arithmetic processing unit 11 performs arithmetic processing using the analysis result of the image signal and the calibration information of each of the cameras 21a and 21b to restore the three-dimensional information, thereby executing the target three-dimensional measurement. The arithmetic processing unit 11 supplies the restored three-dimensional information to the projection control unit 12.

The control unit 12 includes a projection control unit 120, a pattern storage unit 121, a light source drive unit 122, a deflection element drive unit 123, and an image pickup control unit 124. The deflection element driving unit 123 drives the deflection element 32 under the control of the projection control unit 120. The projection control unit 120 controls the deflection element drive unit 123 so that the laser beam 33 irradiated to the deflection center of the deflection element 32 scans the target in line sequence (see FIG. 3). The image pickup control unit 124 controls the image pickup timing and the exposure amount of the camera 21a and the camera 21b. Further, the image pickup control unit 124 outputs an image pickup command signal to the camera 21a and the camera 21b substantially simultaneously so that the camera 21a and the camera 21b can perform synchronous image pickup.

The light source driving unit 122 controls turning on and off of the light source 31 according to the control of the projection control unit 120. The pattern storage unit 121, for example, displays a projection pattern 60 for projecting a laser beam 33 emitted from a light source 31 and deflected by a deflection element 32, which is stored in advance in a non-volatile storage medium included in the measuring device 1. The pattern information to be formed is read out according to the instruction from the projection control unit 120 and passed to the projection control unit 120. The projection control unit 120 controls the light source driving unit 122 based on the pattern information passed from the pattern storage unit 121.

The projection control unit 120 instructs the pattern storage unit 121 to read the pattern information based on the restored three-dimensional information supplied from the arithmetic processing unit 11. The projection control unit 120 controls the light source driving unit 122 according to the pattern information read by the pattern storage unit 121. Further, the projection control unit 120 instructs the calculation processing unit 11 on the calculation method according to the read pattern information.

In FIG. 4, the arithmetic processing unit 11, the projection control unit 120, and the image pickup control unit 124 can be realized by a measurement program that operates on a CPU (Central Processing Unit). Not limited to this, the arithmetic processing unit 11, the projection control unit 120, and the image pickup control unit 124 may be configured by a hardware circuit that operates in cooperation with each other.

FIG. 5 shows a hardware configuration of an example of the processing / control unit 10 in the measuring device 1 applicable to the first embodiment. In FIG. 5, the processing / control unit 10 includes a CPU 100, a ROM (Read Only Memory) 101, a RAM (Random Access Memory) 102, a storage 103, control I / Fs (interfaces) 104 and 105, and data I. The / F106 and the communication I / F107 are included, and each of these parts is communicably connected to each other by the bus 110.

The storage 103 is a storage medium that stores data non-volatilely, and a hard disk drive or a flash memory can be applied. The storage 103 stores programs and data for operating the CPU 100. Further, the storage 103 stores a plurality of pattern information in advance. The pattern storage unit 121 reads the pattern information designated by the projection control unit 120 from the storage 103. The ROM 101 may be a rewritable ROM, the function of the storage 103 may be realized by the ROM 101, and the storage 103 may be omitted.

The CPU 100 uses the RAM 102 as a work memory according to, for example, a program stored in advance in the ROM 101 or the storage 103, and controls the entire operation of the processing / control unit 10. The control I / F 104 and 105 are interfaces to the drive circuit for driving the light source 31 and the polarizing element 32, respectively.

The data I / F 106 transmits / receives data to / from an external device. The communication I / F 107 controls communication with respect to the communication network. By communicating between the outside of the measuring device 1 and the projection control unit 120 via the data I / F 106 or the communication I / F 107, the operation of the measuring device 1 can be controlled from the outside. Depending on the usage environment of the measuring device 1, one of the data I / F 106 and the communication I / F 107 may be omitted.
The measurement program executed by the measuring device 1 according to the first embodiment is stored in advance in the storage 103, ROM 101, or the like and provided. Not limited to this, the measurement program executed by the measurement device 1 according to the first embodiment is a file in an installable format or an executable format, and is a CD (Compact Disk), a flexible disk (FD), or a DVD (Digital). It may be configured to be recorded and provided on a computer-readable recording medium such as Versatile Disk).

Further, the measurement program executed by the measurement device 1 according to the first embodiment may be stored on a computer connected to a network such as the Internet and provided by downloading via the network. .. Further, the measurement program executed by the measuring device 1 according to the first embodiment may be provided or distributed via a network such as the Internet.

The measurement program executed by the measurement device 1 according to the first embodiment has a modular configuration including the above-mentioned arithmetic processing unit 11, the projection control unit 120, and the image pickup control unit 124. As actual hardware, when the CPU 100 reads a measurement program from the ROM 101 or the storage 103 and executes it, each of the above-described units is loaded onto a main storage device such as a RAM 102, and the arithmetic processing unit 11 and the projection control unit 120, The image pickup control unit 124 is generated on the main storage device.

(About 3D measurement applicable to the first embodiment)
Next, the three-dimensional measurement applicable to the first embodiment will be described. Several methods are known for performing three-dimensional measurement for acquiring the shape and posture of an object as three-dimensional information by observing the light emitted to the object. In the measuring device 1 according to the first embodiment, as a method of performing three-dimensional measurement, (1) measurement using a phase shift method, (2) measurement using an optical cutting method, and (3) random dots Three methods, measurement using the method, are adopted. As for the above-mentioned three methods, for example, known methods described in Non-Patent Document 1 and Non-Patent Document 2 can be applied.

The measurement using the phase shift method of (1) will be schematically described. In the phase shift method, as described in Non-Patent Document 1, a plurality of projection patterns 60 ₁₀ , 60 ₁₁ , 60 ₁₂ and 60 ₁₃ which are phase shift patterns having different phases as exemplified in FIG. 6A. The three-dimensional shape and orientation are restored by phase analysis using. At this time, a spatial coding method using a plurality of projection patterns 60 ₂₀ , 60 ₂₁ , 60 ₂₂ and 60 ₂₃ , which are different gray code patterns exemplified in FIG. 6B, is used in combination to perform these spatial coding. By performing phase connection based on the results of the method and the phase shift method, it is possible to restore the three-dimensional shape and orientation with high accuracy.

As described above, in the measurement using the phase shift method of (1), it is necessary to take an image for each of a plurality of projection patterns 60 _{10 to} 60 ₁₃ and 60 _{20 to} 60 ₂₃ .

The measurement using the optical cutting method of (2) will be schematically described. In the light cutting method, as described in Non-Patent Document 2, a line light source irradiates a measurement target 50 with a emission line, and the measurement target 50 irradiated with the emission line is imaged to obtain a emission line image. For example, as illustrated in FIG. 7, the emission line 33b in the line direction can be formed by deflecting the laser beam 33 by the deflection element 32 and scanning in the line direction. Based on this emission line image, a three-dimensional shape for one line of the measurement target 50 is generated. As shown in the projection pattern 60 ₃ of FIG. 7, by performing the scanning for the plurality of lines relative to the measurement target 50, can generate an overall three-dimensional shape of the measurement target 50. The light cutting method using such a light cutting pattern is suitable for use when the measurement target 50 has gloss.

The measurement using the random dot method of (3) will be schematically described. Figure 8 shows an example of a projection pattern 60 ₄ used in the random dot method. Projection pattern 60 ₄ is a random dot pattern in which each dot which the luminance value is expressed in binary is randomly arranged. The random dot method, obtaining a projection pattern 60 ₄ used for the projection, the corresponding position of the pattern projected pattern 60 ₄ was obtained from the reflected image reflected in the measurement object. For example, dividing the projection pattern 60 ₄ into a plurality of blocks, the pattern matching between the reflection image pattern by the projection patterns 60 ₄ and the reflected image by performing for each block, each of the reflected image pattern for the dots in the projection pattern 60 ₄ The position corresponding to the dot can be obtained.

The random dot method, for using the projection pattern 60 ₄ dots are arranged at random, it is possible to obtain corresponding points uniquely. That is, in the random dot method, it is possible to perform three-dimensional measurement by one imaging.

(Specific example of three-dimensional measurement according to the first embodiment)
Next, the three-dimensional measurement according to the first embodiment will be described more specifically. FIG. 9 is an example flowchart showing a three-dimensional measurement process according to the first embodiment.

In the following, it is assumed that the measuring device 1 has acquired the three-dimensional shape of the measurement target 50 in advance from, for example, CAD (Computer-Aided Design) data or actual measurement values. This three-dimensional shape includes the three-dimensional coordinates of the measurement target 50 and is stored in the storage 103, for example. Not limited to this, the measuring device 1 measures by acquiring the three-dimensional shape of the pedestal on which the measurement target 50 is placed in advance and obtaining the difference between the measured three-dimensional shape and the three-dimensional shape of the pedestal. The three-dimensional shape of the object may be obtained. Further, it is assumed that the cameras 21a and 21b used in the measuring device 1 have calibration information acquired in advance by known camera calibration and active camera calibration.

As shown in FIG. 9, the three-dimensional measurement process according to the first embodiment can be roughly divided into process A and process B. The process A is a process for recognizing the measurement target 50, and a higher speed process is desired. The process B is a process of detecting the three-dimensional shape of the measurement target in detail and calculating the three-dimensional coordinates.

Process A will be described. In process A, three-dimensional measurement is performed using the random dot method of (3) described above. In step S10, the measuring device 1 executes measurement in the first measuring area 40 and the second measuring area 41.

More specifically, in the measurement device 1, the projection control unit 120, the pattern storage unit 121, specifies the pattern information of the projection pattern 60 ₄ by random dot method, an instruction to read the designated pattern information To do. Projection control unit 120 controls the light source driver 122 and the deflection device driving section 123 in accordance with the pattern information of the projection pattern 60 ₄ pattern storage unit 121 is read out, the projection of the projection pattern 60 ₄ as illustrated in FIG. 8 Do. Further, the projection control unit 120 outputs the read pattern information to the arithmetic processing unit 11.

Projection control unit 120, in synchronization with the projection of the projection pattern 60 _4, the imaging control unit 124, the imaging of the first measurement area 40 by the camera 21a, the imaging of the second measurement area 41 by the camera 21b , Is output to execute the execution signal. The image pickup control unit 124 receives the execution signal output from the projection unit control unit 120 and outputs an image pickup command signal to the camera 21a (first image pickup unit) and the camera 21b (second image pickup unit) substantially simultaneously. The camera 21a and the camera 21b output the image signals (first captured image, second captured image) generated by imaging to the arithmetic processing unit 11. The arithmetic processing unit 11 performs pattern matching based on each image signal acquired from the camera 21a and the camera 21b and the pattern information passed from the projection control unit 120, and performs pattern matching on the first measurement area 40 and the second measurement area 41. The three-dimensional coordinates in the above are calculated to obtain the three-dimensional shape.

In the next step S11, in the measuring device 1, the arithmetic processing unit 11 determines whether or not the measurement target 50 exists in the first measurement area 40 based on the three-dimensional shape obtained in step S10. For example, the arithmetic processing unit 11 compares the three-dimensional shape of the measurement target 50 stored in the storage 103 with the three-dimensional shape calculated in step S10, and based on the comparison result, the measurement target in the first measurement area 40. It is determined whether or not 50 is recognized. When the arithmetic processing unit 11 determines that the measurement target 50 is recognized in the first measurement area 40 (step S11, “Yes”), the arithmetic processing unit 11 shifts the processing to step S20 in the processing B. On the other hand, when the arithmetic processing unit 11 determines that the measurement target 50 is not recognized in the first measurement area 40 (step S11, “none”), the arithmetic processing unit 11 shifts the processing to step S12.

In step S12, the arithmetic processing unit 11 determines whether or not the measurement target 50 is recognized in the second measurement area 41 based on the three-dimensional shape obtained in step S10 in the same manner as in step S11 described above. When the arithmetic processing unit 11 determines that the measurement target 50 is recognized in the second measurement area 41 (step S12, “Yes”), the arithmetic processing unit 11 shifts the processing to step S20 in the processing B.

On the other hand, when the arithmetic processing unit 11 determines that the measurement target 50 is not recognized in the second measurement area 41 (step S12, “none”), the arithmetic processing unit 11 shifts the processing to step S14. In this case, the measurement target 50 is not recognized in both the first measurement area 40 and the second measurement area 41. The measuring device 1 performs error processing in step S14, and a series of processing according to the flowchart of FIG. 9 is completed. As the error processing, for example, a process of returning an error to a higher-level device of the measuring device 1 can be considered.

Next, the process B will be described. In process B, more detailed measurement is performed on the three-dimensional shape measured and recognized in step S10 or step S12. Further, in the process B, of the first measurement area 40 and the second measurement area 41, the measurement area in which the measurement target 50 is recognized in the above-mentioned process A is designated as the designated measurement area. To measure.

In process B, in step S20, for example, the arithmetic processing unit 11 selects a measurement method. Here, the measurement method using the phase shift method of (1) described above (referred to as the first measurement method) and the measurement method using the optical cutting method of (2) (referred to as the second measurement method). , (3) The measurement method using the random dot method (referred to as the third measurement method) is selected. Further, in this example, in the process B, in the first to third measurement methods, the first measurement method has the highest priority and the third measurement method has the lowest priority. The priority can be arbitrarily set from the accuracy and speed of each measurement method.

When the arithmetic processing unit 11 selects the first measurement method in step S20, the arithmetic processing unit 11 transmits the selected measurement method to the projection control unit 120, and shifts the processing to step S21a. The processes of steps S21a to S23a are processes for performing three-dimensional measurement by the first measurement method, that is, the measurement method using the phase shift method. In step S21a, the projection control unit 120 controls to perform projection by the phase shift pattern and the Gray code pattern according to the measurement method transmitted from the arithmetic processing unit 11. Further, when the projection control unit 120 determines in step S11 that the measurement target 50 is in the first measurement area 40 with respect to the image pickup control unit 124, the projection control unit 120 takes an image of the first measurement area 40 with respect to the camera 21a. Outputs the execution command of. Further, when the projection control unit 120 determines in step S12 that the measurement target 50 is in the second measurement area 41, the projection control unit 120 outputs an imaging execution signal of the second measurement area 41 to the camera 21b. Upon receiving the execution signal of the projection unit control unit 120, the image pickup control unit 124 outputs an image pickup command signal to the camera 21a or the camera 21b.

More specifically, the projection control unit 120 specifies and designated each pattern information to be read out to the pattern storage unit 121 so as to sequentially execute the projection of the projection patterns 60 _{10 to} 60 ₁₃ by the phase shift pattern. Instruct to read each pattern information. The projection control unit 120 controls the light source drive unit 122 and the deflection element drive unit 123, respectively, according to the pattern information read by the pattern storage unit 121 according to the instruction. Further, the projection control unit 120 instructs the image pickup control unit 124 to perform imaging by the camera corresponding to the designated measurement area in synchronization with the projection of each projection pattern 60 _{10 to} 60 ₁₃ . The arithmetic processing unit 11 stores, for example, each image signal obtained by imaging in synchronization with the projection of each projection pattern 60 _{10 to} 60 _{13 in} the RAM 102, for example.

The projection control unit 120 further designates each pattern information to be read from the pattern storage unit 121 so as to sequentially execute the projection of the projection patterns 60 _{20 to} 60 ₂₃ by the gray code pattern, and displays each of the designated pattern information. Instruct to read. The projection control unit 120 controls the light source drive unit 122 and the deflection element drive unit 123, respectively, according to the pattern information read by the pattern storage unit 121 according to the instruction. Further, the projection control unit 120 instructs the image pickup control unit 124 to execute the image pickup by the camera corresponding to the designated measurement area in synchronization with the projection of each projection pattern 60 _{20 to} 60 ₂₃ . The arithmetic processing unit 11 stores, for example, each image signal obtained by imaging in synchronization with the projection of each projection pattern 60 _{20 to} 60 _{23 in} the RAM 102, for example.

When the projection patterns 60 _{10 to} 60 ₁₃ and 60 _{20 to} 60 ₂₃ of FIGS. 6 (a) and 6 (b) are used, the arithmetic processing unit 11 executes the imaging operation eight times in step S21a.

In the next step S22a, the arithmetic processing unit 11 executes the analysis process based on each image signal obtained by imaging in the step S21a. More specifically, the arithmetic processing unit 11 performs phase analysis based on each image signal obtained by imaging the projection patterns 60 _{10 to} 60 ₁₃ based on the phase shift pattern. Further, the arithmetic processing unit 11 performs Gray code analysis based on each image signal obtained by imaging the projection patterns 60 _{20 to} 60 ₂₃ based on the Gray code pattern. Further, the arithmetic processing unit 11 performs a phase connection calculation based on the result of the phase analysis and the result of the Gray code analysis.

In the next step S23a, the arithmetic processing unit 11 determines the corresponding position used in the triangulation acquired by the calculation result of the phase connection in step S22a, and each projection pattern 60 _{10 to} 60 ₁₃ passed from the projection control unit 120 in step S21a. , 60 _{20 to} 60 ₂₃ The three-dimensional coordinates of the measurement target are calculated by a known method using the pattern information of 60 _{20 to} 60 ₂₃ and the calibration information of the camera corresponding to the specified measurement area, and the three-dimensional shape is obtained.

When the arithmetic processing unit 11 obtains the three-dimensional shape in step S23a, the arithmetic processing unit 11 shifts the processing to step S24. In step S24, the arithmetic processing unit 11 determines whether or not the three-dimensional shape obtained in step S23a is possible. For example, the arithmetic processing unit 11 obtains the difference between the three-dimensional shape obtained in step S23a and the three-dimensional shape acquired in advance for the measurement target, and when the difference is less than the threshold value, a sufficient three-dimensional shape is obtained. Judged as When the arithmetic processing unit 11 determines that a sufficient three-dimensional shape has been obtained (step S24, “OK”), the processing shifts to step S25, and the shape information indicating the calculated three-dimensional shape is, for example, a measuring device. Output to the outside of 1.

On the other hand, when the arithmetic processing unit 11 determines that a sufficient three-dimensional shape has not been obtained in step S24 (step S24, “NG”), the processing returns to step S20. At this time, the arithmetic processing unit 11 selects the measurement method having the next highest priority after the measurement method used in the immediately preceding three-dimensional measurement. In the above example, since the first measurement method (measurement method using the phase shift method) is used in the immediately preceding three-dimensional measurement, the second measurement method having the next highest priority after the first measurement method. (In this example, the measurement method using the optical cutting method) is selected.

When the arithmetic processing unit 11 selects the second measurement method in step S20, the arithmetic processing unit 11 transmits the selected measurement method to the projection control unit 120, and shifts the processing to step S21b. The processes of steps S21b to S23b are processes for performing three-dimensional measurement by the second measurement method, that is, the measurement method using the optical cutting method. In step S21b, the projection control unit 120 controls the projection according to the optical cutting pattern according to the measurement method transmitted from the arithmetic processing unit 11, and corresponds to the measurement area designated by the image pickup control unit 124. Instruct the camera to take an image of the measurement area.

More specifically, the projection control unit 120 to perform a projection of the projection pattern 60 ₃ by light cleavage pattern, specify the pattern information reading the pattern storage unit 121, to read the specified pattern information Instruct. The projection control unit 120 controls the light source drive unit 122 and the deflection element drive unit 123, respectively, according to the pattern information read by the pattern storage unit 121 according to the instruction. The projection control unit 120, in synchronization with the projection of the projection pattern 60 _3, so as to perform imaging by the camera corresponding to the specified measurement region, and instructs the imaging control unit 124. Operation processing unit 11, an image signal of each bright line image obtained by imaging in synchronization with the projection of the projection pattern 60 ₃ is stored, for example, in RAM 102.

In the next step S22b, the arithmetic processing unit 11 detects the center of gravity of the luminance value based on the image signal of each emission line image acquired in step S21b. In the next step S 23 b, the operation processing unit 11, measured on the basis of the center of gravity detected at step S22b, the bright line image, and the pattern information of the projection pattern 60 _3, and calibration information of the camera corresponding to the specified measurement region The three-dimensional coordinates of the object 50 are calculated to obtain the three-dimensional shape.

When the arithmetic processing unit 11 obtains the three-dimensional shape in step S23b, the processing shifts to step S24, and the possibility of the obtained three-dimensional shape is determined as described above. When the arithmetic processing unit 11 determines that a sufficient three-dimensional shape has been obtained (step S24, “OK”), the processing shifts to step S25, and the shape information indicating the calculated three-dimensional shape is, for example, a measuring device. Output to the outside of 1.

On the other hand, when the arithmetic processing unit 11 determines that a sufficient three-dimensional shape cannot be obtained in step S24 (step S24, "NG"), the processing is returned to step S20, and the measurement method used in the immediately preceding three-dimensional measurement is performed. Select the measurement method with the next highest priority. In this case, since the second measurement method (measurement method using the optical cutting method) is used in the immediately preceding three-dimensional measurement, the third measurement method having the next highest priority after the second measurement method. (In this example, the measurement method using the random dot method) is selected.

When the arithmetic processing unit 11 selects the third measurement method in step S20, the arithmetic processing unit 11 transmits the selected measurement method to the projection control unit 120, and shifts the processing to step S21c. The processes of steps S21c to S23c are processes for performing three-dimensional measurement by a third measurement method, that is, a measurement method using a random dot method. In step S21c, the projection control unit 120 controls to perform projection by a random dot pattern according to the measurement method transmitted from the arithmetic processing unit 11, and corresponds to the measurement area designated by the image pickup control unit 124. Instruct the camera to take an image of the measurement area.

More specifically, the projection control unit 120 to perform a projection of the projection pattern 60 ₄ by random dot pattern, specify the pattern information reading the pattern storage unit 121, to read the specified pattern information Instruct. The projection control unit 120 passes the pattern information read by the pattern storage unit 121 according to the instruction to the arithmetic processing unit 11, and also controls the light source drive unit 122 and the deflection element drive unit 123 according to the pattern information. The projection control unit 120 to perform imaging by the camera corresponding to the measurement area designated in synchronism with the projection of the projection pattern 60 _4, instructs the imaging control unit 124. The operation processing unit 11 stores the image signal obtained by imaging in synchronization with the projection of the projection pattern 60 _4, for example, the RAM 102.

In the next step S22c, the arithmetic processing unit 11 performs pattern matching with the pattern information by the random dot pattern passed from the projection control unit 120 based on the image signal acquired in the step S21c. By this pattern matching, the arithmetic processing unit 11 obtains the corresponding position of each dot of the random dot pattern included in the image signal with respect to each dot included in the random dot pattern passed from the projection control unit 120. In the next step S23c, the arithmetic processing unit 11 calculates the three-dimensional coordinates of the measurement target based on the corresponding position obtained in the step S22c and the calibration information of the camera 21a, and obtains the three-dimensional shape.

When the arithmetic processing unit 11 obtains the three-dimensional shape in step S23c, the processing shifts to step S24, and the possibility of the obtained three-dimensional shape is determined as described above. When the arithmetic processing unit 11 determines that a sufficient three-dimensional shape has been obtained (step S24, “OK”), the processing is shifted to step S25, and the shape information indicating the obtained three-dimensional shape is, for example, the measuring device 1. Output to the outside of.

On the other hand, when the arithmetic processing unit 11 determines that a sufficient three-dimensional shape has not been obtained in step S24 (step S24, “NG”), the first measurement method, the second measurement method, and the third measurement method It means that the three-dimensional shape could not be calculated by using any of them. In this case, for example, the process can be shifted to step S14 to perform error processing, and a series of processing according to the flowchart of FIG. 9 can be completed.

As described above, the measuring device 1 according to the first embodiment recognizes the measuring target 50 by using a measuring method capable of calculating the three-dimensional shape by first imaging the vicinity and the distance of the measuring target 50. (Process A in the flowchart of FIG. 9). Further, the measuring device 1 needs to take images a plurality of times after the measurement target 50 is recognized by the process A, and measures the measurement in the process A by using a measurement method capable of calculating the three-dimensional shape with higher accuracy. The three-dimensional measurement of the measurement target is executed for the area determined to have the target (process B in the flowchart of FIG. 9). Further, in the process B, a plurality of measurement methods can be sequentially executed. The process of connecting the three-dimensional information obtained from the first captured image and the three-dimensional information obtained from the second captured image may be performed. Further, the processing method of the processing B may be selected based on the three-dimensional information obtained in the processing A. For example, if the process A reveals that the size of the object is small, a method with higher accuracy may be selected, and if the size of the object is found to be large, a method with higher speed may be selected.

According to the measuring device 1 according to the first embodiment, it is possible to image near and far at substantially the same time. Further, since the focal length and the measurement area of the camera 21a and the camera 21b can be freely set, the measurable near and far distances can be freely set.

With the prior art, it was not possible to image near and far at the same time. This is because the projection unit was not an optical scanning type but an optical projection type, so it was necessary to change the focal length and pattern light according to the irradiation distance, and it was possible to project suitable pattern light to near and far at the same time. This is because it was necessary to switch between near-field and distant imaging. Further, since there is only one imaging unit (stereo camera), it is not possible to properly image the near and far areas at the same time, and further, appropriate imaging of the near and far areas can be performed by the focal length adjustment function or the field of view. Since it depends on the depth, it is difficult to increase the distance (measurable area width) between the vicinity and the distance.

The necessity of imaging near and far images at substantially the same time will be described. For example, when a measuring device is attached to an inexpensive robot arm, the movement of the robot arm is difficult to predict because the behavior accuracy of the motor of the robot arm is low. Therefore, it is necessary to fine-tune the behavior by measuring with a measuring device while moving the robot arm. However, when an image is taken between the vicinity and the distance while moving the robot arm, if there is a difference in the imaging time, the robot arm is moving during that time, so that the distance between the vicinity and the distance cannot be kept constant. Therefore, when the robot arm is brought closer to an object existing in the distance by the distance measurement and the robot arm is switched to the proximity measurement, an error occurs in the distance to the object. In addition, it becomes difficult to connect the three-dimensional information obtained in the vicinity and the three-dimensional information obtained in the distance.

If the robot arm is stopped every time the image is taken, smooth behavior cannot be achieved and the behavior accuracy is further lowered. Further, it is difficult to grasp the behavior of the robot arm by the rotation speed of the motor or the like when the accuracy of the motor itself is low.

Therefore, according to the measuring device 1 according to the first embodiment, an optical scanning type projection unit that lightly scans parallel light and a plurality of imaging units of a first imaging unit and a second imaging unit having different measurement regions are provided. It is used to enable imaging in synchronization with near and far. As a result, it is possible to image the vicinity and the distance at substantially the same time, and it is easy to increase the width of the measurable area.

Further, by switching between the process A capable of acquiring three-dimensional information at high speed and the process B capable of acquiring three-dimensional information with higher accuracy, the high speed and accuracy can be improved.

Further, when an obstacle exists in the vicinity, it is possible to measure the vicinity and bring the robot arm closer to a distance while avoiding the obstacle.

In the process A in the flowchart of FIG. 9, it is also conceivable to perform the measurement by using the phase shift method in which the phase shift pattern is switched at high speed to speed up the process. In this case, it is necessary for the cameras 21a and 21b to perform high-speed imaging so as to follow the high-speed switching of the phase shift pattern. Higher speeding of imaging leads to a reduction in exposure time, and it becomes difficult to secure a sufficient S / N. It is also conceivable to increase the amount of light of the laser beam 33 emitted from the light source 31 in order to secure the S / N. However, when increasing the amount of laser light, there is a problem that safety must be taken into consideration and the cameras 21a and 21b become large and expensive, as compared with the method using the random dot method described above. It is disadvantageous.

(Second Embodiment)
Next, the second embodiment will be described. The second embodiment is an example in which the measuring device 1 according to the first embodiment is used in combination with a robot arm.

10 (a) and 10 (b) schematically show an example of a robot arm 70 applicable to the second embodiment. The robot arm 70 shown in FIGS. 10A and 10B includes a hand unit 71 for picking an object, and is equipped with the measuring device 1 according to the first embodiment. The robot arm 70 is provided with a plurality of bendable movable portions, and the position and orientation of the hand portion 71 can be freely moved and changed within the movable range of each movable portion according to control.

In this example, the measuring device 1 is mounted on the tip of the robot arm 70. Not limited to this, in the measuring device 1, the projection / imaging unit 20 may be mounted on the tip of the robot arm 70, and the processing / control unit 10 may be installed outside the robot arm 70, for example. Further, the measuring device 1 is provided so that the projection center 300 coincides with the direction in which the hand portion 71 faces, so that the picking target of the hand portion 71 can be measured as the measurement target 50. At this time, it is preferable that the projection unit 30 included in the projection / imaging unit 20 and the cameras 21a and 21b are fixed at positions where the measurement range is not obstructed by picking by the hand unit 71.

FIG. 10A shows an example in which the camera 21b is used to perform measurement on the second measurement area 41. The projection pattern 60a is projected onto the surface in the second measurement area 41 by the laser beam 33 emitted from the projection unit 30 of the measurement device 1. The measuring device 1 calculates the three-dimensional coordinates of the measurement target 50 by using the reflected light from the measurement target 50 of the projection pattern 60a, and obtains the three-dimensional shape. FIG. 10B shows an example in which the camera 21a is used to perform measurement on the first measurement area 40. The projection unit 30 projects the projection pattern 60b onto the surface in the first measurement area 40. Since the first measurement area 40 is closer to the second measurement area 41 from the projection unit 30, the projection pattern 60b is smaller than the projection pattern 60a.

As described above, in the second embodiment, the distance between the measuring device 1 and the measuring target 50 can be easily changed by mounting the measuring device 1 on the robot arm 70. Therefore, the measuring device 1 can easily switch the measurement area between the first measurement area 40 and the second measurement area.

FIG. 11 schematically shows a configuration of an example of the robot arm 70 according to the second embodiment. The robot arm 70 includes an arm drive unit 700 and a plurality of motors 701 ₁ , 701 ₂ , .... The motors 701 ₁ , 701 ₂ , ... Drive each movable part of the robot arm 70 including the hand part 71 under the control of the arm drive part 700.

The arm drive unit 700 drives the motors 701 ₁ , 701 ₂ , ... Based on the measurement result of the measuring device 1. Further, the arm drive unit 700 appropriately requests the measuring device 1 to measure the first measurement area 40 using the camera 21a and the second measuring area 41 using the camera 21b. That is, the arm drive unit 700 functions as an operation control unit that controls the operation of the robot arm 70 based on the measurement result of the measurement device 1.

Although it has been described here that the motors 701 ₁ , 701 ₂ , ... Are used as actuators for driving each movable portion of the robot arm 70, this is not limited to this example. Each movable part of the robot arm 70 may be driven by using an actuator of another type such as a hydraulic type or a pneumatic type.

FIG. 12 is a flowchart showing an example of control of the robot arm 70 according to the second embodiment. In step S30, as shown in FIG. 10A, the robot arm 70 positions the hand unit 71 according to preset initialization information so that the measurement target 50 is located in the second measurement area 41. To initialize.

In the next step S31, the robot arm 70 determines whether or not the measurement target 50 is detected at the initialization position. When the robot arm 70 determines that the measurement target 50 is not detected (step S31, “No”), the robot arm 70 returns the process to step S30. On the other hand, when the robot arm 70 determines that the measurement target 50 has been detected (step S31, “Yes”), the robot arm 70 shifts the process to step S32.

In step S31, for example, the robot arm 70 detects the measurement target 50 by using a predetermined sensor (optical sensor, contact sensor, or the like) for detecting the measurement target 50. Not limited to this, it may be determined whether or not the robot arm 70 has been detected according to a user instruction by the user who operates the robot arm 70. Further, the robot arm 70 may determine the detection of the measurement target 50 by measuring the second measurement area 41 using the measurement device 1.

In step S32, the measuring device 1 performs the process A in the flowchart of FIG. 9, that is, the three-dimensional measurement using the random dot method, for example, in response to the request of the robot arm 70. In the next step S33, the measuring device 1 estimates the distance between the hand unit 71 and the measurement target 50 based on the result of the three-dimensional measurement in step S32. The measuring device 1 may further recognize the approximate position and orientation of the measurement target 50 based on the result of the three-dimensional measurement.

In the next step S34, the robot arm 70 arranges the hand unit 71 so that the measurement target 50 is located in the first measurement area 40 based on the distance to the measurement target 50 estimated by the measurement device 1 in step S33. Move to. At this time, the robot arm 70 may move the hand unit 71 by further using the approximate position of the measurement target 50 recognized by the measurement device 1. Further, the robot arm 70 may request the measuring device 1 to perform three-dimensional measurement a plurality of times for the first measurement area 40, and finely adjust the position of the hand unit 71 based on the result of each three-dimensional measurement. Good.

In the next step S35, the measuring device 1 performs a phase shift according to the phase shift pattern and the Gray code pattern according to the processes of steps S21a to S23a of the process B in the flowchart of FIG. 9, for example, in response to the request of the robot arm 70. Perform three-dimensional measurement using the method. In the next step S36, the measuring device 1 estimates the position and orientation of the measurement target 50 based on the three-dimensional shape measured in step S35. Here, since the three-dimensional measurement measured by the phase shift method is used, the position and orientation of the measurement target 50 are estimated with higher accuracy than when the random dot method according to steps S32 and S33 is used. Is possible.

Also in the second embodiment, when a sufficient three-dimensional shape cannot be obtained by the measurement method using the phase shift method, as described above, the second measurement method, the third, is performed according to the priority of the measurement method. Measurement methods can be executed sequentially.

The robot arm 70 picks the measurement target 50 by controlling the position and orientation of the hand unit 71 based on the position and posture of the measurement target 50 estimated in step S36.

Not limited to this, based on the three-dimensional shape obtained by the three-dimensional measurement in step S35 and the known three-dimensional shape of the measurement target 50, inspections such as defective product discrimination and foreign matter discrimination for the measured measurement target 50 are executed. It is also possible to do.

As described above, the robot arm 70 according to the second embodiment performs measurement by the measuring device 1 using the random dot method capable of three-dimensional measurement in one imaging process, and determines the distance to the measurement target 50. Estimate and move the hand unit 71. After the movement of the hand unit 71, the position and orientation of the measurement target 50 are estimated by measurement using the phase shift method, which requires a plurality of imaging processes and enables more accurate three-dimensional measurement. Therefore, according to the second embodiment, the picking operation by the robot arm 70 can be performed at higher speed and with higher accuracy without using an expensive and large camera capable of high-speed imaging.

For example, in each of the above-described embodiments, the processing is switched between the three-dimensional information obtained from the first captured image and the three-dimensional information obtained from the second captured image depending on the presence or absence of an object. When the imaging unit and the second imaging unit have different focal lengths but have a common measurement area, and when an object is present in both the first image and the second image, the object is focused on the object. The configuration may be such that priority is given to the three-dimensional information having the shorter distance.

(Modified example of the second embodiment)
Next, a modified example of the second embodiment will be described. FIG. 13 is a diagram for explaining the operation of the robot arm according to the modified example of the second embodiment. In FIG. 13, the same reference numerals are given to the parts common to those in FIG. 10 described above, and detailed description thereof will be omitted. Further, in the modified example of the second embodiment, the configuration of the measuring device 1 described in the first embodiment can be applied as it is.

As the target object, consider a first target object 51 having an opening 52 and a second target object 53 having a connection portion connectable to the opening 52. The measuring device 1 includes a first imaging unit (for example, a camera 21a) that captures a nearby measurement area (corresponding to the first measurement area 40) and a distant measurement area for the first target object 51 and the second target object 53. A second target object 51 and a second target object 53 can be simultaneously imaged by a second imaging unit (for example, a camera 21b) that images (corresponding to a second measurement area 41) and can be processed at high speed. Check for a match. Here, when the combination of the first target object 51 and the second target object 53 is a predetermined combination, it is determined that the first target object 51 and the second target object 53 match. To do.

When it is determined that the first target object 51 and the second target object 53 match, the picking operation by the robot arm 70 is started. The robot arm 70 brings the hand unit 71 closer to the target object 53 while simultaneously imaging a distant place and a near area by the measuring device 1 and continuing the process A. When the second target object 53 is included in the neighborhood measurement region, the robot arm 70 switches the imaging to the imaging of only the first imaging unit, and switches the process to the process B in the flowchart of FIG. Then, the robot arm 70 brings the hand unit 71 closer to the second target object 53 with high accuracy and picks the second target object 53.

After picking the second target object 53, the robot arm 70 switches the imaging to the imaging by the first imaging unit and the second imaging unit, and switches the process to the process A in the flowchart of FIG. Then, the robot arm 70 brings the hand portion 71 closer to the opening 52 of the first target object 51, and when the first target object 51 is included in the proximity measurement region, the robot arm 70 performs imaging only on the first imaging unit. The image is switched to, and the process is switched to process B in the flowchart of FIG. Then, the robot arm 70 controls the operation of the hand portion 71 so as to connect the connecting portion of the second target object 53 to the opening 52.

As a result, in the modified example of the second embodiment, the two objects placed in the vicinity and the distance are quickly captured at the same time, and the effect of enabling the two objects to be connected with high accuracy is obtained.

It should be noted that each of the above-described embodiments is an example of a preferred embodiment of the present invention, but is not limited thereto, and can be implemented by various modifications without departing from the gist of the present invention.

1 3D measuring device 10 Processing / control unit 11 Arithmetic processing unit 12 Projection control unit 20 Projection / imaging unit 21a, 21b Camera 22a, 22b Lens 23a, 23b Image sensor 30 Projection unit 31 Light source 32 Deflection element 33 Laser light 40 First Measurement area 41 Second measurement area 50 Measurement target 60, 60 ₁₀ , 60 ₁₁ , 60 ₁₂ , 60 ₁₃ , 60 ₂₀ , 60 ₂₁ , 60 ₂₂ , 60 ₂₃ , 60 ₃ , 60 ₄ Projection pattern 70 Robot arm 71 Hand Unit 120 Control unit 121 Pattern storage unit

Japanese Unexamined Patent Publication No. 2016-1699989

Improving the accuracy of active stereo by the phase shift method using the response function of the projector / camera system "Image Recognition and Understanding Symposium (MIRU2009)" July 2009 "Appearance inspection technique using three-dimensional image by optical cutting method" RICOH TECHNICAL REPORT, No. 39, 2013, published January 28, 2014

Claims (10)

A measuring device that measures three-dimensional information in a predetermined direction.
A first imaging unit that images a region at a first distance from the measuring device and outputs a first captured image.
From the measuring device, a second imaging unit that images a region of a second distance different from the first distance and outputs a second captured image.
A projection unit capable of light-scanning parallel light to the first distance region and the second distance region to project pattern light, and a projection unit.
An arithmetic processing unit that calculates three-dimensional information in a predetermined direction based on at least one image of the first captured image and the second captured image.
A control unit that controls the first imaging unit, the second imaging unit, and the projection unit.
With
The control unit is a measuring device capable of synchronizing the first imaging unit and the second imaging unit for imaging control. The control unit
An imaging command signal is output to at least one of the first imaging unit and the second imaging unit, and within the exposure time of one frame of one of the first imaging unit and the second imaging unit, the other The measuring device according to claim 1, which outputs an imaging command signal to an imaging unit. The control unit
Synchronous imaging in which the first imaging unit and the second imaging unit are synchronizedly controlled for imaging based on the three-dimensional information, and independent imaging by either the first imaging unit or the second imaging unit. The measuring device according to claim 1 or 2, which switches between. The arithmetic processing unit
The first calculation process for calculating three-dimensional information from the synchronously captured first captured image and the second captured image, and the independently captured captured image of the first captured image or the second captured image. The measuring device according to claim 3, which switches between a second arithmetic process for calculating three-dimensional information from the image and the second arithmetic process. The first arithmetic processing is an arithmetic processing for calculating three-dimensional information from one synchronously imaged first image and one second image.
The measuring device according to claim 4, wherein the second arithmetic processing is an arithmetic processing for calculating three-dimensional information from a plurality of the first captured images and a plurality of the second captured images. In the second arithmetic processing, the arithmetic processing to be used can be selected from a plurality of arithmetic processes having different priorities.
The arithmetic processing unit
Claim 4 or claim that starts the calculation based on the preset priority and switches the calculation method to the next higher priority calculation process when the three-dimensional information cannot be obtained by the calculation process used. Item 5. The measuring device according to item 5. The first arithmetic processing is an arithmetic processing by the random dot method.
Claim 4 or claim, wherein the second arithmetic processing is an arithmetic processing in which any one of the random dot method, the optical cutting method, and the phase shift method is selected based on the three-dimensional information acquired in the first arithmetic processing. Item 5. The measuring device according to item 5. The measuring device according to any one of claims 1 to 7, wherein the control unit changes the projected pattern light based on the three-dimensional information calculated by the arithmetic processing unit. The measuring device according to any one of claims 1 to 8.
With the robot arm
A robot including a motion control unit that controls the motion of the robot arm based on the three-dimensional coordinates acquired by the measuring device. A measurement method used in a measuring device that measures three-dimensional information in a predetermined direction.
A projection step of light-scanning parallel light into the first distance region and the second distance region to project pattern light,
A first imaging step of imaging a region of a first distance from the measuring device and outputting a first captured image,
A second imaging step of imaging a region of a second distance different from the first distance from the measuring device and outputting a second captured image.
An arithmetic processing step for calculating three-dimensional information in the predetermined direction based on at least one image of the first captured image and the second captured image, and
With
The second imaging step is a measurement method performed substantially at the same time as the first imaging step.