JP6796508B2 - Load detection sensor with tuning fork oscillator - Google Patents
Load detection sensor with tuning fork oscillator Download PDFInfo
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- JP6796508B2 JP6796508B2 JP2017023682A JP2017023682A JP6796508B2 JP 6796508 B2 JP6796508 B2 JP 6796508B2 JP 2017023682 A JP2017023682 A JP 2017023682A JP 2017023682 A JP2017023682 A JP 2017023682A JP 6796508 B2 JP6796508 B2 JP 6796508B2
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- 238000001514 detection method Methods 0.000 title claims description 63
- 230000008878 coupling Effects 0.000 claims description 18
- 238000010168 coupling process Methods 0.000 claims description 18
- 238000005859 coupling reaction Methods 0.000 claims description 18
- 239000000463 material Substances 0.000 claims description 2
- 238000012360 testing method Methods 0.000 description 8
- 238000006073 displacement reaction Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 230000005284 excitation Effects 0.000 description 2
- 238000007373 indentation Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 239000011505 plaster Substances 0.000 description 1
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Description
本発明は、音叉振動子を備える荷重検出センサーに関し、形状のコンパクト化を可能にしたものである。 INDUSTRIAL APPLICABILITY The present invention makes it possible to make the shape of a load detection sensor including a tuning fork oscillator compact.
音叉振動子に引張り力又は圧縮荷重を加えると固有振動数が変化する。出願人は、この現象を利用した荷重検出センサーの開発を従来から進めている。
下記特許文献１では、音叉振動子と、偏心荷重の影響を排除するためのロバーバル機構とを同一金属部材で一体的に形成した荷重検出センサーを提案している。
このセンサーは、図９に示すように、平行する二枚の板状振動片１ａ、１ｂ、及び、それらの両端部同士を結合する二つの結合部２ａ、２ｂから成る音叉振動子１と、音叉振動子１の一端に力を作用する“てこ”１０と、てこ１０を支点１３で支え、且つ、音叉振動子１の他端を支持する基部１１と、荷重Ｆを受けて、てこ１０の力点１４に伝える可動部１６と、ロバーバル機構の構成部材である長辺部材２６及び二つの連結部材２４、２５とを備えており、それらが同一金属部材で一体的に形成されている。
ロバーバル機構は、長辺部材２６と、それに平行する基部１１の部分と、それらを連結する連結部材２４、２５とで構成され、それらによりロバーバル機構の平行四辺形が形成される。
When a tensile force or compressive load is applied to the tuning fork oscillator, the natural frequency changes. The applicant has been developing a load detection sensor utilizing this phenomenon.
Patent Document 1 below proposes a load detection sensor in which a tuning fork oscillator and a reverbal mechanism for eliminating the influence of an eccentric load are integrally formed of the same metal member.
As shown in FIG. 9, this sensor includes a tuning fork oscillator 1 composed of two parallel plate-shaped vibrating pieces 1a and 1b, and two connecting parts 2a and 2b for connecting both ends thereof, and a tuning fork. A "lever" 10 that exerts a force on one end of the vibrator 1, a base 11 that supports the lever 10 at a fulcrum 13 and supports the other end of the tuning fork oscillator 1, and a force point of the lever 10 that receives a load F. A movable portion 16 to be transmitted to 14, a long side member 26 which is a constituent member of the reverbal mechanism, and two connecting members 24 and 25 are provided, and they are integrally formed of the same metal member.
The reverbal mechanism is composed of a long side member 26, a portion of a base portion 11 parallel thereto, and connecting members 24 and 25 connecting them, whereby a parallelogram of the reverbal mechanism is formed.
音叉振動子１の板状振動片１ａ、１ｂには圧電素子４ａ、４ｂを取付け、一方の圧電素子４ａには、周波数を音叉振動子１の固有周波数に設定した励起用信号を加え、他方の圧電素子４ｂをピックアップ用として動作させる。
このセンサーの可動部１６に荷重Ｆが加わると、てこ１０により増幅された力が音叉振動子１の一端に作用する。そのため、圧電素子４ｂで検知される信号の周波数は、励起用信号の周波数からずれる。圧電素子４ｂで検知された信号の周波数に基づいて荷重Ｆが算出される。
このセンサーでは、可動部１６にＸ方向の分力を含む斜めの荷重Ｆ’が加わった場合でも、Ｘ方向の分力の影響がロバーバル機構の作用で音叉振動子１に及ばない。
Piezoelectric elements 4a and 4b are attached to the plate-shaped vibrating pieces 1a and 1b of the tuning fork oscillator 1, and an excitation signal whose frequency is set to the natural frequency of the tuning fork oscillator 1 is applied to one of the piezoelectric elements 4a. The piezoelectric element 4b is operated for pickup.
When a load F is applied to the movable portion 16 of this sensor, the force amplified by the lever 10 acts on one end of the tuning fork oscillator 1. Therefore, the frequency of the signal detected by the piezoelectric element 4b deviates from the frequency of the excitation signal. The load F is calculated based on the frequency of the signal detected by the piezoelectric element 4b.
In this sensor, even when an oblique load F'including a component force in the X direction is applied to the movable portion 16, the influence of the component force in the X direction does not reach the tuning fork oscillator 1 due to the action of the reverbal mechanism.
荷重検出センサーは、秤だけでなく、荷重を介して物理量を計測する各種の測定装置や試験装置に利用されている。キーボードのタッチ力の測定や、絆創膏の剥離力の試験、プルトップ缶の開栓力の測定、繊維の破断力試験、フィルムの張力試験など、多方面で荷重検出センサーを利用することができる。
こうした測定装置や試験装置での利用を拡げるためには、荷重検出センサーの形状のコンパクト化が求められる。片手で操作できる小型の測定器や、鉛筆を持つ要領で操作できるペンシル形状の測定器を実現するには、それに組み込む荷重検出センサーの小型化・細形化が欠かせない。
The load detection sensor is used not only for scales but also for various measuring devices and test devices that measure physical quantities via loads. Load detection sensors can be used in various fields such as keyboard touch force measurement, adhesive plaster peeling force test, pull-top can opening force measurement, fiber breaking force test, and film tension test.
In order to expand the use in such measuring devices and test devices, it is required to make the shape of the load detection sensor compact. In order to realize a small measuring instrument that can be operated with one hand and a pencil-shaped measuring instrument that can be operated as if holding a pencil, it is essential to reduce the size and size of the load detection sensor built into it.
本発明は、こうした事情を考慮して創案したものであり、音叉振動子を備え、小型化・細形化した形状を有する荷重検出センサーを提供することを目的としている。 The present invention has been devised in consideration of such circumstances, and an object of the present invention is to provide a load detection sensor provided with a tuning fork oscillator and having a miniaturized and slimmed shape.
本発明は、一つの素材から一体的に形成された音叉振動子及びロバーバル機構を備える荷重検出センサーであって、音叉振動子は、平行する二枚の板状振動片と、二枚の板状振動片の両端部同士を結合する二つの結合部と、を備え、ロバーバル機構は、荷重検出センサーの固定部から延びる固定部側延伸部の少なくとも一部と、荷重検出センサーの可動部から延びる可動部側延伸部の少なくとも一部とが、それらを連結する二つの連結部により平行四辺形を形成するように結合されて構成され、固定部側延伸部は、音叉振動子の結合部の一方を直接支持するために、可動部側延伸部の側に突出する固定部側突出部を備え、可動部側延伸部は、音叉振動子の結合部の他方を直接又はてこ部を介して支持するために、固定部側延伸部の側に突出する可動部側突出部を備え、結合部の一方が固定部側突出部に支持され、結合部の他方が可動部側突出部又はてこ部に支持された音叉振動子の中心線の方向が、固定部側延伸部及び可動部側延伸部と平行しており、荷重検出センサーの固定部に固定される部材の固定部固定位置、及び、荷重検出センサーの可動部に固定される部材の可動部固定位置が、音叉振動子の中心線の延長方向にあることを特徴とする。
この荷重検出センサーでは、固定部側延伸部（又は固定部側延伸部の延長線）と可動部側延伸部とが、音叉振動子を間に挟み、音叉振動子の中心線に平行しており、小型で細長い外形を有している。
The present invention is a load detection sensor including a tuning fork vibrator and a reverbal mechanism integrally formed from one material, and the tuning fork vibrator has two parallel plate-shaped vibrating pieces and two plate-shaped vibration pieces. The reverbal mechanism includes at least a part of the fixed portion side extension portion extending from the fixed portion of the load detection sensor and a movable portion extending from the movable portion of the load detection sensor, which comprises two connecting portions for connecting both ends of the vibrating piece. At least a part of the extension portion on the portion side is connected so as to form a parallel quadrilateral by two connecting portions connecting them, and the extension portion on the fixed portion side is formed by connecting one of the coupling portions of the tuning fork oscillator. For direct support, a fixed portion-side projecting portion is provided that projects toward the movable portion-side extension portion, and the movable portion-side extension portion supports the other of the coupling portion of the tuning fork oscillator directly or via a lever portion. Is provided with a movable portion-side projecting portion that projects to the fixed portion-side extension portion, one of the joint portions is supported by the fixed portion-side projecting portion, and the other of the joint portion is supported by the movable portion-side projecting portion or the lever. The direction of the center line of the tuning fork oscillator is parallel to the extension on the fixed part side and the extension on the movable part side, and the fixing position of the member fixed to the fixing part of the load detection sensor and the load detection sensor The movable portion fixing position of the member fixed to the movable portion of the tuning fork oscillator is in the extension direction of the center line of the tuning fork oscillator.
In this load detection sensor, the fixed portion side extension portion (or the extension line of the fixed portion side extension portion) and the movable portion side extension portion sandwich the tuning fork oscillator and are parallel to the center line of the tuning fork oscillator. It has a small and elongated outer shape.
また、本発明の荷重検出センサーでは、固定部側突出部及び可動部側突出部が、二つの連結部の間にあっても、二つの連結部の外側に在っても良い。 Further, in the load detection sensor of the present invention, the fixed portion side protruding portion and the movable portion side protruding portion may be located between the two connecting portions or outside the two connecting portions.
また、本発明の荷重検出センサーでは、音叉振動子の結合部の他方を、てこ部の作用点に結合し、固定部側延伸部から可動部側延伸部の方向に突出する第２の固定部側突出部でてこ部の支点を支持し、可動部側突出部をてこ部の力点に結合するようにしても良い。
こうすることで、可動部に加わる力をてこ部で増幅して音叉振動子に作用させることができる。
Further, in the load detection sensor of the present invention, the other of the coupling portion of the tuning fork oscillator is coupled to the point of action of the lever portion, and the second fixing portion projects from the extension portion on the fixed portion side toward the extension portion on the movable portion side. The fulcrum of the lever may be supported by the side protrusion, and the movable portion may be connected to the force point of the lever.
By doing so, the force applied to the movable portion can be amplified by the lever portion and acted on the tuning fork oscillator.
また、本発明の荷重検出センサーでは、音叉振動子の中心線の延長方向にある可動部固定位置と固定部固定位置とを音叉振動子の同じ側に設けることで、可動部が、可動部固定位置に固定された部材により音叉振動子の方向にプッシュされるプッシュ型の荷重検出センサーとすることができる。 Further, in the load detection sensor of the present invention, the movable portion is fixed by providing the movable portion fixing position and the fixed portion fixing position in the extension direction of the center line of the tuning fork oscillator on the same side of the tuning fork oscillator. It can be a push-type load detection sensor that is pushed in the direction of the tuning fork oscillator by a member fixed at the position.
また、本発明の荷重検出センサーでは、音叉振動子の中心線の延長方向にある可動部固定位置と固定部固定位置とを音叉振動子の異なる側に設けることで、可動部が、可動部固定位置に固定された部材により音叉振動子から離れる方向にプルされるプル型の荷重検出センサーとすることができる。 Further, in the load detection sensor of the present invention, the movable portion is fixed by providing the movable portion fixing position and the fixed portion fixing position in the extension direction of the center line of the tuning fork oscillator on different sides of the tuning fork oscillator. It can be a pull-type load detection sensor that is pulled away from the tuning fork oscillator by a member fixed at a position.
また、本発明の荷重検出センサーでは、音叉振動子の中心線の延長方向にある可動部固定位置を音叉振動子の両側に設け、可動部の音叉振動子の方向へのプッシュと、可動部の音叉振動子から離れる方向へのプルとが可能な荷重検出センサーとすることができる。 Further, in the load detection sensor of the present invention, the movable portion fixed positions in the extension direction of the center line of the tuning fork oscillator are provided on both sides of the tuning fork oscillator, and the movable portion is pushed toward the tuning fork oscillator and the movable portion It can be a load detection sensor that can pull in the direction away from the tuning fork oscillator.
本発明の荷重検出センサーは、小型で細長い外形を有しており、各種の小型測定器に組み込むことができる。 The load detection sensor of the present invention has a small and elongated outer shape, and can be incorporated into various small measuring instruments.
（第１の実施形態）
図１は、第１の実施形態に係る荷重検出センサーを示している。
このセンサーは、平行する二枚の板状振動片３１とその両端部同士を結合する二つの結合部３２、３３とを備える音叉振動子３０（なお、圧電素子の記載は省略している。以下、同様である。）と、センサーの固定部４０と、センサーの可動部５０とを有し、固定部４０は、基部（不図示）に固定される固定部固定位置４３が設けられた部分から延伸する固定部側延伸部４１と、固定部側延伸部４１から突出する固定部側突出部４２とを有し、可動部５０は、可動部５０に力を加える部材（不図示）が結合される、可動部固定位置５３が設けられた部分から延伸する可動部側延伸部５１と、可動部側延伸部５１から突出する可動部側突出部５２とを有している。
(First Embodiment)
FIG. 1 shows a load detection sensor according to the first embodiment.
This sensor is a tuning fork oscillator 30 having two parallel plate-shaped vibrating pieces 31 and two coupling portions 32 and 33 for coupling both ends thereof (the description of the piezoelectric element is omitted below. , The same applies.), The sensor fixing portion 40, and the sensor movable portion 50, and the fixing portion 40 is from a portion provided with a fixing portion fixing position 43 fixed to a base portion (not shown). The fixed portion side extending portion 41 to be stretched and the fixed portion side protruding portion 42 protruding from the fixed portion side extending portion 41 are connected to the movable portion 50 with a member (not shown) for applying a force to the movable portion 50. It has a movable portion side extending portion 51 extending from a portion where the movable portion fixing position 53 is provided, and a movable portion side protruding portion 52 protruding from the movable portion side extending portion 51.
固定部側突出部４２は、可動部側延伸部５１の方向に突出し、可動部側突出部５２は固定部側延伸部４１の方向に突出している。
音叉振動子３０の結合部３２は固定部側突出部４２に支持され、結合部３３は可動部側突出部５２に支持されている。
また、このセンサーは、固定部側延伸部４１及び可動部側延伸部５１とともにロバーバル機構の平行四辺形を構成する二つの連結部６１、６２を有している。
音叉振動子３０は、二つの連結部６１、６２の間に位置している。
The fixed portion side projecting portion 42 projects in the direction of the movable portion side extending portion 51, and the movable portion side projecting portion 52 projects in the direction of the fixed portion side extending portion 41.
The coupling portion 32 of the tuning fork oscillator 30 is supported by the fixed portion side protrusion 42, and the coupling portion 33 is supported by the movable portion side protrusion 52.
Further, this sensor has two connecting portions 61 and 62 forming a parallelogram of the reverbal mechanism together with the fixed portion side extending portion 41 and the movable portion side extending portion 51.
The tuning fork oscillator 30 is located between the two connecting portions 61 and 62.
このセンサーの音叉振動子３０の中心線は、固定部側延伸部４１及び可動部側延伸部５１に平行し、固定部固定位置４３は、音叉振動子３０の中心線の延長方向にある。また、可動部５０の可動部固定位置５３が設けられた部分は、固定部４０のさらに外側にあって、可動部固定位置５３も、固定部固定位置４３と同様に、音叉振動子３０の中心線の延長方向にある。
このように、固定部固定位置４３と可動部固定位置５３とが音叉振動子３０の同一方向にあるセンサーは、可動部５０が音叉振動子３０の方向にプッシュされるプッシュ型である。
The center line of the tuning fork oscillator 30 of this sensor is parallel to the fixed portion side extension portion 41 and the movable portion side extension portion 51, and the fixed portion fixing position 43 is in the extension direction of the center line of the tuning fork oscillator 30. Further, the portion of the movable portion 50 where the movable portion fixing position 53 is provided is further outside the fixing portion 40, and the movable portion fixing position 53 is also the center of the tuning fork oscillator 30 as in the fixed portion fixing position 43. It is in the extension direction of the line.
As described above, the sensor in which the fixed portion fixed position 43 and the movable portion fixed position 53 are in the same direction of the tuning fork oscillator 30 is a push type in which the movable portion 50 is pushed in the direction of the tuning fork oscillator 30.
可動部５０がプッシュされると、音叉振動子３０が引き伸ばされる方向に変位し、音叉振動子３０の固有振動数が変化する。
このセンサーは、可動部５０に音叉振動子３０の中心線に交差する方向の分力を持つ力が加わっても、固定部側延伸部４１、連結部６１、可動部側延伸部５１及び連結部６２から成るロバーバル機構を備えているため、その分力による音叉振動子３０の影響が回避できる。
When the movable portion 50 is pushed, the tuning fork oscillator 30 is displaced in the stretching direction, and the natural frequency of the tuning fork oscillator 30 changes.
In this sensor, even if a force having a component force in the direction intersecting the center line of the tuning fork oscillator 30 is applied to the movable portion 50, the fixed portion side extending portion 41, the connecting portion 61, the movable portion side extending portion 51 and the connecting portion Since the reverbal mechanism including 62 is provided, the influence of the tuning fork oscillator 30 due to the component force can be avoided.
（第２の実施形態）
図２は、第２の実施形態に係る荷重検出センサーを示している。
このセンサーは、可動部固定位置５４を備える可動部５０の部分が、音叉振動子３０の反対側に配置されている点で第１の実施形態（図１）と相違する。可動部固定位置５４は、音叉振動子３０の中心線の延長方向にある。
このように、固定部固定位置４３と可動部固定位置５４とが音叉振動子３０の異なる方向にあるセンサーは、可動部５０が音叉振動子３０から離れる方向にプルされるプル型である。
可動部５０がプルされると、音叉振動子３０が引き伸ばされる方向に変位し、音叉振動子３０の固有振動数が変化する。
(Second Embodiment)
FIG. 2 shows a load detection sensor according to the second embodiment.
This sensor differs from the first embodiment (FIG. 1) in that the portion of the movable portion 50 having the movable portion fixed position 54 is arranged on the opposite side of the tuning fork oscillator 30. The movable portion fixing position 54 is in the extension direction of the center line of the tuning fork oscillator 30.
As described above, the sensor in which the fixed portion fixed position 43 and the movable portion fixed position 54 are in different directions of the tuning fork oscillator 30 is a pull type in which the movable portion 50 is pulled in the direction away from the tuning fork oscillator 30.
When the movable portion 50 is pulled, the tuning fork oscillator 30 is displaced in the stretching direction, and the natural frequency of the tuning fork oscillator 30 changes.
（第３の実施形態）
図３は、第３の実施形態に係る荷重検出センサーを示している。
このセンサーは、可動部固定位置５３、５４を備える可動部５０の部分が、音叉振動子３０の両側に配置されている点で第１の実施形態（図１）と相違する。
このセンサーは、プッシュ型及びプル型のいずれにおいても使用することができる。プッシュ型として使用するときは、可動部固定位置５３の側をプッシュする。また、プル型として使用するときは、可動部固定位置５４の側をプルする。いずれの場合も音叉振動子３０が引き伸ばされる方向に変位し、音叉振動子３０の固有振動数が変化する。
(Third Embodiment)
FIG. 3 shows a load detection sensor according to a third embodiment.
This sensor differs from the first embodiment (FIG. 1) in that the portions of the movable portion 50 having the movable portion fixed positions 53 and 54 are arranged on both sides of the tuning fork oscillator 30.
This sensor can be used in both push and pull types. When used as a push type, the side of the movable portion fixed position 53 is pushed. When used as a pull type, the side of the movable portion fixing position 54 is pulled. In either case, the tuning fork oscillator 30 is displaced in the stretching direction, and the natural frequency of the tuning fork oscillator 30 changes.
（第４の実施形態）
図４は、第４の実施形態に係る荷重検出センサーを示している。
このセンサーは、てこ部７０を有し、可動部５０に加えられた力が、てこ部７０で増幅されて音叉振動子３０に作用する。
固定部側延伸部４１は、音叉振動子３０の結合部３３を支持する固定部側突出部４２の他に、てこ部７０の支点７２を支える第２の固定部側突出部４４を備えている。
可動部側突出部５２は、てこ部７０の力点７３に結合され、てこ部７０の作用点には音叉振動子３０の結合部３２が結合される。
このセンサーでは、可動部５０にプッシュする力が作用すると、その力がてこ部７０で増幅されて、音叉振動子３０の結合部３２に作用し、音叉振動子３０が引き伸ばされる方向に変位して、音叉振動子３０の固有振動数が変化する。
(Fourth Embodiment)
FIG. 4 shows a load detection sensor according to a fourth embodiment.
This sensor has a lever portion 70, and the force applied to the movable portion 50 is amplified by the lever portion 70 and acts on the tuning fork oscillator 30.
The fixed portion side extending portion 41 includes a fixed portion side protruding portion 42 that supports the coupling portion 33 of the tuning fork oscillator 30, and a second fixed portion side protruding portion 44 that supports the fulcrum 72 of the lever portion 70. ..
The movable portion side protruding portion 52 is coupled to the force point 73 of the lever portion 70, and the coupling portion 32 of the tuning fork oscillator 30 is coupled to the point of action of the lever portion 70.
In this sensor, when a pushing force acts on the movable portion 50, the force is amplified by the lever portion 70 and acts on the coupling portion 32 of the tuning fork oscillator 30, and the tuning fork oscillator 30 is displaced in the stretching direction. , The natural frequency of the tuning fork oscillator 30 changes.
（第５の実施形態）
図５は、第５の実施形態に係る荷重検出センサーを示している。
このセンサーでは、音叉振動子３０が二つの連結部６１、６２の外側に位置している。第１の実施形態（図１）に比べて連結部６２の位置が固定部４０に近いため、固定部側延伸部４１の長さが、第１の実施形態に比べて短い。その他の構成は第１の実施形態と変わりがない。
このセンサーでは、可動部５０がプッシュされると、音叉振動子３０が引き伸ばされる方向に変位し、音叉振動子３０の固有振動数が変化する。
このとき、可動部５０に音叉振動子３０の中心線に交差する方向の分力を持つ力が加わったとしても、固定部側延伸部４１、連結部６１、可動部側延伸部５１の一部及び連結部６２から成るロバーバル機構が、その分力による音叉振動子３０の影響を防止する。
(Fifth Embodiment)
FIG. 5 shows a load detection sensor according to a fifth embodiment.
In this sensor, the tuning fork oscillator 30 is located outside the two connecting portions 61 and 62. Since the position of the connecting portion 62 is closer to the fixed portion 40 than in the first embodiment (FIG. 1), the length of the fixed portion side extending portion 41 is shorter than that in the first embodiment. Other configurations are the same as in the first embodiment.
In this sensor, when the movable portion 50 is pushed, the tuning fork oscillator 30 is displaced in the stretching direction, and the natural frequency of the tuning fork oscillator 30 changes.
At this time, even if a force having a component force in the direction intersecting the center line of the tuning fork oscillator 30 is applied to the movable portion 50, a part of the fixed portion side extending portion 41, the connecting portion 61, and the movable portion side extending portion 51. The reverbal mechanism including the connecting portion 62 prevents the influence of the tuning fork oscillator 30 due to the component force thereof.
（第６の実施形態）
図６は、第６の実施形態に係る荷重検出センサーを示している。
このセンサーは、音叉振動子３０に過大な力が作用するのを防止するストッパー機構８０を一体的に備えている。
このストッパー機構８０は、可動部側延伸部５１から固定部側延伸部４１の方向に突出して可動部５０と共に音叉振動子３０の中心線の方向に変位する変位部８１と、固定部側延伸部４１から可動部側延伸部５１の方向に突出して変位部８１の変位を制限するストッパー部８２とから成る。
このストッパー機構８０では、可動部５０に過大な荷重が加わったり、可動部５０に過大な逆荷重が加わったりしたとき、変位部８１がストッパー部８２に当接して可動部５０の動きが規制される。そのため、過大な力による音叉振動子３０の千切れや座屈が回避できる。
(Sixth Embodiment)
FIG. 6 shows a load detection sensor according to a sixth embodiment.
This sensor integrally includes a stopper mechanism 80 that prevents an excessive force from acting on the tuning fork oscillator 30.
The stopper mechanism 80 includes a displacement portion 81 that protrudes from the movable portion side extension portion 51 in the direction of the fixed portion side extension portion 41 and is displaced in the direction of the center line of the tuning fork oscillator 30 together with the movable portion 50, and a fixed portion side extension portion. It is composed of a stopper portion 82 that projects from 41 in the direction of the extension portion 51 on the movable portion side and limits the displacement of the displacement portion 81.
In the stopper mechanism 80, when an excessive load is applied to the movable portion 50 or an excessive reverse load is applied to the movable portion 50, the displacement portion 81 abuts on the stopper portion 82 and the movement of the movable portion 50 is restricted. To. Therefore, it is possible to avoid tearing and buckling of the tuning fork oscillator 30 due to excessive force.
図７は、本発明の荷重検出センサーを用いた秤を模式的に示している。本発明の荷重検出センサーを用いることで細形形状の秤を得ることができる。
また、図８は、本発明の荷重検出センサーを用いた押込み試験装置を模式的に示している。この装置は、ケーシング９１を把持して圧子９２を試料９３に押し込み、その押込み荷重を荷重検出センサー９４で検出する。検出データは制御回路９５で処理されて、試料９３の柔らかさが算出される。
このように、本発明の荷重検出センサーは幅広い利用が可能である。
FIG. 7 schematically shows a scale using the load detection sensor of the present invention. By using the load detection sensor of the present invention, a finely shaped scale can be obtained.
Further, FIG. 8 schematically shows an indentation test apparatus using the load detection sensor of the present invention. This device grips the casing 91, pushes the indenter 92 into the sample 93, and detects the pushing load with the load detection sensor 94. The detection data is processed by the control circuit 95 to calculate the softness of the sample 93.
As described above, the load detection sensor of the present invention can be widely used.
本発明の荷重検出センサーは、細長い小型形状を有しており、各種の測定器や試験機に組み込んで利用することができる。 The load detection sensor of the present invention has an elongated and compact shape, and can be used by incorporating it into various measuring instruments and testing machines.
３０ 音叉振動子
３１ 板状振動片
３２ 結合部
３３ 結合部
４０ 固定部
４１ 固定部側延伸部
４２ 固定部側突出部
４３ 固定部固定位置
４４ 第２の固定部側突出部
５０ 可動部
５１ 可動部側延伸部
５２ 可動部側突出部
５３ 可動部固定位置
５４ 可動部固定位置
６１ 連結部
６２ 連結部
７０ てこ部
７１ 作用点
７２ 支点
７３ 力点
８０ ストッパー機構
８１ 変位部
８２ ストッパー部
９１ ケーシング
９２ 圧子
９３ 試料
９４ 荷重検出センサー
９５ 制御回路
30 Tuning fork oscillator 31 Plate-shaped vibrating piece 32 Coupling part 33 Coupling part 40 Fixed part 41 Fixed part side extension part 42 Fixed part side protruding part 43 Fixed part fixed position 44 Second fixed part side protruding part 50 Movable part 51 Movable part Side extension part 52 Movable part Side protrusion 53 Movable part fixed position 54 Movable part fixed position 61 Connecting part 62 Connecting part 70 Lever part 71 Working point 72 Supporting point 73 Power point 80 Stopper mechanism 81 Displacement part 82 Stopper part 91 Casing 92 Indenter 93 Sample 94 Load detection sensor 95 Control circuit
Claims (7)
前記音叉振動子は、平行する二枚の板状振動片と、前記二枚の板状振動片の両端部同士を結合する二つの結合部と、を備え、
前記ロバーバル機構は、前記荷重検出センサーの固定部から延びる固定部側延伸部の少なくとも一部と、前記荷重検出センサーの可動部から延びる可動部側延伸部の少なくとも一部とが、それらを連結する二つの連結部により平行四辺形を形成するように結合されて構成され、
前記固定部側延伸部は、前記音叉振動子の前記結合部の一方を直接支持するために、前記可動部側延伸部の側に突出する固定部側突出部を備え、
前記可動部側延伸部は、前記音叉振動子の前記結合部の他方を直接又はてこ部を介して支持するために、前記固定部側延伸部の側に突出する可動部側突出部を備え、
前記結合部の一方が前記固定部側突出部に支持され、前記結合部の他方が前記可動部側突出部又はてこ部に支持された前記音叉振動子の中心線の方向が、前記固定部側延伸部及び可動部側延伸部と平行しており、
前記荷重検出センサーの固定部に固定される部材の固定部固定位置、及び、前記荷重検出センサーの可動部に固定される部材の可動部固定位置が、前記音叉振動子の中心線の延長方向にあることを特徴とする荷重検出センサー。 A load detection sensor equipped with a tuning fork oscillator and a reverbal mechanism integrally formed from a single material.
The tuning fork oscillator includes two parallel plate-shaped vibrating pieces and two coupling portions for connecting both ends of the two plate-shaped vibrating pieces.
In the reverbal mechanism, at least a part of the fixed portion side extension portion extending from the fixed portion of the load detection sensor and at least a part of the movable portion side extension portion extending from the movable portion of the load detection sensor connect them. It is composed of two connecting parts that are joined together to form a parallelogram.
The fixed portion-side extension portion includes a fixed portion-side protrusion that projects toward the movable portion-side extension portion in order to directly support one of the coupling portions of the tuning fork oscillator.
The movable portion-side extension portion includes a movable portion-side protrusion that protrudes toward the fixed portion-side extension portion in order to support the other of the coupling portion of the tuning fork oscillator directly or via a lever portion.
The direction of the center line of the tuning fork oscillator in which one of the coupling portions is supported by the fixing portion-side protrusion and the other of the coupling portion is supported by the movable portion-side protrusion or the lever is the fixing portion side. It is parallel to the stretched part and the stretched part on the movable part side,
The fixed position of the member fixed to the fixed portion of the load detection sensor and the fixed position of the movable portion of the member fixed to the movable portion of the load detection sensor are in the extension direction of the center line of the tuning fork oscillator. A load detection sensor characterized by being present.
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