JP6779345B1 - Fluid supply device and water jet laser machine - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a fluid supply device and a water jet laser machine capable of accurately diagnosing the life of a pump. A fluid supply device 40 includes a pump 41 that supplies a pressure fluid by a periodic fluid delivery operation, detection units 42, 43 for detecting the pump 41 delivery operation, and detection units 42, 43. It includes a control device 50 that gives a notification when the number of delivery operations of the pump 41 obtained based on the detection result exceeds a threshold value. [Selection diagram] Fig. 1

Description

The present application relates to a fluid supply device and a water jet laser machine including a fluid supply device.

Conventionally, various devices for determining the life of parts have been proposed. For example, Patent Document 1 discloses an apparatus for monitoring the life of a part of a machine tool. This device calculates the machine tool downtime by finding the time from when the machine tool is turned off to when it is turned on again, and when the downtime is greater than or equal to the threshold value, a predetermined part ( For example, it is configured to notify the user that a component that deteriorates due to bacterial growth when not in use) needs to be replaced.

Further, Patent Document 2 discloses an apparatus for determining the life of a vacuum pump. This device includes a sensor that detects the vibration of the vacuum pump, and is configured to determine that the life of the vacuum pump has expired when the amplitude of the vibration exceeds a predetermined value.

International Publication No. 2016/194070 Japanese Unexamined Patent Publication No. 6-173854

Pumps are used in various devices as a means for supplying fluid. In general, the life of a pump may often be determined based on its operating time. However, some pumps (eg, diaphragm pumps) deliver pressure fluids through periodic fluid delivery operations, and the frequency of such delivery operations depends on a variety of factors (eg, required fluid pressure). It may change accordingly. For example, when the required pressure is high, a higher frequency feeding operation is required than when the pressure is low. Therefore, it can be difficult to determine the life of such a pump simply based on operating time.

It is an object of the present disclosure to provide a fluid supply device capable of accurately diagnosing the life of a pump in consideration of the above problems. The present disclosure also relates to a water jet laser machine equipped with such a fluid supply device.

One aspect of the present disclosure is a pump for supplying a pressure fluid by a periodic fluid feeding operation and a detection for detecting the pump feeding operation in a fluid supply device that generates a pressure fluid and supplies the pressure fluid to a desired device. It is a fluid supply device including a unit and a control device that gives a notification when the number of pumping operations obtained based on the detection result of the detection unit exceeds a threshold value.

In the fluid supply device according to one aspect of the present disclosure, it is determined whether or not a notification (for example, a notification for inspection or replacement of the pump) is issued based on the number of pump feeding operations. Therefore, even if the frequency of pump feeding operation changes depending on factors such as fluid pressure, it is possible to accurately estimate the load applied to the pump parts by counting the number of pump feeding operations. It is possible. Therefore, the life of the pump can be accurately diagnosed.

The detection unit may include a flow rate sensor that detects the pulsation of the pressure fluid. Since the pump feeding operation is periodic, the pressure fluid pulsates. Therefore, the number of feeding operations can be counted based on the pulsation of the pressure fluid.

The detection unit may be a sensor that detects the vibration of the pump. Since the pump feeding operation is periodic, the vibration of the pump includes a vibration component based on the pumping operation. Therefore, the number of feeding operations can be counted based on the vibration of the pump.

Another aspect of the present disclosure is a water jet laser machine that guides a laser beam by a water column and processes the work by irradiating the work with the laser beam, injecting the water column and inserting the laser beam into the water column. A nozzle to irradiate, a pump that supplies pressurized water to the nozzle by a periodic water delivery operation, a detection unit for detecting the pump delivery operation, and a pump obtained based on the detection result of the detection unit. It is a water jet laser machine equipped with a control device that gives a notification when the number of pumping operations exceeds a threshold value.

In a water jet laser machine, the frequency of pump feeding operation changes according to various factors such as the inner diameter of a nozzle. In the water jet laser machine of this embodiment, it is determined whether or not a notification (for example, a notification for inspection or replacement of the pump) is issued based on the number of pump feeding operations. Therefore, even when the frequency of pump feeding operations changes, it is possible to accurately estimate the load applied to the pump parts by counting the number of pump feeding operations. Therefore, the life of the pump can be accurately diagnosed.

According to one aspect of the present disclosure, it is possible to provide a fluid supply device and a water jet laser machine capable of accurately diagnosing the life of a pump.

It is a schematic diagram which shows the water jet laser processing machine provided with the fluid supply device which concerns on embodiment. It is the schematic which shows the high pressure pump in FIG. An example of the operation screen displayed on the control device in FIG. 1 is shown. It is a flowchart which shows the operation of a fluid supply device. It is a schematic diagram which shows the system including the water jet laser processing machine which concerns on embodiment.

Hereinafter, the fluid supply device and the water jet laser machine according to the embodiment will be described with reference to the attached drawings. Similar or corresponding elements are designated by the same reference numerals, and duplicate description is omitted. The scale of the figure may have been changed for ease of understanding.

FIG. 1 is a schematic view showing a water jet laser machine 100 including the fluid supply device according to the embodiment. The water jet laser processing machine (hereinafter, also simply referred to as “laser processing machine”) 100 guides the laser beam by the water column (which may also be referred to as “water layer flow layer”) 34, and makes the laser beam into the work W. The work W is machined by irradiating the work W. The laser machining machine 100 includes, for example, a laser head 10, a pure water production device 30, a high-pressure pump unit (fluid supply device) 40, a work table 36, and a control device 50. The laser machine 100 may further include other components.

The laser head 10 irradiates the work W with a laser beam. For example, the laser head 10 can move linearly in each of the three orthogonal axial directions (X, Y, and Z directions) with respect to the work table 36. The movement of the laser head 10 may be controlled by, for example, an NC device incorporated in the control device 50. In the laser head 10, a laser beam is emitted from a laser transmitter 14 arranged outside (or inside) the housing 12. For example, the laser transmitter 14 emits a visible light laser (eg, Nd: YAG laser). The laser beam is received by the laser irradiation head 16 via a light guide member 14a such as an optical fiber. The laser irradiation head 16 irradiates the laser beam toward the collimation lens 18. The laser beam from the laser irradiation head 16 is converted into parallel rays by the collimation lens 18, reflected by the first mirror 20 toward the second mirror 22, and directed by the second mirror 22 toward the laser focus lens 24. Is reflected. The laser beam focused by the laser focus lens 24 is irradiated to the outside of the housing 12 through the nozzle hole 26b of the nozzle 26.

The first and second mirrors 20 and 22 have a planar reflecting surface, and have a first motor 20a and a second motor 22a as mirror orientation changing means, respectively. By adjusting the orientation of the reflecting surface by the first motor 20a and the second motor 22a, the focal position of the laser beam can be adjusted in two horizontal directions (X direction and Y direction). For example, the first and second mirrors 20 and 22, in particular, the second mirror 22 that reflects the laser beam toward the laser focus lens 24 may include a dielectric multilayer film. The dielectric multilayer film is adapted to the wavelength of the laser beam emitted from the laser transmitter 14, reflects the laser beam, and transmits light having a wavelength other than the wavelength of the laser beam. Such a dielectric multilayer film is formed, for example, by vapor deposition on a glass plate. When the second mirror 22 includes a dielectric multilayer film, the positional relationship between the laser beam emitted from the nozzle hole 26b and the nozzle hole 26b can be monitored by the camera 32. For example, the focus of the camera 32 is adjusted to the surface of the nozzle head 26a at the same level as the opening surface of the nozzle hole 26b. The operation of the components of the laser head 10 (for example, the laser transmitter 14, the first motor 20a, the second motor 22a, the camera 32, etc.) can be controlled by, for example, a mechanical control device incorporated in the control device 50. ..

The nozzle 26 ejects the water column 34 and irradiates the water column 34 with a laser beam. Specifically, the nozzle 26 has a nozzle head 26a. The nozzle head 26a is a hollow member that receives water from the high-pressure pump unit 40 via the pipeline 28. A window 26c formed of a transparent member such as glass is provided on the upper surface of the nozzle head 26a facing the laser focus lens 24. The nozzle head 26a is provided with a nozzle hole 26b. A nozzle body (not shown) separate from the nozzle head 26a may be detachably attached to the nozzle head 26a, and the nozzle hole 26b may be provided in the nozzle body. In this case, one nozzle body can be selected from among a plurality of nozzle bodies having nozzle holes 26b having different inner diameters, depending on the processing conditions. With such a configuration, the inner diameter of the nozzle 26 can be changed.

The pure water production apparatus 30 produces water used for forming the water column 34 (for example, pure water or ultrapure water having less impurities than pure water). The pure water production apparatus 30 is fluidly connected to a water supply source 60 (for example, water supply), and may include components such as a tank, a pump, and a filter. The high-pressure pump unit 40 pressurizes the water supplied from the pure water production apparatus 30, and supplies the pressurized water to the nozzle 26 via the pipeline 28. The water supplied to the nozzle 26 is jetted from the nozzle hole 26b toward the work W as a water column 34. The pressure of the water column 34 changes according to the flow rate of water and the inner diameter of the nozzle hole 26b. For example, when the flow rate of water is 20 ml / min to 150 ml / min and the inner diameter of the nozzle hole 26b is 30 μm to 135 μm, the pressure of the water column 34 is approximately 50 MPa (500 bar) to 5 MPa (50 bar). The laser beam radiated from the nozzle hole 26b to the outside of the housing 12 is surrounded by the water column 34 and travels while being totally reflected at the boundary surface between the water column 34 and the surrounding air. Therefore, the laser beam travels along the water column 34.

The work table 36 is arranged, for example, on a bed (not shown) and grips the work W. The work table 36 may have a feeding device such as a rotating mechanism (not shown). The operation of the work table 36 may be controlled by, for example, an NC device incorporated in the control device 50.

Next, the high-pressure pump unit 40 will be described in detail.

As described above, the high-pressure pump unit 40 generates pressurized water from the water supplied from the pure water production apparatus 30, and supplies the pressurized water to the nozzle 26 via the pipeline 28. The high-pressure pump unit 40 includes, for example, a high-pressure pump 41, a vibration sensor (detection unit) 42, a flow rate sensor (detection unit) 43, a pulsation damper 44, and a filter 45. Further, the high-pressure pump unit 40 has a control device for controlling each component of the high-pressure pump unit 40, and in the present embodiment, this control device is for controlling the entire laser processing machine 100. It is incorporated in the control device 50 (details will be described later). The high pressure pump unit 40 may further have other components.

The high-pressure pump 41 supplies the pressure fluid by a periodic fluid feeding operation. Specifically, in the present embodiment, the high-pressure pump 41 can be an air-driven diaphragm pump. In other embodiments, the high pressure pump 41 may be another type of positive displacement pump (eg, rotary or reciprocating).

FIG. 2 is a schematic view showing the high-pressure pump 41 in FIG. The high-pressure pump 41 has, for example, a fluid inlet 41a, a flow path 41b, a fluid outlet 41c, a diaphragm 41d, and a cylinder 41e. The fluid inlet 41a is fluidly communicated with the pure water production apparatus 30 (not shown in FIG. 2) and receives water from the pure water production apparatus 30. The flow path 41b fluidly communicates the fluid inlet 41a and the fluid outlet 41c. The fluid outlet 41c is fluidly communicated with the pulsation damper 44 (not shown in FIG. 2) to send pressurized water to the pulsation damper 44. A check valve is provided at the fluid inlet 41a, and the check valve is configured so that water flowing from the fluid inlet 41a to the flow path 41b does not flow back to the fluid inlet 41a. Similarly, the fluid outlet 41c is provided with a check valve, and the check valve is configured so that water flowing from the flow path 41b to the fluid outlet 41c does not flow back into the flow path 41b.

The diaphragm 41d is provided in the flow path 41b, and when deforming toward the inside of the flow path 41b, when the pressurized water is pushed out from the fluid outlet 41c and deformed away from the inside of the flow path 41b. , It is configured to suck water from the fluid inlet 41a.

The cylinder 41e is configured to deform the diaphragm 41d. The cylinder 41e includes a piston 41f and first and second chambers 41g and 41h partitioned by the piston 41f. The piston 41f is connected to the diaphragm 41d. A directional switching valve 41i that fluidly communicates with the first and second chambers 41g and 41h is connected to the cylinder 41e. The directional control valve 41i can be, for example, a solenoid valve. Air is supplied to the directional control valve 41i from the air pressure source 70.

The operation of the directional control valve 41i (that is, the delivery operation of the high-pressure pump 41) is controlled by the control device 50 (not shown in FIG. 2). Specifically, when pushing out pressurized water from the fluid outlet 41c, the directional control valve 41i is controlled to supply air to the first chamber 41g and draw air from the second chamber 41h. As a result, the piston 41f moves toward the diaphragm 41d and deforms the diaphragm 41d toward the inside of the flow path 41b. Subsequently, when sucking water from the fluid inlet 41a, the directional control valve 41i is controlled to draw air from the first chamber 41g and supply air to the second chamber 41h, whereby the piston 41f has a diaphragm. It moves away from 41d and deforms the diaphragm 41d away from the inside of the flow path 41b. By repeating the above operation, the high pressure pump 41 is configured to supply the pressure fluid by the periodic feeding operation.

A switching count counter (detection unit) 41j is connected to the direction switching valve 41i. The switching count counter 41j is configured to detect the switching count of the directional switching valve 41i (that is, the number of feeding operations of the high-pressure pump 41). The switching count counter 41j is connected to the control device 50, and sends the detected "number of delivery operations" to the control device 50. The switching count counter 41j can be, for example, an electronic counter capable of counting the number of signals input from the directional switching valve 41i when the directional switching valve 41i operates.

With reference to FIG. 1, the vibration sensor 42 is configured to detect the vibration of the high pressure pump 41. The vibration sensor 42 is connected to the control device 50 and sends the detected vibration data to the control device 50. As described above, since the delivery operation of the high-pressure pump 41 is periodic, the vibration data of the high-pressure pump 41 includes a vibration component based on the delivery operation. Therefore, the control device 50 can determine the vibration component based on the sending operation from the vibration data of the high-pressure pump 41 by analyzing the vibration data of the high-pressure pump 41. The control device 50 can obtain the "number of delivery operations" of the high-pressure pump 41 by counting the number of the vibration components.

The flow rate sensor 43 is configured to detect the flow rate of the pressurized water delivered from the high pressure pump 41. The flow rate sensor 43 is connected to the control device 50 and sends the detected flow rate data to the control device 50. As described above, since the delivery operation of the high-pressure pump 41 is periodic, the pressurized water delivered from the high-pressure pump 41 pulsates. Therefore, the control device 50 can determine the pulsation based on the sending operation from the flow rate data of the high pressure pump 41 by analyzing the flow rate data of the high pressure pump 41. The control device 50 can obtain the "number of delivery operations" of the high-pressure pump 41 by counting the number of pulsations.

The pulsation damper 44 is configured to eliminate the pulsation of pressurized water pumped from the high pressure pump 41. The pulsation of pressurized water can affect processing quality. Therefore, the pulsation is removed from the pressurized water before the pressurized water is supplied to the nozzle 26. The filter 45 is configured to remove foreign matter from the pressurized water before the pressurized water is supplied to the nozzle 26. The water that has passed through the filter 45 is sent to the nozzle 26 via the pipe line 28.

The control device 50 is connected to various components in the laser machine 100 by wire or wirelessly, and is configured to control these components. The control device 50 includes, for example, a processor such as a CPU (Central Processing Unit), a hard disk drive, a storage device such as a ROM (read only memory) and a RAM (random access memory), and an input device and an output device (for example, a mouse). It can have elements such as a keyboard, a liquid crystal display and / or a touch panel). These elements can be connected to each other via a bus (not shown) or the like. The control device 50 may further include other elements. The control device 50 may incorporate, for example, the NC device and the machine control device described above.

FIG. 3 shows an example of the operation screen 300 displayed on the control device 50 in FIG. The operation screen 300 of FIG. 3 may be displayed on the touch panel of the control device 50, for example. The operation screen 300 can include various items related to the laser processing machine 100. The operator can select or input an item by touching the touch panel. For example, if you select the "Status" tab, various items including "Consumables Management" will be displayed in section 301. When "Consumables Management" is selected from section 301, a list of consumables included in the laser machine 100 is displayed in section 302. When the desired consumable is selected from section 302, information about the selected consumable is displayed in section 303. In FIG. 3, an air-driven high-pressure pump (corresponding to the high-pressure pump 41) is selected in section 302, and information about the high-pressure pump 41 is displayed in section 303.

As shown in section 303, for each consumable, the controller 50 stores, for example, the "previous inspection date", the "next inspection scheduled date", the "operating time", and the "elapsed time". These can be displayed on the operation screen 300. The "operating time" indicates the time when the part is actually operated, and the "elapsed time" is the time after the part is attached to the laser machine 100 (that is, the time when the part is not actually operated). Including). In particular, as shown in FIG. 3, with respect to the high-pressure pump 41, the control device 50 further stores the "number of delivery operations" and displays this on the operation screen 300.

The control device 50 stores a threshold value for at least one of "operating time" or "elapsed time" for each component, and when the corresponding item exceeds the threshold value, the control device 50 sets the threshold value. Judge that the part needs inspection or replacement. As shown in FIG. 3, for example, the control device 50 stores a threshold value (for example, 4000 hours) for "operating time" and a threshold value (for example, 4000 hours) for "elapsed time" with respect to the high-pressure pump 41. , December).

Further, with respect to the high-pressure pump 41, the control device 50 further stores a threshold value (for example, 1800000 times) for the "number of delivery operations", and when the "number of delivery operations" exceeds the threshold value. In addition, the control device 50 determines that the high-pressure pump 41 needs to be replaced. This is because the life of the high-pressure pump 41 cannot be determined simply based on the "operating time" or the "elapsed time", unlike the life of other consumables in the laser processing machine 100. Specifically, the frequency of the feeding operation of the high-pressure pump 41 may change depending on the conditions in which the laser processing machine 100 is used (for example, pressure loss in the nozzle 26 and the pulsation damper 44), and simply " This is because it is difficult to estimate the load applied to the parts of the high-pressure pump 41 based on the "operating time" or the "elapsed time". Therefore, it is intended that the laser machining machine 100 accurately estimates the load applied to the parts of the high-pressure pump 41 (for example, the diaphragm 41d or the piston 41f) by counting the "number of delivery operations" of the high-pressure pump 41. There is.

Further, the control device 50 may be able to store or calculate the threshold value of the “number of delivery operations” according to the inner diameter of the nozzle 26. As described above, the inner diameter of the nozzle 26 can be changed according to the processing conditions. For example, if the inner diameter of the nozzle 26 is large, the high pressure pump 41 may require a higher frequency and higher pressure delivery operation. In this case, the high-pressure pump 41 may need to be replaced with a smaller number of feeding operations than when the inner diameter of the nozzle 26 is small. Therefore, the control device 50 may be configured to use the threshold value of the “number of delivery operations” according to the inner diameter of the nozzle 26.

As shown in FIG. 3, selecting the Guide tab from section 303 displays inspection and / or replacement information for the selected part. If you select the "Inspection History" tab from section 303, information about past inspections of the parts currently installed on the laser machine 100 for the selected parts (eg, inspection date and time of inspection). (Operating time, elapsed time, number of feeding operations, etc.) are displayed (not shown in FIG. 3). Selecting the "Part Information" tab from section 303 displays information about the selected part (eg, part number, model and / or required number, etc.) (not shown in FIG. 3).

Subsequently, the operation of the high pressure pump unit 40 will be described.

FIG. 4 is a flowchart showing the operation of the high pressure pump unit 40. The operation shown in FIG. 4 may be started, for example, every predetermined time (for example, one hour, several hours, one day, several days, one week, or several weeks, etc.), or the operator may control the control device. It may be started when a command is input to 50. When the operation is started, the control device 50 determines whether or not the "operating time" of the high-pressure pump 41 exceeds the threshold value (step S100).

When it is determined in step S100 that the "operating time" exceeds the threshold value, the control device 50 issues a notification indicating that the high-pressure pump 41 needs inspection (step S102). With reference to FIG. 3, for example, the notification may be text 304 displayed on the operation screen 300 (for example, "Perform periodic inspection or replacement", etc.), or may be voice. ..

With reference to FIG. 4, the controller subsequently determines whether or not the operator has input the completion of the inspection (step S104). With reference to FIG. 3, for example, the operation screen 300 may include a button 305 for inputting an inspection completion, and the operator may press the button 305.

With reference to FIG. 4, when it is determined in step S104 that the completion of the inspection has been input by the operator, the control device 50 changes the “operating time” to zero (step S106). If it is determined in step S104 that the completion of the inspection is not input from the operator, the control device 50 re-executes step S104 after, for example, a predetermined time (for example, 1 second, several seconds, 1 minute, or several minutes).

After step S106, the control device 50 rewrites the "last inspection date" to today's date (step S108). Subsequently, the control device 50 rewrites the "next inspection scheduled date" to a date after a predetermined period (for example, January, several months, one year, or several years) (step S110), and ends a series of operations. As described above, whether or not the high-pressure pump 41 needs to be inspected is determined based on the "operating time" which is the time when the high-pressure pump 41 actually operates (step S100). "Can simply be a rough scheduled date. Therefore, when the "operating time" actually approaches the threshold value, the control device 50 may further correct the "next inspection scheduled date" to a more accurate date.

When it is determined in step S100 that the "operation time" does not exceed the threshold value, the control device 50 determines whether or not the "number of delivery operations" of the high-pressure pump 41 exceeds the threshold value (step). S112). The control device 50 may determine the “number of delivery operations” used in step S112 based on the detection result from at least one of the switching count counter 41j, the vibration sensor 42, or the flow rate sensor 43.

When it is determined in step S112 that the "number of delivery operations" of the high-pressure pump 41 exceeds the threshold value, the control device 50 issues a notification indicating that the high-pressure pump 41 needs to be replaced (step S114). With reference to FIG. 3, for example, the notification may be text 304 displayed on the operation screen 300 (for example, "Perform periodic inspection or replacement", etc.), or may be voice. .. With reference to FIG. 4, when it is determined in step S112 that the "number of delivery operations" of the high-pressure pump 41 does not exceed the threshold value, the control device 50 determines, for example, a predetermined time (for example, one hour or several hours). After one day, several days, one week, several weeks, etc.), step S100 is executed again.

After step S114, the control device 50 determines whether or not the operator has input the completion of replacement of the high pressure pump 41 (step S116). For example, the operation screen 300 may further include a button for inputting the exchange completion, and the operator may press this button. Alternatively or additionally, the high pressure pump 41 may be provided with a button for inputting the completion of replacement, and when the operator presses this button, the completion of replacement may be input to the control device 50.

When it is determined in step S116 that the replacement of the high-pressure pump 41 is completed by the operator, the control device 50 determines all the times and times (that is, "operating time" and "elapsed time", and "delivery operation". The number of times ") is changed to zero (step S118). If it is determined in step S116 that the completion of the exchange is not input from the operator, the control device 50 re-executes step S116, for example, after a predetermined time (for example, 1 second, several seconds, 1 minute, or several minutes).

After step S118, the control device 50 rewrites the "last inspection date" to today's date (step S120). Subsequently, the control device 50 rewrites the "next inspection scheduled date" to a date after a predetermined period (for example, January, several months, one year, or several years) (step S122), and ends a series of operations.

FIG. 5 is a schematic view showing a system 400 including the laser processing machine 100 according to the embodiment. As shown in FIG. 5, the control device 50 of the laser processing machine 100 is, for example, via a network N such as the Internet, the central control room 401 of the user of the laser processing machine 100, the smartphone 402, and / or the tablet 403. It may be connected to. Further, the control device 50 may be connected to the service center 404 of the manufacturer of the laser machine 100 via the network N. The control device 50 may be configured to transmit the above notification for inspection or replacement to them via the network N. With such a configuration, replacement or inspection can be completed quickly.

In the laser processing machine 100 according to the above embodiment, the frequency of the feeding operation of the high-pressure pump 41 can be changed according to various factors such as pressure loss in the nozzle 26 and the pulsation damper 44. However, in the high-pressure pump unit 40 according to the above embodiment, it is determined whether or not the notification 304 for replacing the high-pressure pump 41 is issued based on the number of delivery operations of the high-pressure pump 41. Therefore, even when the frequency of the feeding operation of the high-pressure pump 41 changes, the load applied to the parts of the high-pressure pump 41 (for example, the diaphragm 41d or the piston 41f) is counted by counting the number of feeding operations of the high-pressure pump 41. Can be estimated accurately. Therefore, the life of the high-pressure pump 41 can be accurately diagnosed.

Further, in the high-pressure pump unit 40, the detection unit includes a flow rate sensor 43 that detects the pulsation of pressurized water. Since the delivery operation of the high-pressure pump 41 is periodic, the pressurized water pulsates. Therefore, the number of feeding operations can be counted based on the pulsation of the pressurized water.

Further, in the high-pressure pump unit 40, the detection unit includes a vibration sensor 42 that detects the vibration of the high-pressure pump 41. Since the sending operation of the high-pressure pump 41 is periodic, there is a vibration component based on the sending operation in the vibration of the high-pressure pump 41. Therefore, the number of feeding operations can be counted based on the vibration of the high-pressure pump 41.

Although the embodiment of the fluid supply device and the water jet laser machine has been described, the present invention is not limited to the above embodiment. Those skilled in the art will appreciate that various variations of the above embodiments are possible. Those skilled in the art will also understand that the steps performed by the controller 50 need not be performed in the above order and can be performed in any other order as long as there is no contradiction. ..

For example, in the above embodiment, the high-pressure pump unit 40 includes a switching count counter 41j, a vibration sensor 42, and a flow rate sensor 43 as detection units. However, in other embodiments, the high pressure pump unit 40 may include only one or two of these.

26 Nozzle 34 Water column 40 High-pressure pump unit (fluid supply device)
41 High pressure pump (pump)
41j Switching count counter (detector)
42 Vibration sensor (detector)
43 Flow sensor (detector)
50 Control device 100 Water jet laser machine 304 Notification W work

Claims (1)

In a fluid supply device that produces pressure fluid and supplies it to the desired equipment
A pump that supplies pressure fluid by periodic fluid delivery operation,
A detection unit that is a flow rate sensor for detecting the flow rate of the pressure fluid of the pump,
A control device that counts periodic pulsations from the flow rate data detected by the detection unit and issues a notification when the number of delivery operations of the pump exceeds a threshold value.
A fluid supply device characterized by comprising.

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