JP6775799B2 - Oil film inspection method and oil film inspection device - Google Patents

Oil film inspection method and oil film inspection device Download PDF

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JP6775799B2
JP6775799B2 JP2016200736A JP2016200736A JP6775799B2 JP 6775799 B2 JP6775799 B2 JP 6775799B2 JP 2016200736 A JP2016200736 A JP 2016200736A JP 2016200736 A JP2016200736 A JP 2016200736A JP 6775799 B2 JP6775799 B2 JP 6775799B2
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昌司 西川
昌司 西川
祐作 伊藤
祐作 伊藤
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リョーエイ株式会社
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本発明は、金型や機械ユニットの表面に形成された油膜を検査するための油膜検査方法及びこの方法で用いられる油膜検査装置に関するものである。 The present invention relates to an oil film inspection method for inspecting an oil film formed on the surface of a mold or a mechanical unit, and an oil film inspection device used in this method.

河川や海などの水面に拡がった油膜を検出するために、水面に紫外線を照射して油膜を励起して蛍光発光させ、その励起光を撮像装置で受光する技術がある。特許文献1にはこの原理を用いた海上油膜検知装置が記載されている。特許文献1の海上油膜検知装置は、照射装置と撮像装置にフィルターを備え、励起光のピーク波長を正確に受光する工夫がなされている。 In order to detect an oil film that has spread on the water surface of a river or the sea, there is a technique of irradiating the water surface with ultraviolet rays to excite the oil film to emit fluorescence and receive the excitation light with an imaging device. Patent Document 1 describes a marine oil film detection device using this principle. The marine oil film detection device of Patent Document 1 is provided with a filter in the irradiation device and the image pickup device, and is devised to accurately receive the peak wavelength of the excitation light.

しかし水面に拡がった油膜は平坦であるが、金型や機械ユニットの表面には凹凸があるため形成される油膜も平坦ではない。このため、特許文献1の装置では金型や機械ユニットの表面に形成された油膜を検査することは難しい。 However, although the oil film spread on the water surface is flat, the oil film formed is not flat because the surface of the mold or the mechanical unit is uneven. Therefore, it is difficult to inspect the oil film formed on the surface of the mold or the mechanical unit with the apparatus of Patent Document 1.

また特許文献2には、キセノンフラッシュランプやパルスレーザ光源からパルス光線を検査対象物に照射し、油膜からの励起光を受光する油検知装置が記載されている。この油検知装置は検知対象とする油膜の種類によって使用する波長を選択できるものであり、機器の内部からの油漏れなどを検知できるものである。 Further, Patent Document 2 describes an oil detection device that irradiates an inspection object with a pulsed light beam from a xenon flash lamp or a pulsed laser light source and receives excitation light from an oil film. This oil detection device can select the wavelength to be used according to the type of oil film to be detected, and can detect oil leakage from the inside of the device.

しかしこの装置はキセノンフラッシュランプやパルスレーザ光源を使用すること、光ファイバを用いていることなどから、システム全体のコストが非常に高くなるという問題がある。 However, since this device uses a xenon flash lamp or a pulsed laser light source and uses an optical fiber, there is a problem that the cost of the entire system becomes very high.

特開2016−20817号公報Japanese Unexamined Patent Publication No. 2016-20817 特開平9−304281号公報Japanese Unexamined Patent Publication No. 9-304281

従って本発明の目的は上記した従来の問題点を解決し、多額の設備コストを必要とせず、金型や機械ユニットの表面の油膜を正確に検査することができる油膜検査方法及び油膜検査装置を提供することである。 Therefore, an object of the present invention is to provide an oil film inspection method and an oil film inspection apparatus capable of accurately inspecting an oil film on the surface of a mold or a mechanical unit without requiring a large amount of equipment cost by solving the above-mentioned conventional problems. Is to provide.

上記の課題を解決するためになされた本発明の油膜検査方法は、リング状のLED照明装置から検査対象物の表面に紫外線をパルス状に点滅させて照射し、前記表面に付着している油膜が発する励起光を前記LED照明装置の中心に配置されたカメラで受光し、点灯時の画像から消灯時の画像を引き算することにより励起光以外の外乱光の影響を削除して、油膜による励起光のみが抽出された画像とし、その画像を油膜が付着していない、または適正量付着した状態で撮像された検査対象物の画像と比較し、検査対象物の表面の油膜を検査することを特徴とするものである。 The oil film inspection method of the present invention, which has been made to solve the above problems, irradiates the surface of an inspection object with ultraviolet rays in a pulsed manner from a ring-shaped LED lighting device , and irradiates the surface with the oil film adhering to the surface. The excitation light emitted by the LED is received by the camera arranged in the center of the LED lighting device, and the influence of the disturbance light other than the excitation light is eliminated by subtracting the image when the light is off from the image when the LED is turned on, and the excitation by the oil film is performed. It is an image that only light is extracted, and the image is compared with the image of the inspection object taken with no oil film attached or with an appropriate amount attached, and the oil film on the surface of the inspection object is inspected. It is a feature.

なお、カメラで受光した励起光の光量から、油膜の厚さを検査することも可能であり、この場合、検査対象物の表面の各測定ポイントについて、傾斜角度とカメラレンズまでの距離に応じて、励起光の光量と油膜の厚さとの関係を補正することが好ましい。 It is also possible to inspect the thickness of the oil film from the amount of excitation light received by the camera. In this case, for each measurement point on the surface of the inspection object, depending on the tilt angle and the distance to the camera lens. It is preferable to correct the relationship between the amount of excitation light and the thickness of the oil film.

また上記の課題を解決するためになされた本発明の油膜検査装置は、紫外線をパルス状に点滅させて照射する多数のLEDを備えたリング状のLED照明装置と、このLED照明装置の中心に配置されたカメラと、これらのLED照明装置及びカメラの背面を覆うカバーと、このカバーの内部に冷却エアーを供給するエアー供給手段と、点灯時の画像から消灯時の画像を引き算することにより励起光以外の外乱光の影響を削除して、油膜による励起光のみが抽出された画像とし、その画像を油膜が付着していない、または適正量付着した状態で撮像された検査対象物の画像と比較し、検査対象物の表面の油膜を検査する演算手段とを備えたことを特徴とするものである。 Further, the oil film inspection device of the present invention made to solve the above-mentioned problems is a ring-shaped LED lighting device provided with a large number of LEDs that irradiate by blinking ultraviolet rays in a pulsed manner, and at the center of the LED lighting device. Excited by subtracting the image when the light is off from the arranged camera, the cover that covers these LED lighting devices and the back of the camera, the air supply means that supplies cooling air inside the cover, and the image when the light is off. The effect of ambient light other than light is removed to create an image in which only the excitation light from the oil film is extracted, and the image is the image of the inspection object taken with no oil film attached or with an appropriate amount attached. It is characterized by being provided with a calculation means for inspecting an oil film on the surface of an object to be inspected for comparison .

なお本発明の油膜検査装置は、前記LED照明装置とカメラの前面にそれぞれフィルターを配置した構造とすることが好ましく、また、前記LED照明装置の外周と前記カバーとの間に、冷却エアーの噴出流路を形成した構造とすることが好ましい。 The oil film inspection device of the present invention preferably has a structure in which filters are arranged on the front surface of the LED lighting device and the camera, respectively, and cooling air is ejected between the outer periphery of the LED lighting device and the cover. It is preferable to have a structure in which a flow path is formed.

本発明によれば、多数のLEDを備えたリング状のLED照明装置から検査対象物の表面に紫外線を照射し、油膜が発する励起光をLED照明装置の中心に配置されたカメラで受光するので、光源とカメラとの位置関係を常に一定にすることができる。このため検査を安定的に行うことができるうえ、発光源としてレーザー光源よりもはるかに安価なLEDを採用したので、設備コストを抑制することができる。 According to the present invention, the surface of the inspection object is irradiated with ultraviolet rays from a ring-shaped LED lighting device provided with a large number of LEDs, and the excitation light emitted by the oil film is received by a camera arranged in the center of the LED lighting device. , The positional relationship between the light source and the camera can always be constant. Therefore, the inspection can be performed stably, and since an LED that is much cheaper than the laser light source is used as the light emitting source, the equipment cost can be suppressed.

また本発明ではLEDが紫外線をパルス状に照射し、点灯時の画像から消灯時の画像を引き算することにより励起光以外の外乱光の影響を削除して、油膜による励起光のみが抽出された画像とするので、外乱光の影響をなくすことができる。特にフィルターを用いて励起光を選択的に受光するようにすれば、更に好ましい結果が得られる。また本発明では油膜が付着していない、または適正量付着した状態で撮像された検査対象物の画像と比較し、検査対象物の表面の油膜を抽出するようにしたので、金型や機械ユニットの表面に形成された油膜を正確に検査することができる。なお本発明によれば、カメラで受光した励起光の光量から、油膜の厚さを検査することも可能である。 Further, in the present invention, the LED irradiates ultraviolet rays in a pulsed manner, and the influence of the disturbance light other than the excitation light is eliminated by subtracting the image when the LED is off from the image when the LED is turned on, and only the excitation light by the oil film is extracted. Since it is an image, the influence of ambient light can be eliminated. In particular, if a filter is used to selectively receive the excitation light, more preferable results can be obtained. Further, in the present invention, the oil film on the surface of the inspection object is extracted by comparing with the image of the inspection object taken with no oil film attached or with an appropriate amount attached, so that the mold and the mechanical unit are used. The oil film formed on the surface of the surface can be inspected accurately. According to the present invention, it is also possible to inspect the thickness of the oil film from the amount of excitation light received by the camera.

さらに本発明の油膜検査装置は、カバーの内部に冷却エアーを供給する構造であるので、LED照明装置を冷却することができるとともに、カメラやLED照明装置の前面をエアパージして異物や水蒸気などの付着を防止することができ、検査精度を高めることができる。 Further, since the oil film inspection device of the present invention has a structure of supplying cooling air to the inside of the cover, the LED lighting device can be cooled, and the front surface of the camera or the LED lighting device is air purged to prevent foreign matter, water vapor, etc. Adhesion can be prevented and inspection accuracy can be improved.

本発明の油膜検査装置の中央縦断面図である。It is a central vertical sectional view of the oil film inspection apparatus of this invention. 外乱光の影響を説明する斜視図である。It is a perspective view explaining the influence of ambient light. 外乱光の除去方法の説明図である。It is explanatory drawing of the method of removing ambient light. 光量と油膜の厚さとの関係を測定した結果を示すグラフである。It is a graph which shows the result of having measured the relationship between the amount of light and the thickness of an oil film. 角度と光量との関係を測定した結果を示すグラフである。It is a graph which shows the result of having measured the relationship between the angle and the amount of light. 距離と光量との関係を測定した結果を示すグラフである。It is a graph which shows the result of having measured the relationship between the distance and the amount of light. 角度と距離から、光量と油膜の厚さとの関係を補正する方法の説明図である。It is explanatory drawing of the method of correcting the relationship between the amount of light and the thickness of an oil film from an angle and a distance.

以下に本発明の実施形態を説明する。
図1は本発明の油膜検査装置の中央縦断面図であり、1はリング状のLED照明装置、2はその中心に配置されたカメラである。LED照明装置1はその前面に多数のLED3を備えている。LED3は紫外線を照射するものであり、図示しない光源制御装置によってパルス状に点滅される。
An embodiment of the present invention will be described below.
FIG. 1 is a central vertical sectional view of the oil film inspection device of the present invention, in which 1 is a ring-shaped LED lighting device and 2 is a camera arranged in the center thereof. The LED lighting device 1 is provided with a large number of LEDs 3 in front of the LED lighting device 1. The LED 3 irradiates ultraviolet rays, and is blinked in a pulsed manner by a light source control device (not shown).

カメラ2は照射された紫外線によって油膜が発生する青色の励起光を撮像する。この励起光のみを選択的に受光できるように、カメラ2の前面には励起光以外の波長の光線をカットするフィルター4が配置されている。またLED照明装置1の前面にも、必要な波長の紫外線以外の光線をカットするリング状のフィルター5が配置されている。なお、LED照明装置1から照射された紫外線が検査対象物の表面で反射してカメラ2に受光されると外乱光となるので、フィルター4はこの紫外線をもカットできる特性を持たせておくものとする。 The camera 2 captures the blue excitation light generated by the oil film due to the irradiated ultraviolet rays. A filter 4 that cuts light rays having a wavelength other than the excitation light is arranged on the front surface of the camera 2 so that only the excitation light can be selectively received. Further, a ring-shaped filter 5 that cuts light rays other than ultraviolet rays having a required wavelength is also arranged on the front surface of the LED lighting device 1. When the ultraviolet rays emitted from the LED lighting device 1 are reflected on the surface of the object to be inspected and received by the camera 2, they become ambient light. Therefore, the filter 4 is provided with a characteristic that can also block the ultraviolet rays. And.

これらのLED照明装置1とカメラ2との背面は、樹脂製または金属製のカバー6によって覆われている。この実施形態ではカバー6の形状は円錐台であり、エアー供給手段10から流路7を通じて、カバー6の内部に冷却エアーが供給されている。LED照明装置1の外周とカバー6との間には、全周にわたり冷却エアーの噴出流路8が形成されており、図示するように前面に冷却エアーを噴出している。この冷却エアーは発熱するLED照明装置1を冷却する役割と、カメラ2やLED照明装置1の前面をエアパージして異物や水蒸気の付着を防止する役割とを持つ。噴出流路8の隙間幅は0.5mm〜3mm程度が好ましい。 The back surfaces of the LED lighting device 1 and the camera 2 are covered with a resin or metal cover 6. In this embodiment, the shape of the cover 6 is a truncated cone, and cooling air is supplied from the air supply means 10 to the inside of the cover 6 through the flow path 7. A cooling air ejection flow path 8 is formed over the entire circumference between the outer periphery of the LED lighting device 1 and the cover 6, and cooling air is ejected to the front surface as shown in the figure. This cooling air has a role of cooling the LED lighting device 1 that generates heat and a role of air purging the front surface of the camera 2 and the LED lighting device 1 to prevent the adhesion of foreign matter and water vapor. The gap width of the ejection flow path 8 is preferably about 0.5 mm to 3 mm.

これらの全体はブラケット9に支持されており、LED照明装置1から検査対象物の表面に紫外線をパルス状に照射し、検査対象物の表面に油膜がある場合には油膜が発生する励起光をカメラ2で受光することにより、油膜を検査するものである。 All of these are supported by the bracket 9, and the LED lighting device 1 irradiates the surface of the inspection object with ultraviolet rays in a pulsed manner, and when there is an oil film on the surface of the inspection object, the excitation light generated by the oil film is emitted. The oil film is inspected by receiving light from the camera 2.

前記したように、本発明の油膜検査装置は、金型や機械ユニットの表面に形成された油膜を検査することを目的としている。検査対象物は具体的にはエンジンやトランスミッションなどの内部に油を有するユニットや、ダイカスト、鍛造、焼結などの金型などである。これらの検査対象物の油漏れや潤滑油の塗布状態を全数検査することを想定した場合には、図2に模式的に示すように、本発明の油膜検査装置を検査対象物に対して一定の位置関係を維持するようにセットし、検査対象物を送り込んでその表面を検査すればよい。 As described above, the oil film inspection apparatus of the present invention aims to inspect an oil film formed on the surface of a mold or a mechanical unit. Specifically, the inspection target is a unit having oil inside such as an engine or a transmission, a die for die casting, forging, sintering, or the like. Assuming that 100% of the oil leaks and the coating state of the lubricating oil of these inspection objects are inspected, the oil film inspection apparatus of the present invention is constant with respect to the inspection objects, as schematically shown in FIG. It is sufficient to set so as to maintain the positional relationship of the above, send the inspection object, and inspect the surface.

本発明の油膜検査装置ではLED照明装置1とカメラ2とが一体化されているため、検査対象物への紫外線の照射距離、照射強度、励起光の受光距離等を常に一定に保つことができる。しかしこの際に図2に示すように外乱光が入り、検査対象物の表面で反射してカメラ2に受光されると、検査精度が低下することとなる。外乱光自体を完全に遮断することは容易ではないが、上記したようにフィルター4によって励起光のみを選択受光することによって、外乱光の影響を抑制することができる。 In the oil film inspection device of the present invention, since the LED lighting device 1 and the camera 2 are integrated, the irradiation distance of ultraviolet rays, the irradiation intensity, the reception distance of excitation light, and the like on the inspection object can always be kept constant. .. However, at this time, if ambient light enters as shown in FIG. 2, is reflected by the surface of the inspection object, and is received by the camera 2, the inspection accuracy is lowered. Although it is not easy to completely block the disturbance light itself, the influence of the disturbance light can be suppressed by selectively receiving only the excitation light by the filter 4 as described above.

更に本発明では、LED照明装置1をパルス状に点滅させ、点灯時に撮影した画像と消灯時に撮影した画像を比較することにより、励起光以外の外乱光の影響を削除している。図3はその原理を示す模式図であり、点灯時の画像から消灯時の画像を引き算すると、油膜による励起光のみが抽出された画像を得ることができる。なおこれらの画像は白黒に二値化されたものではなく、各点が輝度データを持つので、油膜の厚さに応じた輝度の画像を得ることができる。本発明ではその画像を、油膜が付着していない、または適正量付着した状態で撮像された検査対象物の画像と比較することにより、良否の判断をすることができる。 Further, in the present invention, the LED lighting device 1 is blinked in a pulse shape, and the influence of the ambient light other than the excitation light is eliminated by comparing the image taken when the LED lighting device 1 is turned on with the image taken when the LED lighting device 1 is turned off. FIG. 3 is a schematic diagram showing the principle, and by subtracting the image when the light is off from the image when the light is on, an image in which only the excitation light from the oil film is extracted can be obtained. Since these images are not binarized to black and white and each point has luminance data, it is possible to obtain an image of luminance according to the thickness of the oil film. In the present invention, the quality can be judged by comparing the image with the image of the inspection object captured with no oil film attached or with an appropriate amount attached.

金型や機械ユニットの表面は平坦ではなく、傾斜していたりカメラ2との距離が部位によってさまざまである。しかし上記したように、検査対象物の全数検査を行う場合には、検査対象物の形状は一定であるから、この画像処理によって精度よく油膜の検査が可能となる。 The surface of the mold or the mechanical unit is not flat, is inclined, or the distance from the camera 2 varies depending on the part. However, as described above, when 100% inspection of the inspection target is performed, the shape of the inspection target is constant, so that the oil film can be inspected with high accuracy by this image processing.

上記したように、本発明によれば油漏れの有無や潤滑油の塗布量の過不足を正確に検査することが可能となるが、単に油膜の有無や過不足を検査するにとどまらず、以下に説明するように、油膜の量を定量的に測定することも可能となる。 As described above, according to the present invention, it is possible to accurately inspect the presence or absence of oil leakage and the excess or deficiency of the amount of lubricating oil applied, but it is not limited to simply inspecting the presence or absence of an oil film and the excess or deficiency. As explained in the above, it is also possible to quantitatively measure the amount of the oil film.

まず金型や機械ユニットの場合には、測定対象とする油種は、測定に先立ち予め特定することができる。そして測定対象となる油種について、油膜の量に違いによって励起光の量がどのように変化するかの関係についての相関を確認する。例えば図4は、ある油種について、本発明の油膜検査装置を用いて、油膜の厚さとカメラ2で受光された励起光の光量との関係を測定した結果を示している。 First, in the case of a mold or a mechanical unit, the oil type to be measured can be specified in advance prior to the measurement. Then, for the oil type to be measured, the correlation regarding how the amount of excitation light changes depending on the amount of the oil film is confirmed. For example, FIG. 4 shows the result of measuring the relationship between the thickness of the oil film and the amount of excitation light received by the camera 2 for a certain oil type using the oil film inspection apparatus of the present invention.

しかし、金型や機械ユニットの表面は水面のような平坦面ではなく、傾斜している部分がある。また、測定ポイントからカメラレンズまでの距離もさまざまである。このためカメラ2で受光した光量は、測定ポイントの傾きとカメラレンズまでの距離の影響を受けていることとなるから、光量から油膜の厚さを測定するためには、これらの影響を考慮して補正しなければならない。 However, the surface of the mold or mechanical unit is not a flat surface such as the water surface, but has an inclined part. Also, the distance from the measurement point to the camera lens varies. Therefore, the amount of light received by the camera 2 is affected by the inclination of the measurement point and the distance to the camera lens. Therefore, in order to measure the thickness of the oil film from the amount of light, these effects are taken into consideration. Must be corrected.

図5は油膜の厚さを一定とし、表面の傾斜角度と光量の関係を示したグラフである。また図6は、油膜の厚さを一定とし、表面の傾斜角度をゼロとしたときの、カメラレンズまでの距離と光量との関係を示したグラフである。それぞれの図中に、カメラ2の画像を併せて表示した。これらのグラフは、傾斜角度やカメラレンズまでの距離と撮影された画像の輝度値から、回帰分析によって算出したものである。なお、図中に示した回帰式は一例を示すものであり、個々の条件によって変わることは、言うまでもない。測定対象となる金型や機械ユニットの形状や表面の凹凸は設計データなどから事前に把握することができるので、検査対象物の部位ごとに傾斜角度とカメラレンズまでの距離を演算しておく。 FIG. 5 is a graph showing the relationship between the inclination angle of the surface and the amount of light with the thickness of the oil film kept constant. Further, FIG. 6 is a graph showing the relationship between the distance to the camera lens and the amount of light when the thickness of the oil film is constant and the inclination angle of the surface is zero. The image of the camera 2 is also displayed in each figure. These graphs are calculated by regression analysis from the tilt angle, the distance to the camera lens, and the brightness value of the captured image. It should be noted that the regression equation shown in the figure is an example, and it goes without saying that it changes depending on individual conditions. Since the shape and surface irregularities of the mold and machine unit to be measured can be grasped in advance from design data, etc., the inclination angle and the distance to the camera lens are calculated for each part of the inspection target.

例えば検査対象物の表面形状が図7のような溝形状であるとすると、丸付き数字出示した1、5、9の各点の傾斜角度はほぼ0°であるが、2、3、4、6、7、8の各点の傾斜角度は約80°である。また1、9の点はカメラレンズまでの距離が近いが、その他の点は順次遠くなっている。 For example, assuming that the surface shape of the inspection object is a groove shape as shown in FIG. 7, the inclination angles of the points 1, 5, and 9 shown by the circled numbers are approximately 0 °, but 2, 3, 4, The inclination angle of each of the points 6, 7 and 8 is about 80 °. The points 1 and 9 are close to the camera lens, but the other points are gradually farther away.

これらの各測定ポイントごとに、傾斜角度とカメラレンズまでの距離が光量に及ぼす影響を回帰式を用いて係数化し、図4に示された油膜の厚さと光量との関係式を補正する。この結果、各測定ポイントごとに光量から油膜の厚さを演算することが可能となる。そして油膜の膜厚がOKの範囲(例えば10〜100μmの範囲)を各測定ポイントごとに表示すると、例えば図7の右端の図のようになる。 For each of these measurement points, the effects of the tilt angle and the distance to the camera lens on the amount of light are coefficiented using a regression equation, and the relational expression between the thickness of the oil film and the amount of light shown in FIG. 4 is corrected. As a result, it is possible to calculate the thickness of the oil film from the amount of light for each measurement point. Then, when the range in which the film thickness of the oil film is OK (for example, the range of 10 to 100 μm) is displayed for each measurement point, the figure at the right end of FIG. 7 is obtained, for example.

このように、測定対象となる油種と検査対象物の形状データを用いて、事前に各測定ポイントごとの油膜の厚さと光量との関係式を準備しておけば、検査対象物を次々と本発明の油膜検査装置に送り込み、油漏れの有無や、潤滑油の塗布量の適否などを、自動的に検査することが可能となる。 In this way, if the relational expression between the oil film thickness and the amount of light for each measurement point is prepared in advance using the shape data of the oil type to be measured and the inspection target, the inspection targets can be inspected one after another. It can be sent to the oil film inspection device of the present invention to automatically inspect whether or not there is an oil leak and whether or not the amount of lubricating oil applied is appropriate.

以上に説明したように、本発明によれば、多額の設備コストを要することなく、金型や機械ユニットの表面に形成された油膜の有無や膜厚を正確に検査することができる利点がある。 As described above, according to the present invention, there is an advantage that the presence or absence of an oil film formed on the surface of a mold or a mechanical unit and the film thickness can be accurately inspected without requiring a large equipment cost. ..

1 LED照明装置
2 カメラ
3 LED
4 フィルター
5 フィルター
6 カバー
7 流路
8 噴出流路
9 ブラケット
10 エアー供給手段
1 LED lighting device 2 camera 3 LED
4 Filter 5 Filter 6 Cover 7 Flow path 8 Ejection flow path 9 Bracket 10 Air supply means

Claims (6)

リング状のLED照明装置から検査対象物の表面に紫外線をパルス状に点滅させて照射し、前記表面に付着している油膜が発する励起光を前記LED照明装置の中心に配置されたカメラで受光し、点灯時の画像から消灯時の画像を引き算することにより励起光以外の外乱光の影響を削除して、油膜による励起光のみが抽出された画像とし、その画像を油膜が付着していない、または適正量付着した状態で撮像された検査対象物の画像と比較し、検査対象物の表面の油膜を検査することを特徴とする油膜検査方法。 It irradiated by blinking the ultraviolet pulsed to the surface of the test object from the ring-shaped LED lighting device, receiving the excitation light oil film emitted attached to said surface by a camera which is arranged in the center of the LED lighting device Then, by subtracting the image when the light is off from the image when the light is on, the influence of the disturbance light other than the excitation light is removed to obtain an image in which only the excitation light by the oil film is extracted, and the image is not attached with the oil film. Or, an oil film inspection method characterized by inspecting an oil film on the surface of an inspection object by comparing it with an image of the inspection object taken with an appropriate amount attached. カメラで受光した励起光の光量から、油膜の厚さを検査することを特徴とする請求項1に記載の油膜検査方法。 The oil film inspection method according to claim 1, wherein the thickness of the oil film is inspected from the amount of excitation light received by the camera. 検査対象物の表面の各測定ポイントについて、傾斜角度とカメラレンズまでの距離に応じて、励起光の光量と油膜の厚さとの関係を補正することを特徴とする請求項2に記載の油膜検査方法。 The oil film inspection according to claim 2, wherein the relationship between the amount of excitation light and the thickness of the oil film is corrected according to the tilt angle and the distance to the camera lens for each measurement point on the surface of the inspection object. Method. 紫外線をパルス状に点滅させて照射する多数のLEDを備えたリング状のLED照明装置と、このLED照明装置の中心に配置されたカメラと、これらのLED照明装置及びカメラの背面を覆うカバーと、このカバーの内部に冷却エアーを供給するエアー供給手段と、点灯時の画像から消灯時の画像を引き算することにより励起光以外の外乱光の影響を削除して、油膜による励起光のみが抽出された画像とし、その画像を油膜が付着していない、または適正量付着した状態で撮像された検査対象物の画像と比較し、検査対象物の表面の油膜を検査する演算手段とを備えたことを特徴とする油膜検査装置。 A ring-shaped LED lighting device equipped with a large number of LEDs that blink and irradiate ultraviolet rays in a pulsed manner, a camera arranged in the center of the LED lighting device, and a cover covering the back of these LED lighting devices and the camera. By subtracting the image when the light is off from the image when the light is off and the air supply means that supplies the cooling air inside this cover, the influence of the disturbance light other than the excitation light is removed, and only the excitation light by the oil film is extracted. This image is provided with a calculation means for inspecting the oil film on the surface of the inspection object by comparing the image with the image of the inspection object taken with no oil film attached or with an appropriate amount attached . An oil film inspection device characterized by this. 前記LED照明装置とカメラの前面に、それぞれフィルターを配置したことを特徴とする請求項4に記載の油膜検査装置。 The oil film inspection device according to claim 4, wherein filters are arranged on the front surface of the LED lighting device and the camera, respectively. 前記LED照明装置の外周と前記カバーとの間に、冷却エアーの噴出流路を形成したことを特徴とする請求項4に記載の油膜検査装置。 The oil film inspection device according to claim 4, wherein a cooling air ejection flow path is formed between the outer periphery of the LED lighting device and the cover.
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