JP6715694B2 - Plasma spraying equipment - Google Patents
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本発明は、プラズマ溶射によって基材上に金属皮膜等を形成するプラズマ溶射装置に関する。 The present invention relates to a plasma spray apparatus that forms a metal film or the like on a base material by plasma spraying.
アモルファス相を有する合金は、耐食性や耐摩耗性などの高機能材料として有望である。 Alloys having an amorphous phase are promising as highly functional materials such as corrosion resistance and wear resistance.
アモルファス相を有する合金の製法として、例えば特許文献１及び特許文献２には、溶融した合金を鋳型に流し込み、急冷凝固することでアモルファス相を得る方法（急冷凝固法）が記載されている。しかし、上述した急冷凝固法では作製可能なアモルファス相を有する合金の大きさが限られており、大面積のアモルファス相を有する合金の薄膜（皮膜）を作製することは困難である。 As a method for producing an alloy having an amorphous phase, for example, Patent Literature 1 and Patent Literature 2 describe a method (a rapid solidification method) in which a molten alloy is poured into a mold and rapidly solidified to obtain an amorphous phase. However, the size of the alloy having an amorphous phase that can be produced by the above-described rapid solidification method is limited, and it is difficult to produce a large-area alloy thin film (film).
これに対して、アモルファス相を有する合金の薄膜を形成する技術として溶射法が知られている。例えば特許文献３では、フレーム溶射ガンに二重管ノズルを装着して、二重管の間隙から窒素ガスを溶融した材料に吹きかけ、急冷することで、基材へアモルファス相を有する合金の薄膜を形成している（フレーム溶射法）。 On the other hand, a thermal spraying method is known as a technique for forming a thin film of an alloy having an amorphous phase. For example, in Patent Document 3, a double-tube nozzle is attached to a flame spray gun, nitrogen gas is sprayed from a gap between the double tubes onto a molten material, and the material is rapidly cooled to form a thin film of an alloy having an amorphous phase on a base material. Formed (flame spraying method).
しかしながら、フレーム溶射法では主にアセチレンガスやプロピレンなどの燃焼ガスと酸素ガス(助燃ガス)により、フレームを形成しているため、酸化しやすい溶射材料を用いた際、酸化物が生成されやすく、酸化物が核となり、結晶化を促進するため、アモルファス相の形成が阻害される。特許文献３では、アセチレン量を増量し酸素を減量して形成する還元炎を用いているが、不完全燃焼により炭素の微粒子（すす）が発生するため、これが溶射皮膜中に混入し不純物となる問題がある。 However, in the flame spraying method, the combustion gas such as acetylene gas and propylene and the oxygen gas (supporting gas) are mainly used to form the flame. The oxide serves as a nucleus and promotes crystallization, which hinders the formation of an amorphous phase. In Patent Document 3, a reducing flame that is formed by increasing the amount of acetylene and decreasing the amount of oxygen is used, but fine particles (soot) of carbon are generated due to incomplete combustion, and this is mixed into the thermal spray coating and becomes an impurity. There's a problem.
一方、プラズマ溶射法は、高温で高速のプラズマジェットに溶射材料を供給して溶融し、かつ、高速で基材に飛行させ、基材へ皮膜を形成する溶射法の一つとして一般的なものである。例えば非特許文献１には、電極間の直流アークでガス（アルゴンガス、窒素ガスなど）を電離させ、ノズルより噴出させた高温の熱プラズマをノズルより高速で外部に噴出させ、この高温・高速の熱プラズマを粉末の加速・加熱に利用したプラズマ溶射法が記載されている。 On the other hand, the plasma spraying method is generally used as one of the spraying methods of supplying a spraying material to a high-speed and high-speed plasma jet to melt it and flying it to a base material at a high speed to form a film on the base material. Is. For example, in Non-Patent Document 1, a DC arc between electrodes is used to ionize gas (argon gas, nitrogen gas, etc.), and high temperature thermal plasma ejected from a nozzle is ejected to the outside at a higher speed than the nozzle. The plasma spraying method is described in which the thermal plasma is used to accelerate and heat the powder.
プラズマ溶射法では、溶射材料が金属等の酸化しやすい場合、プラズマとして電離させるガスにアルゴンガスや窒素ガスなどの不活性ガスを用いることで、フレーム溶射法に比べ、溶射材料の酸化の問題は軽減される。しかし、大気雰囲気でプラズマ溶射を行うと加熱された溶射材料は大気中の酸素ガスと反応し、酸化物を形成するため、依然として溶射材料の酸化の問題はある。溶射材料が酸化すると、元の溶射材料と溶射皮膜の組成が異なることなり、所望の性能が得られないことがある。 In the plasma spraying method, when the spraying material is easily oxidized such as metal, by using an inert gas such as argon gas or nitrogen gas as the gas to be ionized as plasma, the problem of oxidation of the spraying material can be reduced as compared with the flame spraying method. Will be reduced. However, when plasma spraying is performed in the air atmosphere, the heated sprayed material reacts with oxygen gas in the air to form an oxide, so that there is still a problem of oxidation of the sprayed material. When the thermal spray material is oxidized, the composition of the original thermal spray material and the thermal spray coating may be different, and the desired performance may not be obtained.
そこで、非特許文献１には、主にアルゴンガスを雰囲気ガスとした制御された減圧下で、プラズマ溶射を行うことで、酸化を防止することが記載されているが、減圧雰囲気を作るための専用のチャンバーやそのチャンバーの大きさにより基材の大きさが制限される。しかも、溶射材料がアモルファス相を形成する合金の場合、減圧雰囲気下では溶射材料の冷却速度が遅く、アモルファス相を形成しにくいという問題がある。 Therefore, Non-Patent Document 1 describes that plasma spraying is performed under a controlled reduced pressure mainly using an argon gas as an atmospheric gas to prevent oxidation, but for creating a reduced pressure atmosphere. The size of the substrate is limited by the dedicated chamber and the size of the chamber. Moreover, in the case where the thermal spray material is an alloy forming an amorphous phase, there is a problem that the cooling rate of the thermal spray material is slow in a reduced pressure atmosphere and it is difficult to form the amorphous phase.
加えて、プラズマ溶射法では、その作動温度が数万℃と非常に高く、しかもプラズマジェットが高速の流れであるため、溶射装置への熱影響が大きく、溶射装置、特にプラズマジェットに対面する部位が溶損しやすいという問題もある。上述のフレーム溶射法では、フレーム温度は高々３０００℃程度であり、上述の特許文献３では、二重管の間隙から窒素ガスを流すことで二重管内筒の冷却を行うため、内筒への熱影響は小さく、また、フレーム流速も小さいため、内筒内での乱流は生じず、内筒の溶損はない。これに対し、プラズマ溶射法において特許文献３のような二重管構造を単純に適用したとしても、上述の理由から内筒が溶損する可能性が大いにある。 In addition, in the plasma spraying method, the operating temperature is very high at tens of thousands of degrees Celsius, and since the plasma jet is a high-speed flow, the thermal effect on the thermal spraying device is large, and the part facing the thermal spraying device, particularly the plasma jet, is large. However, there is also a problem that it is easily melted. In the flame spraying method described above, the flame temperature is about 3000° C. at most, and in the above-mentioned Patent Document 3, since the double tube inner cylinder is cooled by flowing the nitrogen gas from the gap between the double tubes, Since the heat effect is small and the frame flow velocity is also small, turbulent flow does not occur in the inner cylinder, and there is no melting loss in the inner cylinder. On the other hand, even if the double-tube structure as in Patent Document 3 is simply applied in the plasma spraying method, there is a great possibility that the inner cylinder will be melted and damaged due to the above reason.
以上のように、従来のプラズマ溶射法では、溶融した溶射材料が大気に晒され、大気中の酸素により意図せず酸化が起こるため、溶射皮膜の品質低下を引き起こすことがある。また、溶射材料の酸化防止のためプラズマ溶射を減圧雰囲気下で行うと、十分な冷却速度が得られず、基材の大きさも制限される。さらに、従来のプラズマ溶射法では、溶射装置が溶損しやすい。 As described above, in the conventional plasma spraying method, the molten sprayed material is exposed to the atmosphere, and the oxygen in the atmosphere unintentionally oxidizes it, which may cause deterioration of the quality of the sprayed coating. Further, if plasma spraying is performed in a reduced pressure atmosphere to prevent oxidation of the sprayed material, a sufficient cooling rate cannot be obtained, and the size of the base material is also limited. Furthermore, in the conventional plasma spraying method, the thermal spraying device is likely to be melted.
本発明が解決しようとする課題は、溶射材料の酸化防止を図りつつ十分な冷却速度を確保でき、しかも装置の溶損も防止できるプラズマ溶射装置を提供することにある。 The problem to be solved by the present invention is to provide a plasma spraying apparatus capable of ensuring a sufficient cooling rate while preventing oxidation of the sprayed material, and also capable of preventing melting damage of the apparatus.
本発明のプラズマ溶射装置は、プラズマジェットを噴射するプラズマ噴射部と、前記プラズマ噴射部から噴射されるプラズマジェットを囲むように配置され、先端が開放された二重円筒部と、前記二重円筒部の内筒内に不活性ガスを噴射する不活性ガス噴射部と、前記二重円筒部の内筒内に溶射材料を供給する材料供給部と、前記二重円筒部の外筒と内筒の間に不活性ガスを供給するガス供給部と、を有することを特徴とするものである。 The plasma spraying apparatus of the present invention includes a plasma jetting unit for jetting a plasma jet, a double cylindrical portion which is arranged so as to surround the plasma jet jetted from the plasma jetting unit, and has an open tip, and the double cylinder. Gas injection section for injecting an inert gas into the inner cylinder of the double cylinder section, a material supply section for supplying a thermal spray material into the inner cylinder of the double cylinder section, and an outer cylinder and an inner cylinder of the double cylinder section. And a gas supply section for supplying an inert gas between the two.
本発明のプラズマ溶射装置では、二重円筒部の内筒内に不活性ガスが噴射されるとともに、二重円筒部の先端からもガス供給部から供給された不活性ガスが噴射される。これらの不活性ガスの存在により、溶射材料の酸化防止を図ることができる。また、二重円筒部の内筒内に不活性ガスを噴射することで、十分な冷却速度を確保でき、しかも二重円筒部の内筒の溶損も防止できる。 In the plasma spraying apparatus of the present invention, the inert gas is injected into the inner cylinder of the double cylinder portion, and the inert gas supplied from the gas supply portion is also injected from the tip of the double cylinder portion. The presence of these inert gases can prevent oxidation of the thermal spray material. Further, by injecting the inert gas into the inner cylinder of the double cylinder portion, a sufficient cooling rate can be secured, and further, the melting damage of the inner cylinder of the double cylinder portion can be prevented.
このように、本発明のプラズマ溶射装置によれば、酸化しやすい溶射材料（アモルファス相を有する合金）であっても、減圧雰囲気にすることなく大気雰囲気において十分な冷却速度をもって溶射を行うことができる。このため、本発明のプラズマ溶射装置は、装置構成が簡単で小型化することができ、操作性も良好であり、大面積基材への溶射皮膜（アモルファス相を有する合金の皮膜）の形成を容易に行うことができる。さらに、溶射皮膜（アモルファス相を有する合金の皮膜）の品質も良好となる。 As described above, according to the plasma spraying apparatus of the present invention, even a spraying material (alloy having an amorphous phase) that is easily oxidized can be sprayed at a sufficient cooling rate in an air atmosphere without a reduced pressure atmosphere. it can. Therefore, the plasma spraying apparatus of the present invention has a simple apparatus configuration, can be downsized, has good operability, and can form a sprayed coating (a coating of an alloy having an amorphous phase) on a large-area substrate. It can be done easily. Further, the quality of the sprayed coating (coating of an alloy having an amorphous phase) becomes good.
図１は、本発明のプラズマ溶射装置の一実施形態を示す断面図である。同図に示すプラズマ溶射装置は、プラズマ噴射部１と、二重円筒部２と、不活性ガス噴射部３と、ガス供給部４と、材料供給部５とを有する。 FIG. 1 is a sectional view showing an embodiment of the plasma spraying apparatus of the present invention. The plasma spraying apparatus shown in the figure includes a plasma spraying unit 1, a double cylinder unit 2, an inert gas spraying unit 3, a gas supply unit 4, and a material supply unit 5.
プラズマ溶射部１は、プラズマ発生器１Ａの先端に設けており、プラズマ発生器１Ａで発生したプラズマをプラズマジェットとして噴射する。プラズマ発生器１Ａは、内筒体２Ａの基端側に装着されており、作動ガスとしてアルゴンガス、窒素ガスなどを使用してプラズマを発生させる。 The plasma spraying unit 1 is provided at the tip of the plasma generator 1A and injects the plasma generated by the plasma generator 1A as a plasma jet. The plasma generator 1A is mounted on the base end side of the inner cylindrical body 2A and generates plasma by using argon gas, nitrogen gas or the like as a working gas.
二重円筒部２は、内筒体２Ａの先端側と外筒体２Ｂとで構成され、プラズマ噴射部１から噴射されるプラズマジェットを囲むように配置されている。二重円筒部２の先端は開放されており、これにより二重円筒部２の先端にはリング状の連続したスリットが形成されている。 The double cylindrical portion 2 is composed of the distal end side of the inner cylindrical body 2A and the outer cylindrical body 2B, and is arranged so as to surround the plasma jet ejected from the plasma ejecting portion 1. The tip of the double cylinder portion 2 is open, so that a ring-shaped continuous slit is formed at the tip of the double cylinder portion 2.
不活性ガス噴射部３は、二重円筒部２の内筒（内筒体２Ａの先端側）内にアルゴンガスや窒素ガスなどの不活性ガスを噴射する。本実施形態では、内筒体２Ａの内周面とプラズマ発生器１Ａの外周面との間の隙間がガス通過路３Ａとなっており、このガス通過路３Ａの先端が不活性ガス噴射部３となっている。すなわち、本実施形態の不活性ガス噴射部３は、リング状の連続したスリットからなり、プラズマジェットの流れ方向においてプラズマ噴射部１より上流側又は同位置に位置する。そして、不活性ガス供給部３Ｂから供給された不活性ガスが、ガス通過路３Ａを通って不活性ガス噴射部３からプラズマジェットの流れに沿うように噴射される。 The inert gas injection part 3 injects an inert gas such as argon gas or nitrogen gas into the inner cylinder of the double cylinder part 2 (the tip side of the inner cylinder 2A). In the present embodiment, the gap between the inner peripheral surface of the inner cylindrical body 2A and the outer peripheral surface of the plasma generator 1A is the gas passage 3A, and the tip of this gas passage 3A is the inert gas injection part 3. Has become. That is, the inert gas injection part 3 of the present embodiment is composed of a ring-shaped continuous slit and is located upstream or at the same position as the plasma injection part 1 in the flow direction of the plasma jet. Then, the inert gas supplied from the inert gas supply unit 3B is injected along the flow of the plasma jet from the inert gas injection unit 3 through the gas passage 3A.
ガス供給部４は、二重円筒部２の外筒と内筒の間に不活性ガスを供給する。この不活性ガスは、二重円筒部２の外筒と内筒の間の隙間を通って二重円筒部２の先端のリング状のスリットから、溶射材料を含むプラズマジェットを囲むように噴射される。また、材料供給部５は、二重円筒部２の内筒内に溶射材料を供給する。 The gas supply unit 4 supplies an inert gas between the outer cylinder and the inner cylinder of the double cylinder portion 2. The inert gas is injected through the gap between the outer cylinder and the inner cylinder of the double cylindrical portion 2 from the ring-shaped slit at the tip of the double cylindrical portion 2 so as to surround the plasma jet containing the spray material. It Further, the material supply unit 5 supplies the thermal spray material into the inner cylinder of the double cylindrical portion 2.
なお、上述した二重円筒部２及び不活性ガス噴射部３は、プラズマジェット（プラズマ噴射部１）を中心とした同心円状の配置となっている。 The double cylinder portion 2 and the inert gas injection portion 3 described above are arranged concentrically around the plasma jet (plasma injection portion 1).
以上の構成において、材料供給部５から供給された溶射材料は、二重円筒部２の内筒内でプラズマジェットにより急加熱され一旦溶融状態となるが、二重円筒部２の内筒内には不活性ガス噴射部３から不活性ガスが噴射されているので、この不活性ガスによって溶融した溶射材料は急冷され半溶融状態となり、二重円筒部２の先端部から噴射される。そして、二重円筒部２の先端部から噴射された溶射材料は、二重円筒部２の先端のリング状のスリットから噴射された不活性ガスによって囲まれて大気と遮断された状態で基材に到達する。 In the above-described configuration, the thermal spray material supplied from the material supply unit 5 is rapidly heated by the plasma jet in the inner cylinder of the double cylindrical portion 2 and is once in a molten state. Since the inert gas is injected from the inert gas injection part 3, the sprayed material melted by this inert gas is rapidly cooled and becomes a semi-molten state, and is injected from the tip part of the double cylinder part 2. The thermal spray material sprayed from the tip of the double cylinder 2 is surrounded by the inert gas sprayed from the ring-shaped slit at the tip of the double cylinder 2, and is shielded from the atmosphere. To reach.
このように本発明のプラズマ溶射装置では、プラズマジェットで溶融された溶射材料は、二重円筒部２の内筒内で不活性ガスによって急冷され、引き続き、二重円筒部２の先端のリング状のスリットから噴射された不活性ガスによって囲まれて大気と遮断された状態で基材に到達するので、溶射材料の酸化防止を図ることができる。また、二重円筒部２の内筒内に不活性ガスを噴射して溶射材料を急冷することで十分な冷却速度を確保でき、しかも二重円筒部２の内筒の溶損も防止できる。 As described above, in the plasma spraying apparatus of the present invention, the spraying material melted by the plasma jet is rapidly cooled by the inert gas in the inner cylinder of the double cylindrical portion 2, and subsequently, in the ring shape at the tip of the double cylindrical portion 2. Since it reaches the base material while being surrounded by the inert gas injected from the slit and being shielded from the atmosphere, it is possible to prevent the thermal spray material from being oxidized. Further, by injecting an inert gas into the inner cylinder of the double cylindrical portion 2 to rapidly cool the sprayed material, a sufficient cooling rate can be ensured, and further, melting damage of the inner cylinder of the double cylindrical portion 2 can be prevented.
さらに、本実施形態において不活性ガス噴射部３は、プラズマジェットの流れ方向においてプラズマ噴射部１より上流側又は同位置に位置するので、不活性ガス噴射部３の溶損も防止できる。 Further, in the present embodiment, the inert gas injection unit 3 is located upstream or at the same position as the plasma injection unit 1 in the flow direction of the plasma jet, so that the inert gas injection unit 3 can be prevented from being melted.
加えて、本実施形態において不活性ガス噴射部３は、プラズマジェットの流れに沿うように不活性ガスを噴射するので、不活性ガスがプラズマジェットの流れを乱すことはなく、むしろ整流効果をもたらす。これにより、プラズマジェットの内筒への熱影響を抑えるとともに、溶射材料をスムーズにプラズマジェットへ投入することができる。 In addition, in the present embodiment, since the inert gas injection unit 3 injects the inert gas along the flow of the plasma jet, the inert gas does not disturb the flow of the plasma jet, but rather provides a rectifying effect. .. As a result, the thermal effect of the plasma jet on the inner cylinder can be suppressed, and the thermal spray material can be smoothly introduced into the plasma jet.
このような整流効果を十分にもたらすには、不活性ガス噴射部３から噴射する不活性ガスの流速は、プラズマジェットと同程度の３００〜６００ｍ／ｓ程度とすることが好ましい。上記ガス流速を与えるためには不活性ガス噴射部３から噴射する噴射ガスの流量に応じた開口面積が必要であり、算出することができる。すなわち不活性ガス噴出部３の開口面積は２０〜７０ｍｍ２程度（不活性ガス噴射部３から噴射する噴射ガスの流量は、４００〜１２００Ｌ／ｍｉｎ程度）が好ましい。さらに好ましくは開口面積２０〜５０ｍｍ２程度（噴出ガス流量は、５００〜１２００Ｌ／ｍiｎ程度）である。 In order to sufficiently bring about such a rectifying effect, it is preferable that the flow velocity of the inert gas injected from the inert gas injection unit 3 be about 300 to 600 m/s, which is about the same as that of the plasma jet. In order to give the gas flow velocity, an opening area corresponding to the flow rate of the injection gas injected from the inert gas injection unit 3 is necessary and can be calculated. That is, the opening area of the inert gas ejection portion 3 is preferably about 20 to 70 mm 2 (the flow rate of the ejection gas ejected from the inert gas ejection portion 3 is about 400 to 1200 L/min). More preferably, the opening area is about 20 to 50 mm 2 (jet gas flow rate is about 500 to 1200 L/min).
なお、本実施形態において不活性ガス噴射部３は、リング状の連続したスリットとしたが、リング状に複数の開孔を均等に配列してもよい。この場合も、開口面積は合計で２０〜７０ｍｍ２とすることが好ましい。 In addition, in this embodiment, the inert gas injection part 3 is a continuous slit having a ring shape, but a plurality of openings may be evenly arranged in a ring shape. Also in this case, the total opening area is preferably 20 to 70 mm 2 .
図１に示す装置を用いて行った溶射試験を以下の手順により行った。 A thermal spraying test performed using the apparatus shown in FIG. 1 was performed according to the following procedure.
（１）試験方法
図１に示すプラズマ溶射装置（不活性ガス噴出部３の開口面積：５０ｍｍ２）を用い、ＳＳ４００鋼板上に厚み１００μｍ以上のＳＵＳ３１６溶射皮膜、Ｎｉ基アモルファス合金溶射皮膜を作製した。プラズマ溶射機はエリコンメテコ製９Ｍを使用した。
(1) Test method Using the plasma spraying apparatus shown in FIG. 1 (opening area of the inert gas jetting part 3: 50 mm 2 ), a SUS316 sprayed coating having a thickness of 100 μm or more and a Ni-based amorphous alloy sprayed coating were produced on an SS400 steel plate. .. As the plasma spraying machine, 9M manufactured by Oerlikon Metco was used.
まず、鋼板に対しアルミナグリッドもしくはスチールグリッドにより表面をブラスト処理した。次に図１に示すプラズマ溶射装置により、ＳＵＳ３１６、Ｎｉ基アモルファス合金を鋼材表面に溶射した。その際の試験条件を表１に示す。本発明としては実施例１、２の条件にて急冷プラズマ溶射を行い、従来技術として比較例１、２、３、４の条件にて溶射した。なお、比較例１、２のプラズマ溶射では、図１に示すプラズマ溶射装置において二重円筒部を設けずにプラズマ溶射機（エリコンメテコ製９Ｍ）のみを用いて溶射した。また、比較例３、４の急冷ガスフレーム溶射では、上記特許文献３（特開２０１０−２２８９５号公報）の装置を使用した。 First, the surface of a steel plate was blasted with an alumina grid or a steel grid. Next, SUS316 and a Ni-based amorphous alloy were sprayed on the surface of the steel material by the plasma spraying apparatus shown in FIG. Table 1 shows the test conditions at that time. As the present invention, rapid plasma spraying was performed under the conditions of Examples 1 and 2, and as a conventional technique, thermal spraying was performed under the conditions of Comparative Examples 1, 2, 3, and 4. In the plasma spraying of Comparative Examples 1 and 2, the plasma spraying apparatus shown in FIG. 1 was not provided with the double cylinder portion and was sprayed using only the plasma spraying machine (9M manufactured by Oerlikon Metco). Further, in the quenching gas flame spraying of Comparative Examples 3 and 4, the device of Patent Document 3 (JP 2010-22895A) was used.
（２）試験結果
上記試験によって鋼板表面に形成された溶射皮膜について、以下のような評価を行い、その性質を調査した。
(2) Test Results The thermal spray coating formed on the surface of the steel sheet by the above test was evaluated as follows, and its properties were investigated.
１）ＥＤＳ測定
溶射皮膜の成分分析としてＥＤＳ測定結果を表２に示す。表２より本発明である実施例１、２は酸素含有量が分析検出下限を以下であることに対して、比較例１、２、３、４は酸素の含有、すなわち酸化が確認される。よって実施例１、２は比較材１、２、３、４に比べ酸化が防止されているといえる。
1) EDS measurement Table 2 shows the EDS measurement results as a component analysis of the thermal spray coating. From Table 2, it is confirmed that in Examples 1 and 2 of the present invention, the oxygen content is below the lower limit of analysis and detection, whereas in Comparative Examples 1, 2, 3 and 4, the oxygen content, that is, the oxidation is confirmed. Therefore, it can be said that Examples 1 and 2 are prevented from being oxidized as compared with Comparative Materials 1, 2, 3, and 4.
２）ＸＲＤ測定
溶射における急冷効果の確認としてＮｉ基アモルファス合金溶射皮膜のＸＲＤ測定結果を図２に示す。本発明である実施例２と比較例４はアモルファス相特有のブロードなピークが検出されることに対して比較例２は結晶性を表す鋭いピーク、すなわち結晶化が確認される。よって実施例２は溶融材料が十分に急冷されたことによりアモルファス相を形成したといえる。
2) XRD measurement As confirmation of the quenching effect in thermal spraying, the XRD measurement result of the Ni-based amorphous alloy thermal spray coating is shown in FIG. In Example 2 and Comparative Example 4 which are the present invention, a broad peak peculiar to the amorphous phase is detected, whereas in Comparative Example 2, a sharp peak showing crystallinity, that is, crystallization is confirmed. Therefore, it can be said that in Example 2, the amorphous phase was formed by sufficiently quenching the molten material.
１ プラズマ噴射部
１Ａ プラズマ発生器
２ 二重円筒部
２Ａ 内筒体
２Ｂ 外筒体
３ 不活性ガス噴射部
３Ａ ガス通過路
３Ｂ 不活性ガス供給部
４ ガス供給部
５ 材料供給部
DESCRIPTION OF SYMBOLS 1 Plasma injection part 1A Plasma generator 2 Double cylinder part 2A Inner cylinder 2B Outer cylinder 3 Inert gas injection part 3A Gas passage 3B Inert gas supply part 4 Gas supply part 5 Material supply part
Claims (4)
前記プラズマ噴射部から噴射されるプラズマジェットを囲むように配置され、先端が開放された二重円筒部と、
前記二重円筒部の内筒内に不活性ガスを噴射する不活性ガス噴射部と、
前記二重円筒部の内筒内に溶射材料を供給する材料供給部と、
前記二重円筒部の外筒と内筒の間に不活性ガスを供給するガス供給部と、
を有するプラズマ溶射装置。 A plasma injection unit for injecting a plasma jet,
A double cylinder portion arranged so as to surround a plasma jet jetted from the plasma jetting portion and having an open tip,
An inert gas injection part for injecting an inert gas into the inner cylinder of the double cylindrical part,
A material supply section for supplying a thermal spray material into the inner cylinder of the double cylindrical section;
A gas supply unit for supplying an inert gas between the outer cylinder and the inner cylinder of the double cylindrical portion;
Plasma spraying apparatus having a.
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